CN116037551A - Cleaning method and cleaning system for carbon fiber carrier plate - Google Patents

Abstract

The invention provides a cleaning method and a cleaning system for a carbon fiber carrier plate, which belong to the technical field of solar cell manufacturing and comprise the following steps: placing a carbon fiber carrier plate on a carrier plate supporting frame; the grabbing mechanical arm lifts the support frame of the support plate and transmits the support frame to the alkaline washing tank for alkaline washing; placing the carbon fiber carrier plate subjected to alkali washing into a spraying groove through a grabbing manipulator for water washing; washing with water, and then placing into a pickling tank for pickling; placing the pickled carbon fiber plate into an overflow tank for water washing; and (5) after washing, conveying the dried product to a drying groove for drying. According to the method for cleaning the carbon fiber carrier plate, the grabbing manipulator lifts the carrier plate support frame into the alkaline washing tank to wash away surface impurities, and the grabbing manipulator automatically lifts the spraying tank to clean the liquid medicine and impurities on the surface of the carbon fiber carrier plate in a preliminary step; and (3) removing residual liquid medicine through a pickling tank, completely cleaning the carbon fiber carrier plate through an overflow tank, and finally drying. Through the operation of grabbing the manipulator, need not personnel work and be close to, both saved the manpower and guaranteed safety.

Description

Cleaning method and cleaning system for carbon fiber carrier plate

Technical Field

The invention belongs to the technical field of solar cell manufacturing, and particularly relates to a cleaning method and a cleaning system for a carbon fiber carrier plate.

Background

The current mainstream production expansion technology of solar cells is TOPCon technology, namely Tunnel Oxide Passivated Contact technology, which is a novel passivation contact technology, and the technology uses an ultrathin oxide layer and doped thin film silicon on the surface of the cell for passivation. The ultrathin silicon oxide reduces the surface state, keeps lower tunneling resistance, and the doped film silicon provides field passivation and selectively transmits carriers to form good passivation contact with the silicon substrate. TOPCon batteries are currently a development trend of high-efficiency N-type batteries.

TOPCon process route in addition to LPCVD (LPCVD-Low Pressure Chemical Vapor Deposition low pressure chemical vapor deposition) and PECVD (plasma enhanced chemical vapor deposition) routes, a PVD (Physical Vapor Deposition abbreviation, physical vapor deposition) route is also expanding at great speed. The PVD process comprises the following steps: texturing, boron diffusion, BSG & alkali polishing, PVD, BOE, ALD, front SiNx, back SiNx, printing and sintering, injection, test and sorting. After the carbon fiber carrier plate serving as the PVD tool is used for a certain number of times, a layer of Poly-Si is deposited on the surface of the carbon fiber carrier plate, and the carbon fiber carrier plate can be used only after being cleaned.

At present, the cleaning process of the carbon fiber carrier plate needs manual operation, and besides low efficiency, the cleaning process mainly has potential safety hazards, and corrosive acid is easily contacted when the carrier plate is placed in the liquid preparation process, so that personnel are injured.

Disclosure of Invention

The embodiment of the invention provides a cleaning method and a cleaning system for a carbon fiber carrier plate, which aim to reduce manual cleaning operation, reduce labor intensity, improve working efficiency and reduce potential safety hazards.

In order to achieve the above object, the present invention adopts the following technical scheme: provided is a method for cleaning a carbon fiber support plate, comprising the following steps:

placing a carbon fiber carrier plate to be cleaned on a carrier plate supporting frame;

the grabbing mechanical arm lifts the support frame of the support plate and transmits the support frame to the alkaline washing tank for alkaline washing;

placing the carbon fiber carrier plate subjected to alkali washing into a spraying groove through a grabbing manipulator for water washing;

washing the carbon fiber carrier plate with water, and then placing the carbon fiber carrier plate into a pickling tank for pickling;

placing the pickled carbon fiber plate into an overflow tank for water washing;

and (5) after washing, conveying the dried product to a drying groove for drying.

With reference to the first aspect, in a possible implementation manner, the alkali liquor in the alkali washing tank is sodium hydroxide solution, the concentration of sodium hydroxide is controlled to be 5-10%, the alkali washing time is 7200-8400S, and the temperature of the alkali liquor is controlled to be 70-80 ℃.

With reference to the first aspect, in a possible implementation manner, a liquid supplementing pipe is arranged on the alkaline washing tank, and each 900S of liquid supplementing pipe is 2L; the liquid is preheated and then fed.

With reference to the first aspect, in one possible implementation manner, the carbon fiber carrier plate is sprayed and washed in the spraying tank, and the washed liquid medicine is quickly discharged out of the tank body through a quick discharge port arranged at the bottom; and filling pure water, so that the carbon fiber carrier plate is soaked in water for cleaning.

With reference to the first aspect, in one possible implementation manner, the spraying time ranges from 300S to 600S, and the quick-drain time ranges from 25S to 35S; and (5) refilling pure water after the quick discharging is finished, wherein the soaking time is 7200-8400S.

With reference to the first aspect, in a possible implementation manner, the hydrochloric acid liquid is adopted to react with the alkali liquor remained on the carbon fiber carrier plate in the pickling tank, and the pickling soaking time is 7200-8400S; and 2L of fluid is replenished every 900S.

With reference to the first aspect, in a possible implementation manner, the overflow tank is cleaned by overflow soaking, after being filled with water, the overflow soaking is 3000-4000S, then 25-35S is quickly discharged, and the circulation is performed for 2-4 times; and detecting the pH value of the last cleaning water by using a pH test paper, and drying after the pH value is neutral.

With reference to the first aspect, in one possible implementation manner, the drying tank uses air shower and heating to dry and remove water and residual acid on the surface of the carbon fiber carrier plate, and the drying duration is 6500-7500S.

In a second aspect, the embodiment of the invention also provides a cleaning system for the carbon fiber carrier plate, which is used for the cleaning method and comprises an alkaline washing tank, a spraying tank, a pickling tank, an overflow tank, a drying tank, a carrier plate supporting frame and a grabbing manipulator which are sequentially arranged; a sliding rail is arranged above each groove, and the grabbing manipulator slides along the sliding rail; a lifting ring which is convenient for the grabbing manipulator to lift is arranged on the support frame of the carrier plate; the bottom of the alkaline washing tank is provided with a plurality of bubbling pipes and an alkaline liquor circulating pipeline, the alkaline liquor circulating pipeline is provided with a circulating pump, the inlet end of the alkaline liquor circulating pipeline is connected to the bottom of the alkaline washing tank, and the outlet end of the alkaline liquor circulating pipeline is connected to the upper side part of the alkaline washing tank; and heating wires are arranged around the alkaline washing tank.

With reference to the second aspect, in one possible implementation manner, a liquid supplementing pipe is arranged on the alkaline washing tank, and a heater is arranged between a liquid supplementing pump on the liquid supplementing pipe and the alkaline washing tank.

Compared with the prior art, the cleaning method and the cleaning system for the carbon fiber carrier plate have the beneficial effects that: firstly, a grabbing manipulator lifts the support frame of the support plate into an alkaline washing tank, surface impurities are washed off after reaction, the grabbing manipulator automatically lifts the spray tank after operation is completed, and the grabbing manipulator, the support frame of the support plate, and liquid medicine and impurities on the surfaces of the support frame of the carbon fiber support plate can be preliminarily washed clean; then the carbon fiber carrier plate is moved to a pickling tank for reaction to remove residual liquid medicine, and then the carbon fiber carrier plate is completely cleaned in an overflow tank, and finally the carbon fiber carrier plate is dried in a drying box. Through the operation of grabbing the manipulator, need not personnel work and be close to each cell body, both saved the manpower and guaranteed safety.

Drawings

Fig. 1 is a schematic structural diagram of a cleaning system for a carbon fiber carrier according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a bubbling tube according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a carrier support according to an embodiment of the present invention;

fig. 4 is a schematic top view of the carrier support shown in fig. 3;

reference numerals illustrate:

1. an alkaline washing tank; 11. a fluid supplementing pipe; 12. a heater; 13. a fluid supplementing pump; 14. a bubbling tube; 15. a liquid discharge pipe; 16. a circulation pump; 17. an alkali liquor circulation pipeline; 2. a spray tank; 21. a shower pipe; 22. a pure water pipe; 3. a pickling tank; 4. an overflow trough; 5. a drying tank; 51. an air duct; 6. a slide rail; 7. a grabbing manipulator; 8. a carrier support; 81. a guide groove.

Detailed Description

In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.

Referring to fig. 1, a method for cleaning a carbon fiber carrier plate according to the present invention will now be described. The cleaning method of the carbon fiber support plate comprises the following steps:

firstly, placing a carbon fiber carrier plate to be cleaned on a carrier plate supporting frame 8;

step two, the grabbing mechanical arm 7 lifts the support frame 8 of the support plate and transmits the support frame 8 to the alkaline washing tank 1 for alkaline washing;

step three, placing the carbon fiber carrier plate subjected to alkali washing into a spraying groove 2 through a grabbing manipulator 7 for water washing;

step four, placing the carbon fiber carrier plate into a pickling tank 3 for pickling after washing;

fifthly, placing the pickled carbon fiber boards into an overflow tank 4 for water washing;

step six, the water is washed clean and then is transported to a drying groove 5 for drying.

Compared with the prior art, the cleaning method and the cleaning system for the carbon fiber carrier plate have the beneficial effects that: firstly, the grabbing mechanical arm 7 lifts the support frame 8 of the carrier plate into the alkaline washing tank 1, impurities on the surface are washed off after the reaction, the grabbing mechanical arm 7 automatically lifts the spraying tank 2 after the operation is finished, and the grabbing mechanical arm 7, the support frame 8 of the carrier plate, liquid medicine on the surface of the carbon fiber carrier plate and the impurities can be primarily washed clean; then the carbon fiber carrier plate is moved to a pickling tank 3 for reaction to remove residual liquid medicine, and then the carbon fiber carrier plate is completely cleaned in an overflow tank 4, and finally the carbon fiber carrier plate is dried in a drying box. Through the operation of grabbing manipulator 7, need not personnel work and be close to each cell body, both saved the manpower and guaranteed safety.

According to the cleaning method provided by the invention, the controller and the display screen are configured, and the automatic operation button is pressed down on the system, so that the functions of automatically grabbing, conveying, automatically supplementing liquid and the like on the carbon fiber carrier plate can be realized, the functions of automatic cleaning and drying are realized, the cleaning effect is ensured, the operation intensity is reduced, and the safety risk of accidental injury caused by personnel contacting with acid and alkali is avoided.

According to the cleaning method provided by the invention, the carbon fiber support plate is immersed in the liquid medicine in the alkaline washing tank 1, the alkaline liquid in the alkaline washing tank 1 is sodium hydroxide solution, the concentration of sodium hydroxide is controlled to be 5-10%, the alkaline washing time is 7200-8400S, and the temperature of the alkaline liquid is controlled to be 70-80 ℃. Compared with the nitric acid cleaning method, the cleaning method provided by the invention can save a great deal of sewage treatment cost and has little environmental impact.

In some embodiments, referring to fig. 1, the alkaline washing tank 1 is provided with a liquid supplementing pipe 11, and liquid supplementing is carried out for every 900S by 2L; the liquid is preheated and then fed.

The alkaline washing tank 1 is provided with liquid medicines with different concentrations according to the requirements, and after the carbon fiber carrier plate is soaked in the alkaline washing tank 1, the chemical cleaning of the carbon fiber carrier plate is realized. This process is a process in which alkali and Poly-Si react, thereby removing Poly-Si attached to the carbon fiber support plate. The running time and the temperature of the alkaline washing can be adjusted, and the alkaline washing is set and completed in advance before running. For example, the concentration of sodium hydroxide in the alkali liquid medicine can be selected to be 6% and 8%, the time can be 7500S and 8000S, and the temperature can be selected to be 72 ℃ and 75 ℃.

In order to ensure the concentration stability of liquid medicine at different positions in the alkaline washing tank 1, a plurality of bubbling pipes 14 are arranged at the bottom of the alkaline washing tank, nitrogen is blown into the tank to uniformly mix alkaline liquid at any time, in addition, an alkaline liquid circulation pipeline 17 is arranged between the bottom and the upper side surface of the alkaline washing tank, and the liquid medicine returns to the tank body from the upper side part of the alkaline washing tank through the alkaline liquid circulation pipeline 17 from the bottom of the alkaline washing tank through a circulation pump 16 during operation, so that the uniformity of the cleaning effect is realized.

Optionally, the bubbling tube 14 is provided with a vent.

In order to adjust the temperature, heating wires are arranged around the side wall of the alkaline washing tank to heat the liquid medicine. With the progress of the reaction, the liquid is required to be replenished, 2L of the liquid is required to be replenished every 900S, and a heater 12 is arranged between a liquid replenishing pump 13 and the tank body to preheat the replenished alkali liquid so as to maintain the uniformity of the alkali liquid in the alkali washing tank.

The reaction equation is: 2naoh+si+h ₂ O＝NASiO ₃ +2H ₂ 。

In some embodiments, referring to fig. 1, the carbon fiber carrier plate is firstly sprayed and washed in the spraying tank 2, and the washed liquid medicine is quickly discharged out of the tank body through a quick discharge port arranged at the bottom; and filling pure water, so that the carbon fiber carrier plate is soaked in water for cleaning.

The spraying tank 2 has the functions of spraying and quick discharging, the spraying pipes 21 are arranged on two sides of the upper part of the spraying tank 2, and the spraying with larger pressure has the functions of flushing the carbon fiber carrier plate and grabbing the manipulator 7, so that residual alkali liquid medicine and pollutants on the surface can be flushed. The quick discharge port is arranged at the bottom of the spraying tank 2 body, and the function can quickly discharge the flushing liquid medicine out of the tank body through the quick discharge port and the liquid discharge pipe; after the quick-discharging washing is finished, pure water is refilled, the pure water pipe 22 can quickly fill the spraying tank 2 with pure water, so that the carbon fiber carrier plate is cleaned, and the carbon fiber carrier plate is continuously conveyed to the pickling tank 3 after the washing is finished.

In the spraying groove 2, the spraying time range is 300-600S, and the quick discharging time is 25-35S; and (5) refilling pure water after the quick discharging is finished, wherein the soaking time is 7200-8400S. The spraying time and soaking time of the tank can be adjusted. The spraying time can be selected from 350S, 400S, 460S, 500S, 580S, 600S, the quick discharging time is 30S, and the soaking time is 7500S, 8000S, 8400S, etc.

In order to maintain the uniformity of the liquid in the pickling tank 3, the pickling tank 3 may be provided with a bubbling pipe 14 and an acid liquid circulation line, similar to the alkaline tank 1, for disturbing the liquid in the pickling tank 3.

In some embodiments, referring to fig. 1, hydrochloric acid liquid is adopted in the pickling tank 3 to react with the residual alkali liquor on the carbon fiber carrier plate, so that the purpose of thoroughly removing the alkali residue is achieved, and the pickling soaking time is 7200-8400S; the liquid supplementing is needed along with the reaction and is carried out for 2L per 900S of pickling time. The liquid replenishing time and the liquid replenishing amount can be adjusted according to the parameters of the number and the area of the cleaned carbon fiber carrier plates, the concentration of the solution, the acid washing time and the like, for example, 1L for replenishing liquid per 500S operation, 1L for replenishing liquid per 600S operation, 2L for replenishing liquid per 700S operation and the like, and the liquid replenishing of alkali liquor can be adjusted similarly.

In some embodiments, referring to FIG. 1, overflow launder 4 is cleaned by overflow soaking, after being filled with water, overflow soaking is 3000-4000S, then rapid draining is 25-35S, and the cycle is 2-4 times; and the PH test paper is used for detecting the PH value of the last cleaning water, and the cleaning water is dried after being neutral, so that the consumption of manpower and material resources caused by unnecessary reworking can be reduced.

The overflow tank 4 has overflow and quick discharge functions, liquid overflows from the top of the overflow tank 4, and a quick discharge port is arranged at the bottom of the overflow tank 4 and is discharged through a liquid discharge pipe at the bottom; and a water supplementing pipe is arranged at the bottom or the side surface of the overflow groove 4, so that pure water can be continuously supplemented in the overflow process, and the overflow effect of the overflow groove 4 is maintained. The carbon fiber carrier plate placed in the overflow groove 4 is completely soaked in pure water, so that acid medicine liquid on the surface and in the carbon fiber carrier plate can be soaked out, and the aim of cleaning the carrier plate is fulfilled; this process may be repeated, for example, flooding with water 3600S followed by rapid draining 30S, and so on 3 times. After soaking, the PH test paper can be used for testing whether the residual pure water on the surface is neutral or not, so that the cleaning effect is judged, and the cleaning effect meets the preset requirement and then the cleaning effect is conveyed to the drying groove 5 for drying.

A plurality of overflow holes can be formed in the upper side wall of the overflow tank 4, and the liquid overflows from the overflow holes.

In some embodiments, referring to fig. 1, the drying tank 5 is used for drying and removing water and residual acid solution on the surface of the carbon fiber carrier plate by air shower and heating, and the drying time is 6500-7500S. Specifically, the upper inner side of the drying groove 5 is provided with an air pipe 51, and the air pipe 51 is provided with an air outlet hole, so that the carbon fiber carrier plate can be sprayed and dried. And a heating wire is wound in the wall of the drying groove 5, and the drying temperature in the drying groove 5 is adjusted.

In the foregoing embodiments, the descriptions of the embodiments are emphasized, and in part, not described or illustrated in any particular embodiment, reference is made to the related descriptions of other embodiments.

Based on the same inventive concept, the embodiment of the application also provides a cleaning system of a carbon fiber carrier plate, which is used for the cleaning method, and is shown in fig. 1 to 4, and comprises an alkaline washing tank 1, a spraying tank 2, a pickling tank 3, an overflow tank 4, a drying tank 5, a carrier plate supporting frame 8 and a grabbing manipulator 7 which are sequentially arranged; a sliding rail 6 is arranged above each groove, and a grabbing manipulator 7 slides along the sliding rail 6; a lifting ring which is convenient for the grabbing manipulator 7 to lift is arranged on the support frame 8 of the support plate; the bottom of the alkaline washing tank 1 is provided with a plurality of bubbling pipes 14 and an alkaline liquor circulating pipeline 17, the alkaline liquor circulating pipeline 17 is provided with a circulating pump 16, the inlet end of the alkaline liquor circulating pipeline 17 is connected to the bottom of the alkaline washing tank, and the outlet end of the alkaline liquor circulating pipeline 17 is connected to the upper side part of the alkaline washing tank; heating wires are arranged around the alkaline washing tank 1.

In order to ensure the temperature uniformity of the liquid in the alkaline washing tank and reduce the disturbance of the fed liquid to the temperature of the liquid in the tank body, the alkaline washing tank 1 is provided with a liquid feeding pipe 11, a heater 12 is arranged between a liquid feeding pump 13 on the liquid feeding pipe 11 and the alkaline washing tank 1, and the fed liquid is fed after being heated to be basically consistent with the temperature of the liquid in the alkaline washing tank 1.

The bottoms of the alkaline washing tank 1, the spraying tank 2, the pickling tank 3, the overflow tank 4 and the drying tank 5 are all provided with a liquid discharge pipe 15, and in fig. 1, the bottom of the alkaline washing tank 1 is only marked with the liquid discharge pipe 15, and other tank bottoms are also provided with liquid discharge pipes.

According to the cleaning system provided by the invention, the groove bodies can be arranged linearly or in a circular ring or elliptical ring, the sliding rail 6 is supported by the frame, the grabbing manipulator 7 can lift through the lifting sliding table, and the grabbing manipulator 7 conveys the carbon fiber carrier plate between the groove bodies through the sliding rail 6 and the lifting sliding table.

Optionally, as shown in fig. 3 and 4, a protective cover is arranged on each groove body, all groove bodies are covered in the protective cover, and an exhaust device is arranged on the protective cover, so that various waste gases can be exhausted.

The support frame 8 of the carrier plate is of a frame structure, a plurality of parallel guide grooves 81 are arranged on the side face of the support frame, a support groove is arranged at the bottom of the support frame, the guide grooves 81 are inserted at the edges of the two sides of the carbon fiber carrier plate, and the bottom of the support frame is inserted on the support groove; the carbon fiber carrier plates are arranged in rows and in parallel on the carrier plate supporting frame 8, so that a row of spraying pipes 21 are preferably arranged in the spraying groove 2 at two sides perpendicular to the carbon fiber carrier plates respectively, so that spraying is performed along the carbon fiber carrier plates, and the surfaces of the carbon fiber carrier plates can be sprayed cleanly; the arrangement of the air duct 51 in the drying tank 5 is arranged in the same way.

The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims (10)

1. A method for cleaning a carbon fiber support plate, comprising:

placing a carbon fiber carrier plate to be cleaned on a carrier plate supporting frame (8);

the grabbing mechanical arm (7) lifts the support frame (8) of the support plate and transmits the support frame to the alkaline washing tank (1) for alkaline washing;

the carbon fiber carrier plate subjected to alkali washing is placed into a spraying groove (2) through a grabbing manipulator (7) for washing;

washing the carbon fiber carrier plate with water, and then placing the carbon fiber carrier plate into a pickling tank (3) for pickling;

placing the pickled carbon fiber plate into an overflow tank (4) for water washing;

and (5) conveying the cleaned water to a drying groove (5) for drying.

2. The method for cleaning carbon fiber carrier plate according to claim 1, wherein the alkali liquor in the alkali washing tank (1) is sodium hydroxide solution, the concentration of sodium hydroxide is controlled to be 5-10%, the alkali washing time is 7200-8400S, and the temperature of the alkali liquor is controlled to be 70-80 ℃.

3. The method for cleaning the carbon fiber support plate according to claim 2, wherein the alkaline washing tank (1) is provided with a liquid supplementing pipe (11) for supplementing 2L of liquid every 900S; the liquid is preheated and then fed.

4. The method for cleaning the carbon fiber carrier plate according to claim 1, characterized in that the carbon fiber carrier plate is firstly sprayed and washed in the spraying groove (2), and the washed liquid medicine is quickly discharged out of the groove body through a quick discharge opening arranged at the bottom; and filling pure water, so that the carbon fiber carrier plate is soaked in water for cleaning.

5. The method for cleaning a carbon fiber support plate according to claim 4, wherein the spraying time is 300-600S and the quick-discharge time is 25-35S; and (5) refilling pure water after the quick discharging is finished, wherein the soaking time is 7200-8400S.

6. The method for cleaning the carbon fiber carrier plate according to claim 1, wherein the pickling tank (3) adopts hydrochloric acid liquid to react with the residual alkali liquor on the carbon fiber carrier plate, and the pickling soaking time is 7200-8400S; and 2L of fluid is replenished every 900S.

7. The method for cleaning the carbon fiber support plate according to claim 1, wherein the overflow tank (4) is overflow soaking and cleaning, after being filled with water, the overflow soaking is 3000-4000S, then the overflow soaking is quickly performed for 25-35S, and the cycle is performed for 2-4 times; and detecting the pH value of the last cleaning water by using a pH test paper, and drying after the pH value is neutral.

8. The method for cleaning the carbon fiber carrier plate according to claim 1, wherein the drying groove (5) adopts air shower and heating to dry and remove the water and the residual acid liquor on the surface of the carbon fiber carrier plate, and the drying time is 6500-7500S.

9. A cleaning system for a carbon fiber carrier plate, which is used for the cleaning method as claimed in any one of claims 1 to 8, and is characterized by comprising an alkaline washing tank (1), a spraying tank (2), a pickling tank (3), an overflow tank (4) and a drying tank (5), a carrier plate supporting frame (8) and a grabbing manipulator (7) which are sequentially arranged; a sliding rail (6) is arranged above each groove, and the grabbing mechanical arm (7) slides along the sliding rail (6); a lifting ring which is convenient for the grabbing manipulator (7) to lift is arranged on the support frame (8); the bottom of the alkaline washing tank (1) is provided with a plurality of bubbling pipes (14) and an alkaline liquor circulation pipeline (17), the alkaline liquor circulation pipeline (17) is provided with a circulation pump (16), the inlet end of the alkaline liquor circulation pipeline (17) is connected to the bottom of the alkaline washing tank (1), and the outlet end of the alkaline liquor circulation pipeline (17) is connected to the upper side part of the alkaline washing tank (1); and heating wires are arranged around the alkaline washing tank (1).

10. The cleaning system of the carbon fiber support plate according to claim 9, wherein a liquid supplementing pipe (11) is arranged on the alkaline washing tank (1), and a heater (12) is arranged between a liquid supplementing pump (13) on the liquid supplementing pipe (11) and the alkaline washing tank (1).

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