CN106449870A - PERC solar cell production line - Google Patents
PERC solar cell production line Download PDFInfo
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- CN106449870A CN106449870A CN201610827750.5A CN201610827750A CN106449870A CN 106449870 A CN106449870 A CN 106449870A CN 201610827750 A CN201610827750 A CN 201610827750A CN 106449870 A CN106449870 A CN 106449870A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 47
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 title claims abstract description 22
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 title claims abstract description 22
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 title claims abstract description 22
- 238000007599 discharging Methods 0.000 claims abstract description 119
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 71
- 238000000034 method Methods 0.000 claims abstract description 49
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 48
- 238000005530 etching Methods 0.000 claims abstract description 45
- 230000008569 process Effects 0.000 claims abstract description 39
- 238000000608 laser ablation Methods 0.000 claims abstract description 38
- 239000000463 material Substances 0.000 claims abstract description 34
- 238000002161 passivation Methods 0.000 claims abstract description 32
- 238000009792 diffusion process Methods 0.000 claims abstract description 26
- 238000012360 testing method Methods 0.000 claims abstract description 25
- 238000007650 screen-printing Methods 0.000 claims abstract description 15
- 238000005245 sintering Methods 0.000 claims abstract description 12
- 238000012546 transfer Methods 0.000 claims description 67
- 238000011068 loading method Methods 0.000 claims description 17
- 210000002268 wool Anatomy 0.000 claims description 17
- 235000008216 herbs Nutrition 0.000 claims description 16
- 238000009941 weaving Methods 0.000 claims description 15
- 238000013316 zoning Methods 0.000 claims description 9
- 238000003032 molecular docking Methods 0.000 claims description 5
- 239000004744 fabric Substances 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 8
- 238000004140 cleaning Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract 3
- 238000005516 engineering process Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 244000259191 Duranta erecta Species 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a PERC solar cell production line. The PERC solar cell production line comprises process equipment, automatic feeding and discharging equipment, automatic transmission equipment and a basket, wherein the automatic feeding and discharging equipment is used for circulating a material in a process, the automatic transmission equipment is used for circulating the material between processes, the process equipment comprises a texturing machine, a cleaning and etching machine, a laser ablation machine, a screen printing machine, a sintering furnace, a test sorting machine, a diffusion furnace, a square resistance detection machine, a back passivation plate PECVD (Plasma Enhanced Chemical Vapor Deposition) and a tubular PECVD, wherein the texturing machine, the cleaning and etching machine, the laser ablation machine, the screen printing machine, the sintering furnace and the test sorting machine are sequentially arranged along a longitudinal direction, the diffusion furnace, the square resistance detection machine, the back passivation plate PECVD and the tubular PECVD are arranged along a transverse direction, the diffusion furnace is arranged at a downstream of the texturing machine, the square resistance detection machine is arranged at an upstream of the cleaning and etching machine, the back passivation plate PECVD is arranged at a downstream of the cleaning and etching machine, and the tubular PECVD is arranged at an upstream of the laser ablation machine. The PERC solar cell production line has the advantages of reasonable layout, high automation, high production efficiency and the like, the product quality is ensured, and the production cost is reduced.
Description
Technical field
The present invention relates to solaode manufactures field, more particularly, to a kind of PERC manufacture of solar cells line.
Background technology
With the continuous progress of photovoltaic technology, photovoltaic cell just develops towards high efficiency, low cost direction, the aluminum back surface field of routine
Battery front side basically reaches bottleneck using SiN passivation efficiency, and the main flow that high efficiency, low cost battery becomes solaode development becomes
Gesture, PERC battery technology in various high-efficiency battery technology（I.e. passivation emitter rear-face contact, by rear surface of solar cell
Form passivation layer, improve conversion efficiency）, there is high conversion efficiency and conventional batteries processing compatibility are good, volume production cost reduces etc.
Advantage, has optimal industrial upgrading cost performance, and efficient PERC battery will become the optimum selection of photovoltaic cell of future generation.
Crystal silicon solar energy battery is the original paper that solar energy is changed into electric energy, and it is with silicon chip as backing material, at it
On carry out a series of manufacturing procedures after the product that obtains.PERC battery production technology flow process is：Surface wool manufacturing diffusion is mixed
Miscellaneous etch cleaner passivating back surface coating laser is opened membrane electrode printing high temperature and is burnt
Knot testing, sorting.Whole process is carried out in a clean Factory Building, is formed to last one procedure from the first procedure
Article one, complete production line.
At present although China's photovoltaic industry has been in world lead level, photovoltaic cell production capacity, more than 50GW, converts into
100MW production line more than 500 bar, accounts for more than the 70% of global provisioning amount, but more than 90% solaode manufacturing shop still falls within
The discrete type semi-automation workshop of labour intensive, major part also needs to manually participate in, and fraction achieves oneself within operation
Dynamicization, or indivedual automatization between operation and operation, the overall automatization of production line, intelligent level are not enough, artificial behaviour
Make impact battery quality, production cost cannot obtain effective management and control it is impossible to meet following high-efficiency battery process requirements.
Content of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, provides a kind of device layout rationally, automatically
The PERC manufacture of solar cells line that change degree is high, production efficiency is high, ensures product quality, reduce production cost.
For solving above-mentioned technical problem, the present invention employs the following technical solutions：
A kind of PERC manufacture of solar cells line, including process equipment, sets for the automatic loading/unloading of operation materials inside circulation
Standby, for the automatic conveying device of material circulation between operation and operation and for carrying the gaily decorated basket of material, described process equipment
Including along the wool-weaving machine being longitudinally sequentially arranged, etching machine, laser ablation machine, screen process press, sintering furnace, testing, sorting
Machine, and diffusion furnace, sheet resistance testing machine, back of the body passivation panel PECVD and tubular type PECVD transversely arranged, diffusion furnace is located at making herbs into wool
Machine downstream, located at etching machine upstream, back of the body passivation panel PECVD is located at etching machine downstream, tubular type for sheet resistance testing machine
PECVD is located at laser ablation machine upstream.
Improvement further as technique scheme：
Described automatic loading/unloading equipment includes rewinder, Liang Tai is divided into the making herbs into wool charging ＆ discharging machine of wool-weaving machine upstream and downstream, located at expansion
Scattered stove is divided into the etching loading and unloading of etching machine upstream and downstream near diffusion charging ＆ discharging machine, the Liang Tai of wool-weaving machine one end
Machine, located at the back of the body passivation panel PECVD near etching machine one end the back of the body passivation panel PECVD charging ＆ discharging machine, located at tubular type
The tubular type PECVD charging ＆ discharging machine near laser ablation machine one end for the PECVD, two groups of laser being divided into laser ablation machine upstream and downstream disappear
Melt charging ＆ discharging machine and the silk screen printing charging ＆ discharging machine located at screen process press upstream, the making herbs into wool charging ＆ discharging machine of upstream located at described fall
The downstream of piece machine.
The gaily decorated basket that described automatic conveying device is included between the making herbs into wool charging ＆ discharging machine located at downstream and diffusion charging ＆ discharging machine passes
Send band one, located at diffusion charging ＆ discharging machine and sheet resistance testing machine between slide rail transfer robot one, located at slide rail transfer robot
Gaily decorated basket conveyer belt two between one and the etching charging ＆ discharging machine of upstream, located at tubular type PECVD charging ＆ discharging machine away from tubular type
The slide rail transfer robot two of PECVD one end, located at the back of the body passivation panel PECVD charging ＆ discharging machine and slide rail transfer robot two between
Gaily decorated basket conveyer belt three and the RGV dolly located at wool-weaving machine side, gaily decorated basket conveyer belt one, gaily decorated basket conveyer belt two, slide rail carrying implement
The track of the slide rail of device people two and RGV dolly is all longitudinally arranged, and the slide rail of slide rail transfer robot one is transversely arranged, the gaily decorated basket
Conveyer belt three includes transversal zoning and the cunning with slide rail transfer robot two docked with back of the body passivation panel PECVD charging ＆ discharging machine
The longitudinal zoning of rail docking, is alignd with the etching charging ＆ discharging machine of rewinder and upstream respectively in the track two ends of RGV dolly.
Described automatic conveying device also includes multiple stage transfer robot, and transfer robot described in multiple stage is included located at rewinder
The transfer robot one and track of RGV dolly between, located at the carrying implement between diffusion charging ＆ discharging machine and gaily decorated basket conveyer belt one
Device people two, the transfer robot three between the etching charging ＆ discharging machine of gaily decorated basket conveyer belt two and upstream, located at downstream
Etching charging ＆ discharging machine and the back of the body passivation panel PECVD charging ＆ discharging machine between transfer robot four, located at slide rail conveying robot
Transfer robot five between the laser ablation charging ＆ discharging machine of the slide rail of people two and upstream and the laser ablation located at downstream are upper and lower
Transfer robot six between material machine and silk screen printing charging ＆ discharging machine.
Between the making herbs into wool charging ＆ discharging machine of upstream and the track of RGV dolly, the track of gaily decorated basket conveyer belt one and RGV dolly it
Between, between RGV trolley track and the etching charging ＆ discharging machine of upstream, the etching charging ＆ discharging machine in downstream and back of the body passivation flat board
It is respectively equipped with the gaily decorated basket between the laser ablation charging ＆ discharging machine between PECVD charging ＆ discharging machine and downstream and silk screen printing charging ＆ discharging machine
Cache shelf, is provided with ground caching platform between the track of RGV dolly and gaily decorated basket conveyer belt two, the slide rail of slide rail transfer robot two leans on
The side of nearly tubular type PECVD charging ＆ discharging machine is transversely sequentially provided with gaily decorated basket cache shelf and ground caching platform and this gaily decorated basket cache shelf
With ground caching platform is located between tubular type PECVD charging ＆ discharging machine and the laser ablation charging ＆ discharging machine of upstream.
Described tubular type PECVD and tubular type PECVD charging ＆ discharging machine are equipped with two and correspond setting, two tubular types
The longitudinally parallel arrangement of PECVD, it is upper and lower that each group laser ablation charging ＆ discharging machine includes two laser ablations being transversely arranged in parallel
Material machine, described screen process press, sintering furnace and testing, sorting machine are equipped with two, and described silk screen printing charging ＆ discharging machine is provided with two
And corresponding setting with two screen processes press, two screen processes press are transversely arranged in parallel, and two sintering furnaces are transversely
It is arranged in parallel, two testing, sorting machines are transversely arranged in parallel.
Described gaily decorated basket conveyer belt three includes dividing the lower floor carrying and being used for transmit the empty gaily decorated basket to divide for the upper strata transmitting the full gaily decorated basket
Band.
Compared with prior art, it is an advantage of the current invention that：PERC manufacture of solar cells line disclosed by the invention, to each
Process equipment carries out rational deployment, reduces space hold, improves the running efficiency of production line, utilizes automatic loading/unloading equipment to be used for
Material within operation circulates, utilizes automatic conveying device to circulate for the material between operation and operation, improves automatization
Degree and production efficiency, decrease artificial participate in and production cost is it is ensured that product quality.
Brief description
Fig. 1 is the structural representation of PERC manufacture of solar cells line of the present invention.
Fig. 2 is the structural representation to gaily decorated basket transmission belt three for the rewinder in the present invention.
Fig. 3 is the structural representation to testing, sorting machine for tubular type PECVD in the present invention
The each label of in figure represents：1st, process equipment；10th, wool-weaving machine；11st, etching machine；12nd, laser ablation machine；13rd, screen printing
Brush machine；14th, sintering furnace；15th, testing, sorting machine；16th, diffusion furnace；17th, sheet resistance testing machine；18th, back of the body passivation panel PECVD；19th, manage
Formula PECVD；2nd, automatic loading/unloading equipment；20th, rewinder；21st, making herbs into wool charging ＆ discharging machine；22nd, spread charging ＆ discharging machine；23rd, cleaning is carved
Erosion charging ＆ discharging machine；24th, back of the body passivation panel PECVD charging ＆ discharging machine；25th, tubular type PECVD charging ＆ discharging machine；26th, laser ablation loading and unloading
Machine；27th, silk screen printing charging ＆ discharging machine；3rd, automatic conveying device；30th, gaily decorated basket conveyer belt one；31st, slide rail transfer robot one；32、
Gaily decorated basket conveyer belt two；33rd, slide rail transfer robot two；34th, gaily decorated basket conveyer belt three；341st, transversal zoning；342nd, longitudinal zoning；
35th, RGV dolly；36th, transfer robot；361st, transfer robot one；362nd, transfer robot two；363rd, transfer robot three；
364th, transfer robot four；365th, transfer robot five；366th, transfer robot six；4th, gaily decorated basket cache shelf；5th, ground caching platform.
Specific embodiment
Below with reference to Figure of description and specific embodiment, the present invention is described in further details.
As shown in Figure 1 to Figure 3, the PERC manufacture of solar cells line of the present embodiment, including process equipment 1, is used for operation
Materials inside circulation automatic loading/unloading equipment 2, between operation and operation material circulation automatic conveying device 3 and be used for
Carry the gaily decorated basket of material（In figure is not shown）, process equipment 1 includes along the wool-weaving machine 10 being longitudinally sequentially arranged, etching machine
11st, laser ablation machine 12, screen process press 13, sintering furnace 14, testing, sorting machine 15, and transversely arrange diffusion furnace 16, side
Resistance testing machine 17, back of the body passivation panel PECVD 18 and tubular type PECVD19, diffusion furnace 16 is located at wool-weaving machine 10 downstream, sheet resistance testing machine
17 located at etching machine 11 upstream, back of the body passivation panel PECVD 18 located at etching machine 11 downstream, tubular type PECVD19 located at
Laser ablation machine 12 upstream, this PERC manufacture of solar cells line, each process equipment 1 is carried out with rational deployment, reduces space and account for
With improving the running efficiency of production line, utilizing automatic loading/unloading equipment 2 to pass for the material circulation within operation, using automatic
Transfer device 3 is used for the material circulation between operation and operation, improves automaticity and production efficiency, decreases artificial participation
With production cost it is ensured that product quality.Wherein it should be noted that the gaily decorated basket is carrier commonly used in the art, for inter process
The transmission of silicon chip, the automatic loading/unloading equipment 2 of this procedure receives the full gaily decorated basket from preceding working procedure, and the full gaily decorated basket enters on automatically
After the feeding port of blanking equipment 2, silicon chip flows into process equipment 1 successively, and then the empty gaily decorated basket is from the feed opening of automatic loading/unloading equipment 2
Out, return to one procedure, after finishing technique, the full gaily decorated basket of this procedure reaches the automatic loading/unloading of next process and sets
Standby 2 feeding port, realizes the material transmission of inter process, in the present embodiment, the gaily decorated basket is divided into two kinds, and one kind has corrosion resistance, is used for
Technical process before etching operation, a kind of is ordinary flower basket, for the technical process after etching, the first gaily decorated basket
Before being sent to etching operation, upstream is sent back to by RGV dolly 35, the second gaily decorated basket recycles between two procedures；
PECVD full name is Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical vapor deposition
Method.
In the present embodiment, automatic loading/unloading equipment 2 includes rewinder 20, Liang Tai is divided into the making herbs into wool of wool-weaving machine 10 upstream and downstream
Charging ＆ discharging machine 21, it is divided into etching machine located at the diffusion charging ＆ discharging machine 22 near wool-weaving machine 10 one end for the diffusion furnace 16, Liang Tai
The etching charging ＆ discharging machine 23 of 11 upstream and downstream, located at the back of the body passivation back of the body near etching machine 11 one end for the panel PECVD 18 blunt
Change panel PECVD charging ＆ discharging machine 24, located at tubular type PECVD19 the tubular type PECVD charging ＆ discharging machine near laser ablation machine 12 one end
25th, two groups of laser ablation charging ＆ discharging machines 26 being divided into laser ablation machine 12 upstream and downstream and the silk located at screen process press 13 upstream
Wire mark paints blanking machine 27, the making herbs into wool charging ＆ discharging machine 21 of upstream located at the downstream of rewinder 20, by setting to each automatic loading/unloading
Standby 2 carry out rational deployment, reduce space hold, are easy to the material transmission of adjacent inter process, improve running efficiency.
In the present embodiment, automatic conveying device 3 includes making herbs into wool charging ＆ discharging machine 21 and diffusion charging ＆ discharging machine 22 located at downstream
Between gaily decorated basket conveyer belt 1, located at diffusion charging ＆ discharging machine 22 and sheet resistance testing machine 17 between slide rail transfer robot one
31st, the gaily decorated basket conveyer belt 2 32 between the etching charging ＆ discharging machine 23 of slide rail transfer robot 1 and upstream, located at
Tubular type PECVD charging ＆ discharging machine 25 is away from the slide rail transfer robot 2 33 of tubular type PECVD19 one end, located at back of the body passivation flat board
Gaily decorated basket conveyer belt 3 34 between PECVD charging ＆ discharging machine 24 and slide rail transfer robot 2 33 and located at wool-weaving machine 10 side
RGV dolly 35, gaily decorated basket conveyer belt 1, gaily decorated basket conveyer belt 2 32, the slide rail of slide rail transfer robot 2 33 and RGV dolly 35
Track is all longitudinally arranged, and the slide rail of slide rail transfer robot 1 is transversely arranged, gaily decorated basket conveyer belt 3 34 includes blunt with the back of the body
Change the transversal zoning 341 of panel PECVD charging ＆ discharging machine 24 docking and indulging of docking with the slide rail of slide rail transfer robot 2 33
To a point band 342, alignd with the etching charging ＆ discharging machine 23 of rewinder 20 and upstream respectively in the track two ends of RGV dolly 35.
In the present embodiment, automatic conveying device 3 also includes multiple stage transfer robot 36, and multiple stage transfer robot 36 includes setting
Transfer robot 1 between the track of rewinder 20 and RGV dolly 35, located at diffusion charging ＆ discharging machine 22 and gaily decorated basket transmission
With the transfer robot 2 362 between one 30, between the etching charging ＆ discharging machine 23 of gaily decorated basket conveyer belt 2 32 and upstream
Transfer robot 3 363, the etching charging ＆ discharging machine 23 located at downstream and the back of the body passivation panel PECVD charging ＆ discharging machine 24 between
The laser ablation charging ＆ discharging machine 26 of transfer robot 4 364, the slide rail located at slide rail transfer robot 2 33 and upstream between
Transfer robot 5 365 and the laser ablation charging ＆ discharging machine 26 located at downstream and silk screen printing charging ＆ discharging machine 27 between remove
Fortune robot 6 366, realizes the material transmission between each automatic conveying device 3 using transfer robot 36, further increases
Automatization, intelligence degree, participate in, it is ensured that product quality and production efficiency, reducing production cost substantially without artificial.
In the present embodiment, between the making herbs into wool charging ＆ discharging machine 21 of upstream and the track of RGV dolly 35, gaily decorated basket conveyer belt 1 and
Between the track of RGV dolly 35, between RGV dolly 35 track and the etching charging ＆ discharging machine 23 of upstream, the cleaning in downstream carves
The laser ablation charging ＆ discharging machine 26 between erosion charging ＆ discharging machine 23 and back of the body passivation panel PECVD charging ＆ discharging machine 24 and downstream and silk screen
It is respectively equipped with gaily decorated basket cache shelf 4 between printing charging ＆ discharging machine 27, be provided between the track of RGV dolly 35 and gaily decorated basket conveyer belt 2 32
Ground caches platform 5, and the slide rail of slide rail transfer robot 2 33 transversely sets successively near the side of tubular type PECVD charging ＆ discharging machine 25
There are gaily decorated basket cache shelf 4 and ground caching platform 5 and this gaily decorated basket cache shelf 4 and ground caching platform 5 are located at tubular type PECVD charging ＆ discharging machine
Between 25 and the laser ablation charging ＆ discharging machine 26 of upstream, it is provided with gaily decorated basket cache shelf 4 and ground caching platform 5 can ensure that production section
Clap, it is to avoid when single device breaks down, affect the operation of whole production line.
Wherein：Gaily decorated basket conveyer belt 1 is responsible for for the full gaily decorated basket on the making herbs into wool charging ＆ discharging machine 21 in downstream being transported to diffusion up and down
The front end of material machine 22；
The material that transfer robot 1 is responsible between the making herbs into wool charging ＆ discharging machine 21 of RGV35 dolly, rewinder 20 and upstream is removed
Fortune；
Transfer robot 2 362 is responsible for gaily decorated basket conveyer belt 1, corresponding gaily decorated basket cache shelf 4, is spread between charging ＆ discharging machine 22
Material handling, the circle of in figure represents operating area and slide rail transfer robot 1, the slide rail conveying robot of each conveying robot 36
Operating area during a certain position on people 2 33 slide rail.
Slide rail transfer robot 1 is responsible between diffusion charging ＆ discharging machine 22, sheet resistance testing machine 17 and gaily decorated basket conveyer belt 2 32
Material handling；
Transfer robot 3 363 is responsible for gaily decorated basket conveyer belt 2 32, corresponding gaily decorated basket cache shelf 4, the etching loading and unloading of upstream
Machine 23, corresponding ground cache the material handling between platform 5 and RGV dolly 35；
RGV dolly 35 is responsible for delivering to the empty gaily decorated basket at slide rail transfer robot 1；
Transfer robot 4 364 is responsible for etching charging ＆ discharging machine 23, corresponding gaily decorated basket cache shelf 4 and the back of the body passivation flat board in downstream
Material handling between PECVD charging ＆ discharging machine 24.
Gaily decorated basket conveyer belt 3 34 is divided into upper and lower two-layer, and the full gaily decorated basket transports from upper strata, and the empty gaily decorated basket is from lower floor's transport so that the gaily decorated basket
Conveyer belt 3 34 is also equipped with the function of caching simultaneously, and transversal zoning 341 will carry on the back the full flower on passivation panel PECVD charging ＆ discharging machine 24
Basket is sent to the front end of tubular type PECVD charging ＆ discharging machine 25 through longitudinal zoning 342, by the sky flower before tubular type PECVD charging ＆ discharging machine 25
Basket is sent to back of the body passivation panel PECVD charging ＆ discharging machine 24.
Slide rail transfer robot 2 33 is responsible for gaily decorated basket conveyer belt 3 34, tubular type PECVD19, corresponding gaily decorated basket cache shelf 4, right
The ground answered caches the material handling between platform 5；
Transfer robot 5 365 is responsible for corresponding gaily decorated basket cache shelf 4, corresponding ground caches platform 5, the laser ablation of upstream is upper and lower
Material handling between material machine 26.
Transfer robot 6 366 is responsible for laser ablation charging ＆ discharging machine 26, corresponding gaily decorated basket cache shelf 4 and the screen printing in downstream
Paint the material handling between blanking machine 27.
In the present embodiment, tubular type PECVD19 and tubular type PECVD charging ＆ discharging machine 25 are equipped with two and correspond setting,
Two tubular types PECVD19 longitudinally parallel arrangements, each group laser ablation charging ＆ discharging machine 26 includes two and is transversely arranged in parallel
Laser ablation charging ＆ discharging machine 26, screen process press 13, sintering furnace 14 and testing, sorting machine 15 are equipped with two, and silk screen printing is upper and lower
Material machine 27 is provided with two and corresponds setting, two screen process press 13 transversely parallel cloth with two screen processes press 13
Put, two sintering furnaces 14 are transversely arranged in parallel, two testing, sorting machines 15 are transversely arranged in parallel, part processing equipment 1 and
Corresponding automatic loading/unloading equipment 2 arranges two, so that the production capacity of each process equipment 1 on production line is mutually matched, at utmost carries
Rise the production efficiency of production line.
Although the present invention is disclosed above with preferred embodiment, but it is not limited to the present invention.Any it is familiar with ability
The technical staff in domain, in the case of without departing from technical solution of the present invention scope, can be utilized the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible variations and modification, or the Equivalent embodiments being revised as equivalent variations.Therefore, every
Without departing from the content of technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments,
Equivalent variations and modification, all should fall in the range of technical solution of the present invention protection.
Claims (7)
1. a kind of PERC manufacture of solar cells line, including process equipment（1）, for operation materials inside circulation automatically upper and lower
Material equipment（2）, between operation and operation material circulation automatic conveying device（3）And for carrying the gaily decorated basket of material, its
It is characterised by：Described process equipment（1）Including along the wool-weaving machine being longitudinally sequentially arranged（10）, etching machine（11）, laser disappears
Melt machine（12）, screen process press（13）, sintering furnace（14）, testing, sorting machine（15）, and the diffusion furnace transversely arranged（16）, side
Resistance testing machine（17）, the back of the body passivation panel PECVD（18）With tubular type PECVD（19）, diffusion furnace（16）Located at wool-weaving machine（10）Downstream,
Sheet resistance testing machine（17）Located at etching machine（11）Upstream, back of the body passivation panel PECVD（18）Located at etching machine（11）Under
Trip, tubular type PECVD（19）Located at laser ablation machine（12）Upstream.
2. PERC manufacture of solar cells line according to claim 1 it is characterised in that：Described automatic loading/unloading equipment
（2）Including rewinder（20）, two be divided into wool-weaving machine（10）The making herbs into wool charging ＆ discharging machine of upstream and downstream（21）, located at diffusion furnace（16）
Near wool-weaving machine（10）The diffusion charging ＆ discharging machine of one end（22）, two be divided into etching machine（11）The etching of upstream and downstream
Charging ＆ discharging machine（23）, located at the back of the body passivation panel PECVD（18）Near etching machine（11）On the back of the body passivation panel PECVD of one end
Blanking machine（24）, located at tubular type PECVD（19）Near laser ablation machine（12）The tubular type PECVD charging ＆ discharging machine of one end（25）, two
Group is divided into laser ablation machine（12）The laser ablation charging ＆ discharging machine of upstream and downstream（26）And located at screen process press（13）Upstream
Silk screen printing charging ＆ discharging machine（27）, the making herbs into wool charging ＆ discharging machine of upstream（21）Located at described rewinder（20）Downstream.
3. PERC manufacture of solar cells line according to claim 2 it is characterised in that：Described automatic conveying device（3）
Including the making herbs into wool charging ＆ discharging machine located at downstream（21）With diffusion charging ＆ discharging machine（22）Between gaily decorated basket conveyer belt one（30）, located at expansion
Scattered charging ＆ discharging machine（22）With sheet resistance testing machine（17）Between slide rail transfer robot one（31）, located at slide rail transfer robot one
（31）Etching charging ＆ discharging machine with upstream（23）Between gaily decorated basket conveyer belt two（32）, located at tubular type PECVD charging ＆ discharging machine
（25）Away from tubular type PECVD（19）The slide rail transfer robot two of one end（33）, located at the back of the body passivation panel PECVD charging ＆ discharging machine
（24）With slide rail transfer robot two（33）Between gaily decorated basket conveyer belt three（34）, and located at wool-weaving machine（10）The RGV of side is little
Car（35）, gaily decorated basket conveyer belt one（30）, gaily decorated basket conveyer belt two（32）, slide rail transfer robot two（33）Slide rail and RGV dolly
（35）Track all longitudinally arranged, slide rail transfer robot one（31）Slide rail transversely arrange, gaily decorated basket conveyer belt three（34）
It is passivated panel PECVD charging ＆ discharging machine including with the back of the body（24）The transversal zoning of docking（341）And with slide rail transfer robot two
（33）Slide rail docking longitudinal zoning（342）, RGV dolly（35）Track two ends respectively with rewinder（20）Clear with upstream
Wash etching charging ＆ discharging machine（23）Alignment.
4. PERC manufacture of solar cells line according to claim 3 it is characterised in that：Described automatic conveying device（3）
Also include multiple stage transfer robot（36）, transfer robot described in multiple stage（36）Including located at rewinder（20）With RGV dolly
（35）Track between transfer robot one（361）, located at diffusion charging ＆ discharging machine（22）With gaily decorated basket conveyer belt one（30）Between
Transfer robot two（362）, located at gaily decorated basket conveyer belt two（32）Etching charging ＆ discharging machine with upstream（23）Between remove
Fortune robot three（363）, located at the etching charging ＆ discharging machine in downstream（23）With back of the body passivation panel PECVD charging ＆ discharging machine（24）It
Between transfer robot four（364）, located at slide rail transfer robot two（33）Slide rail and upstream laser ablation charging ＆ discharging machine
（26）Between transfer robot five（365）, and the laser ablation charging ＆ discharging machine located at downstream（26）With silk screen printing loading and unloading
Machine（27）Between transfer robot six（366）.
5. PERC manufacture of solar cells line according to claim 4 it is characterised in that：The making herbs into wool charging ＆ discharging machine of upstream
（21）With RGV dolly（35）Track between, gaily decorated basket conveyer belt one（30）With RGV dolly（35）Track between, RGV dolly
（35）The etching charging ＆ discharging machine of track and upstream（23）Between, the etching charging ＆ discharging machine in downstream（23）Flat with back of the body passivation
Plate PECVD charging ＆ discharging machine（24）Between and downstream laser ablation charging ＆ discharging machine（26）With silk screen printing charging ＆ discharging machine（27）It
Between be respectively equipped with gaily decorated basket cache shelf（4）, RGV dolly（35）Track and gaily decorated basket conveyer belt two（32）Between be provided with ground caching platform
（5）, slide rail transfer robot two（33）Slide rail near tubular type PECVD charging ＆ discharging machine（25）Side be transversely sequentially provided with flower
Basket cache shelf（4）Cache platform with ground（5）, and this gaily decorated basket cache shelf（4）Cache platform with ground（5）Upper and lower positioned at tubular type PECVD
Material machine（25）Laser ablation charging ＆ discharging machine with upstream（26）Between.
6. PERC manufacture of solar cells line according to claim 5 it is characterised in that：Described tubular type PECVD（19）With
Tubular type PECVD charging ＆ discharging machine（25）It is equipped with two and correspond setting, two tubular types PECVD（19）Longitudinally parallel cloth
Put, each group laser ablation charging ＆ discharging machine（26）Including two laser ablation charging ＆ discharging machines being transversely arranged in parallel（26）, described
Screen process press（13）, sintering furnace（14）With testing, sorting machine（15）It is equipped with two, described silk screen printing charging ＆ discharging machine（27）
Be provided with two and with two screen processes press（13）Correspond setting, two screen processes press（13）Transversely it is arranged in parallel,
Two sintering furnaces（14）Transversely it is arranged in parallel, two testing, sorting machines（15）Transversely it is arranged in parallel.
7. the PERC manufacture of solar cells line according to any one of claim 3 to 6 it is characterised in that：The described gaily decorated basket
Conveyer belt three（34）Divide including the upper strata for transmitting the full gaily decorated basket and carry and divide band for transmitting the lower floor of the empty gaily decorated basket.
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|---|---|---|---|
| CN201610827750.5A CN106449870A (en) | 2016-09-14 | 2016-09-14 | PERC solar cell production line |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610827750.5A CN106449870A (en) | 2016-09-14 | 2016-09-14 | PERC solar cell production line |
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| CN201610827750.5A Pending CN106449870A (en) | 2016-09-14 | 2016-09-14 | PERC solar cell production line |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106784169A (en) * | 2017-03-30 | 2017-05-31 | 常州比太科技有限公司 | Dry-wet integrated machine and production line |
| CN106876527A (en) * | 2017-03-30 | 2017-06-20 | 江西比太科技有限公司 | Aggregation type dry method fluff making device and production line |
| CN107749405A (en) * | 2017-10-25 | 2018-03-02 | 无锡琨圣科技有限公司 | A kind of texturing device mechanical arm |
| CN108878336A (en) * | 2018-06-28 | 2018-11-23 | 君泰创新（北京）科技有限公司 | Solar battery sheet gaily decorated basket transportation system and method |
| CN109360868A (en) * | 2018-11-15 | 2019-02-19 | 浙江艾能聚光伏科技股份有限公司 | A kind of machining production line of solar battery sheet |
| CN112186077A (en) * | 2020-10-20 | 2021-01-05 | 湖南红太阳光电科技有限公司 | Intelligent manufacturing control system for whole solar cell factory |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102544242A (en) * | 2012-03-19 | 2012-07-04 | 常州天华新能源科技有限公司 | Intelligentized automatic production line for crystalline silicon photovoltaic component |
| US20140261666A1 (en) * | 2013-03-13 | 2014-09-18 | Applied Materials, Inc. | Methods of manufacturing a low cost solar cell device |
| CN104362217A (en) * | 2014-10-27 | 2015-02-18 | 深圳市鑫明光实业有限公司 | Photovoltaic panel production process and production line |
| CN204732429U (en) * | 2015-07-03 | 2015-10-28 | 陈�光 | A kind of production equipment of crystal silicon solar batteries sheet |
| CN105489709A (en) * | 2016-01-20 | 2016-04-13 | 上海大族新能源科技有限公司 | PERC solar cell and preparation method thereof |
| CN105914256A (en) * | 2016-04-19 | 2016-08-31 | 晋能清洁能源科技有限公司 | Manufacturing method for PERC crystalline silicon solar cell |
-
2016
- 2016-09-14 CN CN201610827750.5A patent/CN106449870A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102544242A (en) * | 2012-03-19 | 2012-07-04 | 常州天华新能源科技有限公司 | Intelligentized automatic production line for crystalline silicon photovoltaic component |
| US20140261666A1 (en) * | 2013-03-13 | 2014-09-18 | Applied Materials, Inc. | Methods of manufacturing a low cost solar cell device |
| CN104362217A (en) * | 2014-10-27 | 2015-02-18 | 深圳市鑫明光实业有限公司 | Photovoltaic panel production process and production line |
| CN204732429U (en) * | 2015-07-03 | 2015-10-28 | 陈�光 | A kind of production equipment of crystal silicon solar batteries sheet |
| CN105489709A (en) * | 2016-01-20 | 2016-04-13 | 上海大族新能源科技有限公司 | PERC solar cell and preparation method thereof |
| CN105914256A (en) * | 2016-04-19 | 2016-08-31 | 晋能清洁能源科技有限公司 | Manufacturing method for PERC crystalline silicon solar cell |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106784169A (en) * | 2017-03-30 | 2017-05-31 | 常州比太科技有限公司 | Dry-wet integrated machine and production line |
| CN106876527A (en) * | 2017-03-30 | 2017-06-20 | 江西比太科技有限公司 | Aggregation type dry method fluff making device and production line |
| CN106784169B (en) * | 2017-03-30 | 2019-03-19 | 常州比太科技有限公司 | Dry-wet integrated machine and production line |
| CN106876527B (en) * | 2017-03-30 | 2019-07-19 | 江西比太科技有限公司 | Aggregation type dry method fluff making device and production line |
| CN107749405A (en) * | 2017-10-25 | 2018-03-02 | 无锡琨圣科技有限公司 | A kind of texturing device mechanical arm |
| CN107749405B (en) * | 2017-10-25 | 2020-05-05 | 无锡琨圣科技有限公司 | Mechanical arm of texturing machine |
| CN108878336A (en) * | 2018-06-28 | 2018-11-23 | 君泰创新（北京）科技有限公司 | Solar battery sheet gaily decorated basket transportation system and method |
| CN109360868A (en) * | 2018-11-15 | 2019-02-19 | 浙江艾能聚光伏科技股份有限公司 | A kind of machining production line of solar battery sheet |
| CN109360868B (en) * | 2018-11-15 | 2020-01-14 | 浙江艾能聚光伏科技股份有限公司 | Processing production line of solar cell |
| CN112186077A (en) * | 2020-10-20 | 2021-01-05 | 湖南红太阳光电科技有限公司 | Intelligent manufacturing control system for whole solar cell factory |
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