CN116018464A - 真空泵 - Google Patents
真空泵 Download PDFInfo
- Publication number
- CN116018464A CN116018464A CN202180053111.7A CN202180053111A CN116018464A CN 116018464 A CN116018464 A CN 116018464A CN 202180053111 A CN202180053111 A CN 202180053111A CN 116018464 A CN116018464 A CN 116018464A
- Authority
- CN
- China
- Prior art keywords
- gap
- side stator
- vacuum pump
- axial direction
- gap portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims abstract description 44
- 238000010438 heat treatment Methods 0.000 claims abstract description 35
- 230000002093 peripheral effect Effects 0.000 claims description 21
- 238000011144 upstream manufacturing Methods 0.000 claims description 11
- 238000012423 maintenance Methods 0.000 abstract description 8
- 239000006227 byproduct Substances 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 100
- 238000000034 method Methods 0.000 description 58
- 230000008569 process Effects 0.000 description 57
- 125000006850 spacer group Chemical group 0.000 description 18
- 230000003321 amplification Effects 0.000 description 15
- 238000003199 nucleic acid amplification method Methods 0.000 description 15
- 238000012546 transfer Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- 238000001514 detection method Methods 0.000 description 11
- 238000004804 winding Methods 0.000 description 11
- 230000008021 deposition Effects 0.000 description 8
- 230000005284 excitation Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 229910052742 iron Inorganic materials 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- YNAAFGQNGMFIHH-UHFFFAOYSA-N ctk8g8788 Chemical compound [S]F YNAAFGQNGMFIHH-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5826—Cooling at least part of the working fluid in a heat exchanger
- F04D29/5833—Cooling at least part of the working fluid in a heat exchanger flow schemes and regulation thereto
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Electrophonic Musical Instruments (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020-152347 | 2020-09-10 | ||
| JP2020152347A JP2022046347A (ja) | 2020-09-10 | 2020-09-10 | 真空ポンプ |
| PCT/JP2021/032481 WO2022054717A1 (ja) | 2020-09-10 | 2021-09-03 | 真空ポンプ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116018464A true CN116018464A (zh) | 2023-04-25 |
Family
ID=80631800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180053111.7A Pending CN116018464A (zh) | 2020-09-10 | 2021-09-03 | 真空泵 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20240011495A1 (ja) |
| EP (1) | EP4212729A1 (ja) |
| JP (1) | JP2022046347A (ja) |
| KR (1) | KR20230062812A (ja) |
| CN (1) | CN116018464A (ja) |
| IL (1) | IL300575A (ja) |
| WO (1) | WO2022054717A1 (ja) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0646220B1 (de) * | 1992-06-19 | 1997-01-08 | Balzers und Leybold Deutschland Holding Aktiengesellschaft | Gasreibungsvakuumpumpe |
| DE19702456B4 (de) | 1997-01-24 | 2006-01-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| JP6735058B2 (ja) * | 2013-07-31 | 2020-08-05 | エドワーズ株式会社 | 真空ポンプ |
| JP6484919B2 (ja) * | 2013-09-24 | 2019-03-20 | 株式会社島津製作所 | ターボ分子ポンプ |
| JP7048391B2 (ja) * | 2018-03-30 | 2022-04-05 | エドワーズ株式会社 | 真空ポンプ |
-
2020
- 2020-09-10 JP JP2020152347A patent/JP2022046347A/ja active Pending
-
2021
- 2021-09-03 EP EP21866676.6A patent/EP4212729A1/en active Pending
- 2021-09-03 KR KR1020237005341A patent/KR20230062812A/ko unknown
- 2021-09-03 IL IL300575A patent/IL300575A/en unknown
- 2021-09-03 CN CN202180053111.7A patent/CN116018464A/zh active Pending
- 2021-09-03 WO PCT/JP2021/032481 patent/WO2022054717A1/ja active Application Filing
- 2021-09-03 US US18/042,004 patent/US20240011495A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2022046347A (ja) | 2022-03-23 |
| EP4212729A1 (en) | 2023-07-19 |
| US20240011495A1 (en) | 2024-01-11 |
| KR20230062812A (ko) | 2023-05-09 |
| IL300575A (en) | 2023-04-01 |
| WO2022054717A1 (ja) | 2022-03-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |