CN116006464A - Special air-cooled Roots vacuum pump - Google Patents
Special air-cooled Roots vacuum pump Download PDFInfo
- Publication number
- CN116006464A CN116006464A CN202310054755.9A CN202310054755A CN116006464A CN 116006464 A CN116006464 A CN 116006464A CN 202310054755 A CN202310054755 A CN 202310054755A CN 116006464 A CN116006464 A CN 116006464A
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- oil
- shell
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- fixed
- bearing
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- 239000003921 oil Substances 0.000 claims abstract description 83
- 238000007789 sealing Methods 0.000 claims abstract description 26
- 238000001816 cooling Methods 0.000 claims abstract description 12
- 239000010687 lubricating oil Substances 0.000 claims abstract description 10
- 230000003068 static effect Effects 0.000 claims abstract description 5
- 230000007246 mechanism Effects 0.000 claims description 21
- 230000000903 blocking effect Effects 0.000 claims description 19
- 238000002955 isolation Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 238000003825 pressing Methods 0.000 claims description 10
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 2
- 230000008961 swelling Effects 0.000 claims 1
- 238000012423 maintenance Methods 0.000 abstract description 3
- 230000008439 repair process Effects 0.000 abstract description 2
- 238000005461 lubrication Methods 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009837 dry grinding Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The invention discloses a special air-cooled Roots vacuum pump, and relates to the technical field of vacuum pumps, wherein a shell, an end cover and an oil tank are fixed by bolts, and the two are arbitrarily connected with each other and sealed by a shell sealing ring; the pressure between the oil tank and the shell is balanced by a pressure balance pipe; the driven rotor shaft and the driving rotor shaft respectively penetrate out of the center of the bearing box, the internal seals of the equipment are static seals, and the bearings are lubricated by lubricating oil, so that the running speed of the equipment can be increased, and the service efficiency of the equipment is improved. The inside of the equipment is sealed in a contactless way, and an air cooling structure is adopted, so that the use, maintenance and repair cost of the equipment is reduced.
Description
Technical Field
The invention relates to the technical field of vacuum pumps, in particular to a special air-cooled Roots vacuum pump.
Background
First, with the development of technology, the application of vacuum obtaining equipment is more widely developed, and a Roots vacuum pump is one of the most widely used equipment in the vacuum obtaining equipment, and generally, the Roots vacuum pump is cooled by adopting a refrigerant. However, for some special working conditions which do not allow the refrigerant to be used and have certain leakage rate requirements, the special working conditions have certain requirements on service life, so that the maintenance times are reduced as much as possible, and the requirements on vulnerable parts in the equipment are very high. At present, in order to enable a vacuum chamber to keep an oil-free state, the Roots vacuum pump needs to be sealed between a rotating shaft and an oil tank, a sealing structure is either a skeleton oil seal or a mechanical seal, the higher the rotating speed is, the higher the requirement on lubrication is, the higher the requirement on sealing materials is when grease lubrication is adopted, all sealing surfaces of the sealing are required to be lubricated, or dry grinding phenomenon is easy to occur, so that sealing failure is caused, and a clean space is damaged. Meanwhile, because any dynamic seal has leakage, the risk is very high for the working condition of equipment with the leakage rate requirement. The general equipment structure is shown in the traditional structure schematic diagram of FIG. 3, and comprises a vacuum cavity 30, a combined seal 31, a framework oil seal 32, a bearing 33, an oil thrower 34, a gear 35, a mechanical seal 36, a coupling 37, a motor connecting frame 38 and a motor 39; the isolation between the vacuum chamber 30 and the atmosphere is completely completed by the combined seal 31, the framework oil seal 32 and the mechanical seal 36, but the seals all need lubrication, the lubrication oil quantity can fail rapidly when the requirements are not met, and the lubrication oil quantity is limited by the structure and the space, and some places cannot be lubricated by oil, so that the increase of the rotating speed can be limited by adopting lubricating grease. The three types of seals have certain leakage, namely that the oil in the oil tank cannot enter the vacuum cavity, the clean requirement of the vacuum cavity cannot be met, and the leakage rate requirement cannot be met.
Secondly, in the mechanical industry, some working conditions have certain special requirements on equipment, for example: fluorine-containing gas in the material, etc. Especially under vacuum condition, the equipment rotation speed is high, so that the pumping speed is high, but the unsafe factors of the refrigerant are not needed, meanwhile, the material needs to be recovered, and for better material recovery, the material flowing through position cannot be polluted by oil, especially in the vacuum industry, under the action of negative pressure, the lubricating oil in the equipment can go into the cavity of the equipment, the purity of the material is influenced, and meanwhile, the main performance parameters of the equipment are also influenced. The air or other gases outside the equipment enter the cavity of the equipment to react, so that the materials become more serious and explosion occurs.
Disclosure of Invention
The invention aims to provide a special air-cooled Roots vacuum pump, which solves the following technical problems: the technical problems that in the conventional scheme, the cooling and leakage rate of the Roots pump are required to a certain extent, the cooling is not allowed to be carried out by adopting a refrigerant, and meanwhile, the leakage rate of the vacuum equipment is required to a certain extent are solved, but the conventional production cost is high and the limitation is caused are solved.
The aim of the invention can be achieved by the following technical scheme:
the special air-cooled Roots vacuum pump comprises an air inlet, a driven rotor shaft, a driving rotor shaft, an air outlet, an expansion sleeve, a gear, a bearing box, a round nut, a bearing, an oil blocking mechanism, a shell, an end cover, a shell sealing ring, a pressure balance pipe, an oil thrower, a magnetic coupling sealing ring, an axial limiting sleeve, an inner magnetic rotor, an axial end pressing plate, a separation sleeve, an outer magnetic rotor, a connecting frame, a motor and an oil tank; the shell, the end cover and the oil tank are fixed by bolts, and the two parts which are arbitrarily connected with each other are sealed by a shell sealing ring; the pressure between the oil tank and the shell is balanced by a pressure balance pipe; the driven rotor shaft and the driving rotor shaft respectively penetrate out of the center of the bearing box, the oil thrower is fixed on the driving rotor shaft through an axial limit sleeve, an inner magnetic rotor and an axial end pressing plate by bolts, the inner magnetic rotor is arranged on the driving rotor shaft, the inner magnetic rotor is fixed on the driving rotor shaft through the axial end pressing plate and a round nut, the isolation sleeve is fixed on the oil tank through a motor connecting frame, the isolation sleeve and the oil tank are sealed by a magnetic coupling sealing ring, the outer magnetic rotor is fixed on the motor and fixed through the connecting frame, and therefore the relative position between the isolation sleeve and the inner magnetic rotor is determined; the end parts of the driving rotor shaft and the driven rotor shaft are respectively fixed on the shaft through expansion sleeves.
As a further scheme of the invention: the shell, the end cover, the oil tank and the isolation sleeve are all sealed by O-shaped rings.
As a further scheme of the invention: the shell, the end cover and the oil tank are fixed by bolts, the shell of the whole equipment is provided with radiating fins, the motor connecting frame is provided with radiating holes, and the cooling mode adopts an air cooling structure.
As a further scheme of the invention: the inner magnetic rotor is fixed on a driving rotor shaft, and the driving rotor shaft separates the inside of the equipment from the external atmosphere through a separation sleeve.
As a further scheme of the invention: the inner magnetic rotor and the outer magnetic rotor are attracted through magnetism so as to drive; the outer magnetic rotor rotates under the drive of the motor, so that the driving rotor shaft is driven to rotate; the driven rotor shaft is driven by the gear to synchronously and reversely run, so that vacuum is formed in the process of sucking and exhausting.
As a further scheme of the invention: the pressure between the oil tank and the shell is balanced through the pressure balance pipe, the pressure balance pipe has a certain height and a curved surface, and the sealing effect is also achieved on the premise of balancing, so that the pressure difference in the pump cavity can be in a balanced state quickly, other seals are not needed, and lubricating oil of the oil tank cannot enter the vacuum cavity due to the pressure difference.
As a further scheme of the invention: the bearing box is fixed on the equipment end cover, a bearing is arranged in the bearing box, the bearing is arranged in the bearing box and fixed in position by a round nut, and an oil blocking mechanism is adopted between the bearing and the shell for sealing.
As a further scheme of the invention: the bearing and the shell are sealed by adopting the oil blocking mechanism, and the oil storage groove and the oil return hole are formed in the oil blocking mechanism, so that the oil blocking mechanism returns to the oil tank when a certain amount of lubricating oil at the bearing is collected, and is completely isolated from the vacuum cavity, thereby improving the purity of materials.
As a further scheme of the invention: the bearing adopts antifriction bearing, and one end is fixed, and the other end floats.
The invention has the beneficial effects that:
1. the internal seal of the equipment is static seal, and the bearings are lubricated by lubricating oil, so that the running speed of the equipment can be increased, and the service efficiency of the equipment is improved.
2. The inside of the equipment is sealed in a contactless way, and an air cooling structure is adopted, so that the use, maintenance and repair cost of the equipment is reduced.
3. The equipment bearings are lubricated by lubricating oil, so that the service life of the equipment is prolonged.
4. The equipment vacuum cavity is completely isolated from the atmosphere by static seal, so that higher vacuum leak rate can be obtained, and the safety to toxic and harmful working conditions is stronger.
5. The vacuum cavity and the oil tank are completely isolated from each other through the pressure balance pipe and the oil blocking mechanism, so that the vacuum cavity is cleaner, and the cost of recycling materials is reduced.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic elevational view of the present invention;
FIG. 2 is a schematic side view of the present invention;
fig. 3 is a schematic diagram of a prior art structure.
In the figure: 1. an air inlet; 2. a driven rotor shaft; 3. a driving rotor shaft; 4. an exhaust port; 5. expanding sleeve; 6. a gear; 7. a bearing box; 8. a round nut; 9. a bearing; 10. an oil blocking mechanism; 11. a housing; 12. an end cap; 13. a housing seal ring; 14. a pressure balance tube; 15. an oil slinger; 16. a magnetic coupling seal ring; 17. an axial limit sleeve; 18. an inner magnetic rotor; 19. a shaft end pressing plate; 20. a spacer sleeve; 21. an outer magnetic rotor; 22. a connecting frame; 23. a motor; 24. and an oil tank.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-2, the invention discloses a special air-cooled roots vacuum pump, which comprises an air inlet 1, a driven rotor shaft 2, a driving rotor shaft 3, an air outlet 4, an expansion sleeve 5, a gear 6, a bearing box 7, a round nut 8, a bearing 9, an oil baffle mechanism 10, a shell 11, an end cover 12, a shell sealing ring 13, a pressure balance pipe 14, an oil thrower 15, a magnetic coupling sealing ring 16, an axial limiting sleeve 17, an inner magnetic rotor 18, an axial end pressing plate 19, a spacer sleeve 20, an outer magnetic rotor 21, a connecting frame 22, a motor 23 and an oil tank 24; the air inlet 1 and the air outlet 4 are symmetrically arranged on the shell 11, the end cover 12 and the oil tank 24 are fixed by bolts, the shell sealing ring 13 is used for sealing between the shell 11, the end cover 12 and the oil tank 24 which are connected with each other at will, the bearing box 7 is fixed on the equipment end cover 12, the bearing 9 is arranged in the bearing box 7, and the bearing 9 is arranged in a position fixed by the round nut 8. An oil blocking mechanism 10 is adopted to seal the bearing 9 and the shell 11; the pressure between the oil tank 24 and the shell 11 is balanced by the pressure balance pipe 14; the driven rotor shaft 2 and the driving rotor shaft 3 respectively penetrate out of the center of the bearing box 7, the oil thrower disc 15 is fixed on the driving rotor shaft 3 through an axial limit sleeve 17, an inner magnetic rotor 18 and an axial end pressing plate 19 by bolts, the inner magnetic rotor 18 is arranged on the driving rotor shaft 3, the inner magnetic rotor 18 is fixed on the driving rotor shaft 3 through the axial end pressing plate 19 and a round nut 8, the isolation sleeve 20 is fixed on the oil tank 24 through a motor connecting frame 22, and the isolation sleeve 20 and the oil tank 24 are sealed by a magnetic coupling sealing ring 16. The outer magnetic rotor 21 is fixed on the motor 23 and is fixed through the connecting frame 22, so that the relative position with the inner magnetic rotor 18 is determined; the ends of the driving rotor shaft 3 and the driven rotor shaft 2 are respectively fixed on the shaft through an expansion sleeve 5. The inner magnetic rotor 18 and the outer magnetic rotor 21 are driven by the motor 23 to be driven by magnetic attraction; thereby driving the driving rotor shaft 3 to rotate; the driven rotor shaft 2 is driven by the gear 6 to synchronously and reversely run, so that vacuum is formed in the process of sucking and exhausting.
The shell 11, the end cover 12, the oil tank 24 and the isolation sleeve 20 are all sealed by O-shaped rings; the inner magnetic rotor 18 is fixed on the driving rotor shaft 3; the active rotor shaft 3 separates the inside of the device from the outside atmosphere by means of a spacer 20; the pressure between the oil tank 24 and the shell 11 is balanced by the pressure balance pipe 14, and the pressure balance pipe 14 has a certain height and a curved surface, and plays a role in sealing on the premise of balancing; an oil blocking mechanism 10 is adopted to seal the bearing 9 and the shell 11, and an oil storage groove and an oil return hole are formed in the oil blocking mechanism; the inside of the equipment has no internal leakage under the action of the sealing mechanism, so that the cleanness of the vacuum cavity can be effectively ensured;
all seals are static seals, and no dynamic seal structure exists.
The outer surfaces of the shell 11, the end cover 12 and the oil tank 24 are all provided with radiating fins, the motor connecting frame 22 is provided with radiating holes, and when the equipment works, the generated heat is relatively less because of no dry friction fittings in the equipment, so the heat generated by the equipment can be conducted out through the fins and the radiating holes.
The cooling mode of the whole equipment adopts an air cooling structure, and no refrigerant is needed.
The shell 11, the end cover 12, the oil tank 24 and the isolation sleeve 20 are all sealed by O-shaped rings;
the shell 11, the end cover 12 and the oil tank 24 are all fixed by bolts, the shell of the whole equipment is provided with radiating fins, the motor connecting frame 22 is provided with radiating holes, and the cooling mode adopts an air cooling structure.
The active rotor shaft 3 separates the inside of the device from the outside atmosphere by means of a spacer 20;
the inner magnetic rotor 18 and the outer magnetic rotor 21 are magnetically attracted to drive; the outer magnetic rotor 21 is driven by the motor 23 to rotate, so that the driving rotor shaft 3 is driven to rotate; the driven rotor shaft 2 is driven by the gear 6 to synchronously and reversely run, so that vacuum is formed in the process of sucking and exhausting;
the pressure between the tank 24 and the housing 11 is balanced by the pressure balancing pipe 14 so that the pressure difference in the pump chamber is at an equilibrium state quickly, no other seals are required, and the lubrication oil of the tank does not enter the vacuum chamber due to the pressure difference.
The bearing box 7 is fixed on the equipment end cover 12, a bearing 9 is arranged in the bearing box 7, the bearing 9 is arranged in the bearing box 7 and fixed in position by a round nut 8, and an oil blocking mechanism 10 is adopted to seal the bearing 9 and the shell 11;
the bearing 9 and the shell 11 are sealed by adopting an oil blocking mechanism 10, and an oil storage groove and an oil return hole are formed in the oil blocking mechanism 10, so that the oil blocking mechanism returns to an oil tank when a certain amount of lubricating oil at the bearing is collected, and is completely isolated from a vacuum cavity, thereby greatly improving the purity of materials;
the bearing 9 adopts a rolling bearing, one end of which is fixed, and the other end of which floats.
Is suitable for the variable-volume horizontal vacuum pump. Is suitable for all environments with the requirement on vacuum leakage rate. The method is suitable for all working conditions with requirements on the refrigerant.
The foregoing describes one embodiment of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (9)
1. The special air-cooled Roots vacuum pump is characterized by comprising an air inlet (1), a driven rotor shaft (2), a driving rotor shaft (3), an air outlet (4), an expansion sleeve (5), a gear (6), a bearing box (7), a round nut (8), a bearing (9), an oil blocking mechanism (10), a shell (11), an end cover (12), a shell sealing ring (13), a pressure balance pipe (14), an oil thrower disc (15), a magnetic coupling sealing ring (16), an axial limiting sleeve (17), an inner magnetic rotor (18), a shaft end pressing plate (19), a spacer sleeve (20), an outer magnetic rotor (21), a connecting frame (22), a motor (23) and an oil tank (24); the shell (11), the end cover (12) and the oil tank (24) are fixed by bolts, and the two which are arbitrarily connected with each other are sealed by a shell sealing ring (13); the pressure between the oil tank (24) and the shell (11) is balanced by a pressure balancing pipe (14); the driven rotor shaft (2) and the driving rotor shaft (3) respectively penetrate through the center of the bearing box (7), the oil slinger (15) is fixed on the driving rotor shaft (3) through an axial limiting sleeve (17), an inner magnetic rotor (18) and an axial end pressing plate (19) by bolts, the inner magnetic rotor (18) is arranged on the driving rotor shaft (3), the inner magnetic rotor (18) is fixed on the driving rotor shaft (3) through the axial end pressing plate (19) and a round nut (8), the isolating sleeve (20) is fixed on the oil tank (24) through a motor connecting frame (22), the isolating sleeve (20) is sealed with the oil tank (24) by a magnetic coupling sealing ring (16), the outer magnetic rotor (21) is fixed on the motor (23) and is fixed through the connecting frame (22), and therefore the relative position with the inner magnetic rotor (18) is determined; the end parts of the driving rotor shaft (3) and the driven rotor shaft (2) are respectively fixed on the shaft through a swelling sleeve (5).
2. The special air-cooled Roots vacuum pump according to claim 1, wherein an O-shaped ring static seal is adopted among the shell (11), the end cover (12), the oil tank (24) and the isolation sleeve (20).
3. The special air-cooled Roots vacuum pump according to claim 1, wherein the shell (11), the end cover (12) and the oil tank (24) are all fixed by bolts, the whole equipment shell (11) is provided with radiating fins, the motor connecting frame (22) is provided with radiating holes, and the cooling mode adopts an air cooling structure.
4. The special air-cooled roots vacuum pump according to claim 1, characterized in that the inner magnetic rotor (18) is fixed on the active rotor shaft (3), the active rotor shaft (3) isolating the inside of the device from the outside atmosphere by means of a spacer sleeve (20).
5. The special air-cooled Roots vacuum pump according to claim 1, wherein the inner magnetic rotor (18) and the outer magnetic rotor (21) are magnetically attracted to drive; the outer magnetic rotor (21) is driven by the motor (23) to rotate, so that the driving rotor shaft (3) is driven to rotate; the driven rotor shaft (2) is driven by the gear (6) to synchronously and reversely run, so that vacuum is formed in the process of sucking and exhausting.
6. The special air-cooled Roots vacuum pump according to claim 1, wherein the pressure between the oil tank (24) and the housing (11) is balanced by the pressure balance pipe (14), the pressure balance pipe (14) has a certain height and a curved surface, and the sealing function is also realized on the premise of balancing, so that the pressure difference in the pump cavity can be in a balanced state quickly, no other sealing is needed, and the lubricating oil of the oil tank cannot enter the vacuum cavity due to the pressure difference.
7. The special air-cooled Roots vacuum pump according to claim 1, wherein the bearing box (7) is fixed on the equipment end cover (12), a bearing (9) is arranged in the bearing box (7), the bearing (9) is arranged in the bearing box (7) and fixed in position by a round nut (8), and an oil blocking mechanism (10) is used for sealing between the bearing (9) and the shell (11).
8. The special air-cooled Roots vacuum pump according to claim 1, wherein an oil blocking mechanism (10) is adopted between the bearing (9) and the shell (11) for sealing, and an oil storage tank and an oil return hole are formed in the oil blocking mechanism (10), so that the oil blocking mechanism (10) returns lubricating oil at the bearing to the oil tank when a certain amount of lubricating oil is collected, and is completely isolated from the vacuum cavity, thereby improving the purity of materials.
9. The special air-cooled Roots vacuum pump according to claim 1, wherein the bearing (9) is a rolling bearing with one end fixed and the other end floating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310054755.9A CN116006464B (en) | 2023-02-03 | 2023-02-03 | Special air-cooled Roots vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310054755.9A CN116006464B (en) | 2023-02-03 | 2023-02-03 | Special air-cooled Roots vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116006464A true CN116006464A (en) | 2023-04-25 |
| CN116006464B CN116006464B (en) | 2024-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310054755.9A Active CN116006464B (en) | 2023-02-03 | 2023-02-03 | Special air-cooled Roots vacuum pump |
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| CN (1) | CN116006464B (en) |
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| CN107762849A (en) * | 2017-11-17 | 2018-03-06 | 孙成忠 | The horizontal in line vavuum pump of oil-free |
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| JP2021193292A (en) * | 2020-06-09 | 2021-12-23 | 株式会社アンレット | Roots blower or roots vacuum pump |
| CN113958502A (en) * | 2021-10-29 | 2022-01-21 | 山东宽量节能环保技术有限公司 | Bearing cavity sealing structure for limiting rotation of roots vacuum pump |
| CN217582492U (en) * | 2022-03-31 | 2022-10-14 | 广德缔威真空设备有限公司 | Sealing device of roots vacuum pump |
| FR3124235A1 (en) * | 2021-07-20 | 2022-12-23 | Pfeiffer Vacuum | Vacuum pump |
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2023
- 2023-02-03 CN CN202310054755.9A patent/CN116006464B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1256721A2 (en) * | 2001-05-08 | 2002-11-13 | Kabushiki Kaisha Toyota Jidoshokki | Sealing for a rotary vacuum pump |
| JP2003042086A (en) * | 2001-07-26 | 2003-02-13 | Ebara Corp | Dry vacuum pump |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN116006464B (en) | 2024-02-23 |
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