CN105386972B - Screw vacuum pump of motive seal structure - Google Patents

Screw vacuum pump of motive seal structure Download PDF

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Publication number
CN105386972B
CN105386972B CN201510918080.3A CN201510918080A CN105386972B CN 105386972 B CN105386972 B CN 105386972B CN 201510918080 A CN201510918080 A CN 201510918080A CN 105386972 B CN105386972 B CN 105386972B
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CN
China
Prior art keywords
sealing
rotor
cooling
vacuum pump
axle
Prior art date
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Application number
CN201510918080.3A
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Chinese (zh)
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CN105386972A (en
Inventor
王国栋
王庆生
陈宗武
李卓慧
祝敏
郭金光
郑志
陈长琦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong Bozhong Vacuum Equipment Co Ltd
Hefei University of Technology
Original Assignee
Shandong Bozhong Vacuum Equipment Co Ltd
Hefei University of Technology
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Application filed by Shandong Bozhong Vacuum Equipment Co Ltd, Hefei University of Technology filed Critical Shandong Bozhong Vacuum Equipment Co Ltd
Priority to CN201510918080.3A priority Critical patent/CN105386972B/en
Publication of CN105386972A publication Critical patent/CN105386972A/en
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Publication of CN105386972B publication Critical patent/CN105386972B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/10Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of internal-axis type with the outer member having more teeth or tooth equivalents, e.g. rollers, than the inner member
    • F04C18/107Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of internal-axis type with the outer member having more teeth or tooth equivalents, e.g. rollers, than the inner member with helical teeth
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation

Abstract

The invention discloses a screw vacuum pump of a motive seal structure. The screw vacuum pump comprises a pump body, a front end cap, a rear end cap, a shaft and a rotor. A sealing mechanism is arranged between the shaft and the front end cap. The sealing mechanism further comprises a cooling casing pipe. A cooling channel is arranged in the cooling casing pipe. The cooling channel is filled with a cooling medium so as to prevent heat from transferring along an axial shaft seal part from the rotor, and thus the working temperature of a mechanical sealing assembly is lowered. The friction pair surface of a sealing static ring of the sealing mechanism is subjected to surface texture treatment so as to effectively reduce the surface abrasion of a friction pair and reduce temperature rise of the end face of the friction pair; meanwhile, a heat insulating layer, formed between the shaft and the rotor, of the cooling casing pipe is used for preventing the heat from transferring to an exhaust end shaft seal, and the working environment of a shaft seal component is improved, so that the service life of the seal assembly is prolonged.

Description

A kind of screw vacuum pump with movable sealing structure
Technical field
The invention belongs to technical field of vacuum, and in particular to a kind of screw vacuum pump.
Background technology
Screw vacuum pump belongs to non-contact type dry pump, and it is a kind of preferable vacuum that phase early 1990s occurs Pump, with its pumping speed wide ranges, simple and compact for structure, pumping chamber element without friction, life-span length, energy consumption it is low, without oily pollution the advantages of And be used widely in industries such as microelectronics, quasiconductor, pharmacy, Precision Machinings.Domestic screw vacuum pump was through 20 years Fast development, its main performance index (such as pumping speed, limiting pressure, energy consumption, zero delivery compression ratio, pressure reduction) reaches or is close to Foreign Advanced Lerel;But pump operation stability, using reliability, still gap is larger with external advanced pump, its dynamic sealing technology is main One of influence factor is wanted, the service life of the reliability and sealing member that how to improve sealing becomes country's screw pump market plane at present The key issue faced.The screw vacuum pump course of work be divided into air-breathing, etc. hold conveying, compression, aerofluxuss Four processes, compression and aerofluxuss During gas temperature can be made drastically to raise, cause exhaust end rotor higher with the temperature of axle, black box is high in high temperature Under the bad working environments of speed, and traditional mechanical sealing dynamic and static ring directly contact, black box rapid wear, service life is dropped significantly It is low.
The content of the invention
In order to solve the problems, such as the mechanical sealing assembly of the screw vacuum pump that high temperature and high speed runs, screw vacuum is improved The service life of pump, the present invention provides a kind of screw vacuum pump with movable sealing structure.
A kind of screw vacuum pump with movable sealing structure includes the pump housing 21, drive end bearing bracket 3, rear end cap, axle 1 and rotor 2;Institute The side for stating the pump housing 21 is radially provided with air inlet port, and the drive end bearing bracket 3 and rear end cap are fixed at respectively the axial direction of the pump housing 21 Two ends;The side of the drive end bearing bracket 3 is radially respectively equipped with exhaust port and cooling medium entrance;The side footpath of the rear end cap Cooling medium outlet is provided with upwards;The rotor 2 is arranged and is fixed on axle 1, and rotor 2 is located in the pump housing 21;One end of the axle 1 It is fixed in rear end cap, the other end is extended outside drive end bearing bracket 3, between axle 1 and drive end bearing bracket 3 sealing mechanism is provided with;The sealing Mechanism includes stationary seal ring 6 and moving sealing ring 7, and spring is arranged with the moving sealing ring 7, and moving sealing ring 7 passes through holding screw It is fixed on axle 1;
The sealing mechanism also includes cooling jacket 4;Axial one end of rotor 2 corresponding with sealing mechanism is sleeve pipe step Hole, makes have toroidal cavity between rotor 2 and axle 1;
The jacket pipe that the cooling jacket 4 is closed for the open at one end other end, the inner tubal wall and outer tube wall of the jacket pipe Between cavity for ring-type cooling duct 9;The opening end of cooling jacket 4 is fixedly connected the axial inner ends face of drive end bearing bracket 3, cold But the envelope closed end of sleeve pipe 4 is located in the sleeve pipe stepped hole of rotor 2;
The cooling duct 9 connects with the cooling chamber 10 in drive end bearing bracket 3, and cooling medium is provided with cooling chamber 10, realizes Form heat insulation layer between axle and rotor, blocking temperature is axially transmitted at stationary seal ring 6 and moving sealing ring 7;
Micropore 15, the micropore 15 are uniformly offered on the surface of friction pair 14 of stationary seal ring 6 corresponding with moving sealing ring 7 For blind hole, micropore 15 is as micro- oil storage pool to surface of friction pair offer lubricating oil.
Further the structure of optimization is as follows:
The surface of the axle 1 adjacent with the sealing mechanism is provided with labyrinth seal groove 19.
The second sealing ring 18 and the 3rd is respectively equipped between the opening end of cooling jacket 4 and the axial inner ends face of drive end bearing bracket 3 Sealing ring 20.
The external cylindrical surface of the cooling jacket 4 is provided between the collar aperture of external screw thread 13, the external screw thread 13 and rotor 2 Form helixseal.The rotation direction of the external screw thread 13 and rotor 2 it is oppositely oriented.
The inner cylinder face of the cooling jacket 4 is provided with female thread 12, spiral is formed between the female thread 12 and axle 1 close Envelope;The rotation direction of the female thread 12 is identical with the rotation direction of rotor 2.
The micropore 15 is square hole, and radially distributed, radial uniform micropore 15 is on the surface of surface of friction pair 14 On density be 20%~25%.The hole depth of the micropore 15 is 0.2~0.25 with the ratio of the length of side.
Cavity in drive end bearing bracket 3 is cooling chamber 10, is communicated with cooling down on the end face of drive end bearing bracket 3 corresponding with the pump housing 21 The through hole 11 of more than two of chamber 10 and the return port 22 of more than two, and through hole 11 and the backflow of more than two of more than two Hole 22 is respectively communicated with cooling duct 9.
The Advantageous Effects of the present invention embody in the following areas:
1. present invention improves the movable sealing structure of screw vacuum pump exhaust end, by setting up cooling jacket, has completely cut off temperature The transmission from rotor axle envelope position vertically is spent, the operating temperature of mechanical sealing assembly is reduced;The screw thread on cooling jacket surface, Can realize the effect of helixseal, wherein internal thread rotation to identical with rotor rotation direction, so as to prevent mechanical seal side seal from being situated between Matter is leak in pump chamber, external thread rotary to rotor rotation direction, so as to prevent pump intracavity gas in impurity and dust leak into machinery it is close Envelope.
2. by opening up micropore on the end face of stationary seal ring, improve under high temperature and high speed operating mode the lubrication of mechanical seal and Abrasion condition, the presence of micropore can increase sound interannular hydrodynamic pressure, and then reduce the dynamic and static ring end face mill of mechanical seal Damage and temperature rise.In the case of Starved Lubrication condition or even dry friction, micropore can be carried as micro- oil storage pool to surface of friction pair For lubricating oil.Meanwhile, micro- hole or very low power can also accommodate abrasive particle, with the high abrasion for reducing being produced due to abrasive particle.
The square surface micro-pores mechanical seal structure of the present invention, by the ratio for selecting pore density, micropore hole depth and the length of side Deng the parameter of surface texture, process in the surface of friction pair 14 of mechanical sealing static ring with processing methods such as laser micron-sized Square micropore 15, radial to be distributed on stationary ring surface, the opposing seal stationary ring 7 under the drive of axle 1 of moving sealing ring 6 does and rotates Motion, due to the presence of hydrodynamic pressure, the corresponding axial end of moving sealing ring 6 and stationary seal ring 7 is not contacted.Ensureing to let out On the premise of leakage quantity meets and requires, in order to obtain less moment of friction, the ratio of pore density and micropore hole depth and the length of side is by under The method of stating is tried to achieve:
When the timing of ratio one of pore density and hole depth and the length of side, friction pair end face hydrodynamic pressure can be according to formula (1) Obtain:
Sealing opening force can be obtained by formula (2):
Seal closure power can be tried to achieve by formula (3):
Work as F0With FcWhen balancing each other, thickness h now can be obtained0.Moment of friction can be tried to achieve by formula (4):
Leakage rate can be tried to achieve by formula (5):
In formula:μ is the dynamic viscosity of sealing medium;U is the average tangential velocity of rotating ring;ra、rbRespectively stationary seal ring 6 Internal-and external diameter, rmFor the two meansigma methods;hcFor the non-porose area thickness of liquid film of dynamic and static interannular;hpFor micropore depth;rpFor pore radius; P0、PiThe respectively pressure of friction pair end face external diameter and inner radius, Δ P is the two difference;Ps is spring pressure;B is sealing and balancing Than;SpFor pore density.The ratio and pore density lower sealing surface of different micropore hole depths and the length of side can easily be obtained by above formula The size of moment of friction and leakage rate.On the premise of ensureing that leakage rate meets seal request, select suitable micropore hole depth with The ratio and pore density of the length of side obtains optimum sealing property obtaining the moment of friction of minimum.
Description of the drawings
Fig. 1 is schematic structural view of the invention;
Fig. 2 is the partial enlarged drawing of Fig. 1;
Fig. 3 is cooling jacket schematic diagram;
Fig. 4 is the end face structure schematic diagram of stationary seal ring;
Fig. 5 is the schematic diagram between stationary seal ring and moving sealing ring axial direction;
Sequence number in upper figure:Axle 1, rotor 2, drive end bearing bracket 3, cooling jacket 4, spring 5, stationary seal ring 6, moving sealing ring 7, tightening Screw 8, cooling duct 9, cooling chamber 10, through hole 11, female thread 12, external screw thread 13, surface of friction pair 14, micropore 15, first are close Seal 16, bearing 17, the second sealing ring 18, labyrinth seal groove 19, the 3rd sealing ring 20, the pump housing 21, return port 22.
Specific embodiment
Below in conjunction with the accompanying drawings, the present invention is further described by embodiment.
Referring to Fig. 1, a kind of screw vacuum pump with movable sealing structure includes the pump housing 21, drive end bearing bracket 3, rear end cap, the and of axle 1 Rotor 2.The side of the pump housing 21 is radially provided with air inlet port, and drive end bearing bracket 3 and rear end cap are fixedly installed in respectively the axle of the pump housing 21 To two ends.The side of drive end bearing bracket 3 is radially respectively equipped with exhaust port and cooling medium entrance.The side of rear end cap radially sets There is cooling medium to export.The suit of rotor 2 is fixed on axle 1, and rotor 2 is located in the pump housing 21;One end of axle 1 is fixed at rear end cap Interior, the other end is extended outside drive end bearing bracket 3, and between axle 1 and drive end bearing bracket 3 sealing mechanism is provided with;Sealing mechanism includes the He of stationary seal ring 6 Moving sealing ring 7, is set with spring on moving sealing ring 7, moving sealing ring 7 is fixed on axle 1 by holding screw;With sealing mechanism pair The Surface Machining of axle 1 answered has labyrinth seal groove 19.
Referring to Fig. 2, sealing mechanism also includes cooling jacket 4;Axial one end of rotor 2 corresponding with sealing mechanism is sleeve pipe Stepped hole, makes have toroidal cavity between rotor 2 and axle 1.
The jacket pipe that cooling jacket 4 is closed for the open at one end other end, the sky between the inner tubal wall and outer tube wall of jacket pipe Chamber is the cooling duct 9 of ring-type;The opening end of cooling jacket 4 is fixedly connected the axial inner ends face of drive end bearing bracket 3, cooling jacket 4 Opening end and the axial inner ends face of drive end bearing bracket 3 between be separately installed with the second sealing ring 18 and the 3rd sealing ring 20, prevent cold But medium is entered in the pump housing 21.Cooling jacket 4 envelope closed end be located at rotor 2 sleeve pipe stepped hole in, cooling jacket 4 not with turn Son 2 is rotated.
Referring to Fig. 3, the external cylindrical surface of cooling jacket 4 is provided between the collar aperture of external screw thread 13, external screw thread 13 and rotor 2 Form helixseal;The rotation direction of external screw thread 13 and oppositely oriented, the dust and granule entrance sealing in the stop pump housing 21 of rotor 2 Mechanism.
The inner cylinder face of cooling jacket 4 is provided with female thread 12, and between female thread 12 and axle 1 helixseal is formed;Interior spiral shell The rotation direction of stricture of vagina 12 is identical with the rotation direction of rotor 2, and the lubricant medium of baffle seal mechanism side is entered in the pump housing 21.
Cavity in drive end bearing bracket 3 is to be provided with cooling medium in cooling chamber 10, cooling chamber 10, with the corresponding drive end bearing bracket of the pump housing 21 Four through holes 11 and four return ports 22 of cooling chamber 10, and four through holes 11 and four backflows are communicated with 3 end face Hole 22 is respectively communicated with cooling duct 9;Realization forms heat insulation layer between axle and rotor, blocking temperature axially stationary seal ring 6 and moving sealing ring 7 at transmit.
Referring to Fig. 4, uniformly offer on the surface of friction pair 14 of stationary seal ring 6 corresponding with moving sealing ring 7 radial Micropore 15, micropore 15 is blind hole, and for square hole, density of the radial uniform micropore 15 on the surface of surface of friction pair 14 is 20%.The hole depth of micropore 15 is 0.2 with the ratio of the length of side.Micropore 15 provides lubricating oil as micro- oil storage pool to surface of friction pair.It is close Envelope stationary ring 6 is fixed on drive end bearing bracket 3, is not rotated with axle 1;Moving sealing ring 7 is fixed on axle 1, with axle by holding screw 8 Rotate;Stationary seal ring 6 is compressed with moving sealing ring 7 by spring 5, and in the case where axle 1 drives relative rotary motion is done, so as to realize sealing Effect.Between stationary seal ring 6 and drive end bearing bracket 3, the first sealing ring 16 is mounted between rotating ring 7 and axle 1, it is ensured that sealing mechanism, Sealing between the chamber and the pump housing 21 at the place of bearing 17.
The operation principle of the present invention is described as follows:Referring to Fig. 1 and Fig. 2, cooling medium is entered after screw vacuum pump, from front end Cooling chamber 10 in lid 3 enters the cooling duct 9 of cooling jacket 4 by through hole 11, then is flowed back in drive end bearing bracket 3 by return port 22 Cooling chamber 10.
Acting is compressed to gas near exhaust end when working due to rotor 2, very high heat is produced, thus rotor The temperature of 2 exhaust end is higher, and from Fig. 2 and Fig. 3, cooling jacket 4 is extend into inside the exhaust end of rotor 2, by cooling Medium circulating inside cooling duct 9, between rotor 2 and axle 1 heat insulation layer is formed, so as to block temperature vertically The transmission of stationary seal ring and moving sealing ring, reduces the operating temperature of black box.
Referring to Fig. 4 and Fig. 5, surface texture process is carried out to described stationary seal ring 6, i.e., using technologies such as laser in stationary ring Friction pair end face on process equally distributed micropore, pore size is micron level, radial to be distributed on stationary ring table Face, micro-pore shape is optional various:Square, ellipse, parabola shaped etc..And moving sealing ring 7 is as standard machinery moving sealing ring It is still planar end surface so that stationary seal ring 6 and moving sealing ring 7 produce larger hydrodynamic when rotating against, it is to avoid dynamic and static ring Directly contact, so as to reduce its friction power loss and End Face Temperature Rise.On the premise of ensureing that leakage rate meets seal request, in order to Less moment of friction is obtained, needs to select suitable pore density and micropore hole depth and the ratio of the length of side, when pore density and hole The deep timing of ratio one with the length of side, friction pair end face hydrodynamic pressure can be obtained according to formula (1):
Sealing opening force can be obtained by formula (2):
Seal closure power can be tried to achieve by formula (3):
Work as F0With FcWhen balancing each other, thickness h now can be obtained0.Moment of friction can be tried to achieve by formula (4):
Leakage rate can be tried to achieve by formula (5):
In formula:μ is the dynamic viscosity of sealing medium;U is the average tangential velocity of rotating ring;ra、rbFor mechanical sealing static ring Internal-and external diameter, rmFor the two meansigma methods;hcFor the non-porose area thickness of liquid film of dynamic and static interannular;hpFor micropore depth;rpFor pore radius;P0、 PiThe respectively pressure of friction pair end face external diameter and inner radius, Δ P is the two difference;Ps is spring pressure;B is sealing and balancing Than;SpFor pore density.The ratio and pore density lower sealing surface of different micropore hole depths and the length of side can easily be obtained by above formula The size of moment of friction and leakage rate.In the case where favorable sealing property is ensured, select suitable micropore hole depth and the length of side it Than the moment of friction that minimum is obtained with pore density, optimum sealing property is obtained, it is micro- for square through above-mentioned calculating Hole, pore density is chosen to be 20%~25%, and hole depth is chosen to be 0.2~0.25 with the ratio of the length of side.

Claims (10)

1. a kind of screw vacuum pump with movable sealing structure, including the pump housing (21), drive end bearing bracket (3), rear end cap, axle (1) and turn Sub (2);The side of the pump housing (21) is radially provided with air inlet port, and the drive end bearing bracket (3) and rear end cap are fixed at respectively The axial two ends of the pump housing (21);The side of the drive end bearing bracket (3) is radially respectively equipped with exhaust port and cooling medium entrance;Institute The side for stating rear end cap is radially provided with cooling medium outlet;The rotor (2) is arranged and is fixed on axle (1), and rotor (2) is located at In the pump housing (21);One end of the axle (1) is fixed in rear end cap, and it is outside that the other end extends drive end bearing bracket (3), axle (1) and front End cap is provided with sealing mechanism between (3);The sealing mechanism includes stationary seal ring (6) and moving sealing ring (7), the moving sealing ring (7) spring is arranged with, moving sealing ring (7) is fixed on axle (1) by holding screw, it is characterised in that:
The sealing mechanism also includes cooling jacket (4);Axial one end of rotor (2) corresponding with sealing mechanism is sleeve pipe step Hole, makes have toroidal cavity between rotor (2) and axle (1);
The jacket pipe that the cooling jacket (4) is closed for the open at one end other end, the inner tubal wall and outer tube wall of the jacket pipe it Between cavity for ring-type cooling duct (9);The opening end of cooling jacket (4) is fixedly connected the axial inner ends of drive end bearing bracket (3) Face, the envelope closed end of cooling jacket (4) is located in the sleeve pipe stepped hole of rotor (2);
The cooling duct (9) connects with the cooling chamber (10) in drive end bearing bracket (3), and in cooling chamber (10) cooling medium is provided with, real Form heat insulation layer between axle and rotor now, axially stationary seal ring (6) and moving sealing ring (7) place transmit blocking temperature;
Micropore (15) is uniformly offered on the surface of friction pair (14) of stationary seal ring (6) corresponding with moving sealing ring (7), it is described micro- Hole (15) is blind hole, and micropore (15) provides lubricating oil as micro- oil storage pool to surface of friction pair.
2. a kind of screw vacuum pump with movable sealing structure according to claim 1, it is characterised in that:With the sealing The surface of the adjacent axle of mechanism (1) is provided with labyrinth seal groove (19).
3. a kind of screw vacuum pump with movable sealing structure according to claim 1, it is characterised in that:Cooling jacket (4) the second sealing ring (18) and the 3rd sealing ring (20) are respectively equipped between opening end and the axial inner ends face of drive end bearing bracket (3).
4. a kind of screw vacuum pump with movable sealing structure according to claim 1, it is characterised in that:The coolant jacket The external cylindrical surface of pipe (4) is provided with external screw thread (13), spiral is formed between the external screw thread (13) and the collar aperture of rotor (2) close Envelope.
5. a kind of screw vacuum pump with movable sealing structure according to claim 4, it is characterised in that:The external screw thread (13) rotation direction and rotor (2) it is oppositely oriented.
6. a kind of screw vacuum pump with movable sealing structure according to claim 1, it is characterised in that:The coolant jacket The inner cylinder face of pipe (4) is provided with female thread (12), and between the female thread (12) and axle (1) helixseal is formed.
7. a kind of screw vacuum pump with movable sealing structure according to claim 6, it is characterised in that:The female thread (12) rotation direction is identical with the rotation direction of rotor (2).
8. a kind of screw vacuum pump with movable sealing structure according to claim 1, it is characterised in that:The micropore (15) it is square hole, and it is radially distributed, density of the radial uniform micropore (15) on surface of friction pair (14) surface is 20%~25%.
9. a kind of screw vacuum pump with movable sealing structure according to claim 1 or 8, it is characterised in that:It is described micro- The hole depth in hole (15) is 0.2~0.25 with the ratio of the length of side.
10. a kind of screw vacuum pump with movable sealing structure according to claim 1, it is characterised in that:Drive end bearing bracket (3) Interior cavity is cooling chamber (10), and on the end face of drive end bearing bracket (3) corresponding with the pump housing (21) cooling chamber (10) is communicated with The through hole (11) of more than two and the return port of more than two (22), and through hole (11) and the backflow of more than two of more than two Hole (22) is respectively communicated with cooling duct (9).
CN201510918080.3A 2015-12-09 2015-12-09 Screw vacuum pump of motive seal structure Active CN105386972B (en)

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Application Number Priority Date Filing Date Title
CN201510918080.3A CN105386972B (en) 2015-12-09 2015-12-09 Screw vacuum pump of motive seal structure

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CN105386972A CN105386972A (en) 2016-03-09
CN105386972B true CN105386972B (en) 2017-05-17

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110566456B (en) * 2019-09-12 2020-12-04 东莞市雅之雷德机电科技有限公司 Oil-free screw fan

Citations (5)

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Publication number Priority date Publication date Assignee Title
US4086346A (en) * 1974-04-06 1978-04-25 Bayer Aktiengesellschaft Preparation of melt-sprayed spherical phenacetin granules
JPS62218682A (en) * 1986-03-19 1987-09-26 Hitachi Ltd Screw vacuum pump
CN2041736U (en) * 1988-08-23 1989-07-26 胜利油田会战指挥部胜利采油指挥部 Machinery seal screw arbor negative pressure compression engine
JPH05149287A (en) * 1991-11-26 1993-06-15 Hitachi Ltd Package type screw compressor
CN205260306U (en) * 2015-12-09 2016-05-25 合肥工业大学 Screw vacuum pump with move seal structure

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT498071T (en) * 2005-12-08 2011-02-15 Ghh Rand Schraubenkompressoren Screw compressor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4086346A (en) * 1974-04-06 1978-04-25 Bayer Aktiengesellschaft Preparation of melt-sprayed spherical phenacetin granules
JPS62218682A (en) * 1986-03-19 1987-09-26 Hitachi Ltd Screw vacuum pump
CN2041736U (en) * 1988-08-23 1989-07-26 胜利油田会战指挥部胜利采油指挥部 Machinery seal screw arbor negative pressure compression engine
JPH05149287A (en) * 1991-11-26 1993-06-15 Hitachi Ltd Package type screw compressor
CN205260306U (en) * 2015-12-09 2016-05-25 合肥工业大学 Screw vacuum pump with move seal structure

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