CN115956224A - 对准单元用的防尘构造体 - Google Patents
对准单元用的防尘构造体 Download PDFInfo
- Publication number
- CN115956224A CN115956224A CN202180050422.8A CN202180050422A CN115956224A CN 115956224 A CN115956224 A CN 115956224A CN 202180050422 A CN202180050422 A CN 202180050422A CN 115956224 A CN115956224 A CN 115956224A
- Authority
- CN
- China
- Prior art keywords
- dust
- proof structure
- proof
- dustproof
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Epidemiology (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Public Health (AREA)
- Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Multimedia (AREA)
- Vibration Prevention Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020-139630 | 2020-08-20 | ||
JP2020139630 | 2020-08-20 | ||
PCT/JP2021/030064 WO2022039166A1 (ja) | 2020-08-20 | 2021-08-17 | アライメントユニット用の防塵構造体 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN115956224A true CN115956224A (zh) | 2023-04-11 |
Family
ID=80350439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202180050422.8A Pending CN115956224A (zh) | 2020-08-20 | 2021-08-17 | 对准单元用的防尘构造体 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7375210B2 (ko) |
KR (1) | KR20230035093A (ko) |
CN (1) | CN115956224A (ko) |
TW (1) | TWI784668B (ko) |
WO (1) | WO2022039166A1 (ko) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3402746B2 (ja) * | 1994-05-19 | 2003-05-06 | Hoya株式会社 | フォトマスク検査方法及びその装置 |
JPH113854A (ja) * | 1997-06-12 | 1999-01-06 | Nikon Corp | 露光装置、露光方法及び位置検出装置 |
JP2004093976A (ja) * | 2002-08-30 | 2004-03-25 | Nsk Ltd | アライメント調整装置 |
JP2005116965A (ja) | 2003-10-10 | 2005-04-28 | Canon Inc | 露光装置及びその制御方法 |
JP2005203522A (ja) * | 2004-01-14 | 2005-07-28 | Nikon Corp | 露光方法及び装置、並びにデバイス製造方法 |
JP4395654B2 (ja) * | 2004-09-09 | 2010-01-13 | 株式会社マシンエンジニアリング | ワークの位置決め装置 |
JP5769605B2 (ja) * | 2011-12-02 | 2015-08-26 | 株式会社ディスコ | 切削装置 |
JP6376601B2 (ja) * | 2015-05-18 | 2018-08-22 | 信越化学工業株式会社 | ペリクル支持手段及びこれを用いたペリクル支持装置とペリクル装着方法 |
-
2021
- 2021-08-17 TW TW110130248A patent/TWI784668B/zh active
- 2021-08-17 JP JP2022543960A patent/JP7375210B2/ja active Active
- 2021-08-17 WO PCT/JP2021/030064 patent/WO2022039166A1/ja active Application Filing
- 2021-08-17 CN CN202180050422.8A patent/CN115956224A/zh active Pending
- 2021-08-17 KR KR1020237004088A patent/KR20230035093A/ko unknown
Also Published As
Publication number | Publication date |
---|---|
KR20230035093A (ko) | 2023-03-10 |
TWI784668B (zh) | 2022-11-21 |
JP7375210B2 (ja) | 2023-11-07 |
JPWO2022039166A1 (ko) | 2022-02-24 |
TW202212991A (zh) | 2022-04-01 |
WO2022039166A1 (ja) | 2022-02-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20230915 Address after: Tokyo, Japan Applicant after: MITSUI CHEMICALS, Inc. Address before: Tokyo, Japan Applicant before: ASAHI KASEI Kabushiki Kaisha |
|
TA01 | Transfer of patent application right |