CN115925279A

CN115925279A - AR, AG and AF coating system for cover glass

Info

Publication number: CN115925279A
Application number: CN202211638117.3A
Authority: CN
Inventors: 张家震; 高树军; 王健; 卞恒卿; 金虎范
Original assignee: Qingdao Ronghe Intelligent Technology Co Ltd
Current assignee: Qingdao Ronghe Intelligent Technology Co Ltd
Priority date: 2022-12-20
Filing date: 2022-12-20
Publication date: 2023-04-07

Abstract

The invention discloses an AR, AG and AF film coating system for cover plate glass, and belongs to the technical field of cover plate glass production. The technical scheme is as follows: the device comprises a first vacuum transition chamber, a first vacuum chamber, a second vacuum transition chamber, a heating furnace, a glass cooling and heat-insulating device, a third vacuum transition chamber, a second vacuum chamber, a fourth vacuum transition chamber, AF spraying equipment and AF baking equipment which are sequentially connected through a conveying roller way. The automatic feeding and discharging device realizes automatic feeding and discharging without manual interference, and avoids the problems of glass dirt and crystal points; meanwhile, AG spraying is carried out in a vacuum environment, so that the problems of poor film adhesion and poor wear resistance caused by more moisture and gas on the surface of glass in an atmospheric environment are solved.

Description

AR, AG and AF coating system for cover glass

Technical Field

The invention relates to the technical field of cover plate glass production, in particular to an AR, AG and AF film coating system for cover plate glass.

Background

The display cover plate glass is mainly applied to terminal products such as mobile phones, vehicle-mounted displays and computers, is arranged on the outermost side of the terminal products and needs to be touched frequently, so that the definition, the friction resistance, the corrosion resistance, the weather resistance, the impact resistance and the anti-glare property of the display cover plate glass are key factors for evaluating the quality of the display cover plate glass.

The AG glass forms a diffuse reflection coating on the surface of the glass in a spraying mode, so that the direct reflection light on the surface of the glass is reduced, the interference of ambient light can be reduced, the visual angle and brightness of a display picture are improved, the reflection of light on a screen is reduced, an image is clearer, the color is more gorgeous, the color is more saturated, and the display effect is obviously improved.

The AR glass is glass which is subjected to coating process treatment on one side or two sides of the glass. The method comprises the steps of depositing multiple niobium oxide and silicon oxide film layers on the surface of glass to achieve a destructive interference effect to reduce the reflectivity of the surface of the glass, and according to the condition that the absorption of the glass is unchanged according to T = 1-rho-alpha (wherein T is the transmittance, rho is the reflectivity, and alpha is the absorption rate), when the reflectivity is reduced, the transmittance of the whole cover glass is improved, and the spectral reflectivity in a visible light range is reduced to be below 1%; the spectral reflectance of the uncoated glass in the single-sided visible range was about 4%.

The AF glass achieves the purpose of surface modification by depositing a layer of AF material on the outermost layer of the cover glass, and the AF material is deposited on the surface of the cover glass by a process of heating and evaporating the AF material in vacuum. The AF material is a fluorine-containing paint made of fluorosilicone resin of a special structure, and is generally called perfluoropolyether. The AF material has the characteristics of fingerprint resistance, high hardness, scratch resistance and the like.

The existing AG, AR and AF film coating process for cover plate glass comprises the following steps: cleaning → AG spraying → cleaning → coating → AR coating → AF coating → baking, and the coating system for realizing the process has low automation degree, and the materials need to be manually conveyed among different procedures. In the process of material conveying and waiting, the surface of the glass is inevitably polluted, and more man-made interference exists in the process, so that the production efficiency and the yield are low. Meanwhile, AG spraying in the existing production system is carried out in the atmospheric environment, the surface of the glass substrate has more moisture and gas, the adhesion of the film layer is poor, and the wear resistance is poor. Therefore, it is urgently needed to develop an AR, AG and AF coating system with good quality and high efficiency.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the coating system for the AR, AG and AF of the cover plate glass overcomes the defects of the prior art, realizes automatic feeding and discharging, does not have manual interference, and avoids the problems of glass dirt and crystal points; meanwhile, AG spraying is carried out in a vacuum environment, so that the problems of poor film adhesion and poor wear resistance caused by more moisture and gas on the surface of glass in an atmospheric environment are avoided.

The technical scheme of the invention is as follows:

the AR, AG and AF coating system for the cover plate glass comprises a first vacuum transition chamber, wherein a conveying roller way is arranged at the feeding end of the first vacuum transition chamber; gate valves are respectively arranged at the feed inlet and the discharge outlet of the first vacuum transition chamber, and the discharge outlet of the first vacuum transition chamber is connected with the feed inlet of the first vacuum chamber; the first vacuum chamber is provided with an air inlet, a conveying roller way is arranged in the first vacuum chamber, and a first sputtering cathode and a second sputtering cathode are sequentially arranged along the glass conveying direction; the first sputtering cathode and the second sputtering cathode respectively comprise target tubes, target materials are arranged on the target tubes, magnet arrays are arranged in the target tubes along the length direction, and the target tubes are connected with a power supply; the discharge hole of the first vacuum chamber is connected with the feed inlet of the second vacuum transition chamber, and gate valves are respectively arranged at the feed inlet and the discharge hole of the second vacuum transition chamber; a conveying roller way is arranged in the second vacuum transition chamber; the first vacuum transition chamber, the first vacuum chamber and the second vacuum transition chamber are respectively connected with a vacuumizing device; a conveying roller way is arranged at the discharge end of the second vacuum transition chamber, a heating furnace is arranged at the conveying tail end of the conveying roller way, and a conveying roller way is arranged in the heating furnace; a glass cooling and heat insulating device is arranged at the discharge end of the heating furnace, and a transmission roller way is arranged in the glass cooling and heat insulating device; a conveying roller way is arranged at the discharge end of the glass cooling and heat insulating device; a third vacuum transition chamber is arranged at the transmission tail end of the transmission roller way at the discharge end of the glass cooling and heat insulation device, and a transmission roller way is arranged in the third vacuum transition chamber; gate valves are respectively arranged at the feed inlet and the discharge outlet of the third vacuum transition chamber, and the discharge outlet of the third vacuum transition chamber is connected with the feed inlet of the second vacuum chamber; the second vacuum chamber is provided with an air inlet, a conveying roller way is arranged in the second vacuum chamber, and a third sputtering cathode, a fourth sputtering cathode and a fifth sputtering cathode are sequentially arranged along the glass conveying direction; the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode comprise target tubes, target materials are arranged on the target tubes, magnet arrays are arranged in the target tubes along the length direction, and the target tubes are connected with a power supply; the discharge hole of the second vacuum chamber is connected with the feed inlet of a fourth vacuum transition chamber, and gate valves are respectively arranged at the feed inlet and the discharge hole of the fourth vacuum transition chamber; a conveying roller way is arranged in the fourth vacuum transition chamber; the third vacuum transition chamber, the second vacuum chamber and the fourth vacuum transition chamber are respectively connected with a vacuumizing device; a conveying roller way is arranged at the discharge end of the fourth vacuum transition chamber, and AF spraying equipment is arranged at the conveying tail end of the conveying roller way; a conveying roller way is arranged at the discharge end of the AF spraying equipment, and AF baking equipment is arranged at the conveying tail end of the conveying roller way; a conveying roller way is arranged at the discharge end of the AF baking equipment; the conveying roller way is driven by a motor to rotate, and the motor, the gate valve and the power supply are respectively electrically connected with the control system.

Preferably, the glass cooling and heat preserving device comprises a cooling furnace and a heat-conducting oil cooling and heat preserving furnace, the cooling furnace is positioned between the heating furnace and the third vacuum transition chamber, and the heat-conducting oil cooling and heat preserving furnace is positioned on one side of the cooling furnace; the cooling furnace comprises an upper cooling chamber and a lower cooling chamber, and a conveying roller way is arranged between the upper cooling chamber and the lower cooling chamber; an upper air blowing main pipeline is arranged in the upper cooling chamber, a lower air blowing main pipeline is arranged in the lower cooling chamber, a plurality of air blowing fine branch pipelines are respectively communicated with the upper air blowing main pipeline and the lower air blowing main pipeline, and air outlets of the air blowing fine branch pipelines face to the glass; a support rod is arranged on the lower air blowing main pipeline, a conveying roller way in the cooling furnace is arranged on the support rod, and the bottom of the lower air blowing main pipeline is connected with piston rods of a plurality of first cylinders; a plurality of second air cylinders are also arranged in the cooling cavity below the glass and are perpendicular to the conveying direction at intervals; a piston rod of the second cylinder is provided with a photoelectric sensor, and the top of the piston rod is provided with a universal wheel; the conduction oil cooling and heat preserving furnace comprises an upper conduction oil cooling and heat preserving cavity and a lower conduction oil cooling and heat preserving cavity, a belt conveyor is arranged between the upper conduction oil cooling and heat preserving cavity and the lower conduction oil cooling and heat preserving cavity, the transmission direction of the belt conveyor is vertical to the transmission direction of a transmission roller way in the cooling furnace, and the belt conveyor is driven by a motor; a heat conduction oil storage container is arranged on the belt conveyor, a temperature sensor is installed in the heat conduction oil storage container, one end, far away from the cooling furnace, of the heat conduction oil storage container is fixed on a belt of the belt conveyor, and a glass containing seam is formed in the other end of the heat conduction oil storage container; the heat conduction oil storage container is provided with a heat conduction oil inlet and a heat conduction oil outlet, the heat conduction oil outlet is respectively connected with a heat conduction oil freezing pipeline and a heat conduction oil heating pipeline through pipelines, the heat conduction oil freezing pipeline is connected with an oil cooler, an electromagnetic valve and an oil pump, and the heat conduction oil heating pipeline is connected with a heat conduction oil heater, an electromagnetic valve and an oil pump; the heat-conducting oil freezing pipeline and the heat-conducting oil heating pipeline are respectively connected with a heat-conducting oil inlet of the heat-conducting oil storage container through pipelines; a photoelectric sensor is arranged at one end of the cooling furnace, which is far away from the heat conduction oil cooling and heat preservation furnace, and corresponds to the height of the heat conduction oil storage container, and the first cylinder, the second cylinder, the photoelectric sensor, the motor, the temperature sensor and the oil pump are respectively electrically connected with a control system.

Preferably, the below of the trunk line of blowing on is provided with the installation pole, is provided with a plurality of compression roller along glass transmission direction interval on the installation pole, and the vertical rectangular shape hole of having seted up in the position that corresponds the compression roller on the installation pole, and the both ends of compression roller pass rectangular shape hole and install on the installation pole and when the compression roller is in the most down position, the distance between compression roller and the transmission roll table is less than glass thickness.

Preferably, the heat conduction oil storage container comprises a hollow upper shell and a hollow lower shell, one ends of the upper shell and the lower shell, which are far away from the cooling furnace, are fixedly connected to a fixing plate, and the fixing plate is fixed on a belt of a belt conveyor; a plurality of idler wheels are respectively arranged on the lower surface of the upper shell and the upper surface of the lower shell, temperature sensors are respectively arranged in the upper shell and the lower shell, and a heat conduction oil inlet and a heat conduction oil outlet are respectively arranged on the upper shell and the lower shell.

Preferably, an electric heating wire and a temperature sensor are respectively arranged in the upper heat-conducting oil cooling and heat-insulating cavity and the lower heat-conducting oil cooling and heat-insulating cavity, and the electric heating wire and the temperature sensor are respectively electrically connected with the control system.

Preferably, the heating furnace comprises an upper heating chamber and a lower heating chamber, a transmission roller way is arranged between the upper heating chamber and the lower heating chamber, and the transmission roller way is driven by a motor; the upper heating chamber and the lower heating chamber are respectively provided with an electric heating wire and a temperature sensor which are respectively electrically connected with the control system.

Preferably, the conveying roller ways in the first vacuum chamber and the second vacuum chamber are both connected with a bias power supply, and the bias power supply is electrically connected with the control system; in the first vacuum chamber and the second vacuum chamber, an ion binding device is arranged below the glass and comprises an outer cover, three rows of magnets are fixed in the outer cover, each row of magnets is arranged perpendicular to the glass conveying direction, the S pole of the middle row of magnets faces the glass, and the N poles of the other two rows of magnets face the glass.

Preferably, a cooling box is connected below the outer cover, and a cooling water pipe is arranged in the cooling box.

Preferably, a glass cleaning device is arranged at the transmission tail end of a transmission roller way at the discharge end of the glass cooling and heat insulating device, a transmission roller way is arranged at the discharge end of the glass cleaning device, and a third vacuum transition chamber is arranged at the transmission tail end of the transmission roller way;

preferably, the conveying roller way at the feeding end of the first vacuum transition chamber, the conveying roller way at the discharging end of the second vacuum transition chamber, the conveying roller way at the discharging end of the glass cooling and heat preserving device, the conveying roller way at the discharging end of the glass cleaning equipment, the conveying roller way at the discharging end of the fourth vacuum transition chamber, the conveying roller way at the discharging end of the AF spraying equipment and the conveying roller way at the discharging end of the AF baking equipment are respectively provided with a photoelectric sensor, the photoelectric sensors are arranged at the starting end and the tail end of the conveying roller way, and the photoelectric sensors are electrically connected with the control system.

Compared with the prior art, the invention has the following beneficial effects:

1. the coating system of the invention connects the primary coating section, the heating and cooling section, the cleaning section, the secondary coating section, the spraying AF section and the baking section through the transmission roller way among the devices, realizes automatic feeding and discharging, has no manual interference, and avoids the problems of glass dirt and crystal points. Meanwhile, the invention creatively designs the equipment of the primary coating section and the secondary coating section, so that AG spraying is carried out in a vacuum environment, and the problems of poor film adhesion and poor wear resistance caused by more moisture and gas on the surface of glass in an atmospheric environment are avoided.

2. According to the invention, the heating and cooling device for the glass is uniquely designed, the glass is subjected to high-temperature heating treatment through the heating furnace, the heated glass is subjected to primary air cooling and cooling through the cooling furnace, and finally the glass is subjected to secondary cooling and heat preservation through the heat-conducting oil cooling and heat preservation furnace, so that microcrystals are formed in the bottom oxide microcrystalline dielectric layer on the glass, and the existence of the microcrystals can cause light refraction, thereby reducing the intensity of direct light, increasing haze and simultaneously reducing reflection.

3. According to the invention, the sputtering cathode is applied with bias voltage and a magnetic field to roughen the AR film layers on the surface and the outermost layer of the glass, so that the surface of the glass and the film layers generates concave-convex feeling, and the adhesive force and hardness of the film layers are increased.

Drawings

In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present invention, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.

FIG. 1 is a schematic view showing the positional relationship of the coating system of the present invention.

FIG. 2 is a schematic diagram of the structure of a first sputtering cathode in a first vacuum chamber of the present invention.

FIG. 3 is a side view of a first sputtering cathode within the first vacuum chamber of the present invention.

FIG. 4 is a schematic diagram of the structure of a second sputtering cathode in the first vacuum chamber of the present invention.

Fig. 5 is a schematic structural view of the heating furnace and the cooling furnace of the present invention.

FIG. 6 is a schematic structural diagram of the cooling furnace and the heat-conducting oil cooling and heat-preserving furnace of the present invention.

Fig. 7 is a schematic structural view of a thermal oil storage container according to the present invention.

FIG. 8 is a schematic diagram showing the positional relationship among the heating furnace, the cooling furnace and the heat-conducting oil cooling and holding furnace of the present invention.

Fig. 9 is a schematic structural view of a lower case in the thermal oil storage container according to the present invention.

FIG. 10 is a schematic view of the structure of the coating layer of the coated glass obtained by the coating system of the present invention.

In the figure, 1, glass; 2. a first vacuum transition chamber; 3. a conveying roller way; 4. a first vacuum chamber; 5. an air inlet; 6. a target tube; 7. a magnet; 8. a second vacuum transition chamber; 9. a heating furnace; 901. an upper heating chamber; 902. a lower heating chamber; 10. a third vacuum transition chamber; 11. a second vacuum chamber; 12. a fourth vacuum transition chamber; 13. AF spraying equipment; 14. an AF baking device; 15. a cooling furnace; 1501. an upper cooling chamber; 1502. a lower cooling chamber; 16. an upper blowing main pipeline; 17. a lower blowing main pipeline; 18. blowing the thin branch pipeline; 19. a support bar; 20. a first cylinder; 21. a second cylinder; 22. a photosensor; 23. a universal wheel; 24. a compression roller; 25. a heat conducting oil cooling and heat preserving furnace; 2501. an upper heat conduction oil cooling and heat preservation cavity; 2502. a lower heat conduction oil cooling and heat preservation chamber; 2503. a belt conveyor; 2504. a heat transfer oil storage container; 25041. an upper housing; 25042. a lower housing; 25043. a glass receiving slot; 25044. a heat conducting oil inlet; 25045. a heat conducting oil outlet; 26. a temperature sensor; 27. an oil cooler; 28. an electromagnetic valve; 29. an oil pump; 30. a heat conducting oil heater; 31. a fixing plate; 32. a roller; 33. an electric heating wire; 34. a housing; 35. a cooling tank; 36. a cooling water pipe; 37. glass cleaning equipment; 38. a motor; 39. heat preservation rock wool; 40. a check valve; 41. a heat conducting oil inlet valve; 42. a heat conducting oil outlet valve; 43. oxidizing the microcrystalline dielectric layer at the bottom layer; 44. a first oxide dielectric layer; 45. a second dielectric oxide layer; 46. a third oxide medium layer; 47. a fourth oxide dielectric layer; 48. and (3) an AF layer.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example 1

As shown in fig. 1, the present embodiment provides an AR, AG and AF coating system for cover glass, and the process flow of coating using the system is as follows: feeding → primary coating → heating and cooling → cleaning → secondary coating → spraying AF → baking → discharging.

Wherein, the feeding process is realized by adopting a conveying roller way 3, the conveying roller way 3 adopts the conventional conveying roller way 3 in the field, and the glass 1 is driven by a motor 38 to move and convey. Along the transmission direction of glass 1, the both ends of transmission roll table 3 are transmission initiating terminal and transmission end respectively, set up first vacuum transition room 2 at the transmission end department of this transmission roll table 3, accomplish the material loading to first vacuum transition room 2 through transmission roll table 3.

A conveying roller table 3 is also arranged in the first vacuum transition chamber 2 and is used for conveying the glass 1 in the first vacuum transition chamber 2; the feed inlet and the discharge outlet of the first vacuum transition chamber 2 are respectively provided with a gate valve, the feeding and the discharging of the glass 1 are completed through the opening and the closing of the gate valves, and when the gate valves are opened, the external air enters the first vacuum transition chamber 2, and the first vacuum transition chamber 2 breaks the vacuum. The first vacuum transition chamber 2 is connected with a vacuumizing device, and after the gate valve is opened and closed, the vacuumizing device is started to vacuumize the first vacuum transition chamber 2, so that the vacuum degree of the first vacuum transition chamber 2 is recovered to be consistent with that of the first vacuum chamber 4.

The discharge hole of the first vacuum transition chamber 2 is connected with the feed hole of the first vacuum chamber 4; as shown in fig. 2, the first vacuum chamber 4 is connected to a vacuum extractor and provided with an inlet port 5; a conveying roller table 3 is arranged in the first vacuum chamber 4, and a first sputtering cathode (shown in figures 2-3) and a second sputtering cathode (shown in figure 4) are sequentially arranged along the glass conveying direction; first sputter cathode and second sputter cathode all include target pipe 6 (two target pipes 6 are shown in the figure), are provided with the target on the target pipe 6, are provided with magnet array (magnet array's the mode of setting is prior art, and it is not repeated here) along length direction in the target pipe 6, and target pipe 6 is connected with intermediate frequency high voltage power supply (the frequency can be 35MHz, and voltage can be 600V). The target materials of the first sputtering cathode and the second sputtering cathode can adopt silicon oxide, niobium oxide, aluminum oxide, zirconium oxide or titanium oxide.

After glass enters the first vacuum chamber 4, argon and oxygen are introduced into the first vacuum chamber 4 through the air inlet 5, in a high-vacuum environment, air is thin, after a medium-frequency high-voltage power supply connected with the first sputtering cathode is turned on to electrify the target tube 6, the gas introduced into the first vacuum chamber 4 can be ionized to generate glow discharge, electrons and ions formed by ionization can be bound around the target tube 6 by a magnet array in the target tube 6, a plasma region is formed around the target tube 6, ions in the plasma region can bombard the surface of the target material, and thus atoms on the surface of the target material are bombarded and deposited on the surface of the glass to form a bottom oxide microcrystalline dielectric layer 43 (as shown in fig. 10). With the continuous transmission of the glass in the first vacuum chamber 4, the glass reaches the second sputtering cathode after passing through the first sputtering cathode, one or more of argon, krypton, hydrogen and oxygen are introduced into the chamber through the gas inlet 5, and then the first oxide dielectric layer 44 is deposited on the bottom oxide microcrystalline dielectric layer 43 on the surface of the glass by using the same principle (as shown in fig. 10), thereby completing the primary coating process.

As shown in fig. 1, the discharge port of the first vacuum chamber 4 is connected with the feed port of the second vacuum transition chamber 8, the structure of the second vacuum transition chamber 8 is the same as that of the first vacuum transition chamber 2, gate valves are respectively arranged at the feed port and the discharge port, a conveying roller table 3 is arranged in the second vacuum transition chamber 8, and the second vacuum transition chamber 8 is connected with a vacuum pumping device. The glass discharged from the discharge port of the first vacuum chamber 4 enters the second vacuum transition chamber 8.

Wherein, the evacuating device of first vacuum transition room 2, the configuration of first vacuum chamber 4 and second vacuum transition room 8 includes a mechanical pump, install the vacuometer on the pipeline of mechanical pump inlet side, this mechanical pump inlet side has a lobe pump through the pipe connection, install the vacuometer on the pipeline of lobe pump inlet side, a three-way pipe of this lobe pump inlet side installation, one of them branch road passes through the vacuum valve and is connected with first vacuum chamber 4, another branch road has four molecular pumps through pipeline parallel connection, four molecular pumps are connected with first vacuum chamber 4 through the vacuum valve respectively. When the vacuum pumping is performed, the three-way pipe is firstly utilized, the mechanical pump and the roots pump are used for rough pumping of the first vacuum chamber 4, and then the molecular pump is utilized for fine pumping of the first vacuum chamber 4, so that the first vacuum chamber 4 is in a high vacuum state. Through the cooperation of first vacuum transition chamber 2 and second vacuum transition chamber 8 with first vacuum chamber 4, when glass passed in and out first vacuum chamber 4, can guarantee that first vacuum chamber 4 remains vacuum state and vacuum stable all the time. In the invention, AG spraying is carried out in a vacuum environment, so that the problems of poor film adhesion and poor wear resistance caused by more moisture and gas on the surface of glass in an atmospheric environment are avoided.

As shown in fig. 5, a conveying roller way 3 is arranged at the discharge end of the second vacuum transition chamber 8, a heating furnace 9 is arranged at the conveying end of the conveying roller way 3, the heating furnace 9 comprises an upper heating chamber 901 and a lower heating chamber 902, heat-insulating rock wool 39 is filled in the inner walls of the upper heating chamber 901 and the lower heating chamber 902, and the conveying roller way 3 is arranged between the upper heating chamber 901 and the lower heating chamber 902; the upper heating chamber 901 and the lower heating chamber 902 are respectively provided with an electric heating wire 33 and a temperature sensor 26, and the electric heating wire 33 and the temperature sensor 26 are respectively electrically connected with the control system. The heating furnace 9 is used for carrying out high-temperature heating treatment on the AG-sprayed glass, so that the mechanical strength, the shock resistance and the thermal stability of the glass are enhanced.

As shown in fig. 5, a temperature reducing furnace 15 is disposed at the discharging end of the heating furnace 9, a photoelectric sensor 22 is disposed between the heating furnace 9 and the temperature reducing furnace 15 for sensing the position of the glass, and the glass is heated by the heating furnace 9 and then transferred into the temperature reducing furnace 15. The cooling furnace 15 is used for cooling glass, and comprises an upper cooling chamber 1501 and a lower cooling chamber 1502, and a conveying roller table 3 is arranged between the upper cooling chamber 1501 and the lower cooling chamber 1502. Wherein, the upper cooling chamber 1501 is made of stainless steel, the inner wall is filled with heat preservation rock wool 39, and an upper blowing main pipeline 16 is arranged at a position below the upper cooling chamber and close to the glass. The temperature reduction chamber 1502 is made of stainless steel, heat preservation rock wool 39 is filled on the inner wall of the temperature reduction chamber, and a lower blowing main pipeline 17 is arranged above the temperature reduction chamber and close to the glass. The upper blowing main pipeline 16 and the lower blowing main pipeline 17 are respectively communicated with a plurality of blowing fine branch pipelines 18, air outlets of the blowing fine branch pipelines 18 face to the glass, air is supplied to the upper blowing main pipeline 16 and the lower blowing main pipeline 17 through an air compressor, and finally air is blown to the upper surface and the lower surface of the glass through the blowing fine branch pipelines 18 so as to carry out air cooling treatment on the heated high-temperature glass. In order to improve the air cooling efficiency, the arrangement form of the upper air blowing main pipeline 16 and the lower air blowing main pipeline 17 can be designed, so that the air blowing thin branch pipelines 18 are uniformly distributed on the whole glass plate surface.

The lower air blowing main pipeline 17 is provided with a support rod 19, the conveying roller way 3 in the cooling furnace 15 is arranged on the support rod 19, and the bottom of the lower air blowing main pipeline 17 is connected with piston rods of a plurality of first air cylinders 20, so that the conveying roller way 3 can be driven to lift through the first air cylinders 20. A plurality of second air cylinders 21 (four shown) are further arranged below the glass in the lower cooling chamber 1502, and the second air cylinders 21 are arranged at intervals vertical to the conveying direction; a photoelectric sensor 22 is arranged on a piston rod of the second cylinder 21, and a universal wheel 23 is arranged at the top of the piston rod. The second cylinder 21 can jack up the glass after the first cylinder 20 drives the conveying roller table 3 to descend.

Because the glass is thin and light in weight, the problems of displacement and deformation are easy to occur in the air cooling process. In order to increase glass weight, as shown in fig. 5, can be provided with the installation pole in the below of the trunk line 16 that blows last, be provided with a plurality of compression roller 24 along glass transmission direction interval on the installation pole, correspond the vertical rectangular hole that has seted up in compression roller 24's position on the installation pole, long rectangular hole is worn to install on the installation pole and when compression roller 24 was in the below position at the both ends of compression roller 24, and the distance between compression roller 24 and the transmission roll table 3 is less than glass thickness. After glass got into cooling furnace 15, along with glass transmits the removal forward, can upwards jack-up the compression roller 24 that is located the glass top, the rectangular hole on the installation pole reserves the space for reciprocating of compression roller 24. The press roller 24 presses the glass, increasing the weight of the glass, and can fix the glass during air cooling treatment to prevent the glass from shifting and deforming.

As shown in fig. 1, 6 and 8, a heat-conducting oil cooling and heat-preserving furnace 25 is arranged on one side of the cooling furnace 15, the heat-conducting oil cooling and heat-preserving furnace 25 comprises an upper heat-conducting oil cooling and heat-preserving chamber 2501 and a lower heat-conducting oil cooling and heat-preserving chamber 2502, which are both made of stainless steel, and heat-preserving rock wool 39 is filled on the inner wall; a belt conveyor 2503 is arranged between the upper heat-conducting oil cooling and heat-insulating chamber 2501 and the lower heat-conducting oil cooling and heat-insulating chamber 2502, the transmission direction of the belt conveyor 2503 is perpendicular to that of a transmission roller way 3 in the cooling furnace 15, and the belt conveyor 2503 is driven by a motor 38; the belt conveyor 2503 is provided with a heat conduction oil storage container 2504 for containing heat conduction oil to cool and insulate the glass. As shown in fig. 6 to 7, the heat conducting oil storage container 2504 includes a hollow upper casing 25041 and a hollow lower casing 25042, the upper casing 25041 and the lower casing 25042 can be made of copper plates, and heat conduction between the heat conducting oil in the upper casing 25041 and the heat conducting oil in the lower casing 25042 and glass is facilitated by utilizing the characteristic of good heat conductivity of the copper plates, so that the glass can be rapidly cooled. One ends of the upper case 25041 and the lower case 25042, which are away from the temperature reducing furnace 15, are fixedly coupled to a fixing plate 31 (the fixing plate 31 may be a stainless steel plate), and the fixing plate 31 is fixed to a belt of the belt conveyor 2503, thereby fixing the heat transfer oil storage container 2504 to the belt conveyor 2503. As shown in fig. 7 and 9, a plurality of ceramic rollers 32 are respectively mounted on the lower surface of the upper housing 25041 and the upper surface of the lower housing 25042, and the ceramic rollers 32 separate the upper housing 25041 and the lower housing 25042 to form a glass receiving slit 25043. The temperature sensors 26 are respectively installed in the upper and

lower cases

25041 and 25042, and the upper and

lower cases

25041 and 25042 are respectively provided with a conduction oil inlet 25044 and a conduction oil outlet 25045 (five are shown in fig. 9).

After air cooling treatment, the control system controls the four second air cylinders 21 to rise simultaneously to support glass, and then controls the first air cylinder 20 to descend to drive the lower air blowing main pipeline 17 in the cooling furnace 15 and the conveying roller table 3 to descend together; then the control system starts the belt conveyor 2503, and transfers the heat conduction oil storage container 2504 into the cooling furnace 15 from one side of the cooling furnace 15. For convenience of description, the positions corresponding to the four second cylinders 21 are respectively marked as a No. 1 jacking position, a No. 2 jacking position, a No. 3 jacking position and a No. 4 jacking position according to the direction from the near to the far away from the heat transfer oil cooling and heat preserving furnace 25. When the front end of the heat conduction oil storage container 2504 reaches the lifting position No. 1, the photoelectric sensor 22 at the position detects the heat conduction oil storage container 2504, the control system controls the second cylinder 21 at the lifting position No. 1 to descend, the heat conduction oil storage container 2504 continues to transmit forwards, after passing through the lifting position No. 1, the second cylinder 21 at the position rises upwards again until the second cylinder props against the bottom of the heat conduction oil storage container 2504, and the universal wheel 23 at the top of the piston rod of the second cylinder 21 can reduce friction between the second cylinder 21 and the heat conduction oil storage container 2504 in the process of continuing transmission of the heat conduction oil storage container 2504. By analogy, the heat conduction oil storage container 2504 continues to transmit previously, and sequentially passes through the number 2 to 4 jacking positions, the second air cylinders 21 at corresponding positions sequentially descend and ascend, and finally, the glass is transferred to the glass accommodating slot 25043 formed by the upper shell 25041 and the lower shell 25042 of the heat conduction oil storage container 2504. The ceramic rollers 32 on the upper and

lower housings

25041 and 25042 may reduce sliding friction with the glass surface during transfer.

As shown in fig. 6, a photoelectric sensor 22 is installed on one end of the inner wall of the temperature reducing furnace 15, which is far away from the heat transfer oil temperature reducing and maintaining furnace 25, and at a height corresponding to the heat transfer oil storage container 2504, when the heat transfer oil storage container 2504 is driven to the position, the photoelectric sensor 22 detects the heat transfer oil storage container 2504, the control system closes the belt conveyor 2503 to stop the heat transfer oil storage container 2504 at the position, and the temperature reducing and maintaining treatment is performed on the glass.

As shown in fig. 9, the conduction oil outlets 25045 of the upper and

lower cases

25041 and 25042 are respectively connected to a conduction oil freezing line and a conduction oil heating line through a pipeline (a conduction oil outlet valve 42 is installed on the pipeline), the conduction oil freezing line is connected to an oil cooler 27 (BL-415 manufactured by rui excellent mechanical equipment ltd., bos., inc., of boshan city), an electromagnetic valve 28, an oil pump 29, and a check valve 40, and the conduction oil heating line is connected to a conduction oil heater 30 (JOST manufactured by luode mechanical ltd., of tokyo kodao, inc., an electromagnetic valve 28, an oil pump 29, and a check valve 40; the conduction oil freezing line and the conduction oil heating line (the conduction oil inlet valve 41 is installed on the lines) are respectively connected with the conduction oil inlet 25044 of the conduction oil storage container 2504 through the lines.

The heat conduction oil is cooled by the oil cooler 27, and then the cooled heat conduction oil pump 29 is fed into the upper shell 25041 and the lower shell 25042 of the heat conduction oil storage container 2504 through pipelines to cool the glass in the glass accommodating seam 25043, so that the wind spots caused by pure wind cooling can be avoided, the uniformity of the temperature of the whole glass plate surface can be ensured, and the concentration of thermal stress is avoided; meanwhile, the heat exchange speed of the heat conduction oil is high, and the glass can be cooled rapidly. The temperature of the heat conduction oil is continuously reduced along with the circulation of the heat conduction oil in each pipeline, when the temperature detectors in the upper shell 25041 and the lower shell 25042 detect that the temperature of the heat conduction oil is too low, the control system controls to close the electromagnetic valve 28 on the heat conduction oil freezing pipeline and open the electromagnetic valve 28 on the heat conduction oil heating pipeline, and the heat conduction oil is heated and heated by the heat conduction oil heater 30; when the temperature sensor 26 detects that the temperature of the heat transfer oil is too high, the reverse operation is performed to cool the heat transfer oil again. The heat-conducting oil is cooled and heated alternately, so that the temperature of the glass is maintained in a temperature range with small fluctuation, and then the process time is controlled by the control system, so that the glass is cooled to the temperature of the heat-conducting oil firstly and then is kept warm for a period of time, and the cooling and heat preservation treatment of the glass is completed. When the coated glass subjected to the high-temperature heating treatment in the heating furnace 9 is subjected to cooling and heat preservation treatment, microcrystals are formed in the bottom oxidized microcrystalline dielectric layer 43, and the existence of the microcrystals can cause light refraction, so that the intensity of direct light is reduced, the haze is increased, and the reflection is also reduced.

In addition, in order to reduce heat exchange with the outside air during the circulation of the heat transfer oil and reduce heat loss of the heat transfer oil, as shown in fig. 6, an electric heating wire 33 and a temperature sensor 26 are respectively arranged in the upper heat transfer oil cooling and heat preserving chamber 2501 and the lower heat transfer oil cooling and heat preserving chamber 2502, and the electric heating wire 33 and the temperature sensor 26 are respectively electrically connected with the control system. The electric heating wires 33 arranged close to the glass plane in the upper heat-conducting oil cooling and heat-insulating chamber 2501 and the lower heat-conducting oil cooling and heat-insulating chamber 2502 can heat surrounding air to the same temperature as the heat-conducting oil, reduce heat transfer between the heat-conducting oil and the air, and keep the temperature stability of the heat-conducting oil.

After the heat conduction oil storage container 2504 carries out cooling and heat preservation treatment on the glass, the control system reversely controls the belt conveyor 2503 to pull the heat conduction oil storage container back to the heat conduction oil cooling and heat preservation furnace 25, in the process, after the four second cylinders 21 are sequentially lifted up to support the glass, the first cylinder 20 is lifted up to drive the conveying roller way 3 to return to the original position, and then the four second cylinders 21 are simultaneously lowered down to put the glass back on the conveying roller way 3 to be continuously conveyed to the next procedure.

As shown in fig. 1, a conveying roller way 3 is arranged at the discharge end of the cooling furnace 15, and a glass cleaning device 37 (KSD-PBQX manufactured by shengda ultrasonic automation equipment limited, shenzhen, department, etc.) is arranged at the conveying tail end of the conveying roller way 3, and has the functions of wind cutting, soaking, washing, pure water washing, blow-drying, etc., so that the dirt on the surface of the glass can be cleaned, the cleanliness of the surface of the glass is improved, and the defect formed in the film layer in the subsequent secondary film coating process is avoided.

As shown in fig. 1, a conveying roller way 3 is arranged at the discharge end of the glass cleaning device 37, a third vacuum transition chamber 10 is arranged at the conveying end of the conveying roller way 3, and the conveying roller way 3 is arranged in the third vacuum transition chamber 10; gate valves are respectively arranged at the feed inlet and the discharge outlet of the third vacuum transition chamber 10, and the discharge outlet of the third vacuum transition chamber 10 is connected with the feed inlet of the second vacuum chamber 11; the second vacuum chamber 11 is provided with an air inlet 5, a conveying roller table 3 is arranged in the second vacuum chamber 11, and a third sputtering cathode, a fourth sputtering cathode and a fifth sputtering cathode are sequentially arranged along the glass conveying direction; the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode all comprise target tubes 6, targets are arranged on the target tubes 6, magnet arrays are arranged in the target tubes 6 along the length direction, and the target tubes 6 are connected with a medium-frequency high-voltage power supply. A discharge hole of the second vacuum chamber 11 is connected with a feed inlet of a fourth vacuum transition chamber 12, and gate valves are respectively arranged at the feed inlet and the discharge hole of the fourth vacuum transition chamber 12; a conveying roller table 3 is arranged in the fourth vacuum transition chamber 12; the third vacuum transition chamber 10, the second vacuum chamber 11 and the fourth vacuum transition chamber 12 are respectively connected with a vacuumizing device.

The working processes of the third vacuum transition chamber 10, the second vacuum chamber 11 and the fourth vacuum transition chamber 12 are the same as those of the first vacuum transition chamber 2, the first vacuum chamber 4 and the second vacuum transition chamber 8, and are not described again. And a second oxide medium layer 45, a third oxide medium layer 46 and a fourth oxide medium layer 47 are sequentially plated on the upper surface of the glass through the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode in the second vacuum chamber 11 (as shown in fig. 10), so that the secondary coating process is completed. Wherein, the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode can adopt silicon oxide, niobium oxide, aluminum oxide, zirconium oxide or titanium oxide.

As shown in fig. 1, a conveying roller table 3 is arranged at a discharge end of the fourth vacuum transition chamber 12, an AF spraying device 13 (AF 6500 produced by guangdong seismograph intelligent equipment ltd) is arranged at a conveying end of the conveying roller table 3, and AF liquid is sprayed on the surface of the coated glass in a spraying manner to form an anti-fingerprint hydrophobic coating (AF layer 48, as shown in fig. 10), so that the coated glass is more resistant to dirt and scratches. The discharging end of the AF spraying equipment 13 is provided with a conveying roller way 3, the conveying end of the conveying roller way 3 is provided with AF baking equipment 14 (XUD 2400 produced by New mechanical equipment Co., ltd. Of Dongguan), the AF layer 48 is baked and cured, and the equipment is used in combination with the AF spraying equipment 13 for enhancing the AF coating and improving the adhesion and the wear resistance of the AF coating. The discharging end of the AF baking equipment 14 is provided with a conveying roller way 3, and the glass which is processed in the whole process is conveyed out for packaging.

In addition, in order to realize the automatic transmission of glass, as shown in fig. 5, the transmission roller way 3 at the feeding end of the first vacuum transition chamber 2, the transmission roller way 3 at the discharging end of the second vacuum transition chamber 8, the transmission roller way 3 at the discharging end of the glass cooling and heat preserving device, the transmission roller way 3 at the discharging end of the glass cleaning device 37, the transmission roller way 3 at the discharging end of the fourth vacuum transition chamber 12, the transmission roller way 3 at the discharging end of the AF spraying device 13 and the transmission roller way 3 at the discharging end of the AF baking device 14 are respectively provided with a photoelectric sensor 22, the photoelectric sensor 22 is arranged at the transmission starting end and the transmission end of the transmission roller way 3, and the photoelectric sensor 22 is electrically connected with the control system. The photoelectric sensor 22 at the transmission starting end can detect that the glass is transmitted to the transmission roller way 3, the glass is continuously transmitted forwards until the transmission end is reached, the photoelectric sensor 22 at the transmission end detects that the glass is transmitted in place, and the control system judges whether the glass transmitted in place is continuously transmitted forwards or waits in place according to whether the glass is processed in the next procedure; when waiting in situ, only the motor 38 of the conveying roller bed 3 needs to be controlled and closed.

Example 2

On the basis of the embodiment 1, the conveying roller ways 3 in the first vacuum chamber 4 and the second vacuum chamber 11 are both connected with a bias power supply, and the bias power supply is electrically connected with a control system; in the first vacuum chamber 4 and the second vacuum chamber 11, an ion binding device is arranged below the glass, the ion binding device comprises a stainless steel outer cover 34, three rows of magnets 7 are fixed in the outer cover 34 through bolts, each row of magnets 7 is arranged perpendicular to the glass transmission direction, the S pole of the middle row of magnets 7 faces the glass 1, and the N poles of the other two rows of magnets 7 face the glass 1.

After the glass is transmitted into the first vacuum chamber 4, one or more of argon, krypton, hydrogen and oxygen is introduced into the first vacuum chamber 4 through the air inlet 5, the bias voltage power supply and the medium-frequency high-voltage power supply are turned on by the control system, the gas is ionized under high pressure in a vacuum environment, the ionized gas is subjected to the action of a magnetic field in the target tube 6, a magnetic field in the ion binding device and an electric field formed by the bias voltage power supply, plasmas are respectively generated below the target and above the glass substrate, and at the moment, the glass is continuously bombarded by the high-energy plasmas, so that the surface of the glass can form an uneven appearance. And after the glass is judged to completely pass through the first sputtering cathode according to the glass transmission time, the control system closes the medium-frequency high-voltage power supply and the bias power supply, stops introducing gas, and controls the transmission roller way 3 to rotate reversely so that the glass is retreated into the first vacuum transition chamber 2. And then, the glass is conveyed into the first vacuum chamber 4 in the forward direction, argon and oxygen are introduced, the medium-frequency high-voltage power supply is started, and when the glass passes through the first sputtering cathode again, a bottom oxide microcrystalline dielectric layer 43 is deposited on the glass.

Similarly, after the glass is plated with the fourth oxide medium layer 47 through the fifth sputtering cathode in the second vacuum chamber 11, the medium-frequency high-voltage power supply is turned off, the gas is stopped from being introduced, and the conveying roller table 3 is controlled to rotate in the reverse direction to enable the glass to return to the start position of the fifth sputtering cathode. Then forward transmission glass again, let in one or more of argon gas, krypton, hydrogen and oxygen, start medium frequency high voltage power supply and bias voltage power supply, in vacuum environment, the gas ionization takes place, the gas of ionization receives the effect of the magnetic field in the magnetic field and the ion constraint device in the target pipe 6 and the electric field that the bias voltage power supply formed, plasma appears in the below of target and the top of glass respectively, when glass passes through the fifth sputtering negative pole again, fourth oxidation dielectric layer 47 surface receives the continuous bombardment effect of high energy plasma, fourth dielectric layer surface can form unevenness's appearance.

In the embodiment, bias voltage and a magnetic field are applied to the first sputtering cathode and the fifth sputtering cathode, so that the glass and the film layer generate uneven shapes, and the adhesion and hardness of the film layer are increased.

In addition, connect cooling tank 35 in ion-binding device's dustcoat 34 below, be provided with condenser tube 36 in the cooling tank 35, the water piping 36 expert has the recirculated cooling water for magnet 7 and dustcoat 34 cooling in the dustcoat 34, prevent that magnet 7 from leading to the demagnetization because of high temperature, also make the rete material of diffraction deposit to dustcoat 34 top combine closely with dustcoat 34 simultaneously, avoid the abrupt change of temperature to lead to the rete material on dustcoat 34 top to burst apart to cause the crystalline point on glass.

Although the present invention has been described in detail in connection with the preferred embodiments with reference to the accompanying drawings, the present invention is not limited thereto. Various equivalent modifications or substitutions can be made on the embodiments of the present invention by those skilled in the art without departing from the spirit and scope of the present invention, and these modifications or substitutions are within the scope of the present invention/any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. An AR, AG and AF plating system for cover glass, characterized in that,

the device comprises a first vacuum transition chamber (2), wherein a conveying roller way (3) is arranged at the feeding end of the first vacuum transition chamber (2), and the conveying roller way (3) is arranged in the first vacuum transition chamber (2); gate valves are respectively arranged at the feed inlet and the discharge outlet of the first vacuum transition chamber (2), and the discharge outlet of the first vacuum transition chamber (2) is connected with the feed inlet of the first vacuum chamber (4);

the first vacuum chamber (4) is provided with an air inlet (5), a conveying roller way (3) is arranged in the first vacuum chamber (4), and a first sputtering cathode and a second sputtering cathode are sequentially arranged along the conveying direction of the glass (1); the first sputtering cathode and the second sputtering cathode respectively comprise a target tube (6), a target material is arranged on the target tube (6), a magnet array is arranged in the target tube (6) along the length direction, and the target tube (6) is connected with a power supply;

the discharge hole of the first vacuum chamber (4) is connected with the feed inlet of the second vacuum transition chamber (8), and gate valves are respectively arranged at the feed inlet and the discharge hole of the second vacuum transition chamber (8); a conveying roller way (3) is arranged in the second vacuum transition chamber (8);

the first vacuum transition chamber (2), the first vacuum chamber (4) and the second vacuum transition chamber (8) are respectively connected with a vacuumizing device;

a conveying roller way (3) is arranged at the discharge end of the second vacuum transition chamber (8), a heating furnace (9) is arranged at the conveying tail end of the conveying roller way (3), and the conveying roller way (3) is arranged in the heating furnace (9); a glass cooling and heat insulating device is arranged at the discharge end of the heating furnace (9), and a conveying roller bed (3) is arranged in the glass cooling and heat insulating device; a conveying roller way (3) is arranged at the discharge end of the glass cooling and heat insulating device;

a third vacuum transition chamber (10) is arranged at the transmission tail end of a transmission roller way (3) at the discharge end of the glass cooling and heat insulation device, and the transmission roller way (3) is arranged in the third vacuum transition chamber (10); gate valves are respectively arranged at the feed inlet and the discharge outlet of the third vacuum transition chamber (10), and the discharge outlet of the third vacuum transition chamber (10) is connected with the feed inlet of the second vacuum chamber (11);

the second vacuum chamber (11) is provided with an air inlet (5), a conveying roller way (3) is arranged in the second vacuum chamber (11), and a third sputtering cathode, a fourth sputtering cathode and a fifth sputtering cathode are sequentially arranged along the glass conveying direction; the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode comprise target tubes (6), target materials are arranged on the target tubes (6), magnet arrays are arranged in the target tubes (6) along the length direction, and the target tubes (6) are connected with a power supply;

a discharge hole of the second vacuum chamber (11) is connected with a feed inlet of a fourth vacuum transition chamber (12), and gate valves are respectively arranged at the feed inlet and the discharge hole of the fourth vacuum transition chamber (12); a conveying roller way (3) is arranged in the fourth vacuum transition chamber (12);

the third vacuum transition chamber (10), the second vacuum chamber (11) and the fourth vacuum transition chamber (12) are respectively connected with a vacuumizing device;

a conveying roller way (3) is arranged at the discharge end of the fourth vacuum transition chamber (12), and AF spraying equipment (13) is arranged at the conveying tail end of the conveying roller way (3); a conveying roller way (3) is arranged at the discharge end of the AF spraying equipment (13), and AF baking equipment (14) is arranged at the conveying tail end of the conveying roller way (3); a conveying roller way (3) is arranged at the discharge end of the AF baking equipment (14);

the conveying roller way (3) is driven by a motor (38) to rotate, and the motor (38), the gate valve and the power supply are respectively and electrically connected with the control system.

2. The AR, AG and AF coating system for cover glass according to claim 1, characterized in that the glass cooling and heat preserving device comprises a cooling furnace (15) and a heat conducting oil cooling and heat preserving furnace (25), the cooling furnace (15) is located between the heating furnace (9) and the third vacuum transition chamber (10), the heat conducting oil cooling and heat preserving furnace (25) is located at one side of the cooling furnace (15); the cooling furnace (15) comprises an upper cooling chamber (1501) and a lower cooling chamber (1502), and a conveying roller way (3) is arranged between the upper cooling chamber (1501) and the lower cooling chamber (1502); an upper air blowing main pipeline (16) is arranged in the upper cooling chamber (1501), a lower air blowing main pipeline (17) is arranged in the lower cooling chamber (1502), the upper air blowing main pipeline (16) and the lower air blowing main pipeline (17) are respectively communicated with a plurality of air blowing thin branch pipelines (18), and air outlets of the air blowing thin branch pipelines (18) face to the glass; a support rod (19) is arranged on the lower blowing main pipeline (17), a conveying roller way (3) in the cooling furnace (15) is installed on the support rod (19), and the bottom of the lower blowing main pipeline (17) is connected with piston rods of a plurality of first air cylinders (20); a plurality of second air cylinders (21) are also arranged below the glass in the lower cooling cavity (1502), and the second air cylinders (21) are arranged at intervals vertical to the transmission direction; a piston rod of the second cylinder (21) is provided with a photoelectric sensor (22), and the top of the piston rod is provided with a universal wheel (23);

the heat-conducting oil cooling and heat-preserving furnace (25) comprises an upper heat-conducting oil cooling and heat-preserving chamber (2501) and a lower heat-conducting oil cooling and heat-preserving chamber (2502), a belt conveyor (2503) is arranged between the upper heat-conducting oil cooling and heat-preserving chamber (2501) and the lower heat-conducting oil cooling and heat-preserving chamber (2502), the conveying direction of the belt conveyor (2503) is vertical to the conveying direction of a conveying roller way (3) in the cooling furnace (15), and the belt conveyor (2503) is driven by a motor (38); a heat conduction oil storage container (2504) is arranged on the belt conveyor (2503), a temperature sensor (26) is installed in the heat conduction oil storage container (2504), one end, far away from the cooling furnace (15), of the heat conduction oil storage container (2504) is fixed on a belt of the belt conveyor (2503), and a glass containing seam (25043) is formed in the other end of the heat conduction oil storage container (2504); a heat conduction oil inlet (25044) and a heat conduction oil outlet (25045) are formed in the heat conduction oil storage container (2504), the heat conduction oil outlet (25045) is respectively connected with a heat conduction oil freezing pipeline and a heat conduction oil heating pipeline through pipelines, the heat conduction oil freezing pipeline is connected with an oil cooler (27), an electromagnetic valve (28) and an oil pump (29), and the heat conduction oil heating pipeline is connected with a heat conduction oil heater (30), an electromagnetic valve (28) and an oil pump (29); the heat-conducting oil freezing pipeline and the heat-conducting oil heating pipeline are respectively connected with a heat-conducting oil inlet (25044) of a heat-conducting oil storage container (2504) through pipelines;

a photoelectric sensor (22) is arranged at one end, far away from the heat conduction oil cooling and heat preservation furnace (25), in the cooling furnace (15) and corresponding to the height of the heat conduction oil storage container (2504), and the first cylinder (20), the second cylinder (21), the photoelectric sensor (22), the motor (38), the temperature sensor (26) and the oil pump (29) are respectively electrically connected with a control system.

3. The AR, AG and AF coating system for cover glass according to claim 2, characterized in that a mounting rod is arranged below the main upper blowing pipe (16), a plurality of press rolls (24) are arranged on the mounting rod at intervals along the glass conveying direction, elongated holes are vertically arranged on the mounting rod corresponding to the positions of the press rolls (24), both ends of the press rolls (24) are arranged on the mounting rod through the elongated holes, and when the press rolls (24) are at the lowest position, the distance between the press rolls (24) and the conveying roller table (3) is less than the thickness of the glass.

4. The AR, AG and AF plating system for cover glass according to claim 2, characterized in that the heat conducting oil storage container (2504) comprises a hollow upper case (25041) and lower case (25042), one end of the upper case (25041) and lower case (25042) far away from the cooling furnace (15) is fixedly connected to the fixing plate (31), the fixing plate (31) is fixed on the belt of the belt conveyer (2503); the lower surface of the upper shell (25041) and the upper surface of the lower shell (25042) are respectively provided with a plurality of rollers (32), the upper shell (25041) and the lower shell (25042) are respectively provided with a temperature sensor (26), and the upper shell (25041) and the lower shell (25042) are respectively provided with a heat conduction oil inlet (25044) and a heat conduction oil outlet (25045).

5. The AR, AG and AF coating system for cover glass according to claim 2, characterized in that the upper heat-conducting oil temperature-reducing and heat-preserving chamber (2501) and the lower heat-conducting oil temperature-reducing and heat-preserving chamber (2502) are respectively provided with an electric heating wire (33) and a temperature sensor (26), and the electric heating wire (33) and the temperature sensor (26) are respectively electrically connected with the control system through wires.

6. The AR, AG, and AF coating system for cover glass according to claim 1, wherein the heating furnace (9) includes an upper heating chamber (901) and a lower heating chamber (902), a conveying roller table (3) is provided between the upper heating chamber (901) and the lower heating chamber (902), and the conveying roller table (3) is driven by a motor (38); an electric heating wire (33) and a temperature sensor (26) are respectively arranged in the upper heating chamber (901) and the lower heating chamber (902), and the electric heating wire (33) and the temperature sensor (26) are respectively electrically connected with a control system through leads.

7. The AR, AG and AF coating system for cover glasses according to claim 1, characterized in that the transport tables (3) inside the first (4) and second (11) vacuum chambers are connected to a bias power supply, which is electrically connected to a control system; in the first vacuum chamber (4) and the second vacuum chamber (11), an ion binding device is arranged below the glass and comprises an outer cover (34), three rows of magnets (7) are fixed in the outer cover (34), each row of magnets (7) is arranged perpendicular to the glass transmission direction, the S pole of one row of magnets (7) in the middle faces the glass (1), and the N poles of the other two rows of magnets (7) face the glass (1).

8. The AR, AG and AF coating system for cover glass according to claim 7, characterized in that a cooling tank (35) is connected to the lower side of said housing (34), and a cooling water pipe (36) is provided in the cooling tank (35).

9. The AR, AG and AF coating system for cover plates of glass as claimed in claim 1, characterized in that the conveying end of the conveying roller table (3) at the discharging end of the glass cooling and insulating device is provided with a glass cleaning device (37), the discharging end of the glass cleaning device (37) is provided with the conveying roller table (3), and the conveying end of the conveying roller table (3) is provided with a third vacuum transition chamber (10).

10. The AR, AG and AF coating system for cover plate glass according to claim 9, characterized in that the conveying roller table (3) at the feeding end of the first vacuum transition chamber (2), the conveying roller table (3) at the discharging end of the second vacuum transition chamber (8), the conveying roller table (3) at the discharging end of the glass cooling and heat insulating device, the conveying roller table (3) at the discharging end of the glass cleaning device (37), the conveying roller table (3) at the discharging end of the fourth vacuum transition chamber (12), the conveying roller table (3) at the discharging end of the AF spraying device (13) and the conveying roller table (3) at the discharging end of the AF baking device (14) are respectively provided with a photoelectric sensor (22), the photoelectric sensors (22) are arranged at the transmission starting end and the transmission ending end of the conveying roller table (3), and the photoelectric sensors (22) are electrically connected with the control system.