CN115901863A - Coupled array sensor and method for synchronously identifying and detecting multiple trace substances - Google Patents
Coupled array sensor and method for synchronously identifying and detecting multiple trace substances Download PDFInfo
- Publication number
- CN115901863A CN115901863A CN202211460417.7A CN202211460417A CN115901863A CN 115901863 A CN115901863 A CN 115901863A CN 202211460417 A CN202211460417 A CN 202211460417A CN 115901863 A CN115901863 A CN 115901863A
- Authority
- CN
- China
- Prior art keywords
- frequency
- resonance unit
- frequency resonance
- low
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention belongs to the technical field of quality sensing, and particularly relates to a coupling array sensor and a method for synchronously identifying and detecting multiple trace substances; the micro-driver is fixed at the bottom of the base, the top of the base is provided with a plurality of low-frequency resonance units, the base at the right end of each low-frequency resonance unit is provided with a high-frequency resonance unit, the right end of each low-frequency resonance unit and the front and rear ends of each high-frequency resonance unit are deposited with specific adsorption films, the micro-transducer is fixed on the high-frequency resonance unit, one part of the coupling unit is fixed on the low-frequency resonance unit, and the other part of the coupling unit is fixed on the high-frequency resonance unit; the mass information of various substances to be detected is gathered on the amplitude-frequency characteristic curve of a single high-frequency resonance unit by utilizing the internal resonance among the coupling resonance arrays formed by a plurality of resonance units, so that the single-input single-output, synchronous and high-precision identification and detection of the various substances are realized; the output circuit is greatly simplified, the sensitivity is amplified, and the synchronous identification and detection of various substances with low power consumption, low cost and high precision are realized.
Description
Technical Field
The invention belongs to the technical field of quality sensing, and particularly relates to a coupling array sensor and a method for synchronously identifying and detecting multiple trace substances.
Background
With the development of science and technology, the living standard of people is continuously improved. However, in recent years, many problems such as environmental pollution, disease prevention, public safety, and the like have been successively revealed. In order to solve the problems, it is important to detect trace pollutants, explosives, small biological molecules and the like and make an early warning. Sensors that can be used to achieve small mass detection mainly include electrical, electrochemical, optical, and resonant beam types. Among them, the resonant beam sensor has been widely used in fields such as mass (gas, virus, cell, biomolecule, etc.) sensing, force sensing, electromagnetic field sensing, etc. because of its high stability, simple structure, easy integration and miniaturization, and low cost. However, the sensing performance of the resonant sensor is limited by various factors such as a resonance frequency, a quality factor, a vibration intensity, and noise. For this reason, researchers in various countries have done much work both from engineering and from principle. In engineering, ultralow temperature low-temperature sensing, vacuum packaging and feedback excitation are mainly adopted to improve the sensing performance. In principle, the sensing resolution is improved mainly by applying residual stress, mechanical sideband excitation, parameter amplification and phase synchronization, and sensitivity amplification is realized by utilizing the nonlinear vibration principles such as Dafen bifurcation, parameter resonance, synchronous resonance, internal resonance and the like in a single or coupled micro/nano mechanical system. Although the above work breaks through the difficulty of detecting a single trace substance from an engineering or physical level, the synchronous identification and detection of multiple trace substances still have great challenges.
Disclosure of Invention
In order to overcome the problems, the invention provides a coupling array sensor and a method for synchronously identifying and detecting a plurality of trace substances; the method aims to utilize internal resonance among coupling resonance arrays formed by a plurality of resonance units to converge the quality information of various substances to be detected on the amplitude-frequency characteristic curve of a single high-frequency resonance unit 202, so as to realize single-input single-output, synchronous and high-precision identification and detection of the various substances; the multi-body internal resonance of the coupling array structure is realized by using a simple sweep frequency excitation circuit, the resonance frequency deviation of a plurality of resonance units caused by a plurality of substances is skillfully subjected to frequency-up amplification and converged on the amplitude-frequency characteristic curve of a single high-frequency resonance unit, the output circuit is greatly simplified, the sensitivity is amplified, and the synchronous identification and detection of the plurality of substances with low power consumption, low cost and high precision are realized.
A coupled array sensor for synchronously identifying and detecting multiple trace substances comprises a micro-actuator 1, a coupled resonant array 2, a specificity adsorption film 3, a micro-transducer 4 and a base 5, wherein the coupled resonant array 2 comprises a high-frequency resonant unit 202, low-frequency resonant units 201 and a coupling unit 203, the micro-actuator 1 is fixed at the bottom of the base 5, the top of the base 5 is provided with a plurality of low-frequency resonant units 201, the high-frequency resonant unit 202 is arranged on the base 5 at the right end of the low-frequency resonant unit 201, the specificity adsorption film 3 is deposited at the right end of each low-frequency resonant unit 201 and at the front end and the rear end of each high-frequency resonant unit 202, the micro-transducer 4 is fixed on the front end surface of the high-frequency resonant unit 202, one part of the coupling unit 203 is fixed on the upper surface at the right end of the low-frequency resonant unit 201, and the other part of the coupling unit 203 is fixed on the upper surface at the right side of the high-frequency resonant unit 202.
The high frequency resonance unit 202 includes a transverse cantilever and a longitudinal cantilever, wherein the two transverse cantilevers are arranged in parallel, and the right ends of the two transverse cantilevers are fixed at the front and rear ends of the lower portion of the longitudinal cantilever respectively.
The low-frequency resonance unit 201 is a rectangular cantilever.
The coupling unit 203 is a magnetic coupling unit composed of a square rubidium iron boron magnet 20301 and a rectangular parallelepiped rubidium iron boron magnet 20302, which are opposite to each other in the same polarity, wherein the square rubidium iron boron magnet 20301 and the rectangular parallelepiped rubidium iron boron magnet 20302 are respectively fixed on the upper surface of the right end portion of the low-frequency resonance unit 201 and the upper surface of the longitudinal cantilever of the high-frequency resonance unit 202.
The micro-actuator 1 is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a thermal actuator, an optical actuator, a shape memory alloy actuator or a magnetostrictive actuator.
In the coupled resonant array 2, the natural frequency ω of the low-frequency resonant unit 201 i (i =1,2,3 \ 8230;, n-1) are close and approximately isometrically increased, i.e., ω is increased i -ω i-1 δ (i =1,2,3 \8230;, n-1), where n-1 is the number of low-frequency resonance units 201, n is the number of substances to be measured, and is also the sum of n-1 low-frequency resonance units 201 and one high-frequency resonance unit 202; δ is a natural frequency difference between adjacent low frequency resonance units 201; the natural frequencies of the high frequency resonance unit 202 and the low frequency resonance unit 201 are approximately in an integer ratio relationship, i.e., ω n ≈αω 1 ≈αω 2 ≈…≈αω n-1 Where α is an integer, is a natural frequency ratio, ω, of the high-frequency resonance unit 202 and the low-frequency resonance unit 201 n Is a natural frequency, ω, of the high-frequency resonance unit 202 1 、ω 2 …ω n-1 The natural frequencies of the n-1 low-frequency resonance units 201, respectively.
The number of the low-frequency resonance units 201 in the coupled resonance array 2 is one less than that of the substances to be measured.
The coupling unit 203 is an electrostatic coupling unit, and is composed of a main electrode plate 20301 and an auxiliary electrode plate 20302, which are respectively fixed on the left end surface of the low-frequency resonance unit 201 and the right end surface of the high-frequency resonance unit 202 to form a parallel capacitor structure.
The specific adsorption film 3 is adsorbed on the low-frequency resonance unit 201 and the high-frequency resonance unit 202 by adopting a biological adsorption, chemical adsorption or physical adsorption principle according to the property of the substance to be detected.
The micro-transducer 4 is a piezoelectric micro-transducer, and comprises an upper electrode 401, a piezoelectric layer 402 and a lower electrode 403, wherein the lower electrode 403 is fixed on the transverse cantilever of the high-frequency resonance unit 202, the piezoelectric layer 402 is fixed on the lower electrode 403, and the upper electrode 401 is fixed on the piezoelectric layer 402.
A method for applying the coupled array sensor for synchronously identifying and detecting a plurality of trace substances comprises the following steps:
step one, calibrating the initial resonance frequency of each resonance unit:
at the natural frequency ω of the low-frequency resonance unit 201 i (i =1,2,3 \8230;, n-1) and the amplitude a is set to be close to the micro-actuator 1 d The whole sensor is driven by the acceleration frequency rising scan with the angular frequency of omega, the low-frequency resonance unit 201 generates resonance reaction under the frequency rising scan drive of the micro-driver 1, and the resonance peak of the low-frequency resonance unit 201 deviates from the natural frequency omega of the low-frequency resonance unit due to the influence of the cubic rigidity of the low-frequency resonance unit 201 i Deflected to the right and at a new frequency point omega i,1 Amplitude jump occurs:
wherein
m i 、k i 、c i 、k non,i Effective mass, linear stiffness, linear damping, orthocubic stiffness, lambda, respectively, of the low frequency resonance unit 201 i Non-linear coupling force F c,i Coefficient of linear term of (c); at a non-linear coupling force F c,i Under the action of the vibration sensor, the high-frequency resonance unit 202 and the low-frequency resonance unit 201 are in internal resonance, part of vibration energy of the low-frequency resonance unit 201 is transferred to the high-frequency resonance unit 202, and the frequency multiplication resonance of the high-frequency resonance unit 202 is caused when the driving frequency of the micro-driver 1 is swept to the natural frequency omega of the high-frequency resonance unit 202 n 1/α of, i.e. < >>
At this time, the high-frequency resonance unit 202 appears a resonance peak, where m n 、k n Effective mass and linear stiffness of the high-frequency resonance unit 202 are respectively, and alpha is the approximate ratio of natural frequencies of the high-frequency resonance unit 202 and the low-frequency resonance unit 201; when the micro-driver 1 continues to increase the scanning driving frequency, the vibration amplitude of the low-frequency resonance unit 201 continuesAt its own jump frequency point omega i,1 A downward jump occurs, resulting in a stepwise decrease in the vibration energy transferred to the high-frequency resonance unit 202, and thus the vibration amplitude of the high-frequency resonance unit 202 also jumps downward stepwise;
outputting continuous voltage signals of the micro-transducer 4 and obtaining frequency information through Fourier transform to realize the natural frequency omega of the high-frequency resonance unit 202 at the resonance peak n And (n-1) initial frequencies ω at amplitude jump points i,2 (i =1,2,3 \ 8230;, n);
secondly, the sensor is arranged in the environment atmosphere of the substance to be measured;
step three, the amplitude is a d Acceleration at an angular frequency of omega of 0.9 omega 1,1 To 1.5 omega 1,1 Cyclically up-scanning the micro-driver 1 and outputting the output voltage of the micro-transducer 4 at an interval of 0.0001 omega during the up-conversion process 1 Continuously obtaining and calculating the frequency omega at the resonance peak of the high-frequency resonance unit 202 through Fourier transform n ' sum amplitude trip point frequency omega i,2 '; if the frequency ω at the resonance peak n ' constantly changing, it shows that the specific adsorption film 3 on the high-frequency resonance unit 202 is constantly adsorbing the substance to be measured, if a certain amplitude jump point frequency ω i,2 ' constantly changing, it means that the specific absorption film 3 on a certain low frequency resonance unit 201 continuously absorbs the substance to be measured, and the frequency ω at the resonance peak of the high frequency resonance unit 202 n ' sum amplitude hop frequency ω i,2 When the voltage is stable, it indicates that the absorption balance is achieved, and then the resonance peak frequency ω of the high-frequency resonance unit 202 after the absorption balance is achieved is calculated according to the output voltage of the micro transducer 4 n ' sum amplitude jump Point frequency omega i,2 ', and respectively determining their relative initial values omega n And ω i,2 Whether a shift occurs;
step four, if the frequency ω at the resonant peak of the high-frequency resonant unit 202 n ' relative to its initial value ω n The deviation occurs, which indicates that the specific adsorption film 3 on the high-frequency resonance unit 202 adsorbs a substance to be detected; if the frequency ω is at the ith amplitude jump point of the HF resonant unit 202 i,2 ' relative to its initial value ω i,2 Deviation occurs, which indicates that the specific adsorption film 3 on the ith low-frequency resonance unit 201 adsorbs a substance, and the frequency deviation conditions of the resonance peak and each amplitude jump point are counted to realize synchronous qualitative identification of n substances;
step five, according to the resonance peak and amplitude jumping point frequency omega measured before and after gas adsorption n ′、ω n 、ω i,2 ' and omega i,2 The actual adsorption quantity of each substance is calculated according to the following formula, so that the quantitative detection of various substances is realized:
wherein: Δ m i (i =1,2,3 \8230;, n) is the mass of the substance specifically adsorbed by the adsorption film 3 on the ith low-frequency resonance unit 201, and Δ m is n The mass of the substance adsorbed to the thin film 3 is specifically adsorbed to the high-frequency resonance unit 202.
The invention has the beneficial effects that:
1. the sensitivity is multiplied by the frequency doubling effect of the internal resonance.
2. The sensing is carried out by using amplitude jumping points, and the frequency resolution is ultrahigh.
3. And synchronous identification and detection of various trace substances are realized.
4. The single-input single-output detection is realized, the input and output circuit is simplified, the sensing power consumption is reduced, and the output data volume is reduced.
5. The method has the advantages of no label, high precision, portability, low cost, low power consumption and quick sensing.
Drawings
Fig. 1 is a schematic structural diagram of a coupled array sensor according to embodiment 1 of the present invention;
FIG. 2 is a top view of a coupled array sensor in accordance with embodiment 1 of the present invention;
FIG. 3 is a cross-sectional view of a coupled array sensor in accordance with embodiment 1 of the present invention;
FIG. 4 is a schematic structural diagram of a micro transducer according to embodiment 1 of the present invention;
FIG. 5 is a schematic diagram illustrating the relationship between the magnetic force and the space between the low frequency resonance unit and the high frequency resonance unit in embodiment 1 of the present invention;
FIG. 6 is a magnetic field distribution diagram of example 1 of the present invention;
fig. 7 is a diagram of first-order bending modes and modal frequencies of the low-frequency resonance unit and the high-frequency resonance unit in embodiment 1 of the present invention;
FIG. 8 is a graph showing the dimensionless amplitude-frequency characteristics of the low frequency resonance unit and the high frequency resonance unit in example 1 of the present invention;
fig. 9 is a schematic structural diagram of a coupled array sensor according to embodiment 2 of the present invention.
Wherein: the device comprises a 1 micro-driver, a 2 coupling resonant array, a 201 low-frequency resonant unit, a 202 high-frequency resonant unit, a 203 coupling unit, a 20301 cube rubidium iron boron magnet, a 20302 cube rubidium iron boron magnet, a 3 specificity adsorption film, a 4 micro-transducer, a 401 upper electrode, a 402 piezoelectric layer, a 403 lower electrode and a 5 base.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings; it should be understood that the preferred embodiments are illustrative of the invention only and are not limiting upon the scope of the invention.
Example 1
As shown in FIG. 1, a coupled array sensor for synchronously identifying and detecting multiple trace substances comprises a micro-actuator 1, a coupled resonant array 2, a specific adsorption film 3, a micro-transducer 4 and a base 5. The coupled resonator array 2 further includes a high frequency resonator element 202, a plurality of low frequency resonator elements 201, and a coupling element 203. The coupling unit 203 is connected with the low-frequency resonance unit 201 and the high-frequency resonance unit 202 to form a coupling array, so as to form a multi-body internal resonance system. The micro-driver 1 is fixed below the bottom of the base 5, and the whole sensor is driven by frequency sweeping; the fixed end of the coupling resonance array 2 is connected to the top of the base 5; the free ends of each of the low frequency resonance unit 201 and the high frequency resonance unit 202 of the coupled resonance units are deposited with different specific adsorption films 3. The micro-transducer 4 is a piezoelectric transducer, and is fixed on the upper surface of the high-frequency resonance unit 202 for converting the vibration signal into a voltage signal and outputting the voltage signal.
The coupling resonant array 2 comprises a high-frequency resonant unit 202, a plurality of low-frequency resonant units 201 and a coupling unit 203, wherein the coupling unit 203 is connected with the low-frequency resonant units 201 and the high-frequency resonant units 202 to form a coupling array, so that a multi-body internal resonant system is formed; the micro-driver 1 is fixed at the bottom of the base 5, the top of the base 5 is provided with a plurality of low-frequency resonance units 201, the top of the base 5 at the right end of the low-frequency resonance unit 201 is provided with the high-frequency resonance unit 202, the right end of each low-frequency resonance unit 201 and the front end and the rear end of each high-frequency resonance unit 202 are deposited with different specific adsorption films 3, the micro-transducer 4 is fixed at the front end surface of the high-frequency resonance unit 202 and is positioned at the front end of the low-frequency resonance unit 201, one part of the coupling unit 203 is fixed at the upper surface of the right end part of the low-frequency resonance unit 201 and is close to the specific adsorption film 3 arranged on the low-frequency resonance unit 201, and the other part of the coupling unit is fixed at the upper surface on the right side of the high-frequency resonance unit 202.
The specific adsorption thin film 3 deposited on the low-frequency resonance unit 201 and the high-frequency resonance unit 202 is a thin film that specifically adsorbs different gases, and the types of the specific adsorption thin films are not limited, and may be a thin film based on chemical reaction or a thin film based on physical adsorption, and specifically selected according to the characteristics of the gas to be measured.
The coupled resonant array 2 shown in fig. 2 is a magnetically coupled cantilever array. The low-frequency resonance units 201 are rectangular cantilever beams which are arranged at equal intervals to form a rectangular cantilever beam array; the high-frequency resonance unit 202 is an n-shaped cantilever beam and comprises a transverse cantilever and a longitudinal cantilever, wherein the two transverse cantilevers are arranged in parallel, and the right ends of the two transverse cantilevers are respectively fixed at the front end and the rear end below the longitudinal cantilever and are positioned at the outer side of the rectangular cantilever array;
the micro-actuator 1 is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a thermal actuator, an optical actuator, a Shape Memory Alloy (SMA) actuator or a magnetostrictive actuator.
The coupling unit 203 is a magnetic coupling unit composed of a square rubidium iron boron magnet 20301 and a rectangular parallelepiped rubidium iron boron magnet 20302, which are opposite to each other in the same polarity, wherein the square rubidium iron boron magnet 20301 and the rectangular parallelepiped rubidium iron boron magnet 20302 are respectively fixed on the upper surface of the right end portion of the low-frequency resonance unit 201 and the upper surface of the longitudinal cantilever of the high-frequency resonance unit 202. The low frequency resonance unit 201 and the high frequency resonance unit 202 are coupled to each other by repulsive force between magnets.
The lengths of the low-frequency resonance units 201 are close and approximately equal in difference, so that the first-order bending mode frequencies of the low-frequency resonance units 201 are close and approximately equal in difference, and the natural frequency ω of the low-frequency resonance units 201 is ensured to be close and approximately equal in difference i (i =1,2,3 \ 8230;, n-1) are close and approximately isometrically increased, i.e., ω is increased i -ω i-1 δ (i =1,2,3 \ 8230;, n-1), where n-1 is the number of the low frequency resonance units 201, n is the number of the substances to be measured, and is also the sum of the numbers of n-1 low frequency resonance units 201 and one high frequency resonance unit 202; δ is a natural frequency difference between adjacent low frequency resonance units 201; the natural frequencies of the high frequency resonance unit 202 and the low frequency resonance unit 201 are approximately in an integer ratio relationship, i.e., ω n ≈αω 1 ≈αω 2 ≈…≈αω n-1 Where α is an integer, and is a natural frequency ratio, ω, of the high frequency resonance unit 202 and the low frequency resonance unit 201 n Is a natural frequency, ω, of the high-frequency resonance unit 202 1 、ω 2 …ω n-1 The natural frequencies of n-1 low-frequency resonance units 201 respectively. The natural frequency ratio α is determined by the power of the inherent nonlinearity of the low-frequency resonance unit 201, the high-frequency resonance unit 202, and the coupling unit 203. The ratio of the first-order bending mode frequencies of the high-frequency resonance unit 202 and the low-frequency resonance unit 201 is 3, ω n ≈3ω 1 ≈3ω 2 ≈…≈3ω n-1 。
The number of the low-frequency resonance units 201 in the coupled resonance array 2 is one less than that of the substances to be measured.
That is, the number of the low-frequency resonant units 201 in the coupled resonant array 2 is determined by the number of the substances to be detected, and the synchronous identification and detection of n substances can be realized by (n-1) low-frequency resonant units 201 and one high-frequency resonant unit 202.
The low-frequency resonance unit 201 and the high-frequency resonance unit 202, which are collectively referred to as a resonance unit, may adopt various micro-resonance structures such as a resonance beam, a resonance disk, a resonance cavity, a resonance film, and the like.
As shown in fig. 3, the low-frequency resonance unit 201, the high-frequency resonance unit 202 and the base 5 are formed by processing the same single crystal silicon substrate by micro-nano processing technology. Wherein, the base 5 is an opening structure with a concave center.
The specific adsorption film 3 is adsorbed on the low-frequency resonance unit 201 and the high-frequency resonance unit 202 by adopting a specific adsorption principle of biological adsorption, chemical adsorption or physical adsorption according to the property of the substance to be detected.
As shown in fig. 4, the micro-transducer 4 is a piezoelectric micro-transducer, and includes an upper electrode 401, a piezoelectric layer 402 and a lower electrode 403, wherein the lower electrode 403 is fixed to the lateral cantilever fixing end of the high-frequency resonance unit 202, the piezoelectric layer 402 is fixed to the lower electrode 403, and the upper electrode 401 is fixed to the piezoelectric layer 402. The upper electrode 401 and the lower electrode 403 are typically gold electrodes or platinum electrodes; the piezoelectric layer 402 can be made of PVDF piezoelectric film material or PZT ceramic material.
The micro transducer 4 may also convert the vibration signal of the high frequency resonance unit 202 into a voltage signal by other principles such as piezoresistive, capacitance, photoelectric, tunneling magneto-resistance, and the like.
The micro-actuator 1 is a piezoelectric actuator, and can also adopt other driving forms such as electrostatic driving, electromagnetic driving, thermal driving, optical driving, shape Memory Alloy (SMA) driving, magnetostrictive driving and the like.
The number of the low-frequency resonance units 201 in the coupled resonance array 2 is determined by the number of the substances to be detected, and the synchronous identification and detection of the n substances can be realized by the (n-1) low-frequency resonance units 201 and the high-frequency resonance unit 202.
The low-frequency resonance unit 201 and the high-frequency resonance unit 202 may also adopt various micro-resonance structures such as a resonance disk, a resonance cavity, a resonance film, and the like.
The coupling unit 203 may also adopt various coupling forms such as mechanical coupling, electrostatic coupling, optical coupling, circuit coupling, and the like.
The low-frequency resonance unit 201, the high-frequency resonance unit 202 and the base 5 are of an integral structure and are processed by the same monocrystalline silicon substrate through a micro-nano manufacturing technology.
A method for applying the above coupled array sensor for synchronous identification and detection of multiple trace substances, comprising the steps of:
step one, calibrating the initial resonance frequency of each resonance unit of the sensor:
at the natural frequency ω of the low-frequency resonance unit 201 i (i =1,2,3 \ 8230;, n-1) and the expression a is given by the micro drive 1 d The acceleration frequency up-scan of cos (Ω t) drives the whole sensor, and the equation of motion of the coupled resonant array 2 can be expressed as:
wherein m is i 、k i 、c i 、k non,i 、F c,i (i =1,2,3 \8230;, n-1) are the effective mass, linear stiffness, linear damping, orthocubic stiffness of the low frequency resonance unit 201, and the nonlinear coupling force between the low frequency resonance unit 201 and the high frequency resonance unit 202, respectively; m is a unit of n 、k n 、c n 、k nonn Effective mass, linear stiffness, linear damping and orthocubic stiffness of the high-frequency resonance unit 202, respectively; x is the number of i (i =1,2,3 \ 8230;, n-1) is the displacement of the ith low frequency resonance unit 201, x n Is the displacement of the high-frequency resonance unit 202; t is time;
n is the number of the substances to be detected and is the sum of n-1 low-frequency resonance units 201 and one high-frequency resonance unit 202; non-linear coupling force F c,i Is equal to the natural frequency approximate ratio alpha of high-frequency resonance section 202 and low-frequency resonance section 201, and is denoted by F c,i ＝λ i (x i -x n )+χ i (x i -x n ) α Wherein λ is i Hexix- i Respectively a non-linear coupling force F c,i Linear term coefficients and non-linear term coefficients;
non-linear coupling force F c,i ，F cc,i Respectively, the repulsive force vectors F between magnets mag Vertical and horizontal components of (a), vector F mag The expression of (c) is:
wherein, mu 0 Is the spatial permeability, M i 、M n Is the magnetic moment; r is i Is the space vector between the magnets and is,
and r i In unit vector and scalar form, respectively. The spatial relationship and the magnetic force of the coupled resonant array 2 are shown in fig. 5 and 6, and the expression of the nonlinear coupling force is obtained by simplifying the above formula and abandoning the nonlinear terms more than three times:
F c,i ＝r i,1 x i +r i,2 x n +r i,3 x i 2 x n +r i,4 x i x n 2 +r i,5 x i 3 +r i,6 x n 3
wherein the content of the first and second substances,
wherein L is i 、V i The length of the ith rectangular cantilever beam, namely the low-frequency resonance unit 201, and the volume of the cubic rubidium iron boron magnet 20301 placed at the free end of the ith rectangular cantilever beam; l is n 、V n The length of the pi-shaped cantilever beam, namely the high-frequency resonance unit 202, and the volume of the cuboid rubidium iron boron magnet 20302 placed at the free end of the cantilever beam are respectively; d is a radical of i Is the initial center distance between the magnet cube rubidium-iron-boron magnet 20301 and the cuboid rubidium-iron-boron magnet 20302.
The low frequency resonance unit 201 resonates under the up-scan driving of the micro-driver 1, and the first-order bending modes and modal frequencies of the low frequency resonance unit 201 and the high frequency resonance unit 202 are shown in fig. 7. Due to the influence of the cubic rigidity of the resonant unit 201, the resonant peak of the low-frequency resonant unit 201 deviates from the natural frequency omega of the resonant unit i Deflected to the right and at a new frequency point omega i,1 Amplitude jumps occurred, as shown in fig. 8:
wherein
The magnetic field distribution of the sensor is shown in FIG. 6 at a non-linear coupling force F c,i Under the action of (1), in the vibration process of the low-frequency resonance unit 201, the rectangular parallelepiped rubidium iron boron magnet 20301 at the free end generates a circulating magnetic field, and acts on the high-frequency resonance unit 202 through the rectangular parallelepiped rubidium iron boron magnet 20302 to causeThe high frequency resonance unit 202 and the low frequency resonance unit 201 resonate internally. Part of the vibration energy of the low frequency resonance unit 201 is thus transferred to the high frequency resonance unit 202, causing double frequency resonance of the high frequency resonance unit 202. Since the high-frequency resonance unit 202 vibrates less, the influence of the cubic rigidity on the resonance peak can be ignored. Therefore, when the micro-actuator 1 drives the frequency sweep to the natural frequency ω of the high frequency resonance unit 202 n 1/3 of (a) < x >>
Where aa =3, the high-frequency resonance unit 202 has a resonance peak, and the frequency of the resonance peak is an initial frequency ω when the high-frequency resonance unit 202 has the resonance peak n . When the scanning driving frequency of the micro-driver 1 continues to increase, the vibration amplitude of the low-frequency resonance unit 201 is continuously at the jump frequency point ω thereof i,1 The jump occurs downward, resulting in a stepwise decrease in the vibration energy transferred to the high-frequency resonance unit 202, and therefore the amplitude of the vibration of the high-frequency resonance unit 202 also jumps downward stepwise. Therefore, one formant and (n-1) amplitude transition points ω can be observed on the amplitude-frequency curve of the high-frequency resonance unit 202 i,2 . Wherein the ith amplitude jump point ω of the high frequency resonance unit 202 i,2 Amplitude jump point omega corresponding to ith low-frequency resonance unit 201 i,1 And the vibration frequency α =3 times amplified, i.e.:
outputting continuous voltage signals of the micro-transducer 4 and obtaining frequency information through fast Fourier transform to realize the initial frequency of the high-frequency resonance unit 202 at the resonance peak, namely the natural frequency omega n And (n-1) amplitude trip point initial frequencies omega i,2 And (4) calibrating.
Secondly, the sensor is arranged in the environment atmosphere of the substance to be measured;
step three, the amplitude is a d Acceleration at an angular frequency of omega of 0.9 omega 1,1 To 1.5 omega 1,1 And outputs the output of the micro transducer 4 by cyclically up-scanning the micro driver 1 within the frequency range ofVoltage, and at an interval of 0.0001 omega in the frequency raising process 1 Continuously obtaining and calculating the frequency omega at the resonance peak of the high-frequency resonance unit 202 through Fourier transform n ' sum amplitude trip point frequency omega i,2 '; if the frequency ω at the resonance peak n The' constantly changing state shows that the specific absorption film 3 on the high-frequency resonance unit 202 is constantly absorbing the substance to be measured, if the frequency omega is a certain amplitude jump point i,2 ' constantly changing, it shows that the specific adsorption film 3 on a certain low frequency resonance unit 201 constantly adsorbs the substance to be measured, and the frequency ω at the resonance peak of the high frequency resonance unit 202 n ' sum amplitude hop frequency ω i,2 When the voltage is stable, it indicates that the absorption balance is achieved, and then the resonance peak frequency ω of the high-frequency resonance unit 202 after the absorption balance is achieved is calculated according to the output voltage of the micro transducer 4 n ' sum amplitude hop frequency ω i,2 ', and respectively determining their relative initial values omega n And ω i,2 Whether a shift occurs; the amplitude value at the resonance peak is maximum, and the position of the resonance peak of the high-frequency resonance unit 202 is judged by detecting the maximum value of the amplitude value in the frequency sweeping process;
step four, if the frequency ω at the resonant peak of the high frequency resonance unit 202 n ' relative to its initial value omega n The deviation occurs, which indicates that the specific adsorption film 3 on the high-frequency resonance unit 202 adsorbs a substance to be detected; if the frequency ω is at the ith amplitude jump point of the high frequency resonance unit 202 i,2 ' relative to its initial value ω i,2 The deviation occurs, which indicates that the specific adsorption film 3 on the ith low-frequency resonance unit 201 adsorbs a substance, and the frequency deviation conditions of the resonance peak and each amplitude jump point are counted to realize the synchronous qualitative identification of n substances;
step five, according to the resonance peak and amplitude jumping point frequency omega measured before and after gas adsorption n ′、ω n 、ω i,2 ' and omega i,2 The actual adsorption quantity of each substance is calculated according to the following formula, so that the quantitative detection of various substances is realized:
wherein: Δ m i (i =1,2,3 \8230;, n) is the mass of the substance specifically adsorbed by the adsorption film 3 on the ith low-frequency resonance unit 201, and Δ m is n The mass of the substance adsorbed to the thin film 3 is specifically adsorbed to the high-frequency resonance unit 202.
Example 2
As shown in fig. 9, the same as embodiment 1, except that the relative positions of the fixed ends of the high frequency resonance unit 202 and the low frequency resonance unit 201 are changed; the high frequency resonance unit 202 and the low frequency resonance unit 201 are changed from the same side fixing to the opposite side fixing, and are fixed on the upper surface of the opposite side wall of the base.
Example 2
The difference from embodiment 1 is that the coupling means 203 is a mechanical coupling means, is formed by integrally processing the low frequency resonance means 201 and the high frequency resonance means 202, and is fixed to the top of the base 5, the coupling means 203 is provided between the adjacent low frequency resonance means 201, and the coupling means 203 is provided between the lowest front low frequency resonance means 201 and the highest frequency resonance means 202 and between the lowest rear low frequency resonance means 201 and the highest frequency resonance means 202.
Example 3
The coupling unit 203 is an electrostatic coupling unit, and is composed of a main electrode plate 20301 and a sub-electrode plate 20302, which are fixed on the left end surface of the low frequency resonance unit 201 and the right end surface of the high frequency resonance unit 202, respectively, to form a parallel capacitor structure, as in embodiment 1.
The micro transducer 4 is a piezoresistive micro transducer and consists of a constant voltage source, a metal piezoresistive strain gauge, a positive electrode and a negative electrode, wherein the metal piezoresistive strain gauge is attached to the surface of a transverse cantilever of the high-frequency resonance unit, the positive electrode and the negative electrode are respectively arranged at two ends of the metal piezoresistive strain gauge, and the positive electrode and the negative electrode are connected with the constant voltage source to form a circuit loop which can detect the end voltage of the metal piezoresistive strain gauge.
Example 4
The same as the embodiment 1, except that the micro transducer 4 is a capacitive micro transducer, which is a circuit loop composed of an oscillating circuit, a sensing capacitor, a fixed capacitor and a detection circuit; the sensing capacitor is a displacement type parallel capacitance transduction structure formed by a movable electrode plate fixed on the surface of a longitudinal cantilever of the high-frequency resonance unit and a fixed electrode plate fixed on the surface of a base; the detection circuit can adopt a bridge circuit or an operational amplifier type circuit.
Example 5
The difference is that the micro-transducer 4 is an optoelectronic micro-transducer, which is composed of a transmitter, a receiver and a detection circuit, wherein the transmitter is aligned with the geometric center of the longitudinal cantilever of the high-frequency resonance unit, as in embodiment 1.
Claims (10)
1. The utility model provides a coupling array sensor of synchronous discernment of multiple trace substance and detection, its characterized in that includes micro-actuator (1), coupling resonance array (2), specificity adsorbs film (3), micro transducer (4) and base (5), wherein coupling resonance array (2) include high frequency resonance unit (202), low frequency resonance unit (201) and coupling unit (203), micro-actuator (1) is fixed in the bottom of base (5), the top of base (5) is equipped with a plurality of low frequency resonance units (201), be equipped with high frequency resonance unit (202) on base (5) of low frequency resonance unit (201) right-hand member, the right-hand member of every low frequency resonance unit (201) and the front and back both ends of high frequency resonance unit (202) all deposit specificity and adsorb film (3), micro transducer (4) are fixed in high frequency resonance unit (202) front end surface, a part of coupling unit (203) is fixed in the upper surface of low frequency resonance unit (201) right-hand member tip, another part is fixed in the upper surface on high frequency resonance unit (202) right side.
2. The coupled array sensor for synchronously recognizing and detecting multiple trace substances according to claim 1, wherein the high-frequency resonance unit (202) comprises a transverse cantilever and a longitudinal cantilever, wherein the two transverse cantilevers are arranged in parallel, and the right ends of the two transverse cantilevers are respectively fixed at the front end and the rear end below the longitudinal cantilever.
3. The coupled array sensor for simultaneous identification and detection of multiple trace species according to claim 2, wherein the low frequency resonating unit (201) is a rectangular cantilever.
4. The coupled array sensor for synchronously identifying and detecting multiple trace substances according to claim 3, wherein the coupling unit (203) is a magnetic coupling unit consisting of a square rubidium iron boron magnet (20301) and a rectangular rubidium iron boron magnet (20302) which are opposite in the same polarity, wherein the square rubidium iron boron magnet (20301) and the rectangular rubidium iron boron magnet (20302) are respectively fixed on the upper surface of the right end part of the low-frequency resonance unit (201) and the upper surface of the longitudinal cantilever of the high-frequency resonance unit (202).
5. The coupled array sensor for synchronously recognizing and detecting multiple trace substances according to claim 4, characterized in that the micro-actuator (1) is a piezoelectric actuator, an electrostatic actuator, an electromagnetic actuator, a thermal actuator, an optical actuator, a shape memory alloy actuator or a magnetostrictive actuator.
6. The coupled array sensor for synchronously recognizing and detecting multiple trace substances according to claim 5, characterized in that in the coupled resonant array (2), the natural frequency ω of a low-frequency resonant unit (201) i I =1,2,3 \8230, n-1 is close and the approximate arithmetic difference is increased, i.e. omega i -ω i-(1) δ, i =1,2,3 \8230;, n-1, where n-1 is the number of low-frequency resonance units (201), n is the number of substances to be measured, and is also the sum of n-1 low-frequency resonance units 201 and one high-frequency resonance unit 202; δ is the natural frequency difference between adjacent low frequency resonant cells (201); the natural frequencies of the high-frequency resonance unit (202) and the low-frequency resonance unit (201) are approximately in integer ratio relation, namely omega n ≈αω 1 ≈αω 2 ≈…≈αω n-1) Wherein alpha is an integer and is a natural frequency ratio of the high-frequency resonance unit (202) to the low-frequency resonance unit (201)，ω n Is the natural frequency, omega, of the high-frequency resonant unit (202) 1 、ω 2 …ω n-1 The natural frequencies of the n-1 low-frequency resonance units (201) are respectively.
7. The coupled array sensor for synchronously recognizing and detecting multiple trace substances according to claim 6, characterized in that the number of low-frequency resonance units (201) in the coupled resonance array (2) is one less than the number of substances to be detected.
8. The coupled array sensor for synchronously identifying and detecting multiple trace substances according to claim 7, wherein the specific adsorption film (3) is adsorbed on the low-frequency resonance unit (201) and the high-frequency resonance unit (202) by adopting a biological adsorption, chemical adsorption or physical adsorption principle according to the properties of the substances to be detected.
9. The coupled array sensor for synchronously recognizing and detecting multiple trace substances according to claim 8, wherein the micro transducer (4) is a piezoelectric micro transducer and comprises an upper electrode (401), a piezoelectric layer (402) and a lower electrode (403), wherein the lower electrode (403) is fixed on the transverse cantilever of the high-frequency resonance unit (202), the piezoelectric layer (402) is fixed on the lower electrode (403), and the upper electrode (401) is fixed on the piezoelectric layer (402).
10. A method of using the coupled array sensor for simultaneous identification and detection of multiple trace species of claim 1, comprising the steps of:
step one, calibrating the initial resonance frequency of each resonance unit:
at the natural frequency omega of the low-frequency resonance unit (201) i I =1,2,3 \8230nearn-1, with a width a using the micro-driver (1) d The whole sensor is driven by acceleration frequency rising scanning with angular frequency of omega, the low-frequency resonance unit (201) generates resonance reaction under the frequency rising scanning driving of the micro driver (1), and the resonance peak of the low-frequency resonance unit (201) deviates from the natural frequency of the low-frequency resonance unit due to the influence of the cubic stiffness of the low-frequency resonance unitω i Deflected to the right and at a new frequency point omega i,1 Amplitude jump occurs:
wherein
m i 、k i 、c i 、k non,i Effective mass, linear stiffness, linear damping, orthocubic stiffness, lambda, respectively, of the low frequency resonance unit 201 i Non-linear coupling force F c,i Coefficient of linear term of (c); at a non-linear coupling force F c,i Under the action of the vibration sensor, the high-frequency resonance unit 202 and the low-frequency resonance unit 201 are in internal resonance, part of vibration energy of the low-frequency resonance unit 201 is transferred to the high-frequency resonance unit 202, and the frequency multiplication resonance of the high-frequency resonance unit 202 is caused when the driving frequency of the micro-driver 1 is swept to the natural frequency omega of the high-frequency resonance unit 202 n At the 1/a position of (a), i.e. is>
At this time, the high-frequency resonance unit 202 exhibits a resonance peak, where m n 、k n Effective mass and linear stiffness of the high-frequency resonance unit 202 are respectively, and alpha is the approximate ratio of natural frequencies of the high-frequency resonance unit 202 and the low-frequency resonance unit 201; when the scanning driving frequency of the micro-driver 1 continues to increase, the vibration amplitude of the low-frequency resonance unit 201 is continuously at the jump frequency point ω i,1 A step-down occurs, resulting in that the vibration energy transferred to the high-frequency resonance unit 202 is reduced in a stepwise manner, and thus the vibration amplitude of the high-frequency resonance unit 202 also jumps in a stepwise-down manner;
outputting continuous voltage signals of the micro transducer (4) and acquiring frequency information through Fourier transform to realize natural frequency omega of the high-frequency resonance unit (202) at the resonance peak n And n-1 initial frequencies omega at amplitude jump points i,2 I =1,2,3 \ 8230, calibration of n;
secondly, the sensor is arranged in the environment atmosphere of the substance to be measured;
step three, the amplitude is a d Acceleration at an angular frequency of omega of 0.9 omega 1,1 To 1.5 omega 1,1 Cyclically up-scanning the micro-driver (1) and outputting the output voltage of the micro-transducer (4) in a frequency range of 0.0001 omega 1 Continuously obtaining and calculating the frequency omega at the resonance peak of the high-frequency resonance unit (202) through Fourier transform n ' sum amplitude trip point frequency omega i,2 '; if the frequency ω at the resonance peak n The constant change shows that the specific adsorption film (3) on the high-frequency resonance unit (202) continuously adsorbs the substance to be detected if the frequency omega of a certain amplitude jump point i,2 The' constant change shows that the specific adsorption film (3) on a certain low-frequency resonance unit (201) continuously adsorbs the substance to be detected, and the frequency omega at the resonance peak of the high-frequency resonance unit (202) n ' sum amplitude jump Point frequency omega i,2 When the voltage is stable, the adsorption balance is achieved, and the resonance peak frequency omega of the high-frequency resonance unit (202) after the adsorption balance is achieved is calculated according to the output voltage of the micro transducer (4) n ' sum amplitude jump Point frequency omega i,2 ', and respectively determining their relative initial values ω n And ω i,2 Whether a shift occurs;
step four, if the frequency omega at the resonance peak of the high-frequency resonance unit (202) n ' relative to its initial value ω n The deviation is generated, which indicates that the specific adsorption film (3) on the high-frequency resonance unit (202) adsorbs a substance to be detected; if the frequency omega at the ith amplitude jump point of the high-frequency resonance unit (202) i,2 ' relative to its initial value omega i,2 Deviation occurs, which indicates that a specific adsorption film (3) on the ith low-frequency resonance unit (201) adsorbs a substance, and the frequency deviation conditions of a resonance peak and each amplitude jumping point are counted to realize synchronous qualitative identification of n substances;
step five, according to the resonance peak and the amplitude jumping point frequency omega measured before and after the gas adsorption n ′、ω n 、ω i,2 ' and omega i,2 The actual adsorption amount of each substance is calculated according to the following formula to realize multiple kinds of substancesQuantitative detection of substances:
wherein: Δ m i I =1,2,3 \8230, n is the mass of the specific adsorption film (3) on the ith low-frequency resonance unit (201) for adsorbing substances, and Δ m n The mass of the substance adsorbed by the specific adsorption film (3) on the high-frequency resonance unit (202).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211460417.7A CN115901863A (en) | 2022-11-17 | 2022-11-17 | Coupled array sensor and method for synchronously identifying and detecting multiple trace substances |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211460417.7A CN115901863A (en) | 2022-11-17 | 2022-11-17 | Coupled array sensor and method for synchronously identifying and detecting multiple trace substances |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115901863A true CN115901863A (en) | 2023-04-04 |
Family
ID=86476311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211460417.7A Pending CN115901863A (en) | 2022-11-17 | 2022-11-17 | Coupled array sensor and method for synchronously identifying and detecting multiple trace substances |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115901863A (en) |
-
2022
- 2022-11-17 CN CN202211460417.7A patent/CN115901863A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6595054B2 (en) | Digital angular rate and acceleration sensor | |
| US8826742B2 (en) | Pressure sensor using MEMS resonator | |
| US4479385A (en) | Double resonator cantilever accelerometer | |
| CN105628264B (en) | High sensitivity piezoelectricity pressure drag electric capacity superposition force-sensing sensor based on synchro-resonance | |
| CN106645999A (en) | Micro-mechanical resonant electrometer with ultra-high sensitivity | |
| CN112325998B (en) | Trace substance sensor and method based on internal resonance | |
| CN102269615B (en) | Micro mass sensor based on groove-shaped cantilever beam structure | |
| CN110057907B (en) | CMUT (capacitive micromachined ultrasonic transducer) for gas sensing and preparation method | |
| CN101294824B (en) | Electromagnetic micro-torsional pendulum resonant vibration type sensor based on micro-electronic mechanical skill | |
| Meydan | Recent trends in linear and angular accelerometers | |
| EP1533611A1 (en) | Apparatus and method for measuring micro mass using oscillation circuit | |
| CN101556836B (en) | Fabry-Perot resonator cavity resonance luminescence cantilever beam system | |
| CN103808961A (en) | Cantilever part and resonant acceleration sensor using the same | |
| CN105737811A (en) | Resonant type MEMS full-scale inclination angle sensor | |
| CN108731790B (en) | High-sensitivity broadband piezoelectric MEMS vector hydrophone | |
| CN109752120B (en) | Piezoresistive vibration pickup micro resonator, vibration exciting/vibration pickup circuit and pressure sensor | |
| CN103969692A (en) | Two-dimensional composite pendulum crustal inclination low-frequency vibration isolation device based on capacitive sensing | |
| JP2015114296A (en) | Sensor element and pressure sensor | |
| CN100465088C (en) | Phi-shaped resonant micromechanical silicon pressure sensor | |
| CN114354024A (en) | High-sensitivity modal coupling type silicon resonance pressure sensor and pressure calculation method thereof | |
| CN116754107B (en) | High-sensitivity resonant pressure sensor with amplifying structure and signal conditioning method | |
| CN112697239B (en) | Micro substance and driving force synchronous sensor and method based on internal resonance | |
| CN115901863A (en) | Coupled array sensor and method for synchronously identifying and detecting multiple trace substances | |
| CN113340847B (en) | Phi-type quartz tuning fork and trace gas detection device based on phi-type quartz tuning fork | |
| Li et al. | Synchronous mass detection based on 1: 1: 2 internal resonance of piezo-driven resonator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |