CN115877299A - Direct current measurement type parameter calibration method and system - Google Patents
Direct current measurement type parameter calibration method and system Download PDFInfo
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- CN115877299A CN115877299A CN202211520671.1A CN202211520671A CN115877299A CN 115877299 A CN115877299 A CN 115877299A CN 202211520671 A CN202211520671 A CN 202211520671A CN 115877299 A CN115877299 A CN 115877299A
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Abstract
The invention provides a method and a system for calibrating direct current measurement parameters, which comprise the following steps: connecting a calibration interface of the calibration device with a tracing interface of a tracing plate; connecting a direct current standard ammeter and a direct current signal source with a connecting terminal of a tracing board; establishing connection between a connection terminal of the tracing board and a direct current signal source and a direct current standard ammeter in a series connection relationship through a connection cable; controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal; acquiring a first measurement value of the calibration device, and acquiring a second measurement value of the direct current standard ammeter to obtain a measurement error of the calibration device at a current calibration point; and tracing the magnitude of the calibration device based on the measurement error, and calibrating the direct current measurement type parameters of the integrated circuit test system by using the traced calibration device. The invention comprehensively and truly reflects the overall technical index of the direct current measurement type parameters of the calibration device.
Description
Technical Field
The invention belongs to the technical field of microelectronic test and measurement, and particularly relates to a direct current measurement parameter calibration method and system.
Background
The direct current measurement parameters of the integrated circuit test system (test system for short) comprise PMU current measurement, DPS current measurement and other parameters.
At present, the calibration of the dc current measurement parameters of the test system is mainly realized by developing and establishing a calibration device (calibration device for short) of the integrated circuit test system, wherein the calibration device comprises a calibration board and an external instrument, the calibration board is loaded on the test system during calibration, the external instrument is connected to the loading board, and the external instrument is controlled to measure various dc current measurement parameters of the test system, thereby completing the calibration. The method has an ideal effect of transmitting the magnitude of the direct current measurement type parameter of the calibration device to the test system.
However, there is no special method for tracing the magnitude of the dc current measurement parameter of the calibration device upward, and usually, the external instrument forming the calibration device is separately sent to the metering technical mechanism to complete the magnitude tracing at the instrument level, and other components of the calibration device, such as the matrix switch, various cables, interfaces, calibration software, etc., all affect the calibration result, and the influence of these components on the measurement uncertainty of the dc current measurement parameter of the calibration device of the test system can reach more than 20%, so it can be known that these components are the source of the non-negligible uncertainty and are the main influence quantity of the uncertainty. Therefore, the real technical index of the calibration device cannot be directly obtained from the technical index of the external instrument. The technical indexes of the whole direct current measurement type parameters of the calibration device are not comprehensively and truly reflected in the quantity value tracing process at present.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a method and a system for calibrating direct current measurement parameters, and aims to solve the problems that the overall technical index of the direct current measurement parameters of the conventional calibrating device is not comprehensively and really reflected in the quantity value tracing process at present, and the direct current measurement parameters of an integrated current testing system cannot be ideally and reliably calibrated.
In order to achieve the above object, in a first aspect, the present invention provides a method for calibrating a direct current measurement type parameter, especially for an integrated circuit test system, including the following steps:
1, respectively connecting the positive electrode and the negative electrode of a calibration interface of a calibration device with the positive electrode and the negative electrode of a tracing interface of a tracing plate correspondingly;
step 2, connecting the positive pole of the tracing board connecting terminal with the negative pole of a direct current standard ammeter, connecting the positive pole of the direct current standard ammeter with the positive pole of a direct current signal source, and connecting the negative pole of the direct current signal source with the negative pole of the connecting terminal; the uncertainty of the direct current measurement of the direct current standard ammeter is less than or equal to one third of the uncertainty of the direct current measurement of the calibration device; the cathode of the connecting terminal is connected with the cathode of the tracing interface, and the anode of the connecting terminal is connected with the anode of the tracing interface;
step 3, controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal; the direct current voltage signal is related to the value of the current calibration point of the calibration device;
step 4, obtaining a traceability interface measured value obtained by measuring the direct current signal at the traceability interface side by the calibration device, and obtaining an ammeter measured value obtained by measuring the direct current signal by the direct current standard ammeter;
step 5, comparing the source tracing interface measurement value with an ammeter measurement value to obtain a measurement error of the calibration device at a current calibration point;
and 6, tracing the magnitude of the direct current measurement type parameters of the calibration device by using the measurement error, and calibrating the direct current measurement type parameters of the integrated circuit test system based on the traced calibration device.
In an optional example, the current measurement range of the direct current standard ammeter covers the current measurement range of the calibration device; the direct-current voltage output range of the direct-current signal source can meet the tracing requirement of direct-current measurement parameters of the calibration device.
In a second aspect, the present invention provides a dc current measurement parameter calibration system for an integrated circuit test system, the calibration system comprising: tracing to a source plate;
the tracing board comprises a connecting terminal and a tracing interface, wherein the cathode of the connecting terminal is connected with the cathode of the tracing interface, and the anode of the connecting terminal is connected with the anode of the tracing interface;
the tracing interface of the tracing plate is connected with the calibration interface of the calibration device, wherein the anode of the tracing interface is connected with the anode of the calibration interface, and the cathode of the tracing interface is connected with the cathode of the calibration interface;
the connecting terminal of the tracing board is connected with a direct current standard ammeter and a direct current signal source; the positive pole of the connecting terminal is connected with the negative pole of the direct current standard ammeter, the positive pole of the direct current standard ammeter is connected with the positive pole of the direct current signal source, and the negative pole of the direct current signal source is connected with the negative pole of the connecting terminal; the uncertainty of the direct current measurement of the direct current standard ammeter is less than or equal to one third of the uncertainty of the direct current measurement of the calibration device; the direct current standard current meter and the direct current signal source are used for tracing the magnitude of the direct current measurement type parameter of the calibration device, and the tracing process comprises the following steps: controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal, wherein the direct current voltage signal is related to the numerical value of a current calibration point of the calibration device; then, obtaining a traceability interface measurement value obtained by measuring the direct current signal at the traceability interface side by the calibration device, obtaining an ammeter measurement value obtained by measuring the direct current signal by a direct current standard ammeter, and comparing the traceability interface measurement value with the ammeter measurement value to obtain a measurement error of the calibration device at a current calibration point; tracing the magnitude of the direct current measurement type parameters of the calibration device based on the measurement error;
the calibration device after the magnitude tracing is used for calibrating direct current measurement parameters of the integrated circuit test system.
In an optional example, the tracing board is a PCB board; the positive and negative poles of the connecting terminal and the tracing interface are respectively connected through PCB wiring.
In an optional example, the current measurement range of the direct current standard ammeter covers the current measurement range of the calibration device; the direct-current voltage output range of the direct-current signal source can meet the tracing requirement of direct-current measurement parameters of the calibration device.
Generally, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:
the invention provides a method and a system for calibrating direct current measurement parameters, which have the following advantages: (1) The method is characterized in that the value tracing is carried out completely based on the normal calibration process of the direct current measurement parameters of the calibration device, the external instrument, the cable and the calibration software of the calibration device are completely configured according to the normal calibration process, the technical indexes of the calibration device under the actual calibration working condition can be reflected, the integral technical indexes of the direct current measurement parameters of the calibration device are comprehensively and truly reflected, and the ideal reliable calibration can be carried out on the direct current measurement parameters of the integrated current test system; (2) The calibration device can realize the tracing of the direct current measurement parameters of the calibration device without any software and hardware adjustment, thereby reducing the cost for adapting the calibration device.
Drawings
Fig. 1 is a flowchart of a method for calibrating dc current measurement parameters according to an embodiment of the present invention;
fig. 2 is a structural diagram of a direct current measurement type parameter calibration system according to an embodiment of the present invention;
fig. 3 is a flowchart of another direct current measurement parameter calibration method according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any particular value, in all examples shown and discussed herein, should be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the directions or positional relationships shown in the drawings for the convenience of description and simplicity of description, and that these directional terms, unless otherwise specified, do not indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be considered as limiting the scope of the invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
In the description of the present invention, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and the above, below, exceeding, etc. are understood as excluding the present numbers, and the above, below, within, etc. are understood as including the present numbers. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The method for tracing the direct current measurement type parameters of the integrated circuit test system calibration device aims to solve the problems that no special method exists for upward tracing of the direct current measurement type parameters of the existing calibration device, only an external instrument forming the calibration device is independently sent to a metering technical mechanism to complete instrument-level value tracing, the overall technical indexes of the calibration device are not comprehensively and truly reflected in the process of value tracing, and the like.
The calibration device is completely based on the calibration process of the calibration device, the external instrument, the cable and the calibration software of the calibration device are completely configured according to the normal calibration process, the technical indexes of the direct current measurement parameters of the calibration device under the actual calibration working condition can be reflected on the basis of ensuring that the accuracy of the measurement result meets the quantity value tracing requirement, and the calibration device end does not need to carry out any software and hardware adjustment.
Fig. 1 is a flowchart of a method for calibrating dc current measurement parameters according to an embodiment of the present invention; as shown in fig. 1, the method comprises the following steps:
1, respectively connecting the positive electrode and the negative electrode of a calibration interface of a calibration device with the positive electrode and the negative electrode of a tracing interface of a tracing plate correspondingly;
step 2, connecting the positive pole of the tracing board connecting terminal with the negative pole of a direct current standard ammeter, connecting the positive pole of the direct current standard ammeter with the positive pole of a direct current signal source, and connecting the negative pole of the direct current signal source with the negative pole of the connecting terminal; the uncertainty of the direct current measurement of the direct current standard ammeter is less than or equal to one third of the uncertainty of the direct current measurement of the calibration device; the negative electrode of the connecting terminal is connected with the negative electrode of the tracing interface, and the positive electrode of the connecting terminal is connected with the positive electrode of the tracing interface;
the connection relationship among the calibration device, the tracing board, the dc standard ammeter and the dc signal source is shown in fig. 2.
Step 3, controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal; the direct current voltage signal is related to the value of the current calibration point of the calibration device;
step 4, obtaining a traceability interface measured value obtained by measuring the direct current signal at the traceability interface side by the calibration device, and obtaining an ammeter measured value obtained by measuring the direct current signal by the direct current standard ammeter;
step 5, comparing the source tracing interface measurement value with an ammeter measurement value to obtain a measurement error of the calibration device at a current calibration point;
and 6, tracing the magnitude of the direct current measurement type parameters of the calibration device by using the measurement error, and calibrating the direct current measurement type parameters of the integrated circuit test system based on the traced calibration device.
Specifically, referring to fig. 2, an embodiment of the present invention is described by taking PMU current measurement of an integrated circuit test system calibration apparatus with a calibration interface channel number of 50 as an example, and a flowchart is shown in fig. 3:
(1) In this embodiment, a dc signal source 5520A of Fluke corporation is selected as the dc signal source, and is used as a dc voltage source when tracing the PMU (Precision Measurement Unit) current Measurement of the calibration apparatus, the function of 5520A is set as dc voltage, and the positive and negative electrodes of the dc voltage output interface of 5520A are respectively connected to the positive electrode of the dc standard ammeter and the negative electrode of the tracing board connection terminal through connection cables;
(2) In this embodiment, the direct current standard ammeter selects a digital multimeter 3458A of the Keysight company, and is used as a direct current standard ammeter when tracing the PMU current measurement of the calibration device, the function of the 3458A is set as direct current, and the positive electrode and the negative electrode of a direct current measurement interface of the 3458A are respectively connected with the positive electrode of the 5520A and the positive electrode of the connection terminal of the tracing board through connection cables, so that a series relationship is formed between the direct current standard ammeter and the connection terminal of the tracing board 5520A;
(3) The tracing interface of the tracing board is connected with the calibration interface of the calibration device, the direct-current signal source and the digital multimeter can be connected with the tracing board and the calibration device through the connection mode, and a direct-current voltage signal output by the direct-current signal source can be output to the calibration interface of the calibration device through the tracing board;
(4) The front surface of the PCB of the tracing plate is provided with a connecting terminal which is a banana head socket and is used for being connected with a direct-current voltage output interface of 5520A and a direct-current measuring interface of 3458A in series through a banana head connecting wire, the front surface of the PCB is also provided with a tracing interface which is an IDC50 socket and is used for being connected with an IDC50 plug of the calibration device, and the connecting terminal on the PCB and the tracing interface are connected in a one-to-one manner through PCB routing according to the positive electrode and the negative electrode;
(5) Controlling the calibration device to enter a PMU current measurement mode, controlling the 3458A to enter a direct current measurement mode, controlling the 5520A to output a direct current voltage parameter value according to the tracing requirement of PMU current measurement, controlling the calibration device to measure the direct current at a tracing interface at the moment, and recording the value as a PMU current measurement indicating value. Then, with the calibration device in the dc current measurement state, the control 3458A measures the dc current value at the connection terminal as the PMU current measurement standard value. And comparing the standard value with the indicating value to obtain the error of the PMU current measurement of the calibration device.
It is to be understood that the above "indicative value" is to be understood as a traceability interface measurement value, and the "standard value" is to be understood as an ammeter measurement value. The present invention will not be described in detail.
(6) Finally, the error correction can be carried out on the PMU current measurement of the calibration device according to the error value, so that the reliability of the magnitude of the calibration device is ensured.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A direct current measurement parameter calibration method, especially for an integrated circuit test system, is characterized by comprising the following steps:
1, respectively connecting the positive electrode and the negative electrode of a calibration interface of a calibration device with the positive electrode and the negative electrode of a tracing interface of a tracing plate correspondingly;
step 2, connecting the positive electrode of the tracing board connecting terminal with the negative electrode of a direct current standard ammeter, connecting the positive electrode of the direct current standard ammeter with the positive electrode of a direct current signal source, and connecting the negative electrode of the direct current signal source with the negative electrode of the connecting terminal; the uncertainty of the direct current measurement of the direct current standard ammeter is less than or equal to one third of the uncertainty of the direct current measurement of the calibration device; the negative electrode of the connecting terminal is connected with the negative electrode of the tracing interface, and the positive electrode of the connecting terminal is connected with the positive electrode of the tracing interface;
step 3, controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal; the direct current voltage signal is related to the value of the current calibration point of the calibration device;
step 4, obtaining a traceability interface measured value obtained by measuring the direct current signal at the traceability interface side by the calibration device, and obtaining an ammeter measured value obtained by measuring the direct current signal by the direct current standard ammeter;
step 5, comparing the source tracing interface measurement value with an ammeter measurement value to obtain a measurement error of the calibration device at a current calibration point;
and 6, tracing the magnitude of the direct current measurement type parameter of the calibration device by using the measurement error, and calibrating the direct current measurement type parameter of the integrated circuit test system based on the traced calibration device.
2. The method according to claim 1, characterized in that the current measurement range of the direct current standard ammeter covers the current measurement range of the calibration device; the direct-current voltage output range of the direct-current signal source can meet the tracing requirement of direct-current measurement parameters of the calibration device.
3. A direct current measurement type parameter calibration system for an integrated circuit test system, the calibration system comprising: a source tracing board;
the tracing board comprises a connecting terminal and a tracing interface, wherein the cathode of the connecting terminal is connected with the cathode of the tracing interface, and the anode of the connecting terminal is connected with the anode of the tracing interface;
the tracing interface of the tracing plate is connected with the calibration interface of the calibration device, wherein the anode of the tracing interface is connected with the anode of the calibration interface, and the cathode of the tracing interface is connected with the cathode of the calibration interface;
the connecting terminal of the tracing board is connected with a direct current standard ammeter and a direct current signal source; the positive pole of the connecting terminal is connected with the negative pole of the direct current standard ammeter, the positive pole of the direct current standard ammeter is connected with the positive pole of the direct current signal source, and the negative pole of the direct current signal source is connected with the negative pole of the connecting terminal; the uncertainty of the direct current measurement of the direct current standard ammeter is less than or equal to one third of the uncertainty of the direct current measurement of the calibration device; the direct current standard current meter and the direct current signal source are used for tracing the magnitude of the direct current measurement type parameter of the calibration device, and the tracing process comprises the following steps: controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal, wherein the direct current voltage signal is related to the numerical value of a current calibration point of the calibration device; then, obtaining a traceability interface measurement value obtained by measuring the direct current signal at the traceability interface side by the calibration device, obtaining an ammeter measurement value obtained by measuring the direct current signal by a direct current standard ammeter, and comparing the traceability interface measurement value with the ammeter measurement value to obtain a measurement error of the calibration device at a current calibration point; tracing the magnitude of the direct current measurement type parameter of the calibration device based on the measurement error;
the calibration device after the magnitude tracing is used for calibrating direct current measurement parameters of the integrated circuit test system.
4. The device of claim 3, wherein the current measurement range of the DC standard ammeter covers the current measurement range of the calibration device; the direct-current voltage output range of the direct-current signal source can meet the tracing requirement of direct-current measurement parameters of the calibration device.
5. The apparatus of claim 3, wherein the tracing board is a PCB board; the positive and negative poles of the connecting terminal and the tracing interface are respectively connected through PCB wiring.
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| CN202211520671.1A CN115877299A (en) | 2022-11-30 | 2022-11-30 | Direct current measurement type parameter calibration method and system |
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| CN202211520671.1A CN115877299A (en) | 2022-11-30 | 2022-11-30 | Direct current measurement type parameter calibration method and system |
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| CN202211520671.1A Pending CN115877299A (en) | 2022-11-30 | 2022-11-30 | Direct current measurement type parameter calibration method and system |
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