CN115877299A - Method and system for calibrating DC current measurement parameters - Google Patents

Abstract

The invention provides a method and a system for calibrating direct current measurement parameters, which comprise the following steps: connecting a calibration interface of the calibration device with a tracing interface of a tracing plate; connecting a direct current standard ammeter and a direct current signal source with a connecting terminal of a tracing board; establishing connection between a connection terminal of the tracing board and a direct current signal source and a direct current standard ammeter in a series connection relationship through a connection cable; controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal; acquiring a first measurement value of the calibration device, and acquiring a second measurement value of the direct current standard ammeter to obtain a measurement error of the calibration device at a current calibration point; and tracing the magnitude of the calibration device based on the measurement error, and calibrating the direct current measurement type parameters of the integrated circuit test system by using the traced calibration device. The invention comprehensively and truly reflects the overall technical index of the direct current measurement type parameters of the calibration device.

Description

Method and system for calibrating DC current measurement parameters

technical field

The invention belongs to the technical field of microelectronic testing and measurement, and more specifically relates to a method and system for calibrating DC current measurement parameters.

Background technique

The DC current measurement parameters of the integrated circuit test system (referred to as the test system) include PMU current measurement, DPS current measurement and other parameters.

At present, the calibration of the DC current measurement parameters of the test system is mainly realized by developing and establishing the calibration device of the integrated circuit test system (referred to as the calibration device). The calibration device includes a calibration board and an external instrument, and the calibration board is loaded on the test system during calibration. , and connect the external instrument to the loading board, and control the external instrument to measure various DC current measurement parameters of the test system to complete the calibration. This method is ideal for transferring the value of the DC current measurement parameter of the calibration device down to the test system.

However, there is currently no special method for the upward traceability of the DC current measurement parameters of the calibration device. Usually, the external instruments that make up the calibration device are sent separately to the metrology technical institution to complete the traceability of the instrument level. Other components of the calibration device , such as matrix switches, various cables, interfaces, calibration software and other parts will affect the calibration results, and these parts can affect the measurement uncertainty of the DC current measurement parameters of the test system calibration device by more than 20%. It can be seen from this These parts are sources of uncertainty that cannot be ignored, and are the main influence quantities of uncertainty. Therefore, the real technical index of the calibration device cannot be obtained directly from the technical index of the external instrument. The overall technical indicators of the DC current measurement parameters of the calibration device have not been fully and truly reflected in the process of value traceability.

Contents of the invention

In view of the defects of the prior art, the purpose of the present invention is to provide a method and system for calibrating DC current measurement parameters, aiming to solve the problem that the overall technical indicators of the DC current measurement parameters of the existing calibration device are not in the process of traceability of the value. It can not be ideally and reliably calibrated the DC current measurement parameters of the integrated current test system.

In order to achieve the above object, in the first aspect, the present invention provides a method for calibrating DC current measurement parameters, especially for integrated circuit test systems, including the following steps:

Step 1, connect the positive and negative poles of the calibration interface of the calibration device to the positive and negative poles of the traceability interface of the traceability board;

Step 2, connect the positive pole of the traceability board connection terminal to the negative pole of the DC standard ammeter, the positive pole of the DC standard ammeter is connected to the positive pole of the DC signal source, and the negative pole of the DC signal source is connected to the negative pole of the connection terminal; The current measurement uncertainty is less than or equal to one-third of the DC current measurement uncertainty of the calibration device; the negative pole of the connection terminal is connected to the negative pole of the traceability interface, and the positive pole of the connection terminal is connected to the positive pole of the traceability interface;

Step 3, control the calibration device and the DC standard ammeter to enter the DC current measurement mode, and control the DC signal source to output a preset DC voltage signal; the DC voltage signal is related to the value of the current calibration point of the calibration device;

Step 4, obtain the measured value of the traceable interface obtained by measuring the DC current signal at the traceable interface side of the calibration device, and obtain the measured value of the ammeter obtained by measuring the DC current signal with the DC standard ammeter;

Step 5, comparing the measurement value of the traceability interface with the measurement value of the ammeter to obtain the measurement error of the calibration device at the current calibration point;

Step 6: Use the measurement error to trace the value of the DC current measurement parameters of the calibration device, and calibrate the DC current measurement parameters of the integrated circuit test system based on the traced calibration device.

In an optional example, the current measurement range of the DC standard ammeter covers the current measurement range of the calibration device; the DC voltage output range of the DC signal source should be able to meet the traceability requirements of the DC current measurement parameters of the calibration device.

In the second aspect, the present invention provides a DC current measurement parameter calibration system for integrated circuit testing systems, characterized in that the calibration system includes: a traceability board;

The traceability board includes a connection terminal and a traceability interface, wherein the negative pole of the connection terminal is connected to the negative pole of the traceability interface, and the positive pole of the connection terminal is connected to the positive pole of the traceability interface;

The traceability interface of the traceability board is connected to the calibration interface of the calibration device, wherein the positive pole of the traceability interface is connected to the positive pole of the calibration interface, and the negative pole of the traceability interface is connected to the negative pole of the calibration interface;

The connection terminal of the traceability board is connected to a DC standard ammeter and a DC signal source; wherein, the positive pole of the connection terminal is connected to the negative pole of the DC standard ammeter, the positive pole of the DC standard ammeter is connected to the positive pole of the DC signal source, and the negative pole of the DC signal source is connected to the connection The negative pole of the terminal; the DC current measurement uncertainty of the DC standard ammeter is less than or equal to one-third of the DC current measurement uncertainty of the calibration device; the DC standard ammeter and the DC signal source are used for the DC current measurement of the calibration device The traceability process is as follows: control the calibration device and the DC standard ammeter to enter the DC current measurement mode, and control the DC signal source to output a preset DC voltage signal, and the DC voltage signal is consistent with the current calibration point of the calibration device. Numerical correlation; then obtain the measured value of the traceable interface obtained by measuring the DC current signal at the traceable interface side by the calibration device, and obtain the measured value of the ammeter obtained by measuring the DC current signal with the DC standard ammeter, and compare the measured value of the traceable interface with the measured value of the ammeter Comparing to obtain the measurement error of the calibration device at the current calibration point; based on the measurement error, the value of the DC current measurement parameter of the calibration device is traced;

The calibration device after the traceable value is used to calibrate the DC current measurement parameters of the integrated circuit test system.

In an optional example, the traceability board is a PCB board; the connection terminal and the positive and negative poles of the traceability interface are respectively connected through PCB traces.

In an optional example, the current measurement range of the DC standard ammeter covers the current measurement range of the calibration device; the DC voltage output range of the DC signal source should be able to meet the traceability requirements of the DC current measurement parameters of the calibration device.

Generally speaking, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:

The present invention provides a method and system for calibrating DC current measurement parameters, which have the following advantages: (1) Quantity traceability is performed completely based on the normal calibration process of the calibration device DC current measurement parameters, and the external instruments, cables, and calibration devices of the calibration device The software is configured completely in accordance with the normal calibration process, which can reflect the technical indicators of the calibration device under the actual calibration working conditions, comprehensively and truly reflect the overall technical indicators of the DC current measurement parameters of the calibration device, and can be used for the DC current measurement of the integrated current test system. The parameters are ideally and reliably calibrated; (2) The calibration device does not need any software and hardware adjustments, and the traceability of the DC current measurement parameters of the calibration device can be realized, which reduces the cost of adapting the calibration device.

Description of drawings

Fig. 1 is a flow chart of a method for calibrating DC current measurement parameters provided by an embodiment of the present invention;

FIG. 2 is a structural diagram of a DC current measurement parameter calibration system provided by an embodiment of the present invention;

FIG. 3 is a flow chart of another method for calibrating DC current measurement parameters provided by an embodiment of the present invention.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is only some embodiments of the present invention, but not all embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

It should be noted that the terminology used here is only for describing specific embodiments, and is not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and/or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and/or combinations thereof.

The relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. At the same time, it should be clear that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Techniques, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the authorized description. In all examples shown and discussed herein, any specific value should be construed as illustrative only, and not as a limitation. Therefore, other examples of the exemplary embodiment may have different values. It should be noted that like numerals and letters denote like items in the following figures, therefore, once an item is defined in one figure, it does not require further discussion in subsequent figures.

In the description of the present invention, it should be understood that orientation words such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" etc. indicate the orientation Or positional relationship is generally based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description. In the absence of a contrary description, these orientation words do not indicate or imply the device or element referred to. It must have a specific orientation or be constructed and operated in a specific orientation, so it should not be construed as limiting the scope of the present invention: the orientation words "inside and outside" refer to inside and outside relative to the outline of each part itself.

In the description of the present invention, several means more than one, and multiple means more than two. Greater than, less than, exceeding, etc. are understood as not including the original number, and above, below, within, etc. are understood as including the original number. If the description of the first and second is only for the purpose of distinguishing the technical features, it cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features relation.

In the description of the present invention, reference to the terms "one embodiment," "some embodiments," "exemplary embodiments," "examples," "specific examples," or "some examples" is intended to mean that the embodiments are A specific feature, structure, material, or characteristic described by or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

In order to solve the current upward traceability of the DC current measurement parameters of the calibration device, there is no special method, but the external instruments that make up the calibration device are sent to the metering technical institution to complete the traceability of the instrument level. The overall technical indicators of the calibration device are currently not available. There are no comprehensive and true reflections in the process of traceability of the value, and a method for traceability of the parameters of the DC current measurement of the calibration device of the integrated circuit test system is proposed.

The present invention is entirely based on the calibration process of the calibration device. The external instruments, cables, and calibration software of the calibration device are configured completely according to the normal calibration process. On the basis of ensuring that the accuracy of the measurement results meets the requirements for traceability of the value, it can reflect the actual calibration of the calibration device. Calibrate the technical indicators of DC current measurement parameters under working conditions, and the calibration device does not need any software and hardware adjustments.

Fig. 1 is a flow chart of a DC current measurement parameter calibration method provided by an embodiment of the present invention; as shown in Fig. 1 , it includes the following steps:

Step 1, connect the positive and negative poles of the calibration interface of the calibration device to the positive and negative poles of the traceability interface of the traceability board;

Step 2, connect the positive pole of the traceability board connection terminal to the negative pole of the DC standard ammeter, the positive pole of the DC standard ammeter is connected to the positive pole of the DC signal source, and the negative pole of the DC signal source is connected to the negative pole of the connection terminal; The current measurement uncertainty is less than or equal to one-third of the DC current measurement uncertainty of the calibration device; the negative pole of the connection terminal is connected to the negative pole of the traceability interface, and the positive pole of the connection terminal is connected to the positive pole of the traceability interface;

Among them, the connection relationship of the calibration device, traceability board, DC standard ammeter and DC signal source is shown in Figure 2.

Step 3, control the calibration device and the DC standard ammeter to enter the DC current measurement mode, and control the DC signal source to output a preset DC voltage signal; the DC voltage signal is related to the value of the current calibration point of the calibration device;

Step 4, obtain the measured value of the traceable interface obtained by measuring the DC current signal at the traceable interface side of the calibration device, and obtain the measured value of the ammeter obtained by measuring the DC current signal with the DC standard ammeter;

Step 5, comparing the measurement value of the traceability interface with the measurement value of the ammeter to obtain the measurement error of the calibration device at the current calibration point;

Step 6: Use the measurement error to trace the value of the DC current measurement parameters of the calibration device, and calibrate the DC current measurement parameters of the integrated circuit test system based on the traced calibration device.

Specifically, with reference to Fig. 2, the PMU current measurement of the integrated circuit test system calibration device with 50 calibration interface channels is taken as an example to illustrate the specific implementation of the present invention. The flow chart is shown in Fig. 3:

(1) The DC signal source of this embodiment selects the DC signal source 5520A of Fluke Company, and it is used as a DC voltage source when tracing the source of the PMU (Precision Measurement Unit, Precision Measurement Unit) current measurement of the calibration device, and the function of the 5520A is set to DC Voltage, the positive and negative poles of the DC voltage output interface of 5520A are respectively connected to the positive pole of the DC standard ammeter and the negative pole of the connection terminal of the traceability board through connecting cables;

(2) The DC standard ammeter of this embodiment selects the digital multimeter 3458A of Keysight Company, and uses it as a DC standard ammeter when the PMU current measurement of the calibration device is traced back to the source. The function of the 3458A is set to DC current, and the DC current measurement interface of the 3458A is positive The negative pole is connected to the positive pole of the 5520A and the positive pole of the traceability board connection terminal respectively through the connecting cable, thus forming a series relationship with the 5520A at the connection terminal of the traceability board;

(3) Connect the traceability interface of the traceability board with the calibration interface of the calibration device. Through the above connection method, the DC signal source and digital multimeter can be connected with the traceability board and the calibration device. The DC voltage signal output by the DC signal source can be passed through The traceability board is output to the calibration interface of the calibration device;

(4) The front of the PCB board of the traceability board is equipped with connection terminals, which are banana plug sockets, which are used to connect in series with the DC voltage output interface of 5520A and the DC current measurement interface of 3458A through the banana plug cable. Equipped with a traceability interface, the traceability interface is an IDC50 socket, which is used to connect with the IDC50 plug of the calibration device, and the connection terminal on the PCB board and the traceability interface are connected one-to-one through the PCB wiring according to the positive and negative poles;

(5) Control the calibration device to enter the PMU current measurement mode, and control the 3458A to enter the DC current measurement mode, and then control the 5520A to output a DC voltage parameter value according to the traceability requirements of the PMU current measurement. At this time, the control calibration device controls the DC current at the traceability interface Make a measurement and record this value as the PMU current measurement indication. Then keep the calibration device in the DC current measurement state, and control the 3458A to measure the DC current value at the connection terminal as the standard value of the PMU current measurement. Compare the standard value with the indicated value to obtain the error of the PMU current measurement of the calibration device.

It can be understood that the above "indicated value" should be understood as the measured value of the traceability interface, and the "standard value" should be understood as the measured value of the ammeter. The present invention does not specifically describe this again.

(6) Finally, error correction can be performed on the PMU current measurement of the calibration device according to the above error value, so as to ensure the value reliability of the calibration device.

It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.

Claims (5)

1. A direct current measurement parameter calibration method, especially for an integrated circuit test system, is characterized by comprising the following steps:

1, respectively connecting the positive electrode and the negative electrode of a calibration interface of a calibration device with the positive electrode and the negative electrode of a tracing interface of a tracing plate correspondingly;

step 2, connecting the positive electrode of the tracing board connecting terminal with the negative electrode of a direct current standard ammeter, connecting the positive electrode of the direct current standard ammeter with the positive electrode of a direct current signal source, and connecting the negative electrode of the direct current signal source with the negative electrode of the connecting terminal; the uncertainty of the direct current measurement of the direct current standard ammeter is less than or equal to one third of the uncertainty of the direct current measurement of the calibration device; the negative electrode of the connecting terminal is connected with the negative electrode of the tracing interface, and the positive electrode of the connecting terminal is connected with the positive electrode of the tracing interface;

step 3, controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal; the direct current voltage signal is related to the value of the current calibration point of the calibration device;

step 4, obtaining a traceability interface measured value obtained by measuring the direct current signal at the traceability interface side by the calibration device, and obtaining an ammeter measured value obtained by measuring the direct current signal by the direct current standard ammeter;

step 5, comparing the source tracing interface measurement value with an ammeter measurement value to obtain a measurement error of the calibration device at a current calibration point;

and 6, tracing the magnitude of the direct current measurement type parameter of the calibration device by using the measurement error, and calibrating the direct current measurement type parameter of the integrated circuit test system based on the traced calibration device.

2. The method according to claim 1, characterized in that the current measurement range of the direct current standard ammeter covers the current measurement range of the calibration device; the direct-current voltage output range of the direct-current signal source can meet the tracing requirement of direct-current measurement parameters of the calibration device.

3. A direct current measurement type parameter calibration system for an integrated circuit test system, the calibration system comprising: a source tracing board;

the tracing board comprises a connecting terminal and a tracing interface, wherein the cathode of the connecting terminal is connected with the cathode of the tracing interface, and the anode of the connecting terminal is connected with the anode of the tracing interface;

the tracing interface of the tracing plate is connected with the calibration interface of the calibration device, wherein the anode of the tracing interface is connected with the anode of the calibration interface, and the cathode of the tracing interface is connected with the cathode of the calibration interface;

the connecting terminal of the tracing board is connected with a direct current standard ammeter and a direct current signal source; the positive pole of the connecting terminal is connected with the negative pole of the direct current standard ammeter, the positive pole of the direct current standard ammeter is connected with the positive pole of the direct current signal source, and the negative pole of the direct current signal source is connected with the negative pole of the connecting terminal; the uncertainty of the direct current measurement of the direct current standard ammeter is less than or equal to one third of the uncertainty of the direct current measurement of the calibration device; the direct current standard current meter and the direct current signal source are used for tracing the magnitude of the direct current measurement type parameter of the calibration device, and the tracing process comprises the following steps: controlling the calibration device and the direct current standard ammeter to enter a direct current measurement mode, and controlling a direct current signal source to output a preset direct current voltage signal, wherein the direct current voltage signal is related to the numerical value of a current calibration point of the calibration device; then, obtaining a traceability interface measurement value obtained by measuring the direct current signal at the traceability interface side by the calibration device, obtaining an ammeter measurement value obtained by measuring the direct current signal by a direct current standard ammeter, and comparing the traceability interface measurement value with the ammeter measurement value to obtain a measurement error of the calibration device at a current calibration point; tracing the magnitude of the direct current measurement type parameter of the calibration device based on the measurement error;

the calibration device after the magnitude tracing is used for calibrating direct current measurement parameters of the integrated circuit test system.

4. The device of claim 3, wherein the current measurement range of the DC standard ammeter covers the current measurement range of the calibration device; the direct-current voltage output range of the direct-current signal source can meet the tracing requirement of direct-current measurement parameters of the calibration device.

5. The apparatus of claim 3, wherein the tracing board is a PCB board; the positive and negative poles of the connecting terminal and the tracing interface are respectively connected through PCB wiring.

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