CN115821209A - Device for efficiently preparing refractory metal coating on inner surface and outer surface of thrust chamber body of engine - Google Patents
Device for efficiently preparing refractory metal coating on inner surface and outer surface of thrust chamber body of engine Download PDFInfo
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- CN115821209A CN115821209A CN202211296989.6A CN202211296989A CN115821209A CN 115821209 A CN115821209 A CN 115821209A CN 202211296989 A CN202211296989 A CN 202211296989A CN 115821209 A CN115821209 A CN 115821209A
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Abstract
The application relates to the field of manufacturing of a thrust chamber body part of an aerospace engine, and discloses a device for preparing a coating on the thrust chamber body part, which comprises: the precursor sublimation device is used for providing precursor gas; the reaction chamber is connected with the precursor sublimation device through an air inlet pipeline; the air inlet bearing piece is used for bearing the workpiece in the reaction cavity and is provided with a ventilation inner cavity, and the ventilation inner cavity is opposite to the inner cavity of the workpiece; a rotating motor for rotating the workpiece; the reaction cavity is provided with a workbench, the workbench is provided with a workbench opening hermetically connected with a rotating motor, and the rotating motor is assembled at the workbench opening and the fixed end of the air inlet bearing piece; the gas inlet bearing part is provided with a vent opening communicated with the vent inner cavity, and precursor gas from the gas inlet pipeline enters the inner cavity of the workpiece through the vent opening and the vent inner cavity. The integral preparation of the coating with uniform thickness on the inner surface and the outer surface of the thrust chamber body is realized, the preparation efficiency of the coating is effectively improved, and the manufacturing cost is reduced.
Description
Technical Field
The application relates to the technical field of manufacturing of a thrust chamber body of an aerospace engine, in particular to a device for efficiently preparing a refractory metal coating on the inner surface and the outer surface of the thrust chamber body of the engine.
Background
The low-thrust double-component liquid rocket engine is mainly applied to attitude adjustment and orbit control of a spacecraft, the combustion temperature of fuel in the body of a thrust chamber of the engine is as high as 2700 ℃, and the temperature of the inner wall surface of the engine is still higher than 1000 ℃ after the inner wall surface liquid film cooling technology is adopted. In order to meet the high-temperature strength requirement of an engine thrust chamber, refractory metals (W, mo, ta, nb, re and the like) or metal platinum are required to be used as a body material, but the high-temperature oxidation resistance of the materials is poor, for example, niobium alloy can be catastrophically oxidized at the temperature of more than 600 ℃, and the high-temperature oxygen-enriched environment during combustion cannot be directly responded, so that high-temperature oxidation-resistant coatings are required to be coated on the inner surface and the outer surface of the body material for protection.
The technology for coating the high-temperature oxidation-resistant coating on the surface of the refractory metal starts in the 50 th 20 th century, forms a plurality of material systems so far, and mainly comprises the following steps: a niobium hafnium alloy coated silicide coating, a niobium tungsten alloy coated molybdenum disilicide coating, and a rhenium coated iridium coating. The preparation process of the silicide coating is slurry sintering, the preparation process of the molybdenum disilicide coating is physical vapor deposition molybdenum layer + vacuum infiltration silicification, and the preparation process of the iridium coating is physical vapor deposition.
The process characteristics of physical vapor deposition determine that coatings cannot be deposited on the inner and outer surfaces of the body part at the same time. Even if the coating is only deposited on the inner surface of the body part, the coating with uniform thickness can be obtained through multi-time deposition in a segmented mode, and the complexity of the coating preparation process is greatly improved, so that the production period of the product is long, the efficiency is low, and the manufacturing cost is high.
Disclosure of Invention
The application provides a device of high-efficient preparation coating of surface inside and outside engine thrust room body portion, and the purpose realizes the integrative preparation of the even coating of surface thickness inside and outside the thrust room body portion, effectively improves the preparation efficiency of coating, reduces manufacturing cost. The device provided by the invention has important significance for the engineering application of the novel engine thrust chamber body part.
In a first aspect, an apparatus for preparing a coating on a body part of a thrust chamber is provided, comprising:
the precursor sublimation device is used for providing a precursor gas;
the reaction cavity is connected with the precursor sublimation device through an air inlet pipeline;
the gas inlet bearing piece is used for bearing a workpiece in the reaction cavity and is provided with a ventilation inner cavity, and the ventilation inner cavity is opposite to the inner cavity of the workpiece;
a rotating motor for rotating the workpiece;
the reaction cavity is provided with a workbench, the workbench is provided with a workbench opening which is hermetically connected with the rotating motor, the rotating motor is assembled with the fixed end of the air inlet bearing piece around the workbench opening, and the fixed end is positioned on one side of the air inlet bearing piece, which is far away from the workpiece;
the gas inlet carrier has a vent opening communicating with the vent lumen, the precursor gas from the gas inlet line passing through the vent opening and the vent lumen into the lumen of the workpiece.
Compared with the prior art, the scheme provided by the application at least comprises the following beneficial technical effects:
the application provides a device of high-efficient preparation coating of surface inside and outside engine thrust room body portion has realized the integrative preparation of the even coating of surface thickness inside and outside the thrust room body portion, and sedimentary coating thickness deviation is not more than 15% of gross thickness, effectively improves the preparation efficiency of coating, reduces manufacturing cost, provides the ability guarantee for the engineering application of novel rail appearance accuse engine.
With reference to the first aspect, in certain implementations of the first aspect, the vent opening is disposed at the fixed end.
The fixed end is provided with a ventilation opening besides a hole for installing the motor, so that a through hole does not need to be processed on the side wall of the air inlet bearing piece, and the processing difficulty of the air inlet bearing piece is reduced.
With reference to the first aspect, in certain implementations of the first aspect, the vent opening is disposed opposite the air intake conduit.
The arrangement direction of the ventilation opening is matched with the flowing direction of the precursor gas, so that the precursor gas can conveniently flow into the inner cavity of the workpiece.
Combine the first aspect, in certain implementation of the first aspect, the workstation is provided with dodges heavy groove, the bottom of dodging heavy groove is provided with the workstation opening, the active cell end of rotating electrical machines stretches into dodge heavy groove with it holds the carrier assembly to admit air, the lateral wall of dodging heavy groove is provided with heavy groove blow vent, heavy groove blow vent with the admission line link up.
The avoidance sink groove is arranged, so that the interference between the rotation of the air inlet bearing piece and the components in the reaction cavity can be avoided. The cavity formed by avoiding the sink groove can also be used for uniformly mixing carrier gas and precursor gas, so that the mixed gas entering the inner cavity of the workpiece meets the coating preparation requirement.
With reference to the first aspect, in certain implementations of the first aspect, the apparatus further includes a sink cover, an outer periphery of the sink cover is fitted with the opening of the avoidance sink, the sink cover has a cover through hole in a center thereof, and the intake bearing member passes through the cover through hole.
The overflow of the precursor gas is reduced, so that more precursor gas can firstly enter the reaction cavity through the inner cavity of the workpiece. For the work pieces with different sizes and shapes, the air inlet bearing piece and the sink cover with different specifications can be selected, so that the device provided by the embodiment of the application can be matched with various types of work pieces.
With reference to the first aspect, in certain implementations of the first aspect, the rotating electrical machine and the workbench opening are hermetically connected by a magnetic fluid.
Thereby facilitating avoidance of gas leakage.
With reference to the first aspect, in certain implementations of the first aspect, the apparatus includes a plurality of the work tables, and the number of the work tables is 3 to 6.
The invention breaks through the integrated preparation technology of the inner and outer surface coatings of the thrust chamber body part of the engine, realizes the simultaneous integrated deposition of the functional coatings of multiple workpieces through the multi-station design, greatly improves the deposition efficiency, reduces the production cost and provides capability guarantee for the engineering application of a novel rail/attitude control engine.
With reference to the first aspect, in certain implementations of the first aspect, a plurality of air exhaust channels are further disposed around the workbench, and the number of the air exhaust channels is 10 to 20.
The air exhaust channel is uniformly arranged around the workbench, and the air exhaust efficiency is improved.
With reference to the first aspect, in certain implementations of the first aspect, the apparatus further includes an induction heating device for heating the workpiece.
With reference to the first aspect, in certain implementations of the first aspect, the apparatus further includes a carrier gas cylinder, a condenser, a filter, a molecular pump, a dry pump, an off-gas treatment device, a vacuum system, and an electrical control system;
the carrier gas cylinder is used for providing carrier gas, the carrier gas cylinder is connected with the gas inlet of the precursor sublimation device through a first pipeline, and the carrier gas cylinder is connected with the gas inlet of the reaction cavity through a second pipeline;
the gas outlet of the precursor sublimation device is connected with the gas inlet of the reaction chamber through a third pipeline, the third pipeline is converged with the second pipeline, and a heating belt is wound outside the part of the second pipeline connected with the gas inlet of the reaction chamber and the third pipeline;
the gas outlet of the reaction cavity is connected with the condenser through a fourth pipeline, and a heating belt is wound on the outer surface of the fourth pipeline;
the condenser and the filter are connected through a fifth pipeline;
the condenser and the molecular pump are connected through a sixth pipeline, and the sixth pipeline is converged with the fifth pipeline;
the molecular pump is connected with the dry pump through a seventh pipeline;
the filter is connected with the dry pump through an eighth pipeline;
and the dry pump is connected with the tail gas treatment device through a ninth pipeline.
Drawings
Fig. 1 is a schematic structural diagram of an apparatus for preparing a coating on a thrust chamber body according to an embodiment of the present application.
Fig. 2 is a schematic structural diagram of a reaction chamber according to an embodiment of the present disclosure.
Fig. 3 is a schematic structural diagram of a reaction chamber according to an embodiment of the present disclosure.
Detailed Description
The present application is described in further detail below with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a schematic structural diagram of an apparatus for preparing a coating on a thrust chamber body part according to an embodiment of the present application.
The device comprises a carrier gas cylinder, a precursor sublimation device, a reaction cavity, a rotating motor, an air inlet/extraction pipeline, a condensation filtering device, a tail gas treatment device, a vacuum system and an electric control system.
The carrier gas cylinder stores carrier gas, and the carrier gas is inert gas, generally Ar gas. The carrier gas bottle outputs two paths of carrier gases, the first path of carrier gas enters the precursor sublimation device, and the second path of carrier gas enters the reaction cavity. The carrier gas cylinder is connected with the gas inlet of the precursor sublimation device through a first pipeline. The first pipeline is provided with a valve V1, a vacuum gauge P1 and a mass flow meter MFC-1. The carrier gas cylinder is connected with the gas inlet of the reaction cavity through a second pipeline, and a valve V2, a vacuum gauge P2 and a mass flow meter MFC-2 are installed on the second pipeline. The mass flow meters MFC-1 and MFC-2 are used for controlling the flow of the inert gas output from the carrier gas cylinder.
The gas outlet of the precursor sublimation device is connected with the gas inlet of the reaction cavity through a third pipeline. The third line may merge with the second line. A valve V3 is mounted on the third line. The part of the second pipeline connected with the air inlet of the reaction chamber and the outer side of the third pipeline are wound with a heating belt and a heat preservation belt, the third pipeline is heated and preserved heat, the sublimed precursor is prevented from being condensed into a solid blocking pipeline, and the temperature is set according to the precursor.
The precursor sublimation device stores a corresponding precursor required for a coating to be deposited. To avoid mutual contamination, one set of devices can deposit only one coating. The corresponding sublimation temperature is set according to different precursors, and the precursor bottle is heated in a resistance heating mode during working, so that the precursor bottle is sublimated into a gaseous state.
The reaction chamber is a hot wall chamber. When the reactor works, the reaction cavity is heated and insulated to a certain temperature through the resistance, and the temperature is set according to the precursor. The workpieces in the reaction chamber are independently heated in an induction heating mode, and the induction coil is connected with an electrode arranged on the wall of the reaction chamber. The reaction chamber may have a base plate on which a plurality of work stages may be arranged, and the plurality of work stages may be uniformly distributed on a circumference. The number of the plurality of work tables is generally set to 3, 4 or 6.
Fig. 2 and 3 show a schematic structural diagram of a reaction chamber provided in an embodiment of the present application.
An air inlet bearing piece is arranged in the reaction cavity. The intake carrier may carry a workpiece. The gas inlet carrier may have a venting lumen disposed opposite the lumen of the workpiece to facilitate the preferential passage of precursor gas through the workpiece lumen into the reaction chamber. The axial line of the workpiece table can be provided with a working table opening, and the stator of the rotating motor can be connected with the working table opening in a sealing mode. The rotor of the rotary motor can extend into the opening of the workbench and is assembled with the fixed end of the side, far away from the workpiece, of the air inlet bearing piece. The air inlet bearing piece can rotate under the driving of the motor and drive the workpiece to rotate. The rotary motor is connected with the opening of the workbench in a sealing way, and sealing can be realized in a magnetic fluid mode.
The gas inlet carrier has a gas inlet opening for the supply of precursor gases. The air inlet pipeline in the reaction cavity is connected with the third pipeline, and the air inlet pipeline can be arranged in the center of the bottom of the reaction cavity. The air inlet pipeline can be divided into corresponding branches according to the number of the work pieces and is conveyed to the ventilation opening of the air inlet bearing piece. Thereby, the precursor gas from the gas inlet line enters the inner cavity of the workpiece through the vent inner cavity.
In some embodiments, the opening of the inlet line may be provided on the work table and the vent opening of the inlet carrier may be provided on a side of the inlet carrier remote from the work piece. The opening of the air inlet pipeline can be arranged opposite to the ventilation opening of the air inlet bearing piece, so that after air flows out of the opening of the air inlet pipeline, the air can directly enter the ventilation opening of the air inlet bearing piece and enter the inner cavity of the workpiece through the ventilation inner cavity of the air inlet bearing piece.
In other embodiments, as shown in fig. 2, the work table may be provided with an escape sinker. The intake bearing member may be disposed within the avoidance sinker. When the air inlet bearing piece is driven by the motor to rotate, the air inlet bearing piece can be arranged at intervals with the side wall of the avoiding sinking groove so as to avoid interference between the rotation of the air inlet bearing piece and parts in the reaction cavity. The bottom wall or the side wall of the avoiding sinking groove can be provided with an opening of the air inlet pipeline. The precursor gas can firstly enter the avoiding sink tank and then enter the reaction cavity through the inner cavity of the workpiece. The cavity formed by avoiding the sink groove can also be used for uniformly mixing carrier gas and precursor gas, so that the mixed gas entering the inner cavity of the workpiece meets the coating preparation requirement. In this case, the ventilation opening of the intake air carrier can be provided at the end or at the side wall, as long as the ventilation opening of the intake air carrier is located in the escape recess.
In one possible case, the opening to the sink can be provided with a sink cover (not shown in the figures). The periphery of the sink tank cover can be matched with an opening for avoiding the sink tank so as to reduce overflow of precursor gas and enable more precursor gas to enter the reaction chamber through the inner cavity of the workpiece. The sink cover may have a cover through hole in the center. The cover through hole profile can be arranged around the air inlet bearing piece to avoid the interference of the rotation of the air inlet bearing piece and the sink cover. The outer contour of the gas inlet bearing piece, which is positioned on the same horizontal plane with the cover through hole, can be matched with the contour of the cover through hole, so that the overflow of precursor gas can be further reduced.
For the work pieces with different sizes and shapes, the air inlet bearing piece and the sink cover with different specifications can be selected, so that the device provided by the embodiment of the application can be matched with various types of work pieces.
The periphery of the workpiece table can be uniformly distributed with air exhaust pipelines with reaction cavities. In some embodiments, the number of the pumping pipes around each workpiece stage is 12, 18 or 20, and the pumping pipes are collected and connected with the fourth pipe.
When the reaction chamber works, the reaction gas with the precursor flows in from the bottom of the inner wall of the workpiece, flows out from the top of the inner wall after flowing through the inner wall of the workpiece, then flows through the outer surface of the workpiece, and finally flows out of the reaction chamber from the air exhaust pipeline at the bottom of the reaction chamber. When the device works, the consistency of the thickness of the deposited coating is controlled by adjusting the opening of the butterfly valve, the numerical values of the MFC-1 and the MFC-2 and the sublimation temperature of the precursor and controlling the reaction pressure and the concentration of the precursor.
The air outlet of the reaction cavity is connected with the condenser through a fourth pipeline. A valve V4 is installed on the fourth line. The outer surface of the fourth pipeline is wound with a heating belt and a heat preservation belt which are used for heating and preserving heat of the fourth pipeline, the sublimed precursor is prevented from being condensed into a solid blocking pipeline, and the temperature is set according to the precursor.
The condenser and the filter are connected through a fifth pipeline, and a valve V5 and a valve V8 are arranged on the fifth pipeline. The condensation filtering device is used for cooling unreacted precursors in the tail gas, and the unreacted precursors are stored in the filter for subsequent treatment or recycling through the filtering of the filter, so that the effect of protecting the dry pump is achieved.
The condenser and the molecular pump are connected by a sixth line which may merge with a fifth line between valve V5 and valve V8. A valve V7 is mounted on the sixth line.
The molecular pump is connected with the dry pump through a seventh pipeline, and a valve V6 is arranged on the seventh pipeline.
The filter is connected with the dry pump through an eighth pipeline, and a vacuum gauge P3, a butterfly valve and a valve V9 are installed on the eighth pipeline.
The dry pump is connected with the tail gas treatment device through a ninth pipeline, and a check valve and a valve V10 are installed on the ninth pipeline.
The tail gas treatment device is used for treating harmful gases in tail gas, and the treatment mode is water washing treatment, so that the tail gas emission is ensured to meet the requirements of national and local related emission standards. And the tail gas treated by the tail gas treatment device is discharged through a tenth pipeline, and a tail gas concentration detector is arranged on the tenth pipeline.
The method for preparing the coating by using the device comprises the following steps:
(1) The refractory metal coating comprises a rhenium coating, an iridium coating and a molybdenum coating, and a precursor for depositing the rhenium coating is rhenium pentachloride; the precursor for depositing the iridium coating is acetylacetone iridium or iridium trichloride; the precursor for depositing the molybdenum coating is molybdenum tetrachloride; loading a precursor corresponding to the deposited refractory metal coating into a precursor sublimation device;
(2) A workpiece to be deposited is placed on a workpiece table of the reaction chamber, the workpiece table is connected with a motor, and the motor can drive the workpiece table to rotate when rotating, so that the workpiece to be coated is rotated;
(3) Before the coating deposition begins, all valves and butterfly valves are ensured to be in a closed state;
(4) Heating the temperature of the reaction cavity to a certain temperature and then keeping the temperature, wherein the heating temperature of the reaction cavity is changed along with the difference of precursors, and when the precursors are rhenium pentachloride, the heating temperature of the reaction cavity is 250-300 ℃; when the precursor is acetylacetone iridium, the heating temperature of the reaction chamber is 150-200 ℃; when the precursor is iridium trichloride, the heating temperature of the reaction chamber is 300-380 ℃; when the precursor is molybdenum tetrachloride, the heating temperature of the reaction cavity is 280-350 ℃;
(5) Sequentially opening a valve V10, a dry pump, a V6, a molecular pump, a V7, a V5 and a V4 for vacuumizing, and opening a valve V3 for continuously vacuumizing after the index of a vacuum gauge P2 is less than 1 mbar; when the readings of the vacuum gauge P1 and the vacuum gauge P2 are less than 1mbar again, closing the valve V7, the molecular pump and the valve V6 in sequence, opening the valve V9, the butterfly valve and the valve V8, and continuously vacuumizing after the opening of the butterfly valve is adjusted to 100%; when the reading of a vacuum gauge P3 is less than 10Pa, opening a valve V2, opening the MFC-2, inputting a certain amount of carrier gas, and adjusting the reading of the MFC-2 and the opening of a butterfly valve to ensure that the vacuum degree of a reaction cavity is within a certain range, the vacuum degree of the reaction cavity is changed along with the difference of precursors, and when the precursors are rhenium pentachloride, the vacuum degree of the reaction cavity is 50-150mabr; when the precursor is acetylacetone iridium, the vacuum degree of the reaction cavity is 30-50mabr; when the precursor is iridium trichloride, the vacuum degree of the reaction cavity is 100-200mabr; when the precursor is molybdenum tetrachloride, the vacuum degree of the reaction cavity is 150-300mbar;
(6) Turning on a motor to enable the motor to drive a workpiece to be deposited to rotate, wherein the rotating speed of the workpiece is 10-20r/min;
(7) Heating a workpiece to be deposited in the reaction cavity by induction heating, heating the third pipeline and the fourth pipeline to a certain temperature by a heating belt when the temperature of the workpiece to be deposited reaches a set temperature, heating a precursor in the precursor sublimation device, and turning on a tail gas concentration detector; during deposition, the heating temperature of the third pipeline and the fourth pipeline and the workpiece temperature are changed along with the difference of the precursor, when the precursor is rhenium pentachloride, the heating temperature of the third pipeline and the fourth pipeline is 250-300 ℃, and the workpiece temperature is 1250-1400 ℃; when the precursor is acetylacetone iridium, the heating temperature of the third pipeline and the fourth pipeline is 150-200 ℃, and the workpiece temperature is 750-1000 ℃; when the precursor is iridium trichloride, the heating temperature of the third pipeline and the fourth pipeline is 300-380 ℃, and the temperature of a workpiece is 1100-1250 ℃; when the precursor is molybdenum tetrachloride, the heating temperature of the third pipeline and the fourth pipeline is 280-350 ℃, and the workpiece temperature is 1200-1300 ℃;
(8) Opening a valve V1, adjusting the readings of MFC-1 and MFC-2, starting to deposit a refractory metal coating after the temperature of a precursor is heated to a set temperature, wherein the heating temperature of the precursor is changed along with the difference of the precursor, and when the precursor is rhenium pentachloride, the heating temperature of the precursor is 180-260 ℃; when the precursor is acetylacetone iridium, the heating temperature of the precursor is 110-150 ℃; when the precursor is iridium trichloride, the heating temperature of the precursor is 220-300 ℃; when the precursor is molybdenum tetrachloride, the heating temperature of the precursor is 240-280 ℃;
(9) When the deposition time reaches a preset value, the induction heating is closed, and the resistance heating in the precursor sublimation device is closed;
(10) The temperature of the workpiece is reduced to below 600 ℃, and after the temperature of the precursor is reduced to below 80 ℃, MFC-1, valves V1 and V3 are closed in sequence, and the reading of MFC-2 is adjusted;
(11) The third pipeline and the fourth pipeline are closed for heating;
(12) When the temperature of the third pipeline and the fourth pipeline is reduced to be below 80 ℃, sequentially closing the MFC-2, the valves V2, V4, V5, V8, the butterfly valves V9 and V10, adjusting the opening of the butterfly valves to be 0, and finishing the deposition of the coating;
(13) And closing the tail gas treatment device.
Example 1
The invention provides a device for efficiently preparing a coating on the inner surface and the outer surface of an engine thrust chamber body, which comprises a carrier gas cylinder, a precursor sublimation device, a reaction cavity, a rotating motor, an air inlet/exhaust pipeline, a condensation filtering device, a tail gas treatment device, a vacuum system and an electric control system, wherein the carrier gas cylinder is arranged in the reaction cavity;
the carrier gas cylinder is internally stored with carrier gas, and the carrier gas is inert gas, generally Ar gas;
the mass flow meter is used for controlling the flow of the inert gas output from the carrier gas cylinder;
the precursor sublimation device stores corresponding precursors required by the coating to be deposited, and one set of device can only deposit one coating in order to avoid mutual pollution; the corresponding sublimation temperature is set according to different precursors, and the precursor bottle is heated in a resistance heating mode during working, so that the precursor bottle is sublimated into a gaseous state.
The reaction cavity is a hot wall cavity, and when the reactor works, the reaction cavity is heated and insulated to a certain temperature through resistance, and the temperature is set according to the precursor. The workpiece stages in the reaction chamber are uniformly distributed on a circumference, and generally 3, 4 or 6 workpiece stages are arranged. The workpiece platform realizes the rotation of the workpiece through a rotating motor, and the connection between the rotating motor and the reaction cavity realizes the sealing through a magnetic fluid mode. The workpieces in the reaction chamber are independently heated in an induction heating mode, and the induction coil is connected with an electrode arranged on the wall of the reaction chamber. The air inlet pipeline connected with the third pipeline in the reaction cavity is arranged in the center of the bottom of the reaction cavity, and corresponding branches are divided according to the number of the workpiece tables and conveyed to the bottom of the workpiece; the pumping pipelines in the reaction cavity are uniformly distributed around the workpiece tables, the number of the pumping pipelines around each workpiece table is 12, 18 or 20, and the pumping pipelines are connected with the fourth pipeline after being collected. When the reaction chamber works, the reaction gas with the precursor flows in from the bottom of the inner wall of the workpiece, flows out from the top of the inner wall after flowing through the inner wall of the workpiece, then flows through the outer surface of the workpiece, and finally flows out of the reaction chamber from the air exhaust pipeline at the bottom of the reaction chamber. During working, the consistency of the thickness of the deposited coating is controlled by adjusting the opening of the butterfly valve, the numerical values of the MFC-1 and the MFC-2 and the sublimation temperature of the precursor and controlling the reaction pressure and the concentration of the precursor.
The air inlet/exhaust pipeline is connected with all components of the equipment, and when part of pipelines work, the pipelines need to be maintained at a certain temperature in a resistance heating mode to prevent sublimed precursors from being condensed into solid state to block the pipelines, and the temperature setting is determined according to the precursors.
The condensation filtering device is used for cooling unreacted precursors in the tail gas, and the unreacted precursors are stored in the filter for subsequent treatment or recycling through the filtering of the filter, so that the effect of protecting the dry pump is achieved.
The tail gas treatment device is used for treating harmful gases in the tail gas, and the treatment mode is water washing treatment, so that the tail gas emission is ensured to meet the requirements of national and local relevant emission standards;
the carrier gas cylinder outputs two paths of carrier gases, the first path of carrier gas is connected with the gas inlet of the precursor sublimation device through a first pipeline, and a valve V1, a vacuum gauge P1 and a mass flow meter MFC-1 are installed on the first pipeline; the second path of carrier gas is connected with the reaction cavity through a second pipeline, and a valve V2, a vacuum gauge P2 and a mass flow meter MFC-2 are arranged on the second pipeline;
the gas outlet of the precursor sublimation device is connected with the gas inlet of the reaction chamber through a third pipeline, a valve V3 is arranged on the third pipeline, and a heating belt and a heat preservation belt are wound outside the third pipeline and used for heating and preserving heat of the third pipeline;
the gas outlet of the reaction cavity is connected with the condenser through a fourth pipeline, a valve V4 is installed on the fourth pipeline, and a heating belt and a heat preservation belt are wound on the outer surface of the fourth pipeline and used for heating and preserving heat of the fourth pipeline;
the condenser is connected with the filter through a fifth pipeline, and valves V5 and V8 are arranged on the fifth pipeline;
the molecular pump is connected with a fifth pipeline between the valves V5 and V8 through a sixth pipeline, and a valve V7 is arranged on the sixth pipeline;
the molecular pump is connected with the dry pump through a seventh pipeline, and a valve V6 is arranged on the seventh pipeline;
the filter is connected with the dry pump through an eighth pipeline, and a vacuum gauge P3, a butterfly valve and a valve V9 are installed on a seventh pipeline;
the dry pump is connected with the tail gas treatment device through a ninth pipeline, and a one-way valve and a valve V10 are arranged on the ninth pipeline;
and the tail gas treated by the tail gas treatment device is discharged through a tenth pipeline, and a tail gas concentration detector is arranged on the tenth pipeline.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications without departing from the spirit and scope of the present invention.
Claims (10)
1. An apparatus for preparing a coating on a body of a thrust cell, comprising:
the precursor sublimation device is used for providing precursor gas;
the reaction cavity is connected with the precursor sublimation device through an air inlet pipeline;
the gas inlet bearing piece is used for bearing a workpiece in the reaction cavity and provided with a ventilation inner cavity, and the ventilation inner cavity is opposite to the inner cavity of the workpiece;
a rotating motor for rotating the workpiece;
the reaction cavity is provided with a workbench, the workbench is provided with a workbench opening which is hermetically connected with the rotating motor, the rotating motor is assembled with the fixed end of the air inlet bearing piece at the workbench opening, and the fixed end is positioned on one side, far away from the workpiece, of the air inlet bearing piece;
the gas inlet carrier has a gas inlet opening communicating with the gas inlet cavity, and the precursor gas from the gas inlet line enters the cavity of the workpiece through the gas inlet opening and the gas inlet cavity.
2. The device of claim 1, wherein the vent opening is disposed at the fixed end.
3. The device of claim 2, wherein the vent opening is disposed opposite the air intake conduit.
4. The device according to claim 1 or 2, characterized in that the workbench is provided with an avoiding sunken groove, the bottom of the avoiding sunken groove is provided with the workbench opening, a rotor end of the rotating motor extends into the avoiding sunken groove to be assembled with the air inlet bearing member, a side wall of the avoiding sunken groove is provided with a sunken groove air vent, and the sunken groove air vent is communicated with the air inlet pipeline.
5. The apparatus of claim 4, further comprising a sink cover having an outer periphery that mates with the opening of the relief sink, the sink cover having a cover through-hole in a center thereof through which the intake carrier passes.
6. The device according to any one of claims 1 to 3 and 5, wherein the rotary motor and the workbench opening are hermetically connected by a magnetic fluid.
7. The apparatus according to any one of claims 1 to 3 and 5, wherein the apparatus comprises a plurality of said work tables, the number of said work tables being 3 to 6.
8. The apparatus according to any one of claims 1 to 3 and 5, wherein a plurality of air exhaust channels are further arranged around the workbench, and the number of the plurality of air exhaust channels is 10-20.
9. The apparatus of any of claims 1 to 3, 5, further comprising an induction heating device for heating the workpiece.
10. The device according to any one of claims 1 to 3 and 5, wherein the device further comprises a carrier gas cylinder, a condenser, a filter, a molecular pump, a dry pump, an exhaust gas treatment device, a vacuum system and an electronic control system;
the carrier gas cylinder is used for providing carrier gas, the carrier gas cylinder is connected with the gas inlet of the precursor sublimation device through a first pipeline, and the carrier gas cylinder is connected with the gas inlet of the reaction cavity through a second pipeline;
the gas outlet of the precursor sublimation device is connected with the gas inlet of the reaction chamber through a third pipeline, the third pipeline is converged with the second pipeline, and a heating belt is wound outside the part of the second pipeline connected with the gas inlet of the reaction chamber and the third pipeline;
the air outlet of the reaction cavity is connected with the condenser through a fourth pipeline, and a heating belt is wound on the outer surface of the fourth pipeline;
the condenser and the filter are connected through a fifth pipeline;
the condenser is connected with the molecular pump through a sixth pipeline, and the sixth pipeline is converged with the fifth pipeline;
the molecular pump is connected with the dry pump through a seventh pipeline;
the filter is connected with the dry pump through an eighth pipeline;
and the dry pump is connected with the tail gas treatment device through a ninth pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211296989.6A CN115821209A (en) | 2022-10-21 | 2022-10-21 | Device for efficiently preparing refractory metal coating on inner surface and outer surface of thrust chamber body of engine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211296989.6A CN115821209A (en) | 2022-10-21 | 2022-10-21 | Device for efficiently preparing refractory metal coating on inner surface and outer surface of thrust chamber body of engine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115821209A true CN115821209A (en) | 2023-03-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211296989.6A Pending CN115821209A (en) | 2022-10-21 | 2022-10-21 | Device for efficiently preparing refractory metal coating on inner surface and outer surface of thrust chamber body of engine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115821209A (en) |
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2022
- 2022-10-21 CN CN202211296989.6A patent/CN115821209A/en active Pending
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