CN115799782A - Design and processing method of terahertz band-stop filter based on cylindrical double-chain structure - Google Patents
Design and processing method of terahertz band-stop filter based on cylindrical double-chain structure Download PDFInfo
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- 238000003672 processing method Methods 0.000 title claims description 8
- 230000000737 periodic effect Effects 0.000 claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 238000003379 elimination reaction Methods 0.000 claims abstract description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000010287 polarization Effects 0.000 claims abstract description 18
- 230000008030 elimination Effects 0.000 claims abstract description 16
- 239000010453 quartz Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 16
- 238000006116 polymerization reaction Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 238000004458 analytical method Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 238000000411 transmission spectrum Methods 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 claims description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
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Abstract
The invention provides a terahertz band elimination filter based on a cylindrical double-chain structure, wherein the input end of the filter is a metal double-chain periodic structure in which metal double chains are arranged in parallel, the output end of the filter is a quartz substrate connected with the metal double-chain periodic structure, and the metal double-chain periodic structure comprises a column double chain formed by combining a plurality of metal column bodies which are regularly and closely arranged; the band elimination filter is a band elimination filter, when a cylindrical double-chain periodic structure of the filter is a cylindrical double-chain periodic structure, the cylindrical body is a cylindrical unit, the angle between the radial direction of a double chain of the band elimination filter and incident terahertz polarization is a polarization angle gamma, the bandwidth of the band elimination filter is adjusted by adjusting the distance between the cylindrical units or the thickness of the filter, and the bandwidth is reduced by increasing the distance t between the cylindrical units or reducing the thickness H of the cylindrical units; the filter structure can be rapidly designed and has excellent device performance.
Description
Technical Field
The invention relates to the technical field of terahertz devices and metamaterials, in particular to a design and processing method of a terahertz band elimination filter based on a cylindrical double-chain structure.
Background
The invention relates to the field of terahertz devices and metamaterials, in particular to a design and processing method of a terahertz band-stop filter based on a cylindrical double-chain structure. The method has the characteristics of rapid design, excellent device performance and the like.
Disclosure of Invention
The invention provides a design and processing method of a terahertz band elimination filter based on a cylindrical double-chain structure, the filter structure can be rapidly designed, and the performance of a device is excellent.
The invention adopts the following technical scheme.
The terahertz band-stop filter based on the cylindrical double-chain structure is characterized in that the input end of the filter is a metal double-chain periodic structure with metal double chains arranged in parallel, the output end of the filter is a quartz substrate connected with the metal double-chain periodic structure, and the metal double-chain periodic structure comprises a cylindrical double chain formed by combining a plurality of metal cylindrical bodies which are regularly and closely arranged.
The band-elimination filter is a band-elimination filter, when a cylindrical double-chain periodic structure of the filter is a cylindrical double-chain periodic structure, the cylindrical body is a cylindrical unit, the angle between the radial direction of a double chain of the band-elimination filter and incident terahertz polarization is a polarization angle gamma, the bandwidth of the band-elimination filter is adjusted by adjusting the distance between the cylindrical units or the thickness of the filter, and the bandwidth is reduced by increasing the distance t between the cylindrical units or reducing the thickness H of the cylindrical units.
The effect of the angle of incidence a on the filter performance is negligible at the center frequency of the band-stop filter of 0.8 THz.
When the filter is used as an attenuator, the transmittance is adjusted by changing the polarization angle γ.
The design method of the terahertz band-stop filter based on the cylindrical double-chain structure comprises the following steps of;
s1, defining a filter structure as a cylindrical double-chain periodic structure, and setting central frequency and bandwidth performance indexes required by the filter;
s2, simulating double-chain spacing H, a polarization angle gamma, a cylindrical unit thickness H and a spacing t between cylindrical units of the cylindrical double-chain periodic structure by using FDTD, and analyzing the influence of the parameters on a transmission spectrum;
and S3, determining various parameters of the filter according to the analysis result in the step S2.
A method for processing a terahertz band elimination filter based on a cylindrical double-chain structure utilizes femtosecond laser two-photon polymerization combined with a photoetching process to process and prepare the terahertz band elimination filter, and comprises the following steps;
a1, taking quartz glass as a substrate for processing a filter sample, cleaning and drying the quartz substrate in an ultrasonic cleaning machine, putting the substrate into a spin coater, and uniformly coating a primer and a photoresist on the substrate;
step A2, exposing the cylindrical outer area of the substrate surface point by a femtosecond laser two-photon polymerization process;
and step A3, performing gold evaporation plating on the workpiece treated in the step A2 by using a coating machine, finally immersing the workpiece into a degumming solution for degumming, and removing metal in an exposure area in a two-photon polymerization exposure process to obtain the finished filter workpiece.
The quartz glass is a quartz glass sheet with the diameter of 15 mm and the thickness of 50 mu m.
The filter workpiece manufactured in the step A3 has device parameters of radius r =25 μm, pitch h =350 μm, and cell pitch t =5 μm.
Compared with the prior art, the invention has the following advantages:
1. the band-stop filter based on the cylindrical double-chain structure can directly counteract the influence caused by electric field polarization, overcomes the defects of large bandwidth and large influence by incident angles of the traditional filter, and has more adjustable parameters and better performance compared with the traditional metal patch type band-stop filter.
2. By rotating the angle between the double-chain radial direction of the band stop filter and the incident terahertz polarization (polarization angle γ), the transmittance at the center frequency can be adjusted. Therefore, the device can also be used as a terahertz attenuator. The filter design based on the double-chain structure has the characteristics of a patch type band-stop frequency selection surface and a wire grid type polaroid, and is a multifunctional device.
Drawings
The invention is described in further detail below with reference to the following figures and detailed description:
FIG. 1a is a schematic structural diagram of a filter according to the present invention (wherein a rectangle 1-is a quartz substrate and a cylinder 2-is a metal double-stranded structure);
FIG. 1b is a front view of the filter of the present invention (the double-stranded structure extends periodically in the horizontal and vertical directions, wherein h is the double-stranded spacing, i.e., the distance between two adjacent parallel metal double-stranded periodic structures, and t is the unit spacing, i.e., the distance between adjacent cylinders);
FIG. 1c is a schematic diagram of the working filter of the present invention (the upper half is a cylindrical double-chain structure, and the lower half is a quartz substrate, where H is the height of the cylindrical unit structure, and S is the thickness of the quartz substrate);
FIG. 2 is a schematic diagram of a transmission curve of a terahertz band-stop filter based on a cylindrical double-chain structure in the embodiment of the invention under the conditions of different incident angles alpha, different polarization angles gamma, different thicknesses H and different unit spacings t;
FIG. 3 is a microscopic schematic diagram of a sample of a terahertz band-stop filter based on a cylindrical double-chain structure in an embodiment of the method;
in the figure: 1-a quartz substrate; 2-column double-stranded periodic structure.
Detailed Description
As shown in the figure, the terahertz band-stop filter based on the cylindrical double-chain structure is characterized in that the input end of the filter is a metal double-chain periodic structure with metal double chains arranged in parallel, the output end of the filter is a quartz substrate connected with the metal double-chain periodic structure, and the metal double-chain periodic structure comprises a cylindrical double chain formed by combining a plurality of metal cylindrical bodies which are regularly and closely arranged.
The band-elimination filter is a band-elimination filter, when a cylindrical double-chain periodic structure of the filter is a cylindrical double-chain periodic structure, the cylindrical body is a cylindrical unit, the angle between the radial direction of a double chain of the band-elimination filter and incident terahertz polarization is a polarization angle gamma, the bandwidth of the band-elimination filter is adjusted by adjusting the distance between the cylindrical units or the thickness of the filter, and the bandwidth is reduced by increasing the distance t between the cylindrical units or reducing the thickness H of the cylindrical units.
The design method of the terahertz band-stop filter based on the cylindrical double-chain structure comprises the following steps of;
s1, defining a filter structure as a cylindrical double-chain periodic structure, and setting central frequency and bandwidth performance indexes required by the filter;
s2, simulating double-chain spacing H, a polarization angle gamma, the thickness H of the cylindrical units and the spacing t between the cylindrical units of the cylindrical double-chain periodic structure by using FDTD, and analyzing the influence of the parameters on a transmission spectrum;
and S3, determining various parameters of the filter according to the analysis result in the step S2.
The processing method of the terahertz band-stop filter based on the cylindrical double-chain structure utilizes femtosecond laser two-photon polymerization combined with a photoetching process to process and prepare the terahertz band-stop filter, and comprises the following steps;
step A1, taking quartz glass as a substrate for processing a filter sample, cleaning and drying the quartz substrate in an ultrasonic cleaner, putting the substrate into a spin coater, and uniformly coating a primer and a photoresist on the substrate;
step A2, exposing the cylindrical outer area of the substrate surface point by a femtosecond laser two-photon polymerization process;
and step A3, performing gold evaporation plating on the workpiece treated in the step A2 by using a coating machine, finally immersing the workpiece into a degumming solution for degumming, and removing metal in an exposure area in a two-photon polymerization exposure process to obtain the finished filter workpiece.
The quartz glass is a quartz glass sheet with the diameter of 15 mm and the thickness of 50 mu m.
The filter workpiece manufactured in the step A3 has device parameters of radius r =25 μm, pitch h =350 μm, and cell pitch t =5 μm.
Example (b):
as shown in fig. 2, the performance of the band-stop filter with a center frequency of 0.8 THz is not substantially affected by the incident angle α; with the increase of the polarization angle gamma, the center frequency is unchanged, the transmissivity is reduced, and the optical fiber can be used as an attenuator; the filtering bandwidth is correspondingly reduced along with the reduction of the thickness H, and meanwhile, the center frequency moves to high frequency; as the cell pitch t is increased step by step, the bandwidth is significantly reduced while the center frequency position is shifted to the right.
In this case, the bandwidth of the band-stop filter can be effectively adjusted by adjusting the distance between the cylindrical units, which is an advantage that the conventional patch-type frequency selective surface filter does not have.
As shown in fig. 3, when preparing a sample, firstly, a quartz substrate is cleaned and dried in an ultrasonic cleaning machine, the substrate is put into a spin coater to be uniformly coated with a primer and a photoresist, after drying, the outer area of a cylinder is exposed point by femtosecond laser two-photon polymerization, then, a coating machine is used for carrying out gold evaporation on the sample, finally, the sample is immersed in a degumming solution to carry out degumming, and metal of the two-photon polymerization exposure part is removed, so that the processed sample is obtained. The parameters of the device are radius r =25 μm, pitch h =350 μm, cell pitch t =5 μm.
FIG. 3 (a) is a micrograph under a metallographic microscope of 5 times after exposure to two-photon polymerization, and (b) is a micrograph under a metallographic microscope of 5 times after plating of a sample.
In this example, the input end of the filter is a column-shaped double-chain periodic structure with parallel metal double chains; when the cylindrical double-chain periodic structure of the filter is a spherical double-chain structure, the cylindrical body is a quasi-spherical structure; when the cylindrical double-chain periodic structure of the filter is a square double-chain structure, the cylindrical body is a rectangular cylinder.
The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made in accordance with the claims of the present invention should be covered by the present invention.
Claims (7)
1. The terahertz band elimination filter based on the cylindrical double-chain structure is characterized in that: the input end of the filter is a metal double-chain periodic structure with metal double chains arranged in parallel, the output end of the filter is a quartz substrate connected with the metal double-chain periodic structure, and the metal double-chain periodic structure comprises a column-shaped double chain formed by combining a plurality of metal column bodies which are regularly and closely arranged.
2. The terahertz band-stop filter based on the cylindrical double-chain structure as claimed in claim 1, characterized in that: the band elimination filter is a band elimination filter, when a cylindrical double-chain periodic structure of the filter is a cylindrical double-chain periodic structure, the cylindrical body is a cylindrical unit, the angle between the double-chain radial direction of the band elimination filter and incident terahertz polarization is a polarization angle gamma, the bandwidth of the band elimination filter is adjusted by adjusting the distance between the cylindrical units or the thickness of the filter, and the bandwidth is reduced by increasing the distance t between the cylindrical units or reducing the thickness H of the cylindrical units.
3. The terahertz band-stop filter based on the cylindrical double-chain structure as claimed in claim 2, characterized in that: the incidence angle a has a negligible effect on the filter performance.
4. The terahertz band-stop filter based on the cylindrical double-chain structure as claimed in claim 2, characterized in that: when the filter is used as an attenuator, the transmittance is adjusted by changing the polarization angle γ.
5. The design method of the terahertz band elimination filter based on the cylindrical double-chain structure is characterized by comprising the following steps of: the design method comprises the following steps;
s1, defining a filter structure as a cylindrical double-chain periodic structure, and setting central frequency and bandwidth performance indexes required by the filter;
s2, simulating double-chain spacing H, a polarization angle gamma, a cylindrical unit thickness H and a spacing t between cylindrical units of the cylindrical double-chain periodic structure by using FDTD, and analyzing the influence of the parameters on a transmission spectrum;
and S3, determining various parameters of the filter according to the analysis result in the step S2.
6. The processing method of the terahertz band-stop filter based on the cylindrical double-chain structure is characterized by comprising the following steps of: the method for manufacturing the terahertz band elimination filter by combining femtosecond laser two-photon polymerization with photoetching process comprises the following steps;
a1, taking quartz glass as a substrate for processing a filter sample, cleaning and drying the quartz substrate in an ultrasonic cleaning machine, putting the substrate into a spin coater, and uniformly coating a primer and a photoresist on the substrate;
step A2, exposing the cylindrical outer area of the substrate surface point by a femtosecond laser two-photon polymerization process;
and step A3, performing gold evaporation plating on the workpiece treated in the step A2 by using a coating machine, finally immersing the workpiece into a degumming solution for degumming, and removing metal in an exposure area in a two-photon polymerization exposure process to obtain the finished filter workpiece.
7. The processing method of the terahertz band-stop filter based on the cylindrical double-chain structure is characterized in that: the quartz glass is a quartz glass sheet with the diameter of 15 mm and the thickness of 50 mu m;
the filter workpiece manufactured in the step A3 has device parameters of radius r =25 μm, pitch h =350 μm, and cell pitch t =5 μm.
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| CN202211637453.6A CN115799782A (en) | 2022-12-20 | 2022-12-20 | Design and processing method of terahertz band-stop filter based on cylindrical double-chain structure |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100053538A1 (en) * | 2008-08-27 | 2010-03-04 | Ru-Pin Chao | Structure of polarizing terahertz wave device |
| CN110187419A (en) * | 2019-06-03 | 2019-08-30 | 华南师范大学 | A kind of visible light broadband perfection absorber surpassing surface based on semiconductor |
| US20200116912A1 (en) * | 2018-10-12 | 2020-04-16 | Gary Sharp Innovations, Llc | Polarization-based filters with angle-sensitive transmission |
| CN112099247A (en) * | 2020-09-15 | 2020-12-18 | 浙江工贸职业技术学院 | Light-operated dual-wavelength terahertz wave narrow-band filter based on azobenzene-doped liquid crystal material and filtering method thereof |
| CN112968293A (en) * | 2021-03-16 | 2021-06-15 | 山东大学 | Terahertz device based on enhanced abnormal optical transmission and preparation method thereof |
-
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- 2022-12-20 CN CN202211637453.6A patent/CN115799782A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100053538A1 (en) * | 2008-08-27 | 2010-03-04 | Ru-Pin Chao | Structure of polarizing terahertz wave device |
| US20200116912A1 (en) * | 2018-10-12 | 2020-04-16 | Gary Sharp Innovations, Llc | Polarization-based filters with angle-sensitive transmission |
| CN110187419A (en) * | 2019-06-03 | 2019-08-30 | 华南师范大学 | A kind of visible light broadband perfection absorber surpassing surface based on semiconductor |
| CN112099247A (en) * | 2020-09-15 | 2020-12-18 | 浙江工贸职业技术学院 | Light-operated dual-wavelength terahertz wave narrow-band filter based on azobenzene-doped liquid crystal material and filtering method thereof |
| CN112968293A (en) * | 2021-03-16 | 2021-06-15 | 山东大学 | Terahertz device based on enhanced abnormal optical transmission and preparation method thereof |
Non-Patent Citations (2)
| Title |
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