CN207165724U - Tunable bandstop filter based on metal ring structure - Google Patents
Tunable bandstop filter based on metal ring structure Download PDFInfo
- Publication number
- CN207165724U CN207165724U CN201721124179.7U CN201721124179U CN207165724U CN 207165724 U CN207165724 U CN 207165724U CN 201721124179 U CN201721124179 U CN 201721124179U CN 207165724 U CN207165724 U CN 207165724U
- Authority
- CN
- China
- Prior art keywords
- filter
- round metal
- ring structure
- metal circular
- metal ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
It the utility model is related to the tunable bandstop filter based on metal ring structure, including substrate, more than one cylindrical filter unit is vertically installed with the plate face of substrate, each filter unit includes a filter structure or more than two filter structures, each filter structure includes two round metal circular layers and the hollow dielectric cylinder being arranged between two round metal circular layers, the dimension of inner and outer diameters of each round metal circular layer and the dimension of inner and outer diameters correspondent equal of hollow dielectric cylinder.It is overall to add filter unit to form using substrate, it is simple in construction, round metal circular layer is identical with the inside/outside diameter size of both hollow dielectric cylinders, filter unit is set to be highly convenient for processing, wave filter integrally also allows for processing, and the filter unit of cylinder has most ideal symmetrical so that wave filter can produce same effect under the Electromagnetic Field in different polarization direction, electromagnetic wave can be irradiated in the structure with any angle, can play identical filter effect.
Description
Technical field
It the utility model is related to filter field, and in particular to the tunable bandstop filter based on metal ring structure.
Background technology
Meta Materials（Metamaterial）, also known as metamaterials are the minute cells of manual construction according to certain rule
The artificial advanced composite material (ACM) formed is arranged, the material possesses the special nature not available for natural material, the property of Meta Materials
Matter depends not only on the intrinsic property of physical chemistry of constituent material, is more dependent upon response of its construction unit for ripple.It is super
Material is that one of study hotspot of international academic community, the research for Meta Materials get more and more people's extensive concerning nearly ten years.It is super
The origin of material will trace back to research of people's early 20th century to " LHM ", " LHM " refer to effective dielectric constant and
Effective permeability is simultaneously the material of negative value.In 2000, American scientist David R.Smith et al. were in microwave band
Once realize material with negative refractive index.In recent years, the device of numerous regulation and control electromagnetic waves has been developed, it is stealthy such as artificial magnetic material
Clothing, super lenses, perfect absorbing material etc..People also push the working frequency of Meta Materials to：Terahertz, near-infrared, it is seen that light wave
Section.
Wave filter is the device filtered to ripple, and extremely important effect is all played in fields such as optics, communications.Filter
Ripple device can be divided into bandstop filter, bandpass filter, high-pass filter, low pass filter by institute's passband.Bandstop filter is
The ripple of only a certain band frequency or wavelength can not be by the way that bandpass filter is that the ripple of only a certain band frequency or wavelength can lead to
Cross, high-pass filter refers to that the signal for being higher than the frequency critical value of setting can be by the way that low pass filter is then less than setting and faced
The signal of dividing value can pass through.Based on the wave filter of Meta Materials due to responding resonance characteristics, bandwidth always relative narrower, this is significantly
Limiting needs some applications of more broad stopband.
At present, Liu Na in 2007 et al. exists《Plasmon Hybridization in Stacked Cut‐Wire
Metamaterials》In propose the tunable bandstop filter based on metal ring structure, the bottom of the wave filter be by from
Under to be above followed successively by glass substrate, golden membranous layer, magnesium fluoride composition three-decker, be placed above in magnesium fluoride multiple trapezoidal
The unit of 3-D solid structure and array arrangement, the 3-D solid structure be by be sequentially arranged from bottom to up lower floor's golden film, fluorine
Change magnesium, the composite construction of upper strata golden film composition, the size of upper strata golden film is smaller than the size of lower floor golden film, the bottom of three-decker
Cause its complicated, the 3-D solid structure has the characteristics of small bottom surface of top surface is big, causes relative difficulty in the preparation, and
The direction of incident electromagnetic wave is not accounted for, causes the filter effect of said structure can not good meet demand.
The content of the invention
The purpose of this utility model is to provide a kind of simple in construction, easy to process and good wave filtering effect based on metal ring
The tunable bandstop filter of structure.
To achieve the above object, the tunable bandstop filter of the present utility model based on metal ring structure is using as follows
Technical scheme：Tunable bandstop filter based on metal ring structure, including substrate, one is vertically installed with the plate face of substrate
Cylindrical filter unit more than individual, each filter unit include a filter structure or including along perpendicular to the plate faces
Direction is disposed with more than two filter structures, and each filter structure includes spaced two round metal circular layers and set
The hollow dielectric cylinder being placed between two round metal circular layers, the dimension of inner and outer diameters of each round metal circular layer are situated between with hollow electricity
The dimension of inner and outer diameters correspondent equal of matter cylinder.
The round metal circular layer is silver-colored material.
The hollow dielectric cylinder is silica material.
The inside radius of the round metal circular layer is 40-80nm, and the outer radius of round metal circular layer is 90-120nm, metal ring
The height of layer is 30-80nm, and the height of hollow dielectric cylinder is less than or equal to 220nm.
The inside radius of the round metal circular layer is 60nm, outer radius 100nm.
The height of the round metal circular layer is 40nm.
The height of the hollow dielectric cylinder is 145nm.
Each filter unit includes two filter structures, and a round metal circular layer is shared between two filter structures.
Each filter unit includes three filter structures, and adjacent two filter structures share a metal ring
Layer.
The beneficial effects of the utility model：The bandstop filter includes substrate, is vertically installed with substrate more than one
Filter unit, filter unit include one or more filter structure, each filter structure in cylinder, each filter unit
Include upper and lower spaced two round metal circular layers and a middle hollow dielectric cylinder, it is overall to be added using substrate
Filter unit forms, simple in construction；Round metal circular layer is identical with the inside/outside diameter size of both hollow dielectric cylinders, makes filtering
Unit is highly convenient for processing, and wave filter integrally also allows for processing；And by adjusting round metal circular layer and hollow dielectric cylinder
The parameter of body produces different spectral responses to promote the plasma between each round metal circular layer that interaction occurs, and realizes
Filter effect, different filtering bandwidths can be realized by the quantity and parameters for the filter structure for changing each filter unit
There is most ideal symmetrical with the filter unit of different response frequencies, and cylinder so that wave filter can be different inclined
Shake direction Electromagnetic Field under produce same effect, electromagnetic wave can be irradiated in the structure with any angle, can play phase
Same filter effect.
Brief description of the drawings
Fig. 1 is that the structure of the embodiment one of the tunable bandstop filter of the present utility model based on metal ring structure is shown
It is intended to；
Fig. 2 is the wavelength and transmissivity graph of a relation of the tunable bandstop filter in Fig. 1；
Fig. 3 is with hollow dielectric cylinder height h change, the change of the transmitted spectrum of tunable bandstop filter
Curve map；
Fig. 4 is that the structure of the embodiment two of the tunable bandstop filter of the present utility model based on metal ring structure is shown
It is intended to；
Fig. 5 is the wavelength and transmissivity graph of a relation of the tunable bandstop filter in Fig. 4；
Fig. 6 is that the structure of the embodiment three of the tunable bandstop filter of the present utility model based on metal ring structure is shown
It is intended to；
Fig. 7 is the wavelength and transmissivity graph of a relation of the tunable bandstop filter in Fig. 6.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, every other embodiment that those of ordinary skill in the art are obtained all belongs to
In the scope of the utility model protection.
Tunable bandstop filter embodiment one of the present utility model based on metal ring structure：As shown in Figure 1-Figure 3,
Substrate 1 including quartz material, multiple filter units 2 in hollow cylindrical structure are vertically installed with the upper face of substrate 1,
Each filter unit 2 includes being disposed with three filter structures 3 from the bottom to top, and three filter structures 3 are respectively from the bottom to top
First filter structure, the second filter structure and the 3rd filter structure.
Each filter unit 2 include being set in turn in from the bottom to top the first round metal circular layer 4 on the upper face of substrate 1,
First hollow dielectric cylinder 5, the second round metal circular layer 6, the second hollow dielectric cylinder 7, the 3rd round metal circular layer 8,
The 3rd hollow round metal circular layer 10 of dielectric cylinder 9 and the 4th.First round metal circular layer 4, the first hollow dielectric cylinder 5
The first filter structure, the second round metal circular layer 6, the second hollow dielectric cylinder 7 and the 3rd are formed with the second round metal circular layer 6
Round metal circular layer 8 forms the second filter structure, the 3rd round metal circular layer 8, the 3rd hollow round metal of dielectric cylinder 9 and the 4th
Circular layer 10 forms the 3rd filter structure, i.e., two filter structures 3 of neighbouring setting share a round metal circular layer.First gold medal
Belong to annulus layer 4, the first hollow dielectric cylinder 5, the second round metal circular layer 6, the second hollow dielectric cylinder 7, the 3rd gold medal
Belong to annulus layer 8, the dimension of inner and outer diameters all same of the 3rd hollow round metal circular layer 10 of dielectric cylinder 9 and the 4th.
Each round metal circular layer is ag material, and each hollow dielectric cylinder is earth silicon material.Round metal circular layer
Inside radius be 60nm, outer radius 100nm, the height of round metal circular layer is 40nm, and the height of hollow dielectric cylinder is
145nm.The quantity of the filter structure 3 of a filter unit is three in the present embodiment, has 4 transmission minimum values.Tunable band
The wavelength and transmissivity graph of a relation of wave filter are hindered, as shown in Figure 2.Fig. 3 be with hollow dielectric cylinder height h change,
The change curve of the transmitted spectrum of tunable bandstop filter, give in Fig. 3 adjustable when h is 50nm, 100nm and 200nm
The wavelength of humorous bandstop filter and the graph of a relation of transmissivity.
The preparation process of tunable bandstop filter of the present utility model based on metal ring structure comprises the following steps：
Step 1）, first prepare metal ring and be then based on metal ring and prepare hollow dielectric cylinder；
Step 2）, cleaning material is quartzy substrate：First substrate is surface-treated, then carry out prebake conditions remove by
In the vapor that surface treatment is brought；
Step 3）, spin coating：Spin coating will pass through drop glue, low speed rotation, rotate several steps at a high speed, from spraying
Gluing method；
Step 4）, exposure：Photoresist is exposed in the presence of mask plate；
Step 5）, development：Photoresist after exposure is developed with developer solution photoresist selected using developer solution
Property corrosion process；
Step 6）, ion implanting：To there is the photoresist of certain structure to carry out ion implanting after development；
Step 7), repeat step 3；
Step 8), repeat step 4, the mask plate of the step are identical with the mask plate of step 3；
Step 9), repeat step 5；
Step 10), to step 9）Have afterwards in the photoresist of certain structure and inject silica；
Step 11), ion beam etching is carried out to silica solid and obtains hollow cylinder；
Repeat the above steps, finally wash away photoresist and can be obtained by corresponding structure, shown in Fig. 1.
The embodiment two of tunable bandstop filter of the present utility model based on metal ring structure, as illustrated in figures 4-5,
Difference with embodiment one is that the quantity of the filter structure 3 of each filter unit is two, and now each filter unit is included under
Supreme the first round metal circular layer 4, the first hollow dielectric cylinder 5, the second round metal circular layer 6, second that are sequentially arranged are hollow
The round metal circular layer 8 of dielectric cylinder 7 and the 3rd, setting up and down two filter structures 3 share a round metal circular layer, now
Minimum values are transmitted with 2, now the wavelength of tunable bandstop filter and transmissivity graph of a relation, as shown in Figure 5.
The embodiment three of tunable bandstop filter of the present utility model based on metal ring structure, as shown in fig. 6-7,
Difference with embodiment one is that the quantity of the filter structure 3 of each filter unit is one, and now each filter unit is included under
Supreme the first round metal circular layer 4, the first hollow round metal circular layer 6 of dielectric cylinder 5 and second being sequentially arranged, now has
2 transmit minimum values, now the wavelength of tunable bandstop filter and transmittance graph figure, as shown in Figure 7.
The example IV of tunable bandstop filter of the present utility model based on metal ring structure, with embodiment one
Difference is that the inside radius of round metal circular layer is 40nm, it is ensured that the inside and outside footpath of round metal circular layer and hollow dielectric cylinder
Inside and outside footpath correspondent equal, and each round metal circular layer size is identical, and the size of each hollow dielectric cylinder is identical.
The embodiment five of tunable bandstop filter of the present utility model based on metal ring structure, with embodiment one
Difference is that the inside radius of round metal circular layer is 80nm, it is ensured that the inside and outside footpath of round metal circular layer and hollow dielectric cylinder
Inside and outside footpath correspondent equal, and each round metal circular layer size is identical, and the size of each hollow dielectric cylinder is identical.
The embodiment six of tunable bandstop filter of the present utility model based on metal ring structure, with embodiment one
Difference is that the outer radius of round metal circular layer is 90nm, it is ensured that the inside and outside footpath of round metal circular layer and hollow dielectric cylinder
Inside and outside footpath correspondent equal, and each round metal circular layer size is identical, and the size of each hollow dielectric cylinder is identical.
The embodiment seven of tunable bandstop filter of the present utility model based on metal ring structure, with embodiment one
Difference is that the outer radius of round metal circular layer is 120nm, it is ensured that the inside and outside footpath of round metal circular layer and hollow dielectric cylinder
The inside and outside footpath correspondent equal of body, and each round metal circular layer size is identical, the size of each hollow dielectric cylinder is identical.
The embodiment eight of tunable bandstop filter of the present utility model based on metal ring structure, with embodiment one
Difference is that the height of round metal circular layer is 30nm, it is ensured that the inside and outside footpath of round metal circular layer and hollow dielectric cylinder
Inside and outside footpath correspondent equal, and each round metal circular layer size is identical, the size of each hollow dielectric cylinder is identical.
The embodiment nine of tunable bandstop filter of the present utility model based on metal ring structure, with embodiment one
Difference is that the height of round metal circular layer is 80nm, it is ensured that the inside and outside footpath of round metal circular layer and hollow dielectric cylinder
Inside and outside footpath correspondent equal, and each round metal circular layer size is identical, the size of each hollow dielectric cylinder is identical.
The embodiment ten of tunable bandstop filter of the present utility model based on metal ring structure, with embodiment one
Difference is that the height of hollow dielectric cylinder is 220nm, it is ensured that the inside and outside footpath of round metal circular layer and hollow dielectric
The inside and outside footpath correspondent equal of cylinder, and each round metal circular layer size is identical, the size of each hollow dielectric cylinder is identical.
Claims (9)
1. the tunable bandstop filter based on metal ring structure, including substrate, it is characterised in that：It is vertical in the plate face of substrate
Be provided with more than one cylindrical filter unit, each filter unit include a filter structure or including along perpendicular to
The board direction is disposed with more than two filter structures, and each filter structure includes spaced two round metals
Circular layer and the hollow dielectric cylinder being arranged between two round metal circular layers, the dimension of inner and outer diameters of each round metal circular layer with
The dimension of inner and outer diameters correspondent equal of hollow dielectric cylinder.
2. the tunable bandstop filter according to claim 1 based on metal ring structure, it is characterised in that：The gold
It is silver-colored material to belong to annulus layer.
3. the tunable bandstop filter according to claim 1 based on metal ring structure, it is characterised in that：In described
Empty dielectric cylinder is silica material.
4. the tunable bandstop filter according to claim 1 based on metal ring structure, it is characterised in that：The gold
The inside radius for belonging to annulus layer is 40-80nm, and the outer radius of round metal circular layer is 90-120nm, and the height of round metal circular layer is 30-
80nm, the height of hollow dielectric cylinder are less than or equal to 220nm.
5. the tunable bandstop filter according to claim 4 based on metal ring structure, it is characterised in that：The gold
The inside radius for belonging to annulus layer is 60nm, outer radius 100nm.
6. the tunable bandstop filter according to claim 4 based on metal ring structure, it is characterised in that：The gold
The height for belonging to annulus layer is 40nm.
7. the tunable bandstop filter according to claim 4 based on metal ring structure, it is characterised in that：In described
The height of empty dielectric cylinder is 145nm.
8. the tunable bandstop filter based on metal ring structure according to any one of claim 1-7, its feature
It is：Each filter unit includes two filter structures, and a round metal circular layer is shared between two filter structures.
9. the tunable bandstop filter based on metal ring structure according to any one of claim 1-7, its feature
It is：Each filter unit includes three filter structures, and adjacent two filter structures share a round metal circular layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721124179.7U CN207165724U (en) | 2017-09-04 | 2017-09-04 | Tunable bandstop filter based on metal ring structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721124179.7U CN207165724U (en) | 2017-09-04 | 2017-09-04 | Tunable bandstop filter based on metal ring structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207165724U true CN207165724U (en) | 2018-03-30 |
Family
ID=61720194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721124179.7U Expired - Fee Related CN207165724U (en) | 2017-09-04 | 2017-09-04 | Tunable bandstop filter based on metal ring structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207165724U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108879040A (en) * | 2017-09-04 | 2018-11-23 | 郑州大学 | A kind of tunable bandstop filter based on metal ring structure |
-
2017
- 2017-09-04 CN CN201721124179.7U patent/CN207165724U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108879040A (en) * | 2017-09-04 | 2018-11-23 | 郑州大学 | A kind of tunable bandstop filter based on metal ring structure |
| CN108879040B (en) * | 2017-09-04 | 2019-06-25 | 郑州大学 | A kind of tunable bandstop filter based on metal ring structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104656170B (en) | A kind of broadband light hypersorption device and preparation method thereof | |
| CN107219723B (en) | Manufacturing method of metal grating, metal grating and display device | |
| CN110346854A (en) | A kind of ultra-narrow multi-band tunable perfection absorber unrelated with polarization | |
| CN102981205B (en) | Sub-wavelength rectangular ring array quarter wave plate and fabrication method thereof | |
| CN114089539B (en) | Double-perfect vortex beam super-surface design method based on composite phase regulation | |
| CN106410422A (en) | 3-bit transmission type electromagnetic code metamaterial applied in terahertz band | |
| CN102692733B (en) | Multimodal cross polarization filter based on metamaterials | |
| CN106950631A (en) | A kind of infrared wave-absorbing body and preparation method based on medium micro-pillar array | |
| CN107121715A (en) | A kind of super surface perfect absorbeperfect absorber of large-area wide incidence angle based on coupling Michaelis resonance and preparation method thereof | |
| CN207165724U (en) | Tunable bandstop filter based on metal ring structure | |
| CN103954363B (en) | A kind of circularly polarized light detector and manufacture method thereof | |
| CN103645536A (en) | All-solid LMA (large mode area) photonic band gap optical fiber | |
| CN108879040B (en) | A kind of tunable bandstop filter based on metal ring structure | |
| CN205752470U (en) | Compound Terahertz band filter based on frequency-selective surfaces | |
| Liu et al. | Monochromatic filter with multiple manipulation approaches by the layered all-dielectric patch array | |
| DE202011003479U1 (en) | Structured silicon layer for an optoelectronic component and optoelectronic component | |
| CN113078479A (en) | Composite silicon hemisphere/graphene based broadband terahertz metamaterial absorber | |
| CN105866868A (en) | Broadband micro nano two-dimensional multitooth grating trap filter | |
| CN109841959A (en) | Controllable FSS structure of a kind of photoelectricity based on photo-conductive film and preparation method thereof | |
| CN108415116A (en) | A kind of strong three folding hole nano thin-film of single layer and preparation method thereof for absorbing circular dichroism | |
| CN203849440U (en) | Near-infrared 3D detection filter | |
| CN103739206A (en) | Broadband multi-layer anti-reflection film and preparation method thereof | |
| CN102645694B (en) | Doped-layer-free photonic crystal optical fiber with filtering range of 540-760 nm and manufacturing method thereof | |
| CN110426772A (en) | A kind of photon crystal heterojunction structure of achievable elliptically polarized light one-way transmission | |
| CN113359220B (en) | Spectral filter based on three-dimensional annular structure and application |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180330 Termination date: 20180904 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |