CN115741390B - Silicon carbide crystal shaping all-in-one - Google Patents
Silicon carbide crystal shaping all-in-one Download PDFInfo
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- CN115741390B CN115741390B CN202211476261.1A CN202211476261A CN115741390B CN 115741390 B CN115741390 B CN 115741390B CN 202211476261 A CN202211476261 A CN 202211476261A CN 115741390 B CN115741390 B CN 115741390B
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Abstract
The invention relates to the field of silicon carbide crystal processing, in particular to a silicon carbide crystal shaping integrated machine, which comprises a workbench and a turntable station arranged on the workbench, wherein the workbench is provided with a feeding station, a first polishing station, a turnover station, a second polishing station, a side edge polishing station, a grooving station, a blanking station and a detection station; and the whole processing process is streamlined, and the processing efficiency is greatly improved.
Description
Technical Field
The invention relates to the field of silicon carbide crystal processing, in particular to a silicon carbide crystal shaping integrated machine.
Background
The silicon carbide crystal is a third-generation wide band gap semiconductor material, has excellent properties of high thermal conductivity, high breakdown voltage, extremely high carrier mobility, high chemical stability and the like, can be manufactured into high-frequency and high-power electronic devices and optoelectronic devices working under high-temperature and strong radiation conditions, has great application value in the fields of national defense, high technology, industrial production, power supply and power transformation, and is regarded as the third-generation wide band gap semiconductor material with great development prospect.
The silicon carbide crystal needs to be polished and shaped before being processed into a chip, most of the existing grinding machines are single-station grinding machines, so that the silicon carbide crystal is troublesome to assemble when being processed, a workpiece is taken down after the surface is processed after the silicon carbide crystal is assembled, the workpiece is assembled to another grinding machine for finish machining of the excircle and the notch groove of the crystal, the processing efficiency is low, and the crystal is easy to crack during processing.
Disclosure of Invention
Based on the above, it is necessary to provide a silicon carbide crystal shaping integrated machine for solving the problems of the prior art.
In order to solve the problems in the prior art, the invention adopts the following technical scheme:
the utility model provides a silicon carbide crystal plastic all-in-one, includes the workstation and sets up the carousel station on the workstation, is equipped with on the workstation along the circumferencial direction of carousel station and arranges in proper order material loading station, first station of polishing, upset station, second station of polishing, side reason station of polishing, grooving station, unloading station, detection station, be equipped with a plurality of no resistance sucking disc anchor clamps that are used for adsorbing fixed silicon carbide crystal along circumferencial direction evenly distributed on the carousel station, no resistance sucking disc anchor clamps are including a sealed exhaust subassembly that is used for controlling sucking disc suction, and material loading station includes a first exhaust mechanism that pushes down that is used for making sealed exhaust subassembly gassing, and upset station includes a second exhaust mechanism that pushes down the exhaust mechanism structure and function the same with first exhaust mechanism that pushes down, and the unloading station includes a third exhaust mechanism that pushes down the exhaust mechanism and the function the same with first exhaust mechanism that pushes down.
Further, each non-resistance sucking disc clamp also comprises:
the sucker mounting seats are movably arranged at the top of the turntable station, a plurality of limiting step holes are uniformly distributed at the top of the turntable station along the circumferential direction, and each sucker mounting seat is coaxially and movably arranged in the corresponding limiting step hole;
the sucker assembly is fixedly arranged at the top of the sucker mounting seat, and the top of the sucker assembly is adsorbed with the bottom surface of the silicon carbide crystal;
the transmission shaft is fixedly arranged at the bottom of the sucker mounting seat in a vertical state, and the top of the transmission shaft is fixedly connected with the bottom of the sucker mounting seat;
the first transmission gear is fixedly arranged at the bottom of the transmission shaft in a horizontal state.
Further, the suction cup assembly includes:
the adsorption disc is horizontally arranged at the top of the sucker mounting seat, and the bottom of the adsorption disc is in contact with the top of the sucker mounting seat;
the hollow exhaust shaft is vertically arranged at the center of the adsorption disc, a central avoidance hole which is vertically arranged is formed at the center of the sucker mounting seat, the top of the hollow exhaust shaft is abutted against the top of the adsorption disc, the bottom of the hollow exhaust shaft penetrates through the adsorption disc and is arranged at the central avoidance hole, and a deflation hole which is horizontally arranged is formed in the middle of the hollow exhaust shaft;
the fixing bolt is vertically arranged at the bottom of the sucker mounting seat, the bottom of the fixing bolt is abutted against the bottom of the sucker mounting seat, the upper end of the fixing bolt is arranged in the center avoiding hole and is screwed with the bottom of the hollow exhaust shaft, and a sealing ring which is horizontally arranged is arranged between the fixing bolt and the sucker mounting seat.
Further, the seal vent assembly includes:
the two limiting bosses are all arranged at the bottom of the sucker mounting seat in a rotating way in a vertical state, two symmetrical air passages are formed at the bottom of the sucker mounting seat, one end of each air passage is communicated with the central avoidance hole, the other end of each air passage is communicated with the outside through the bottom of the sucker mounting seat, a step mounting hole is formed at the bottom of each air passage, each limiting boss is arranged in a corresponding step mounting hole in a rotating way, and a guide exhaust hole which is arranged in a vertical state is formed in the middle of each limiting boss;
the two sealing rods are coaxially and movably arranged in the corresponding guide exhaust holes, the top of each sealing rod is provided with a sealing boss, the top of each sealing boss is provided with a first rubber coating layer, the top of the first rubber coating layer is abutted against the top of the step mounting hole,
the two sealing reset springs are movably sleeved at the upper ends of the corresponding sealing rods, the bottom of each sealing reset spring is abutted against the top of the corresponding limit boss, and the top of each sealing reset spring is abutted against the bottom of the corresponding sealing boss;
the lower pressing plate is horizontally fixed at the bottoms of the two sealing rods, and a transmission avoiding hole through which the transmission shaft can pass is formed in the middle of the lower pressing plate.
Further, the material loading station still includes feeding subassembly, biax moving mechanism, holds feed mechanism, and first exhaust mechanism that pushes down is including:
the extension seat is fixedly arranged at the top of the workbench in a vertical state, is arranged at the outer side of the turntable station, and is formed with a guide accommodating groove in a vertical state;
one side of the L-shaped extension rod is coaxially and movably arranged in the guide accommodating groove in a vertical state, and the other side of the L-shaped extension rod passes through the guide accommodating groove in a horizontal state and is abutted against the top of the lower pressing plate;
the extending reset spring is movably sleeved on one vertical side of the L-shaped extension rod in a vertical state, the top of the extending reset spring is in contact with the bottom of one horizontal side of the L-shaped extension rod, and the bottom of the extending reset spring is in contact with the bottom of the guide accommodating groove;
the anti-falling top cover is horizontally fixedly arranged at the top of the extension seat, and the bottom of the anti-falling top cover is in contact with the top of the L-shaped extension rod.
Further, the method comprises the steps of,
the pressing guide seat is fixedly arranged at the top of the workbench in a vertical state, and a guide chute arranged in a vertical state is formed at the top of the pressing guide seat;
the lower sliding rod is movably arranged in the guide chute in a vertical state, the upper end of the lower sliding rod is provided with a mounting column in a vertical state, and the side wall of the mounting column is provided with a side guide hole in a horizontal state;
the lower return spring is movably sleeved at the lower end of the lower slide bar in a vertical state, the top of the lower return spring is in contact with the bottom of the mounting column, and the bottom of the lower return spring is in contact with the bottom of the guide chute;
the elastic compression bar is movably arranged at the top of the L-shaped extension bar in a horizontal state, an arc-shaped guide surface is formed at the top of one end of the elastic compression bar, which is close to the L-shaped extension bar, a guide post which is arranged in a horizontal state is formed at one end of the elastic compression bar, which is far away from the L-shaped extension bar, and the guide post coaxially penetrates through the side guide hole to be output in a direction far away from the L-shaped extension bar;
the side return spring is movably sleeved on the guide post, one end of the side return spring is in contact with the elastic compression rod, and the other end of the side return spring is in contact with the downward-pressing sliding rod;
the upper sliding block is fixedly arranged at one end of the guide post penetrating through the downward pressing sliding rod in a vertical state, and a downward pressing inclined surface is formed at one side of the bottom of the upper sliding block, which is close to the downward pressing guide seat;
the lower wedge block is fixedly arranged at one side of the lower guide post far away from the L-shaped extension rod in a vertical state, and a groove matched with the lower inclined surface is formed at the top of the lower wedge block;
the jacking rod is fixedly arranged at the top of the downward pressing sliding rod in a horizontal state;
the lower pressure bar is fixedly arranged on the holding feeding mechanism in a horizontal state, and can be abutted against the top of the jacking rod along with the descending of the holding feeding mechanism.
Further, the overturning station comprises a single-shaft lifting mechanism and a clamping overturning mechanism, wherein one ends, contacted with the silicon carbide crystal, of two clamping jaws of the clamping overturning mechanism are respectively provided with a second rubber coating layer.
Further, the skirt sharpening station includes a skirt sharpening mechanism, further including:
the rotary motor is fixedly arranged at the bottom of the workbench in a vertical state, and the output end of the rotary motor passes through the workbench in a vertical state and is output upwards;
the second transmission gear is horizontally fixed at the top of the output end of the rotating motor and can be meshed with the first transmission gear.
Compared with the prior art, the invention has the following beneficial effects:
firstly, the silicon carbide crystal shaping integrated machine adsorbs the silicon carbide crystal through the non-resistance sucking disc clamp, so that the silicon carbide crystal is extremely small in stress and not easy to damage when being placed and taken away;
secondly, the silicon carbide crystal shaping integrated machine provided by the invention enables the whole processing process to be pipelined through the turntable station, and the processing efficiency is greatly improved.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a top view of the present invention;
FIG. 3 is a schematic perspective view of a non-resistance suction cup clamp according to the present invention;
FIG. 4 is a schematic perspective view of a first downward pressure exhaust mechanism according to the present invention;
FIG. 5 is an exploded view of the non-resistance suction cup clamp of the present invention;
FIG. 6 is an exploded view of a first hold-down vent mechanism of the present invention;
FIG. 7 is a half cross-sectional view at A-A of FIG. 2;
FIG. 8 is a partial schematic view at a in FIG. 7;
the reference numerals in the figures are: 1. a work table; 2. a turntable station; 3. a resistance-free suction cup clamp; 4. a feeding station; 5. a first polishing station; 6. a turnover station; 7. a second polishing station; 8. a side edge polishing station; 9. a grooving station; 10. a blanking station; 11. detecting a station; 12. a first downward-pressure exhaust mechanism; 13. a second downward-pressure exhaust mechanism; 14. a third downward-pressing exhaust mechanism; 15. limiting the step hole; 16. a sucker mounting seat; 17. a center avoidance hole; 18. an airway; 19. a step mounting hole; 20. a suction cup assembly; 21. an adsorption plate; 22. a hollow exhaust shaft; 23. a bleed hole; 24. a fixing bolt; 25. a seal ring; 26. sealing the exhaust assembly; 27. a limit boss; 28. a guide exhaust hole; 29. a sealing rod; 30. sealing the boss; 31. a first rubber coating layer; 32. a return spring; 33. a lower pressing plate; 34. a transmission avoidance hole; 35. a transmission shaft; 36. a first transmission gear; 37. a feeding assembly; 38. a biaxial movement mechanism; 39. holding the feeding mechanism; 40. an extension seat; 41. a guide accommodating groove; 42. an L-shaped extension rod; 43. an extension return spring; 44. an anti-drop top cover; 45. pressing down the guide seat; 46. a guide chute; 47. pressing down the slide bar; 48. a mounting column; 49. a side guide hole; 50. pressing down a return spring; 51. an elastic compression bar; 52. a guide post; 53. an arc-shaped guide surface; 54. a side return spring; 55. an upper slider; 56. pressing down the inclined plane; 57. a lower wedge; 58. groove; 59. a jacking rod; 60. pressing down a rod; 61. a single-shaft lifting mechanism; 62. a clamping turnover mechanism; 63. a clamping jaw; 64. a second rubber coating layer; 65. a side edge polishing mechanism; 66. a rotating electric machine; 67. and a second transmission gear.
Detailed Description
The invention will be further described in detail with reference to the drawings and the detailed description below, in order to further understand the features and technical means of the invention and the specific objects and functions achieved.
Referring to fig. 1 and 8, the integrated machine for shaping silicon carbide crystals comprises a workbench 1 and a turntable station 2 arranged on the workbench 1, wherein a feeding station 4, a first polishing station 5, a turnover station 6, a second polishing station 7, a side edge polishing station 8, a grooving station 9, a blanking station 10 and a detection station 11 which are sequentially arranged along the circumferential direction of the turntable station 2 are arranged on the workbench 1, a plurality of non-resistance chuck clamps 3 which are uniformly distributed along the circumferential direction and are used for adsorbing and fixing the silicon carbide crystals are arranged on the turntable station 2, the non-resistance chuck clamps 3 comprise a sealing exhaust component 26 for controlling suction force of the chuck, the feeding station 4 comprises a first downward exhaust mechanism 12 for enabling the sealing exhaust component 26 to exhaust gas, the turnover station 6 comprises a second downward exhaust mechanism 13 which is identical in structure and function to the first downward exhaust mechanism 12, and the blanking station 10 comprises a third downward exhaust mechanism 14 which is identical in structure and function to the first downward exhaust mechanism 12.
The silicon carbide crystal is fed onto the non-resistance sucking disc clamp 3 by the feeding station 4, the first downward-pressure exhausting mechanism 12 drives the sealing exhausting assembly 26 to exhaust in the feeding process, in the process that the silicon carbide crystal is placed on the non-resistance sucking disc clamp 3, air in the non-resistance sucking disc clamp 3 is exhausted from the sealing exhausting assembly 26, the pressure in the non-resistance sucking disc clamp 3 cannot change, the silicon carbide crystal is basically unstressed, when the silicon carbide crystal reaches a designated position, the first downward-pressure exhausting mechanism 12 cannot drive the sealing exhausting assembly 26 to exhaust any more, the air amount in the non-resistance sucking disc clamp 3 is constant, the silicon carbide crystal is adsorbed by the non-resistance sucking disc clamp 3, the turntable station 2 drives the silicon carbide crystal to rotate to the first polishing station 5, the first polishing station 5 polishes the upper surface of the silicon carbide crystal, then the turntable station 2 drives the silicon carbide crystal to rotate to the overturning station 6, the turnover station 6 turns over the silicon carbide crystal, the second downward-pressing exhaust mechanism 13 works during the process, the second downward-pressing exhaust mechanism 13 drives the sealing exhaust assembly 26 to exhaust before taking out the silicon carbide crystal, the non-resistance sucking disc clamp 3 does not absorb the silicon carbide crystal any more, the silicon carbide crystal is taken down and placed on the non-resistance sucking disc clamp 3 again after turning over is finished, the principle of the upper part is the same as the working principle of the first downward-pressing exhaust mechanism 12, the upper part is rotated to the second polishing station 7 to polish the other surface of the silicon carbide crystal, the turntable station 2 drives the silicon carbide crystal to rotate to the side edge polishing station 8 to polish the side edge of the silicon carbide crystal after polishing is finished, the turntable station 2 drives the silicon carbide crystal to rotate to the grooving station 9 to carry out notch groove processing, the silicon carbide crystal is rotated to the blanking station 10 after processing is finished, and then the detecting station 11 detects the blanking non-resistance sucking disc clamp 3, if the workpiece is removed, the non-resistance sucking disc clamp 3 continues to rotate to the next station to continue working, and if the workpiece is not removed, the whole device stops working.
Further, each non-resistance sucking disc clamp 3 further comprises: the sucker mounting seats 16 are movably arranged at the top of the turntable station 2, a plurality of limiting step holes 15 are uniformly distributed at the top of the turntable station 2 along the circumferential direction, and each sucker mounting seat 16 is coaxially and movably arranged in the corresponding limiting step hole 15; the sucker assembly 20 is fixedly arranged at the top of the sucker mounting seat 16, and the top of the sucker assembly 20 is adsorbed on the bottom surface of the silicon carbide crystal; the transmission shaft 35 is fixedly arranged at the bottom of the sucker mounting seat 16 in a vertical state, and the top of the transmission shaft 35 is fixedly connected with the bottom of the sucker mounting seat 16; the first transmission gear 36 is fixedly arranged at the bottom of the transmission shaft 35 in a horizontal state.
The sucker mounting seat 16 is movably arranged in the corresponding limiting step hole 15, and the non-resistance sucker clamp 3 can rotate in the limiting step hole 15.
Further, the suction cup assembly 20 includes: the adsorption disc 21 is horizontally arranged at the top of the sucker mounting seat 16, and the bottom of the adsorption disc 21 is in contact with the top of the sucker mounting seat 16; the hollow exhaust shaft 22 is vertically arranged at the center of the adsorption disc 21, a central avoidance hole 17 which is vertically arranged is formed at the center of the sucker mounting seat 16, the top of the hollow exhaust shaft 22 is abutted against the top of the adsorption disc 21, the bottom of the hollow exhaust shaft 22 passes through the adsorption disc 21 and is arranged at the central avoidance hole 17, and a deflation hole 23 which is horizontally arranged is formed in the middle of the hollow exhaust shaft 22; the fixing bolt 24 is vertically arranged at the bottom of the sucker mounting seat 16, the bottom of the fixing bolt 24 is abutted against the bottom of the sucker mounting seat 16, the upper end of the fixing bolt 24 is arranged in the center avoiding hole 17 and is screwed with the bottom of the hollow exhaust shaft 22, and a sealing ring 25 which is horizontally arranged is arranged between the fixing bolt 24 and the sucker mounting seat 16.
The top of the hollow exhaust shaft 22 is abutted against the top of the adsorption disc 21, the bottom of the hollow exhaust shaft is connected with the fixing bolt 24, the adsorption disc 21 is fixedly arranged at the top of the sucker mounting seat 16 under the action of the hollow exhaust shaft 22 and the fixing bolt 24, and gas between the adsorption disc 21 and silicon carbide crystals can enter the central avoidance hole 17 through the gas release hole 23 on the hollow exhaust shaft 22.
Further, the seal vent assembly 26 includes: the two limiting bosses 27 are all arranged at the bottom of the sucker mounting seat 16 in a rotating mode in a vertical mode, two symmetrical air passages 18 are formed at the bottom of the sucker mounting seat 16, one end of each air passage 18 is communicated with the central avoidance hole 17, the other end of each air passage 18 is communicated with the outside through the bottom of the sucker mounting seat 16, a step mounting hole 19 is formed at the bottom of each air passage 18, each limiting boss 27 is arranged in the corresponding step mounting hole 19 in a rotating mode, and a guide exhaust hole 28 which is arranged in a vertical mode is formed in the middle of each limiting boss 27; the two sealing rods 29 are coaxially and movably arranged in the corresponding guide exhaust holes 28, a sealing boss 30 is formed at the top of each sealing rod 29, a first rubber coating layer 31 is formed at the top of each sealing boss 30, the top of the first rubber coating layer 31 is in contact with the top of the step mounting hole 19, two sealing return springs 32 are movably sleeved at the upper ends of the corresponding sealing rods 29, the bottom of each sealing return spring 32 is in contact with the top of the corresponding limiting boss 27, and the top of each sealing return spring is in contact with the bottom of the corresponding sealing boss 30; the lower pressing plate 33 is fixedly arranged at the bottoms of the two sealing rods 29 in a horizontal state, and a transmission avoiding hole 34 through which a transmission shaft 35 can pass is formed in the middle of the lower pressing plate 33.
One end of the air flue 18 is connected with the center avoidance hole 17, the top of the center avoidance hole 17 is connected with the adsorption disc 21, the bottom is sealed with the fixing bolt 24 through the sealing ring 25, the limiting boss 27 is fixedly arranged in the step mounting hole 19, air in the adsorption disc 21 can only be discharged from the guide exhaust hole 28 through the air flue 18, the top of the sealing rod 29 passes through the limiting boss 27 and is arranged in the step mounting hole 19, the first rubber coating 31 at the top of the sealing rod 29 is in contact with the top of the step mounting hole 19 and seals the air flue 18, the bottom of the sealing boss 30 is provided with the sealing return spring 32, two ends of the sealing return spring 32 are respectively in contact with the sealing boss 30 and the limiting boss 27, and when the sealing assembly is not influenced by external force, the air flue 18 is sealed by the first rubber coating 31 under the action of the sealing return spring 32.
Further, the feeding station 4 further includes a feeding assembly 37, a dual-shaft moving mechanism 38, a holding feeding mechanism 39, and the first pressing exhaust mechanism 12 includes: the extension seat 40 is fixedly arranged at the top of the workbench 1 in a vertical state, the extension seat 40 is arranged at the outer side of the turntable station 2, and a guide accommodating groove 41 which is arranged in a vertical state is formed at the top of the extension seat 40; an L-shaped extension rod 42, one side of which is vertically coaxially and movably arranged in the guide accommodating groove 41, and the other side of which horizontally passes through the guide accommodating groove 41 to be abutted against the top of the lower pressure plate 33; the extending return spring 43 is movably sleeved on the vertical side of the L-shaped extending rod 42 in a vertical state, the top of the extending return spring 43 is in contact with the bottom of the horizontal side of the L-shaped extending rod 42, and the bottom of the extending return spring is in contact with the bottom of the guide accommodating groove 41; the anti-falling top cover 44 is horizontally and fixedly arranged at the top of the extension seat 40, and the bottom of the anti-falling top cover 44 is in contact with the top of the L-shaped extension rod 42.
The extension seat 40 is fixedly arranged at the top of the workbench 1 and is positioned at the outer side of the turntable station 2, one end of the L-shaped extension rod 42 is abutted against the top of the lower pressing plate 33, the other end of the L-shaped extension rod is slid in the extension seat 40, and the lower pressing plate 33 moves up and down along with the L-shaped extension rod 42.
Further, the pressing guide seat 45 is fixedly arranged at the top of the workbench 1 in a vertical state, and a guide chute 46 arranged in a vertical state is formed at the top of the pressing guide seat 45; the lower sliding rod 47 is movably arranged in the guide chute 46 in a vertical state, a mounting column 48 which is arranged in a vertical state is formed at the upper end of the lower sliding rod 47, and a side guide hole 49 which is arranged in a horizontal state is formed on the side wall of the mounting column 48; the lower return spring 50 is movably sleeved at the lower end of the lower slide bar 47 in a vertical state, the top of the lower return spring 50 is in contact with the bottom of the mounting column 48, and the bottom is in contact with the bottom of the guide chute 46; the elastic compression rod 51 is movably arranged at the top of the L-shaped extension rod 42 in a horizontal state, an arc-shaped guide surface 53 is formed at the top of one end, close to the L-shaped extension rod 42, of the elastic compression rod 51, a guide post 52 which is arranged in a horizontal state is formed at one end, far away from the L-shaped extension rod 42, of the elastic compression rod 51, and the guide post 52 coaxially penetrates through the side guide hole 49 to be output in a direction far away from the L-shaped extension rod 42; the side return spring 54 is movably sleeved on the guide post 52, one end of the side return spring 54 is abutted against the elastic compression rod 51, and the other end is abutted against the downward-pressing sliding rod 47; the upper sliding block 55 is fixedly arranged on one end of the guide post 52 penetrating through the downward-pressing sliding rod 47 in a vertical state, and a downward-pressing inclined surface 56 is formed on one side, close to the downward-pressing guide seat 45, of the bottom of the upper sliding block 55; the lower wedge block 57 is fixedly arranged on one side of the lower guide post 52 far away from the L-shaped extension rod 42 in a vertical state, and a groove 58 matched with the lower inclined surface 56 is formed at the top of the lower wedge block 57; the jacking rod 59 is fixedly arranged at the top of the pressing sliding rod 47 in a horizontal state; the lower pressure bar 60 is horizontally and fixedly arranged on the holding and feeding mechanism 39, and the lower pressure bar 60 can be abutted against the top of the jacking rod 59 along with the descending of the holding and feeding mechanism 39.
One end of the elastic compression rod 51 is movably connected with the downward compression sliding rod 47, the bottom of the other end is in contact with the L-shaped extension rod 42, the top of the downward compression sliding rod 47 is fixedly connected with the jacking rod 59, when the jacking rod 59 is pressed downward by the downward compression rod 60, the elastic compression rod 51 is pressed downward, the L-shaped extension rod 42 drives the downward compression plate 33 to be pressed downward, the seal exhaust assembly 26 is ventilated, one end of the elastic compression rod 51 is fixedly connected with the upper sliding block 55, the upper sliding block 55 is matched with the lower wedge block 57 fixedly arranged on the downward compression guide seat 45, when the elastic compression rod 51 slides downward, the upper sliding block 55 moves outwards under the action of the lower wedge block 57, the elastic compression rod 51 gradually moves away from the top of the L-shaped extension rod 42, after the elastic compression rod 51 moves away from the center of the horizontal side of the L-shaped extension rod 42, the L-shaped extension rod 42 moves upward under the action of the extension restoring spring 43, the seal exhaust assembly 26 seals the air passage 18, when the downward compression rod 60 does not press the jacking rod 59 any more, the downward compression sliding rod 47 moves upward under the action of the downward compression restoring spring 50, and in the ascending process, the elastic compression rod 51 moves to the L-shaped extension rod 42 again under the action of the guide surface 53.
Further, the turning station 6 comprises a single-shaft lifting mechanism 61 and a clamping turning mechanism 62, and a second rubber coating layer 64 is formed at one end, contacted with the silicon carbide crystal, of each of two clamping jaws 63 of the clamping turning mechanism 62.
The second rubber coating layer 64 is formed where the holding jaw 63 contacts the silicon carbide crystal, and can prevent the silicon carbide crystal from being damaged while clamping the silicon carbide crystal.
Further, the skirt sharpening station 8 includes a skirt sharpening mechanism 65, further including: the rotating motor 66 is fixedly arranged at the bottom of the workbench 1 in a vertical state, and the output end of the rotating motor 66 passes through the workbench 1 in a vertical state and is output upwards; the second transmission gear 67 is fixedly arranged at the top of the output end of the rotating motor 66 in a horizontal state, and the second transmission gear 67 can be meshed with the first transmission gear 36.
The side edge polishing mechanism 65 polishes the silicon carbide crystal, and the second transmission gear 67 drives the silicon carbide crystal to rotate through the first transmission gear 36 to uniformly polish the peripheral side of the silicon carbide crystal.
The silicon carbide crystal is fed onto the non-resistance sucking disc clamp 3 by the feeding station 4, in the process that the silicon carbide crystal is placed on the non-resistance sucking disc clamp 3, the jacking rod 59 is downwards pressed by the downwards pressing rod 60, the elastic pressing rod 51 is downwards pressed, the L-shaped extension rod 42 drives the downwards pressing plate 33, the sealing exhaust assembly 26 is ventilated, the upper sliding block 55 moves outwards under the action of the downwards wedge block 57, the elastic pressing rod 51 moves away from the top of the L-shaped extension rod 42 gradually, air in the non-resistance sucking disc clamp 3 is discharged from the sealing exhaust assembly 26, the pressure in the non-resistance sucking disc clamp 3 cannot change, the silicon carbide crystal is extremely small in stress, after the elastic pressing rod 51 moves away from the center of a circle on one side of the L-shaped extension rod 42, the L-shaped extension rod 42 moves upwards under the action of the extension reset spring 43, the sealing exhaust assembly 26 seals the air passage 18, the air quantity in the non-resistance sucking disc clamp 3 is constant, the silicon carbide crystal is absorbed by the non-resistance sucking disc clamp 3, the turntable station 2 drives the silicon carbide crystal to rotate to the first grinding station 5, the first grinding station 5 grinds the upper surface of the silicon carbide crystal, then the turntable station 2 drives the silicon carbide crystal to rotate to the overturning station 6, the overturning station 6 overturns the silicon carbide crystal, the second downward-pressing exhaust mechanism 13 works, the second downward-pressing exhaust mechanism 13 drives the sealing exhaust assembly 26 to ventilate before taking out the silicon carbide crystal, the non-resistance sucking disc clamp 3 does not absorb the silicon carbide crystal any more, the silicon carbide crystal is taken down and put on the non-resistance sucking disc clamp 3 again after overturning is completed, the principle of the upper part is the same as the working principle of the first downward-pressing exhaust mechanism 12, the upper part is rotated to the second grinding station 7 to grind the other surface of the silicon carbide crystal, and after finishing polishing, the turntable station 2 drives the silicon carbide crystal to rotate to the side edge polishing station 8 to polish the side edge of the silicon carbide crystal, so that all polishing processes are finished, the turntable station 2 drives the silicon carbide crystal to rotate to the grooving station 9 to carry out notch groove processing, the silicon carbide crystal is rotated to the blanking station 10 to be blanked after finishing processing, the detection station 11 detects the blanked non-resistance suction disc clamp 3, if a workpiece is taken down, the non-resistance suction disc clamp 3 continues to rotate to the next station to continue working, and if the workpiece is not taken down, the whole device stops working.
The foregoing examples merely illustrate one or more embodiments of the invention, which are described in greater detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (7)
1. The utility model provides a silicon carbide crystal plastic all-in-one, includes workstation (1) and carousel station (2) that set up on workstation (1), is equipped with on workstation (1) along carousel station (2) circumference direction material loading station (4), first grinding station (5), upset station (6), second grinding station (7), skirt grinding station (8), grooving station (9), unloading station (10), detection station (11) in proper order, characterized in that, carousel station (2) is last to be equipped with a plurality of no-resistance sucking disc anchor clamps (3) that are used for adsorbing fixed silicon carbide crystal along circumference direction evenly distributed, no-resistance sucking disc anchor clamps (3) are including a sealed exhaust subassembly (26) that are used for controlling sucking disc suction, material loading station (4) are including a first exhaust mechanism (12) that pushes down that are used for making sealed exhaust subassembly (26) gassing, upset station (6) are including a second exhaust mechanism (13) that pushes down that are the same with first exhaust mechanism (12) structure and function, unloading station (10) are including a third exhaust mechanism (14) that are the same with first exhaust mechanism that pushes down mechanism (12);
the pressing guide seat (45) is fixedly arranged at the top of the workbench (1) in a vertical state, and a guide chute (46) which is arranged in a vertical state is formed at the top of the pressing guide seat (45);
the lower sliding rod (47) is movably arranged in the guide chute (46) in a vertical state, a mounting column (48) which is arranged in a vertical state is formed at the upper end of the lower sliding rod (47), and a side guide hole (49) which is arranged in a horizontal state is formed on the side wall of the mounting column (48);
the lower reset spring (50) is movably sleeved at the lower end of the lower sliding rod (47) in a vertical state, the top of the lower reset spring (50) is in contact with the bottom of the mounting column (48), and the bottom of the lower reset spring is in contact with the bottom of the guide sliding groove (46);
the elastic compression rod (51) is movably arranged at the top of the L-shaped extension rod (42) in a horizontal state, an arc-shaped guide surface (53) is formed at the top of one end, close to the L-shaped extension rod (42), of the elastic compression rod (51), a guide column (52) which is arranged in a horizontal state is formed at one end, far away from the L-shaped extension rod (42), of the elastic compression rod (51), and the guide column (52) coaxially penetrates through the side guide hole (49) to be output in a direction far away from the L-shaped extension rod (42);
a side return spring (54) movably sleeved on the guide column (52), wherein one end of the side return spring (54) is in contact with the elastic compression rod (51), and the other end is in contact with the downward-pressing sliding rod (47);
the upper sliding block (55) is fixedly arranged at one end of the guide column (52) penetrating through the downward-pressing sliding rod (47) in a vertical state, and a downward-pressing inclined surface (56) is formed at one side, close to the downward-pressing guide seat (45), of the bottom of the upper sliding block (55);
the lower wedge block (57) is fixedly arranged on one side of the lower pressing guide column (52) far away from the L-shaped extension rod (42) in a vertical state, and a groove (58) matched with the lower pressing inclined surface (56) is formed at the top of the lower wedge block (57);
the jacking rod (59) is fixedly arranged at the top of the downward pressing sliding rod (47) in a horizontal state;
the lower pressure rod (60) is fixedly arranged on the holding feeding mechanism (39) in a horizontal state, and the lower pressure rod (60) can be abutted against the top of the jacking rod (59) along with the descending of the holding feeding mechanism (39).
2. A silicon carbide crystal shaping machine according to claim 1, wherein each non-resistance suction cup clamp (3) further comprises: the sucker mounting seats (16) are movably arranged at the tops of the turntable stations (2), a plurality of limiting step holes (15) are uniformly distributed at the tops of the turntable stations (2) along the circumferential direction, and each sucker mounting seat (16) is coaxially and movably arranged in the corresponding limiting step hole (15);
the sucker assembly (20) is fixedly arranged at the top of the sucker mounting seat (16), and the top of the sucker assembly (20) is adsorbed with the bottom surface of the silicon carbide crystal;
the transmission shaft (35) is fixedly arranged at the bottom of the sucker mounting seat (16) in a vertical state, and the top of the transmission shaft (35) is fixedly connected with the bottom of the sucker mounting seat (16);
the first transmission gear (36) is fixedly arranged at the bottom of the transmission shaft (35) in a horizontal state.
3. A silicon carbide crystal shaping machine according to claim 2, wherein the chuck assembly (20) comprises:
the adsorption disc (21) is horizontally arranged at the top of the sucker mounting seat (16), and the bottom of the adsorption disc (21) is abutted against the top of the sucker mounting seat (16);
the hollow exhaust shaft (22) is vertically arranged at the center of the adsorption disc (21), a central avoidance hole (17) which is vertically arranged is formed at the center of the sucker mounting seat (16), the top of the hollow exhaust shaft (22) is abutted against the top of the adsorption disc (21), the bottom of the hollow exhaust shaft (22) passes through the adsorption disc (21) and is arranged at the central avoidance hole (17), and a deflation hole (23) which is horizontally arranged is formed in the middle of the hollow exhaust shaft (22);
the fixing bolt (24) is vertically arranged at the bottom of the sucker mounting seat (16), the bottom of the fixing bolt (24) is abutted against the bottom of the sucker mounting seat (16), the upper end of the fixing bolt (24) is arranged in the center avoiding hole (17) and is screwed with the bottom of the hollow exhaust shaft (22), and a sealing ring (25) which is horizontally arranged is arranged between the fixing bolt (24) and the sucker mounting seat (16).
4. A silicon carbide crystal shaping machine according to claim 3, wherein the seal venting assembly (26) comprises: the two limiting bosses (27) are all arranged at the bottom of the sucker mounting seat (16) in a rotating mode in a vertical mode, two symmetrical air passages (18) are formed at the bottom of the sucker mounting seat (16), one end of each air passage (18) is communicated with the central avoidance hole (17), the other end of each air passage is communicated with the outside through the bottom of the sucker mounting seat (16), one step mounting hole (19) is formed at the bottom of each air passage (18), each limiting boss (27) is arranged in the corresponding step mounting hole (19) in a rotating mode, and a guide exhaust hole (28) which is arranged in a vertical mode is formed in the middle of each limiting boss (27);
the two sealing rods (29) are coaxially and movably arranged in the corresponding guide exhaust holes (28), a sealing boss (30) is formed at the top of each sealing rod (29), a first rubber coating layer (31) is formed at the top of each sealing boss (30), the top of each first rubber coating layer (31) is abutted against the top of the step mounting hole (19), two sealing return springs (32) are movably sleeved at the upper ends of the corresponding sealing rods (29), the bottom of each sealing return spring (32) is abutted against the top of the corresponding limiting boss (27), and the top of each sealing return spring is abutted against the bottom of the corresponding sealing boss (30);
the lower pressing plate (33) is horizontally fixed at the bottoms of the two sealing rods (29), and a transmission avoidance hole (34) through which a transmission shaft (35) can pass is formed in the middle of the lower pressing plate (33).
5. A silicon carbide crystal shaping machine according to claim 4, wherein the loading station (4) further comprises a feeding assembly (37), a biaxial movement mechanism (38), and a holding loading mechanism (39), and the first downward-pressing exhaust mechanism (12) comprises: the extension seat (40) is fixedly arranged at the top of the workbench (1) in a vertical state, the extension seat (40) is arranged at the outer side of the turntable station (2), and a guide accommodating groove (41) which is arranged in a vertical state is formed at the top of the extension seat (40);
an L-shaped extension rod (42), one side of which is coaxially and movably arranged in the guide accommodating groove (41) in a vertical state, and the other side of which passes through the guide accommodating groove (41) in a horizontal state and is abutted against the top of the lower pressing plate (33);
an extension return spring (43) which is vertically movably sleeved on one vertical side of the L-shaped extension rod (42), wherein the top of the extension return spring (43) is in contact with the bottom of one horizontal side of the L-shaped extension rod (42), and the bottom of the extension return spring is in contact with the bottom of the guide accommodating groove (41);
the anti-falling top cover (44) is horizontally fixed on the top of the extension seat (40), and the bottom of the anti-falling top cover (44) is abutted to the top of the L-shaped extension rod (42).
6. The integrated machine for shaping silicon carbide crystals as set forth in claim 5, wherein the turning station (6) comprises a single-shaft lifting mechanism (61), and the turning station (6) further comprises a clamping turning mechanism (62), and the ends, contacting the silicon carbide crystals, of the two clamping jaws (63) of the clamping turning mechanism (62) are both formed with a second rubber coating layer (64).
7. A silicon carbide crystal shaping machine according to claim 2, wherein the skirt grinding station (8) comprises a skirt grinding mechanism (65), wherein the skirt grinding station (8) further comprises: the rotating motor (66) is fixedly arranged at the bottom of the workbench (1) in a vertical state, and the output end of the rotating motor (66) passes through the workbench (1) in a vertical state and is output upwards;
the second transmission gear (67) is horizontally fixedly arranged at the top of the output end of the rotating motor (66), and the second transmission gear (67) can be meshed with the first transmission gear (36).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211476261.1A CN115741390B (en) | 2022-11-23 | 2022-11-23 | Silicon carbide crystal shaping all-in-one |
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| CN202211476261.1A CN115741390B (en) | 2022-11-23 | 2022-11-23 | Silicon carbide crystal shaping all-in-one |
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| CN115741390B true CN115741390B (en) | 2023-05-09 |
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| CN115945983B (en) * | 2023-03-13 | 2023-06-02 | 长盛(廊坊)科技有限公司 | Carbon fiber material surface treatment equipment and treatment method thereof |
| CN116442070B (en) * | 2023-06-19 | 2023-08-29 | 泉州通维科技有限责任公司 | Surface grinding machine for fan-shaped gunpowder block |
| CN117340167B (en) * | 2023-12-04 | 2024-02-27 | 中铧智能科技(山东)有限公司 | Cable type steel wire ring core ring looping and welding integrated device |
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| TWI421148B (en) * | 2009-06-02 | 2014-01-01 | Cpumate Inc | Heat sink having grinding heat-contacting plane and method and apparatus of making the same |
| US8740668B2 (en) * | 2010-03-12 | 2014-06-03 | Wayne O. Duescher | Three-point spindle-supported floating abrasive platen |
| CN206137904U (en) * | 2016-08-12 | 2017-05-03 | 广东中天电器有限公司 | Electric kettle |
| CN108223825B (en) * | 2018-02-23 | 2019-03-15 | 孙艳芬 | Chemical pipeline plug valve |
| CN209922081U (en) * | 2019-05-27 | 2020-01-10 | 四川鑫福石油化工设备制造有限责任公司 | A cubic vapor recovery system integration processing apparatus for filling station |
| CN210046570U (en) * | 2019-06-04 | 2020-02-11 | 深圳市浩洋汇丰技术有限公司 | Vacuum adsorption tool convenient to installation |
| CN211922912U (en) * | 2019-12-30 | 2020-11-13 | 盐城顺卓金属制品有限公司 | Corrosion-resistant explosion-proof floor drain convenient to maintenance |
| CN112894626A (en) * | 2021-02-03 | 2021-06-04 | 南京寻文梦商贸有限公司 | Hardware polishing is with utilizing energy-conserving cooling module of compression structure self-bleeding |
| CN113579955A (en) * | 2021-08-12 | 2021-11-02 | 安吉圆磨机械科技股份有限公司 | Double-station silicon carbide crystal shaping all-in-one machine |
| CN115194602B (en) * | 2022-07-14 | 2023-04-07 | 深圳市楠轩光电科技有限公司 | Full-automatic polishing device for optical lens processing |
| CN115306713A (en) * | 2022-09-06 | 2022-11-08 | 盐城市建龙机电设备制造有限公司 | Novel high-efficient pressure boost screw compressor |
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