CN115741390A - Silicon carbide crystal shaping all-in-one machine - Google Patents
Silicon carbide crystal shaping all-in-one machine Download PDFInfo
- Publication number
- CN115741390A CN115741390A CN202211476261.1A CN202211476261A CN115741390A CN 115741390 A CN115741390 A CN 115741390A CN 202211476261 A CN202211476261 A CN 202211476261A CN 115741390 A CN115741390 A CN 115741390A
- Authority
- CN
- China
- Prior art keywords
- station
- guide
- rod
- silicon carbide
- vertical state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the field of silicon carbide crystal processing, in particular to a silicon carbide crystal shaping all-in-one machine, which comprises a workbench and a turntable station arranged on the workbench, wherein the workbench is provided with a feeding station, a first polishing station, a turnover station, a second polishing station, a side edge polishing station, a grooving station, a blanking station and a detection station; and the whole processing process is streamlined, and the processing efficiency is greatly improved.
Description
Technical Field
The invention relates to the field of silicon carbide crystal processing, in particular to a silicon carbide crystal shaping all-in-one machine.
Background
The silicon carbide crystal is a third-generation wide-bandgap semiconductor material, has excellent properties of high thermal conductivity, high breakdown voltage, extremely high carrier mobility, high chemical stability and the like, can be manufactured into high-frequency and high-power electronic devices and optoelectronic devices which work under the conditions of high temperature and strong radiation, has huge application value in the fields of national defense, high technology, industrial production, power supply and power transformation, and is regarded as a third-generation wide-bandgap semiconductor material with great development prospect.
The silicon carbide crystal needs to be polished and shaped before being processed into a chip, most of the existing grinding machines are single-station grinding machines, the silicon carbide crystal is troublesome to assemble when being processed, workpieces need to be taken down after the surfaces of the silicon carbide crystal are machined after the silicon carbide crystal is assembled, the silicon carbide crystal is assembled to another grinding machine to finish the excircle and notch groove of the silicon carbide crystal, the machining efficiency is low, and the silicon carbide crystal is easy to crack during machining.
Disclosure of Invention
Therefore, the silicon carbide crystal shaping all-in-one machine needs to be provided for solving the problems in the prior art.
In order to solve the problems of the prior art, the invention adopts the technical scheme that:
the utility model provides a silicon carbide crystal plastic all-in-one, includes the workstation and sets up the carousel station on the workstation, is equipped with the material loading station, the first station of polishing, the upset station, the second station of polishing, the lateral margin station of polishing, grooving station, unloading station, the detection station that arrange in proper order along the circumferencial direction of carousel station on the workstation, be equipped with a plurality of non-resistance sucking disc anchor clamps that are used for adsorbing fixed silicon carbide crystal along circumferencial direction evenly distributed on the carousel station, non-resistance sucking disc anchor clamps are including a sealed exhaust assembly who is used for controlling sucking disc suction, and the material loading station includes one and is used for making the first exhaust mechanism that pushes down that sealed exhaust assembly bleeds, and the upset station includes one and pushes down exhaust mechanism with first exhaust mechanism structure and function the same second, and the unloading station includes one and pushes down exhaust mechanism and function the same third with first exhaust mechanism that pushes down.
Further, each non-resistance sucker clamp further comprises:
the sucker mounting seats are movably arranged at the top of the rotary table station, a plurality of limiting step holes are uniformly distributed at the top of the rotary table station along the circumferential direction, and each sucker mounting seat is coaxially and movably arranged in the corresponding limiting step hole;
the sucker assembly is fixedly arranged at the top of the sucker mounting seat, and the top of the sucker assembly is adsorbed with the bottom surface of the silicon carbide crystal;
the transmission shaft is fixedly arranged at the bottom of the sucker mounting seat in a vertical state, and the top of the transmission shaft is fixedly connected with the bottom of the sucker mounting seat;
the first transmission gear is fixedly arranged at the bottom of the transmission shaft in a horizontal state.
Further, the sucking disc subassembly includes:
the adsorption disc is horizontally arranged at the top of the sucker mounting seat, and the bottom of the adsorption disc is abutted against the top of the sucker mounting seat;
the hollow exhaust shaft is arranged at the center of the adsorption disc in a vertical state, a center avoidance hole which is arranged in a vertical state is formed at the center of the sucker mounting seat, the top of the hollow exhaust shaft is abutted against the top of the adsorption disc, the bottom of the hollow exhaust shaft penetrates through the adsorption disc and is arranged in the center avoidance hole, and an air release hole which is arranged in a horizontal state is formed in the middle of the hollow exhaust shaft;
fixing bolt is vertical state and sets up in sucking disc mount pad bottom, and the fixing bolt bottom is contradicted with sucking disc mount pad bottom, and the fixing bolt upper end sets up in the center dodges downthehole and connects soon with hollow exhaust shaft bottom, is provided with a sealing washer that is the horizontality and sets up between fixing bolt and the sucking disc mount pad.
Further, the sealed exhaust assembly includes:
the two limiting bosses are vertically and rotatably arranged at the bottom of the sucker mounting seat, two air passages which are symmetrically arranged are formed at the bottom of the sucker mounting seat, one end of each air passage is communicated with the central avoiding hole, the other end of each air passage is communicated with the outside through the bottom of the sucker mounting seat, a step mounting hole is formed at the bottom of each air passage, each limiting boss is rotatably arranged in the corresponding step mounting hole, and a guide exhaust hole which is vertically arranged is formed in the middle of each limiting boss;
two sealing rods coaxially and movably arranged in the corresponding guide exhaust holes, a sealing boss is formed at the top of each sealing rod, a first rubber coating layer is formed at the top of each sealing boss, the top of each first rubber coating layer is abutted against the top of each step mounting hole,
the two sealing return springs are movably sleeved at the upper ends of the corresponding sealing rods, the bottom of each sealing return spring is abutted against the top of the corresponding limiting boss, and the top of each sealing return spring is abutted against the bottom of the corresponding sealing boss;
the lower pressing plate is fixedly arranged at the bottoms of the two sealing rods in a horizontal state, and a transmission avoiding hole capable of allowing the transmission shaft to penetrate is formed in the middle of the lower pressing plate.
Further, the material loading station still includes pay-off subassembly, biax moving mechanism, holds feed mechanism, and first mechanism of pushing down is including:
the extension seat is fixedly arranged at the top of the workbench in a vertical state, is arranged outside the rotary table station, and is provided with a guide accommodating groove in a vertical state;
one side of the L-shaped extension rod is coaxially and movably arranged in the guide accommodating groove in a vertical state, and the other side of the L-shaped extension rod penetrates through the guide accommodating groove in a horizontal state to be abutted against the top of the lower pressing plate;
the extension reset spring is movably sleeved on one vertical side of the L-shaped extension rod in a vertical state, the top of the extension reset spring is abutted against the bottom of one horizontal side of the L-shaped extension rod, and the bottom of the extension reset spring is abutted against the bottom of the guide accommodating groove;
the anticreep top cap is that the horizontality is fixed to be set up in extending the seat top, and anticreep top cap bottom is inconsistent with L type extension rod top.
Further, in the above-mentioned case,
the pressing guide seat is fixedly arranged at the top of the workbench in a vertical state, and a guide chute which is arranged in a vertical state is formed at the top of the pressing guide seat;
the lower pressing slide bar is movably arranged in the guide chute in a vertical state, an installation column which is arranged in a vertical state is formed at the upper end of the lower pressing slide bar, and a side guide hole which is arranged in a horizontal state is formed in the side wall of the installation column;
the downward pressing reset spring is movably sleeved at the lower end of the downward pressing slide rod in a vertical state, the top of the downward pressing reset spring is abutted against the bottom of the mounting column, and the bottom of the downward pressing reset spring is abutted against the bottom of the guide chute;
the elastic pressure rod is movably arranged at the top of the L-shaped extension rod in a horizontal state, an arc-shaped guide surface is formed at the top of one end, close to the L-shaped extension rod, of the elastic pressure rod, a guide column which is arranged in a horizontal state is formed at one end, far away from the L-shaped extension rod, of the elastic pressure rod, and the guide column coaxially penetrates through the side guide hole and outputs the guide column in the direction far away from the L-shaped extension rod;
the side reset spring is movably sleeved on the guide post, one end of the side reset spring is abutted against the elastic pressure rod, and the other end of the side reset spring is abutted against the downward pressing slide rod;
the upper sliding block is fixedly arranged on one end of the guide post penetrating through the lower pressing sliding rod in a vertical state, and a lower pressing inclined plane is formed on one side, close to the lower pressing guide seat, of the bottom of the upper sliding block;
the lower wedge block is fixedly arranged on one side of the lower pressing guide column away from the L-shaped extension rod in a vertical state, and a groove matched with the lower pressing inclined plane is formed in the top of the lower wedge block;
the jacking rod is fixedly arranged at the top of the downward pressing slide rod in a horizontal state;
and the lower pressure rod is fixedly arranged on the sucking and feeding mechanism in a horizontal state and can be abutted against the top of the jacking rod along with the descending of the sucking and feeding mechanism.
Further, the upset station includes unipolar elevating system, still including centre gripping tilting mechanism, and the equal shaping of one end of two clamping jaws and the contact of carborundum crystal of centre gripping tilting mechanism has second rubber coating layer.
Further, the lateral margin station of polishing includes lateral margin grinding machanism, still includes:
the rotating motor is fixedly arranged at the bottom of the workbench in a vertical state, and the output end of the rotating motor penetrates through the workbench to be output upwards in a vertical state;
and the second transmission gear is fixedly arranged at the top of the output end of the rotating motor in a horizontal state and can be meshed with the first transmission gear.
Compared with the prior art, the invention has the beneficial effects that:
firstly, the silicon carbide crystal shaping all-in-one machine adsorbs the silicon carbide crystal through the non-resistance sucker clamp, so that the silicon carbide crystal is extremely low in stress and not easy to damage when placed and taken away;
secondly, the silicon carbide crystal shaping all-in-one machine enables the whole processing process to be streamlined through the turntable station, and the processing efficiency is greatly improved.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a top view of the present invention;
FIG. 3 is a perspective view of the non-resistance chuck clamp of the present invention;
FIG. 4 is a schematic perspective view of a first push-down venting mechanism according to the present invention;
FIG. 5 is an exploded view of the non-resistance suction cup clamp of the present invention;
FIG. 6 is an exploded view of a first push to vent mechanism according to the present invention;
FIG. 7 isbase:Sub>A half sectional view taken at A-A in FIG. 2;
FIG. 8 is a partial schematic view at a of FIG. 7;
the reference numbers in the figures are: 1. a work table; 2. a turntable station; 3. a non-resistance sucker clamp; 4. a feeding station; 5. a first grinding station; 6. turning over the station; 7. a second grinding station; 8. a lateral edge polishing station; 9. grooving station; 10. a blanking station; 11. detecting a station; 12. a first pressure-down exhaust mechanism; 13. a second pressure exhaust mechanism; 14. a third pressure exhaust mechanism; 15. a limiting step hole; 16. a suction cup mounting seat; 17. a central avoidance hole; 18. an airway; 19. step mounting holes; 20. a sucker component; 21. an adsorption tray; 22. a hollow exhaust shaft; 23. air bleeding holes; 24. fixing the bolt; 25. a seal ring; 26. a sealed exhaust assembly; 27. a limiting boss; 28. a guide exhaust hole; 29. a sealing rod; 30. sealing the boss; 31. a first rubber coating layer; 32. a return spring; 33. a lower pressing plate; 34. a transmission avoidance hole; 35. a drive shaft; 36. a first drive gear; 37. a feeding assembly; 38. a biaxial movement mechanism; 39. a suction loading mechanism; 40. an extension base; 41. a guide accommodating groove; 42. an L-shaped extension rod; 43. an extension return spring; 44. an anti-drop top cover; 45. pressing down the guide seat; 46. a guide chute; 47. pressing the slide bar downwards; 48. mounting a column; 49. a side guide hole; 50. a return spring is pressed down; 51. an elastic pressure lever; 52. a guide post; 53. an arc-shaped guide surface; 54. a side return spring; 55. an upper slide block; 56. pressing the inclined plane downwards; 57. a lower wedge block; 58. beveling; 59. a jacking rod; 60. a lower pressure lever; 61. a single-shaft lifting mechanism; 62. clamping and overturning mechanism; 63. a clamping jaw; 64. a second rubber coating layer; 65. a lateral edge polishing mechanism; 66. a rotating electric machine; 67. a second transmission gear.
Detailed Description
For further understanding of the features and technical means of the present invention, as well as the specific objects and functions attained by the present invention, the present invention will be described in further detail with reference to the accompanying drawings and detailed description.
Referring to fig. 1 and 8, the silicon carbide crystal shaping integrated machine comprises a workbench 1 and a turntable station 2 arranged on the workbench 1, wherein the workbench 1 is provided with a feeding station 4, a first polishing station 5, a turning station 6, a second polishing station 7, a side edge polishing station 8, a grooving station 9, a blanking station 10 and a detection station 11 which are sequentially arranged along the circumferential direction of the turntable station 2, the turntable station 2 is provided with a plurality of non-resistance sucker clamps 3 which are uniformly distributed along the circumferential direction and used for adsorbing and fixing the silicon carbide crystal, each non-resistance sucker clamp 3 comprises a sealing exhaust assembly 26 used for controlling the suction force of a sucker, the feeding station 4 comprises a first downward-pressing exhaust mechanism 12 used for enabling the sealing exhaust assembly 26 to exhaust, the turning station 6 comprises a second downward-pressing exhaust mechanism 13 which has the same structure and function as the first downward-pressing exhaust mechanism 12, and the blanking station 10 comprises a third downward-pressing exhaust mechanism 14 which has the same structure and function as the first downward-pressing exhaust mechanism 12.
The silicon carbide crystal is fed to the non-resistance sucker clamp 3 from the feeding station 4, in the feeding process, the first downward pressing exhaust mechanism 12 drives the sealing exhaust assembly 26 to exhaust, in the process that the silicon carbide crystal is placed on the non-resistance sucker clamp 3, air in the non-resistance sucker clamp 3 is exhausted from the sealing exhaust assembly 26, the pressure in the non-resistance sucker clamp 3 cannot change, the silicon carbide crystal is basically not stressed, when the silicon carbide crystal reaches a specified position, the first downward pressing exhaust mechanism 12 cannot drive the sealing exhaust assembly 26 to exhaust, the air amount in the non-resistance sucker clamp 3 is constant, the silicon carbide crystal is adsorbed by the non-resistance sucker clamp 3, the turntable station 2 drives the silicon carbide crystal to rotate to the first polishing station 5, the first polishing station 5 polishes the upper surface of the silicon carbide crystal, then the turntable station 2 drives the silicon carbide crystal to rotate to the overturning station 6, the silicon carbide crystal is overturned by the overturning station 6, the second downward-pressing exhaust mechanism 13 works during the overturning, the second downward-pressing exhaust mechanism 13 drives the sealed exhaust assembly 26 to exhaust before taking a piece, the non-resistance sucker clamp 3 does not adsorb the silicon carbide crystal any more, the silicon carbide crystal is taken down and overturned and then placed on the non-resistance sucker clamp 3 again, the principle of the upper piece is the same as that of the first downward-pressing exhaust mechanism 12, the upper piece is rotated to the second grinding station 7 to grind the other surface of the silicon carbide crystal, after grinding is finished, the turntable station 2 drives the silicon carbide crystal to rotate to the side edge grinding station 8 to grind the side edge of the silicon carbide crystal, so that all grinding procedures are finished, the turntable station 2 drives the silicon carbide crystal to rotate to the grooving station 9 to carry out notch grooving processing, after processing is finished, the silicon carbide crystal rotates to the blanking station 10 to carry out blanking, and then the detection station 11 detects the blanked non-resistance sucker clamp 3, if the workpiece is taken down, the non-resistance sucker clamp 3 continues to rotate to the next station to continue working, and if the workpiece is not taken down, the whole device stops working.
Further, each non-resistance chuck clamp 3 further comprises: the sucker mounting seats 16 are movably arranged at the top of the turntable station 2, a plurality of limiting step holes 15 are uniformly distributed at the top of the turntable station 2 along the circumferential direction, and each sucker mounting seat 16 is coaxially and movably arranged in the corresponding limiting step hole 15; the sucker assembly 20 is fixedly arranged at the top of the sucker mounting seat 16, and the top of the sucker assembly 20 is adsorbed with the bottom surface of the silicon carbide crystal; the transmission shaft 35 is fixedly arranged at the bottom of the sucker mounting seat 16 in a vertical state, and the top of the transmission shaft 35 is fixedly connected with the bottom of the sucker mounting seat 16; the first transmission gear 36 is fixedly arranged at the bottom of the transmission shaft 35 in a horizontal state.
The suction cup mounting seats 16 are movably arranged in the corresponding limiting step holes 15, and the resistance-free suction cup clamp 3 can rotate in the limiting step holes 15.
Further, the chuck assembly 20 includes: the adsorption disc 21 is horizontally arranged at the top of the sucker mounting seat 16, and the bottom of the adsorption disc 21 is abutted against the top of the sucker mounting seat 16; the suction cup installation seat 16 is provided with a central avoiding hole 17 which is vertically formed, the top of the hollow exhaust shaft 22 is abutted to the top of the suction cup 21, the bottom of the hollow exhaust shaft 22 penetrates through the suction cup 21 and is arranged in the central avoiding hole 17, and an air release hole 23 which is horizontally formed is formed in the middle of the hollow exhaust shaft 22; fixing bolt 24 is vertical state and sets up in 16 bottoms of sucking disc mount pad, and fixing bolt 24 bottoms and 16 bottoms of sucking disc mount pad are inconsistent, and fixing bolt 24 upper end sets up in the hole 17 is dodged in the center and connects soon with hollow exhaust shaft 22 bottom, is provided with a sealing washer 25 that is the horizontality and sets up between fixing bolt 24 and the sucking disc mount pad 16.
The top of the hollow exhaust shaft 22 is abutted against the top of the adsorption disc 21, the bottom of the hollow exhaust shaft is connected with the fixing bolt 24, the adsorption disc 21 is fixedly arranged at the top of the suction disc mounting seat 16 under the action of the hollow exhaust shaft 22 and the fixing bolt 24, and gas between the adsorption disc 21 and the silicon carbide crystal can enter the center avoidance hole 17 through the gas release hole 23 in the hollow exhaust shaft 22.
Further, the seal-vent assembly 26 includes: the two limiting bosses 27 are vertically and rotatably arranged at the bottom of the sucker mounting seat 16, two air passages 18 which are symmetrically arranged are formed at the bottom of the sucker mounting seat 16, one end of each air passage 18 is communicated with the central avoiding hole 17, the other end of each air passage 18 is communicated with the outside through the bottom of the sucker mounting seat 16, a step mounting hole 19 is formed at the bottom of each air passage 18, each limiting boss 27 is rotatably arranged in the corresponding step mounting hole 19, and a guide exhaust hole 28 which is vertically arranged is formed in the middle of each limiting boss 27; the two sealing rods 29 are coaxially and movably arranged in the corresponding guide exhaust holes 28, a sealing boss 30 is formed at the top of each sealing rod 29, a first rubber coating layer 31 is formed at the top of each sealing boss 30, the top of each first rubber coating layer 31 is abutted against the top of the corresponding step mounting hole 19, the two sealing return springs 32 are movably sleeved at the upper end of the corresponding sealing rod 29, the bottom of each sealing return spring 32 is abutted against the top of the corresponding limiting boss 27, and the top of each sealing return spring is abutted against the bottom of the corresponding sealing boss 30; the lower pressing plate 33 is fixedly arranged at the bottoms of the two sealing rods 29 in a horizontal state, and a transmission avoiding hole 34 capable of allowing the transmission shaft 35 to penetrate is formed in the middle of the lower pressing plate 33.
The one end and the center of air flue 18 dodge the hole 17 and link to each other, the center dodges hole 17 top and links to each other with adsorption disc 21, the bottom is sealed with fixing bolt 24 through sealing washer 25, spacing boss 27 is fixed to be set up in step mounting hole 19, the air in the adsorption disc 21 only can be discharged in the guide exhaust hole 28 through air flue 18, spacing boss 27 is passed at the top of sealing rod 29 and sets up in step mounting hole 19, first rubber coating layer 31 at sealing rod 29 top offsets with step mounting hole 19 top, and seal air flue 18, sealed boss 30 bottom is provided with sealed reset spring 32, sealed reset spring 32's both ends offset with sealed boss 30 and spacing boss 27 respectively, under the condition that seal assembly is not influenced by external force, air flue 18 is sealed under sealed reset spring 32's effect to first rubber coating layer 31.
Further, the feeding station 4 further comprises a feeding assembly 37, a double-shaft moving mechanism 38 and a sucking and holding feeding mechanism 39, and the first downward-pressing exhaust mechanism 12 comprises: the extension seat 40 is fixedly arranged at the top of the workbench 1 in a vertical state, the extension seat 40 is arranged at the outer side of the turntable station 2, and a guide accommodating groove 41 which is arranged in a vertical state is formed at the top of the extension seat 40; an L-shaped extension rod 42, one side of which is coaxially and movably disposed in the guide accommodating groove 41 in a vertical state, and the other side of which penetrates through the guide accommodating groove 41 in a horizontal state to abut against the top of the lower pressing plate 33; the extension reset spring 43 is movably sleeved on the vertical side of the L-shaped extension rod 42 in a vertical state, the top of the extension reset spring 43 is abutted against the bottom of the horizontal side of the L-shaped extension rod 42, and the bottom of the extension reset spring is abutted against the bottom of the guide accommodating groove 41; the anti-disengaging top cover 44 is fixedly arranged at the top of the extension seat 40 in a horizontal state, and the bottom of the anti-disengaging top cover 44 is abutted to the top of the L-shaped extension rod 42.
Further, a downward pressing guide seat 45 is fixedly arranged at the top of the workbench 1 in a vertical state, and a guide chute 46 arranged in a vertical state is formed at the top of the downward pressing guide seat 45; a downward-pressing sliding rod 47 which is movably arranged in the guide sliding chute 46 in a vertical state, a mounting column 48 which is arranged in a vertical state is formed at the upper end of the downward-pressing sliding rod 47, and a side guide hole 49 which is arranged in a horizontal state is formed on the side wall of the mounting column 48; the downward-pressing reset spring 50 is movably sleeved at the lower end of the downward-pressing slide rod 47 in a vertical state, the top of the downward-pressing reset spring 50 is abutted against the bottom of the mounting column 48, and the bottom of the downward-pressing reset spring is abutted against the bottom of the guide chute 46; the elastic pressure lever 51 is movably arranged at the top of the L-shaped extension rod 42 in a horizontal state, an arc-shaped guide surface 53 is formed at the top of one end, close to the L-shaped extension rod 42, of the elastic pressure lever 51, a guide column 52 which is arranged in a horizontal state is formed at one end, far away from the L-shaped extension rod 42, of the elastic pressure lever 51, and the guide column 52 coaxially penetrates through the side guide hole 49 and outputs in the direction far away from the L-shaped extension rod 42; a side return spring 54 movably sleeved on the guide post 52, wherein one end of the side return spring 54 is abutted against the elastic pressure rod 51, and the other end is abutted against the lower pressing slide rod 47; the upper sliding block 55 is fixedly arranged on one end of the guide post 52 penetrating through the lower pressing slide rod 47 in a vertical state, and a lower pressing inclined surface 56 is formed at one side of the bottom of the upper sliding block 55 close to the lower pressing guide seat 45; the lower wedge block 57 is fixedly arranged on one side, away from the L-shaped extension rod 42, of the lower pressing guide column 52 in a vertical state, and a groove 58 matched with the lower pressing inclined surface 56 is formed at the top of the lower wedge block 57; the jacking rod 59 is fixedly arranged at the top of the downward pressing slide rod 47 in a horizontal state; and a lower pressing rod 60 which is fixedly arranged on the suction and feeding mechanism 39 in a horizontal state, wherein the lower pressing rod 60 can be contacted with the top of the jacking rod 59 along with the descending of the suction and feeding mechanism 39.
One end of an elastic pressure rod 51 is movably connected with a lower pressure slide rod 47, the bottom of the other end of the elastic pressure rod 51 is abutted against an L-shaped extension rod 42, the top of the lower pressure slide rod 47 is fixedly connected with a jacking rod 59, when the jacking rod 59 is pressed downwards by a lower pressure rod 60, the elastic pressure rod 51 presses downwards, the L-shaped extension rod 42 drives a lower pressure plate 33 to press downwards, the sealed exhaust assembly 26 is ventilated, one end of the elastic pressure rod 51 is fixedly connected with an upper slide block 55, the upper slide block 55 is matched with a lower wedge block 57 fixedly arranged on a lower pressure guide seat 45, when the elastic pressure rod 51 slides downwards, the upper slide block 55 moves outwards under the action of the lower wedge block 57, the elastic pressure rod 51 gradually moves away from the top of the L-shaped extension rod 42, when the elastic pressure rod 51 moves away from the position right above the circle center of the horizontal side of the L-shaped extension rod 42, the L-shaped extension rod 42 moves upwards under the action of an extension return spring 43, the sealed exhaust assembly 26 seals the air channel 18, and when the lower pressure rod 60 does not press the jacking rod 59 again, the lower pressure rod 47 moves upwards under the action of the return spring 50, and in the process, the extension rod 51 moves to the position above the L-shaped extension rod 42 again.
Further, upset station 6 includes unipolar elevating system 61, still includes centre gripping tilting mechanism 62, and the one end that two clamping jaws 63 of centre gripping tilting mechanism 62 and carborundum crystal contact all formed with second rubber coating 64.
The second rubber coating layer 64 is formed at a position where the holding jaw 63 comes into contact with the silicon carbide crystal, and can prevent the silicon carbide crystal from being damaged while being gripped.
Further, lateral margin grinding station 8 includes lateral margin grinding mechanism 65, still includes: the rotating motor 66 is fixedly arranged at the bottom of the workbench 1 in a vertical state, and the output end of the rotating motor 66 penetrates through the workbench 1 in a vertical state and is output upwards; and the second transmission gear 67 is fixedly arranged at the top of the output end of the rotating motor 66 in a horizontal state, and the second transmission gear 67 can be meshed with the first transmission gear 36.
When the side edge grinding mechanism 65 grinds the silicon carbide crystal, the second transmission gear 67 drives the silicon carbide crystal to rotate through the first transmission gear 36, and the peripheral side of the silicon carbide crystal is uniformly ground.
The silicon carbide crystal is fed to the non-resistance sucker clamp 3 from the feeding station 4, in the process of placing the silicon carbide crystal on the non-resistance sucker clamp 3, the jacking rod 59 is pressed downwards by the pressing rod 60, the elastic pressing rod 51 is pressed downwards, the L-shaped extension rod 42 drives the pressing plate 33 to be pressed downwards, the sealed exhaust assembly 26 is ventilated, the upper sliding block 55 moves outwards under the action of the lower wedge block 57, the elastic pressing rod 51 gradually moves away from the top of the L-shaped extension rod 42, air in the non-resistance sucker clamp 3 is exhausted from the sealed exhaust assembly 26, the pressure in the non-resistance sucker clamp 3 cannot change, the stress of the silicon carbide crystal is extremely small, after the elastic pressing rod 51 moves away from the position right above the center of a circle on the horizontal side of the L-shaped extension rod 42, the L-shaped extension rod 42 moves upwards under the action of the extending return spring 43, the sealed exhaust assembly 26 seals the air passage 18, the air amount in the non-resistance sucker clamp 3 is constant, and the silicon carbide crystal is adsorbed by the non-resistance sucker clamp 3, the turntable station 2 drives the silicon carbide crystal to rotate to a first grinding station 5, the first grinding station 5 grinds the upper surface of the silicon carbide crystal, then the turntable station 2 drives the silicon carbide crystal to rotate to a turnover station 6, the silicon carbide crystal is turned over by the turnover station 6, a second downward pressing exhaust mechanism 13 works in the period, before a workpiece is taken, the second downward pressing exhaust mechanism 13 drives a sealing exhaust assembly 26 to ventilate, the non-resistance sucker clamp 3 does not adsorb the silicon carbide crystal any more, the silicon carbide crystal is taken down and turned over, then the silicon carbide crystal is placed on the non-resistance sucker clamp 3 again, the principle of an upper workpiece is the same as that of the first downward pressing exhaust mechanism 12, the other surface of the silicon carbide is ground by rotating to a second grinding station 7, and after grinding is finished, the turntable station 2 drives the silicon carbide crystal to rotate to a side edge grinding station 8 to grind the side edge of the silicon carbide crystal, and when all polishing processes are finished, the turntable station 2 drives the silicon carbide crystal to rotate to the grooving station 9 for notch groove processing, the silicon carbide crystal rotates to the blanking station 10 for blanking after the processing is finished, the non-resistance sucker clamp 3 after the blanking is detected by the detection station 11, if the workpiece is taken down, the non-resistance sucker clamp 3 continues to rotate to the next station for continuous work, and if the workpiece is not taken down, the whole device stops working.
The above examples, which are intended to represent only one or more embodiments of the present invention, are described in greater detail and with greater particularity, and are not to be construed as limiting the scope of the invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (8)
1. The utility model provides a carborundum crystal plastic all-in-one, includes workstation (1) and sets up carousel station (2) on workstation (1), be equipped with on workstation (1) along the circumferencial direction of carousel station (2) material loading station (4) that arrange in proper order, first polishing station (5), upset station (6), second polish station (7), lateral margin polish station (8), grooving station (9), unloading station (10), detect station (11), a serial communication port, be equipped with a plurality of non-resistance sucking disc anchor clamps (3) that are used for adsorbing fixed carborundum crystal along circumferencial direction evenly distributed on carousel station (2), non-resistance sucking disc anchor clamps (3) are including a sealed exhaust assembly (26) that is used for controlling the suction of sucking disc, material loading station (4) are including one and are used for making sealed exhaust assembly (26) gassing first exhaust mechanism (12) push down exhaust mechanism (12), upset station (6) are including one with first exhaust mechanism (12) structure and function the same second push down exhaust mechanism (13), unloading station (10) are including one and first exhaust mechanism (12) push down the same exhaust mechanism and exhaust mechanism (14).
2. A silicon carbide crystal trimming machine according to claim 1 wherein each non-resistance chuck clamp (3) further comprises:
the sucker mounting seats (16) are movably arranged at the top of the turntable station (2), a plurality of limiting step holes (15) are uniformly distributed at the top of the turntable station (2) along the circumferential direction, and each sucker mounting seat (16) is coaxially and movably arranged in the corresponding limiting step hole (15);
the sucker component (20) is fixedly arranged at the top of the sucker mounting seat (16), and the top of the sucker component (20) is adsorbed with the bottom surface of the silicon carbide crystal;
the transmission shaft (35) is fixedly arranged at the bottom of the sucker mounting seat (16) in a vertical state, and the top of the transmission shaft (35) is fixedly connected with the bottom of the sucker mounting seat (16);
and the first transmission gear (36) is fixedly arranged at the bottom of the transmission shaft (35) in a horizontal state.
3. A silicon carbide crystal trimming machine according to claim 2 wherein the suction cup assembly (20) comprises:
the adsorption disc (21) is horizontally arranged at the top of the sucker mounting seat (16), and the bottom of the adsorption disc (21) is abutted against the top of the sucker mounting seat (16);
the vacuum suction cup comprises a hollow exhaust shaft (22) which is arranged at the center of an adsorption disc (21) in a vertical state, a center avoiding hole (17) which is arranged in a vertical state is formed at the center of a suction cup mounting seat (16), the top of the hollow exhaust shaft (22) is abutted against the top of the adsorption disc (21), the bottom of the hollow exhaust shaft (22) penetrates through the adsorption disc (21) and is arranged at the center avoiding hole (17), and an air release hole (23) which is arranged in a horizontal state is formed in the middle of the hollow exhaust shaft (22);
fixing bolt (24), it sets up in sucking disc mount pad (16) bottom to be vertical state, and fixing bolt (24) bottom is inconsistent with sucking disc mount pad (16) bottom, and fixing bolt (24) upper end sets up in the hole (17) is dodged in the center and connects soon with hollow exhaust shaft (22) bottom, is provided with one between fixing bolt (24) and sucking disc mount pad (16) and is sealing washer (25) that the horizontality set up.
4. A silicon carbide crystal trimming integrated machine according to claim 3 wherein the seal vent assembly (26) comprises:
the two limiting bosses (27) are vertically and rotatably arranged at the bottom of the sucker mounting seat (16), two air passages (18) which are symmetrically arranged are formed at the bottom of the sucker mounting seat (16), one end of each air passage (18) is communicated with the center avoiding hole (17), the other end of each air passage (18) is communicated with the outside through the bottom of the sucker mounting seat (16), a step mounting hole (19) is formed at the bottom of each air passage (18), each limiting boss (27) is rotatably arranged in the corresponding step mounting hole (19), and a guide exhaust hole (28) which is vertically arranged is formed in the middle of each limiting boss (27);
two sealing rods (29) are coaxially and movably arranged in the corresponding guide exhaust holes (28), the top of each sealing rod (29) is provided with a sealing boss (30), the top of each sealing boss (30) is provided with a first rubber coating layer (31), the top of each first rubber coating layer (31) is abutted against the top of the corresponding step mounting hole (19),
the two sealing return springs (32) are movably sleeved at the upper ends of the corresponding sealing rods (29), the bottom of each sealing return spring (32) is abutted against the top of the corresponding limiting boss (27), and the top of each sealing return spring is abutted against the bottom of the corresponding sealing boss (30);
the lower pressing plate (33) is fixedly arranged at the bottoms of the two sealing rods (29) in a horizontal state, and a transmission avoiding hole (34) which can allow the transmission shaft (35) to penetrate is formed in the middle of the lower pressing plate (33).
5. A silicon carbide crystal shaping all-in-one machine as claimed in claim 4, wherein the feeding station (4) further comprises a feeding component (37), a double-shaft moving mechanism (38) and a suction feeding mechanism (39), and the first downward-pressing exhaust mechanism (12) comprises:
the extension seat (40) is fixedly arranged at the top of the workbench (1) in a vertical state, the extension seat (40) is arranged at the outer side of the turntable station (2), and a guide accommodating groove (41) which is arranged in a vertical state is formed at the top of the extension seat (40);
the L-shaped extension rod (42) is coaxially and movably arranged in the guide accommodating groove (41) in a vertical state at one side, and penetrates through the guide accommodating groove (41) to be abutted against the top of the lower pressing plate (33) in a horizontal state at the other side;
the extension reset spring (43) is movably sleeved on one vertical side of the L-shaped extension rod (42) in a vertical state, the top of the extension reset spring (43) is abutted against the bottom of one horizontal side of the L-shaped extension rod (42), and the bottom of the extension reset spring is abutted against the bottom of the guide accommodating groove (41);
anticreep top cap (44), be the fixed setting in extension seat (40) top of horizontality, anticreep top cap (44) bottom is inconsistent with L type extension rod (42) top.
6. The silicon carbide crystal shaping machine as defined in claim 5,
the pressing guide seat (45) is fixedly arranged at the top of the workbench (1) in a vertical state, and a guide sliding chute (46) which is arranged in a vertical state is formed at the top of the pressing guide seat (45);
the lower pressing slide rod (47) is movably arranged in the guide sliding groove (46) in a vertical state, the upper end of the lower pressing slide rod (47) is formed with a mounting column (48) which is arranged in a vertical state, and the side wall of the mounting column (48) is formed with a side guide hole (49) which is arranged in a horizontal state;
the downward-pressing reset spring (50) is movably sleeved at the lower end of the downward-pressing sliding rod (47) in a vertical state, the top of the downward-pressing reset spring (50) is abutted against the bottom of the mounting column (48), and the bottom of the downward-pressing reset spring is abutted against the bottom of the guide sliding chute (46);
the elastic pressure lever (51) is movably arranged at the top of the L-shaped extension rod (42) in a horizontal state, an arc-shaped guide surface (53) is formed at the top of one end, close to the L-shaped extension rod (42), of the elastic pressure lever (51), a guide column (52) which is arranged in a horizontal state is formed at one end, far away from the L-shaped extension rod (42), of the elastic pressure lever (51), and the guide column (52) coaxially penetrates through the side guide hole (49) and outputs the guide column in the direction far away from the L-shaped extension rod (42);
the side return spring (54) is movably sleeved on the guide post (52), one end of the side return spring (54) is abutted against the elastic pressure rod (51), and the other end of the side return spring is abutted against the lower pressing slide rod (47);
the upper sliding block (55) is fixedly arranged on one end, penetrating through the lower pressing sliding rod (47), of the guide column (52) in a vertical state, and a lower pressing inclined plane (56) is formed at one side, close to the lower pressing guide seat (45), of the bottom of the upper sliding block (55);
the lower wedge block (57) is fixedly arranged on one side, away from the L-shaped extension rod (42), of the lower pressing guide column (52) in a vertical state, and a groove (58) matched with the lower pressing inclined surface (56) is formed in the top of the lower wedge block (57);
the jacking rod (59) is fixedly arranged at the top of the downward pressing sliding rod (47) in a horizontal state;
and the lower pressing rod (60) is fixedly arranged on the sucking and holding feeding mechanism (39) in a horizontal state, and the lower pressing rod (60) can be abutted against the top of the jacking rod (59) along with the descending of the sucking and holding feeding mechanism (39).
7. A silicon carbide crystal shaping all-in-one machine according to claim 6, wherein the overturning station (6) comprises a single-shaft lifting mechanism (61), and the overturning station (6) further comprises a clamping and overturning mechanism (62), and a second rubber coating (64) is formed at one end of each of two clamping jaws (63) of the clamping and overturning mechanism (62) which is in contact with the silicon carbide crystal.
8. A silicon carbide crystal trimming integrated machine according to claim 2 wherein the side edge grinding station (8) includes a side edge grinding mechanism (65), wherein the side edge grinding station (8) further comprises:
the rotating motor (66) is fixedly arranged at the bottom of the workbench (1) in a vertical state, and the output end of the rotating motor (66) penetrates through the workbench (1) in a vertical state and is output upwards;
the second transmission gear (67) is fixedly arranged at the top of the output end of the rotating motor (66) in a horizontal state, and the second transmission gear (67) can be meshed with the first transmission gear (36).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211476261.1A CN115741390B (en) | 2022-11-23 | 2022-11-23 | Silicon carbide crystal shaping all-in-one |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211476261.1A CN115741390B (en) | 2022-11-23 | 2022-11-23 | Silicon carbide crystal shaping all-in-one |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115741390A true CN115741390A (en) | 2023-03-07 |
| CN115741390B CN115741390B (en) | 2023-05-09 |
Family
ID=85336406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211476261.1A Active CN115741390B (en) | 2022-11-23 | 2022-11-23 | Silicon carbide crystal shaping all-in-one |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115741390B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115945983A (en) * | 2023-03-13 | 2023-04-11 | 长盛(廊坊)科技有限公司 | Carbon fiber material surface treatment equipment and treatment method thereof |
| CN116442070A (en) * | 2023-06-19 | 2023-07-18 | 泉州通维科技有限责任公司 | Surface grinding machine for fan-shaped gunpowder block |
| CN117340167A (en) * | 2023-12-04 | 2024-01-05 | 中铧智能科技(山东)有限公司 | Cable type steel wire ring core ring looping and welding integrated device |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100314078A1 (en) * | 2009-06-02 | 2010-12-16 | Kuo-Len Lin | Cooler with ground heated plane and grinding method and apparatus thereof |
| US20110223835A1 (en) * | 2010-03-12 | 2011-09-15 | Duescher Wayne O | Three-point spindle-supported floating abrasive platen |
| CN206137904U (en) * | 2016-08-12 | 2017-05-03 | 广东中天电器有限公司 | Electric kettle |
| CN108223825A (en) * | 2018-02-23 | 2018-06-29 | 孙艳芬 | Chemical pipeline plug valve |
| CN209922081U (en) * | 2019-05-27 | 2020-01-10 | 四川鑫福石油化工设备制造有限责任公司 | A cubic vapor recovery system integration processing apparatus for filling station |
| CN210046570U (en) * | 2019-06-04 | 2020-02-11 | 深圳市浩洋汇丰技术有限公司 | Vacuum adsorption tool convenient to installation |
| CN211922912U (en) * | 2019-12-30 | 2020-11-13 | 盐城顺卓金属制品有限公司 | Corrosion-resistant explosion-proof floor drain convenient to maintenance |
| CN112894626A (en) * | 2021-02-03 | 2021-06-04 | 南京寻文梦商贸有限公司 | Hardware polishing is with utilizing energy-conserving cooling module of compression structure self-bleeding |
| CN113579955A (en) * | 2021-08-12 | 2021-11-02 | 安吉圆磨机械科技股份有限公司 | Double-station silicon carbide crystal shaping all-in-one machine |
| CN115194602A (en) * | 2022-07-14 | 2022-10-18 | 深圳市楠轩光电科技有限公司 | Full-automatic polishing device for optical lens processing |
| CN115306713A (en) * | 2022-09-06 | 2022-11-08 | 盐城市建龙机电设备制造有限公司 | Novel high-efficient pressure boost screw compressor |
-
2022
- 2022-11-23 CN CN202211476261.1A patent/CN115741390B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100314078A1 (en) * | 2009-06-02 | 2010-12-16 | Kuo-Len Lin | Cooler with ground heated plane and grinding method and apparatus thereof |
| US20110223835A1 (en) * | 2010-03-12 | 2011-09-15 | Duescher Wayne O | Three-point spindle-supported floating abrasive platen |
| CN206137904U (en) * | 2016-08-12 | 2017-05-03 | 广东中天电器有限公司 | Electric kettle |
| CN108223825A (en) * | 2018-02-23 | 2018-06-29 | 孙艳芬 | Chemical pipeline plug valve |
| CN209922081U (en) * | 2019-05-27 | 2020-01-10 | 四川鑫福石油化工设备制造有限责任公司 | A cubic vapor recovery system integration processing apparatus for filling station |
| CN210046570U (en) * | 2019-06-04 | 2020-02-11 | 深圳市浩洋汇丰技术有限公司 | Vacuum adsorption tool convenient to installation |
| CN211922912U (en) * | 2019-12-30 | 2020-11-13 | 盐城顺卓金属制品有限公司 | Corrosion-resistant explosion-proof floor drain convenient to maintenance |
| CN112894626A (en) * | 2021-02-03 | 2021-06-04 | 南京寻文梦商贸有限公司 | Hardware polishing is with utilizing energy-conserving cooling module of compression structure self-bleeding |
| CN113579955A (en) * | 2021-08-12 | 2021-11-02 | 安吉圆磨机械科技股份有限公司 | Double-station silicon carbide crystal shaping all-in-one machine |
| CN115194602A (en) * | 2022-07-14 | 2022-10-18 | 深圳市楠轩光电科技有限公司 | Full-automatic polishing device for optical lens processing |
| CN115306713A (en) * | 2022-09-06 | 2022-11-08 | 盐城市建龙机电设备制造有限公司 | Novel high-efficient pressure boost screw compressor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115945983A (en) * | 2023-03-13 | 2023-04-11 | 长盛(廊坊)科技有限公司 | Carbon fiber material surface treatment equipment and treatment method thereof |
| CN116442070A (en) * | 2023-06-19 | 2023-07-18 | 泉州通维科技有限责任公司 | Surface grinding machine for fan-shaped gunpowder block |
| CN116442070B (en) * | 2023-06-19 | 2023-08-29 | 泉州通维科技有限责任公司 | Surface grinding machine for fan-shaped gunpowder block |
| CN117340167A (en) * | 2023-12-04 | 2024-01-05 | 中铧智能科技(山东)有限公司 | Cable type steel wire ring core ring looping and welding integrated device |
| CN117340167B (en) * | 2023-12-04 | 2024-02-27 | 中铧智能科技(山东)有限公司 | Cable type steel wire ring core ring looping and welding integrated device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115741390B (en) | 2023-05-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN115741390A (en) | Silicon carbide crystal shaping all-in-one machine | |
| US11376702B2 (en) | Integrated rotary cutting tool manufacturing device and method | |
| CN115194602B (en) | Full-automatic polishing device for optical lens processing | |
| CN107511726B (en) | Automatic change equipment of grinding blank | |
| JP2014124732A (en) | Work clamp method, work clamp device, work plane grinding method and work plane grinder | |
| CN114420527B (en) | Sucking disc mechanism and installing device | |
| CN111113219A (en) | Cell-phone shell revolving stage numerical control grinder | |
| CN107511490A (en) | A kind of lathe | |
| CN113500477A (en) | Double-side machining process for annular workpiece for automobile motor | |
| CN208246581U (en) | A kind of clamping device of five travelling wheelhead roll grinders | |
| CN110524380B (en) | Intelligent automatic grinding and polishing production line | |
| CN217372326U (en) | Laser chip de-individuation equipment | |
| CN115465505B (en) | Full-automatic attaching equipment and method for convex lens protection film | |
| CN216830234U (en) | Silicon chip edge chamfering and polishing device with good stability | |
| CN212310874U (en) | Center-sharing clamping tool | |
| CN211277845U (en) | Cell-phone shell revolving stage numerical control grinder | |
| CN210678195U (en) | Intelligent automatic grinding and polishing production line | |
| CN211890229U (en) | Polishing workstation | |
| CN219066778U (en) | High-precision silicon wafer carrying disc | |
| CN217017259U (en) | Spin coating process gluing clamp | |
| CN217529986U (en) | Automobile part machining machine tool with double machining stations | |
| CN218904473U (en) | Multi-point type sealing strip-free vacuum chuck | |
| CN218053361U (en) | Silicon chip chamfer sucking disc and clamping device is used in sucking disc processing | |
| CN218333739U (en) | Multi-channel partition high-precision porous ceramic sucker | |
| CN213224987U (en) | Indexing disc module for assembling socket screw |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |