CN115453737A - Optical system of microscope - Google Patents
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- CN115453737A CN115453737A CN202211402004.3A CN202211402004A CN115453737A CN 115453737 A CN115453737 A CN 115453737A CN 202211402004 A CN202211402004 A CN 202211402004A CN 115453737 A CN115453737 A CN 115453737A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 97
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- 238000013461 design Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000009434 installation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
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- 238000004458 analytical method Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/248—Base structure objective (or ocular) turrets
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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Abstract
The invention provides an optical system of a microscope, which changes the propagation path of light rays through a reflector in an objective converter, thereby breaking through the space layout limitation of optical accessories, increasing the optical accessories simply and easily, being beneficial to the expansion of the optical system, expanding the application range of the microscope by changing the erection mode of the optical accessories, reducing the height of the whole microscope, increasing the optical accessories according to the requirements on sites with height limitation caused by the conditions of a machine station, arranging the optical accessories on a plane and expanding the optical accessories, and avoiding the limitation of the height of the machine station.
Description
Technical Field
The invention relates to the field of microscopes, in particular to an optical system of a microscope.
Background
The optical system of a conventional optical microscope is a straight optical path, as indicated by the arrow in fig. 1. The arrangement mode of the light path is a straight line from top to bottom, so when accessories such as various light sources, filters, concave-convex lenses, cameras and the like need to be added to deal with various detected objects, the light path is necessarily developed beside the detected objects, and the detected objects are suspended like branches of trees and are difficult to fix.
Therefore, a new optical system which is easy to add optical accessories and easy to expand is needed to expand the scope of application of the microscope.
Disclosure of Invention
The invention aims to provide an optical system of a microscope, which changes the propagation path of light rays through a reflector in an objective converter, thereby breaking through the space layout limitation of optical accessories, increasing the number of the optical accessories, being simple and easy, being beneficial to the expansion of the optical system and expanding the application range of the microscope through changing the erection mode of the optical accessories.
The embodiment of the invention provides an optical system of a microscope, which comprises:
an objective lens changer and an observation device.
And taking the plane of the surface of the object to be measured as a reference plane.
The main body of the objective lens changer is a hollow cylindrical body. The axis of rotation of the hollow cylindrical body is parallel to the reference plane. The side surface of the hollow cylindrical body is provided with N objective lenses which are distributed in a radial shape, and N is more than or equal to 1. The hollow cylindrical body can change the orientation of each objective lens by rotation. When any one of the objective lenses is aligned with the surface of the object to be measured and is vertical to the reference surface, the objective lens is the working objective lens. The hollow columnar body is provided with a reflector in the hollow portion. The position of the mirror does not rotate with the rotation of the hollow cylinder. The projection of the working objective on the reference plane is superposed with the projection of the mirror on the reference plane.
The reflected light path of the reflected light obtained after reflection and the propagation path of the reflected light after the direction of the reflected light is changed are taken as image paths. The observation device is on the image path.
The image on the surface of the object to be measured is changed in magnification by the working objective lens and then reflected by the reflector to reach the observation device along the image path.
In some embodiments, the present invention provides an optical system of a microscope, the optical system further comprising:
and a semi-reflective optical path.
This semi-reflective way includes: a half mirror and a half mirror assembly.
The half-reflecting mirror is located on the image path. The coated surface of the half-reflecting mirror and the image path form an included angle required by the half-reflecting mirror.
The half mirror has one or more of a plurality of half mirror portions and is opposed to the coated surface of the half mirror.
In some embodiments, the present invention provides an optical system for a microscope:
at least one of the semi-counter fittings is a light source assembly.
In some embodiments, the present invention provides an optical system for a microscope:
the semi-reflective optical path also includes a light meter. The illuminometer is used for measuring the brightness of the light source component.
In some embodiments, the present invention provides an optical system for a microscope:
the brightness of the light source component can be adjusted through a program after being fed back by the illuminometer.
The adjustment comprises inching adjustment and adjustment to corresponding preset values according to different surfaces of the object to be measured.
In some embodiments, the present invention provides an optical system for a microscope:
at least one of the semi-retro-fit members is the viewing device.
In some embodiments, the present invention provides an optical system for a microscope:
at least one of the semi-reflective fittings is another of the semi-reflective paths. A plurality of the half mirror paths are combined in a nested manner.
In some embodiments, the present invention provides an optical system of a microscope:
the angle of the mirror is 45 °.
In some embodiments, the present invention provides an optical system of a microscope:
this rotation of the objective lens changer is achieved by a rotating motor.
In some embodiments, the present invention provides an optical system of a microscope, the optical system further comprising:
and the position sensor assembly is used for positioning the position of the objective lens converter.
In some embodiments, the present invention provides an optical system of a microscope, the optical system further comprising:
and a positioning bead for fixing the position of the objective lens changer.
The invention has the beneficial effects that:
1. the overall microscope height can be reduced. The reflector is skillfully arranged in the objective converter, the straight light path is turned, and the angle of the light path is changed, so that the erection mode of the microscope is changed, and particularly in some fields with height limited due to the conditions of a machine table, optical accessories can be added according to requirements and arranged on a plane and expanded, the integral height of the microscope is favorably reduced, and the height of the machine table is not limited.
2. When the number of optical accessories is large, the structural design of the optical system is simplified. The light path of the original microscope is a straight line, when optical accessories are added, the microscope is necessarily developed beside, at the moment, the microscope can be suspended like branches of trees and is not well fixed, the design is difficult due to a huge optical framework, or a machine frame is required to be disassembled into two or even more types. The optical accessories are rotated to a plane and expanded by changing the angle of the light path, so that the convenience of design and adjustment of various optical accessories is effectively improved.
3. And (4) feedback adjustment of the brightness value. After the brightness of the light source assembly is fed back by the illuminometer, the brightness of the light source assembly can be automatically adjusted through a program, namely different preset values are set on the surfaces of different objects to be detected in the pre-programmed program, and when the brightness value fed back by the illuminometer does not accord with the preset values in use, the brightness of the light source assembly is automatically adjusted by the program until the brightness value fed back is the corresponding preset value.
4. Automation of objective lens switching. The rotation of the objective lens converter is automatically upgraded through the rotating motor, the automation degree of the microscope is improved, and the conversion speed is higher.
5. And (5) shock-proof treatment of dynamic image capture. Through increasing the location pearl, reduce because of the small shake of the objective that vibrations lead to, the image when letting the camera developments get for instance is more clear, all has good effect under the scene of manual rotation or motor rotation. In addition, when the machine platform is not electrified due to maintenance, and the objective lens cannot be maintained in a locked state, the positioning beads can be used as basic positioning.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed to be used in the description of the embodiments or the prior art will be briefly described below. However, it should be understood by those skilled in the art that the drawings in the following description are illustrative of some of the present application only and are not limiting on the scope thereof.
Fig. 1 is a schematic structural diagram of an embodiment of an optical system of a conventional microscope.
Fig. 2 is a schematic structural diagram of an embodiment of an optical system of a microscope according to the present invention.
Fig. 3 is a schematic structural diagram of an objective lens changer according to an embodiment of an optical system of a microscope of the present invention.
Fig. 4 is a top view and a cross-sectional view of an embodiment of the optical system of a microscope of the present invention.
Fig. 5 is a schematic diagram of an optical path of a microscope with a 45 ° mirror according to an embodiment of the optical system of the microscope of the present invention.
Fig. 6 is a schematic diagram of an optical path of a microscope with a mirror at 60 ° according to an embodiment of the optical system of the microscope of the present invention.
Fig. 7 is a schematic structural diagram of an optical system of a microscope according to an embodiment of the present invention.
Fig. 8 is a schematic structural diagram of an optical system of a microscope according to an embodiment of the present invention.
Fig. 9 is a schematic structural diagram of an optical system of a microscope according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It should be understood by those skilled in the art that the embodiments described are a part of the embodiments of the present invention, and not all embodiments. Based on the embodiments in this application, a person skilled in the art can make any suitable modification or variation to obtain all other embodiments.
The embodiment of the invention provides an optical system of a microscope, which comprises:
an objective lens changer 6 and an observation device 1.
And taking the plane of the surface of the object to be measured as a reference plane.
The main body of the objective changer 6 is a hollow cylinder. The rotation axis of the hollow cylindrical body is parallel to the reference plane. N objectives 5,N which are distributed in a radial shape are arranged on the side surface of the hollow cylindrical body, and the number of the objectives is not less than 1. The hollow cylindrical body can change the orientation of each of the objective lenses 5 by rotation. When any one of the objective lenses 5 is aligned with the surface of the object to be measured and is perpendicular to the reference plane, the objective lens is the working objective lens 9. The hollow columnar body has a mirror 4 disposed therein. The position of the mirror 4 does not rotate with the rotation of the hollow cylinder. The projection of the working objective 9 onto the reference plane overlaps with the projection of the mirror 4 onto the reference plane.
The reflected light path of the reflected light obtained by reaching the reflector 4 along the axis of the working objective lens 9 after reflection and the propagation path of the reflected light after the direction of the reflected light is changed are taken as image paths. The observation device 1 is on the image path.
The image on the surface of the object to be measured is changed in magnification by the objective lens 9, and then reflected by the reflector 4 to reach the observation device 1 along the image path.
In the present embodiment, as shown in fig. 2, the system includes the objective lens changer 6 and the observation device 1. The objective lens changer 6 is used to switch different objective lenses 5 or adjust the position of the objective lens 5 to facilitate placing or removing the object to be tested. The observation device 1 includes an eyepiece for direct observation by the naked eye of a person and a camera for image acquisition. The conventional camera used today is an image receptor using CCD/CMOS photo-sensitive devices, it being understood that other image receptors, as technology advances, can be adapted to the system.
For convenience of description, a plane on which the surface of the object to be measured is located is taken as the reference plane. When the surface of the object to be measured is not a plane, the optimal measurement height is determined, and the plane where the measurement height is located is taken as the reference plane. As shown in fig. 2, the main body of the objective lens changer 6 is the hollow cylindrical body. The outer contour of the hollow cylinder can be a cylinder or a non-cylinder, depending on the measurement requirements. The outline of the cylinder is used, and the circle center is taken as a rotation point, so that the design and the positioning are convenient. The non-cylindrical object or the non-circular center of the rotation point can be used, so that some special requirements can be met, for example, after the objective lens 5 with different lengths is arranged, the distance from the outer side of the objective lens 5 to the rotation point can be kept relatively uniform, or special conditions for placing or taking away the object to be tested can be met conveniently. The rotation axis of the hollow cylinder is parallel to the reference plane, which simplifies the design, such as facilitating the objective lens 5 to be held at a vertical angle to the surface of the object after rotation, and also facilitates the calculation of the reflection path from the mirror 4 in the objective lens changer 6. One or more of the objective lenses 5 are mounted on the side of the hollow cylindrical body and radially distributed to avoid mutual interference, as shown in fig. 3. The objective lens changer 6 of the prior art is rotated on a curved surface, and the number of the objective lenses 5 that can be mounted on the curved surface is limited, and it is very difficult to increase the design. The objective lens converter 6 in this embodiment is rotated on a plane, and when the objective lens 5 with different magnifications needs to be additionally installed, the objective lens 5 with different magnifications can be additionally arranged on the side surface of the hollow cylindrical body only by enlarging the cross section of the hollow cylindrical body. The hollow cylindrical body can change the orientation of each of the objective lenses 5 by rotation, so that the objective lenses 5 can be switched, or sufficient space is made below the objective lens changer 6 for handling the object to be measured by moving the position of the objective lenses 5. As shown in fig. 3, the working objective 9 is the objective 5 that is working for the microscope, and the image taken by the working objective 9 will be finally observed through the transmission of the system. When any one of the objective lenses 5 is aligned with the surface of the object to be measured and is perpendicular to the reference plane, the objective lens 5 obliquely aligned with the object to be measured is eliminated, namely the working objective lens 9. Since only the image collected by the working objective lens 9 can be obtained by the system through the reflection of the reflecting mirror 4, the other objective lenses 5 cannot transmit the collected image due to different direction angles even if the objective lenses are aligned with the object to be measured. The hollow part of the hollow cylindrical body is a channel for light propagation, the hollow part is provided with a reflector 4, the position of the reflector 4 does not rotate along with the rotation of the hollow cylindrical body, and therefore the working objective lens 9 can be ensured to always transmit the taken image out through the reflector 4. The number of the reflecting mirrors 4, one, can satisfy the functional requirements of the present embodiment. More than two mirrors 4 can also meet the functional requirements, but the design becomes more complicated, but the function remains the same. The projection of the working objective 9 onto the reference surface is superimposed on the projection of the mirror 4 onto the reference surface, ensuring that the image captured by the working objective 9 can be transmitted through the mirror 4. The overlapping does not require complete overlapping, but partial overlapping, and the image transmitted mainly includes the relevant portion of the surface of the object to be measured. Fig. 4 isbase:Sub>A top view of fig. 2 andbase:Sub>A cross-sectional view taken along section linebase:Sub>A-base:Sub>A.
The concept of the video path is convenient for description. The reflected light path of the reflected light obtained by reaching the reflector 4 along the axis of the working objective lens 9 and the propagation path of the reflected light after the reflected light is changed in direction are taken as the image path, including the image transmitted from the working objective lens 9 and the image continuously propagated or separated by the light path design. When the microscope is used on a machine, different light sources, filters, meniscus lenses, cameras, etc. must be added to deal with different objects to be measured. The arrangement of the reflector 4 provided in this embodiment changes the angle of the light path by turning the straight light path due to the ingenious position, as shown in the figure, thereby changing the erection mode of the microscope, especially in some fields with height limitation caused by the condition of the machine, each optical accessory can be added according to the requirement, and is arranged on a plane and expanded, which is beneficial to reducing the height of the whole machine, so as not to limit the height of the machine, and can also increase the convenience of designing and adjusting various optical accessories, if the design is difficult due to the huge optical framework, or the machine framework must be disassembled into two or even more models. The present embodiment achieves remarkable results in a simple but substantial solution, and therefore has a high degree of creativity. As shown in fig. 5 and 6, the positions of the different planes (shown in dashed lines) developed for the various types of optical accessories are shown for the 45 ° and 60 ° angles of the mirror 4, respectively. The light path of the original microscope is a straight line, as shown in fig. 1, when the accessories are added, the microscope needs to be developed beside, and at the moment, the microscope is suspended like branches of trees and is not fixed well. The scope 1 is on the video path, ensuring that the scope 1 can take the video. When the central line of the observation device 1 coincides with the image path, the image taken by the observation device 1 is located at the center of the observation device 1, and the effect is better.
The operating principle of the optical system of the microscope or the transmission path of the image is: the image on the surface of the object to be measured is changed in magnification by the working objective lens 9, and then reflected by the reflecting mirror 4 to reach the observation device 1 along the image path. The concepts referred to herein, which have been described in detail above, are not repeated.
In some embodiments, the present invention provides an optical system of a microscope, the optical system further comprising:
and a semi-reflective optical path.
This semi-reflection road includes: a half mirror 3 and a half mirror assembly.
The half mirror 3 is located on the image path. The coated surface of the half mirror 3 and the image path form an included angle required by the half mirror 3.
The half mirror assembly has one or more, and is opposed to the coated surface of the half mirror 3.
In this embodiment, as shown in fig. 2, the system further includes the half-reflecting path. The half-reflecting path takes the half-reflecting mirror 3 as a core and is provided with the half-reflecting accessory. The half mirror 3 is a common half mirror, and the installation and use requirements are the same as those of the common half mirror. By the light splitting or reflection of the half mirror 3, the reaching range of the light path can be expanded, and more optical accessories are used for building the system. The half mirror 3 is located on the image path, ensuring that the half mirror 3 can efficiently receive the image from the working objective lens 9 or transmit light to the working objective lens 9. The coated surface of the half mirror 3 and the image path form an included angle required by the half mirror 3, which is a necessary condition for the installation and use of the half mirror 3. The transflective assembly has one or more, and is opposite to the coated surface of the half mirror 3, which is a requirement of the operation principle of the half mirror 3 for the installation and use of the transflective assembly. The half-reflecting member is an optical element for further processing the image, such as another half-reflecting path, the observation device 1, which is installed on the corresponding path after the half-reflecting mirror 3 splits or reflects the image; or a light source assembly 2, for the half-mirror 3 to transmit light to the surface of the object to be measured through the half-mirror path, the reflector 4 and the working objective 9.
In some embodiments, the present invention provides an optical system of a microscope:
at least one of the half-counter fittings is a light source assembly 2.
In the present embodiment, as shown in fig. 2, at least one of the semi-reflecting members is the light source assembly 2. The light source assembly 2 includes various light sources suitable for automatic optical detection equipment, and also includes various optical accessories for focusing, shaping, homogenizing and the like to help the light source improve the quality. The light source assembly 2 is used for irradiating the object to be measured, and can reflect and image the surface of the object to be measured in the observation device 1 after irradiation. The light path of the light source module 2 as shown in fig. 2 is: light is emitted from a light source, condensed by a lens group, reflected by the semi-reflecting mirror 3, reflected by the reflecting mirror 4 again, passes through the working objective lens 9 to reach the surface of the object to be measured, and then the reflected image is changed in magnification by the working objective lens 9, reflected by the reflecting mirror 4, passes through the semi-reflecting mirror 3 and finally projected to the camera. The light source component 2 can achieve good effect on obtaining better images under the condition of insufficient field illumination, particularly under the condition of dark fields.
In some embodiments, the present invention provides an optical system of a microscope:
the semi-reflective optical path also includes an illuminometer 8. The illuminometer 8 is used to measure the brightness of the light source assembly 2.
In this embodiment, as shown in fig. 2, the semi-reflective road further includes the illuminometer 8. This illuminometer 8 can digitize the luminance of this light source subassembly 2, forms a set of observable data, to controlling the illuminating effect, adjusts the luminance etc. of this light source subassembly 2, can both play fine reference effect.
In some embodiments, the present invention provides an optical system for a microscope:
the brightness of the light source assembly 2 can be adjusted by a program after being fed back by the illuminometer 8.
The adjustment comprises inching adjustment and adjustment to corresponding preset values according to different surfaces of the object to be measured.
In this embodiment, digitized luminance values are utilized: the brightness of the light source module 2 can be adjusted by the program after being fed back by the illuminometer 8. The adjustment includes: 1) Inching adjustment, namely adjusting the brightness of the light source component 2 by increasing or decreasing the brightness value after judgment by a person through manual-assisted semi-automatic adjustment; 2) The brightness of the light source module 2 is automatically adjusted by the program when the brightness value fed back by the illuminometer 8 does not meet the preset value, until the brightness value fed back is the corresponding preset value. The preset value can be obtained according to the actual use requirement through the limited debugging of the system.
In some embodiments, the present invention provides an optical system for a microscope:
at least one of the semi-retro-fit members is the scope 1.
In the present embodiment, as shown in fig. 2, the semi-reverse fitting is the observation device 1. As described above, the observation device includes the eyepiece for direct observation by the naked eye of a person and the camera for image acquisition. Set up this eyepiece, make things convenient for the on-the-spot staff to monitor this microscopical behavior at any time, or judge through direct observation earlier when tentatively discovering the problem, decide the processing scheme again, avoid efficiency loss and the quality defect that blind decision brought. The camera can convert the optical signal into corresponding electrical signal. The conventional cameras are based on different principles, such as an image receiver of a CCD/CMOS photoelectric sensor, which converts the same optical signal differently, and the electrical signal more favorable for subsequent image analysis can be obtained by converting the same optical signal in different ways or converting different optical signals in different ways.
In some embodiments, the present invention provides an optical system of a microscope:
at least one of the semi-reflective fittings is another of the semi-reflective paths. A plurality of the half mirror paths are combined in a nested manner.
In this embodiment, at least one of the semi-reflective parts is another semi-reflective path, and the range that the image and/or light can reach can be continuously expanded through the continuously nested semi-reflective paths, so that the structure and the function of the system can be expanded. Different combinations of the half-reverse branch nesting are respectively shown in fig. 7, fig. 8 and fig. 9, so that the combination modes are very rich, and the combination can be freely carried out according to actual needs of a field.
In some embodiments, the present invention provides an optical system of a microscope:
the angle of the mirror 4 is 45 °.
In the present embodiment, a preferred value of the angle of the mirror 4 is given, namely 45 °. As shown in fig. 5, the reflected light is horizontal, which is convenient for the erection of the system. It should be noted that the 45 ° refers to the final overall effect of the reflector 4, i.e. the angle to the horizontal plane, whether it is a single reflector 4 or a plurality of reflectors 4.
In some embodiments, the present invention provides an optical system for a microscope:
this rotation of the objective lens changer 6 is achieved by a rotating motor 7.
In the present embodiment, as shown in fig. 2, the rotation of the objective lens changer 6 is realized by the rotating motor 7, and the rotation of the objective lens changer 6 is automatically upgraded. Typically, the objective changer 6 is rotated manually. Here, the rotary motor 7 is additionally provided, and the automation degree of the microscope is improved. The rotating motor 7 may be a servo motor, a stepping motor, or the like, as long as it meets the use requirements. When using the servo motor, the encoder can confirm the rotation angle and the current position, and realize the feedback of the position, and clearly know which objective lens 5 (several times of objective lens 5) becomes the working objective lens 9 after the rotation, and the switching speed is faster.
In some embodiments, the present invention provides an optical system of a microscope, the optical system further comprising:
a position sensor assembly 10 for positioning the position of the objective lens changer 6.
In this embodiment, as shown in fig. 5, the system further includes the position sensor assembly 10, and the position of the objective lens 5 sensor is confirmed by an external signal, so as to prevent a production accident caused by a possible failure. The position sensor assembly 10, which can be used conventionally, including image recognition, is also possible, simply by feedback from external monitoring means. The present embodiment has the advantage of avoiding collision between the objective lens 5 and the object to be measured (the length of the objective lens 5 is different due to different magnifications) when the object to be measured is moved after the objective lens converter 6 is rotated to a position without stopping during maintenance.
In some embodiments, the present invention provides an optical system of a microscope, the optical system further comprising:
and a positioning ball 11 for fixing the position of the objective lens changer 6.
In the present embodiment, as shown in fig. 5, the positioning ball 11, also called as a ball plunger or a spring plunger, is further included. The positioning ball 11 has the function of reducing the micro-shaking of the lens caused by vibration, so that the image obtained by the camera in dynamic imaging is clearer, and the positioning ball has a good effect in a scene of manual rotation or motor rotation; or when the machine is not powered on due to maintenance and the rotating motor 7 cannot maintain the lens, the positioning device is used as a basic positioning device.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (11)
1. An optical system of a microscope, characterized in that the optical system comprises:
an objective converter (6) and an observation device (1);
taking a plane where the surface of the object to be measured is located as a reference plane;
the main body of the objective lens converter (6) is a hollow cylindrical body; the rotation axis of the hollow cylindrical body is parallel to the reference surface; n objective lenses (5) which are distributed in a radial manner are arranged on the side surface of the hollow cylindrical body, and N is more than or equal to 1; the hollow cylindrical body is capable of changing the orientation of each of the objective lenses (5) by rotation; when any one of the objective lenses (5) is aligned with the surface of the object to be measured and is vertical to the reference surface, the objective lens is a working objective lens (9); a reflector (4) is disposed in the hollow of the hollow cylindrical body; the position of the reflector (4) does not rotate along with the rotation of the hollow cylindrical body; the projection of the working objective (9) on the reference surface is overlapped with the projection of the reflector (4) on the reference surface;
taking a reflected light path of reflected light obtained by reaching the reflector (4) along the axis of the working objective lens (9) and a propagation path of the reflected light after the direction of the reflected light is changed as an image path; the observation device (1) is on the image path;
the image of the surface of the object to be measured reaches the observation device (1) along the image path after the magnification of the working objective lens (9) is changed and the image is reflected by the reflector (4).
2. The optical system of claim 1, further comprising:
a semi-reflective optical path;
the semi-reflective road includes: a half mirror (3) and a half mirror assembly;
the half-reflecting mirror (3) is positioned on the image path; the coated surface of the semi-reflecting mirror (3) and the image path form an included angle required by the semi-reflecting mirror (3);
the half mirror assembly has one or more, and is opposed to the coated surface of the half mirror (3).
3. The optical system of claim 2, wherein:
at least one of said semi-counter-parts is a light source assembly (2).
4. The system of claim 3, wherein:
the semi-reflecting light path further comprises an illuminometer (8); the illuminometer (8) is used for measuring the brightness of the light source component (2).
5. The optical system of claim 4, wherein:
the brightness of the light source component (2) can be adjusted through a program after being fed back by the illuminometer (8);
the adjustment comprises inching adjustment and adjustment to corresponding preset values according to different surfaces of the object to be measured.
6. The optical system of claim 2, wherein:
at least one of said semi-reflecting fittings is said observation device (1).
7. The optical system according to any one of claims 2-6, wherein:
at least one of the semi-reflective fittings is another of the semi-reflective optical paths; a plurality of the half-mirror paths are combined in a nested manner.
8. The optical system of claim 1, wherein:
the angle of the mirror (4) is 45 °.
9. The optical system of claim 1, wherein:
the rotation of the objective lens changer (6) is realized by a rotating motor (7).
10. The optical system of claim 1, further comprising:
a position sensor assembly (10) for locating the position of the objective lens changer (6).
11. The optical system of claim 1, further comprising:
a positioning bead (11) for fixing the position of the objective lens changer (6).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211402004.3A CN115453737A (en) | 2022-11-10 | 2022-11-10 | Optical system of microscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211402004.3A CN115453737A (en) | 2022-11-10 | 2022-11-10 | Optical system of microscope |
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| CN217639720U (en) * | 2022-08-01 | 2022-10-21 | 深圳迈塔兰斯科技有限公司 | Failure analysis microscope |
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| US4744642A (en) * | 1984-06-25 | 1988-05-17 | Olympus Optical Co., Ltd. | Microscope |
| JP2003307683A (en) * | 2002-02-15 | 2003-10-31 | Olympus Optical Co Ltd | Inverted microscope |
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| CN113552711A (en) * | 2021-07-13 | 2021-10-26 | 上海谱华森生物科技有限公司 | Voice coil actuated hollow shaft microscope focusing device |
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| CN217639720U (en) * | 2022-08-01 | 2022-10-21 | 深圳迈塔兰斯科技有限公司 | Failure analysis microscope |
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