CN113552711A - Voice coil actuated hollow shaft microscope focusing device - Google Patents
Voice coil actuated hollow shaft microscope focusing device Download PDFInfo
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- CN113552711A CN113552711A CN202110791331.1A CN202110791331A CN113552711A CN 113552711 A CN113552711 A CN 113552711A CN 202110791331 A CN202110791331 A CN 202110791331A CN 113552711 A CN113552711 A CN 113552711A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/245—Devices for focusing using auxiliary sources, detectors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/248—Base structure objective (or ocular) turrets
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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Abstract
The invention provides a voice coil actuated hollow shaft microscope focusing device, which comprises a control system, an imaging system, a position adjusting mechanism, a position feedback assembly, a device substrate, an objective lens and an adapter, wherein the control system is connected with the imaging system through a control system; the object to be measured is placed below the objective lens; the position adjusting mechanism can move along the direction close to the measured object or far away from the measured object; the objective lens is connected with the position adjusting mechanism through the adaptor and can move along with the movement of the position adjusting mechanism; the position adjusting mechanism and the position feedback assembly are electrically connected with the control system. The voice coil motor is adopted to drive the objective lens to focus, the structure is simple, the installation is convenient, the stability is good, the control precision is high, and the problems that the verticality of the objective lens light path introduced by the guide rail and the cantilever beam is difficult to adjust, the control is difficult, the dynamic response is not high and the like are solved.
Description
Technical Field
The invention relates to the technical fields of electromechanical design, motion control, micro-optics and the like, in particular to a voice coil actuated hollow shaft microscope focusing device.
Background
In recent years, with the improvement of automation requirements in the fields of medicine research and development, clinical examination, digital pathology and the like, the digitalization and automation of a microscope are in a trend, wherein the automatic focusing of the microscope is an important link.
The microscope automatic focusing device mainly comprises two types: driving the objective lens to focus. For an infinite imaging system, the focusing mode of driving the objective lens has great advantages in dynamic performance and stability. At present, the focusing mode of driving the objective lens usually adopts a cross guide rail and a slide block guide rail as motion guide elements, and a cantilever beam provided with the objective lens is dragged by a motor-screw rod system and the like to complete focusing motion. However, the following problems are common: the guide rail and the objective lens mounting flange have a certain distance and need to be connected by a cantilever beam, the larger the scanning area and the size of an objective table are, the longer the cantilever beam is, the difficulty in adjusting the verticality of an objective lens optical path introduced by the guide rail and a cantilever beam is caused, the cantilever beam is easy to vibrate to influence the imaging quality of a high-power objective lens, and the difficulty in controlling the focusing precision and the low dynamic response are caused by a return gap of a lead screw.
Patent document CN 109752832A discloses a method for controlling the movement of a microscope lens barrel on the Z-axis and an automatic microscope, the microscope includes a camera fixed on one side of the microscope lens barrel, the microscope lens barrel has at least one mark point capable of being recognized by the camera, and the current pixel position of the mark point in the current image is obtained by the camera; calculating the difference of the number of pixels in the height direction between the current pixel position and the ideal pixel position obtained when the marking point is calibrated in advance; calculating the height deviation information between the current height and the ideal height of the microscope lens cone according to the pixel number difference information and a preset rule; and adjusting the height of the microscope lens barrel through the height deviation information. However, the motor-screw structure is still adopted to move the objective lens, and the problems that the imaging quality of the high-power objective lens is easily influenced by vibration, the focusing precision is difficult to control due to a return clearance of the screw rod, the dynamic response is not high and the like cannot be avoided.
Disclosure of Invention
In view of the deficiencies in the prior art, it is an object of the present invention to provide a voice coil actuated hollow shaft microscope focusing device.
The invention provides a voice coil actuated hollow shaft microscope focusing device, which comprises a control system, an imaging system, a position adjusting mechanism, a position feedback assembly, a device substrate, an objective lens and an adapter, wherein the control system is connected with the imaging system;
the object to be measured is placed below the objective lens;
the position adjusting mechanism can move along the direction close to the measured object or far away from the measured object;
the objective lens is connected with the position adjusting mechanism through the adaptor and can move along with the movement of the position adjusting mechanism;
the position adjusting mechanism and the position feedback assembly are both arranged on the device substrate;
the position feedback assembly is connected with the position adjusting mechanism;
the position adjusting mechanism and the position feedback assembly are electrically connected with the control system.
Preferably, the position adjustment mechanism comprises a hollow shaft slide assembly, a voice coil motor, and an actuation connection plate;
one end of the hollow shaft sliding assembly is fixedly arranged in the first reserved through hole of the actuating connecting plate, and the other end of the hollow shaft sliding assembly penetrates through the device base plate, extends to the outside of the device base plate and is connected with the adapter;
the coil end of the voice coil motor is fixedly arranged in the second reserved through hole of the actuating connecting plate, and the permanent magnet machine seat end of the voice coil motor is fixedly arranged in the third reserved through hole of the device substrate; the actuating connecting plate can move along the direction far away from the measured object or close to the measured object along with the up-and-down movement of the coil end of the voice coil motor; the voice coil motor is electrically connected with the control system.
Preferably, the position adjusting mechanism further comprises a positioning shaft assembly, wherein the positioning shaft assembly penetrates through the actuation connecting plate, and one end of the positioning shaft assembly is connected with the device substrate; the positioning shaft assembly can prevent the hollow shaft sliding assembly from driving the actuating connecting plate to rotate around the axis of the hollow shaft sliding assembly.
Preferably, the device further comprises a limiting element; (ii) a
The bottommost end of the limiting element is always lower than the bottommost end of the imaging system, and the limiting element is used for preventing the actuating connecting plate from contacting the imaging system to damage the imaging system.
Preferably, the hollow shaft slide assembly comprises a hollow shaft and a first bearing sleeve;
one end of the hollow shaft is installed in the first reserved through hole, and the other end of the hollow shaft penetrates through the device substrate to be connected with the adapter;
the first bearing sleeve is fixedly connected with the device substrate through a mounting end, the first bearing sleeve and the hollow shaft are coaxially arranged and sleeved outside the hollow shaft, and the hollow shaft can move in the first bearing sleeve.
Preferably, the positioning shaft assembly comprises a positioning shaft;
the positioning shaft penetrates through the actuating connecting plate, and one end of the positioning shaft is connected with the device substrate; (ii) a The positioning shaft is matched with the hollow shaft to prevent the hollow shaft from driving the actuating connecting plate to rotate around the axis of the hollow shaft.
Preferably, the hollow shaft is a hollow spline shaft, and the first bearing sleeve is a spline bearing sleeve matched with the hollow spline shaft; through the spline design of the hollow shaft and the first bearing sleeve, the hollow shaft can be prevented from rotating around the axis of the hollow shaft, so that the actuating connecting plate caused by the rotation of the hollow shaft around the axis of the hollow shaft is prevented from rotating around the axis of the hollow shaft.
Preferably, the position feedback element comprises a grating scale, a reading head, a grating scale fixing plate and a reading head fixing plate;
the grating ruler is fixedly connected with the actuating connecting plate through a grating ruler fixing plate, and the reading head is fixedly connected with the device substrate through a reading head fixing plate;
the reading head is electrically connected with the control system
The imaging system comprises an imaging light path and a camera;
one end of the imaging light path is fixedly connected with the camera, and light can enter the imaging light path through the hollow shaft through the objective lens.
Preferably, the imaging system further comprises a light path turning-back element, the light path turning-back element is located at the other end of the imaging light path, the light path turning-back element can change the direction of light, and the light passes through the objective lens, reaches the light path turning-back element through the hollow shaft, changes the direction, and then enters the imaging light path.
Preferably, the device further comprises a gravity balance spring, one end of the gravity balance spring is connected with the actuating connecting plate, and the other end of the gravity balance spring is connected with the device substrate.
Compared with the prior art, the invention has the following beneficial effects:
1. the voice coil motor is adopted to drive the objective lens to focus, the structure is simple, the installation is convenient, the stability is good, the control precision is high, and the problems that the verticality of the objective lens light path introduced by the guide rail and the cantilever beam is difficult to adjust, the control is difficult, the dynamic response is not high and the like are solved.
2. The invention adopts the grating ruler and the reading head to measure the moving distance of the objective lens, can more accurately determine the actual moving distance of the objective lens and feed back the actual moving distance to the control system in time so as to achieve better focusing effect.
3. The limiting element is arranged on the actuating connecting plate, so that the actuating connecting plate is prevented from colliding with the imaging system when the voice coil motor is damaged or an operator does not operate properly.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of the structure of the present invention using a hollow optic axis scheme;
FIG. 2 is an exploded pictorial illustration of FIG. 1;
FIG. 3 is an exploded pictorial illustration of the inventive hollow spline shaft arrangement.
The figures show that:
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
The invention provides a voice coil actuated hollow shaft microscope focusing device which comprises a control system, an imaging system, a position adjusting mechanism, a position feedback assembly, a device substrate 1, an objective lens 2 and an adapter 3. The object to be measured is placed below the objective lens 2;
the position adjusting mechanism is used for adjusting the distance between the objective lens and the object to be measured so as to achieve the purpose of focusing, and the position adjusting mechanism can move along the direction close to or far away from the object to be measured.
The objective lens 2 is connected with the position adjusting mechanism through the adaptor 3, the position adjusting mechanism and a position feedback assembly are both arranged on the device substrate 1, and the position feedback assembly is connected with the position adjusting mechanism, wherein the objective lens 2 can move along with the movement of the position adjusting mechanism;
the position adjusting mechanism and the position feedback assembly are electrically connected with the control system.
As shown in fig. 1 and 2, the position adjustment mechanism includes a hollow shaft sliding assembly 7, a voice coil motor 9, and an actuating connecting plate 10; one end of the hollow shaft sliding assembly 7 is fixedly installed in the first reserved through hole 4 of the actuating connecting plate 10, and the other end of the hollow shaft sliding assembly 7 penetrates through the device base plate 1, extends to the outside of the device base plate 1 and is connected with the adapter 3;
a coil end 25 of the voice coil motor 9 is tightly installed in the second reserved through hole 5 of the actuating connecting plate 10, and a permanent magnet base end 26 of the voice coil motor 9 is tightly installed in the third reserved through hole 6 of the device substrate 1; along with the up-and-down movement of the coil end 25 of the voice coil motor 9, the actuating connecting plate 10 can move along the direction far away from the object to be measured or close to the object to be measured, and the actuating connecting plate 10 drives the objective lens 2 to move, so that the purpose of focusing is achieved. The actuating connecting plate 10 drives the objective lens 2 to move, so that the purpose of focusing is achieved. The voice coil motor 9 is electrically connected with the control system. The control system is used to adjust the on/off and direction of movement of the voice coil motor 9.
The imaging system comprises an imaging optical path 21 and a camera 22; one end of the imaging optical path 21 is fastened to the camera 22, in one embodiment, the imaging optical path 21 is located above the position adjusting mechanism and is coaxial with the objective lens 2, and light can directly pass through the objective lens 2 and enter the imaging optical path 21 through the hollow shaft 12. In another embodiment, as shown in fig. 1, fig. 2 and fig. 3, the imaging optical path 21 further includes an optical path returning element 19, in this case, the imaging system is mounted on the device substrate 1 through a first bracket, the optical path returning element 19 is located at the other end of the imaging optical path 21, the optical path returning element 19 can change the direction of light, so as to realize that the imaging optical path is horizontal, so as to compress the size of the device in the vertical direction, the light passes through the objective lens 2, reaches the optical path returning element 19 through the hollow shaft 12, changes the direction, and then enters the imaging optical path 21, and the optical path returning element may adopt a total reflection prism or the like.
As shown in fig. 1, 2 and 3, the hollow shaft sliding assembly 7 comprises the hollow shaft sliding assembly 7 comprising a hollow shaft 12 and a first bearing sleeve 13; one end of the hollow shaft 12 is installed in the first reserved through hole 4, and the other end of the hollow shaft 12 penetrates through the device substrate 1 and is connected with the adapter 3; the first bearing sleeve 13 is fastened and connected with the device substrate 1 through a mounting end 16, and the mounting end 16 is fastened and connected with the device substrate 1 through a connecting piece. The first bearing sleeve 13 is arranged coaxially with the hollow shaft 12 and is sleeved outside the hollow shaft 12, and the hollow shaft 12 can move in the first bearing sleeve 13. The hollow shaft 12 can drive the objective lens to move up and down through the adapter 3 along with the up and down movement of the actuating connecting plate 10.
The position feedback element comprises a grating ruler 17, a reading head 18, a grating ruler fixing plate 23 and a reading head fixing plate 24; the grating ruler 17 is fixedly connected with the actuating connecting plate 10 through a grating ruler fixing plate 23, and the reading head 18 is fixedly connected with the device substrate 1 through a reading head fixing plate 24; the read head 18 is electrically connected to the control system. In the process that the actuating connecting plate 10 drives the objective lens 2 to move up and down, the position feedback element can accurately measure and feed back the actual position of the objective lens 2, and the voice coil motor 9 can be adjusted in time to achieve a better focusing effect. The feedback signal accuracy can reach 0.1 micron, even 0.01 micron.
As shown in fig. 3, in a preferred embodiment, the hollow shaft 12 is a hollow spline shaft, and the first bearing sleeve 13 is a spline bearing sleeve matched with the hollow spline shaft; through the spline design of the hollow shaft 12 and the first bearing sleeve 13, the hollow shaft 12 can be prevented from rotating around the axis of the hollow shaft 12, so that the actuating connecting plate 10 caused by the rotation of the hollow shaft 12 around the axis of the hollow shaft 12 can be prevented from rotating around the axis of the hollow shaft 12.
As shown in fig. 1 and 2, in another preferred embodiment, the hollow shaft 12 is a hollow optical shaft, the position adjustment mechanism further includes a positioning shaft assembly 8, the positioning shaft assembly 8 penetrates through the actuation connection plate 10, and one end of the positioning shaft assembly 8 is connected to the device substrate 1; the positioning shaft assembly can prevent the hollow shaft sliding assembly 7 from driving the actuating connecting plate 10 to rotate around the axis of the hollow shaft sliding assembly 7, and in addition, the positioning shaft assembly 8 can play a role in enhancing the focusing motion guide. The positioning shaft assembly 8 comprises a positioning shaft 14 and a second bearing sleeve 15; the positioning shaft 14 penetrates through the actuating connecting plate 10, and one end of the positioning shaft 14 is connected with the device substrate 1; the second bearing sleeve 15 is fixedly connected with the actuating connecting plate 10, and the second bearing sleeve 15 and the positioning shaft 14 are coaxially arranged and sleeved outside the positioning shaft 14; the location axle 14 with the cooperation of hollow optical axis prevents hollow optical axis drives actuating connecting plate 10 rotates around the axle center of hollow optical axis, can avoid owing actuating connecting plate 10 and appearing the beat around the rotatory voice coil motor that leads to in hollow optical axis axle center, the effect of problems such as magnetic gap change, coil wearing and tearing.
As shown in fig. 1, 2 and 3, the voice coil actuated hollow shaft microscope focusing device may further include a limiting element 11. In fig. 1 and 2, the limiting element 11 is installed at the other end of the positioning shaft assembly 8, the bottommost end of the limiting element 11 is always lower than the bottommost end of the imaging system, and the limiting element 11 is used for preventing the actuating connecting plate 10 from contacting the imaging system to damage the imaging system. When the actuating connecting plate 10 continuously moves upwards due to damage of the voice coil motor 9 or misoperation of an operator and the like, the actuating connecting plate 10 firstly contacts the bottommost end of the limiting element 11 instead of the bottommost end of the imaging system, and when the connecting plate 10 contacts the bottommost end of the limiting element 11, the limiting element 11 limits the actuating connecting plate 10 to continuously move upwards, so that the action of preventing the actuating connecting plate 10 from contacting the imaging system is achieved.
As shown in fig. 1, 2 and 3, the voice coil actuated hollow shaft microscope focusing arrangement may further comprise a gravity balance spring 20. As shown in fig. 1 and 2, a gravity balance spring 20 is sleeved on the positioning shaft 14, one end of the gravity balance spring 20 is connected to the actuating connecting plate 10, and the other end of the gravity balance spring 20 is connected to the device substrate 1. The gravity balance spring 20 has the function of balancing the weight of the moving parts such as the hollow shaft 12, the objective lens 2 and the actuating connecting plate 10, and improving the load characteristic and the dynamic characteristic of the voice coil motor. When the voice coil motor 9 is not electrified, the objective lens 2 and the actuating connecting plate 10 are both in the highest position under the action of the gravity balance spring 20.
The working process of the invention is as follows:
when focusing, the voice coil motor 9 is powered on, the voice coil actuated hollow-shaft microscope focusing device sends a signal to the voice coil motor 9 through a control system to drive the coil end 25 to move, and the voice coil motor 9 adjusts the height of the objective lens 2 by driving the actuating connecting plate 10 to the first position so as to achieve the focusing effect. There are various methods for determining the first position, such as determining the moving direction and the moving distance of the actuating connecting plate 10 and the objective lens 2 by using the method mentioned in "research review on auto focusing method of microscope" by Tianpan, etc. In the process of actuating the connecting plate 10 and the objective lens 2 to move, the position feedback assembly can feed back the actual moving direction and distance of the actuating connecting plate 10 and the objective lens 2 to the control system at any time, so that the control system can adjust the voice coil motor 9 in time to achieve a better focusing effect.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (10)
1. A voice coil actuated hollow shaft microscope focusing device is characterized by comprising a control system, an imaging system, a position adjusting mechanism, a position feedback assembly, a device substrate (1), an objective lens (2) and an adapter (3);
the object to be measured is placed below the objective lens (2);
the position adjusting mechanism can move along the direction close to the measured object or far away from the measured object;
the objective (2) is connected with the position adjusting mechanism through the adaptor (3), and the objective (2) can move along with the movement of the position adjusting mechanism;
the position adjusting mechanism and the position feedback assembly are both arranged on the device substrate (1);
the position feedback assembly is connected with the position adjusting mechanism;
the position adjusting mechanism and the position feedback assembly are electrically connected with the control system.
2. The voice coil actuated hollow shaft microscope focusing device of claim 1, wherein the position adjustment mechanism comprises a hollow shaft slide assembly (7), a voice coil motor (9), and an actuation connection plate (10);
one end of the hollow shaft sliding assembly (7) is fixedly arranged in the first reserved through hole (4) of the actuating connecting plate (10), and the other end of the hollow shaft sliding assembly (7) penetrates through the device base plate (1), extends to the outside of the device base plate (1) and is connected with the adapter (3);
a coil end (25) of the voice coil motor (9) is fixedly arranged in a second reserved through hole (5) of the actuating connecting plate (10), and a permanent magnet base end (26) of the voice coil motor (9) is fixedly arranged in a third reserved through hole (6) of the device substrate (1); the actuating connecting plate (10) can move along the direction far away from or close to the object to be measured along with the up-and-down movement of the coil end (25) of the voice coil motor (9); and the voice coil motor (9) is electrically connected with the control system.
3. The voice coil actuated hollow shaft microscope focusing device according to claim 2, characterized in that the position adjustment mechanism further comprises a positioning shaft assembly (8), the positioning shaft assembly (8) penetrates through the actuation connecting plate (10), and one end of the positioning shaft assembly (8) is connected to the device base plate (1); the positioning shaft assembly can prevent the hollow shaft sliding assembly (7) from driving the actuating connecting plate (10) to rotate around the axis of the hollow shaft sliding assembly (7).
4. A voice coil actuated hollow shaft microscope focusing device according to claim 2 or 3, characterized by further comprising a limiting element (11);
the bottommost end of the limiting element (11) is always lower than the bottommost end of the imaging system, and the limiting element (11) is used for preventing the actuating connecting plate (10) from contacting the imaging system to damage the imaging system.
5. Voice coil actuated hollow shaft microscope focusing device according to claim 2 or 3, characterized in that the hollow shaft sliding assembly (7) comprises a hollow shaft (12) and a first bearing sleeve (13);
one end of the hollow shaft (12) is installed in the first reserved through hole (4), and the other end of the hollow shaft (12) penetrates through the device substrate (1) to be connected with the adapter (3);
the first bearing sleeve (13) is fixedly connected with the device substrate (1) through a mounting end (16), the first bearing sleeve (13) and the hollow shaft (12) are coaxially arranged and sleeved outside the hollow shaft (12), and the hollow shaft (12) can move in the first bearing sleeve (13).
6. The voice coil actuated hollow shaft microscope focusing device according to claim 3, characterized in that the positioning shaft assembly (8) comprises a positioning shaft (14);
the positioning shaft (14) penetrates through the actuating connecting plate (10), and one end of the positioning shaft (14) is connected with the device substrate (1); the positioning shaft (14) is matched with the hollow shaft (12) to prevent the hollow shaft (12) from driving the actuating connecting plate (10) to rotate around the axis of the hollow shaft (12).
7. The voice coil actuated hollow shaft microscope focusing device according to claim 5, characterized in that the hollow shaft (12) is a hollow splined shaft and the first bearing sleeve (13) is a splined bearing sleeve mating with the hollow splined shaft; through the spline design of the hollow shaft (12) and the first bearing sleeve (13), the hollow shaft (12) can be prevented from rotating around the axis of the hollow shaft (12), so that the actuating connecting plate (10) caused by the rotation of the hollow shaft (12) around the axis of the hollow shaft (12) is prevented from rotating around the axis of the hollow shaft (12).
8. A voice coil actuated hollow shaft microscope focusing device according to claim 1, characterized in that the position feedback elements comprise a grating scale (17), a reading head (18), a grating scale fixing plate (23), a reading head fixing plate (24);
the grating ruler (17) is fixedly connected with the actuating connecting plate (10) through a grating ruler fixing plate (23), and the reading head (18) is fixedly connected with the device substrate (1) through a reading head fixing plate (24);
the reading head (18) being electrically connected to the control system;
the imaging system comprises an imaging optical path (21), a camera (22);
one end of the imaging light path (21) is fixedly connected with the camera (22), and light can enter the imaging light path (21) through the hollow shaft (12) through the objective lens (2).
9. The voice coil actuated hollow shaft microscope focusing device according to claim 8, wherein the imaging system further comprises a light path folding element (19), the light path folding element (19) is located at the other end of the imaging light path (21), the light path folding element (19) is capable of changing the direction of light, and the light passes through the objective lens (2), passes through the hollow shaft (12), reaches the light path folding element (19), changes the direction, and enters the imaging light path (21).
10. Voice coil actuated hollow shaft microscope focusing device according to claim 2, characterized in that it further comprises a gravity balance spring (20), one end of the gravity balance spring (20) being connected to the actuation connection plate (10) and the other end of the gravity balance spring (20) being connected to the device base plate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110791331.1A CN113552711A (en) | 2021-07-13 | 2021-07-13 | Voice coil actuated hollow shaft microscope focusing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110791331.1A CN113552711A (en) | 2021-07-13 | 2021-07-13 | Voice coil actuated hollow shaft microscope focusing device |
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| CN113552711A true CN113552711A (en) | 2021-10-26 |
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| CN202110791331.1A Pending CN113552711A (en) | 2021-07-13 | 2021-07-13 | Voice coil actuated hollow shaft microscope focusing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115453737A (en) * | 2022-11-10 | 2022-12-09 | 盛吉盛(宁波)半导体科技有限公司 | Optical system of microscope |
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2021
- 2021-07-13 CN CN202110791331.1A patent/CN113552711A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115453737A (en) * | 2022-11-10 | 2022-12-09 | 盛吉盛(宁波)半导体科技有限公司 | Optical system of microscope |
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