CN214066973U - Large-depth-of-field display screen defect detection device based on multi-camera structure - Google Patents

Large-depth-of-field display screen defect detection device based on multi-camera structure Download PDF

Info

Publication number
CN214066973U
CN214066973U CN202022973771.2U CN202022973771U CN214066973U CN 214066973 U CN214066973 U CN 214066973U CN 202022973771 U CN202022973771 U CN 202022973771U CN 214066973 U CN214066973 U CN 214066973U
Authority
CN
China
Prior art keywords
light
camera
display screen
splitting component
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202022973771.2U
Other languages
Chinese (zh)
Inventor
张雪丹
金刚
姚毅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Luster LightTech Co Ltd
Original Assignee
Luster LightTech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luster LightTech Co Ltd filed Critical Luster LightTech Co Ltd
Priority to CN202022973771.2U priority Critical patent/CN214066973U/en
Application granted granted Critical
Publication of CN214066973U publication Critical patent/CN214066973U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Microscoopes, Condenser (AREA)

Abstract

The application provides a big depth of field display screen defect detecting device based on polyphaser structure includes: the light source, with the light source is coaxial first beam splitting part, objective and the objective table that sets gradually have set gradually at least one second beam splitting part and speculum on the reflection path of first beam splitting part set gradually on the reflection path of second beam splitting part with set gradually a section of thick bamboo mirror and camera respectively on the reflection path of speculum, the camera can be followed the camera with the axis direction reciprocating motion of section of thick bamboo mirror. Through setting up first beam splitting part and second beam splitting part, divide into the reflection light of display screen into multibeam light, utilize the camera of multiunit section of thick bamboo mirror and adjustable distance respectively to form images in the region of different depth of field, increase image acquisition information, realize the clear formation of image of different depth of field positions. The detection device provided by the application increases the depth of field of the microscopic defect detection device, avoids multiple times of refocusing, and improves the detection efficiency of the display screen.

Description

Large-depth-of-field display screen defect detection device based on multi-camera structure
Technical Field
The application belongs to the field of display screen defect detection equipment, and particularly relates to a large depth-of-field display screen defect detection device based on a multi-camera structure.
Background
The display screen is influenced by the manufacturing process or the operating environment in the production process, and defects such as scratches, dust, surface unevenness and the like can occur. Therefore, before shipping, the display screen needs to be subjected to defect detection so as to ensure that the display screen can meet the quality requirement. The display screen defect detection device can be divided into a macroscopic defect detection device and a microscopic defect detection device from the detection visual field.
The microscopic defect detection device is a display screen defect detection device capable of realizing micron and submicron precision, and can perform high-precision detection on a specific area of a display screen. The imaging quality of the microscopic defect detection device directly determines the omission factor, the false detection rate, the detection time and the like of the defect detection of the display screen. The depth of field is an important factor influencing the imaging quality, the depth of field represents a clear range before and after the focus, and a shot object can be clearly imaged within the depth of field.
However, in the related art, the display screen micro-defect detecting device has a short depth of field and a small field of view. Due to the restriction of the appearance shape of the display screen and the influence of mechanical errors of the conveying device, the detection area of the display screen exceeds the depth of field range of the detection device, and a high-quality image is difficult to obtain. At this time, the detection device needs to refocus for multiple times, which results in the reduction of the detection efficiency of the display screen.
SUMMERY OF THE UTILITY MODEL
The application provides a big depth of field display screen defect detecting device based on polyphaser structure to it is short, the field of vision is little to solve the display screen microdefect detecting device depth of field, needs refocusing many times when leading to detecting, problem that display screen detection efficiency is low.
The application provides a big depth of field display screen defect detecting device based on polyphaser structure includes:
the optical system comprises a light source, a first light splitting component, an objective lens and an objective table, wherein the first light splitting component, the objective lens and the objective table are sequentially and coaxially arranged with the light source, at least one second light splitting component and a reflector are sequentially arranged on a reflection path of the first light splitting component, a barrel mirror and a camera are sequentially arranged on the reflection path of the second light splitting component and the reflection path of the reflector respectively, and the camera can reciprocate along the axial direction of the camera and the barrel mirror;
wherein, the light process that the light source sent first beam splitting part with objective shine display screen on the objective table, the reflection light process of display screen objective quilt first beam splitting part divide into transmission light and reflection light, the reflection light process of first beam splitting part the second beam splitting part divide into transmission light and reflection light, the reflection light process of second beam splitting part the section of thick bamboo mirror gets into the camera, the transmission light of second beam splitting part gets into the speculum, the reflection light process of speculum the section of thick bamboo mirror gets into the camera.
Optionally, the detection apparatus further includes: and the processor is connected with the camera and used for acquiring the clearest image data and detecting the defects of the display screen according to the clearest image data.
Optionally, the first light splitting component and the second light splitting component are one or more of a light splitting prism, a light splitting sheet and a thin film beam splitter.
Optionally, the first light splitting component splits the light into the transmitted light and the reflected light in a ratio of 1: 1.
Optionally, the barrel mirror is an adjustable focal length barrel mirror.
Optionally, the camera is an area-array camera.
Optionally, the light source is one of an on-axis light source, an off-axis light source, and an annular light source.
According to the above technical solution, the present application provides a large depth of field display screen defect detection device based on a multi-camera structure, including: the light source, with the light source is coaxial first beam splitting part, objective and the objective table that sets gradually have set gradually at least one second beam splitting part and speculum on the reflection path of first beam splitting part set gradually on the reflection path of second beam splitting part with set gradually a section of thick bamboo mirror and camera respectively on the reflection path of speculum, the camera can be followed the camera with the axis direction reciprocating motion of section of thick bamboo mirror. This application is through setting up first light splitting part and second light splitting part, falls into the reflection light of display screen into multibeam light, utilizes the camera of multiunit section of thick bamboo mirror and adjustable distance respectively to form images in the region of different depth of field, increases image acquisition information, realizes the clear formation of image of different depth of field positions. The detection device provided by the application increases the depth of field of the microscopic defect detection device, avoids multiple times of refocusing, and improves the detection efficiency of the display screen.
Drawings
In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without any creative effort.
Fig. 1 is a schematic structural diagram of an embodiment of a large depth-of-field display screen defect detection apparatus based on a multi-camera structure according to the present application;
fig. 2 is a schematic structural diagram of a defect detection apparatus for a large depth-of-field display screen based on a multi-camera structure according to another embodiment of the present disclosure;
FIG. 3 is a diagram showing an imaging result of a conventional display screen microdefect detecting apparatus under a condition exceeding the depth of field of the system;
fig. 4 is an imaging result picture of the large depth-of-field display screen defect detection device based on the multi-camera structure provided by the present application.
Description of reference numerals:
1. a light source; 2. a first light splitting component; 3. an objective lens; 4. an object stage; 5. a second light splitting component; 6. a mirror; 7. a cylindrical mirror; 8. a camera; 9. a processor.
Detailed Description
To make the objects, technical solutions and advantages of the exemplary embodiments of the present application clearer, the technical solutions in the exemplary embodiments of the present application will be clearly and completely described below with reference to the drawings in the exemplary embodiments of the present application, and it is obvious that the described exemplary embodiments are only a part of the embodiments of the present application, but not all the embodiments.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a large depth-of-field display panel defect detection apparatus based on a multi-camera structure according to the present application.
The application provides a big depth of field display screen defect detecting device based on polyphaser structure includes:
light source 1, with light source 1 is coaxial setting's first beam splitting component 2, objective 3 and objective table 4 in proper order set gradually at least one second beam splitting component 5 and speculum 6 on the reflection path of first beam splitting component 2 set gradually on the reflection path of second beam splitting component 5 with set gradually cover mirror 7 and camera 8 on the reflection path of speculum 6 respectively, camera 8 can be followed camera 8 with the axis direction reciprocating motion of cover mirror 7.
In this embodiment, the light source 1 is used for emitting light to the display screen to be detected and providing an illumination light source. The first light splitting component 2 is configured to split a reflected light of the display screen into a transmitted light and a reflected light, where the reflected light of the first light splitting component 2 is transmitted to the second light splitting component 5.
The second light splitting component 5 is configured to split the received reflected light of the first light splitting component 2 into a transmitted light and a reflected light. Wherein the reflected light of the second dichroic means 5 enters a camera 8 through a tube mirror 7, and the camera 8 generates image data. If more than two second light splitting components 5 are provided, the transmitted light of the second light splitting component 5 is transmitted to another second light splitting component 5 close to the second light splitting component 5 until finally transmitted to the mirror 6.
In this embodiment, the number of the second dichroic filters 5 is at least one, and in practical use, the number of the second dichroic filters 5 can be adjusted according to the depth of field and the accuracy requirement of the display screen defect detection and the device cost.
The reflecting mirror 6 reflects the received transmitted light of the second light splitting component 5, the reflected light of the reflecting mirror 6 enters the camera 8 through the barrel mirror 7, and the camera 8 generates further image data.
The camera 8 can reciprocate along the axial direction of the camera 8 and the cylindrical mirror 7, namely, the purposes of adjusting the focal length and changing the depth of field can be achieved by changing the distance between the camera 8 and the cylindrical mirror 7. In this embodiment, each group of barrel mirror 7 and camera 8 only needs to adjust a focal length before detection, and focusing is not needed again in the detection process, so that the efficiency of detecting defects of the display screen can be improved.
As shown in fig. 1, the imaging process of the large depth-of-field display screen defect detection apparatus provided by the present application is as follows: light that light source 1 sent passes through first beam splitting part 2 with objective 3 shines display screen on the objective table 4, the reflection light process of display screen objective 3 quilt first beam splitting part 2 divide into transmission light and reflection light, the reflection light process of first beam splitting part 2 second beam splitting part 5 is divided into transmission light and reflection light, the reflection light process of second beam splitting part 5 the section of thick bamboo mirror 7 gets into camera 8, the transmission light of second beam splitting part 5 gets into speculum 6, the reflection light process of speculum 6 the section of thick bamboo mirror 7 gets into camera 8, camera 8 receives light, generates image data.
Optionally, the detection apparatus further includes: and the processor 9, the processor 9 is connected with the camera 8, and the processor 9 is used for acquiring the clearest image data and detecting the defects of the display screen according to the clearest image data. In this embodiment, at least two cameras 8 are arranged, at least two image data with different depths of field can be obtained, the processor 9 calculates the clearest image data according to a software processing algorithm, the image data meets the requirement of detection precision, and defect detection is performed according to the image data, so that the detection precision can be improved.
Optionally, the first light splitting component 2 and the second light splitting component 5 are one or more of a light splitting prism, a light splitting sheet and a thin film beam splitter. A beam splitter prism is an optical element for separating the horizontal and vertical polarizations of light. A beam splitter is an optical component that splits a radiation beam into several parts, which can split the light according to different light intensity ratios, depending on the wavelength and polarization direction. The film beam splitter is an optical device which is composed of a metal film or a dielectric film and can split one beam into two beams or a plurality of beams. One or more of a beam splitter prism, a beam splitter and a pellicle beam splitter can be selected as the first light splitting component 2 and the second light splitting component 5 according to actual use requirements.
Optionally, the first light splitting component 2 splits the light into the transmitted light and the reflected light in a ratio of 1: 1. The splitting ratio of the first splitting component 2 is set to 1:1, so that sufficient light intensity and light brightness can be transmitted, and the imaging quality of the camera 8 is improved.
Optionally, the barrel mirror 7 is an adjustable focal length barrel mirror. In some embodiments, the position of the camera 8 is kept unchanged, and the focal length of the tube mirror 7 corresponding to the camera 8 can be adjusted to change the depth of field of each camera 8, so that the operation is simpler and more convenient.
Optionally, the camera 8 is an area-array camera. In some embodiments, the camera 8 is a large-area camera. The resolution ratio of the large-area-array camera is 1.2 hundred million pixels, the optical resolution ratio of the display screen imaging can be improved, high-precision image information can be obtained, and the precision of the display screen defect detection can be improved.
Optionally, the light source 1 is one of an on-axis light source, an off-axis light source, and an annular light source. The coaxial light source can provide coaxial parallel light, the illumination is more uniform, and meanwhile, the reflection interference of a shot object is avoided. The off-axis light source is a two-beam light imaging technology, only two beams of diffraction light are collected by the projection lens by adjusting the incident angle of light, and off-axis illumination is characterized in that no light is transmitted along the direction of a main optical axis, so that the focusing depth can be improved. The annular light source can emit annular light, provide irradiation at different angles, highlight the three-dimensional information of an object and effectively solve the problem of diagonal irradiation shadow. In practical application, different light sources 1 can be selected according to the shape of the object to be detected and the detection precision requirement.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a defect detection apparatus for a large depth-of-field display screen based on a multi-camera structure according to another embodiment of the present disclosure.
In a further embodiment, the large depth-of-field display screen defect detection device comprises two second light splitting components 5, three sets of barrel mirrors 7 and a camera 8. The numerical aperture of the objective lens 3 is 0.15, the magnification of the objective lens 3 is 4 times, the focal length is 50mm, and the focal length of the tube lens 7 is 200 mm.
The depth of field is 25 μm and the image distance is 200mm calculated according to the formula, i.e. the distance of the first group of cameras 8 from the barrel mirror 7 is set to 200 mm. When the working distance is changed, namely the distance between the display screen to be measured and the objective lens 3 is 50mm-25 mu m, the image distance is calculated to be 200.4mm, namely the distance between the second group of cameras 8 and the cylindrical lens 7 is set to be 200.4 mm. When the working distance is changed, namely the distance between the display screen to be measured and the objective lens 3 is 50mm +25 mu m, the calculated image distance is 199.6mm, namely the distance between the third group of cameras 8 and the cylindrical lens 7 is 199.6 mm.
Taking the working distance as an origin, when the position of the display screen to be detected is in a range of (-37.5 mu m, -12.5 mu m), a second group of cameras 8 can be adopted to obtain a clear image; when the position of the display screen to be detected is in a range of (-12.5 μm,12.5 μm), a first group of cameras 8 can be adopted to obtain a clear image; when the position of the display screen to be detected is in a (12.5 mu m,37.5 mu m) interval, a third group of cameras 8 can be adopted to obtain a clear image; at the moment, the depth of field of the display screen defect detection device is increased from 25 micrometers to 75 micrometers, and the depth of field is improved by 3 times.
Referring to fig. 3 and 4, fig. 3 is a picture of an imaging result of a conventional display screen microdefect detecting apparatus under a condition exceeding a depth of field of a system; fig. 4 is an imaging result picture of the large depth-of-field display screen defect detection device based on the multi-camera structure provided by the present application. Therefore, the large-depth-of-field display screen defect detection device based on the multi-camera structure has the advantages of being clear in imaging effect and good in image quality.
According to the above technical solution, the present application provides a large depth of field display screen defect detection device based on a multi-camera structure, including: light source 1, with light source 1 is coaxial setting's first beam splitting component 2, objective 3 and objective table 4 in proper order set gradually at least one second beam splitting component 5 and speculum 6 on the reflection path of first beam splitting component 2 set gradually on the reflection path of second beam splitting component 5 with set gradually cover mirror 7 and camera 8 on the reflection path of speculum 6 respectively, camera 8 can be followed camera 8 with the axis direction reciprocating motion of cover mirror 7.
This application is through setting up first light splitting part and second light splitting part, falls into the reflection light of display screen into multibeam light, utilizes the camera of multiunit section of thick bamboo mirror and adjustable distance respectively to form images in the region of different depth of field, increases image acquisition information, realizes the clear formation of image of different depth of field positions. The detection device provided by the application increases the depth of field of the microscopic defect detection device, avoids multiple times of refocusing, and improves the detection efficiency of the display screen.
The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (7)

1. The utility model provides a big depth of field display screen defect detecting device based on polyphaser structure which characterized in that includes:
the device comprises a light source (1), a first light splitting component (2), an objective lens (3) and an objective table (4) which are sequentially and coaxially arranged with the light source (1), wherein at least one second light splitting component (5) and a reflector (6) are sequentially arranged on a reflection path of the first light splitting component (2), a barrel mirror (7) and a camera (8) are sequentially arranged on the reflection path of the second light splitting component (5) and the reflection path of the reflector (6) respectively, and the camera (8) can reciprocate along the axial directions of the camera (8) and the barrel mirror (7);
wherein, the light process that light source (1) sent first beam splitting component (2) with objective (3) shine display screen on objective table (4), the reflection light process of display screen objective (3) quilt first beam splitting component (2) divide into transmission light and reflection light, the reflection light process of first beam splitting component (2) second beam splitting component (5) divide into transmission light and reflection light, the reflection light process of second beam splitting component (5) barrel mirror (7) get into camera (8), the transmission light of second beam splitting component (5) gets into speculum (6), the reflection light process of speculum (6) barrel mirror (7) get into camera (8).
2. The device for detecting the defects of the multi-camera structure-based large-depth-of-field display screen according to claim 1, further comprising: the processor (9), the processor (9) is connected with the camera (8), and the processor (9) is used for obtaining the clearest image data and detecting the defects of the display screen according to the clearest image data.
3. The multi-camera structure based large depth-of-field display screen defect detecting device according to claim 1, wherein the first light splitting component (2) and the second light splitting component (5) are one or more of a light splitting prism, a light splitting sheet and a thin film beam splitter.
4. The multi-camera structure-based large depth-of-field display screen defect detection device according to claim 3, wherein the first light splitting component (2) splits the light into the transmitted light and the reflected light in a ratio of 1: 1.
5. The multi-camera structure-based large depth-of-field display screen defect detection device according to claim 1, wherein the barrel mirror (7) is an adjustable-focus barrel mirror.
6. The multi-camera structure-based large depth-of-field display screen defect detection device according to claim 1, wherein the camera (8) is an area-array camera.
7. The multi-camera structure based large depth-of-field display screen defect detection device according to claim 1, wherein the light source (1) is one of an on-axis light source, an off-axis light source and an annular light source.
CN202022973771.2U 2020-12-11 2020-12-11 Large-depth-of-field display screen defect detection device based on multi-camera structure Active CN214066973U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022973771.2U CN214066973U (en) 2020-12-11 2020-12-11 Large-depth-of-field display screen defect detection device based on multi-camera structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022973771.2U CN214066973U (en) 2020-12-11 2020-12-11 Large-depth-of-field display screen defect detection device based on multi-camera structure

Publications (1)

Publication Number Publication Date
CN214066973U true CN214066973U (en) 2021-08-27

Family

ID=77407511

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022973771.2U Active CN214066973U (en) 2020-12-11 2020-12-11 Large-depth-of-field display screen defect detection device based on multi-camera structure

Country Status (1)

Country Link
CN (1) CN214066973U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114166843A (en) * 2021-11-23 2022-03-11 长园运泰利视觉科技(珠海)有限公司 Camera system and imaging method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114166843A (en) * 2021-11-23 2022-03-11 长园运泰利视觉科技(珠海)有限公司 Camera system and imaging method thereof

Similar Documents

Publication Publication Date Title
US8975582B2 (en) Method and apparatus for reviewing defects
US11226478B2 (en) Microscope and method for viewing a specimen using a microscope
US7697746B2 (en) Inspection system and inspection method
US9829441B2 (en) Wafer image inspection apparatus
US20090195866A1 (en) Microscope
US20070033680A1 (en) Optical inspection system and its illumination method
CN108519329B (en) Multi-channel scanning and detecting line confocal imaging device
JP2015152836A (en) confocal optical scanner
JP5532459B2 (en) Microscope system
CN106226895B (en) A kind of the rotation total internal reflection microscopic method and device of band feedback
JP6895768B2 (en) Defect inspection equipment and defect inspection method
JP2018092166A (en) Confocal imaging of object using pinhole array
KR101523336B1 (en) apparatus for examining pattern image of semiconductor wafer
CN214066973U (en) Large-depth-of-field display screen defect detection device based on multi-camera structure
JP2007206441A (en) Confocal imaging apparatus
CN113466246B (en) High-precision imaging system, method, image acquisition device and detection equipment
CN116818667A (en) 2D and 3D integrated semiconductor microscopic vision detection system and method
CN217718246U (en) Multifunctional large-target-surface micro tube display mirror and display panel detection system
CN114047619B (en) Three-dimensional microscopic imaging method and imaging light path structure thereof
JPH05323197A (en) Confocal microscope device
CN115128763A (en) Differential automatic focusing measuring method
CN114813056A (en) Curved surface screen defect detection device and method
JP2004219537A (en) Confocal microscope
US20040145816A1 (en) Microscope lens arrangement
US4283147A (en) Electro-optical scanning system

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant