CN107843969A - A kind of multifocal frequency sweep OCT focus controls and its method - Google Patents

A kind of multifocal frequency sweep OCT focus controls and its method Download PDF

Info

Publication number
CN107843969A
CN107843969A CN201711000663.3A CN201711000663A CN107843969A CN 107843969 A CN107843969 A CN 107843969A CN 201711000663 A CN201711000663 A CN 201711000663A CN 107843969 A CN107843969 A CN 107843969A
Authority
CN
China
Prior art keywords
focusing
labview
auto
focus
program
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201711000663.3A
Other languages
Chinese (zh)
Other versions
CN107843969B (en
Inventor
王茗祎
张庭振
孔繁培
曾亚光
韩定安
熊红莲
谭海曙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Foshan Linguistic Technology Co ltd
Original Assignee
Foshan University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foshan University filed Critical Foshan University
Priority to CN201711000663.3A priority Critical patent/CN107843969B/en
Publication of CN107843969A publication Critical patent/CN107843969A/en
Application granted granted Critical
Publication of CN107843969B publication Critical patent/CN107843969B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28Systems for automatic generation of focusing signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention provides a kind of multifocal frequency sweep OCT focus controls and its method, it is related to optical image technology field, including electric lift and focus adjusting mechanism, the electric lift includes objective table, aperture and the geometrical clamp for fixing measuring samples are provided with the objective table, convergent lens is provided with above the objective table, half-reflecting half mirror is provided with above the convergent lens;The focus adjusting mechanism includes swept light source and the first fiber coupler, the first fiber coupler light path is connected with reference path and sample arm, the reference path includes the first optical circulators, the first collimation lens and plane mirror, and the sample arm includes optical circulators, Polarization Controller.Usefulness of the present invention is to produce interference to analyze measuring samples with optical system focus apart from automatic focusing by introducing coherent light, effectively improve focusing accuracy, speed.

Description

A kind of multifocal frequency sweep OCT focus controls and its method
Technical field
The present invention relates to optical image technology field, especially a kind of multifocal frequency sweep OCT focus controls and its method.
Background technology
Generally by being manually adjusted, such focus process, focusing needs certain operation skill for traditional focusing Ingeniously, if operator lacks experience, focus can not often be determined.Current autofocus system mainly has by outer secondary Help the autofocus system of measuring apparatus and the automatic focusing system based on image quality evaluation.The former be by optical system with Auto-focusing is realized by imageable target distance, but this method installation and debugging are complicated and system architecture is complicated, therefore less made With.The latter is to search for focal position to the quality of gathered image using auto focus evaluation function, and the system is realized simply, It is easy to use, it is employed more.The automatic focusing system for being currently based on image quality evaluation is mainly moved using motor driven platform It is dynamic, and motion is fed back using focusing evaluation function so that in observed object adjustment focus.Both approaches all by The limitation of motor precision during motor movement, lag error and response speed etc., error of focusing can be caused.Due to optical system There is certain field depth, simply a part of surface of the not high sample of flatness is adjusted in many optical focusing systems On focal plane, the depth of field of optical system is not made full use of, sample is realized and increases clear visual field area in field depth.Cause This, in order to improve the speed of automatic focusing, precision and increase clear visual field area in field depth, the invention provides one kind Multifocal frequency sweep OCT focus adjustment methods and its device.
The content of the invention
Instant invention overcomes in the prior art the shortcomings that, there is provided a kind of multifocal frequency sweep OCT focus controls and its method, lead to Cross to introduce coherent light and produce and interfere to analyze measuring samples with optical system focus apart from automatic focusing, effectively improve focusing essence Degree, speed.
In order to solve the above-mentioned technical problem, the present invention is achieved by the following technical solutions:
A kind of multifocal frequency sweep OCT focus controls, including electric lift and focus adjusting mechanism, the electric lift include Objective table, aperture and the geometrical clamp for fixing measuring samples are provided with the objective table, and the top of the objective table is set There is convergent lens, half-reflecting half mirror is provided with above the convergent lens;The focus adjusting mechanism includes swept light source and first Fiber coupler, the first fiber coupler light path are connected with reference path and sample arm, and the reference path includes the One optical circulators, the first collimation lens and plane mirror, the sample arm include the second optical circulators, polarization control Device processed, second optical circulators are connected with the second collimation lens, photoswitch controller, the photoswitch controller by light path It is connected with the first fiber optic collimator mirror, the second fiber optic collimator mirror, the 3rd fiber optic collimator mirror, the 4th fiber optic collimator mirror, the polarization control Device processed, first optical circulators are connected with one second fiber coupler, and second fiber coupler and a photoelectricity are visited Device connection is surveyed, the photodetector is connected with computer, the computer and the electric up-down mechatronics.
Further, motor is provided with the electric lift, the motor is connected with the computer, on the motor Screw rod is connected with, the screw rod is threadedly coupled with the objective table.
Further, the aperture for adjusting the aperture size is provided with the objective table and adjusts knob.
Further, the half-reflecting half mirror and horizontal angle are at 45 °.
Further, the half-reflecting half mirror is the pellicle mirror with the high anti-saturating white light characteristic of infrared light.
Further, first fiber coupler is 2 × 1 fiber couplers, and second fiber coupler is 2 × 2 Fiber coupler.
Further, a kind of described multifocal frequency sweep OCT focus controls, focus adjustment method are as follows:
(1) measuring samples are arranged in the geometrical clamp of electric lift;
(2) in the Labview of computer auto-focusing program fore optics system the depth of field and focal length, in Labview Auto-focusing program acceptance of the bid focus position F and field depth D1-D2, auto-focusing program start working, pass through photoswitch Controller is controlled priority light extraction, gathers interference signal, and interference signal is received by a photoelectric detector, and telecommunications is changed into by optical signal Number, pass through Labview auto-focusing programmed acquisition electric signal;
(3) electrical signal data collected carries out Fourier transformation, shows and discharges of the coke in Labview auto-focusing program The position of focus and the position of several differences have successfully been demarcated in point calibration position F, the position of several differences, Labview auto-focusing program is by by the distance of the position of several differences to half-reflecting half mirror;
(4) Labview auto-focusing program by making difference, situation one two-by-two by the distance of several differences:If Difference is both less than 8 μm between two-by-two, and Labview auto-focusing program is judged as that measuring samples are that approximation is smooth, Labview's Auto-focusing program will calculate distance, delta S of the electric lift to focus1, last Labview auto-focusing driven by program electricity The step of measuring samples one is moved to focal plane by dynamic lift, electric lift, completes focusing;Situation two:If difference between two-by-two Both greater than or equal to 8 μm, then Labview auto-focusing program is judged as that measuring samples are out-of-flatnesses, and Labview's is automatic Focusing program, which will be used, automatically selects the optimal electric lift displacement Δ S of focusing algorithms selection2, last Labview from Dynamic focusing driven by program electric lift, it moves to the step of measuring samples one in field depth, measuring samples is tried one's best more regard Field is all clearly, to complete auto-focusing.
Compared with prior art, the beneficial effects of the invention are as follows:
The present invention realizes multifocal automatic focusing function, passes through labview using frequency sweep OCT automatic focusing methods are based on Program can realize the Comprehensive Control to electric lift, photoswitch, swept light source and photodetector, utilize frequency sweep OCT systems Collect interference signal to be analyzed to obtain distance of the 4 road light between different 4 points and half-reflecting half mirror, calculated using flatness Method and focusing algorithm is automatically selected, the flatness of measuring samples can be calculated, judge whether smooth, select focusing mode, So as to calculate measuring samples to the distance of the focus of this optical system or automatically select optimal displacement.Finally, labview journeys Focusing mode and result of calculation are fed back to electric lift by sequence, lifting platform realized after being fed back a moved further to calculate away from From realizing a step auto-focusing.
Brief description of the drawings
Fig. 1 is a kind of focus adjustment method implementing procedure figure of multifocal frequency sweep OCT focus controls of the present invention;
Fig. 2 is apparatus of the present invention light channel structure figure;
Fig. 3 is the structural representation of the electric lift;
Fig. 4 is the surface of position figure of four different acquisition points of measuring samples;
Fig. 5 is to sweep domain OCT general principle figures;
Fig. 6 is Labview auto-focusing sequential operation result coordinate diagram.
In figure:1- swept light sources, the fiber couplers of 2- first, the optical circulators of 3- first, the collimation lenses of 4- first, 5- are put down Face speculum, the optical circulators of 6- second, the collimation lenses of 7- second, 8- photoswitches controller, the fiber optic collimator mirrors of 9- first, 10- Second fiber optic collimator mirror, the fiber optic collimator mirrors of 11- the 3rd, the fiber optic collimator mirrors of 12- the 4th, 13- half-reflecting half mirrors, 14- convergent lenses, 15- electric lifts, 151- objective tables, 152- motors, 153- screw rods, 16- apertures adjustment knob, 17- geometrical clamps, 18- polarizations Controller, the fiber couplers of 19- second, 20- photodetectors, 21- computers, 22- apertures.
Embodiment
The preferred embodiments of the present invention are illustrated below, it will be appreciated that preferred embodiment described herein is only used In the description and interpretation present invention, it is not intended to limit the present invention.
As shown in Figures 2 and 3, a kind of multifocal frequency sweep OCT focus controls, including electric lift 15 and focus adjusting mechanism, Electric lift 15 includes objective table 151, and aperture 22 and the geometrical clamp for fixing measuring samples are provided with objective table 151 17, computer 21 electrically connects with electric lift 15, for controlling the lifting of electric lift 15, is provided with electric lift 15 Motor 152, motor 152 are connected with computer 21, the keying and rotation of the controlled motor 152 of computer 21, and screw rod is connected with motor 152 153, screw rod 153 is threadedly coupled with objective table 151, and motor 152 drives screw rod 153 to rotate, so as to realize control objective table 151 Lifting;The aperture for adjusting the size of aperture 22 is provided with objective table 15 and adjusts knob 16, by rotating aperture adjustment rotation Button 16 can adjust the size of aperture 22.
Convergent lens 14 is provided with the top of objective table 15, the top of convergent lens 14 is provided with half-reflecting half mirror 13, Preferably, half-reflecting half mirror 13 is the pellicle mirror with the high anti-saturating white light characteristic of infrared light, and half-reflecting half mirror 13 with it is horizontal The angle of line is at 45 °, and focus adjusting mechanism includes the fiber coupler 2 of swept light source 1 and first, it is preferable that the first fiber coupler 2 is 2 × 1 fiber couplers, the light path of the first fiber coupler 2 are connected with reference path and sample arm, and reference path includes the first light Circulator 3, the first collimation lens 4 and plane mirror 5 are learned, sample arm includes the second optical circulators 6, Polarization Controller 18, the second optical circulators 6 are connected with the second collimation lens 7, photoswitch controller 8, photoswitch controller 8 and first by light path Fiber optic collimator mirror 9, the second fiber optic collimator mirror 10, the 3rd fiber optic collimator mirror 11, the 4th fiber optic collimator mirror 12 connect, Polarization Controller 18th, the first optical circulators 3 are connected with one second fiber coupler 19, it is preferable that the second fiber coupler 19 is 2 × 2 optical fiber Coupler, the second fiber coupler 19 are connected with a photodetector 20, and photodetector 20 is connected with computer 21.
As shown in Figure 1 and Figure 4, it is a kind of focus adjustment method of multifocal frequency sweep OCT focus controls of the present invention:
(1) measuring samples are arranged in the geometrical clamp 17 of electric lift 15;
(2) in the Labview of computer 21 auto-focusing program fore optics system the depth of field and focal length, Labview auto-focusing program acceptance of the bid focus position F and field depth D1-D2, auto-focusing program are started working, passed through Photoswitch controller 8 is controlled priority light extraction, gathers interference signal, and interference signal is received by photodetector 20, believed by light Number electric signal is changed into, pass through Labview auto-focusing programmed acquisition electric signal;
(3) electrical signal data collected carries out Fourier transformation, shows and discharges of the coke in Labview auto-focusing program Point calibration position F, the position of several differences, in the present embodiment, the position of 4 differences is chosen, has successfully demarcated Jiao The position of point and the position of 4 differences, Labview auto-focusing program by by the position of 4 differences to half it is anti-partly The distance, delta z of lens 131, Δ z2, Δ z3, Δ z4
(4) Labview auto-focusing program is by by the distance, delta z of 4 differences1, Δ z2, Δ z3, Δ z4;Two-by-two Make poor, situation one:If 4 differences are both less than 8 μm, Labview auto-focusing program is judged as that measuring samples are approximate flat Whole, Labview auto-focusing program will calculate distance, delta S of the electric lift 15 to focus1, last Labview from Dynamic focusing driven by program electric lift 15, the step of measuring samples one is moved to focal plane by electric lift 15, completes focusing;Feelings Condition two:If for 4 differences both greater than or equal to 8 μm, Labview auto-focusing program is judged as that measuring samples are out-of-flatnesses , Labview auto-focusing program, which will be used, automatically selects the focusing optimal displacement Δ of electric lift 15 of algorithms selection S2, last Labview auto-focusing driven by program electric lift 15, it moves to the step of measuring samples one in field depth, It is all clearly, to complete auto-focusing to make measuring samples more visual field of trying one's best.
Fig. 2 also illustrates the light path of present system, and the sweep light of the generation time of swept light source 1 coding incides the first light Fine coupler 2, by splitting ratio 50:50, a semi-gloss enters reference path through the first optical circulators 3, and another semi-gloss is through the second light Entering sample arm through optical circulators 6, the light beam into reference path is emitted parallel reference light by the first collimation lens 4, Parallel reference light returns to the first optical circulators 3 through plane mirror 5, enters the second optical fiber coupling through the exit end of optical circulators 3 The wherein incidence end of clutch 19;Light beam into sample arm is emitted parallel sample light, photoswitch control by the second collimation lens 7 Device 8 processed successively opens the first optical fiber collimator 9, the second fiber optic collimator mirror 10, the 3rd fiber optic collimator mirror the 11, the 4th in chronological order The switch of the place light path of fiber optic collimator mirror 12, the sample light of outgoing, which through half-reflecting half mirror 13 reflexes to object lens 14 and is focused at, treats sample On the different point of product 4, in Fig. 4, the back reflected laser backtracking of sample light is to the second optical circulators 6, through second The exit end of optical circulators 6 enters light polarization modulator 18, finally enters 19 another incidence end of the second fiber coupler;Simultaneously with it is anti- It is emitted back towards the reference light come to interfere in the second fiber coupler 19, photodetector 21 is incided after interference signal is divided equally Positive-negative input end mouth, after opto-electronic conversion, be converted to electric signal and be input to computer 21.
Briefly explain the flatness algorithm of the present invention and automatically select algorithm and frequency sweep OCT general principles.
Flatness algorithm:Based on frequency sweep OCT principles, Fourier transformation can by focus to the high anti-saturating white light of infrared light half The distance △ F of anti-pellicle mirror 13, the distance, delta z of the difference of 4 light paths to the half-reflecting half mirror 13 of the saturating white light of anti-infrared light1, Δz2, Δ z3, Δ z4Shown in program coordinate diagram, flatness judgement factor Δ=8um, flatness judgment expression:
Automatically select algorithm:The differences of 4 light paths has been calculated in a program to the half anti-half of the saturating white light of anti-infrared light The distance, delta z of lens 131, Δ z2, Δ z3, Δ z4, and shown in program coordinate diagram.Focus F simultaneously, and 2 points before and after the depth of field D1, D2 are also sectioned out in coordinate diagram, as shown in Figure 6.The position of the point of 2 points in 4 differences of range difference maximum was found out before this Put, and seek the average value of the range difference of range difference maximum value Δ Z and 4 points two-by-twoDone again with the depth of field of optical system as Lower algorithm comparison, it is as follows to automatically select algorithm expression formula:
H values are drawn, program output feeds back to electric lift displacement Δ S2=H.
Frequency sweep OCT general principles:It is the interference theory based on low-coherent light to sweep domain OCT technology, and its physical basis is to use The Michelson's interferometer of swept light source, shown in theory structure such as Fig. 5 (a), beam splitting is passed through in the quasi-monochromatic light that swept light source 1 is sent Sample arm and reference path are incided after device light splitting respectively, the reflected light generation of sample rear orientation light and reference light is interfered, Interference light passes through on photodetector;Fig. 5 (b) is the interference signal for collecting spectrum, carries out Fourier transformation to it, can obtain The information of different depth position (shown in such as Fig. 5 (c)).According to Fig. 5 (a) imaging mode, it is reflected back from reference arm and reflection arm The light come is superimposed and interfered in half-reflecting half mirror 13, because detector is square-law detector, its interference light intensity
It can be expressed as after abbreviation:
Here I1And I2Be reference light and detection light direct current signal, z=z1+z2To interfere optical path difference, can also be defined as With the investigation depth of Aplanatic Surface, θ is the initial phase difference of interference.The clock signal that photodetector receives is different wave vectors Spectral signal:I(ki, z) and=A0γ1γ2cos(2kiZ+ θ), the spectrum interference signal that photodetector 20 receives passes through Fourier Leaf transformation:
It is different after Fourier transform The signal of depth can separate in space.
Finally it should be noted that:The preferred embodiments of the present invention are these are only, are not intended to limit the invention, although The present invention is described in detail with reference to embodiment, for those skilled in the art, it still can be to foregoing Technical scheme described in each embodiment is modified, or to which part technical characteristic carry out equivalent substitution, but it is all Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements made etc., the protection of the present invention should be included in Within the scope of.

Claims (7)

1. a kind of multifocal frequency sweep OCT focus controls, it is characterised in that described electronic including electric lift and focus adjusting mechanism Lift includes objective table, and aperture and the geometrical clamp for fixing measuring samples, the objective table are provided with the objective table Top be provided with convergent lens, be provided with half-reflecting half mirror above the convergent lens;The focus adjusting mechanism includes frequency sweep Light source and the first fiber coupler, the first fiber coupler light path are connected with reference path and sample arm, the reference Light path includes the first optical circulators, the first collimation lens and plane mirror, and the sample arm includes the second optics ring Shape device, Polarization Controller, second optical circulators are connected with the second collimation lens, photoswitch controller by light path, described Photoswitch controller and the first fiber optic collimator mirror, the second fiber optic collimator mirror, the 3rd fiber optic collimator mirror, the 4th fiber optic collimator mirror connect Connect, the Polarization Controller, first optical circulators are connected with one second fiber coupler, second fiber coupling Device is connected with a photodetector, and the photodetector is connected with computer, the computer and the electric up-down mechatronics.
A kind of 2. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the electric lift Motor is inside provided with, the motor is connected with the computer, and screw rod, the screw rod and the objective table are connected with the motor Threaded connection.
3. a kind of multifocal frequency sweep OCT focus controls according to claim 2, it is characterised in that set on the objective table It is equipped with the aperture for adjusting the aperture size and adjusts knob.
A kind of 4. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the half-reflecting half mirror It is at 45 ° with horizontal angle.
A kind of 5. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the half-reflecting half mirror It is the pellicle mirror with the high anti-saturating white light characteristic of infrared light.
A kind of 6. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the first optical fiber coupling Clutch is 2 × 1 fiber couplers, and second fiber coupler is 2 × 2 fiber couplers.
7. a kind of multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that focus adjustment method is as follows:
(1) measuring samples are arranged in the geometrical clamp of electric lift;
(2) in the Labview of the computer auto-focusing program fore optics system the depth of field and focal length, Labview from Dynamic focusing program acceptance of the bid focus position F and field depth D1-D2, auto-focusing program are started working, controlled by photoswitch Device is controlled priority light extraction, gathers interference signal, and interference signal is received by a photoelectric detector, and electric signal is changed into by optical signal, Pass through Labview auto-focusing programmed acquisition electric signal;
(3) electrical signal data collected carries out Fourier transformation, and focus mark is shown in Labview auto-focusing program F is put in positioning, the position of several differences, has successfully demarcated the position of focus and the position of several differences, Labview's Auto-focusing program is by by the distance of the position of several differences to half-reflecting half mirror;
(4) Labview auto-focusing program by making difference, situation one two-by-two by the distance of several differences:If two-by-two Between difference be both less than 8 μm, Labview auto-focusing program is judged as that measuring samples are approximate smooth, and Labview's is automatic Program of focusing will calculate distance, delta S of the electric lift to focus1, the last Labview electronic liter of auto-focusing driven by program The step of measuring samples one is moved to focal plane by drop machine, electric lift, completes focusing;Situation two:If difference is all big between two-by-two In or equal to 8 μm, then Labview auto-focusing program is judged as that measuring samples are out-of-flatnesses, Labview auto-focusing Program, which will be used, automatically selects the optimal electric lift displacement Δ S of focusing algorithms selection2, last Labview's is automatic right Burnt driven by program electric lift, it moves to the step of measuring samples one in field depth, measuring samples is tried one's best more visual fields all It is clearly, to complete auto-focusing.
CN201711000663.3A 2017-10-24 2017-10-24 Multi-focus frequency-sweeping OCT focusing device and method thereof Active CN107843969B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711000663.3A CN107843969B (en) 2017-10-24 2017-10-24 Multi-focus frequency-sweeping OCT focusing device and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711000663.3A CN107843969B (en) 2017-10-24 2017-10-24 Multi-focus frequency-sweeping OCT focusing device and method thereof

Publications (2)

Publication Number Publication Date
CN107843969A true CN107843969A (en) 2018-03-27
CN107843969B CN107843969B (en) 2020-09-22

Family

ID=61663025

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711000663.3A Active CN107843969B (en) 2017-10-24 2017-10-24 Multi-focus frequency-sweeping OCT focusing device and method thereof

Country Status (1)

Country Link
CN (1) CN107843969B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108982455A (en) * 2018-07-31 2018-12-11 浙江大学 A kind of multifocal light slice fluorescent microscopic imaging method and device
CN109807471A (en) * 2019-02-01 2019-05-28 佛山科学技术学院 A kind of laser mark printing device and method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060001955A1 (en) * 2004-06-30 2006-01-05 Applera Corporation Methods, software, and apparatus for focusing an optical system using computer image analysis
CN101630061A (en) * 2009-08-17 2010-01-20 公安部物证鉴定中心 Optical confocal three-dimensional data acquisition system of tool traces and acquisition method thereof
CN102053359A (en) * 2009-10-29 2011-05-11 奥林巴斯株式会社 Microscope apparatus and microscope observation method
CN105937889A (en) * 2016-06-30 2016-09-14 佛山科学技术学院 Measuring device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060001955A1 (en) * 2004-06-30 2006-01-05 Applera Corporation Methods, software, and apparatus for focusing an optical system using computer image analysis
CN101630061A (en) * 2009-08-17 2010-01-20 公安部物证鉴定中心 Optical confocal three-dimensional data acquisition system of tool traces and acquisition method thereof
CN102053359A (en) * 2009-10-29 2011-05-11 奥林巴斯株式会社 Microscope apparatus and microscope observation method
CN105937889A (en) * 2016-06-30 2016-09-14 佛山科学技术学院 Measuring device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108982455A (en) * 2018-07-31 2018-12-11 浙江大学 A kind of multifocal light slice fluorescent microscopic imaging method and device
CN108982455B (en) * 2018-07-31 2020-08-18 浙江大学 Multi-focus light section fluorescence microscopic imaging method and device
CN109807471A (en) * 2019-02-01 2019-05-28 佛山科学技术学院 A kind of laser mark printing device and method
CN109807471B (en) * 2019-02-01 2024-03-26 佛山科学技术学院 Laser marking device and method

Also Published As

Publication number Publication date
CN107843969B (en) 2020-09-22

Similar Documents

Publication Publication Date Title
CN105675266A (en) Device and method for measuring modulation transfer function of optical lens based on infinite conjugate optical path
CN107765426B (en) Self-focusing laser scanning projection device based on symmetrical out-of-focus double detectors
CN109807471A (en) A kind of laser mark printing device and method
WO2024051198A1 (en) Auto-focusing system and method based on line scanning, and application thereof
CN107843969A (en) A kind of multifocal frequency sweep OCT focus controls and its method
CN107728304B (en) Multi-focus frequency domain OCT (optical coherence tomography) self-adaptive focusing device and method thereof
CN109540474B (en) Rear-mounted pupil laser differential confocal focal length measuring method and device
US9097517B2 (en) Tilt minimization through intensity control of light source
CN106842534B (en) Automatic focusing microscope based on double CCD and measuring method
JP2016148569A (en) Image measuring method and image measuring device
CN2575604Y (en) Outdoor metering display box
US11187519B2 (en) Imaging method and imaging apparatus
CN108318887B (en) Laser-assisted binocular range finding system
CN207557570U (en) A kind of multifocal frequency sweep OCT focus controls
US11313789B2 (en) Measurement system based on optical interference and measuring method using same
RU2012135405A (en) TWO-PHOTON SCANNING MICROSCOPE WITH AUTOMATIC PRECISION FOCUSING OF THE IMAGE AND METHOD OF AUTOMATIC PRECISION FOCUSING OF THE IMAGE
CN207515998U (en) A kind of high frequency High Linear puts microscopy examining system
US10761398B2 (en) Imaging ellipsometer system utilizing a tunable acoustic gradient lens
CN109916335A (en) The Atomatic focusing method of radiographic measurement equipment and radiographic measurement equipment
JP2828145B2 (en) Optical section microscope apparatus and method for aligning optical means thereof
CN109211117A (en) Wire width measuring system and wire width measuring device
CN221225134U (en) Automatic focusing device and defect detection system
CN207557569U (en) A kind of multifocal frequency domain OCT self-adapting focusing devices
CN112505655B (en) Quick focusing device and method for frequency modulation laser ranging system based on light intensity detection
CN109991191B (en) Refractive index measuring method for bilateral dislocation differential confocal lens

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20221219

Address after: 528225 Room 306, Floor 3, Building A, Group 1, Phase I, Guangdong Biomedical Industry Base, Xianxi Section, National Highway 321, Shishan Town, Nanhai District, Foshan City, Guangdong Province (application for residence)

Patentee after: Foshan Linguistic Technology Co.,Ltd.

Address before: 528000 No. 18, Jiangwan Road, Chancheng District, Guangdong, Foshan

Patentee before: FOSHAN University