CN107843969A - A kind of multifocal frequency sweep OCT focus controls and its method - Google Patents
A kind of multifocal frequency sweep OCT focus controls and its method Download PDFInfo
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- CN107843969A CN107843969A CN201711000663.3A CN201711000663A CN107843969A CN 107843969 A CN107843969 A CN 107843969A CN 201711000663 A CN201711000663 A CN 201711000663A CN 107843969 A CN107843969 A CN 107843969A
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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Abstract
The present invention provides a kind of multifocal frequency sweep OCT focus controls and its method, it is related to optical image technology field, including electric lift and focus adjusting mechanism, the electric lift includes objective table, aperture and the geometrical clamp for fixing measuring samples are provided with the objective table, convergent lens is provided with above the objective table, half-reflecting half mirror is provided with above the convergent lens;The focus adjusting mechanism includes swept light source and the first fiber coupler, the first fiber coupler light path is connected with reference path and sample arm, the reference path includes the first optical circulators, the first collimation lens and plane mirror, and the sample arm includes optical circulators, Polarization Controller.Usefulness of the present invention is to produce interference to analyze measuring samples with optical system focus apart from automatic focusing by introducing coherent light, effectively improve focusing accuracy, speed.
Description
Technical field
The present invention relates to optical image technology field, especially a kind of multifocal frequency sweep OCT focus controls and its method.
Background technology
Generally by being manually adjusted, such focus process, focusing needs certain operation skill for traditional focusing
Ingeniously, if operator lacks experience, focus can not often be determined.Current autofocus system mainly has by outer secondary
Help the autofocus system of measuring apparatus and the automatic focusing system based on image quality evaluation.The former be by optical system with
Auto-focusing is realized by imageable target distance, but this method installation and debugging are complicated and system architecture is complicated, therefore less made
With.The latter is to search for focal position to the quality of gathered image using auto focus evaluation function, and the system is realized simply,
It is easy to use, it is employed more.The automatic focusing system for being currently based on image quality evaluation is mainly moved using motor driven platform
It is dynamic, and motion is fed back using focusing evaluation function so that in observed object adjustment focus.Both approaches all by
The limitation of motor precision during motor movement, lag error and response speed etc., error of focusing can be caused.Due to optical system
There is certain field depth, simply a part of surface of the not high sample of flatness is adjusted in many optical focusing systems
On focal plane, the depth of field of optical system is not made full use of, sample is realized and increases clear visual field area in field depth.Cause
This, in order to improve the speed of automatic focusing, precision and increase clear visual field area in field depth, the invention provides one kind
Multifocal frequency sweep OCT focus adjustment methods and its device.
The content of the invention
Instant invention overcomes in the prior art the shortcomings that, there is provided a kind of multifocal frequency sweep OCT focus controls and its method, lead to
Cross to introduce coherent light and produce and interfere to analyze measuring samples with optical system focus apart from automatic focusing, effectively improve focusing essence
Degree, speed.
In order to solve the above-mentioned technical problem, the present invention is achieved by the following technical solutions:
A kind of multifocal frequency sweep OCT focus controls, including electric lift and focus adjusting mechanism, the electric lift include
Objective table, aperture and the geometrical clamp for fixing measuring samples are provided with the objective table, and the top of the objective table is set
There is convergent lens, half-reflecting half mirror is provided with above the convergent lens;The focus adjusting mechanism includes swept light source and first
Fiber coupler, the first fiber coupler light path are connected with reference path and sample arm, and the reference path includes the
One optical circulators, the first collimation lens and plane mirror, the sample arm include the second optical circulators, polarization control
Device processed, second optical circulators are connected with the second collimation lens, photoswitch controller, the photoswitch controller by light path
It is connected with the first fiber optic collimator mirror, the second fiber optic collimator mirror, the 3rd fiber optic collimator mirror, the 4th fiber optic collimator mirror, the polarization control
Device processed, first optical circulators are connected with one second fiber coupler, and second fiber coupler and a photoelectricity are visited
Device connection is surveyed, the photodetector is connected with computer, the computer and the electric up-down mechatronics.
Further, motor is provided with the electric lift, the motor is connected with the computer, on the motor
Screw rod is connected with, the screw rod is threadedly coupled with the objective table.
Further, the aperture for adjusting the aperture size is provided with the objective table and adjusts knob.
Further, the half-reflecting half mirror and horizontal angle are at 45 °.
Further, the half-reflecting half mirror is the pellicle mirror with the high anti-saturating white light characteristic of infrared light.
Further, first fiber coupler is 2 × 1 fiber couplers, and second fiber coupler is 2 × 2
Fiber coupler.
Further, a kind of described multifocal frequency sweep OCT focus controls, focus adjustment method are as follows:
(1) measuring samples are arranged in the geometrical clamp of electric lift;
(2) in the Labview of computer auto-focusing program fore optics system the depth of field and focal length, in Labview
Auto-focusing program acceptance of the bid focus position F and field depth D1-D2, auto-focusing program start working, pass through photoswitch
Controller is controlled priority light extraction, gathers interference signal, and interference signal is received by a photoelectric detector, and telecommunications is changed into by optical signal
Number, pass through Labview auto-focusing programmed acquisition electric signal;
(3) electrical signal data collected carries out Fourier transformation, shows and discharges of the coke in Labview auto-focusing program
The position of focus and the position of several differences have successfully been demarcated in point calibration position F, the position of several differences,
Labview auto-focusing program is by by the distance of the position of several differences to half-reflecting half mirror;
(4) Labview auto-focusing program by making difference, situation one two-by-two by the distance of several differences:If
Difference is both less than 8 μm between two-by-two, and Labview auto-focusing program is judged as that measuring samples are that approximation is smooth, Labview's
Auto-focusing program will calculate distance, delta S of the electric lift to focus1, last Labview auto-focusing driven by program electricity
The step of measuring samples one is moved to focal plane by dynamic lift, electric lift, completes focusing;Situation two:If difference between two-by-two
Both greater than or equal to 8 μm, then Labview auto-focusing program is judged as that measuring samples are out-of-flatnesses, and Labview's is automatic
Focusing program, which will be used, automatically selects the optimal electric lift displacement Δ S of focusing algorithms selection2, last Labview from
Dynamic focusing driven by program electric lift, it moves to the step of measuring samples one in field depth, measuring samples is tried one's best more regard
Field is all clearly, to complete auto-focusing.
Compared with prior art, the beneficial effects of the invention are as follows:
The present invention realizes multifocal automatic focusing function, passes through labview using frequency sweep OCT automatic focusing methods are based on
Program can realize the Comprehensive Control to electric lift, photoswitch, swept light source and photodetector, utilize frequency sweep OCT systems
Collect interference signal to be analyzed to obtain distance of the 4 road light between different 4 points and half-reflecting half mirror, calculated using flatness
Method and focusing algorithm is automatically selected, the flatness of measuring samples can be calculated, judge whether smooth, select focusing mode,
So as to calculate measuring samples to the distance of the focus of this optical system or automatically select optimal displacement.Finally, labview journeys
Focusing mode and result of calculation are fed back to electric lift by sequence, lifting platform realized after being fed back a moved further to calculate away from
From realizing a step auto-focusing.
Brief description of the drawings
Fig. 1 is a kind of focus adjustment method implementing procedure figure of multifocal frequency sweep OCT focus controls of the present invention;
Fig. 2 is apparatus of the present invention light channel structure figure;
Fig. 3 is the structural representation of the electric lift;
Fig. 4 is the surface of position figure of four different acquisition points of measuring samples;
Fig. 5 is to sweep domain OCT general principle figures;
Fig. 6 is Labview auto-focusing sequential operation result coordinate diagram.
In figure:1- swept light sources, the fiber couplers of 2- first, the optical circulators of 3- first, the collimation lenses of 4- first, 5- are put down
Face speculum, the optical circulators of 6- second, the collimation lenses of 7- second, 8- photoswitches controller, the fiber optic collimator mirrors of 9- first, 10-
Second fiber optic collimator mirror, the fiber optic collimator mirrors of 11- the 3rd, the fiber optic collimator mirrors of 12- the 4th, 13- half-reflecting half mirrors, 14- convergent lenses,
15- electric lifts, 151- objective tables, 152- motors, 153- screw rods, 16- apertures adjustment knob, 17- geometrical clamps, 18- polarizations
Controller, the fiber couplers of 19- second, 20- photodetectors, 21- computers, 22- apertures.
Embodiment
The preferred embodiments of the present invention are illustrated below, it will be appreciated that preferred embodiment described herein is only used
In the description and interpretation present invention, it is not intended to limit the present invention.
As shown in Figures 2 and 3, a kind of multifocal frequency sweep OCT focus controls, including electric lift 15 and focus adjusting mechanism,
Electric lift 15 includes objective table 151, and aperture 22 and the geometrical clamp for fixing measuring samples are provided with objective table 151
17, computer 21 electrically connects with electric lift 15, for controlling the lifting of electric lift 15, is provided with electric lift 15
Motor 152, motor 152 are connected with computer 21, the keying and rotation of the controlled motor 152 of computer 21, and screw rod is connected with motor 152
153, screw rod 153 is threadedly coupled with objective table 151, and motor 152 drives screw rod 153 to rotate, so as to realize control objective table 151
Lifting;The aperture for adjusting the size of aperture 22 is provided with objective table 15 and adjusts knob 16, by rotating aperture adjustment rotation
Button 16 can adjust the size of aperture 22.
Convergent lens 14 is provided with the top of objective table 15, the top of convergent lens 14 is provided with half-reflecting half mirror 13,
Preferably, half-reflecting half mirror 13 is the pellicle mirror with the high anti-saturating white light characteristic of infrared light, and half-reflecting half mirror 13 with it is horizontal
The angle of line is at 45 °, and focus adjusting mechanism includes the fiber coupler 2 of swept light source 1 and first, it is preferable that the first fiber coupler 2 is
2 × 1 fiber couplers, the light path of the first fiber coupler 2 are connected with reference path and sample arm, and reference path includes the first light
Circulator 3, the first collimation lens 4 and plane mirror 5 are learned, sample arm includes the second optical circulators 6, Polarization Controller
18, the second optical circulators 6 are connected with the second collimation lens 7, photoswitch controller 8, photoswitch controller 8 and first by light path
Fiber optic collimator mirror 9, the second fiber optic collimator mirror 10, the 3rd fiber optic collimator mirror 11, the 4th fiber optic collimator mirror 12 connect, Polarization Controller
18th, the first optical circulators 3 are connected with one second fiber coupler 19, it is preferable that the second fiber coupler 19 is 2 × 2 optical fiber
Coupler, the second fiber coupler 19 are connected with a photodetector 20, and photodetector 20 is connected with computer 21.
As shown in Figure 1 and Figure 4, it is a kind of focus adjustment method of multifocal frequency sweep OCT focus controls of the present invention:
(1) measuring samples are arranged in the geometrical clamp 17 of electric lift 15;
(2) in the Labview of computer 21 auto-focusing program fore optics system the depth of field and focal length,
Labview auto-focusing program acceptance of the bid focus position F and field depth D1-D2, auto-focusing program are started working, passed through
Photoswitch controller 8 is controlled priority light extraction, gathers interference signal, and interference signal is received by photodetector 20, believed by light
Number electric signal is changed into, pass through Labview auto-focusing programmed acquisition electric signal;
(3) electrical signal data collected carries out Fourier transformation, shows and discharges of the coke in Labview auto-focusing program
Point calibration position F, the position of several differences, in the present embodiment, the position of 4 differences is chosen, has successfully demarcated Jiao
The position of point and the position of 4 differences, Labview auto-focusing program by by the position of 4 differences to half it is anti-partly
The distance, delta z of lens 131, Δ z2, Δ z3, Δ z4;
(4) Labview auto-focusing program is by by the distance, delta z of 4 differences1, Δ z2, Δ z3, Δ z4;Two-by-two
Make poor, situation one:If 4 differences are both less than 8 μm, Labview auto-focusing program is judged as that measuring samples are approximate flat
Whole, Labview auto-focusing program will calculate distance, delta S of the electric lift 15 to focus1, last Labview from
Dynamic focusing driven by program electric lift 15, the step of measuring samples one is moved to focal plane by electric lift 15, completes focusing;Feelings
Condition two:If for 4 differences both greater than or equal to 8 μm, Labview auto-focusing program is judged as that measuring samples are out-of-flatnesses
, Labview auto-focusing program, which will be used, automatically selects the focusing optimal displacement Δ of electric lift 15 of algorithms selection
S2, last Labview auto-focusing driven by program electric lift 15, it moves to the step of measuring samples one in field depth,
It is all clearly, to complete auto-focusing to make measuring samples more visual field of trying one's best.
Fig. 2 also illustrates the light path of present system, and the sweep light of the generation time of swept light source 1 coding incides the first light
Fine coupler 2, by splitting ratio 50:50, a semi-gloss enters reference path through the first optical circulators 3, and another semi-gloss is through the second light
Entering sample arm through optical circulators 6, the light beam into reference path is emitted parallel reference light by the first collimation lens 4,
Parallel reference light returns to the first optical circulators 3 through plane mirror 5, enters the second optical fiber coupling through the exit end of optical circulators 3
The wherein incidence end of clutch 19;Light beam into sample arm is emitted parallel sample light, photoswitch control by the second collimation lens 7
Device 8 processed successively opens the first optical fiber collimator 9, the second fiber optic collimator mirror 10, the 3rd fiber optic collimator mirror the 11, the 4th in chronological order
The switch of the place light path of fiber optic collimator mirror 12, the sample light of outgoing, which through half-reflecting half mirror 13 reflexes to object lens 14 and is focused at, treats sample
On the different point of product 4, in Fig. 4, the back reflected laser backtracking of sample light is to the second optical circulators 6, through second
The exit end of optical circulators 6 enters light polarization modulator 18, finally enters 19 another incidence end of the second fiber coupler;Simultaneously with it is anti-
It is emitted back towards the reference light come to interfere in the second fiber coupler 19, photodetector 21 is incided after interference signal is divided equally
Positive-negative input end mouth, after opto-electronic conversion, be converted to electric signal and be input to computer 21.
Briefly explain the flatness algorithm of the present invention and automatically select algorithm and frequency sweep OCT general principles.
Flatness algorithm:Based on frequency sweep OCT principles, Fourier transformation can by focus to the high anti-saturating white light of infrared light half
The distance △ F of anti-pellicle mirror 13, the distance, delta z of the difference of 4 light paths to the half-reflecting half mirror 13 of the saturating white light of anti-infrared light1,
Δz2, Δ z3, Δ z4Shown in program coordinate diagram, flatness judgement factor Δ=8um, flatness judgment expression:
Automatically select algorithm:The differences of 4 light paths has been calculated in a program to the half anti-half of the saturating white light of anti-infrared light
The distance, delta z of lens 131, Δ z2, Δ z3, Δ z4, and shown in program coordinate diagram.Focus F simultaneously, and 2 points before and after the depth of field
D1, D2 are also sectioned out in coordinate diagram, as shown in Figure 6.The position of the point of 2 points in 4 differences of range difference maximum was found out before this
Put, and seek the average value of the range difference of range difference maximum value Δ Z and 4 points two-by-twoDone again with the depth of field of optical system as
Lower algorithm comparison, it is as follows to automatically select algorithm expression formula:
H values are drawn, program output feeds back to electric lift displacement Δ S2=H.
Frequency sweep OCT general principles:It is the interference theory based on low-coherent light to sweep domain OCT technology, and its physical basis is to use
The Michelson's interferometer of swept light source, shown in theory structure such as Fig. 5 (a), beam splitting is passed through in the quasi-monochromatic light that swept light source 1 is sent
Sample arm and reference path are incided after device light splitting respectively, the reflected light generation of sample rear orientation light and reference light is interfered,
Interference light passes through on photodetector;Fig. 5 (b) is the interference signal for collecting spectrum, carries out Fourier transformation to it, can obtain
The information of different depth position (shown in such as Fig. 5 (c)).According to Fig. 5 (a) imaging mode, it is reflected back from reference arm and reflection arm
The light come is superimposed and interfered in half-reflecting half mirror 13, because detector is square-law detector, its interference light intensity
It can be expressed as after abbreviation:
Here I1And I2Be reference light and detection light direct current signal, z=z1+z2To interfere optical path difference, can also be defined as
With the investigation depth of Aplanatic Surface, θ is the initial phase difference of interference.The clock signal that photodetector receives is different wave vectors
Spectral signal:I(ki, z) and=A0γ1γ2cos(2kiZ+ θ), the spectrum interference signal that photodetector 20 receives passes through Fourier
Leaf transformation:
It is different after Fourier transform
The signal of depth can separate in space.
Finally it should be noted that:The preferred embodiments of the present invention are these are only, are not intended to limit the invention, although
The present invention is described in detail with reference to embodiment, for those skilled in the art, it still can be to foregoing
Technical scheme described in each embodiment is modified, or to which part technical characteristic carry out equivalent substitution, but it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements made etc., the protection of the present invention should be included in
Within the scope of.
Claims (7)
1. a kind of multifocal frequency sweep OCT focus controls, it is characterised in that described electronic including electric lift and focus adjusting mechanism
Lift includes objective table, and aperture and the geometrical clamp for fixing measuring samples, the objective table are provided with the objective table
Top be provided with convergent lens, be provided with half-reflecting half mirror above the convergent lens;The focus adjusting mechanism includes frequency sweep
Light source and the first fiber coupler, the first fiber coupler light path are connected with reference path and sample arm, the reference
Light path includes the first optical circulators, the first collimation lens and plane mirror, and the sample arm includes the second optics ring
Shape device, Polarization Controller, second optical circulators are connected with the second collimation lens, photoswitch controller by light path, described
Photoswitch controller and the first fiber optic collimator mirror, the second fiber optic collimator mirror, the 3rd fiber optic collimator mirror, the 4th fiber optic collimator mirror connect
Connect, the Polarization Controller, first optical circulators are connected with one second fiber coupler, second fiber coupling
Device is connected with a photodetector, and the photodetector is connected with computer, the computer and the electric up-down mechatronics.
A kind of 2. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the electric lift
Motor is inside provided with, the motor is connected with the computer, and screw rod, the screw rod and the objective table are connected with the motor
Threaded connection.
3. a kind of multifocal frequency sweep OCT focus controls according to claim 2, it is characterised in that set on the objective table
It is equipped with the aperture for adjusting the aperture size and adjusts knob.
A kind of 4. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the half-reflecting half mirror
It is at 45 ° with horizontal angle.
A kind of 5. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the half-reflecting half mirror
It is the pellicle mirror with the high anti-saturating white light characteristic of infrared light.
A kind of 6. multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that the first optical fiber coupling
Clutch is 2 × 1 fiber couplers, and second fiber coupler is 2 × 2 fiber couplers.
7. a kind of multifocal frequency sweep OCT focus controls according to claim 1, it is characterised in that focus adjustment method is as follows:
(1) measuring samples are arranged in the geometrical clamp of electric lift;
(2) in the Labview of the computer auto-focusing program fore optics system the depth of field and focal length, Labview from
Dynamic focusing program acceptance of the bid focus position F and field depth D1-D2, auto-focusing program are started working, controlled by photoswitch
Device is controlled priority light extraction, gathers interference signal, and interference signal is received by a photoelectric detector, and electric signal is changed into by optical signal,
Pass through Labview auto-focusing programmed acquisition electric signal;
(3) electrical signal data collected carries out Fourier transformation, and focus mark is shown in Labview auto-focusing program
F is put in positioning, the position of several differences, has successfully demarcated the position of focus and the position of several differences, Labview's
Auto-focusing program is by by the distance of the position of several differences to half-reflecting half mirror;
(4) Labview auto-focusing program by making difference, situation one two-by-two by the distance of several differences:If two-by-two
Between difference be both less than 8 μm, Labview auto-focusing program is judged as that measuring samples are approximate smooth, and Labview's is automatic
Program of focusing will calculate distance, delta S of the electric lift to focus1, the last Labview electronic liter of auto-focusing driven by program
The step of measuring samples one is moved to focal plane by drop machine, electric lift, completes focusing;Situation two:If difference is all big between two-by-two
In or equal to 8 μm, then Labview auto-focusing program is judged as that measuring samples are out-of-flatnesses, Labview auto-focusing
Program, which will be used, automatically selects the optimal electric lift displacement Δ S of focusing algorithms selection2, last Labview's is automatic right
Burnt driven by program electric lift, it moves to the step of measuring samples one in field depth, measuring samples is tried one's best more visual fields all
It is clearly, to complete auto-focusing.
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