CN115452859A - Six-face detection mechanism and detection device - Google Patents
Six-face detection mechanism and detection device Download PDFInfo
- Publication number
- CN115452859A CN115452859A CN202211247879.0A CN202211247879A CN115452859A CN 115452859 A CN115452859 A CN 115452859A CN 202211247879 A CN202211247879 A CN 202211247879A CN 115452859 A CN115452859 A CN 115452859A
- Authority
- CN
- China
- Prior art keywords
- chip
- adsorption
- detection
- piece
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 105
- 230000007246 mechanism Effects 0.000 title claims abstract description 35
- 238000001179 sorption measurement Methods 0.000 claims abstract description 124
- 230000000087 stabilizing effect Effects 0.000 claims description 19
- 230000003019 stabilising effect Effects 0.000 claims 3
- 238000010521 absorption reaction Methods 0.000 abstract description 13
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Abstract
The invention provides a six-face detection mechanism and a detection device, which belong to the technical field of detection and comprise the following components: a six-side detection mechanism comprises a bracket; a handling assembly; the adsorption component is provided with a first adsorption piece and a second adsorption piece; the detection assembly is provided with a first detection assembly and a second detection assembly; the first detection assembly is arranged corresponding to the first suction piece; the second detection assembly is arranged corresponding to the second adsorption piece. This device is through the absorption mouth on the first working end face of first absorption piece, adsorb the chip that awaits measuring through atmospheric pressure, first determine module is preceding to the chip that awaits measuring, afterwards, a left side, right side and upper surface detect, the second adsorbs the piece and uses with the cooperation of second determine module, detect the lower surface of the chip that awaits measuring, the second adsorbs the piece and adsorbs the chip upper surface that awaits measuring, the chip lower surface that awaits measuring can be clear complete show for the second determine module, the lower surface of the chip that awaits measuring also can be clearly detected, the comprehensiveness and the accuracy that the chip that awaits measuring detected have been guaranteed.
Description
Technical Field
The invention relates to the technical field of detection, in particular to a six-surface detection mechanism and a detection device.
Background
Integrated Circuits (ICs), also known as microchips, chips, or dies, are a way to miniaturize circuits, including semiconductor devices, including passive components, and the like, and are often fabricated on the surface of semiconductor wafers.
With the development of the semiconductor industry, the thinner the thickness of an integrated circuit chip is, the higher the processing and detection precision of the chip is. The current chip need detect through detection mechanism after processing is accomplished, in order to ensure that chip quality and performance are qualified, current detection means uses the manipulator to place the chip that awaits measuring on the plane that awaits measuring through the mode of pressing from both sides the clamp usually, but place back on the plane that awaits measuring when the chip that awaits measuring, the lower terminal surface of the chip that awaits measuring can be sheltered from by the plane that awaits measuring, select among the prior art to place the chip on transparent material's the plane that awaits measuring, but transparent platform is because influences such as printing opacity effect or dust, can increase the lower terminal surface detection degree of difficulty of the chip that awaits measuring, lead to the chip that awaits measuring comprehensive detection inaccurate.
Disclosure of Invention
Therefore, the technical problem to be solved by the present invention is to overcome the defect of inaccurate overall detection of the chip to be detected in the prior art, and thereby provide a six-surface detection mechanism and a detection device.
In order to solve the technical problem, the invention provides a six-face detection mechanism, which comprises:
the bracket is arranged on the detection platform;
the carrying assembly is connected with the bracket in a sliding manner;
the adsorption component is provided with a first adsorption part and a second adsorption part;
the first suction accessory is provided with a first working end face for sucking a chip to be detected; an adsorption port is formed in the first working end face; the first adsorption part is internally provided with a first pipeline for gas circulation, and the first pipeline is communicated with the adsorption port; the adsorption port of the first adsorption part faces upwards;
the second adsorption piece is arranged on the bracket in a sliding manner; the second adsorption piece is internally provided with a pipeline through which gas passes; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline inside the second adsorption part;
a detection assembly having a first detection assembly and a second detection assembly; the first detection assembly is arranged corresponding to the first suction piece; the second detection assembly and the second adsorption piece are arranged correspondingly.
As a preferred scheme, the first working end surface is smaller than the surface of the chip to be detected; the second working end face is smaller than the surface of the chip to be detected.
Preferably, the first working end surface is parallel to the second working end surface.
Preferably, the second adsorption part is connected with a motor; the second adsorption piece is driven by the motor to rotate along the center line of the second adsorption piece.
Preferably, the method further comprises the following steps:
the first moving assembly is arranged between the second adsorption piece and the bracket;
preferably, the first moving assembly includes:
the first stabilizing plate is fixedly connected with the second adsorption piece;
a first sliding plate slidably connected to the first stabilizing plate;
preferably, the first moving assembly further comprises:
the second stabilizing plate is fixedly connected with the first sliding plate;
a second sliding plate slidably connected to the second stabilizing plate
A detection device further comprises the six-side detection mechanism.
The technical scheme of the invention has the following advantages:
1. the invention provides a six-face detection mechanism, which comprises a bracket, a detection platform and a detection mechanism, wherein the bracket is arranged on the detection platform; the carrying assembly is connected with the bracket in a sliding manner; the adsorption component is provided with a first adsorption piece and a second adsorption piece; the first suction accessory is provided with a first working end face for sucking the chip to be detected; an adsorption port is formed in the first working end face; the first adsorption part is internally provided with a first pipeline for gas circulation, and the first pipeline is communicated with the adsorption port; the adsorption port of the first adsorption part faces upwards; the second adsorption piece is arranged on the bracket in a sliding manner; a pipeline through which gas passes is arranged in the second adsorption piece; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline inside the second adsorption part; a detection assembly having a first detection assembly and a second detection assembly; the first detection assembly is arranged corresponding to the first suction piece; the second detection assembly and the second adsorption piece are correspondingly arranged. This device adsorbs the mouth through the first absorption on the first work terminal surface of piece, adsorb the chip that awaits measuring through atmospheric pressure, through first determine module to the chip that awaits measuring before, after, a left side, right side and upside surface detect, the rethread second adsorbs piece and uses with the cooperation of second determine module, detect the lower surface of chip that awaits measuring, the second adsorbs the piece and adsorbs the chip upper surface that awaits measuring, make the lower surface of chip that awaits measuring can clear complete show for the second determine module, make the lower surface of chip that awaits measuring also can be clearly detected, the comprehensiveness and the accuracy that the chip that awaits measuring detected have been guaranteed.
2. The invention provides a six-face detection mechanism, wherein a first working end face and a second working end face are both smaller than the surface of a chip to be detected; can guarantee like this that the size of the absorption pipeline of seting up on first working end face and second working end face also is less than the chip surface that awaits measuring, it has negative pressure gas to adsorb the inside circulation of hole, will await measuring the chip through atmospheric pressure and adsorb on first working end face and second working end face, two absorption pieces of reduction that can furthest adsorb the chip through the mode of vacuum negative pressure are to the wearing and tearing of the chip that awaits measuring, avoid increasing the disability rate of the chip that awaits measuring because of wearing and tearing, increase the practicality of this device.
3. According to the six-side detection mechanism provided by the invention, the first working end face and the second working end face are arranged in parallel, and the first working end face and the second working end face are both arranged horizontally, so that the arrangement can ensure that the horizontal angle of a chip to be detected cannot be changed when the chip to be detected is detected by the first detection assembly and the second detection assembly respectively, and the comprehensiveness of the chip to be detected by the first detection assembly and the second detection assembly is ensured.
4. According to the six-face detection mechanism provided by the invention, after the first detection component finishes detection, a chip to be detected needs to be moved onto the second adsorption part from the first adsorption part, at the moment, the second adsorption part moves above the first adsorption part, a first pipeline in the first adsorption part is changed from negative pressure to positive pressure, and meanwhile, a second pipeline in the second adsorption part is communicated with negative pressure; the chip to be tested can bounce from the first adsorption part under the action of air flow, contact the second adsorption part and be adsorbed by the second adsorption part at the moment of contacting the second adsorption part; deflection may be found at the position of the chip to be tested in the process that the chip to be tested moves from the first adsorption part to the second adsorption part; connecting the second adsorption piece with a motor; and the second adsorbs the piece and is in the drive of motor takes place to rotate along self central line for the chip that awaits measuring also takes place to rotate, guarantees that the chip position that awaits measuring keeps unanimous with the position on first absorption spare, guarantees the accuracy that the second detection component detected, increases the practicality of this device.
5. According to the six-face detection mechanism provided by the invention, in order to facilitate the movement in the horizontal direction in the focusing process of the chip to be detected and the second detection assembly, the first stabilizing plate and the first sliding plate are arranged between the second adsorption piece and the support, the first stabilizing plate and the first sliding plate can slide relatively in the direction vertical to the support, the second adsorption piece is arranged on the first sliding plate, so that the second adsorption piece can move horizontally in the direction vertical to the support under the driving of the first sliding plate, and the practicability of the six-face detection mechanism is improved.
6. According to the six-face detection mechanism provided by the invention, in order to facilitate the movement in the vertical direction in the focusing process of the chip to be detected and the second detection assembly, the second stabilizing plate and the second sliding plate are arranged between the second adsorption piece and the bracket, the second stabilizing plate and the second sliding plate can slide relatively in the vertical direction, and the second adsorption piece is arranged on the second sliding plate, so that the second adsorption piece can horizontally move in the vertical direction under the driving of the second sliding plate, and the practicability of the six-face detection mechanism is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic view of an overall structure of a six-sided detection mechanism provided by the invention.
Fig. 2 is a schematic structural view of a second adsorption member of the six-sided detection mechanism provided by the invention.
Description of reference numerals:
1. a handling assembly; 2. a first suction attachment; 3. a second adsorption member; 4. a first detection assembly; 5. a second detection assembly; 6. a motor; 7. a first stabilizer plate; 8. a first sliding plate; 9. a second stabilizing plate; 10. a second sliding plate.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Furthermore, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
As shown in fig. 1, the six-side detection mechanism provided by the invention comprises a bracket, a detection platform and a detection mechanism, wherein the bracket is arranged on the detection platform; the carrying assembly 1 is connected with the bracket in a sliding manner; an adsorption assembly having a first adsorption member 2 and a second adsorption member 3; the first suction accessory 2 is provided with a first working end face for sucking a chip to be detected; an adsorption port is formed in the first working end face; the first adsorption part 2 is internally provided with a first pipeline for gas circulation, and the first pipeline is communicated with the adsorption port; the adsorption port of the first adsorption part 2 faces upwards; the second adsorption piece 3 is arranged on the bracket in a sliding manner, and the second adsorption piece 3 can slide along the arrangement direction of the bracket; the second adsorption part 3 is internally provided with a pipeline through which gas passes; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline inside the second adsorption piece 3; a detection assembly having a first detection assembly 4 and a second detection assembly 5; the first detection component 4 is arranged corresponding to the first suction attachment 2; the second detection component 5 is arranged corresponding to the second adsorption part 3.
This device is through the absorption mouth on the first working end face of first absorption piece 2, the inside first pipeline that is equipped with of first absorption piece 2, let in the negative pressure in the first pipeline, first absorption piece 2 is adsorbed through the chip that awaits measuring of atmospheric pressure, then first detection component 4 is preceding to the chip that awaits measuring, and a back, a left side and side surface detect, the chip that awaits measuring shifts to the second again and adsorbs on 3, adsorb 3 and the cooperation of second detection component 5 through the second and use, detect the lower surface of the chip that awaits measuring, because the second adsorbs 3 will await measuring the chip upper surface and adsorb, make the lower surface of the chip that awaits measuring clearly complete show for second detection component 5, make the lower surface of the chip that awaits measuring also can be clearly detected, the comprehensiveness and the accuracy that the chip that awaits measuring detected have been guaranteed.
Firstly, a chip to be detected is placed on a first suction attachment 2 by a carrying assembly 1, and the carrying assembly 1 is also carried in a suction mode; first suction attachment 2 places on the shifting board in this scheme for first suction attachment 2 can move on the horizontal direction, use through shifting board and the cooperation of transport subassembly 1, make first suction attachment 2 adsorb the bottom of the chip that awaits measuring, make all the other surfaces except that the lower surface of the chip that awaits measuring can cooperate first detection component 4 to use, first detection component 4 focuses the chip that awaits measuring earlier, focus and shoot the chip that awaits measuring after accomplishing, and obtain clear chip data that awaits measuring. After the first detection component 4 finishes detection, the chip to be detected needs to be moved from the first adsorption part 2 to the second adsorption part 3, at the moment, the first adsorption part 2 and the second adsorption part 3 are moved, the second adsorption part 3 is moved above the first adsorption part 2, the negative pressure of a first pipeline in the first adsorption part 2 is changed into positive pressure, and meanwhile, the negative pressure is communicated with a second pipeline in the second adsorption part 3; the chip to be tested can bounce from the first adsorption part 2 under the action of the airflow, contact the second adsorption part 3 and be adsorbed by the second adsorption part 3 at the moment of contacting the second adsorption part 3; the grabbing of the second adsorption piece 3 to the chip to be tested is realized, and the position and the orientation of the chip to be tested may be found to deflect in the process that the chip to be tested moves from the first adsorption piece 2 to the second adsorption piece 3; the second adsorption piece 3 is connected with the motor 6, and the second adsorption piece 3 and the motor 6 are driven by a connecting belt in the scheme; and the second adsorption piece 3 rotates along the central line of the second adsorption piece under the driving of the motor 6, so that the chip to be detected also rotates, the position of the chip to be detected is ensured to be consistent with the position of the chip to be detected on the first adsorption piece 2, the image detected by the second detection component 5 is ensured to be corresponding to the image detected by the first detection component 4, and the detection accuracy is ensured.
As shown in fig. 2, focusing is performed on the chip to be tested, and a first sliding assembly is disposed between the second adsorption member 3 and the support; in order to facilitate the movement of the chip to be detected and the second detection assembly 5 in the horizontal direction in the focusing process, the first sliding assembly further comprises a first stabilizing plate 7 and a first sliding plate 8 which are arranged between the second adsorption member 3 and the bracket, the first stabilizing plate 7 is fixedly connected with the second adsorption member 3, the first sliding plate 8 is slidably connected with the first stabilizing plate 7, and the first sliding plate 8 and the first stabilizing plate 7 can provide power in a mode of being driven by the motor 6; first stabilizer plate 7 and first sliding plate 8 can take place relative slip in the vertical support direction, adsorb the piece 3 with the second and install on first sliding plate 8, make the second adsorb the horizontal migration that the piece 3 can carry out the vertical support direction under the drive of first sliding plate 8, increase the practicality of this device.
In order to facilitate the movement of the chip to be detected and the second detection assembly 5 in the vertical direction in the focusing process, the first sliding assembly further comprises a second stabilizing plate 9 and a second sliding plate 10 which are arranged between the second adsorption piece 3 and the bracket, the first stabilizing plate 7 is connected with the first sliding plate 8, and the second sliding plate 10 is connected with the second stabilizing plate 9; the second stabilizing plate 9 and the second sliding plate 10 can slide relatively in the vertical direction, the second stabilizing plate 9 and the second sliding plate 10 can provide power in a mode driven by the motor 6, the second adsorption piece 3 is installed on the second sliding plate 10, the second adsorption piece 3 can move in the vertical direction under the driving of the second sliding plate 10, and the practicability of the device is improved.
The first working end face and the second working end face are smaller than the surface of the chip to be detected; can guarantee like this that the size of the absorption pipeline of seting up on first working end face and second working end face also is less than the chip surface that awaits measuring, it has negative pressure gas to circulate inside the absorption hole, adsorb the chip that awaits measuring on first working end face and second working end face through atmospheric pressure, when the mode through vacuum negative pressure adsorbs the chip, reduce the area of contact of first working end face and second working end face and the chip that awaits measuring, two absorption pieces of reduction that can furthest are to the wearing and tearing of the chip that awaits measuring, avoid increasing the disability rate of the chip that awaits measuring because of wearing and tearing, increase the practicality of this device.
And in order to guarantee the comprehensiveness that this device detected the chip to be measured, with first work terminal surface and second work terminal surface parallel arrangement, and in order to be inclined to the detection and the shift of the chip to be measured, be horizontal setting with first work terminal surface and second work terminal surface, the setting can guarantee that the chip to be measured can not change by the horizontal angle of the chip to be measured when being detected by first detecting component 4 and second detecting component 5 respectively, guarantee that the photo that first detecting component 4 and second detecting component 5 were taken corresponds each other, be convenient for subsequent observation and detection, and increase the comprehensiveness that this device detected, six terminal surfaces to the chip have all been detected.
Example 2
A detection device further comprises the six-face detection mechanism.
Method of use and principles
In the device, a carrying component 1 is arranged on a support in a sliding mode, a first suction part 2 is also arranged on a device base in a sliding mode, firstly, the carrying component 1 and the first suction part 2 slide relatively, a chip to be detected is placed at a first working end face of the first suction part 2, the first working end face is in contact with the lower surface of the chip to be detected, the first detection component 4 is matched for carrying out first detection on the chip to be detected, the first detection component 4 carries out shooting detection on each surface of the chip to be detected except the lower surface, only the lower surface of the chip to be detected is left and is not detected, the chip to be detected is arranged on the support in a sliding mode through a second adsorption part 3, the second adsorption part 3 and the first suction part 2 move in a matching mode, the second adsorption part 3 moves above the first suction part 2, the first pipeline in the first suction part 2 is changed from negative pressure to positive pressure, and meanwhile, the second pipeline in the second adsorption part 3 circulates negative pressure; the chip to be tested can bounce from the first adsorption part 2 under the action of the airflow, contact the second adsorption part 3 and be adsorbed by the second adsorption part 3 at the moment of contacting the second adsorption part 3; the position of the chip to be tested may find deflection in the process of the chip to be tested from the first adsorption part 2 to the second adsorption part 3; the second adsorption piece 3 is connected with a motor 6; and the second adsorbs piece 3 and takes place to rotate along self central line under the drive of motor 6 for the chip that awaits measuring also takes place to rotate, guarantees that the chip position that awaits measuring keeps unanimous with the position on first suction fitting 2, and second detecting element 5 detects the lower surface of the chip that awaits measuring, has realized detecting six surfaces of the chip that awaits measuring, accomplishes the comprehensive detection to the chip that awaits measuring.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (8)
1. The six-face detection mechanism is characterized by comprising:
the bracket is arranged on the detection platform;
the carrying assembly (1) is connected with the bracket in a sliding way;
an adsorption component which is provided with a first adsorption part (2) and a second adsorption part (3);
the first suction piece (2) is provided with a first working end face for sucking a chip to be detected; an adsorption port is formed in the first working end face; the first adsorption piece (2) is internally provided with a first pipeline for gas circulation, and the first pipeline is communicated with the adsorption port; the adsorption port of the first adsorption part (2) faces upwards;
the second adsorption piece (3) is arranged on the bracket in a sliding manner; the second adsorption piece (3) is internally provided with a pipeline through which gas passes; the second adsorption mechanism is provided with a second working end face for adsorbing the chip to be detected; the second working end surface is communicated with a pipeline inside the second adsorption piece (3);
a detection assembly having a first detection assembly (4) and a second detection assembly (5); the first detection component (4) is arranged corresponding to the first suction piece (2); the second detection assembly (5) and the second adsorption piece (3) are arranged correspondingly.
2. The six-sided detection mechanism according to claim 1, wherein the first working end surface is smaller than the surface of the chip to be detected; the second working end face is smaller than the surface of the chip to be tested.
3. The six-sided detection mechanism of claim 1, wherein the first working end face is parallel to the second working end face.
4. Six-sided detection mechanism according to claim 1, characterized in that the second suction piece (3) is connected to a motor (6); the second adsorption piece (3) is driven by the motor (6) to rotate along the center line of the second adsorption piece.
5. The six-sided detection mechanism of claim 1, further comprising:
and the first moving assembly is arranged between the second adsorption piece (3) and the bracket.
6. The six-sided detection mechanism of claim 5, wherein the first movement assembly comprises:
the first stabilizing plate (7) is fixedly connected with the second adsorption piece (3);
a first sliding plate (8) slidably connected to the first stabilising plate (7).
7. The six-sided detection mechanism of claim 6, wherein the first movement assembly further comprises:
a second stabilising plate (9) fixedly connected to the first sliding plate (8);
a second sliding plate (10) slidably connected to the second stabilising plate (9).
8. A test device, characterized by further comprising a six-sided test mechanism according to any one of claims 1 to 7.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211247879.0A CN115452859A (en) | 2022-10-12 | 2022-10-12 | Six-face detection mechanism and detection device |
| PCT/CN2022/125872 WO2024077645A1 (en) | 2022-10-12 | 2022-10-18 | Six-surface testing mechanism and testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211247879.0A CN115452859A (en) | 2022-10-12 | 2022-10-12 | Six-face detection mechanism and detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115452859A true CN115452859A (en) | 2022-12-09 |
Family
ID=84309499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211247879.0A Pending CN115452859A (en) | 2022-10-12 | 2022-10-12 | Six-face detection mechanism and detection device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115452859A (en) |
| WO (1) | WO2024077645A1 (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208098650U (en) * | 2018-01-31 | 2018-11-16 | 浙江大学常州工业技术研究院 | Product lacquer painting detection device |
| CN109100361A (en) * | 2018-09-05 | 2018-12-28 | 深圳市盛世智能装备有限公司 | A kind of workpiece, defect detection device |
| CN212379307U (en) * | 2020-03-06 | 2021-01-19 | 广东荣旭智能技术有限公司 | Multi-surface detection structure of six-surface detection equipment for appearance of transformer |
| CN212622286U (en) * | 2020-07-14 | 2021-02-26 | 立讯智造(浙江)有限公司 | Jig for product appearance inspection |
| CN113253595A (en) * | 2021-06-17 | 2021-08-13 | 昆山迈致治具科技有限公司 | Appearance detection device and watch detection system |
| CN113466255A (en) * | 2021-06-24 | 2021-10-01 | 湖南奥创普科技有限公司 | Chip detection equipment |
| CN115060729A (en) * | 2022-06-02 | 2022-09-16 | 广东精通智能科技有限公司 | Lithium battery appearance detection system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4007526B2 (en) * | 1998-04-06 | 2007-11-14 | 日東工業株式会社 | 6-side inspection system for chips |
| JP2003275688A (en) * | 2002-03-19 | 2003-09-30 | Yamato Kk | Component inspection method, component feeder and component inspection device |
| CN113680684B (en) * | 2021-08-04 | 2022-01-18 | 苏州鼎纳自动化技术有限公司 | Six check out test set |
-
2022
- 2022-10-12 CN CN202211247879.0A patent/CN115452859A/en active Pending
- 2022-10-18 WO PCT/CN2022/125872 patent/WO2024077645A1/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208098650U (en) * | 2018-01-31 | 2018-11-16 | 浙江大学常州工业技术研究院 | Product lacquer painting detection device |
| CN109100361A (en) * | 2018-09-05 | 2018-12-28 | 深圳市盛世智能装备有限公司 | A kind of workpiece, defect detection device |
| CN212379307U (en) * | 2020-03-06 | 2021-01-19 | 广东荣旭智能技术有限公司 | Multi-surface detection structure of six-surface detection equipment for appearance of transformer |
| CN212622286U (en) * | 2020-07-14 | 2021-02-26 | 立讯智造(浙江)有限公司 | Jig for product appearance inspection |
| CN113253595A (en) * | 2021-06-17 | 2021-08-13 | 昆山迈致治具科技有限公司 | Appearance detection device and watch detection system |
| CN113466255A (en) * | 2021-06-24 | 2021-10-01 | 湖南奥创普科技有限公司 | Chip detection equipment |
| CN115060729A (en) * | 2022-06-02 | 2022-09-16 | 广东精通智能科技有限公司 | Lithium battery appearance detection system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024077645A1 (en) | 2024-04-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101144593B1 (en) | Wafer Prober for Semiconductor Inspection and Inspection Method | |
| JPH0697305B2 (en) | Slide specimen placement device | |
| JP2002068471A (en) | Chip parts carrying device | |
| CN212160008U (en) | Fpga based integrated circuit chip testing machine | |
| TW201445122A (en) | Apparatus for bending substrate, apparatus and method for inspecting bended substrate | |
| CN114325351A (en) | Laser chip testing device and laser chip testing method | |
| CN115452058B (en) | Automatic detecting mechanism for micro element | |
| TWI613452B (en) | Electronic component conveying device and electronic component inspection device | |
| CN115616378A (en) | End face detection device and detection method | |
| CN115452859A (en) | Six-face detection mechanism and detection device | |
| KR102407618B1 (en) | Bending testing method of ultra thin glass | |
| TW201925725A (en) | Method for inspecting sensor package structure, inspection apparatus, and focus assistant loader of inspection apparatus | |
| CN114082679A (en) | Full-automatic resistance measuring instrument | |
| CN113120596B (en) | Material transfer state detection system and method | |
| TW202119021A (en) | Defect detection method for sensor package structure | |
| CN109696437B (en) | Leveling device and method for semiconductor material sheet | |
| CN115585745A (en) | Lens external diameter detection equipment | |
| CN210119454U (en) | Laser bar detection device | |
| CN113820332A (en) | Defect detection system | |
| CN114089042B (en) | Quick probe card replacement mechanism and resistance tester comprising same | |
| CN216770470U (en) | Detection device | |
| TW200424093A (en) | Method for positioning a substrate and inspecting apparatus using same | |
| CN117607665B (en) | Probe station | |
| JPH0541423A (en) | Probe apparatus | |
| CN111054874B (en) | Keyboard riveting device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20221209 |