CN115451828A - Laser interferometer ranging error suppression system and method - Google Patents

Abstract

The present invention provides a laser interferometer distance measurement error suppression system and method, wherein the system includes a laser emission module, an interference distance measurement module, a wavelength tracking module, a light splitting module and a signal processing module; wherein the laser emission module emits The reflected light of the laser beam split by the spectroscopic module enters the wavelength tracking module to form a first measurement signal, and the transmitted light split by the spectroscopic module forms a second measurement signal through the interference ranging module, and the signal The processing module performs error suppression on the interference ranging module through the first measurement signal and the second measurement signal. The laser interferometer ranging error suppression system and method provided by the invention can effectively reduce the refractive index error of the laser interferometer.

Description

Laser interferometer ranging error suppression system and method

technical field

The invention relates to the technical field of ultra-precision displacement measurement, and more specifically, to a laser interferometer ranging error suppression system and method.

Background technique

Laser interferometer distance measurement has the advantages of high precision and good linearity. It can be used in ultra-precision measurement scenarios such as geometric accuracy detection, dynamic monitoring of CNC machine tools, and multi-degree-of-freedom displacement measurement of lithography machines. It has a wide range of applications.

In the actual measurement process, each application scenario has high requirements on the measurement accuracy of the laser interferometer, so it is necessary to suppress the ranging error of the laser interferometer. The ranging error of the laser interferometer mainly includes the measurement error caused by cosine error, Abbe error and refractive index. Among them, the cosine error has high repeatability and is easy to compensate, the Abbe error has relatively little influence, and the refractive index error is a random error with low repeatability and large error. The laser propagates in the air, and factors such as the temperature and humidity of the gas will cause the refractive index of the air to change, which in turn will cause the wavelength of the laser to change due to the influence of the refractive index of the air. In the distance measurement calculation of the laser interferometer, the theoretical wavelength is usually used. Ultimately, an error occurs in the ranging result, and the error will increase with the distance between the mirror and the interferometer, that is, the propagation distance of the laser in the air. In the case of a long distance or severe environmental changes, the error It will reach hundreds of nanometers or even micrometers.

In view of this situation, there is an urgent need for a method that can effectively reduce the refractive index error of the laser interferometer.

Contents of the invention

In view of the above problems, the object of the present invention is to provide a laser interferometer ranging error suppression system and method, which can effectively reduce the refractive index error of the laser interferometer.

The laser interferometer distance measurement error suppression system provided by the present invention includes a laser emission module, an interference distance measurement module, a wavelength tracking module, a light splitting module and a signal processing module; wherein,

The reflected light emitted by the laser emitting module after being split by the spectroscopic module enters the wavelength tracking module to form a first measurement signal, and the transmitted light split by the spectroscopic module passes through the interference ranging module to form a second measurement signal. measurement signals, the signal processing module performs error suppression on the interference ranging module through the first measurement signal and the second measurement signal.

In addition, the preferred solution is that the signal processing module includes a phase card, a main control card and a host computer, wherein,

The phase card performs statistics on the first measurement signal and the second measurement signal to obtain wavelength tracking data and original distance measurement data, and transmits the wavelength tracking data and the original distance measurement data to the main control card;

The main control card reads the wavelength tracking data and the original distance measurement data and uploads them to the host computer;

The host computer performs error suppression on the original distance measurement data through the wavelength tracking data.

In addition, the preferred solution is that the laser interferometer distance measurement error suppression system further includes a reflection module corresponding to the position of the interference distance measurement module, and the transmitted light entering the interference distance measurement module passes through the reflection module The second measurement signal is generated after reflection.

In addition, a preferred solution is that the reflection module is set on a preset motion table; and,

The distance between the reflective module and the interferometric ranging module is adjusted through the preset motion stage based on a preset servo period.

In addition, the preferred solution is that the interference ranging module includes a first interferometer and a second interferometer, the light reflection module includes a first mirror and a second mirror, and the light splitting module includes a first beam splitter and a second mirror. Two beam splitters; where,

The first reflector and the second reflector are respectively arranged to slide on the X-axis guide rail and the Y-axis guide rail of the preset motion table, and the position of the first interferometer corresponds to the position of the first reflector, so The second interferometer corresponds to the position of the second mirror;

In addition, the laser light emitted by the laser emitting module is split by the first beam splitter to form the first transmitted light and the first reflected light; wherein, after the first transmitted light enters the first interferometer, the emitted light passes through the first interferometer. The Y-axis signal of the second measurement signal is formed after being reflected by the second reflector; the first reflected light forms the second transmitted light and the second reflected light after passing through the second beam splitter, wherein the second After the transmitted light enters the second interferometer, the outgoing light is reflected by the first reflector to form the X-axis signal of the second measurement signal, and the second reflected light enters the wavelength tracking module to form the first A measurement signal.

In addition, the preferred scheme is that the reference signal of the laser emitting module is connected to the reference axis of the phase card, the first measurement signal is connected to the first measurement axis of the phase card, and the second measurement signal is connected to into the second measurement axis of the phase card.

On the other hand, the present invention also provides a laser interferometer ranging error suppression method, using the aforementioned laser interferometer ranging error suppression system to suppress the error of the interference ranging module: including:

The laser emitting module emits laser light to the spectroscopic module, the reflected light after splitting by the spectroscopic module enters the wavelength tracking module to form a first measurement signal, and the transmitted light after splitting by the spectroscopic module passes through the interference The ranging module forms a second measurement signal;

The signal processing module performs error suppression on the interference ranging module based on the first measurement signal and the second measurement signal.

In addition, the preferred scheme is that there are n sets of the first measurement signal and the second measurement signal, where n is an integer, and n≥10; and the passing through the signal processing module is based on the first The error suppression of the interference ranging module by the measurement signal and the second measurement signal includes:

Obtaining the data value c of the first measurement signal and the data value d of the second measurement signal of each group respectively through the signal processing module;

Linearly fit the data value c and data value d of each group to obtain n fitting coefficients A=[A1,A2,...,An];

Linearly fitting the preset actual distance data X=[x1,x2,...,xn] to A to obtain the fitting equation A=f(X);

Based on the fitting equation A=f(X), the measurement distance optimization data value d1=d−f(X)c of the interferometric ranging module is obtained.

In addition, the preferred solution is that the data value d of the second measurement signal is the measured distance between the interference ranging module and the transmitting module, and the actual distance data X is the distance between the interference ranging module and the transmitting module. Actual distance; where,

The reflection module is set on the preset motion platform, and by adjusting the position of the reflection module on the preset motion platform, n sets of measured distance data values and n sets of actual distance data values X=[x1, x2 ,...,xn].

In addition, the preferred scheme is that there are n sets of the first measurement signal and the second measurement signal, wherein n is an integer, n≥10, and the second measurement signal includes the X-axis signal and the Y-axis signal and, the error suppression of the interference ranging module based on the first measurement signal and the second measurement signal by the signal processing module includes:

The data value c of the first measurement signal of each group, the X-axis data value dx of the X-axis signal, and the Y-axis data value dy of the Y-axis signal are respectively obtained by the signal processing module;

Linearly fit the X-axis measurement data value dx and Y-axis measurement data value dy of each group with the data value c to obtain the two-way fitting coefficient Ax=[Ax1,Ax2,...,Axn], Ay=[Ay1 ,Ay2,...,Ayn];

Linearly fit the preset actual distance data X=[x1,x2,...,xn] and Ax to obtain the fitting equation Ax=f(X), and make the preset actual distance data Y=[y1,y2 ,..., yn] do linear fitting with Ay to obtain fitting equation Ay=f(Y);

Based on the fitting equation Ax=f(X) and the fitting equation Ay=f(Y), obtain the X-axis measurement distance optimization data value dx1=dx-f(X)c and the Y-axis measurement distance of the interferometric ranging module Optimize data value dy1 = dy-f(Y)c.

Compared with the prior art, the above-mentioned laser interferometer ranging error suppression system according to the present invention has the following beneficial effects:

The laser interferometer distance measurement error suppression system provided by the present invention can suppress the error caused by the change of environmental factors in the laser interferometer distance measurement, and make the distance measurement result of the laser interferometer more accurate. According to the distance between the laser interferometer and the measured object Using different compensation coefficients can be applied to distance measurement occasions with large strokes. The single-axis interferometer is used as an example in the schematic diagram, which is also applicable to angle interferometers, three-axis, five-axis interferometers, etc. This technology is easy to implement and can be applied The occasions are extensive.

To the accomplishment of the above and related ends, one or more aspects of the invention comprise the features hereinafter described in detail and particularly pointed out in the claims. The following description and accompanying drawings detail certain exemplary aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Furthermore, the invention is intended to include all such aspects and their equivalents.

Description of drawings

By referring to the following description combined with the accompanying drawings and the contents of the claims, and with a more comprehensive understanding of the present invention, other objectives and results of the present invention will be more clear and easy to understand. In the attached picture:

Fig. 1 is a first structural schematic diagram of a laser interferometer ranging error suppression system according to an embodiment of the present invention;

Fig. 2 is a second structural schematic diagram of a laser interferometer ranging error suppression system according to an embodiment of the present invention.

Reference signs: upper computer 1, VME chassis 2, backplane 3, VME main control card 4, phase card 5, first optical fiber 6, laser emitting module 7, optical splitting module 8, wavelength tracking module 9, reflection module 10, the first Second optical fiber 11, third optical fiber 12, interference ranging module 13, X-axis guide rail 15, first mirror 16, second mirror 17, positioning table 18, Y-axis guide rail 19, first interferometer 20, first beam splitter mirror 21, dual-frequency laser 22, wavelength tracker 23, second beam splitter 24, and second interferometer 25.

The same reference numerals indicate similar or corresponding features or functions throughout the drawings.

detailed description

In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that these embodiments may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, and therefore cannot be construed as limiting the present invention; the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be construed as indicating or implying relative importance; in addition, unless otherwise Clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or a Electrical connection; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

The structure of the laser interferometer distance measurement error suppression system provided by the present invention will be described in detail below. FIG. 1 is a schematic diagram of the first structure of the laser interferometer distance measurement error suppression system according to an embodiment of the present invention.

It can be seen from FIG. 1 that the laser interferometer ranging error suppression system provided by the present invention mainly includes a laser emitting module 7 for emitting measuring laser, an interferometric ranging module 13 for ranging, and a wavelength tracking module for measuring laser. Module 9, a spectroscopic module 8 for splitting the laser light, and a signal processing module for processing the measured information; wherein, the reflected light of the laser emitted by the laser emitting module 7 after being split by the spectroscopic module 8 enters the wavelength tracking module 9 to form a first measurement signal (a wavelength measurement signal), and the transmitted light after being split by the spectroscopic module 8 passes through an interference distance measurement module 13 to form a second measurement signal (a distance measurement signal), and the signal processing module passes the first measurement signal and the second measurement signal. The second measurement signal performs error suppression on the interference ranging module 13 .

Specifically, in order to realize the ranging function of the interferometric ranging module 13, the laser interferometer ranging error suppression system also includes a reflection module 10 corresponding to the position of the interferometric ranging module 13, and the transmitted light entering the interferometric ranging module 13 is reflected. The module 10 generates a second measurement signal after reflection (that is, a distance measurement signal between the interference distance measurement module 13 and the reflection module 10 ).

More specifically, in order to realize the value acquisition of the first measurement signal and the second measurement signal by the signal processing module, the signal processing module includes a phase card 5, a main control card and a host computer 1, wherein the phase card 5 respectively performs the first measurement The numerical value of signal and the second measuring signal is carried out statistics to obtain wavelength tracking data (being data value c) and original distance measuring data (being data value d), and wavelength tracking data and original distance measuring data are transmitted to main control card (preferably VME main control card 4); the main control card reads the wavelength tracking data and the original distance measurement data and uploads them to the upper computer 1; the upper computer 1 performs error suppression on the original distance measurement data through the wavelength tracking data.

In the actual device connection process, the reference signal of the dual-frequency laser 22 in the laser emitting module 7 is connected to the reference axis of the phase card 5 through the first optical fiber 6, and the output light of the dual-frequency laser 22 enters the wavelength tracking through the reflected light of the optical splitting module 8 Module 9, the transmitted light passing through the spectroscopic module 8 enters the interference distance measurement module 13, and the light emitted by the interference distance measurement module 13 is reflected by the reflection module 10 to generate a second measurement signal, and the second measurement signal is transmitted to the phase card through the third optical fiber 12 5 for the second measuring axis. At the same time, the first measurement signal generated by the wavelength tracking module 9 is transmitted to the first measurement axis of the phase card 5 through the second optical fiber 11 . Both the phase card 5 and the VME main control card 4 are connected to the backplane 3 of the VME chassis 2 and can communicate with each other. The phase card 5 counts the two measurement signals and transmits them to the VME main control card 4. The VME main control card 4 is in the Each preset servo cycle reads and records the measurement data of the phase card 5 and uploads it to the host computer 1, and finally the host computer 1 stores and analyzes the data.

It should be noted that, in order to ensure measurement accuracy, usually n (n is an integer, n≧10) sets of first measurement signals and second measurement signals need to be set. In order to realize the setting of n groups of first measurement signals and second measurement signals, the reflective module 10 can be set on a preset moving platform; and the distance between the reflective module 10 and the interferometric ranging module 13 is based on the preset servo The period is adjusted by a preset moving platform, and n sets of first measurement signals and second measurement signals can be formed by adjusting the distance between the reflection module 10 and the interference distance measurement module 13 several times.

It should be noted that in the actual error suppression process, the wavelength tracking module 9 and the interference ranging module 13 need to be arranged in the same environment with close positions. After the reflection module 10 is fixed on the preset moving platform, the VME main control card 4 Collect and record the measured wavelength data (corresponding to the first measurement signal) of the wavelength tracking module 9, the measured distance data (corresponding to the second measurement signal) of the interference distance measurement module 13, and the actual distance between the interference distance measurement module 13 and the reflection module 10. distance data, and then upload these data to the host computer 1; it should be noted that, in order to ensure the stability of the data, each data needs to be collected for more than 8 hours. After the acquisition is completed, move the reflective module 10 on the preset motion platform for a certain distance, repeat the above acquisition steps until gradually moving to the limit position of the stroke of the preset motion platform, thereby obtaining n sets of data (including n measurement data c, n measurement data d and n actual distance data x) linearly fitting the data value c and data value d of each group to obtain n fitting coefficients A=[A1, A2,..., An]; and then predicting Set the actual distance data X=[x1,x2,...,xn] to do linear fitting with A to obtain the fitting equation A=f(X); finally based on the fitting equation A=f(X), the interference can be obtained The measurement distance optimized data value d1=d−f(X)c of the distance measurement module 13 .

In another preferred embodiment of the present invention, FIG. 2 is a second structural schematic diagram of a laser interferometer ranging error suppression system according to an embodiment of the present invention. It can be seen from FIG. 2 that in order to further improve the suppression effect of the wavelength error. The wavelength error of the interferometric ranging module 13 can also be suppressed in the two directions of the X-axis and the Y-axis respectively.

Specifically, the interference ranging module 13 includes a first interferometer 20 and a second interferometer 25, the light reflection module includes a first mirror 16 and a second mirror 17, and the light splitting module 8 includes a first beam splitter 21 and a second beam splitter 24 ;in,

The first reflector and the second reflector are respectively arranged to slide on the X-axis guide rail 15 and the Y-axis guide rail 19 of the preset motion table, the first interferometer 20 corresponds to the position of the first reflector, and the second interferometer 25 corresponds to the second The positions of the mirrors are corresponding; and, the laser light emitted by the laser emitting module 7 is split by the first beam splitter 21 to form the first transmitted light and the first reflected light; wherein, the first transmitted light enters the first interferometer 20 and the outgoing light passes through the first interferometer 20 The Y-axis signal of the second measurement signal is formed after the reflection of the two mirrors; the first reflected light forms the second transmitted light and the second reflected light after passing through the second beam splitter 24, wherein the second transmitted light enters the second interferometer 25 The emitted light is reflected by the first mirror to form the X-axis signal of the second measurement signal, and the second reflected light enters the wavelength tracking module 9 to form the first measurement signal. Wherein, the reference signal of the laser emitting module 7 is connected to the reference axis of the phase card 5 , the first measurement signal is connected to the first measurement axis of the phase card 5 , and the second measurement signal is connected to the second measurement axis of the phase card 5 .

In actual use, it can be operated on an ultra-precise preset motion table, which is designed to be stacked up and down, including X-axis guide rail 15 and Y-axis guide rail 19, and Y-axis guide rail 19 can be placed on X-axis guide rail 15 Sliding along the X-axis direction, a positioning platform 18 is provided on the Y-axis guide rail 19, and the positioning platform 18 can slide along the Y-axis direction on the Y-axis guide rail 19, wherein the first reflector 16 is arranged on one end of the Y-axis guide rail 19 (also on the X-axis guide rail 15 of course), and slide along the X-axis direction on the X-axis guide rail 15 along with the Y-axis guide rail 19 . The transmitted light from the dual-frequency laser 22 is split by the first beam splitter 21 and enters the first interferometer 20. When the second mirror moves on the Y-axis guide rail 19 with the positioning table 18, the first interferometer 20 can measure The displacement in the Y-axis direction (that is, the distance between the first interferometer 20 and the second mirror, that is, the Y-axis measurement signal). The reflected light of the first beamsplitter 21 enters the second beamsplitter 24, and the transmitted light of the second beamsplitter 24 enters the second interferometer 25. When the first reflector moves in the X-axis direction along with the Y-axis guide rail 19, the second The interferometer 25 can measure the displacement in the X-axis direction (that is, the distance between the second interferometer 25 and the first mirror, that is, the X-axis measurement signal). In addition, the reflected light of the second beam splitter 24 enters the wavelength tracker 23 of the wavelength tracking module 9 to obtain the first measurement signal. Finally, the two displacement measurement signals (i.e. the Y-axis measurement signal and the X-axis measurement signal) and the first measurement signal of the wavelength tracking module 9 enter the phase card 5 through optical fiber transmission, record and upload to the host computer 1 through the VME main control card 4 And complete the final error suppression calculation.

It should be noted that, for the spectroscopic module, since it includes the first spectroscope 21 and the second spectroscope 24, and since the light split by the second spectroscope 24 is used as the output of the spectroscopic module, in order to facilitate the understanding of the optical path In the transmission in the spectroscopic module, the light after being reflected by the first spectroscope 21 and then transmitted by the second spectroscope 24 is recorded as the transmitted light of the whole spectroscopic module, and after being reflected by the first spectroscope 21, it passes through the second spectroscope. The light reflected by the spectroscopic mirror 24 is recorded as the reflected light of the entire spectroscopic module.

In order to further illustrate the working principle of the optical interferometer ranging error suppression system provided by the present invention, the present invention also provides a laser interferometer ranging error suppression method, using the aforementioned laser interferometer ranging error suppression system to perform interference ranging module 13 error suppression: including:

Laser emission module 7 emits laser light to spectroscopic module 8, and the reflected light after splitting by spectroscopic module 8 enters wavelength tracking module 9 to form the first measurement signal, and the transmitted light after splitting by spectroscopic module 8 passes through interference ranging module 13 to form the second measurement signal. measurement signal;

Error suppression is performed on the interference ranging module 13 by the signal processing module based on the first measurement signal and the second measurement signal.

Specifically, in order to improve the error suppression effect, there are n groups of the first measurement signal and the second measurement signal, wherein, n is an integer, and n≥10; and, based on the first measurement signal and the second measurement signal, the pair of The interference ranging module 13 performs error suppression and includes:

Obtain the data value c of the first measurement signal and the data value d of the second measurement signal of each group respectively through the signal processing module;

Linearly fit the data value c and data value d of each group to obtain n fitting coefficients A=[A1,A2,...,An];

Linearly fitting the preset actual distance data X=[x1,x2,...,xn] to A to obtain the fitting equation A=f(X);

Based on the fitting equation A=f(X), the measurement distance optimization data value d1=d−f(X)c of the interferometric ranging module 13 is obtained.

It should be noted that the data value d of the second measurement signal is the measured distance between the interference distance measurement module 13 and the transmission module 10, and the actual distance data X is the actual distance between the interference distance measurement module 13 and the transmission module 10; wherein, the reflection module 10 Set on the preset moving platform, and obtain n sets of measured distance data values and n sets of actual distance data values X=[x1, x2, . . . , xn] by adjusting the position of the reflection module 10 on the preset moving platform.

Further, the second measurement signal includes an X-axis signal and a Y-axis signal; and, in the process of suppressing the wavelength error of the interference ranging module 13 in the two directions of the X-axis and the Y-axis respectively, the signal processing module is based on the first The process of suppressing the error of the interference ranging module 13 by the first measurement signal and the second measurement signal includes:

Divide the total stroke in the x/y direction on the preset motion table into n equal parts, thereby forming n predetermined position points of the positioning platform 18, and obtaining the actual position X=[x1, x2, . . . , xn] of each predetermined position point, Y=[y1, y2,..., yn] (it should be noted that since there are scales on the preset motion table, the actual positions of the n preset points can be read directly); then fix the motion table at each point in turn , collecting three signals for more than 8 hours

Fix the positioning platform 18 at each predetermined position in turn, and collect three signals (including X-axis data value dx, axis data value dy and data value c) of each predetermined position for more than 8 hours; the specific collection process is: through signal processing The module obtains the data value c of the first measurement signal of each group, the X-axis data value dx of the X-axis signal, and the Y-axis data value dy of the Y-axis signal;

Linearly fit the X-axis data value dx and Y-axis data value dy of each group with the data value c to obtain two-way fitting coefficients Ax=[Ax1,Ax2,...,Axn], Ay=[Ay1,Ay2 ,...,Ayn];

Linearly fit the preset actual distance data X=[x1,x2,...,xn] and Ax to obtain the fitting equation Ax=f(X), and make the preset actual distance data Y=[y1,y2 ,..., yn] do linear fitting with Ay to obtain fitting equation Ay=f(Y);

Based on the fitting equation Ax=f(X) and the fitting equation Ay=f(Y), the X-axis measurement distance optimization data value dx1=dx-f(X)c and the Y-axis measurement distance optimization of the interferometric ranging module 13 are obtained Data value dy1=dy-f(Y)c.

It should be noted that the wavelength tracker 23 used in the present invention is a standard commercial wavelength tracker 23, which is composed of a single-axis interferometer, a standard cavity and a base plate, and can detect changes in the refractive index of air, temperature drift of the laser itself, etc. The resulting wavelength change is measured. In addition, the reflectors used in the present invention can use strip reflectors, angled reflectors, etc. as alternatives according to the application scenario; the VME system for collecting laser data can use the VPX system as an alternative; the phase card 5 can use photodetectors and voltage capture card as an alternative.

The laser interferometer ranging error suppression system and method according to the present invention are described above with reference to FIGS. 1 and 2 by way of example. However, those skilled in the art should understand that for the laser interferometer ranging error suppression system and method proposed in the present invention, various improvements can be made without departing from the content of the present invention. Therefore, the protection scope of the present invention should be determined by the contents of the appended claims.

Claims (10)

1. A laser interferometer ranging error suppression system is characterized in that, comprising a laser emission module, an interference ranging module, a wavelength tracking module, a light splitting module and a signal processing module; wherein, The reflected light emitted by the laser emitting module after being split by the spectroscopic module enters the wavelength tracking module to form a first measurement signal, and the transmitted light split by the spectroscopic module passes through the interference ranging module to form a second measurement signal. measurement signals, the signal processing module performs error suppression on the interference ranging module through the first measurement signal and the second measurement signal. 2. the laser interferometer ranging error suppression system as claimed in claim 1, is characterized in that, The signal processing module includes a phase card, a main control card and a host computer, wherein, The phase card performs statistics on the first measurement signal and the second measurement signal to obtain wavelength tracking data and original distance measurement data, and transmits the wavelength tracking data and the original distance measurement data to the main control card; The main control card reads the wavelength tracking data and the original distance measurement data and uploads them to the host computer; The host computer performs error suppression on the original distance measurement data through the wavelength tracking data. 3. laser interferometer ranging error suppression system as claimed in claim 2, is characterized in that, The laser interferometer distance measurement error suppression system also includes a reflection module corresponding to the position of the interference distance measurement module, and the transmitted light entering the interference distance measurement module is reflected by the reflection module to generate the second Measure the signal. 4. laser interferometer ranging error suppression system as claimed in claim 3, is characterized in that, The reflection module is set on the preset motion table; and, The distance between the reflective module and the interferometric ranging module is adjusted through the preset motion stage based on a preset servo period. 5. laser interferometer ranging error suppression system as claimed in claim 4, is characterized in that, The interference ranging module includes a first interferometer and a second interferometer, the light reflection module includes a first mirror and a second mirror, and the light splitting module includes a first beam splitter and a second beam splitter; wherein, The first reflector and the second reflector are respectively arranged to slide on the X-axis guide rail and the Y-axis guide rail of the preset motion table, and the position of the first interferometer corresponds to the position of the first reflector, so The second interferometer corresponds to the position of the second mirror; In addition, the laser light emitted by the laser emitting module is split by the first beam splitter to form the first transmitted light and the first reflected light; wherein, after the first transmitted light enters the first interferometer, the emitted light passes through the first interferometer. The Y-axis signal of the second measurement signal is formed after being reflected by the second reflector; the first reflected light forms the second transmitted light and the second reflected light after passing through the second beam splitter, wherein the second After the transmitted light enters the second interferometer, the outgoing light is reflected by the first reflector to form the X-axis signal of the second measurement signal, and the second reflected light enters the wavelength tracking module to form the first A measurement signal. 6. The laser interferometer ranging error suppression system according to any one of claims 1 to 5, characterized in that, The reference signal of the laser emitting module is connected to the reference axis of the phase card, the first measurement signal is connected to the first measurement axis of the phase card, and the second measurement signal is connected to the second axis of the phase card. Two measuring axes. 7. A laser interferometer ranging error suppression method is characterized in that, utilizing the laser interferometer ranging error suppression system according to any one of claims 1 to 6 to carry out the error suppression of the interference ranging module: comprising: The laser emitting module emits laser light to the spectroscopic module, the reflected light after splitting by the spectroscopic module enters the wavelength tracking module to form a first measurement signal, and the transmitted light after splitting by the spectroscopic module passes through the interference The ranging module forms a second measurement signal; The signal processing module performs error suppression on the interference ranging module based on the first measurement signal and the second measurement signal. 8. laser interferometer ranging error suppression method as claimed in claim 7, is characterized in that, There are n groups of the first measurement signal and the second measurement signal, where n is an integer, and n≥10; and the passing through the signal processing module is based on the first measurement signal and the second measurement signal. The error suppression of the interference ranging module by the measurement signal includes: Through the signal processing module, the data value c of the first measurement signal and the data value d of the second measurement signal of each group are obtained respectively; Linearly fit the data value c and data value d of each group to obtain n fitting coefficients A=[A1,A2,...,An]; Linearly fitting the preset actual distance data X=[x1,x2,...,xn] to A to obtain the fitting equation A=f(X); Based on the fitting equation A=f(X), the measurement distance optimization data value d ₁ =df(X)c of the interferometric ranging module is obtained. 9. laser interferometer ranging error suppression method as claimed in claim 8, is characterized in that, The data value d of the second measurement signal is the measurement data recorded when the interference ranging module and the transmitting module are relatively stationary, and the actual distance data X is the actual distance between the interference ranging module and the transmitting module; in, The reflection module is set on the preset motion platform, and by adjusting the position of the reflection module on the preset motion platform, n sets of measured distance data values and n sets of actual distance data values X=[x1, x2 ,...,xn]. 10. laser interferometer ranging error suppression method as claimed in claim 7, is characterized in that, There are n sets of the first measurement signal and the second measurement signal, where n is an integer, n≥10, and the second measurement signal includes an X-axis signal and a Y-axis signal; The signal processing module performing error suppression on the interference ranging module based on the first measurement signal and the second measurement signal includes: The data value c of the first measurement signal of each group, the X-axis measurement data value dx of the X-axis signal, and the Y-axis measurement data value dy of the Y-axis signal are respectively obtained by the signal processing module; Linearly fit the X-axis measurement data value dx and Y-axis measurement data value dy of each group with the data value c to obtain the two-way fitting coefficient Ax=[Ax1,Ax2,...,Axn], Ay=[Ay1 ,Ay2,...,Ayn]; Linearly fit the preset actual distance data X=[x1,x2,...,xn] and Ax to obtain the fitting equation Ax=f(X), and make the preset actual distance data Y=[y1,y2 ,..., yn] do linear fitting with Ay to obtain fitting equation Ay=f(Y); Based on the fitting equation Ax=f(X) and the fitting equation Ay=f(Y), obtain the X-axis measurement distance optimization data value dx1=dx-f(X)c and the Y-axis measurement distance of the interferometric ranging module Optimize data value dy1 = dy-f(Y)c.

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