CN108917643B - Three-dimensional shape measurement system and method based on double-optical comb scanning distance measurement - Google Patents
Three-dimensional shape measurement system and method based on double-optical comb scanning distance measurement Download PDFInfo
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- CN108917643B CN108917643B CN201810726961.9A CN201810726961A CN108917643B CN 108917643 B CN108917643 B CN 108917643B CN 201810726961 A CN201810726961 A CN 201810726961A CN 108917643 B CN108917643 B CN 108917643B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
A three-dimensional topography measurement system and method based on double optical comb scanning ranging are disclosed, the system comprises: the double-optical comb scanning distance measurement light path module is used for measuring one-dimensional distance information in the z direction of the measured object; the rotating and translating module is used for clamping and moving the measured object and providing two-dimensional distance information of the measured object in the x direction and the y direction; and the data acquisition and three-dimensional information processing module is connected with the double-optical-comb scanning distance measurement light path module and the rotation translation module and is used for acquiring and integrating the one-dimensional distance measurement information measured by the double-optical-comb scanning distance measurement light path module and the two-dimensional distance information provided by the rotation translation module to obtain the three-dimensional shape information of the measured object. The three-dimensional shape measuring system and method based on double-optical comb scanning distance measurement have the advantages that the depth of field is large, the measuring speed is high, the one-dimensional distance information is obtained and measured in an absolute distance measuring mode, light interruption is avoided, the step surface can be measured, and the method can be used for various industrial measurements.
Description
Technical Field
The invention belongs to the technical field of three-dimensional topography measurement, and particularly relates to a three-dimensional topography measurement system and method based on double optical comb scanning ranging.
Background
The three-dimensional topography measuring technology is widely applied to the fields of installation, defect detection, reverse engineering and the like in the manufacturing industry, and the existing three-dimensional topography measuring technology mainly comprises a scanning type three-dimensional measuring scheme and a staring three-dimensional measuring scheme. The gaze measurement has limited measurement area and depth of field, and the one-dimensional measurement accuracy is not high enough, so that scanning type three-dimensional measurement is required in some precision topography measurement. The scanning three-dimensional measurement scheme is roughly divided into incremental measurement and absolute measurement. The interferometric topography method based on incremental measurement is not suitable for measuring a measured object with a step surface and the like with severe optical path change, and light interruption can occur due to backscattering when a rough surface is measured, so that the whole measuring process is interrupted. The absolute three-dimensional shape measurement technology does not worry about light interruption in longitudinal measurement and is insensitive to refractive index change, but the existing absolute three-dimensional measurement scheme is low in measurement speed and small in measurement non-fuzzy range and cannot be used in many application occasions.
Disclosure of Invention
In view of the above-mentioned problems, it is an object of the present invention to provide a system and a method for measuring three-dimensional topography based on dual optical comb scanning ranging, so as to solve at least one of the above-mentioned problems.
The invention is realized by the following technical scheme:
as an aspect of the present invention, there is provided a three-dimensional topography measuring system based on dual optical comb scanning ranging, comprising: the double-optical-comb scanning ranging optical path module is used for measuring one-dimensional distance information of a measured object in the outgoing laser direction of the measured object, and the outgoing laser direction of the double-optical-comb scanning ranging optical path module is the z direction; the rotating and translating module is used for clamping and moving the measured object and providing two-dimensional distance information of the measured object in the x direction and the y direction; and the data acquisition and three-dimensional information processing module is connected with the double-optical-comb scanning distance measurement light path module and the rotation translation module and is used for acquiring and integrating the one-dimensional distance measurement information measured by the double-optical-comb scanning distance measurement light path module and the two-dimensional distance information provided by the rotation translation module to obtain the three-dimensional shape information of the measured object.
Preferably, the dual optical comb scanning ranging optical path module includes: a master-vibration optical frequency comb which is divided into reference light and measurement light by a beam splitter; the local oscillator optical frequency comb is divided into two beams of light through a beam splitter, one beam of light is converged with the reference light of the main oscillator optical frequency comb and sent to a photoelectric detector as a reference signal for ranging, and the other beam of light is converged with the measurement light of the main oscillator optical frequency comb and sent to the photoelectric detector as a measurement signal for ranging; wherein the frequency difference between the center frequencies of the main-oscillation optical frequency comb and the local-oscillation optical frequency comb is f0The frequency difference of the repetition frequency is Δ frep，f0And Δ frepEnsuring that the frequencies of the beat frequency signals are all positive real numbers; the distance measuring light path of the double-light comb scanning distance measuring light path module is MichaelA son interference optical path.
Preferably, the rotation-translation module comprises: a rotating portion comprising: the rotating plane of the rotating platform is vertical to the emergent laser of the double-optical comb scanning ranging optical path module; the mounting mechanism is positioned on one side, close to the double-optical-comb scanning ranging light path module, of the rotating table and is used for mounting a measured object; a translating portion for fixing the rotating portion and translating the rotating portion, comprising: the translation direction of the translation table is parallel to the rotation plane of the rotation table and is in the x direction; the rotating part and the translation part work simultaneously, so that the emergent laser of the double-optical comb scanning ranging optical path module is spirally scanned on the surface of a measured object.
Preferably, the rotating part further comprises a rotating platform control motor, which is located on one side of the rotating platform, which is back to the double optical comb scanning and ranging optical path module, and is used for controlling the rotating platform to do uniform angular velocity circular motion.
Preferably, the translation part further comprises a translation stage control motor, which is connected to the translation stage and is used for controlling the translation stage to do uniform linear motion.
Preferably, the data acquisition and three-dimensional information processing module comprises a data acquisition part, the sampling rate of which is higher than 2 times of the beat frequency signal; and the calculation processing part integrates the one-dimensional distance measurement information measured by the double-optical comb scanning distance measurement optical path module and the two-dimensional distance information provided by the rotation translation module.
Preferably, the distance measurement calculation relationship of the double-optical-comb scanning distance measurement optical path module is as follows:
where c is the speed of propagation of light in air, m is a positive integer, faAnd fbAre different frequency components of the optical frequency comb, a and b are positive integers, a is greater than b, a-b is m, fa-fb＝mΔfrep，
And
are respectively JaAnd JbThe phase difference between the measurement optical path and the reference optical path.
As another aspect of the present invention, a three-dimensional topography measuring method based on dual optical comb scanning distance measurement is provided, which utilizes the three-dimensional topography measuring system based on dual optical comb scanning distance measurement, and includes the following steps: the measured object is fixed on the rotating platform, and the surface of the measured object is parallel to the rotating surface of the rotating platform; the translation table makes uniform linear motion under the control of a translation table control motor, and the rotating table makes uniform angular velocity circular motion under the control of a rotating table control motor; the measuring laser emitted by the double-optical-comb scanning ranging light path module is applied to a measured object, and under the movement of the rotary translation table, the measuring laser moves spirally on the surface of the measured object to scan the whole surface of the sample block; the data acquisition and three-dimensional information processing module acquires control signals of the translation table control motor and the rotation table control motor to reconstruct two-dimensional information of the surface of the measured object in the x direction and the y direction, acquires output signals of two detectors of the double-optical-comb scanning distance measurement light path module and calculates one-dimensional distance information in the z direction.
According to the technical scheme, the three-dimensional shape measuring system and method based on double-optical comb scanning distance measurement have the following beneficial effects:
(1) because a small repetition frequency difference can be selected, a larger depth of field can be obtained;
(2) because the minimum beat frequency can be higher, the corresponding data updating rate can be very fast, and the system can reach higher measuring speed;
(3) the one-dimensional distance information is acquired and measured in a phase absolute distance measurement mode, and light interruption is not worried about.
Drawings
FIG. 1 is a diagram of a three-dimensional topography measurement system based on dual optical comb scanning ranging in an embodiment of the present invention;
FIG. 2 is a side view of a three-dimensional topography measurement system based on dual optical comb scanning ranging in an embodiment of the present invention;
FIG. 3 is a block diagram of a dual optical comb scanning ranging optical path according to an embodiment of the present invention;
[ description of the elements of the drawings ]
1-a collimator; 2-a collimator;
3-a collimator; 4-the object to be tested;
5-a half-transmitting half-reflecting mirror; 6-a half-transmitting and half-reflecting mirror;
7-a half-transmitting half-reflecting mirror; 8-a half-transmitting and half-reflecting mirror;
9-a photodetector; 10-a photodetector;
11-a master oscillator optical frequency comb; 12-local oscillator optical frequency comb;
13-double optical comb scanning distance measuring optical path module; 14-the object to be tested;
15-rotating table; 16-a rotary table control motor;
17-the rotational translation module is composed of a translation stage; 18-translation stage control motor;
19-a data acquisition and three-dimensional information processing module; 20-fiber coupler.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
A three-dimensional topography measurement system and method based on double optical comb scanning ranging are disclosed, the system comprises: the double-optical comb scanning distance measurement light path module is used for measuring one-dimensional distance information in the z direction of the measured object; the rotating and translating module is used for clamping and moving the measured object and providing two-dimensional distance information of the measured object in the x direction and the y direction; and the data acquisition and three-dimensional information processing module is connected with the double-optical-comb scanning distance measurement light path module and the rotation translation module and is used for acquiring and integrating the one-dimensional distance measurement information measured by the double-optical-comb scanning distance measurement light path module and the two-dimensional distance information provided by the rotation translation module to obtain the three-dimensional shape information of the measured object. The three-dimensional shape measuring system and method based on double-optical comb scanning distance measurement have the advantages that the depth of field is large, the measuring speed is high, the one-dimensional distance information is obtained and measured in an absolute distance measuring mode, light interruption is avoided, the step surface can be measured, and the method can be used for various industrial measurements.
Specifically, as an aspect of the present invention, there is provided a three-dimensional topography measuring system based on dual optical comb scanning ranging, including: the double-optical-comb scanning ranging optical path module is used for measuring one-dimensional distance information of a measured object in the outgoing laser direction of the measured object, and the outgoing laser direction of the double-optical-comb scanning ranging optical path module is the z direction; the rotating and translating module is used for clamping and moving the measured object and providing two-dimensional distance information of the measured object in the x direction and the y direction; and the data acquisition and three-dimensional information processing module is connected with the double-optical-comb scanning distance measurement light path module and the rotation translation module and is used for acquiring and integrating the one-dimensional distance measurement information measured by the double-optical-comb scanning distance measurement light path module and the two-dimensional distance information provided by the rotation translation module to obtain the three-dimensional shape information of the measured object.
Preferably, the dual optical comb scanning ranging optical path module includes: a master-vibration optical frequency comb which is divided into reference light and measurement light by a beam splitter; the local oscillator optical frequency comb is divided into two beams of light through a beam splitter, one beam of light is converged with the reference light of the main oscillator optical frequency comb and sent to a photoelectric detector as a reference signal for ranging, and the other beam of light is converged with the measurement light of the main oscillator optical frequency comb and sent to the photoelectric detector as a measurement signal for ranging; wherein the frequency difference between the center frequencies of the main-oscillation optical frequency comb and the local-oscillation optical frequency comb is f0The frequency difference of the repetition frequency is Δ frep，f0And Δ frepEnsuring that the frequencies of the beat frequency signals are all positive real numbers; the distance measuring light path of the double-optical comb scanning distance measuring light path module is a Michelson interference light path.
Preferably, the rotation-translation module comprises: a rotating portion comprising: the rotating plane of the rotating platform is vertical to the emergent laser of the double-optical comb scanning ranging optical path module; the mounting mechanism is positioned on one side, close to the double-optical-comb scanning ranging light path module, of the rotating table and is used for mounting a measured object; a translating portion for fixing the rotating portion and translating the rotating portion, comprising: the translation direction of the translation table is parallel to the rotation plane of the rotation table and is in the x direction; the rotating part and the translation part work simultaneously, so that the emergent laser of the double-optical comb scanning ranging optical path module is spirally scanned on the surface of a measured object.
Preferably, the rotating part further comprises a rotating platform control motor, which is located on one side of the rotating platform, which is back to the double optical comb scanning and ranging optical path module, and is used for controlling the rotating platform to do uniform angular velocity circular motion.
Preferably, the translation part further comprises a translation stage control motor, which is connected to the translation stage and is used for controlling the translation stage to do uniform linear motion.
Preferably, the data acquisition and three-dimensional information processing module comprises a data acquisition part, the sampling rate of which is higher than 2 times of the beat frequency signal; and the calculation processing part integrates the one-dimensional distance measurement information measured by the double-optical comb scanning distance measurement optical path module and the two-dimensional distance information provided by the rotation translation module.
Preferably, the distance measurement calculation relationship of the double-optical-comb scanning distance measurement optical path module is as follows:
where c is the speed of propagation of light in air, m is a positive integer, faAnd fbAre different frequency components of the optical frequency comb, a and b are positive integers, a is greater than b, a-b is m, fa-fb＝mΔfrep，
And
are respectively faAnd fbThe phase difference between the measurement optical path and the reference optical path.
Preferably, the depth of field of measurement of the three-dimensional topography measurement system based on the double-optical comb scanning ranging is equal to the non-fuzzy range of the double-optical comb scanning ranging, and is calculated by the following formula:
where c is the speed of light traveling in air, frepIs the repetition frequency of the master oscillator comb.
As another aspect of the present invention, a three-dimensional topography measuring method based on dual optical comb scanning distance measurement is provided, which utilizes the three-dimensional topography measuring system based on dual optical comb scanning distance measurement, and includes the following steps: the measured object is fixed on the rotating platform, and the surface of the measured object is parallel to the rotating surface of the rotating platform; the translation table makes uniform linear motion under the control of a translation table control motor, and the rotating table makes uniform angular velocity circular motion under the control of a rotating table control motor; the measuring laser emitted by the double-optical-comb scanning ranging light path module is applied to a measured object, and under the movement of the rotary translation table, the measuring laser moves spirally on the surface of the measured object to scan the whole surface of the sample block; the data acquisition and three-dimensional information processing module acquires control signals of the translation table control motor and the rotation table control motor to reconstruct two-dimensional information of the surface of the measured object in the x direction and the y direction, acquires output signals of two detectors of the double-optical-comb scanning distance measurement light path module and calculates one-dimensional distance information in the z direction.
The three-dimensional topography measuring system and method based on the double optical comb scanning distance measurement provided by the invention are further described in detail below with reference to specific embodiments and the accompanying drawings.
Examples
FIG. 1 is a diagram of a three-dimensional topography measurement system based on dual optical comb scanning ranging in an embodiment of the present invention. FIG. 2 is a side view of a three-dimensional topography measurement system based on dual optical comb scanning ranging in an embodiment of the present invention. As shown in fig. 1 and fig. 2, the dual optical comb scanning distance measurement optical path module 13, the rotational translation module, and the data acquisition and three-dimensional information processing module 19 work together, and the rotational translation module is composed of a translation stage 17, a rotation stage 15, a translation stage control motor 18, and a rotation stage control motor 16. The translation direction of the translation stage 17 is parallel to the rotation plane of the rotation stage 15, and the rotation plane is perpendicular to the outgoing laser of the double optical comb scanning distance measuring optical path module. The translation table 17 is controlled by a translation table control motor 18 to make uniform linear motion, and the rotation table 15 is controlled by a rotation table control motor 16 to make uniform angular velocity circular motion. The object 14 to be measured is fixed on the rotary table 15, and the surface of the object 14 to be measured is kept parallel to the rotating surface of the rotary table 15. The measuring laser emitted by the double-optical comb scanning distance measuring light path module 13 is irradiated on the measured object 14, and under the movement of the rotary translation table, the measuring light moves spirally on the surface of the measured object, and finally the whole surface of the sample block is scanned. The output signals of the two detectors of the translation stage control motor 18, the rotation stage control motor 16 and the double optical comb scanning distance measuring optical path module 13 are all sent to the data acquisition and three-dimensional information processing module 19, the module calculates the control signals of the translation stage control motor 18 and the rotation stage control motor 16 to reconstruct the two-dimensional information of the surface of the measured object in the x and y directions, the output signals of the two detectors of the double optical comb scanning distance measuring optical path module 13 which are acquired again and solve the one-dimensional distance information of the z direction, and the one-dimensional distance measuring information of the z direction is calculated according to the following formula:
where c is the speed of propagation of light in air, m is a positive integer, faAnd fbAre different frequency components of the optical frequency comb, a and b are positive integers, a is greater than b, a-b is m, fa-fb＝mΔfrep，
And
are respectively faAnd fbThe phase difference between the measurement optical path and the reference optical path. The depth of field measured is equal to the non-fuzzy range of the double optical frequency comb fast distance measurementThe fuzzy range depends on the repetition frequency of the main vibration optical comb, and the specific non-fuzzy range can be calculated by the following formula:
where c is the speed of light traveling in air, frepIs the repetition frequency of the master oscillator comb.
FIG. 3 is a block diagram of a dual optical comb scanning ranging optical path according to an embodiment of the present invention. As shown in FIG. 3, the optical path module for dual optical comb scanning and ranging of the present invention includes a main oscillator optical frequency comb 11 and a local oscillator optical frequency comb 12, where the two optical frequency combs have a central frequency difference f0And a repetition frequency difference of Δ frep. Light emitted by the main vibration optical frequency comb is emitted from an optical fiber, is changed into space light through the collimator 1, is divided into two beams of space light through the semi-transparent semi-reflective mirror 5, one beam of space light is used as measuring light and is transmitted to a measured object 4 through the semi-transparent semi-reflective mirror 8, and the other beam of space light is used as reference light; the light emitted by the local oscillator optical frequency comb 12 is divided into two paths by a 1 x 2 optical fiber coupler 20, wherein one path of light is changed into space light through a collimator 2, and then is converged with the reference light of the main oscillator optical frequency comb 11 through a semi-transparent semi-reflective mirror 6 and is transmitted into a photoelectric detector 9 as a reference signal for ranging; the measuring light of the main vibration optical frequency comb 11 is reflected from the measured object 4, then the light emitted by the semi-transparent semi-reflecting mirror 8 and the local vibration optical frequency comb 12 through the collimating mirror 3 are converged on the semi-transparent semi-reflecting mirror 7 and are transmitted to the photoelectric detector 10 together as the measuring signal of the distance measurement. The center frequency difference f of two optical frequency combs is set0And the repetition frequency difference Δ frepAnd the frequencies of the beat frequency signals of the two optical frequency combs are all positive and real.
In summary, the three-dimensional shape measurement system and method based on double-optical comb scanning distance measurement have the advantages that the depth of field is large, the measurement speed is high, the one-dimensional distance information is obtained and measured in an absolute distance measurement mode, light interruption is avoided, the step surface can be measured, and the method can be used for various industrial measurements.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. The utility model provides a three-dimensional topography measurement system based on two optical comb scanning range finding which characterized in that includes:
the double-optical-comb scanning ranging optical path module is used for measuring one-dimensional distance information of a measured object in the outgoing laser direction of the measured object, and the outgoing laser direction of the double-optical-comb scanning ranging optical path module is the z direction;
the rotating and translating module is used for clamping and moving the measured object and providing two-dimensional distance information of the measured object in the x direction and the y direction;
the data acquisition and three-dimensional information processing module is connected with the double-optical-comb scanning distance measurement light path module and the rotation translation module and is used for acquiring and integrating one-dimensional distance information measured by the double-optical-comb scanning distance measurement light path module and two-dimensional distance information provided by the rotation translation module to obtain three-dimensional shape information of the measured object;
the double-optical comb scanning distance measuring light path module comprises:
a master-vibration optical frequency comb which is divided into reference light and measurement light by a beam splitter; and
the local oscillator optical frequency comb is divided into two beams of light through a beam splitter, one beam of light is converged with the reference light of the main oscillator optical frequency comb and sent into a photoelectric detector as a reference signal for ranging, and the other beam of light is converged with the measurement light of the main oscillator optical frequency comb and sent into the photoelectric detector as a measurement signal for ranging;
wherein the frequency difference between the center frequencies of the main-oscillation optical frequency comb and the local-oscillation optical frequency comb is f0The frequency difference of the repetition frequency is Δ frep，f0And Δ frepEnsuring that the frequencies of the beat frequency signals are all positive real numbers; the distance measuring light path of the double-optical comb scanning distance measuring light path module is a Michelson interference light path;
the rotational-translation module includes:
a rotating portion comprising:
the rotating plane of the rotating platform is vertical to the emergent laser of the double-optical comb scanning ranging optical path module;
the mounting mechanism is positioned on one side, close to the double-optical-comb scanning ranging light path module, of the rotating table and is used for mounting a measured object;
a translating portion for fixing the rotating portion and translating the rotating portion, comprising:
the translation direction of the translation table is parallel to the rotation plane of the rotation table and is in the x direction;
the rotating part and the translation part work simultaneously, so that the emergent laser of the double optical comb scanning ranging optical path module is spirally scanned on the surface of a measured object;
the data acquisition and three-dimensional information processing module comprises:
a data acquisition section having a sampling rate higher than 2 times the beat signal; and
the calculation processing part integrates the one-dimensional distance information measured by the double-optical comb scanning ranging optical path module and the two-dimensional distance information provided by the rotation translation module;
the distance measurement calculation relation of the double-optical comb scanning distance measurement light path module is as follows:
where c is the speed of propagation of light in air, m is a positive integer, faAnd fbAre different frequency components of the optical frequency comb, a and b are positive integers, a is greater than b, a-b is m, fa-fb＝mΔfrep，
And
are respectivelyfaAnd fbThe phase difference between the measurement optical path and the reference optical path.
2. The system of claim 1,
the rotating part further comprises a rotating platform control motor, the rotating platform control motor is located on one side of the rotating platform, back to the double-optical comb scanning and ranging light path module, and is used for controlling the rotating platform to do uniform angular velocity circular motion.
3. The system of claim 1,
the translation part also comprises a translation table control motor which is connected with the translation table and used for controlling the translation table to do uniform linear motion.
4. A three-dimensional topography measuring method based on double optical comb scanning distance measurement, which is realized by using the three-dimensional topography measuring system based on double optical comb scanning distance measurement according to any one of claims 1-3, and is characterized by comprising the following steps:
the measured object is fixed on the rotating platform, and the surface of the measured object is parallel to the rotating surface of the rotating platform;
the translation table makes uniform linear motion under the control of a translation table control motor, and the rotating table makes uniform angular velocity circular motion under the control of a rotating table control motor;
the measuring laser emitted by the double-optical-comb scanning ranging light path module is irradiated on a measured object, and under the movement of the rotary translation table, the measuring laser moves spirally on the surface of the measured object to scan the whole surface of the measured object;
the data acquisition and three-dimensional information processing module acquires control signals of the translation table control motor and the rotation table control motor to reconstruct two-dimensional distance information of the surface of the measured object in the x direction and the y direction, acquires output signals of two detectors of the double-optical-comb scanning distance measurement light path module and solves one-dimensional distance information in the z direction.
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| CN110007310B (en) * | 2019-03-13 | 2020-10-23 | 北京空间飞行器总体设计部 | Large-dynamic-range baseline measurement system and method based on double-optical-comb distance measurement |
| CN111736165B (en) * | 2020-07-07 | 2023-08-25 | 清华大学 | Pose parameter measurement method and device |
| CN112505716B (en) * | 2020-11-11 | 2022-05-17 | 天津大学 | Electric control double-optical frequency comb ranging system with high updating frequency |
| CN113932729B (en) * | 2021-08-24 | 2024-02-09 | 西安空间无线电技术研究所 | Terahertz antenna-shaped surface detection system and method based on optical frequency comb |
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| WO2018102915A1 (en) * | 2016-12-07 | 2018-06-14 | UNIVERSITé LAVAL | Methods for performing dual-comb interferometry |
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