CN115394625A - Equipment and process method for maintaining spare parts of LCD (liquid crystal display) dry plasma etching equipment - Google Patents
Equipment and process method for maintaining spare parts of LCD (liquid crystal display) dry plasma etching equipment Download PDFInfo
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- CN115394625A CN115394625A CN202210817491.3A CN202210817491A CN115394625A CN 115394625 A CN115394625 A CN 115394625A CN 202210817491 A CN202210817491 A CN 202210817491A CN 115394625 A CN115394625 A CN 115394625A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/3288—Maintenance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32889—Connection or combination with other apparatus
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Abstract
The invention discloses equipment and a process method for maintaining spare parts of LCD (liquid crystal display) dry plasma etching equipment, belonging to the field of spare part processing. The equipment and the process method for maintaining the spare parts of the LCD dry plasma etching equipment have the advantages of automatic grinding and sand paper replacement, and solve the problems that grinding equipment and sand paper with various specifications are generally required to be used in the process of maintaining the spare parts of the plasma etching equipment, most of the existing processes adopt a mode of manually holding the grinding equipment to grind the spare parts, the manual grinding mode is low in efficiency and poor in grinding stability, the spare parts are easily damaged, the specifications of the sand paper are required to be continuously replaced before and after grinding, and the efficiency of grinding the spare parts is further influenced.
Description
Technical Field
The invention belongs to the field of spare part processing and treatment, and particularly relates to equipment and a process method for maintaining spare parts of LCD (liquid crystal display) dry plasma etching equipment.
Background
The plasma etcher is also called a plasma etcher, a plasma plane etcher, a plasma surface treatment instrument, a plasma cleaning system and the like. Plasma etching, the most common form of dry etching, is based on the principle that a gas exposed to an electron field forms a plasma, and the resulting ionized gas and gas releasing energetic electrons form a plasma or ions, which when accelerated by an electric field, release sufficient force to tightly adhere to a surface repelling force or etch a surface.
The abrasive paper of equipment and multiple specification of polishing need be used usually to the in-process of maintaining to plasma etching equipment spare part, and the mode of the equipment of polishing of adopting artifical holding to polish is mostly adopted in present technology to the spare part processing of polishing, the mode of artifical polishing is not only inefficiency and the stability of polishing is relatively poor, cause the damage to the spare part easily, and need continuous specification to abrasive paper to replace before and after polishing, efficiency when further having influenced the spare part and polished, so provide equipment and the technological method that LCD dry process plasma etching equipment spare part maintained and solve above-mentioned problem.
Disclosure of Invention
In view of one or more of the above-mentioned drawbacks and needs in the art, the present invention provides an apparatus and process for maintaining spare parts of an LCD dry plasma etching apparatus, which has the advantages of automatic grinding and sand paper replacement.
In order to achieve the aim, the invention provides a process method for maintaining spare parts of LCD dry plasma etching equipment, which comprises the following steps:
s1, pouring a workpiece into a reaction tank, sequentially pouring 5% of sodium hydroxide and 5g/L of sodium gluconate corrosion inhibitor according to the volume of water, heating to 30 ℃, soaking the workpiece, and simultaneously adopting a 5um filter for circulation and a high-pressure fan for stirring so as to carry out chemical film removal on the waste oxidized tetra-film on the surface of the workpiece:
s2, after chemical film removal, sequentially adopting 80#, 120#, 180#, 320#, and 500# alumina abrasive paper for grinding to reduce the roughness of the workpiece to be below 0.5um and keep the maximum roughness of each workpiece not different from RA0.05um, then adopting a dilute solution mixed by sulfuric acid and phosphoric acid and heating to 50 ℃ to soak the workpiece, performing chemical polishing to reduce the roughness of the workpiece and keep the finish of the workpiece to be above 500 GU;
s3, sequentially pouring 50g/L of oxalic acid, 100g/L of sulfuric acid, 10g/L of tartaric acid, 5g/L of yellow salicylic acid, ultrapure water and 20-30% of polytetrafluoroethylene into an oxidation pond according to the volume of the ultrapure water, heating to 60-70 ℃, soaking the workpiece for 1.5-2 hours, electrifying to form a layer of oxidation film on the surface of the workpiece, cleaning the workpiece by adopting ultrapure water and 3M7447B scouring cloth after soaking, cooling the workpiece and cleaning residual solvent on the surface;
s4, drying water stains on the surface of the workpiece by using a compressed air dryer after cleaning, baking the workpiece in an oven at 80 ℃ for 1 hour to ensure that the number of dust particles with the diameter of 1.0um is less than or equal to 1, the number of dust particles with the diameter of 0.5um is less than or equal to 5 and the number of dust particles with the diameter of 0.3um is less than or equal to 10, and finally packaging the workpiece by using a double-layer vacuum PE material in a dust-free chamber and matching vacuum with the vacuum degree of less than or equal to 1 x 10-3 torr.
The invention also provides equipment for maintaining the spare parts of the LCD dry plasma etching equipment, which comprises a collecting mechanism, a plurality of bearing components, a plurality of functional components, a plurality of feeding mechanisms, a mechanical arm, a fixing mechanism, a polishing head, an intelligent controller and a pneumatic controller, wherein the number of the bearing components, the number of the functional components and the number of the feeding mechanisms are equal;
the collecting mechanism comprises a collecting box, each bearing component, each functional component and each feeding mechanism are arranged on the collecting box in a group, the feeding mechanisms are arranged on the lower end faces of the bearing components, the functional components are arranged on one side face of each bearing component, the bearing components are used for fixing the replaced polishing heads, the functional components are used for feeding and discharging abrasive paper, and the feeding mechanisms are used for preparing the abrasive paper and conveying the abrasive paper to the functional components;
the fixing mechanism is arranged on the output end of the manipulator and is used for clamping and fixing the polishing head;
the intelligent control device is electrically connected with the pneumatic controller and is fixedly arranged on the outer side of the collecting box, the intelligent controller is electrically connected with the collecting mechanism, the functional assembly, the feeding mechanism, the manipulator and the fixing mechanism to control the collecting mechanism, the functional assembly, the feeding mechanism, the manipulator and the fixing mechanism, and the pneumatic controller is communicated with the bearing assembly and the functional assembly to realize pneumatic control of the bearing assembly and the functional assembly.
As a further improvement of the invention, the bearing assembly comprises a bearing cylinder and an annular air pipe, wherein a plurality of annular vent holes are equidistantly arranged on the upper end surface of the bearing cylinder, one end of each vent hole extends to the outer peripheral surface of the bearing cylinder, the annular air pipe is sleeved on the outer peripheral surface of the bearing cylinder and is communicated with each vent hole, and the annular air pipe is communicated with the pneumatic controller through the air pipe.
As a further improvement of the invention, the functional component comprises a mounting rack, an electric push rod, an air head and a plurality of flexible air nozzles, one end of the mounting rack is fixedly arranged on the lower end surface of the bearing cylinder, the other end of the mounting rack is fixedly arranged on the upper end surface of the collecting box, the electric push rod is fixedly arranged in the mounting rack, the output end of the electric push rod extends into the mounting rack and is in sliding fit with the mounting rack, the air head is fixedly arranged on the output end of the electric push rod, the flexible air nozzles are communicated with the top of the air head, the air head is communicated with the pneumatic controller through an air pipe, and the electric push rod is electrically connected with the intelligent controller.
As a further improvement of the invention, the feeding mechanism comprises a blanking frame, two rotating shafts, a transmission belt, a first rotating motor and a dispenser, wherein the blanking frame is in an upward extending L-shaped design and is communicated with the outer peripheral surface of the bearing cylinder, the two rotating shafts are both rotatably arranged in the horizontal part of the blanking frame and are in transmission connection through the transmission belt, the first rotating motor is fixedly arranged on the outer side of the blanking frame and is fixed with one of the rotating shafts, the dispenser is arranged in the horizontal part of the blanking frame in a penetrating manner from top to bottom, and the first rotating motor and the dispenser are both electrically connected with the intelligent controller.
As a further improvement of the present invention, the fixing mechanism includes a placement frame, a second rotating motor, a rotary table, a guide frame, a plurality of clamping jaws, a plurality of hinge seats and a plurality of connecting rods, the number of the hinge seats, the number of the connecting rods and the number of the clamping jaws are equal, the placement frame is fixedly disposed on the output end of the manipulator, the second rotating motor is disposed inside the placement frame, the output end of the second rotating motor penetrates through one end of the placement frame away from the manipulator, the rotary table is fixedly disposed on the output end of the second rotating motor, the guide frame is fixedly disposed on one end face of the placement frame away from the manipulator and covers the outer side of the rotary table, the plurality of clamping jaws are annularly distributed and slidably disposed in the guide frame, the plurality of hinge seats are disposed on the outer side of the rotary table, opposite sides of the plurality of guide frames are hinge buckles, the hinge seats and the hinge buckles are hinged by the connecting rods, and the second rotating motor is electrically connected with the intelligent controller.
As a further improvement of the invention, the collecting mechanism further comprises a fan, a multi-way pipe, a connecting pipe and two door plates, wherein the fan is fixedly arranged on the upper end face of the collecting box and is electrically connected with the intelligent controller, the multi-way pipe is respectively communicated with each bearing cylinder, the other end of the multi-way pipe is communicated with the top of the collecting box, a notch is formed in the collecting box, the output end of the fan is provided with an inclined part extending downwards through the connecting pipe, the inclined part is communicated with the multi-way pipe, and the two door plates are both communicated with one side face of the collecting box through hinges.
As a further improvement of the invention, two fan-shaped bearing plates are fixedly arranged in the bearing cylinder and are positioned on the same horizontal plane with the transmission belt, the two bearing plates are symmetrically arranged and form a gap, and the width of the gap is larger than that of the air head.
As a further improvement of the invention, a groove part for the air pipe on the air supply head to slide is arranged on one side surface of the bearing cylinder.
Generally, compared with the prior art, the technical scheme conceived by the invention has the following beneficial effects:
(1) According to the equipment and the process method for maintaining the spare parts of the LCD dry plasma etching equipment, in the using process, when the fixing mechanism clamps and fixes the polishing head and the abrasive paper is adhered to the polishing head, the manipulator can sequentially drive the fixing mechanism and the polishing head to rotate, the surface of a workpiece can be automatically polished when the abrasive paper is in contact with the workpiece, and compared with a manual polishing mode, the stability and the efficiency of polishing are greatly improved.
(2) According to the equipment and the process method for maintaining the spare parts of the LCD dry plasma etching equipment, when the abrasive paper needs to be replaced, the mechanical arm bends at multiple angles, the polishing head is inserted into the bearing assembly, the fixing mechanism cancels the fixation of the polishing head after the polishing head is fixed by the bearing assembly, and the polishing head is driven by the mechanical arm to move to the position above another polishing head adhered with abrasive paper with other sizes and is connected and fixed, so that the replacement of the polishing head can be automatically completed, the situation that the polishing head needs to be replaced continuously manually in actual use is avoided, and the use efficiency of the equipment is further improved.
(3) According to the equipment and the process method for maintaining the spare parts of the LCD dry plasma etching equipment, after the grinding head is replaced, the functional component adsorbs and removes the used abrasive paper on the grinding head, the collecting mechanism can adsorb the waste abrasive paper under negative pressure and transmit the waste abrasive paper to the collecting box for collection after the abrasive paper is removed, then the feeding mechanism sprays glue on the new abrasive paper, and transmits the abrasive paper to the functional component and adheres to the grinding head through the functional component, so that the replacement of the abrasive paper can be automatically completed, the situation that the abrasive paper needs to be replaced continuously by manpower in actual use is avoided, and the efficiency of the equipment in use is improved again.
Drawings
FIG. 1 is a process flow diagram of the present invention;
FIG. 2 is a schematic diagram of the apparatus of the present invention;
FIG. 3 is a schematic side view of the apparatus of the present invention;
FIG. 4 is a schematic cross-sectional view of the carriage assembly and the loading mechanism of the present invention;
FIG. 5 is a schematic view of a fixing mechanism according to the present invention;
fig. 6 is a schematic view of an explosive structure of the fixing mechanism of the present invention.
Throughout the drawings, like reference numerals designate like features, and in particular: 1. a collection mechanism; 11. a collection box; 12. a fan; 13. a multi-pass tube; 14. a connecting pipe; 15. a door panel; 2. A carrier assembly; 21. a carrying cylinder; 22. an annular air pipe; 23. a vent hole; 3. a functional component; 31. a mounting frame; 32. an electric push rod; 33. an air head; 34. a flexible air tap; 4. a feeding mechanism; 41. A blanking frame; 42. a rotating shaft; 43. a transmission belt; 44. a first rotating electric machine; 45. a glue dispenser; 5. A manipulator; 6. a fixing mechanism; 61. a placing frame; 62. a second rotating motor; 63. a turntable; 64. A guide frame; 65. a clamping jaw; 66. a hinged seat; 67. a connecting rod; 7. polishing heads; 8. an intelligent controller; 9. a pneumatic controller; 10. a carrier plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Examples
Fig. 1 shows a process method for maintaining spare parts of an LCD dry plasma etching apparatus, which includes the following steps:
s1, pouring a workpiece into a reaction tank, pouring 5% of sodium hydroxide and 5g/L of a sodium gluconate corrosion inhibitor according to the volume of water, heating to 30 ℃, soaking the workpiece, and stirring by adopting a 5um filter and a high-pressure fan to perform chemical stripping on a waste oxide four-film on the surface of the workpiece:
s2, after chemical film removal, sequentially grinding by using 80#, 120#, 180#, 320#, and 500# aluminum oxide abrasive paper to reduce the roughness of the workpiece to be below 0.5um and keep the maximum roughness of each workpiece not different from RA0.05um, then soaking the workpiece by using dilute solution mixed by sulfuric acid and phosphoric acid and heating to 50 ℃, performing chemical polishing to reduce the roughness of the workpiece, and keeping the finish of the workpiece to be above 500 GU;
s3, sequentially pouring 50g/L of oxalic acid, 100g/L of sulfuric acid, 10g/L of tartaric acid, 5g/L of yellow salicylic acid, ultrapure water and 20-30% of polytetrafluoroethylene into an oxidation pond according to the volume of the ultrapure water, heating to 60-70 ℃, soaking the workpiece for 1.5-2 hours, electrifying to form a layer of oxidation film on the surface of the workpiece, cleaning the workpiece by adopting ultrapure water and 3M7447B scouring cloth after soaking, cooling the workpiece and cleaning residual solvent on the surface;
s4, drying water stains on the surface of the workpiece by using a compressed air dryer after cleaning, baking the workpiece in an oven at 80 ℃ for 1 hour to ensure that the number of dust particles with the diameter of 1.0um is less than or equal to 1, the number of dust particles with the diameter of 0.5um is less than or equal to 5 and the number of dust particles with the diameter of 0.3um is less than or equal to 10, and finally packaging the workpiece by using a double-layer vacuum PE material in a dust-free chamber and matching vacuum with the vacuum degree of less than or equal to 1 x 10-3 torr.
Fig. 2 shows a device for maintaining spare parts of an LCD dry plasma etching device, which includes a collecting mechanism 1, a plurality of carrying assemblies 2, a plurality of functional assemblies 3, a plurality of feeding mechanisms 4, a manipulator 5, a fixing mechanism 6, a polishing head 7, an intelligent controller 8 and a pneumatic controller 9, wherein the carrying assemblies 2, the functional assemblies 3 and the feeding mechanisms 4 are equal in number;
the collecting mechanism 1 comprises a collecting box 11, each bearing component 2, each functional component 3 and each feeding mechanism 4 are arranged on the collecting box 11 in a group, the feeding mechanisms 4 are arranged on the lower end surfaces of the bearing components 2, the functional components 3 are arranged on one side surface of each bearing component 2, the bearing components 2 are used for fixing the replaced polishing heads 7, the functional components 3 are used for feeding and discharging abrasive paper, and the plurality of feeding mechanisms 4 are respectively used for preparing abrasive paper with different sizes and conveying the abrasive paper to the functional components 3 connected with the abrasive paper;
the fixing mechanism 6 is arranged at the output end of the manipulator 5 and is used for clamping and fixing the polishing head 7, and the polishing head 7 is used for adhering abrasive paper;
realize between intelligent control ware 8 and the pneumatic controller 9 that the electricity is connected and all fix the outside of locating collecting box 11, intelligent control ware 8 and collection mechanism 1, functional component 3, feed mechanism 4, realize the electricity between manipulator 5 and the fixed establishment 6 and connect, in order to be used for to collecting mechanism 1, functional component 3, feed mechanism 4, manipulator 5 and fixed establishment 6 control, pneumatic controller 9 and carrier assembly 2, be linked together between functional component 3 and the external trachea, in order to be used for realizing carrier assembly 2, functional component 3's pneumatic control.
In the embodiment, in the use process, when the fixing mechanism 6 clamps and fixes the polishing head 7 and the polishing head 7 is adhered with the abrasive paper, the manipulator 5 can sequentially drive the fixing mechanism 6 and the polishing head 7 to rotate, the surface of the workpiece can be automatically polished when the abrasive paper is in contact with the workpiece, and compared with a manual polishing mode, the stability and the efficiency of polishing are greatly improved;
when the abrasive paper needs to be replaced, the mechanical arm 5 is bent in multiple angles, the polishing head 7 is inserted into the bearing component 2, the fixing mechanism 6 cancels the fixation of the polishing head 7 after the bearing component 2 fixes the polishing head 7, and moves to the position above another polishing head 7 adhered with abrasive paper with other sizes under the driving of the mechanical arm 5 and connects and fixes the polishing head 7, so that the replacement of the polishing head 7 can be automatically completed, the polishing head 7 is prevented from being replaced continuously by manpower in actual use, and the use efficiency of the equipment is further improved;
after accomplishing the change, the abrasive paper that functional unit 3 will use on the head 7 of polishing adsorbs and takes off, take off back collection mechanism 1 can carry out the negative pressure with old and useless abrasive paper and adsorb and transmit and collect in collecting box 11, feed mechanism 4 is carried abrasive paper to functional unit 3 after spouting to new abrasive paper and is gone up and carry out the adhesion through it on head 7 of polishing, can accomplish the change to abrasive paper automatically, avoid needing the manual work constantly to change abrasive paper in the in-service use, efficiency when having improved this equipment use once more.
Specifically, referring to fig. 3-4, the bearing assembly 2 includes a bearing cylinder 21 and an annular air pipe 22, a plurality of air holes 23 are formed in the upper end surface of the bearing cylinder 21, the air holes 23 are annularly and equidistantly arranged, one end of each air hole 23 extends to the outer peripheral surface of the bearing cylinder 21, the annular air pipe 22 is sleeved on the outer peripheral surface of the bearing cylinder 21 and is communicated with each air hole 23, and the annular air pipe 22 is communicated with the pneumatic controller 9 through an air pipe.
In this embodiment, when the polishing head 7 is inserted into the bearing cylinder 21 and attached to the top of the bearing cylinder 21, the pneumatic controller 9 extracts air in the air pipe, the annular air pipe 22 and the vent hole 23 under the control of the intelligent controller 8, and the polishing head 7 can be adsorbed and fixed by the formed negative pressure.
Specifically, refer to fig. 3-4, functional unit 3 includes mounting bracket 31, electric putter 32, gas head 33 and the flexible air cock 34 of a plurality of, the fixed up end of locating the lower terminal surface and the other end of bearing a container 21 of mounting bracket 31 are fixed and are located the up end of collecting box 11, electric putter 32 is fixed and is located the inside of mounting bracket 31 and the output extend to mounting bracket 31 and with mounting bracket 31 between sliding fit, gas head 33 is fixed to be located on electric putter 32's the output and flexible air cock 34 communicates in gas head 33 top, gas head 33 is linked together through trachea and pneumatic controller 9, realize the electricity between electric putter 32 and the intelligent control ware 8 and be connected.
In this embodiment, after sanding head 7 obtains fixedly, pneumatic controller 9 takes out the trachea in proper order under intelligent control ware 8's control, the inside air of air head 33 and flexible air cock 34, electric putter 32 extends and drives air head 33 and rise and make flexible air cock 34 and abrasive paper surface contact under intelligent control ware 8's control afterwards, can adsorb sand paper through the negative pressure that forms and take off, when old sand paper is inhaled down and new sand paper is carried to loading board 10 on, electric putter 32 is electrified once more and is opened and extend and continuously promote new sand paper, contact until new sand paper and sanding head 7, can be with new sand paper adhesion on sanding head 7, accomplish the change to sand paper automatically.
Specifically, referring to fig. 3-4, feed mechanism 4 includes blanking frame 41, two pivot 42, drive belt 43, first rotation motor 44 and point gum machine 45, blanking frame 41 is the design of the L type that upwards extends and communicates in the outer peripheral face of bearing cylinder 21, the equal rotatable setting in the horizontal flat portion of blanking frame 41 of two pivot 42, connect through drive belt 43 transmission between two pivot 42, first rotation motor 44 is fixed in the outside of blanking frame 41 and is fixed mutually with one of them pivot 42, point gum machine 45 from last to down run through set up in the horizontal flat portion of blanking frame 41, first rotation motor 44 and point gum machine 45 all realize the electricity to be connected between intelligent control ware 8, the inside of blanking frame 41 is provided with a baffle, be formed with a clearance between baffle and the drive belt 43.
In this embodiment, be used for range upon range of new abrasive paper piece of stacking in the vertical portion of unloading frame 41, the baffle is used for carrying out check to the second abrasive paper in below and keeps off, avoid it to follow drive belt 43 and remove the transport, when old abrasive paper is taken off, first rotation motor 44 is switched on and is driven pivot 42 and drive belt 43 in proper order and rotate under intelligent control ware 8's control, the abrasive paper of below lasts to carrying board 10 department under the drive of drive belt 43, spout glue on this in-process point gluing machine 45 is to new abrasive paper, final new abrasive paper is carried to carrying board 10, can accomplish the material loading to abrasive paper automatically.
Specifically, referring to fig. 5-6, the fixing mechanism 6 includes a placement frame 61, a second rotating motor 62, a turntable 63, a guide frame 64, a plurality of clamping jaws 65, a plurality of hinged seats 66 and a plurality of connecting rods 67, the number of the hinged seats 66, the connecting rods 67 and the clamping jaws 65 is equal, the placement frame 61 is fixedly disposed on the output end of the manipulator 5, and the second rotating motor 62 is disposed inside the placement frame 61, the output end of the second rotating motor 62 penetrates through one end of the placement frame 61 away from the manipulator 5, and the turntable 63 is fixedly disposed on the output end of the second rotating motor 62, the guide frame 64 is fixedly disposed on one end face of the placement frame 61 away from the manipulator 5, and covers the outer side of the turntable 63, the plurality of clamping jaws 65 are annularly distributed and slidably disposed in the guide frame 64, the plurality of hinged seats 66 are disposed on the outer side of the turntable 63, opposite sides of the plurality of the guide frames 64 are hinged buckles, the seats 66 and the hinged buckles are hinged with each other through the connecting rods 67, and the second rotating motor 62 is electrically connected with the intelligent controller 8.
In this embodiment, when the second rotating motor 62 is powered on, the turntable 63 rotates and drives the plurality of clamping jaws 65 to expand or contract through the cooperation between the hinge base 66 and the connecting rod 67, when the clamping jaws 65 contract and are inserted into the polishing head 7, the polishing head 7 can be clamped and fixed, and otherwise, the fixing of the polishing head 7 is cancelled.
Specifically, refer to fig. 3, collection mechanism 1 still includes fan 12, multi-way pipe 13, connecting pipe 14 and two door plant 15, fan 12 is fixed set up in the up end of collecting box 11 and realize the electricity between the intelligent control ware 8 to be connected, multi-way pipe 13 is linked together and the other end is linked together with collecting box 11 top with every bearing cylinder 21 respectively, the inside of collecting box 11 has a notch, fan 12's output has a downward extension's rake through connecting pipe 14, and the rake is linked together with multi-way pipe 13, two door plant 15 all are linked together through one side of hinge and collecting box 11.
In this embodiment, when air head 33 drove old abrasive paper and descends, fan 12 is opened and blows outside air to connecting pipe 14 in proper order under intelligent control ware 8's the drive, in many way pipe 13 and the collecting box 11, because connecting pipe 14 passes through the rake and is formed with certain contained angle between the pipe 13 that leads to, at the in-process that wind blown, many way pipe 13's a plurality of inputs form the negative pressure, can adsorb old abrasive paper and advance many way pipe 13 and carry and collect to collecting box 11 in, can clear up old abrasive paper through opening two door plant 15 after the old abrasive paper in collecting box 11 is full.
Specifically, referring to fig. 4, two fan-shaped carrier plates 10 are fixed inside the carrier cylinder 21 and located on the same horizontal plane with the transmission belt 43, the two carrier plates 10 are symmetrically arranged and form a gap, and the width of the gap is greater than the width of the air head 33.
In this embodiment, two carrier plates 10 are used to carry new sandpaper.
Specifically, referring to fig. 4, a slot for sliding the air tube on the air head 33 is formed on one side of the carrying cylinder 21.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. A process method for maintaining spare parts of LCD dry plasma etching equipment is characterized by comprising the following steps:
s1, pouring a workpiece into a reaction tank, sequentially pouring 5% of sodium hydroxide and 5g/L of sodium gluconate corrosion inhibitor according to the volume of water, heating to 30 ℃, soaking the workpiece, and simultaneously adopting a 5um filter for circulation and a high-pressure fan for stirring so as to carry out chemical film removal on the waste oxidized tetra-film on the surface of the workpiece:
s2, after chemical film removal, sequentially grinding by using 80#, 120#, 180#, 320#, and 500# aluminum oxide abrasive paper to reduce the roughness of the workpiece to be below 0.5um and keep the maximum roughness of each workpiece not different from RA0.05um, then soaking the workpiece by using dilute solution mixed by sulfuric acid and phosphoric acid and heating to 50 ℃, performing chemical polishing to reduce the roughness of the workpiece, and keeping the finish of the workpiece to be above 500 GU;
s3, sequentially pouring 50g/L of oxalic acid, 100g/L of sulfuric acid, 10g/L of tartaric acid, 5g/L of yellow salicylic acid, ultrapure water and 20-30% of polytetrafluoroethylene into an oxidation pond according to the volume of the ultrapure water, heating to 60-70 ℃, soaking the workpiece for 1.5-2 hours, electrifying to form a layer of oxidation film on the surface of the workpiece, cleaning the workpiece by adopting ultrapure water and 3M7447B scouring cloth after soaking, cooling the workpiece and cleaning residual solvent on the surface;
s4, drying water stains on the surface of the workpiece by using a compressed air dryer after cleaning, baking the workpiece in an oven at 80 ℃ for 1 hour to ensure that the number of dust particles with the diameter of 1.0um is less than or equal to 1, the number of dust particles with the diameter of 0.5um is less than or equal to 5 and the number of dust particles with the diameter of 0.3um is less than or equal to 10, and finally packaging the workpiece by using a double-layer vacuum PE material in a dust-free chamber in cooperation with vacuum with the vacuum degree of less than or equal to 1 x 10-3 torr.
2. The equipment for maintaining the spare parts of the LCD dry plasma etching equipment according to the claim 1 is characterized by comprising a collecting mechanism (1), a plurality of bearing assemblies (2), a plurality of functional assemblies (3), a plurality of feeding mechanisms (4), a mechanical arm (5), a fixing mechanism (6), a polishing head (7), an intelligent controller (8) and a pneumatic controller (9), wherein the number of the bearing assemblies (2), the number of the functional assemblies (3) and the number of the feeding mechanisms (4) are equal;
the collecting mechanism (1) comprises a collecting box (11), each bearing component (2), each functional component (3) and each feeding mechanism (4) are arranged on the collecting box (11) in a group, the feeding mechanisms (4) are arranged on the lower end faces of the bearing components (2), the functional components (3) are arranged on one side face of each bearing component (2), the bearing components (2) are used for fixing the replaced sanding heads (7), the functional components (3) are used for feeding and discharging the sand paper, and the feeding mechanisms (4) are used for preparing the sand paper and conveying the sand paper to the functional components (3);
the fixing mechanism (6) is arranged on the output end of the manipulator (5) and is used for clamping and fixing the polishing head (7);
the pneumatic control device is characterized in that electric connection is achieved between the intelligent controller (8) and the pneumatic controller (9) and the intelligent controller is fixedly arranged on the outer side of the collecting box (11), electric connection is achieved between the intelligent controller (8) and the collecting mechanism (1), the functional component (3), the feeding mechanism (4), the manipulator (5) and the fixing mechanism (6) so as to control the collecting mechanism (1), the functional component (3), the feeding mechanism (4), the manipulator (5) and the fixing mechanism (6), and the pneumatic controller (9) is communicated with the bearing component (2) and the functional component (3) so as to achieve pneumatic control over the bearing component (2) and the functional component (3).
3. The equipment for maintaining the spare parts of the LCD dry plasma etching equipment according to claim 2, wherein the bearing assembly (2) comprises a bearing cylinder (21) and an annular air pipe (22), a plurality of annular vent holes (23) are formed in the upper end face of the bearing cylinder (21) and are equidistantly arranged, one ends of the vent holes (23) extend to the outer peripheral face of the bearing cylinder (21), the annular air pipe (22) is sleeved on the outer peripheral face of the bearing cylinder (21) and is communicated with each vent hole (23), and the annular air pipe (22) is communicated with the pneumatic controller (9) through an air pipe.
4. The equipment that LCD dry plasma etching equipment spare part was maintained according to claim 3, characterized in that, functional unit (3) includes mounting bracket (31), electric putter (32), gas head (33) and a plurality of flexible air cock (34), the one end of mounting bracket (31) is fixed to be located the lower terminal surface and the other end of bearing a weight of section of thick bamboo (21) are fixed to be located the up end of collecting box (11), electric putter (32) are fixed to be located the inside of mounting bracket (31) and the output extend to the inside of mounting bracket (31) and with mounting bracket (31) sliding fit within a definite time, gas head (33) are fixed to be located on the output of electric putter (32) and flexible air cock (34) communicate in gas head (33) top, gas head (33) are linked together through trachea and pneumatic controller (9), realize the electricity between electric putter (32) and the intelligent control ware (8) and be connected.
5. The apparatus for maintaining spare parts of an LCD dry plasma etching apparatus according to claim 3, wherein the feeding mechanism (4) comprises a feeding frame (41), two rotating shafts (42), a transmission belt (43), a first rotating motor (44) and a dispenser (45), the feeding frame (41) is of an upwardly extending L-shaped design and is communicated with the outer circumferential surface of the carrier drum (21), the two rotating shafts (42) are rotatably disposed in a horizontal portion of the feeding frame (41), the two rotating shafts (42) are in transmission connection through the transmission belt (43), the first rotating motor (44) is fixedly disposed at the outer side of the feeding frame (41) and is fixed with one of the rotating shafts (42), the dispenser (45) is disposed in the horizontal portion of the feeding frame (41) from top to bottom, the first rotating motor (44) is electrically connected with the dispenser (8), a baffle is disposed inside the feeding frame (41), and a gap is formed between the baffle and the transmission belt (43).
6. The apparatus for maintenance of parts and equipment for LCD dry plasma etching apparatus according to claim 2, it is characterized in that the fixing mechanism (6) comprises a placing frame (61), a second rotating motor (62), a turntable (63), a guide frame (64), a plurality of clamping jaws (65), a plurality of hinged seats (66) and a plurality of connecting rods (67), the number of the hinged seats (66), the connecting rods (67) and the clamping jaws (65) is equal, the placing frame (61) is fixedly arranged on the output end of the manipulator (5), the second rotating motor (62) is arranged in the placing frame (61), the output end of the second rotating motor (62) penetrates through one end of the placing frame (61) far away from the manipulator (5), the turntable (63) is fixedly arranged on the output end of the second rotating motor (62), the guide frame (64) is fixedly arranged on one end face of the placing frame (61) far away from the manipulator (5) and covers the outer side of the turntable (63), a plurality of clamping jaws (65) are annularly distributed and can be slidably arranged in the guide frame (64), the hinged seats (66) are arranged on the outer side of the turntable (63), the opposite sides of the guide frames (64) are hinged buckles, the hinged seats (66) are hinged with the hinged buckles through connecting rods (67), and the second rotating motor (62) is electrically connected with the intelligent controller (8).
7. The equipment for maintaining the spare parts of the LCD dry plasma etching equipment according to the claim 3, wherein the collection mechanism (1) further comprises a fan (12), a multi-way pipe (13), a connecting pipe (14) and two door plates (15), the fan (12) is fixedly arranged on the upper end face of the collection box (11) and electrically connected with the intelligent controller (8), the multi-way pipe (13) is respectively communicated with each bearing cylinder (21) and the other end of the multi-way pipe is communicated with the top of the collection box (11), a notch is formed in the collection box (11), the output end of the fan (12) is provided with a downward extending inclined part through the connecting pipe (14), the inclined part is communicated with the multi-way pipe (13), and the two door plates (15) are communicated with one side face of the collection box (11) through hinges.
8. The apparatus for maintaining spare parts of LCD dry plasma etching apparatus according to claim 3, wherein two fan-shaped carrier plates (10) are fixed inside the carrier cylinder (21) and located on the same horizontal plane with the transmission belt (43), the two carrier plates (10) are symmetrically arranged and form a gap, and the width of the gap is larger than the width of the gas head (33).
9. The apparatus for maintaining spare parts of LCD dry plasma etching equipment according to claim 3, wherein a groove for sliding the air pipe on the air supply head (33) is formed on one side surface of the bearing cylinder (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210817491.3A CN115394625A (en) | 2022-07-12 | 2022-07-12 | Equipment and process method for maintaining spare parts of LCD (liquid crystal display) dry plasma etching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210817491.3A CN115394625A (en) | 2022-07-12 | 2022-07-12 | Equipment and process method for maintaining spare parts of LCD (liquid crystal display) dry plasma etching equipment |
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| Publication Number | Publication Date |
|---|---|
| CN115394625A true CN115394625A (en) | 2022-11-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210817491.3A Pending CN115394625A (en) | 2022-07-12 | 2022-07-12 | Equipment and process method for maintaining spare parts of LCD (liquid crystal display) dry plasma etching equipment |
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| Country | Link |
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| CN (1) | CN115394625A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116764974A (en) * | 2023-07-25 | 2023-09-19 | 宣城鑫途智能装备有限公司 | Work piece letter sorting anchor clamps frock equipment of industrial automation line |
-
2022
- 2022-07-12 CN CN202210817491.3A patent/CN115394625A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116764974A (en) * | 2023-07-25 | 2023-09-19 | 宣城鑫途智能装备有限公司 | Work piece letter sorting anchor clamps frock equipment of industrial automation line |
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