CN115267266B - Electrostatic gun and method for measuring contact angle and force of electrostatic gun - Google Patents
Electrostatic gun and method for measuring contact angle and force of electrostatic gun Download PDFInfo
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- CN115267266B CN115267266B CN202210812735.9A CN202210812735A CN115267266B CN 115267266 B CN115267266 B CN 115267266B CN 202210812735 A CN202210812735 A CN 202210812735A CN 115267266 B CN115267266 B CN 115267266B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C1/00—Measuring angles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0061—Force sensors associated with industrial machines or actuators
- G01L5/0076—Force sensors associated with manufacturing machines
- G01L5/009—Force sensors associated with material gripping devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
Abstract
The application provides an electrostatic gun and a method for measuring contact angle and force of the electrostatic gun, wherein a plurality of pressure sensors (3) are arranged at the installation joint part of a gun tip (2) and an electrostatic gun body (1), the pressure sensors (3) are uniformly distributed along the circumferential direction of an installation surface to form a pressure sensor ring (4), the number of the pressure sensors (3) is an even number greater than or equal to six, the pressure sensor ring (4) is arranged at one side of the electrostatic gun body (1), the center (6) of the pressure sensor ring (4) is concentric with the gun tip (2), the contact angle and force of the electrostatic gun are calculated quickly, calculation is accurate, consistency of each test angle is ensured, and measurement accuracy and reliability are improved.
Description
Technical Field
The application relates to the field of electrostatic discharge testing, in particular to an electrostatic gun and a method for measuring contact angle and contact force of the electrostatic gun.
Background
In CMOS integrated circuits, with the continuous progress of chip manufacturing technology, the size of devices is smaller and smaller, and the operation speed and performance of Integrated Circuits (ICs) are greatly improved, so that the sensitivity of electronic devices and systems to electromagnetic compatibility is improved, but the overvoltage resistance is reduced. Electromagnetic compatibility research and testing of chips become hot spots for research at home and abroad. ESD (Electrostatic Discharge, ESD) is an important cause of malfunction or malfunction of various electronic instruments and devices, and is an important component of electromagnetic compatibility experiments. However, semiconductors and integrated circuits are increasingly used in communications and electronic devices, and the switching threshold voltages of electronic components are continually reduced for the purpose of reducing power consumption, which all lead to an increasing emphasis on the problem of electrostatic discharge of electronic devices. The problem of electrostatic discharge is not only related to the normal use and maintenance of communication and electronic equipment, but also affects the personal and property safety. Accordingly, more and more electronic product manufacturers and research institutions are beginning to pay attention to research on communication and electronic product electrostatic discharge, electrostatic protection, and the like.
The ESD evaluation test models for the chip are a human body discharge model (HBM), a Machine Model (MM), a Charging Device Model (CDM) and an induction discharge model (FICDM), and all the four test models are used for carrying out contact ESD discharge on the pins of the chip. The chip is also damaged by electrostatic induction at various stages of production, packaging, transportation and actual use, so that abnormal functions or poor performance of the chip are caused. Therefore, some chip manufacturers can perform electrostatic induction damage test evaluation on the final form chip product, and during the test, an electrostatic gun is generally used for performing discharge test on each area on the surface of the final form chip product one by one, and the damage degree of the electrostatic induction discharge test is evaluated according to the function and performance difference before and after the test.
In the small-batch electrostatic discharge test, an electrostatic gun is generally used for electrostatic discharge test, and the gun head of the electrostatic gun is aligned to a test point on a sample to be detected, so that the electrostatic gun discharges static electricity to the test point. And then, an operator can judge whether the electrostatic protection capability of the sample to be detected meets the standard by observing whether the test point on the sample to be detected is abnormal or not, and evaluate the damage degree of the electrostatic induction discharge test according to the function and performance difference before and after the test.
In an actual electrostatic gun test, two contact modes are respectively direct contact discharge and air gap discharge, a smoother electrostatic gun tip is generally used for air gap discharge, after stress voltage is set, when the distance between the two is very close, air is broken down to generate discharge, the electrostatic gun tip moves to a discharge position slowly until electric sparks or flashes occur, finally, the electrostatic gun tip is required to touch a discharge position on the surface of a test object or a system to completely release charges, and the test operation is generally required to be repeated for about 10 times at positive and negative poles respectively; direct contact discharge tests are similar to air gap discharge tests in that a relatively sharp electrostatic gun tip is typically used in contact discharge in order to provide a relatively good electrical contact with a conductive object or system surface.
When the electrostatic test pulse is applied, the contact angle between the electrostatic gun and the position to be tested of the object to be tested is ensured to be constant during each test, so that the same electrostatic test pulse is ensured to be accepted under the condition that the electrostatic test pulse of the same level is injected into each position to be tested.
However, during small batch testing or laboratory testing, a manual operation electrostatic gun is often used to perform electrostatic discharge testing on pins of a chip in a direct contact discharge mode, and during manual operation testing, angles measured each time are different, the pressure of the electrostatic gun on the pins is also different, and during each test, external conditions of the test are different, so that the accuracy of the electrostatic discharge testing on the pins of the chip is not high. However, in the prior art, there is no description of the related art for measuring and adjusting the contact angle and force at the time of electrostatic discharge test of the electrostatic gun.
Disclosure of Invention
In order to solve the technical problems in the prior art, the application provides an electrostatic gun. The static gun comprises a static gun body and a gun tip, wherein a plurality of pressure sensors are arranged at the installation joint part of the gun tip and the static gun body, the pressure sensors are uniformly distributed along the circumferential direction of an installation surface to form a pressure sensor ring, the number of the pressure sensors is an even number greater than or equal to six, the pressure sensor ring is arranged on one side of the static gun body, and the circle center of the pressure sensor ring is concentric with the gun tip.
Preferably, a level bubble is arranged at the top of the electrostatic gun body;
the application also provides a method for measuring the electrostatic discharge contact angle and the contact force by adopting the electrostatic gun, which comprises the following steps:
reading the measured value distribution of each pressure sensor on the pressure sensor ring;
according to the measured value distribution, calculating the contact angle between the electrostatic gun and the object to be tested in the electrostatic discharge test;
and according to the measured value distribution, calculating the contact force between the electrostatic gun and the object to be measured during electrostatic discharge test.
Preferably, the calculating the contact angle between the electrostatic gun and the object to be tested during the electrostatic discharge test specifically includes:
searching a maximum value Vmax and a minimum value Vmin according to the measured value distribution, and detecting whether each pressure sensor works abnormally or not according to the maximum value Vmax and the minimum value Vmin; if abnormal, reselecting the maximum value Vmax and the minimum value Vmin;
connecting the positions of the maximum value Vmax and the minimum value Vmin on the pressure sensor ring, wherein the connecting direction represents the inclination direction of the electrostatic gun;
and calculating a difference value V between the maximum value Vmax and the minimum value Vmin, wherein V=Vmax-Vmin, and obtaining a contact angle corresponding to the difference value V according to a calibration curve between a previously calibrated difference value and the contact angle.
Preferably, the calculating the contact force between the electrostatic gun and the object to be tested during the electrostatic discharge test specifically includes:
reading the measured value distribution of each pressure sensor on the pressure sensor ring during each test;
performing differential operation on the measured values of the pressure sensors at corresponding positions on the adjacent twice-tested pressure sensor ring, and judging that the forces of the adjacent twice-tested pressure sensors are the same and meet the test conditions if the corresponding difference values of the pressure sensors at the positions are within the range of a difference value threshold value Vp; otherwise, the angle and the force are adjusted until the difference value corresponding to the pressure sensor at each position is within the range of the difference value threshold value Vp.
Preferably, the detecting of each pressure value according to the maximum value Vmax and the minimum value Vmin detects whether each pressure sensor is abnormal, and specifically includes:
connecting the positions of the maximum value Vmax and the minimum value Vmin on the pressure sensor ring, and judging that the pressure sensor is abnormal if the connecting line does not pass through the circle center of the pressure sensor ring;
extracting a pressure value Vl of the adjacent position on the left side of the maximum value Vmax and a pressure value Vr of the adjacent position on the right side, comparing a difference value Vl-Vr of the Vl and the Vr, if the difference value Vl-Vr is in a preset threshold Vlr range, judging that the Vl and the Vr are the same, enabling a sensor corresponding to the maximum value Vmax to work normally, enabling a sensor corresponding to the minimum value Vmin to work abnormally, and taking the pressure value farthest from the position of the maximum value Vmax as the minimum value Vmin; if the difference Vl-Vr is not within the preset threshold Vlr, it is determined that the Vl and Vr values are different, the sensor corresponding to the minimum value Vmin operates normally, the sensor corresponding to the maximum value Vmax operates abnormally, and the pressure value farthest from the position of the minimum value Vmin is taken as the maximum value Vmax.
Preferably, the method further comprises: maintaining the static gun in a standing state by detecting the position of the leveling bubble;
reading the measured value distribution of each pressure sensor on the pressure sensor ring;
and searching a maximum value Vmax and a minimum value Vmin according to the measured value distribution, and judging that obvious abrasion occurs to the gun tip if the difference V=Vmax-Vmin between the maximum value Vmax and the minimum value Vmin is larger than the pressure threshold Vt corresponding to abrasion.
The beneficial effects of the application are as follows:
1. the technical problem that the related technology for measuring and adjusting the contact angle and the force during the electrostatic discharge test of the electrostatic gun is not available in the prior art is solved, the consistency of the test conditions of each electrostatic discharge test is ensured, and the accuracy and the reliability of the test are ensured;
2. measuring the contact angle and the contact force between the electrostatic gun and the object to be measured by adopting the pressure distribution of the pressure sensor ring;
3. according to the pressure distribution when the static gun stands vertically, whether obvious side abrasion occurs to the gun tip or not can be detected according to the difference value between the maximum value and the minimum value, and the static gun is simple and effective;
4. using a maximum value V max And a minimum value V min Whether the pressure sensor is abnormal or not is judged in a mode that whether the connecting line passes through the center of a circle is carried out at the position on the pressure sensor ring, so that the accuracy of angle and force detection before testing is ensured;
5. under the condition that the connecting line between the maximum value and the minimum value passes through the center of a circle, judging whether the pressure values adjacent to the maximum value or the minimum value are the same or within an error range, and performing fault units on the pressure sensor with the maximum value or the minimum value, which is abnormal in work; under the condition that a connecting line between the maximum value and the minimum value passes through the circle center, detecting whether the pressure values of the symmetrical positions are the same or within an error range or not by taking the connecting line as a symmetry axis, and further detecting whether the pressure sensors corresponding to the symmetrical positions have faults or not, so that accurate fault positioning is realized;
6. when the number of pressure sensors 3 on the pressure sensor ring 4 is small, the maximum value V is adopted max Or the minimum value V min Pressure value V of left adjacent position l And the pressure value V of the adjacent position on the right side r The ratio between the two is used for correcting the measured contact angle, so that the accuracy of contact angle measurement is improved;
7. the simultaneous realization of the pressure distribution using only the pressure sensor ring: the four functions of contact angle measurement, contact force measurement, side abrasion detection, sensor fault positioning and the like are achieved, the measurement mode is simple and reliable, the cost is low, the cost of the electrostatic gun is not additionally increased, and the popularization is easy.
Drawings
FIG. 1 shows a schematic structure of an electrostatic gun of the present application;
FIG. 2 shows a schematic structural view of a pressure sensor ring of the electrostatic gun of the present application;
FIG. 3 shows a graph of the distribution of pressure values of the pressure sensor ring of the electrostatic gun of the present application;
in the attached figure 1, an electrostatic gun body; 2. gun tip; 3. a pressure sensor; 4. a pressure sensor ring; 5. leveling the air bubbles; 6. circle center, 7, connecting line.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present application. It will be apparent that the described embodiments are some, but not all, embodiments of the application. All other embodiments, which are obtained by a person skilled in the art based on the described embodiments of the application, fall within the scope of protection of the application.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Example 1
Since the chip is sensitive to static electricity, the static electricity protection of the chip production environment and the chip testing environment is the most severe, the protection measures are the most complete, the static charges accumulated in the chip production environment and the chip testing environment are less, the static voltage is very low during static electricity discharge, and the generated static electricity induction has little influence on the chip.
In the chip specific application, when static electricity is rapidly discharged to the pins of the chip, the chip is directly damaged. When static electricity is released, the internal circuit of the chip is damaged due to the rapid electrostatic field change caused by static electricity induction, so that static electricity discharge test of antistatic capability is required to be carried out on each pin of the chip before the specific application of the chip.
At present, when a small batch of static discharge tests are performed or when a laboratory performs the static discharge tests, a static gun is generally used for performing the static discharge tests, and the gun head of the static gun is aligned to a test point on a sample to be detected, so that the static gun discharges static electricity to the test point. When the electrostatic gun is specifically used for electrostatic discharge test, the electrostatic gun is inserted into an OutPut socket of the electrostatic detector, then a discharge mode of the electrostatic detector is selected, if a CONTACT discharge test is selected, a conical discharge electrode is selected, a switch is turned to be a CONTACT position on an electrostatic/discharge test mode selection switch of an instrument panel, and the electrostatic gun is enabled to be in CONTACT with a pin of a chip to be tested and keeps a discharge posture unchanged; if the AIR discharge test is selected, a spherical discharge electrode is selected, a toggle switch is used as an AIR position on an instrument panel 'static/discharge test mode selection switch', an electrostatic discharge gun camera is buckled by a hand, the electrostatic discharge gun is slowly close to a tested chip to be tested until discharge occurs, then the electrostatic discharge gun is removed, the gun camera is loosened, the electrostatic discharge gun camera is buckled again according to a time interval required by the test, and the discharge gun is led to be close to the tested chip to discharge.
Contact discharge is the preferred test method because it avoids the difference in test results due to the difference in the way the electrostatic discharge gun approaches the chip under test, and air discharge is used where contact discharge cannot be used.
In small batch test or in laboratory, electrostatic discharge test is performed on chips, and usually, a manual control electrostatic gun is used to perform contact discharge test on pins of the chips.
In order to ensure the accuracy and reliability of measurement, it is necessary to ensure that the contact angle between the electrostatic gun and the pin to be measured is kept constant while the contact force is kept constant during the electrostatic discharge test. This requires real-time measurement and adjustment of the contact angle and force of the electrostatic gun during measurement. Therefore, the embodiment provides a method for ensuring the testing accuracy of the electrostatic gun, specifically, when the electrostatic discharge test is performed on the chip, the contact angle and the force between the electrostatic gun and the chip need to be measured before each test, so as to ensure that the external conditions are the same when each test is performed, eliminate the testing error caused by different contact angles and different contact forces of the electrostatic gun when the electrostatic gun is used for the electrostatic discharge test, and further ensure the accuracy of the electrostatic discharge test.
As described above, in the actual electrostatic gun test, the electrostatic gun and the device to be tested have two contact modes, i.e., direct contact discharge and air gap discharge, respectively, the air gap discharge usually uses a smoother electrostatic gun tip, and the contact discharge usually uses a sharper electrostatic gun tip, which is to have better electrical contact with the conductive object or system surface. It can be seen that in conventional electrostatic guns, the electrostatic gun tip and the electrostatic gun body are detachably assembled.
Therefore, as shown in fig. 1-2, fig. 1 is a schematic structural view of an electrostatic gun according to the present application, fig. 2 is a schematic structural view of a pressure sensor ring of the electrostatic gun according to the present application, and this embodiment provides an electrostatic gun according to the present application, which includes an electrostatic gun body 1 and a gun tip 2, wherein a plurality of pressure sensors 3 are installed at a mounting joint portion of the gun tip 2 and the electrostatic gun body 1, and the plurality of pressure sensors 3 are uniformly arranged along a circumferential direction of a mounting surface, and the number of the plurality of pressure sensors 3 is an even number, and the number is six or more, and the greater the number, the higher the accuracy of measurement, when in specific arrangement, the need of measurement accuracy should be set; the even number of pressure sensors 3 form a circular pressure sensor ring 4 on the mounting surface, and the pressure sensor ring 4 is specifically arranged on the side of the electrostatic gun body 1 at the mounting joint of the electrostatic gun tip 2 and the electrostatic gun body 1, and the center 6 of the pressure sensor ring 4 is concentric with the gun tip 2.
After the installation and setting of the pressure sensor ring 4 are completed on one side of the electrostatic gun body 1, the contact angle and the contact force between the electrostatic gun and the object to be measured are calculated by reading the distribution of the pressure values measured by each pressure sensor 3 on the pressure sensor ring 4.
In calculating the contact angle between the electrostatic gun and the object to be measured, as shown in fig. 3, fig. 3 shows a distribution diagram of the pressure value of the pressure sensor ring of the electrostatic gun according to the present application, and the specific angle calculation method is as follows:
assuming that the pressure sensor ring 4 is provided with 2n pressure sensors 3, wherein n is more than or equal to 3 and n is a positive integer, firstly reading the pressure values V corresponding to the pressure sensors 3 on the pressure sensor ring 4 according to the circumferential sequence 0 ……V 2n-1 The method comprises the steps of carrying out a first treatment on the surface of the By means of the pressure values V corresponding to the individual pressure sensors 3 0 ……V 2n-1 Detecting whether the measured data of each pressure sensor 3 of the pressure sensor ring 4 is abnormal or not, and whether the pressure sensor 3 has faults or not;
find the pressure value V 0 ……V 2n-1 Maximum value of medium pressure V max And a minimum value V min If the respective pressures of the pressure sensor ring 4 are detectedWhether the force sensor 3 is abnormal, for the corresponding maximum value V max Or minimum value V min Reselection and correction are performed and the specific faulty pressure sensor 3 is located.
Determining the abnormality of the object data by first setting the maximum value V on the pressure sensor ring 4 max And a minimum value V min When the connection is made, the direction of the connection 7 indicates the direction in which the electrostatic gun is tilted.
Using a maximum value V max And a minimum value V min Difference v=v between max -V min A specific angle size is calculated.
When the angle value is calculated specifically, the pressure sensor ring 4 of the electrostatic gun needs to be calibrated in advance, and according to different maximum values V max And a minimum value V min And fitting the angle value corresponding to the difference value V to obtain a calibration curve corresponding to the difference value V and the angle value, and directly obtaining the corresponding angle value according to the specific difference value V and the calibration curve in subsequent work.
Specifically, the pressure value V corresponding to each pressure sensor 3 0 ……V 2n-1 Detecting whether the measured data of each pressure sensor 3 of the pressure sensor ring 4 is abnormal, and if the pressure sensor 3 is faulty, the corresponding maximum value V is needed to be detected max And a minimum value V min Reselection is performed.
The particular reason is that in normal circumstances the pressure distribution over the pressure sensor ring 4 should be about a maximum value V max And a minimum value V min The connecting lines 7 are symmetrical;
if the maximum value V max And a minimum value V min If the connecting line 7 does not pass through the center 6, it is determined that one or more of the pressure sensors 3 have errors in measurement values, and the maximum value is required max And a minimum value V min And (5) reselecting and correcting the fault and positioning the fault.
Specific pair of maximum values V max Or minimum value V min The process of locating the fault of the pressure sensor 3 is that:
extracting the maximum value V max Pressure value V of left adjacent position l And the pressure value V of the adjacent position on the right side r Detecting a pressure value V l And the pressure value V of the adjacent position on the right side r Difference V between l -V r Whether or not to be at a preset threshold V lr Within the range of the threshold value V lr Within the range, then determine the minimum value V min The corresponding pressure value is wrong, and then the minimum value V is judged min The corresponding pressure sensor 3 fails; then the distance is maximized max The furthest pressure sensor 3 is taken as the minimum value V min That is, will be equal to the maximum value V max The corresponding pressure sensor 3 has the pressure sensor 3 of the same diameter as the minimum value V min ；
Similarly, the minimum value V of the detected pressure min Whether the difference value of the two pressure values at the two sides of the corresponding pressure sensor is in a specific range or not, if so, determining the maximum value V max Error of corresponding pressure value, maximum value V max If the corresponding pressure sensor 3 fails, the distance is minimized to a value V min The furthest pressure sensor 3 is taken as the maximum value V max That is, will be equal to the minimum value V min The corresponding pressure sensor 3 has the pressure sensor 3 of the same diameter as the maximum value V max ；
If the maximum value V max And a minimum value V min And the connecting line 7 passes through the circle center 6, so that the connecting line 7 is used as a symmetry axis, whether the pressure values of the symmetrical positions are the same or not is detected, whether the pressure values are in an error range or not is detected, and whether the corresponding pressure sensor 3 fails or not is detected.
When the contact force between the electrostatic gun and the object to be measured is calculated, the specific force calculation method is as follows:
when performing the electrostatic discharge test, the pressure values of the pressure sensors 3 of the pressure sensor ring 4 are recorded at each test. Comparing the pressure values of the corresponding pressure sensors 3 of the pressure sensor ring 4 during two adjacent tests, if the pressure difference of each corresponding pressure sensor 3 is at the threshold value V p And if the measured forces of the two adjacent times are the same, the measured forces are judged to be in accordance with the test conditions.
Specifically, for example, assuming that 8 pressure sensors 3 are provided, respectively denoted as Ps1 … … Ps8, ps1 … … Ps8 are uniformly distributed on the mounting surface ring of the electrostatic gun body 1 at a pitch of 45 °, at each test, the pressure value Pv1i … … Pv8i of each pressure sensor Ps1 … … Ps8 on the mounting surface ring is read, where i represents the number of tests. If |Pv1 i+1 -Pv1 i |……|Pv8 i+1 -Pv8 i I are all at a preset threshold V p And if the measured forces of two adjacent times are the same within the range, the contact force testing conditions are met, and the normal test can be performed. Otherwise, the angle and the force are adjusted until the difference value corresponding to the pressure sensor 3 at each position is at a difference value threshold V p Within the range.
Example 2
The present embodiment is further improved based on embodiment 1, and the common parts of the technical scheme are not described herein.
After long-term use of the electrostatic gun for electrostatic discharge testing, the gun tip 2 is extremely easy to wear, and particularly for the relatively sharp electrostatic gun tip 2 commonly used in direct contact discharge testing, after long-term use, the side surface of the gun tip 2 is easy to wear, and when the wear reaches a certain degree, the accuracy and the reliability of testing are affected, and the gun tip 2 needs to be replaced in time.
In order to solve this technical problem, the present embodiment proposes a method for detecting the side wear of the gun tip 2 using the pressure sensor ring 4 in embodiment 1.
The specific principle is that when the electrostatic gun is adopted for electrostatic discharge test for a long time, the wear of the gun tip 2 is mainly concentrated on a certain side surface because the same angle is adopted for test, and at the moment, the topmost end of the gun tip 2 is not on the axis of the gun tip 2 because of the side surface wear, so that when the electrostatic gun stands vertically, the gravity center is deviated, and further the pressure distribution is deviated.
It is based on the above principle that the pressure sensor ring 4 detects whether a side wear of the gun tip 2 has occurred.
Specifically, at the top of the electrostatic gun, a leveling bubble 5 is provided to keep the electrostatic gun in a standing state by detecting the position of the leveling bubble 5.
In the case where the gun tip 2 is not worn sideways, or worn sideways within an acceptable range, the pressure readings of the pressure sensors 3 of the pressure sensor ring 4 should be the same, or the difference should be within a preset range, due to uniform stress, with the static gun held upright.
However, when significant wear of the sides of the gun tip 2 occurs, the pressure readings of the pressure sensors 3 of the pressure sensor ring 4 deviate due to the non-uniform force, and a maximum value V is read max And a minimum value V min When maximum value V max And a minimum value V min Difference v=v between max -V min Greater than the pressure threshold V corresponding to wear t When the gun is in use, the side face of the gun tip 2 is judged to be obviously worn, so that the accuracy and the reliability of measurement are affected, and the gun tip needs to be replaced in time.
Example 3
The present embodiment is further improved based on embodiment 1 or 2, and the common parts of the technical scheme are not described herein.
When the number of the pressure sensors 3 on the pressure sensor ring 4 is small, the measurement of the contact angle is not accurate enough; specifically, the direction of inclination of the electrostatic gun is not necessarily equal to the maximum value V max And a minimum value V min The direction of the connecting line 7 is exactly consistent, and the measurement result has errors, so that the result needs to be corrected to improve the accuracy of the contact angle measurement.
Specifically, the maximum value V is extracted max Or the minimum value V min Pressure value V of left adjacent position l And the pressure value V of the adjacent position on the right side r . When maximum value V max And a minimum value V min When the direction of the connecting line 7 is consistent with the inclination direction of the electrostatic gun, theoretically V l And V is equal to r When the direction of the wire 7 is not identical to the direction of the inclination of the electrostatic gun, the larger the deviation between the direction of the wire 7 and the direction of the inclination of the electrostatic gun is, the more V l And V is equal to r The larger the value deviation of (2), the more can be according to V l And V is equal to r Values of (2)The degree of deviation corrects the deviation of the angle.
More specifically, V is adopted l And V is equal to r The ratio of (2) is corrected for angle. For V before measurement l And V is equal to r Different ratios and corresponding different angular deviations are calibrated to obtain V l And V is equal to r Calibration cancellation of the deviation of the ratio of (2) to the measured contact angle, in subsequent measurements, V is calculated l And V is equal to r After the ratio of (C) is according to V l And V is equal to r And the measured contact angle is corrected, so that the accuracy of contact angle measurement is improved.
In the several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. For example, the apparatus embodiments described above are merely illustrative, e.g., the division of the units is merely a logical function division, and there may be additional divisions when actually implemented, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment. In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.
Claims (5)
1. The method for measuring the contact angle and the contact force of the electrostatic gun by adopting the electrostatic gun comprises an electrostatic gun body (1) and a gun tip (2), and is characterized in that a plurality of pressure sensors (3) are arranged at the installation joint part of the gun tip (2) and the electrostatic gun body (1), the pressure sensors (3) are uniformly distributed along the circumferential direction of an installation surface to form a pressure sensor ring (4), the number of the pressure sensors (3) is an even number which is greater than or equal to six, the pressure sensor ring (4) is arranged at one side of the electrostatic gun body (1), the center (6) of the pressure sensor ring (4) is concentric with the gun tip (2), and a level bubble (5) is arranged at the top of the electrostatic gun body (1);
the method comprises the following steps:
reading the measured value distribution of each pressure sensor (3) on the pressure sensor ring (4);
according to the measured value distribution, calculating the contact angle between the electrostatic gun and the object to be tested in the electrostatic discharge test;
and according to the measured value distribution, calculating the contact force between the electrostatic gun and the object to be measured during electrostatic discharge test.
2. The method for measuring contact angle and contact force of electrostatic gun according to claim 1, wherein the calculating the contact angle between the electrostatic gun and the object to be measured during the electrostatic discharge test specifically comprises:
searching for a maximum value V according to the measured value distribution max And a minimum value V min According to maximum value V max And a minimum value V min Detecting whether each pressure sensor (3) works abnormally; if abnormal, for the maximum value V max And a minimum value V min Performing reselection;
by setting the maximum value V max And a minimum value V min Connecting lines are arranged at positions on the pressure sensor ring (4), and the direction of the connecting lines (7) represents the inclination direction of the electrostatic gun;
calculating the maximum value V max And a minimum value V min Difference V between V, v=v max -V min According to the difference between the maximum value and the minimum value obtained by calibration in advance and the contact angleAnd calibrating the curve to obtain the contact angle corresponding to the difference V.
3. The method for measuring contact angle and contact force of an electrostatic gun according to claim 2, wherein the calculating the contact force between the electrostatic gun and the object under test during the electrostatic discharge test specifically comprises:
reading the measured value distribution of each pressure sensor (3) on the pressure sensor ring (4) at each test;
differential operation is carried out on the measured values of each pressure sensor (3) at the corresponding positions on the adjacent twice-measured pressure sensor ring (4), if the difference value corresponding to each pressure sensor (3) at each position is at a difference value threshold V p Within the range, judging that the forces of two adjacent tests are the same, and conforming to the test conditions; otherwise, the angle and the force are adjusted until the difference value corresponding to the pressure sensor (3) at each position is at a difference value threshold V p Within the range.
4. A method for measuring contact angle and contact force of an electrostatic gun according to claim 3, wherein said measuring is based on a maximum value V max And a minimum value V min Detecting whether each pressure sensor (3) works abnormally or not, specifically comprising:
by setting the maximum value V max And a minimum value V min Connecting lines are arranged at the positions on the pressure sensor ring (4), and if the connecting lines (7) do not pass through the circle center (6) of the pressure sensor ring (4), the pressure sensor (3) is judged to be abnormal;
extracting the maximum value V max Pressure value V of left adjacent position l And the pressure value V of the adjacent position on the right side r Comparison of V l And V r Is the difference V of (2) l -V r If the difference value V l -V r At a preset threshold V lr Within the range, then judge V l And V r The same value, maximum value V max The corresponding pressure sensor (3) works normally with a minimum value V min The corresponding pressure sensor (3) works abnormally, and the distance maximum value V max The furthest pressure value is taken as the minimum value V min The method comprises the steps of carrying out a first treatment on the surface of the If the difference is V l -V r Not at preset threshold V lr Within the range, then judge V l And V r Different values, minimum value V min The corresponding pressure sensor (3) works normally, the maximum value V max The corresponding pressure sensor (3) works abnormally, and the distance minimum value V min The furthest pressure value is taken as the maximum value V max 。
5. The method for measuring contact angle and contact force of an electrostatic gun according to any one of claims 1-4, further comprising:
maintaining the static gun in a standing state by detecting the position of the leveling air bubble (5);
reading the measured value distribution of each pressure sensor (3) on the pressure sensor ring (4);
searching for a maximum value V according to the measured value distribution max And a minimum value V min If the maximum value V max And a minimum value V min Difference v=v between max -V min Greater than the corresponding pressure threshold V in the event of significant wear t It is determined that significant side wear of the gun tip (2) has occurred.
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