CN115267266A - Electrostatic gun and method for measuring contact angle and force of electrostatic gun - Google Patents

Electrostatic gun and method for measuring contact angle and force of electrostatic gun Download PDF

Info

Publication number
CN115267266A
CN115267266A CN202210812735.9A CN202210812735A CN115267266A CN 115267266 A CN115267266 A CN 115267266A CN 202210812735 A CN202210812735 A CN 202210812735A CN 115267266 A CN115267266 A CN 115267266A
Authority
CN
China
Prior art keywords
pressure sensor
value
electrostatic
max
electrostatic gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202210812735.9A
Other languages
Chinese (zh)
Other versions
CN115267266B (en
Inventor
张帅楠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jingyue Electronics Co ltd
Original Assignee
Shanghai Jingyue Electronics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jingyue Electronics Co ltd filed Critical Shanghai Jingyue Electronics Co ltd
Priority to CN202210812735.9A priority Critical patent/CN115267266B/en
Publication of CN115267266A publication Critical patent/CN115267266A/en
Application granted granted Critical
Publication of CN115267266B publication Critical patent/CN115267266B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00—Measuring angles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/009—Force sensors associated with material gripping devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12—Measuring electrostatic fields or voltage-potential
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]

Abstract

The invention provides an electrostatic gun and a method for measuring contact angle and force of the electrostatic gun, wherein a plurality of pressure sensors (3) are arranged at an installation joint part of a gun tip (2) and an electrostatic gun body (1), the pressure sensors (3) are uniformly distributed along the circumferential direction of an installation surface to form a pressure sensor ring (4), the number of the pressure sensors (3) is an even number which is more than or equal to six, the pressure sensor ring (4) is arranged on one side of the electrostatic gun body (1), the circle center (6) of the pressure sensor ring (4) is concentric with the gun tip (2), the contact angle and force of the electrostatic gun are calculated quickly and accurately, the consistency of each test angle is ensured, and the accuracy and the reliability of measurement are improved.

Description

Electrostatic gun and method for measuring contact angle and force of electrostatic gun
Technical Field
The invention relates to the field of electrostatic discharge testing, in particular to an electrostatic gun and a method for measuring a contact angle and a contact force of the electrostatic gun.
Background
In a CMOS integrated circuit, with the continuous progress of chip manufacturing technology, the size of a device is smaller and smaller, and the operation speed and performance of an Integrated Circuit (IC) are greatly improved, so that the sensitivity of electronic devices and systems to electromagnetic compatibility is improved, but the overvoltage resistance is reduced. The electromagnetic compatibility research and test of the chip become hot spots of domestic and foreign research. ESD (Electrostatic Discharge) is an important cause of malfunction or functional failure of various electronic instruments and devices, and is an important component of electromagnetic compatibility experiments. However, semiconductors and integrated circuits are increasingly used in communications and electronic devices, and switching threshold voltages of electronic components are continuously lowered for the purpose of reducing power consumption, which leads to an increasing problem of electrostatic discharge of electronic devices. The electrostatic discharge problem is not only related to the normal use and maintenance of communication and electronic equipment, but also affects the personal and property safety. Therefore, more and more electronic product manufacturers and scientific research institutes are concerned about the research on electrostatic discharge, electrostatic protection and the like of communication and electronic products.
The ESD evaluation test models for a chip are classified into a human body discharge model (HBM), a Machine Model (MM), a Charged Device Model (CDM), and an inductive discharge model (FICDM), and all of the four test models perform contact ESD discharge for a chip pin. In each stage of production, packaging, transportation and actual use, the chip can be damaged by electrostatic induction, so that the function of the chip is abnormal or the performance of the chip is poor. Therefore, part of chip manufacturers can perform electrostatic induction damage test assessment on the final-form chip products, generally use an electrostatic gun to perform discharge test on each area on the surface of the final-form chip products one by one during testing, and assess the damage degree of the electrostatic induction discharge test according to the function and performance difference before and after the test.
In the small-batch electrostatic discharge test, an electrostatic gun is generally used for performing the electrostatic discharge test, and a gun head of the electrostatic gun is aligned to a test point on a sample to be detected, so that the electrostatic gun releases static electricity to the test point. Then, an operator can judge whether the electrostatic protection capability of the sample to be detected reaches the standard or not by observing whether the test point on the sample to be detected is abnormal or not, and the damage degree of the electrostatic induction discharge test is evaluated according to the function and performance difference before and after the test.
In the actual electrostatic gun test, the electrostatic gun and the device to be tested have two contact modes, namely direct contact discharge and air gap discharge, the air gap discharge usually uses a smooth electrostatic gun tip, after the stress voltage is set, when the distance between the electrostatic gun and the device to be tested is very close, air is punctured to generate discharge, the electrostatic gun tip slowly moves to a discharge position until electric sparks or flash occurs, finally, the electrostatic gun tip is required to touch the discharge position on the surface of a test object or a system to completely release charges, and the test operation generally needs to be repeated for about 10 times respectively at the positive electrode and the negative electrode; direct contact discharge tests are similar to air gap discharge tests in that a relatively sharp electrostatic tip is typically used for contact discharge in order to provide good electrical contact with a conductive object or system surface.
When the electrostatic test pulse is applied, the contact angle between the electrostatic gun and the position to be tested of the object to be tested is ensured to be constant during each test, so that the electrostatic test pulse received by each position to be tested under the condition of injecting the electrostatic test pulse of the same grade is ensured to be the same.
However, during a small batch test or a laboratory test, the electrostatic discharge test of the direct contact discharge mode is usually performed on the pin of the chip by manually operating the electrostatic gun, and during the manual operation test, the angle measured each time is different, the pressure of the electrostatic gun on the pin is also different, and during each test, the external conditions of the test are different, which results in that the accuracy of the electrostatic discharge test on the pin of the chip is not high. However, in the prior art, there is no description about the related art for measuring and adjusting the contact angle and force in the electrostatic discharge test of the electrostatic gun.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides an electrostatic gun. Including static rifle body and rifle point, the rifle point with the installation joint portion of static rifle body is provided with a plurality of pressure sensor, a plurality of pressure sensor evenly arrange along installation face circumferencial direction and form a pressure sensor ring, a plurality of pressure sensor's number is six or more's even number, the pressure sensor ring sets up one side of static rifle body, the centre of a circle of pressure sensor ring with the rifle point is concentric.
Preferably, a leveling bubble is arranged at the top of the static gun body;
the invention also provides a method for measuring the electrostatic discharge contact angle and the contact force by adopting the electrostatic gun, which comprises the following steps:
reading the distribution of the measured values of each pressure sensor on the pressure sensor ring;
calculating a contact angle between the electrostatic gun and an object to be tested during an electrostatic discharge test according to the distribution of the measurement values;
and calculating the contact force between the electrostatic gun and the object to be tested during the electrostatic discharge test according to the distribution of the measurement values.
Preferably, the calculating a contact angle between the electrostatic gun and the object to be tested during the electrostatic discharge test specifically includes:
searching a maximum value Vmax and a minimum value Vmin according to the distribution of the measurement values, and detecting whether each pressure sensor works abnormally according to the maximum value Vmax and the minimum value Vmin; if the maximum value Vmax and the minimum value Vmin are abnormal, reselecting the maximum value Vmax and the minimum value Vmin;
connecting the positions of the maximum value Vmax and the minimum value Vmin on the pressure sensor ring, wherein the direction of the connection represents the inclination direction of the electrostatic gun;
and calculating a difference V between the maximum value Vmax and the minimum value Vmin, wherein V = Vmax-Vmin, and obtaining a contact angle corresponding to the difference V according to a calibration curve between the difference calibrated in advance and the contact angle.
Preferably, the calculating of the contact force between the electrostatic gun and the object to be tested during the electrostatic discharge test specifically includes:
reading the distribution of the measured values of the pressure sensors on the pressure sensor ring at each test;
carrying out differential operation on the measured values of the pressure sensors at the corresponding positions on the adjacent two-time test pressure sensor ring, and if the corresponding difference values of the pressure sensors at the positions are within the range of the difference threshold value Vp, judging that the strength of the adjacent two-time test is the same and meeting the test condition; otherwise, adjusting the angle and the force until the difference value corresponding to each position pressure sensor is within the range of the difference value threshold value Vp.
Preferably, the detecting of each pressure value according to the maximum value Vmax and the minimum value Vmin to detect whether each pressure sensor works abnormally specifically includes:
connecting the positions of the maximum value Vmax and the minimum value Vmin on a pressure sensor ring, and judging that the pressure sensor is abnormal if the connecting line does not pass through the circle center of the pressure sensor ring;
extracting a pressure value Vl at the left adjacent position of the maximum value Vmax and a pressure value Vr at the right adjacent position, comparing a difference value Vl-Vr of the Vl and the Vr, if the difference value Vl-Vr is within a preset threshold value Vlr range, judging that the Vl and the Vr have the same value, the sensor corresponding to the maximum value Vmax works normally, the sensor corresponding to the minimum value Vmin works abnormally, and taking the pressure value farthest from the maximum value Vmax as the minimum value Vmin; if the difference value Vl-Vr is not within the range of the preset threshold Vlr, it is determined that the values of Vl and Vr are different, the sensor corresponding to the minimum value Vmin works normally, the sensor corresponding to the maximum value Vmax works abnormally, and the pressure value farthest from the position of the minimum value Vmin is taken as the maximum value Vmax.
Preferably, the method further comprises the following steps: keeping the static gun in a vertical standing state by detecting the position of the level bubble;
reading the distribution of the measured values of each pressure sensor on the pressure sensor ring;
and searching a maximum value Vmax and a minimum value Vmin according to the distribution of the measurement values, and if the difference value V = Vmax-Vmin between the maximum value Vmax and the minimum value Vmin is larger than the pressure threshold value Vt corresponding to the abrasion, judging that the gun tip has obvious abrasion.
The invention has the beneficial effects that:
1. the technical problems of the prior art that the related technology for measuring and adjusting the contact angle and force during the electrostatic discharge test of the electrostatic gun is unavailable are solved, the consistent test conditions of the electrostatic discharge test each time are ensured, and the accuracy and the reliability of the test are ensured;
2. measuring the contact angle and the contact force between the electrostatic gun and the object to be measured by adopting the pressure distribution of the pressure sensor ring;
3. the method can also detect whether the gun tip has obvious side abrasion or not according to the pressure distribution and the difference value between the maximum value and the minimum value when the electrostatic gun is vertically standing, and is simple and effective;
4. using a maximum value VmaxAnd a minimum value VminWhether the pressure sensor is abnormal or not is judged in a circle center mode by connecting lines at the positions on the pressure sensor ring, so that the accuracy of angle and force detection before testing is ensured;
5. under the condition that a connecting line between the maximum value and the minimum value passes through the center of a circle, judging whether the pressure values adjacent to the maximum value or the minimum value left and right are the same or within an error range, and carrying out fault units on the maximum value or the minimum value pressure sensor with abnormal work; under the condition that a connecting line between the maximum value and the minimum value passes through the circle center, the connecting line is taken as a symmetry axis, whether the pressure values of the symmetrical positions are the same or in an error range is detected, and further whether the pressure sensors corresponding to the symmetrical positions have faults or not is detected, so that accurate fault positioning is realized;
6. when the number of pressure sensors 3 on the pressure sensor ring 4 is small, the maximum value V is usedmaxOr the minimum value VminPressure value V of left adjacent positionlPressure value V of the adjacent position on the right siderThe measured contact angle is corrected by the ratio, so that the accuracy of measuring the contact angle is improved;
7. the pressure distribution using only the pressure sensor ring simultaneously achieves: the contact angle measuring device has the quadruple functions of contact angle measurement, contact force measurement, side surface abrasion detection, sensor fault location and the like, is simple and reliable in measuring mode, low in cost, free of additional increase of the cost of the electrostatic gun and easy to popularize.
Drawings
FIG. 1 is a schematic view of the construction of an electrostatic gun according to the present invention;
FIG. 2 is a schematic diagram of the pressure sensor ring of the electrostatic gun of the present invention;
FIG. 3 is a graph showing the distribution of pressure values across a pressure sensor ring of the electrostatic gun of the present invention;
in fig. 1, an electrostatic gun body; 2. a gun tip; 3. a pressure sensor; 4. a pressure sensor ring; 5. leveling air bubbles; 6. circle center, 7, connecting line.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Example 1
Because the chip is sensitive to static electricity, the static protection of the chip production environment and the chip test environment is the most severe, the protection measures are the most complete, the static charges accumulated in the chip production environment and the chip test environment are less, the static voltage is very low when the static electricity is released, and the influence of the generated static induction on the chip is very little.
In the specific application of the chip, when static electricity is rapidly released to the pins of the chip, the chip can be directly damaged. During electrostatic discharge, rapid electrostatic field change caused by electrostatic induction also damages internal circuits of the chip, so that before the specific application of the chip, the electrostatic discharge test of the antistatic capability of each pin of the chip is required.
At present, when a small batch of electrostatic discharge tests are carried out or electrostatic discharge tests are carried out in a laboratory, an electrostatic discharge test is generally carried out by using an electrostatic gun, and a gun head of the electrostatic gun is aligned to a test point on a sample to be detected, so that the electrostatic gun releases static electricity to the test point. When an electrostatic discharge gun is used for carrying out an electrostatic discharge test, the electrostatic discharge gun is inserted into an OutPut (OutPut) socket of an electrostatic detector, then a discharge mode of the electrostatic detector is selected, if a CONTACT discharge test is selected, a tapered discharge electrode is selected, and a switch is toggled to be at a CONTACT position on an instrument panel static/discharge test mode selection switch, so that the electrostatic discharge gun is actually contacted with a pin of a chip to be tested, and a discharge posture is kept still; if the AIR discharge test is selected, a spherical discharge electrode is selected, the switch is shifted to an AIR position on an instrument panel 'electrostatic/discharge test mode selection switch', the electrostatic discharge gun is buckled by a hand, the electrostatic discharge gun is slowly close to a tested chip to be tested until discharge occurs, then the electrostatic discharge gun is removed, the gun is loosened, the electrostatic discharge gun is buckled again according to a time interval required by the test, and the discharge gun is close to the tested chip to the test mobile phone to discharge.
Contact discharge is a preferred test method because differences in test results due to differences in the way the electrostatic discharge gun approaches the chip under test can be avoided, and air discharge is used where contact discharge cannot be used.
In small-batch testing or testing electrostatic discharge of chips in a laboratory, a manually operated electrostatic gun is often used to perform contact discharge testing on pins of the chips.
In order to ensure the accuracy and reliability of measurement, the contact angle between the electrostatic gun and the pin to be tested needs to be kept constant when the electrostatic discharge test is carried out, and meanwhile, the contact force is kept constant. This requires real-time measurement and adjustment of the contact angle and force of the electrostatic gun during measurement. Therefore, this embodiment provides a method for guaranteeing electrostatic gun test accuracy, and is specific, when carrying out the electrostatic discharge test to the chip, before the test at every turn, need earlier to measure the contact angle and the dynamics of electrostatic gun and chip to the external condition when guaranteeing the test at every turn is the same, eliminates the test error that causes because of the contact angle and the contact dynamics of electrostatic gun are different when the electrostatic gun discharges the test, and then guarantees the accuracy of electrostatic discharge test.
As mentioned above, in the actual electrostatic gun test, there are two contact modes of the electrostatic gun and the device under test, namely direct contact discharge and air gap discharge, the air gap discharge usually uses a more smooth electrostatic gun tip, and the contact discharge usually uses a more sharp electrostatic gun tip, which is to have a better electrical contact with the conductive object or the system surface. Therefore, in the conventional electrostatic gun, the electrostatic gun tip and the electrostatic gun body are detachably assembled.
Therefore, as shown in fig. 1-2 specifically, fig. 1 is a schematic structural diagram of an electrostatic gun of the present invention, fig. 2 is a schematic structural diagram of a pressure sensor ring of the electrostatic gun of the present invention, and this embodiment provides an electrostatic gun as shown in fig. 1, where the electrostatic gun includes an electrostatic gun body 1 and a gun tip 2, a plurality of pressure sensors 3 are mounted at a mounting joint portion of the gun tip 2 and the electrostatic gun body 1, and the plurality of pressure sensors 3 are uniformly arranged along a circumferential direction of a mounting surface, and the number of the plurality of pressure sensors 3 is an even number, and is greater than or equal to six, and the greater the number is, the higher the measurement accuracy is, and in the specific arrangement, the measurement accuracy needs to be set; the even number of pressure sensors 3 form a circular pressure sensor ring 4 on the mounting surface, and the pressure sensor ring 4 is specifically arranged on the electrostatic gun body 1 side of the mounting joint portion of the electrostatic gun tip 2 and the electrostatic gun body 1, and the center 6 of the pressure sensor ring 4 is concentric with the gun tip 2.
After the installation setting of pressure sensor ring 4 is accomplished to static rifle body 1 one side, through reading the distribution of the pressure value that each pressure sensor 3 measured on the pressure sensor ring 4, calculate the contact angle and the contact force between static rifle and the determinand.
When calculating the contact angle between the electrostatic gun and the object to be measured, as specifically shown in fig. 3, fig. 3 shows a distribution diagram of pressure values of a pressure sensor ring of the electrostatic gun according to the present invention, and the specific angle calculation method is as follows:
assuming that the pressure sensor ring 4 is provided with 2n pressure sensors 3, wherein n is more than or equal to 3 and n is a positive integer, reading the pressure values V corresponding to the pressure sensors 3 on the pressure sensor ring 4 according to a circumferential sequence0……V2n-1(ii) a By means of corresponding pressure values V of the respective pressure sensors 30……V2n-1Detecting whether the measured data of each pressure sensor 3 of the pressure sensor ring 4 is abnormal or not and whether the pressure sensor 3 has a fault or not;
searching for a pressure value V0……V2n-1Maximum value of medium pressure VmaxAnd a minimum value VminIf it is detected whether or not the data of each pressure sensor 3 of the pressure sensor ring 4 is abnormal, the maximum value V is set to the corresponding valuemaxOr minimum value VminReselect and correct and locate the particular faulty pressure sensor 3.
Then determining the abnormal condition of the object data, firstly, the maximum value V is set on the pressure sensor ring 4maxAnd a minimum value VminThe direction of the line 7 indicates the direction in which the electrostatic gun is tilted.
Using the maximum value VmaxAnd a minimum value VminDifference between V = Vmax-VminAnd calculating the specific angle size.
When the angle value is specifically calculated, the pressure sensor ring 4 of the electrostatic gun needs to be calibrated in advance, and the maximum value V is differentmaxAnd a minimum value VminAnd fitting the angle values corresponding to the difference values V to obtain a calibration curve corresponding to the difference values V and the angle values, and directly obtaining the corresponding angle values according to the specific difference values V and the calibration curve in subsequent work.
Specifically, the pressure value V corresponding to each pressure sensor 30……V2n-1Detecting whether the measured data of each pressure sensor 3 of the pressure sensor ring 4 is abnormal or not, and pressure sensingIf the device 3 is in fault, if the device is in abnormal or fault, the corresponding maximum value V needs to be adjustedmaxAnd minimum value VminA reselection is made.
The reason for this is in particular that, under normal circumstances, the pressure distribution on the pressure sensor ring 4 should be with respect to the maximum value VmaxAnd a minimum value VminThe connecting lines 7 are symmetrical;
if the maximum value VmaxAnd a minimum value VminIf the connecting line 7 does not pass through the circle center 6, the measured value of one or some pressure sensors 3 is judged to be wrong, and the maximum value needs to be measuredmaxAnd a minimum value VminReselecting and correcting, and positioning the fault.
Specific maximum value VmaxOr minimum value VminAnd reselecting, wherein the process of positioning the fault of the pressure sensor 3 comprises the following steps:
first extracting the maximum value VmaxPressure value V of left adjacent positionlPressure value V of the adjacent position on the right siderDetecting the pressure value VlPressure value V of the adjacent position on the right siderDifference value V betweenl-VrWhether or not at the preset threshold value VlrWithin the range of the threshold value VlrWithin the range, the minimum value V is determinedminThe corresponding pressure value is wrong, and then the minimum value V is judgedminThe corresponding pressure sensor 3 is malfunctioning; then the distance is maximized by VmaxThe farthest pressure sensor 3 as the minimum value VminI.e. will be associated with the maximum value VmaxThe pressure sensors 3 having the same diameter as the corresponding pressure sensors 3 as the minimum value Vmin；
Similarly, the minimum value V of the pressure is detectedminWhether the difference value of the two pressure values at the two sides of the corresponding pressure sensor is within a specific range or not, and if yes, the maximum value V is judgedmaxCorresponding pressure value error, maximum value VmaxIf the corresponding pressure sensor 3 fails, the distance is minimized by a minimum value VminThe farthest pressure sensor 3 as the maximum value VmaxI.e. the minimum value VminThe pressure sensors 3 having the same diameter as the corresponding pressure sensors 3 as the maximum valueVmax；
If the maximum value VmaxAnd a minimum value VminThe connecting line 7 between the two pressure sensors passes through the circle center 6, and the connecting line 7 is taken as a symmetry axis to detect whether the pressure values at the symmetrical positions are the same and are within an error range, so as to detect whether the corresponding pressure sensor 3 has a fault.
When the contact force between the electrostatic gun and the object to be measured is calculated, the specific force calculation method is as follows:
when the electrostatic discharge test is carried out, the pressure value of each pressure sensor 3 of the pressure sensor ring 4 is recorded at each test. Comparing the pressure values of the pressure sensors 3 corresponding to the pressure sensor rings 4 in the two adjacent tests, and if the pressure difference value of each corresponding pressure sensor 3 is within a threshold value VpAnd judging that the strength of two adjacent measurements is the same, and meeting the test condition.
Specifically, for example, assuming that 8 pressure sensors 3, respectively denoted as Ps1 … … Ps8 and Ps1 … … Ps8 are uniformly distributed on the mounting surface ring of the electrostatic gun body 1 at a pitch of 45 °, at each test time, the pressure value Pv1i … … Pv8i of each pressure sensor Ps1 … … Ps8 on the mounting surface ring is read, where i denotes the number of tests. If | Pv1i+1-Pv1i|……|Pv8i+1-Pv8iAll at a preset threshold value VpWithin the range, the strength of two adjacent measurements is judged to be the same, the test condition of the contact strength is met, and normal test can be carried out. Otherwise, the angle and the force are adjusted until the difference value corresponding to the pressure sensor 3 at each position is within the difference threshold value VpWithin the range.
Example 2
The embodiment is further improved on the basis of embodiment 1, and common parts of the technical solutions are not described herein again.
After using the electrostatic gun for a long time to carry out the electrostatic discharge test, the rifle point 2 is very easily worn and torn, especially to the comparatively sharp-pointed electrostatic rifle point 2 that uses usually in the direct contact discharge test, after using for a long time, the wearing and tearing easily appear in 2 sides of the rifle point, after wearing and tearing reach certain degree, influence the accuracy and the reliability of test, need in time change.
In order to solve this problem, the present embodiment proposes a method for detecting wear on the side surface of the lance tip 2 using the pressure sensor ring 4 in embodiment 1.
The specific principle is that when adopting the electrostatic gun to carry out the electrostatic discharge test for a long time, because all adopt the same angle to test, the wearing and tearing of rifle point 2 mainly concentrate on a certain side, because the side wearing and tearing, the topmost of rifle point 2 is not on the axis of rifle point 2 this moment, consequently can make the electrostatic gun stand vertically, and the focus shifts, and then the pressure distribution appears the deviation.
It is based on the above principle that the pressure sensor ring 4 detects whether the lance tip 2 is worn laterally.
Specifically, at the top of the electrostatic gun, a level bubble 5 is provided to keep the electrostatic gun in a vertically standing state by detecting the position of the level bubble 5.
When the side wear of the gun tip 2 does not occur or is within an acceptable range, the pressure readings of the pressure sensors 3 of the pressure sensor ring 4 should be the same or the difference should be within a preset range in the case that the electrostatic gun is kept in a vertical standing state due to uniform stress.
However, when the side surface of the gun tip 2 is obviously worn, the pressure readings of the pressure sensors 3 of the pressure sensor ring 4 can deviate due to uneven stress, and the maximum value V is read at the momentmaxAnd a minimum value VminWhen the maximum value VmaxAnd a minimum value VminDifference therebetween V = Vmax-VminGreater than a pressure threshold V corresponding to weartIn time, the side surface of the gun tip 2 is judged to be obviously abraded, the accuracy and the reliability of measurement are influenced, and the gun tip needs to be replaced in time.
Example 3
This embodiment is a further improvement on the basis of embodiment 1 or 2, and common parts of the technical solutions are not described herein again.
When the number of the pressure sensors 3 on the pressure sensor ring 4 is small, the measurement of the contact angle is not accurate enough(ii) a Specifically, the inclination direction of the electrostatic gun does not necessarily coincide with the maximum value VmaxAnd a minimum value VminThe direction of the connecting line 7 is exactly consistent, and the measurement result has errors, so the result needs to be corrected to improve the accuracy of the contact angle measurement.
Specifically, the maximum value V is extractedmaxOr the minimum value VminPressure value V of left adjacent positionlPressure value V of the adjacent position on the right sider. When the maximum value VmaxAnd minimum value VminWhen the direction of the inter-connecting line 7 coincides with the inclination direction of the electrostatic gun, theoretically VlAnd VrIs equal, when the direction of the connecting line 7 does not coincide with the tilting direction of the electrostatic gun, the greater the deviation between the direction of the connecting line 7 and the tilting direction of the electrostatic gun, the greater VlAnd VrThe larger the deviation of the value of (A), and therefore, can be according to VlAnd VrThe degree of deviation of the value of (a) corrects the deviation of the angle.
More specifically, using VlAnd VrThe angle is corrected by the ratio of (c). Before measurement, V is measuredlAnd VrIs calibrated according to different ratios and corresponding different angle deviations to obtain VlAnd VrThe deviation of the ratio of (a) from the measured contact angle is calibrated out, and in subsequent measurements V is calculatedlAnd VrAfter a ratio according to VlAnd VrThe measured contact angle is corrected by the ratio, so that the accuracy of measuring the contact angle is improved.
In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other ways. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment. In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.

Claims (7)

1. The utility model provides an electrostatic gun, includes electrostatic gun body (1) and rifle point (2), its characterized in that, rifle point (2) with the installation joint portion of electrostatic gun body (1) is provided with a plurality of pressure sensor (3), a plurality of pressure sensor (3) are evenly arranged along installation face circumferencial direction and are formed a pressure sensor ring (4), the number of a plurality of pressure sensor (3) is six even numbers more than or equal to, pressure sensor ring (4) set up one side of electrostatic gun body (1), the centre of a circle (6) of pressure sensor ring (4) with rifle point (2) are concentric.
2. An electrostatic gun according to claim 1, characterized in that a levelling bubble (5) is arranged on top of the electrostatic gun body (1).
3. A method for measuring contact angle and contact force of an electrostatic gun using the electrostatic gun of claim 2, comprising the steps of:
reading the distribution of the measurement values of each pressure sensor (3) on the pressure sensor ring (4);
calculating a contact angle between the electrostatic gun and an object to be tested during an electrostatic discharge test according to the distribution of the measurement values;
and calculating the contact force between the electrostatic gun and the object to be tested during the electrostatic discharge test according to the distribution of the measurement values.
4. The method according to claim 3, wherein the calculating of the contact angle between the electrostatic gun and the object under test in the electrostatic discharge test specifically comprises:
finding the maximum value V from the distribution of the measured valuesmaxAnd a minimum value VminAccording to the maximum value VmaxAnd a minimum value VminDetecting whether each pressure sensor (3) works abnormally; if abnormal, the maximum value V is adjustedmaxAnd a minimum value VminCarrying out reselection;
the maximum value VmaxAnd a minimum value VminConnecting at a position on the pressure sensor ring (4), wherein the direction of the connecting line (7) represents the inclination direction of the electrostatic gun;
calculating the maximum value VmaxAnd a minimum value VminDifference between V, V = Vmax-VminAnd obtaining a contact angle corresponding to the difference V according to a calibration curve between the difference and the contact angle obtained between the maximum value and the minimum value which are calibrated in advance.
5. The method according to claim 3, wherein the calculating the contact force between the electrostatic gun and the object under test in the electrostatic discharge test specifically comprises:
reading the distribution of the measured values of the pressure sensors (3) on the pressure sensor ring (4) at each test;
the measured values of the pressure sensors (3) at the corresponding positions on the two adjacent pressure sensor ring (4) are subjected to differential operation, and if the corresponding difference values of the pressure sensors (3) at each position are all within a difference threshold value VpWithin the range, the strength of two adjacent tests is judged to be the same, and the test conditions are met; otherwise, the angle and the force are adjusted until the difference value corresponding to the pressure sensor (3) at each position is within the difference threshold value VpWithin the range.
6. The method for measuring contact angle and contact force of electrostatic gun according to claim 4, wherein the maximum V is a valuemaxAnd a minimum value VminWhether each pressure sensor (3) works abnormally is detected, and the method specifically comprises the following steps:
the maximum value VmaxAnd a minimum value VminConnecting a line at the position of the pressure sensor ring (4), and if the connecting line (7) does not pass through the circle center (6) of the pressure sensor ring (4), judging that the pressure sensor (3) is abnormal;
extracting the maximum value VmaxPressure value V of left adjacent positionlPressure value V of the position adjacent to the right siderComparison VlAnd VrDifference value V ofl-VrIf the difference V isl-VrAt a predetermined threshold value VlrWithin the range, V is determinedlAnd VrSame value, maximum value VmaxThe corresponding pressure sensor (3) works normally, and the minimum value VminThe corresponding pressure sensor (3) works abnormally, and the maximum value V of the distance is calculatedmaxThe pressure value at the farthest position is taken as the minimum value Vmin(ii) a If the difference V isl-VrIs not at the preset threshold value VlrWithin the range, V is determinedlAnd VrDifferent value, minimum value VminThe corresponding pressure sensor (3) works normally, and the maximum value VmaxThe corresponding pressure sensor (3) works abnormally, and the distance is minimized to a minimum value VminThe pressure value at the farthest position is taken as the maximum value Vmax。
7. The method for measuring the contact angle and the contact force of the electrostatic gun according to any one of claims 3 to 6, further comprising:
keeping the static gun in a vertical standing state by detecting the position of the level bubble (5);
reading the distribution of the measurement values of each pressure sensor (3) on the pressure sensor ring (4);
finding the maximum value V from the distribution of the measured valuesmaxAnd a minimum value VminIf said maximum value VmaxAnd a minimum value VminDifference between V = Vmax-VminGreater than the corresponding pressure threshold V at significant weartAnd judging that the gun tip (2) has obvious side abrasion.
CN202210812735.9A 2022-07-12 2022-07-12 Electrostatic gun and method for measuring contact angle and force of electrostatic gun Active CN115267266B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210812735.9A CN115267266B (en) 2022-07-12 2022-07-12 Electrostatic gun and method for measuring contact angle and force of electrostatic gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210812735.9A CN115267266B (en) 2022-07-12 2022-07-12 Electrostatic gun and method for measuring contact angle and force of electrostatic gun

Publications (2)

Publication Number Publication Date
CN115267266A true CN115267266A (en) 2022-11-01
CN115267266B CN115267266B (en) 2023-09-26

Family

ID=83766657

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210812735.9A Active CN115267266B (en) 2022-07-12 2022-07-12 Electrostatic gun and method for measuring contact angle and force of electrostatic gun

Country Status (1)

Country Link
CN (1) CN115267266B (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130002273A1 (en) * 2011-05-02 2013-01-03 Kyung Jin Min System and method for electrostatic discharge testing of devices under test
CN103565414A (en) * 2012-07-20 2014-02-12 株式会社百利达 Viscoelasticity measuring apparatus
JP2017227476A (en) * 2016-06-21 2017-12-28 株式会社デンソーウェーブ Electrode, electrostatic testing device, and electrostatic testing method
CN207472922U (en) * 2017-12-01 2018-06-08 昆山市计量检测中心 A kind of clamping of electrostatic discharge simulation device and trigger device
CN108535567A (en) * 2018-04-17 2018-09-14 京东方科技集团股份有限公司 A kind of Characterization of Air Electrostatic Discharge test device and test method
CN111735692A (en) * 2020-08-11 2020-10-02 长安大学 Device for measuring impact counter force in circumferential direction in impact test
CN215493850U (en) * 2021-03-16 2022-01-11 北京芯可鉴科技有限公司 Monitoring device for static test and static test system
CN114675115A (en) * 2022-04-15 2022-06-28 厦门市计量检定测试院 Automatic electrostatic discharge test system

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130002273A1 (en) * 2011-05-02 2013-01-03 Kyung Jin Min System and method for electrostatic discharge testing of devices under test
CN103565414A (en) * 2012-07-20 2014-02-12 株式会社百利达 Viscoelasticity measuring apparatus
JP2017227476A (en) * 2016-06-21 2017-12-28 株式会社デンソーウェーブ Electrode, electrostatic testing device, and electrostatic testing method
CN207472922U (en) * 2017-12-01 2018-06-08 昆山市计量检测中心 A kind of clamping of electrostatic discharge simulation device and trigger device
CN108535567A (en) * 2018-04-17 2018-09-14 京东方科技集团股份有限公司 A kind of Characterization of Air Electrostatic Discharge test device and test method
CN111735692A (en) * 2020-08-11 2020-10-02 长安大学 Device for measuring impact counter force in circumferential direction in impact test
CN215493850U (en) * 2021-03-16 2022-01-11 北京芯可鉴科技有限公司 Monitoring device for static test and static test system
CN114675115A (en) * 2022-04-15 2022-06-28 厦门市计量检定测试院 Automatic electrostatic discharge test system

Also Published As

Publication number Publication date
CN115267266B (en) 2023-09-26

Similar Documents

Publication Publication Date Title
US10746788B2 (en) Sensing structure of alignment of a probe for testing integrated circuits
KR900001040B1 (en) Probe detecting method
CN101109782B (en) Noncontact type single side probe device and apparatus and method for testing open or short circuits of pattern electrodes using the same
US7504844B2 (en) Inspection apparatus and method
US7119560B2 (en) Probe apparatus
TW201522976A (en) Probe system, probe height adjusting method, and probe position sensing method
WO2008041678A1 (en) Board testing apparatus and board testing method
CN215493850U (en) Monitoring device for static test and static test system
CN115267266A (en) Electrostatic gun and method for measuring contact angle and force of electrostatic gun
KR100897982B1 (en) Miss align preventing pattern and method thereof between probe card niddle and pad
CN114814557B (en) Electrostatic gun and method for carrying out electrostatic discharge test by adopting same
US20220003815A1 (en) Probe structure for micro device inspection
TWI383160B (en) Electrical connection defect detection system and method
US10768206B2 (en) Loop-back probe test and verification method
KR101311871B1 (en) Device and method for open test and short test of touch integrated circuit
TWI749548B (en) Detecting system and method for pin misalignment
JP2015010880A (en) Insulation inspection device
WO2014098345A1 (en) Apparatus and method for detecting cracks in contact part of electronic device
CN115079075A (en) Test structure and method for detecting WAT test machine, and test system
TW200537112A (en) Circuit pattern testing apparatus and circuit pattern testing method
CN113671339A (en) Apparatus and method for verifying probe abnormality and contact abnormality and wafer testing method
CN102183717B (en) Four-probe piezoresistor tester and grading test method thereof
US20150084659A1 (en) Contact arrangements and methods for detecting incorrect mechanical contacting of contact structures
TWI809959B (en) Shift measurement device and operating method thereof
KR20140128620A (en) Apparatus of Detecting Mis-alignment of Test Pad

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant