TWI771748B - Apparatus and method for measuring environment electrostatic and system for monitoring and controlling environment electrostatic - Google Patents

Abstract

The subject disclosure relates to an apparatus and a method for measuring environment electrostatic and a system for monitoring and controlling environment electrostatic. The apparatus for measuring environment electrostatic comprises an electrometer, a conductive plate, and a switch. The electrometer comprises a sensor. The conductive plate is arranged to be spaced the electrometer at a distance and aligned with the sensor of the electrometer. The switch is electrically connected to the conductive plate.

Description

Device and method for measuring environmental static electricity and environmental static electricity monitoring system

The present disclosure relates to an apparatus and method for measuring environmental static electricity and an environmental static electricity monitoring system, especially for solving the problem of electrostatic discharge in a semiconductor process.

Electrostatic discharge (ESD) is the main cause of failure and damage to most electronic components or electronic systems. The generation of electrostatic discharge is mostly caused by human factors, but it is difficult to avoid. For example, in the process of manufacturing, production, assembly, testing, storage and handling of electronic components or systems, static electricity will accumulate in the human body, instruments and storage equipment, etc., and even the electronic components themselves will accumulate static electricity. Unwittingly, these objects are brought into contact with each other, thereby creating a discharge path that can damage electronic components or systems by electrostatic discharge. Such damage will lead to permanent damage to semiconductor components and computer systems, thereby affecting the function of electronic components or systems, and making electronic products work abnormally.

Common ESD (electrostatic discharge) types in semiconductor factories include HBM (human body model), MM (machine model), CDM (charge device) model), that is, the environment (dry and clean air delivery in the clean room), the machine and the staff will all generate ESD due to frictional electrification.

The gate oxide layer in chip circuits manufactured by advanced process technology is thinner (eg GAA), so that the electric field strength caused by the same voltage condition is stronger, making the gate oxide layer more susceptible to damage. This is why, as the size of components decreases, the ESD protection capability also declines, and the density of components in bonding increases. These threats to ESD (electrostatic discharge) are becoming more and more serious.

In order to solve the above static electricity problem, the present disclosure provides a device for measuring environmental static electricity, which can effectively monitor the environmental static electricity value in a semiconductor factory area, such as a clean room, and can effectively and accurately eliminate the environment for each small area in the factory area. Static electricity, it will not generate static electricity in certain areas that is not completely eliminated, or excessive use of static eliminators to generate excess charge in that area. In some embodiments, the present disclosure provides an apparatus for measuring environmental static electricity, which includes an electrometer, a conductive plate, and a switch. The electrometer includes a sensor, the conductive plate is disposed at a distance from the electrometer and substantially aligned with the sensor of the electrometer, and the switch is electrically connected to the conductive plate.

The device for measuring environmental static electricity of the present disclosure can also achieve real-time monitoring, and can integrate an online monitoring system and a static electricity eliminator. In some embodiments, the present disclosure provides an environmental static electricity monitoring system, which includes at least one device for measuring environmental static electricity, a processing device, and at least one static electricity eliminator. The device for measuring ambient static electricity includes an electrometer, a conductive plate and a switch. The electrometer includes a sensor, the conductive plate is disposed at a distance from the electrometer and substantially aligned with the sensor of the electrometer, and the switch is electrically connected to the conductive plate. The processing device is connected to the electrometer and the switch of the device for measuring ambient static electricity, and the A static eliminator is connected to the processing device.

In some embodiments, the present disclosure provides a method for measuring environmental static electricity, which includes: providing a conductive plate that can be used to collect environmental static electricity, wherein the conductive plate is connected to a switch; operating the switch to make the conductive plate The board is connected to a ground wire; an electrometer is provided at a fixed distance from the conductive plate, and the electrometer is used to measure the conductive plate that is switched connected to the ground wire to zero the electrometer; operation The switch enables the conductive plate to be in an open circuit state; and uses the electrostatic meter to measure the static electricity value on the conductive plate.

The foregoing has outlined rather broadly the technical features of the present disclosure in order to provide a better understanding of the detailed description of the present disclosure that follows. Other technical features constituting the subject matter of the scope of the present disclosure will be described below. It should be understood by those skilled in the art to which the present disclosure pertains that the concepts and specific embodiments disclosed below can be readily utilized as modifications or designs of other structures or processes to achieve the same purposes of the present disclosure. Those skilled in the art to which the present disclosure pertains should also understand that such equivalent constructions cannot depart from the spirit and scope of the present disclosure as defined by the appended claims.

1: A device for measuring ambient static electricity

3: Processing device

5: Static eliminator

7: Clean room

11: Electrometer

12: Conductive plate

13: Switcher

15: Conductive thread

21: Grounded Objects

22: Object to be tested

31: Processor

32: Controller

35: Display

100: Environmental Static Monitoring System

101: Steps

102: Steps

103: Steps

111: Signal output

113: Ground wire

115: Sensor

121: Fixed plate

131: ground wire

133: specific voltage

201: Steps

202: Steps

Aspects of the present disclosure will be better understood from the following description, together with the accompanying drawings. It should be noted that in accordance with standard industry practice, the various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily expanded or reduced for clarity.

FIG. 1 is a schematic diagram of the structure of an apparatus for measuring environmental static electricity according to an embodiment of the present disclosure.

FIG. 2 is a flow chart of the operation of the apparatus for measuring environmental static electricity according to the disclosed embodiment.

3A and 3B are schematic diagrams illustrating the operation of the electrometer according to the disclosed embodiment.

4A and 4B are schematic diagrams illustrating operations of the apparatus for measuring ambient static electricity according to the disclosed embodiment.

5A and 5B are schematic diagrams of calibration of an apparatus for measuring environmental static electricity according to an embodiment of the disclosure.

FIG. 6 is a schematic diagram of an environmental static electricity monitoring system according to an embodiment of the disclosure.

The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components and configurations are described below to simplify the present disclosure. Of course, these are only examples and are not intended to be limiting. For example, in the following description, "forming a first member over a second member or on a second member" may include embodiments in which the first member and the second member are formed in direct contact, and may also Embodiments are included in which additional members may be formed between the first member and the second member such that the first member and the second member may not be in direct contact. Additionally, the present disclosure may repeat reference numerals and/or letters in various instances. This repetition is intended for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and/or configurations discussed.

Furthermore, for convenience of description, spatially relative terms (such as "below," "below," "under," "over," "on," "above," and the like may be used herein to describe an element or component relationship to another element(s) or components as depicted in the figures. In addition to the orientation depicted in the figures, spatially relative terms are also intended to encompass different orientations of the device in use or operation. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may also be interpreted accordingly.

As used herein, terms such as "first", "second", and "third" describe various elements, components, regions, layers and/or sections, such elements, components, regions, layers and/or Sections should not be limited by these terms. These terms may only be used to denote an element, component, region Domains, layers or sections are distinguished from each other. Terms such as "first," "second," and "third," when used herein do not imply a sequence or order unless the context clearly dictates otherwise.

As used herein, the terms "substantially," "substantially," "substantially," and "about" are used to describe and explain small variations. When used in conjunction with an event or circumstance, terms can refer to both the exact instance in which the event or circumstance occurs and the instance in which the event or circumstance occurs very closely. For example, when used in conjunction with a numerical value, the term can refer to a range of variation less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±3% Equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, if a difference between two values is less than or equal to ±10% of the mean of one of the values (such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%), then such values may be considered to be "substantially" the same or equal . For example, "substantially" parallel may refer to an angular variation of less than or equal to ±10° relative to 0°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±3° ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. For example, "substantially" vertical may refer to an angular variation of less than or equal to ±10° relative to 90°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±3° ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°.

With the development of advanced integrated circuit (IC) technology, in order to increase the circuit performance, the circuit channel becomes shorter or the gate oxide layer becomes thinner, so that the electronic components are susceptible to electrostatic discharge (ESD). ) is getting lower and lower, and the requirements for the manufacturing environment of electrostatic sensitive components are becoming more and more stringent. Electronic products are manufactured, assembled During the process of installation, testing and transportation, the phenomenon of electrostatic discharge may occur due to the unsound grounding system, improper operation of personnel or lack of proper electrostatic protection measures, resulting in damage to the circuit of the product or reduction of reliability. Among the electrostatic protection measures, in addition to the grounding system and material selection, only the Ionizer can neutralize the static electricity on the insulating object. However, in semiconductor workshops or clean rooms, it is not the best way to eliminate static electricity by using only static eliminator.

Usually, many static eliminators are installed in semiconductor factories or clean rooms to neutralize or eliminate static electricity generated in the environment, but do not actually measure the static electricity in the environment, and only use a static elimination monitor (CPM: Charged Plate). Monitor) to calibrate the static eliminator. Furthermore, the use of an electrometer that can be used to measure the environment requires the user to manually ground and discharge to zero, which is not suitable for real-time monitoring, and is difficult to integrate with online monitoring systems and static eliminators.

FIG. 1 is a schematic diagram of an apparatus 1 for measuring environmental static electricity according to an embodiment of the present disclosure. In some embodiments, the device 1 for measuring ambient static electricity includes an electrometer 11 , a conductive plate 12 and a switch 13 . The electrometer 11 has a ground wire 113 , a signal output 111 and a sensor 115 . The electrometer 11 can use the sensor 115 to align the object to be measured to sense and obtain the electrostatic value on the object to be measured. Further, the electrometer 11 can use the signal output 111 to measure the measured value The electrostatic value is transmitted to another device or machine; in addition, the electrometer 11 can use its ground wire 113 to ground the electrometer 11 to zero, so that the electrometer 11 can be zeroed and corrected.

As shown in FIG. 1 , the conductive plate 12 is used to collect ambient static electricity and is disposed at a distance from the electrometer 11 . In some embodiments, the conductive plate 11 is approximately aligned with the sensor 115 of the electrometer 11 and senses the distance. The device 115 is set at a distance D, and the distance D can be set to be 1 cm or 1 inch, but not limited thereto. In some embodiments, the conductive plate 12 further has a fixed plate 121, one end of the fixed plate 121 is connected to the conductive plate 12, and the other end of the fixed plate 121 is connected to the electrometer 11; The plate 121 can fix the arrangement between the conductive plate 12 and the electrometer 11, and make the distance between the conductive plate 12 and the electrometer 11 to be a fixed distance.

Referring to FIG. 1 again, the switch 13 and the conductive plate 12 are electrically connected to each other. In some embodiments, the switch 13 and the conductive plate 12 can be electrically connected to each other through a conductive wire 15 . The switch 13 is further connectable to a ground line 131 and a specific voltage 133, wherein the specific voltage 133 can provide a specific voltage value, such as 137 volts; in some embodiments, the switch 13 is a three-way switch, The switch 13 can be switched so that the conductive plate 12 is connected to the ground wire 131, or can be switched so that the conductive plate 12 can be connected to a specific voltage 133, or can be switched so that the conductive plate 12 is connected to the ground wire 131 and the ground wire 131. An open circuit is formed between the specific voltages 133 .

FIG. 2 is a flowchart illustrating the operation of the apparatus for measuring environmental static electricity according to an embodiment of the present disclosure. Steps 101 to 103 relate to the operation of using the device 1 to measure ambient static electricity, and steps 201 to 202 relate to the operation of the calibration device 1 .

2 , when using the device 1 to measure ambient static electricity, as shown in step 101, the electrometer 11 of the device 1 can be reset to zero first; after the electrometer 11 is reset to zero, as shown in step 102, the device 1 can be reset to zero After the device 1 is reset to zero, as shown in step 103, the conductive plate 12 will collect ambient static electricity. At this time, the electrostatic meter 11 of the device 1 can be used to measure the electrostatic value on the conductive plate 12, and the measured static electricity The value is the static value of the environment.

Referring to FIG. 2 again, after the device 1 has been used for a period of time, the device 1 can be calibrated so that the device 1 will not misestimate the environmental electrostatic value due to measurement deviation. When calibrating the device 1, as shown in step 201, first reset the device 1 to zero; after the device 1 is reset to zero, as shown in step 202, use the device 1 to measure a known specific voltage, and confirm the measured value of the device 1 The resulting electrostatic value is the same as the known specific voltage.

For the relevant operation flow of the above-mentioned Figure 2, the relevant detailed description can be found in content below.

3A and 3B are schematic diagrams illustrating the operation of the electrometer 11 according to the disclosed embodiment. As mentioned above, the electrometer 11 can use the ground wire 113 to perform zero calibration. In addition to using the ground wire 113 to perform zero calibration, the electrometer 11 can further use the method shown in FIG. 3A to further perform zero calibration. 3A, a grounded object 21 is provided first, and the sensor 115 of the electrometer 11 senses the grounded object 21. If the electrometer 11 shows that the measured value is zero, it means that the electrometer 11 has been reset. Zero calibration. FIG. 3B shows that an object to be measured 22 is measured by using the electrometer 11 of the disclosed embodiment; as shown in FIG. 3B , the user aligns the sensor 115 of the electrometer 11 to the object to be measured 22 and is at a distance from the object to be measured. A distance of the object 22 to measure the electrostatic value of the object to be measured 22; after the object to be measured 22 is sensed by the sensor 115, the value displayed on the electrometer 11 is the electrostatic value of the object to be measured 22 .

4A and 4B are schematic diagrams illustrating operations of the apparatus 1 for measuring ambient static electricity according to the disclosed embodiment. FIG. 4A shows the operation of zeroing calibration before using the device 1 for measuring environmental static electricity of the present disclosure; as shown in FIG. 4A , during the zeroing calibration, the switch 13 is switched so that the conductive plate 12 is connected to the ground. The line 131 forms an electrical path, so that the conductive plate 12 is in a grounded state without any static electricity. At this time, the sensor 115 of the electrometer 11 senses the conductive plate 12, and the electrometer 11 can measure the obtained conductivity The static value of the plate 12 is zero.

FIG. 4B shows the operation of using the apparatus 1 for measuring environmental static electricity of the present disclosure to perform environmental static electricity measurement; as shown in FIG. Open the circuit, so that the conductive plate 12 can collect ambient static electricity. At this time, the sensor 115 of the electrometer 11 is used to sense the conductive plate 12, and the electrostatic value of the conductive plate 12 measured by the electrometer 11 is the static value of the environment. Using this operation, the user can use the device 1 for measuring environmental static electricity to measure and obtain the static electricity value of the environment; further, the user can use the signal output of the electrometer 11 111 transmits the measured environmental static value to an external device or machine.

After the device 1 for measuring ambient static electricity is used for a period of time, some measurement errors may occur. Although as shown in FIG. 4A and FIG. 4B , the electrometer 11 of the device 1 can be normalized before the measurement. Zero calibration, but in order for the device 1 for measuring environmental static electricity to measure the static electricity value of the environment more accurately, it is necessary to perform further calibration for the device 1 . Referring to FIG. 5A , before performing further calibration, the electrometer 11 should also be reset to zero; as shown in FIG. 5A , the switch 13 is switched to form an electrical path between the conductive plate 12 and the ground wire 131 , so that the The conductive plate 12 is in a grounded state without any static electricity. At this time, when the sensor 115 of the electrometer 11 senses the conductive plate 12 , the electrostatic value of the conductive plate 12 obtained by the electrometer 11 is zero. Then, as shown in FIG. 5B , the switch 13 is switched so that the conductive plate 12 and the specific voltage 133 that can provide a specific voltage form an electrical path, so that the conductive plate 12 has a voltage value provided by the specific voltage 133 , such as 137 volts , at this time, the sensor 115 of the electrometer 11 senses the conductive plate 12 , the electrostatic value measured by the electrometer 11 should be the same as the voltage value provided by the specific voltage 133 ; if the electrostatic value measured by the electrometer 11 If the voltage value provided by the specific voltage 133 is different, it means that the device 1 for measuring environmental static electricity must be adjusted so that it can measure the static electricity value correctly before continuing the work of measuring environmental static electricity.

FIG. 6 is a schematic diagram of an environmental static electricity monitoring system according to an embodiment of the disclosure. As shown in FIG. 6 , an environmental static electricity monitoring system 100 according to an embodiment of the present disclosure is applied in a clean room 7 . The environmental static electricity monitoring system 100 includes a plurality of devices 1 for measuring environmental static electricity, a processor 3 and A plurality of static eliminators 5 ; in some embodiments, a plurality of devices 1 for measuring ambient static electricity and a plurality of static eliminators 5 are disposed in the clean room 7 . In some embodiments, referring to FIG. 6 , a plurality of conductive plates 12 of a plurality of devices 1 for measuring ambient static electricity are configured to be connected to a single switch 13 in common. In some embodiments, the processing device 3 has a processor 31 and a controller 32, a plurality of which are used for measuring A plurality of signal outputs 111 of the electrometer 11 of the device 1 for measuring environmental static electricity are configured to be connected to the processor 31 of the processing device 3 , so that the electrometer 11 can transmit the numerical information obtained by its measurement to the processing device 3 for processing In addition, the plurality of static eliminators 5 and the switch 13 are arranged to be connected to the controller 32 of the processing device, so that the user can manually control the plurality of static eliminators 5 through the controller 32 of the processing device 3 and the switch 13 , or the controller 32 can automatically operate and control the plurality of static eliminators 5 and the switch 13 according to the instructions of the processor 31 . In some embodiments, the processing device 3 is further connected with a display 35 , and the user can instantly know the static electricity distribution in the clean room 7 through the display 35 .

As shown in FIG. 6 , the clean room 7 is roughly divided into four areas: A, B, C, and D, and each area is equipped with at least one static eliminator 5 and a device 1 for measuring ambient static electricity; For example, it is equipped with one static eliminator 5 and three devices 1 for measuring environmental static electricity. The range of the static eliminator 5 that can effectively eliminate static electricity is roughly the range of the area A, and the range corresponding to the static eliminator 5 is matched. The three devices 1 for measuring ambient static electricity are arranged in the area A. In other words, the distance between the device 1 for measuring ambient static electricity and the static eliminator 5 is less than or equal to that of the static eliminator 5, which can effectively eliminate the The range of static electricity can effectively measure the environmental static electricity in the area A. Taking the area A as an example, three devices 1 for measuring environmental static electricity are arranged in the area A, so these devices 1 can be used to measure the environmental static electricity value in the area A in the clean room 7, and the The device 1 can transmit the measured ambient electrostatic value in the area A to the processor 31 of the processing device 3 through the signal output 111 of the electrometer 11. After receiving the information of the ambient electrostatic value, the processor 31 can The information is displayed on the display 35, and the user can know the ambient electrostatic value in the area A through the display 35; further, if the user observes from the display 35 that the ambient electrostatic value in the area A is too high, the user can Through the controller 32 of the processing device 3, the static eliminator 5 disposed in the area A is activated to eliminate the ambient static electricity in the area A. Similarly, make The user can observe whether the ambient static electricity in the area A has been eliminated by the static eliminator 5 in the display 35 . In addition to manually controlling the static eliminator 5, the processing device 3 can be set to automatically activate the static eliminator 5 through the ambient static electricity value measured by the device 1 for measuring ambient static electricity; still take the area A as an example , the three devices 1 for measuring the environmental static electricity in the area A can transmit the measured environmental static electricity value in the area A to the processor 31 of the processing device 3, if the processor 31 receives the device 1 When the returned ambient static electricity value in the area A is higher than a certain value, the processor 31 can automatically send an activation command to the controller 32, and the controller 32 can activate the static electricity eliminator 5 in the area A according to the activation command. To eliminate ambient static electricity in area A.

Similarly, the device 1 for measuring ambient static electricity and the static eliminator 5 in areas B, C, and D shown in FIG. or similar operation methods; in particular, the user can simultaneously observe the measured ambient electrostatic values in the four areas A, B, C, and D through the display 35, and the processing device 3 can simultaneously or separately activate the A, B, C, and D values. Static eliminator 5 in the four areas of B, C and D. Furthermore, the clean room is divided into multiple areas, such as four areas A, B, C, and D as shown in FIG. 6 , in addition to considering the range in which each static electricity eliminator 5 of the environmental static electricity monitoring system 100 can effectively eliminate environmental static electricity , the environmental static electricity monitoring system 100 can more accurately measure the environmental static electricity value of the clean room 7, and can accurately and effectively eliminate static electricity for different environmental static electricity values in different areas.

In addition, as shown in FIG. 6 , the multiple devices 1 of the environmental static monitoring system 100 share a single switch 13 ; in this way, after the environmental static monitoring system 100 is used for a period of time, it can be manually operated by the user or automatically by the processing device 3 . The activation switch 13 is operated to reset and calibrate the plurality of devices 1 of the environmental static electricity monitoring system 100 .

Based on the above, the environmental static electricity monitoring system 100 of the present disclosure can effectively monitor the environmental static electricity value in a semiconductor factory area, such as a clean room, and can effectively and accurately target Each small area in the factory area eliminates its environmental static electricity, and it will not produce static electricity in some areas that is not completely eliminated, or excessive use of the static eliminator 5 to generate excess charge in this area.

The foregoing has outlined features of several embodiments so that those skilled in the art may better understand aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other procedures and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that these equivalent constructions should not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions and alterations herein.

1: A device for measuring ambient static electricity

11: Electrometer

12: Conductive plate

13: Switcher

15: Conductive thread

111: Signal output

113: Ground wire

115: Sensor

121: Fixed plate

131: ground wire

133: specific voltage

Claims (10)

A device for measuring ambient static electricity, comprising: an electrometer having a sensor and a first ground wire, the electrometer configured to transmit signals to an external device; a conductive plate spaced from the electrometer a sensor disposed at a distance and aligned with the electrometer; and a switch electrically connected to the conductive plate and a second ground wire. The apparatus for measuring ambient static electricity as claimed in claim 1, wherein the switch is further connected to a specific voltage. The device for measuring ambient static electricity of claim 2, wherein the switch is a three-way switch configured to switch the conductive plate to be electrically connected to the second ground wire, or to switch the conductive plate connected to the specific voltage, or the conductive plate is switched to form an open circuit with the second ground line and the specific voltage. The device for measuring environmental static electricity according to claim 1, further comprising a fixing plate, wherein the fixing plate is connected with the conductive plate and the electrometer. An environmental static electricity monitoring system, comprising: a plurality of devices for measuring environmental static electricity, each of the devices for measuring environmental static electricity comprises: an electrometer having a sensor; a conductive plate disposed at a distance from the electrometer and substantially aligned with the sensor of the electrometer; and a switch associated with the sensors for measuring ambient static electricity The conductive plates of the device are electrically connected; a processing device, which is connected to the electrometers and the switch of the device for measuring environmental static electricity; and a plurality of static eliminators, which are connected to the processing device. connected, and the environmental static electricity monitoring systems are configured such that a single static eliminator is configured in correspondence with a plurality of the devices for measuring environmental static electricity for eliminating environmental static electricity in a plurality of areas. The environmental static electricity monitoring system of claim 5, wherein the switch is further connected to a ground line and to a specific voltage. The environmental static monitoring system of claim 6, wherein the switch can be a three-way switch configured to switch the conductive plates to be electrically connected to the ground wire, or to switch the conductive plates to be electrically connected to the ground wire A specific voltage is connected, or the conductive plates are switched to form an open circuit with the ground line and the specific voltage. The environmental static electricity monitoring system of claim 5, wherein the processing device is further connected with a display. A method of measuring ambient static electricity, comprising; Provide a plurality of conductive plates that can be used to collect ambient static electricity, wherein the conductive plates are connected to a switch; operate the switch to connect the conductive plates to a ground wire; provide a plurality of conductive plates respectively Electrometers at a fixed distance and use the electrometers to measure the conductive plates that are switched to the ground wire to zero the electrometers; operate the switch so that the conductive plates are an open circuit state; use the static electricity meters to measure the static electricity value on the conductive plates; and use a plurality of static electricity eliminators to eliminate the environmental static electricity in a plurality of areas according to the static electricity value. The method for measuring ambient static electricity as claimed in claim 9, further comprising: operating the switch to connect the conductive plates to a specific voltage; and measuring the conductive plates using the electrostatic meters, and confirming the static electricity Whether the electrostatic value on the conductive plates measured by the meter is the same as the voltage value of the specific voltage.

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