CN115265771A - Laser equipment power testing device and laser equipment power testing method - Google Patents

Laser equipment power testing device and laser equipment power testing method Download PDF

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Publication number
CN115265771A
CN115265771A CN202210673221.XA CN202210673221A CN115265771A CN 115265771 A CN115265771 A CN 115265771A CN 202210673221 A CN202210673221 A CN 202210673221A CN 115265771 A CN115265771 A CN 115265771A
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CN
China
Prior art keywords
laser
screw rod
power
motor
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210673221.XA
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Chinese (zh)
Inventor
任泽生
吴海
刘成群
赵英伟
吴爱华
王露寒
程壹涛
张文朋
王峻澎
雷宇
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CETC 13 Research Institute
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CETC 13 Research Institute
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Application filed by CETC 13 Research Institute filed Critical CETC 13 Research Institute
Priority to CN202210673221.XA priority Critical patent/CN115265771A/en
Publication of CN115265771A publication Critical patent/CN115265771A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0403Mechanical elements; Supports for optical elements; Scanning arrangements

Abstract

The invention provides a laser device power testing device and a laser device power testing method. The device comprises: the device comprises a base, an adjusting component, a reflecting component, a probe support component, a total reflection lens, an indicating lens and a power meter; the adjusting assembly is arranged below the base, the reflecting assembly is fixedly arranged on the base, the probe support assembly is fixedly arranged on the reflecting assembly, the total reflection lens is arranged in the reflecting assembly, the indicating lens is positioned on the probe support assembly, and the power meter is arranged above the indicating lens; when laser emitted by the laser equipment irradiates the total reflection lens, the laser is reflected to the indicating lens, and the power meter measures the power of the laser on the indicating lens. The invention can realize that only the power testing device of the laser equipment needs to be moved in the testing process, and the beam expander does not need to be moved, thereby ensuring that the original light path of the laser equipment is not deviated when the laser equipment is actually used, avoiding re-debugging and calibrating the light path of the laser equipment after the testing is finished, and being convenient for measuring the laser power quickly, accurately and without influence.

Description

Laser equipment power testing device and laser equipment power testing method
Technical Field
The invention relates to the technical field of laser power detection, in particular to a laser device power testing device and a laser device power testing method.
Background
The laser has the advantages of good directivity, high processing precision, non-contact processing, concentrated energy density and the like, and the laser system are widely applied to the fields of electronics, automobiles, electric appliances, aviation and the like at present. The laser processing equipment mainly comprises a laser, an optical system, a control system and a mechanical system, wherein the laser outputs high-intensity laser with specific wavelength through an internal resonant cavity, and the high-intensity laser is finally focused on the surface of a workpiece through optical elements such as a beam expander, a reflector, a vibrating mirror, a lens and the like to generate high energy so as to finish the processing of the material.
Laser power loss, which is one of the major problems affecting the efficiency of laser processing equipment, is divided into air dielectric loss between optical elements and optical element loss. Among them, the air dielectric loss is a power loss caused by collision of laser light with particle dust distributed in the air during transmission, and if the dust concentration is too high, nearby elements may be overheated and damaged, so that it is the most effective way to reduce the air dielectric loss to equip a laser processing apparatus with a light path dust-proof tube for shortening the air path between laser optical elements. The loss of the optical element is caused by that the laser continuously bombards the surface of the optical element to damage the mirror surface reflection film, so that the power loss is continuously increased, and the energy reaching the surface of the workpiece is reduced, so that the loss condition of the optical lens in the optical path needs to be regularly detected. Since the first lens of the beam expander is adjacent to the laser, the laser damage speed is the fastest, so that the laser power loss is generally determined by periodically measuring the actual energy of the light-emitting side of the laser or the loss energy of the beam expander so as to measure the laser power.
However, the existing laser power measurement method needs to move the beam expander to measure the loss of the beam expander, but the movement of the beam expander can change the whole optical path, and when the loss of the beam expander is serious, the beam expander needs to be replaced, and then the whole optical path needs to be calibrated and debugged for a long time, so that the laser power cannot be measured quickly, accurately and without influence.
Disclosure of Invention
The embodiment of the invention provides a laser equipment power testing device and a laser equipment power testing method, and aims to solve the problem that laser power cannot be measured quickly, accurately and without influence because a beam expander is moved to change a light path when the laser power is measured in the prior art.
In a first aspect, an embodiment of the present invention provides a power testing apparatus for laser devices, including: the device comprises a base, an adjusting assembly, a reflecting assembly, a probe holder assembly, a total reflection lens, an indicating lens and a power meter;
the adjusting component is arranged below the base and used for supporting the base and adjusting the height and the angle of the base;
the reflecting component is fixedly arranged on the base and changes along with the change of the height and the angle of the base;
the probe support assembly is fixedly arranged on the reflection assembly and changes along with the change of the height and the angle of the reflection assembly;
the total reflection lens is arranged in the reflection assembly, the indication lens is positioned on the probe holder assembly, and the power meter is arranged above the indication lens;
when laser emitted by the laser equipment irradiates the total reflection lens, the laser is reflected to the indicating lens, and the power meter measures the power of the laser on the indicating lens.
In one possible implementation, the adjusting assembly includes: the device comprises a first motor, a second motor, a first screw rod, a second screw rod, a third screw rod, a first screw rod slide block, a second screw rod slide block, a third screw rod slide block, a first coupler, a second coupler, a third coupler, a gear, a ratchet wheel, a third rotating shaft, a connecting rod and a belt;
one end of the first screw rod is connected with a first rotating shaft of the first motor through the first coupler and rotates along with the rotation of the first rotating shaft of the first motor; the first screw rod sliding block is arranged on the first screw rod and slides up and down on the first screw rod along with the rotation of the first screw rod;
one end of the second screw rod is connected with a second rotating shaft of the second motor through the second coupling and rotates along with the rotation of the second rotating shaft of the second motor; the second screw rod sliding block is arranged on the second screw rod and slides up and down on the second screw rod along with the rotation of the second screw rod;
one end of the third screw rod is connected with the third rotating shaft through the third coupler and rotates along with the rotation of the third rotating shaft; the third screw rod sliding block is arranged on the third screw rod and slides up and down on the third screw rod along with the rotation of the third screw rod;
the gear is arranged on a first rotating shaft of the first motor; the ratchet wheel is arranged on the third rotating shaft, and the gear and the ratchet wheel are driven by the belt;
and the first screw rod sliding block, the second screw rod sliding block and the third screw rod sliding block are respectively provided with a connecting rod and are connected with the base through corresponding connecting rods.
In one possible implementation, the adjusting assembly further includes: an eccentric wheel and a deflector rod;
the eccentric wheel is arranged on a second rotating shaft of the second motor, and the eccentric wheel and the ratchet wheel are driven through the driving lever.
In one possible implementation manner, the first motor and the second motor are both micro stepping motors;
the deflector rod is an elastic deflector rod.
In one possible implementation, the base includes a support tube and a bottom sheet;
one end of the supporting tube is fixed on the bottom sheet, and the other end of the supporting tube is connected with the reflecting component;
a plurality of fixing holes are formed in the bottom plate, and each fixing hole is connected with the corresponding screw rod sliding block through the corresponding connecting rod.
In one possible implementation, the reflection assembly includes a reflection frame and a support rod;
one end of the supporting rod is fixed on the lower surface of the reflecting frame and is used for supporting the reflecting frame; the other end of the supporting rod is sleeved in the other end of the supporting tube of the base, a jackscrew is arranged, and the length of the other end of the supporting rod sleeved in the other end of the supporting tube of the base is adjusted through the jackscrew;
the reflection frame comprises a box body and an inclined supporting plate, the box body consists of three connected side surfaces and a bottom surface, the inclined supporting plate is arranged in the box body, the top end of the inclined supporting plate is connected with the rear side surface of the box body, and the bottom end of the inclined supporting plate is connected with the bottom surface of the box body;
the inclined supporting plate is provided with a groove for fixing the total reflection lens.
In one possible implementation, the probe carrier assembly includes: a plurality of struts and a tray;
one end of each support rod is connected with the bottom surface of the tray and used for supporting the tray;
the other ends of the support rods are connected with the top surface of the reflection frame of the reflection assembly.
In a second aspect, an embodiment of the present invention provides a method for testing power of a laser device, where the device for testing power of a laser device provided by the present invention further includes a laser and a beam expander, the laser, the beam expander, and a reflector are at the same height, and the method for testing power of a laser device includes:
the adjusting assembly is used for adjusting the height of the reflecting assembly when the laser equipment power testing device is arranged between the laser and the beam expanding lens, so that the testing laser of the laser is reflected on the indicating lens through the total reflection lens; after the standard laser of the laser is stabilized, adjusting the height and the angle of the reflection assembly, and determining the target test position of the standard laser on the indication lens through the reflection of the total reflection lens;
the power meter collects the power of the standard laser reflected to the indicating lens to obtain first laser energy data; and determining the laser power of the laser according to the first laser energy data;
the adjusting component is used for re-executing the adjusting step of the adjusting component on the height and the angle of the reflecting component when the laser equipment power testing device is positioned behind the beam expander, and the power meter determines second laser energy data and obtains laser loss data of the beam expander according to the first laser energy data and the second laser energy data.
In a possible implementation manner, setting the initial positions of the first screw rod sliding block, the second screw rod sliding block and the third screw rod sliding block at the lowest point or the highest point of the corresponding screw rod;
the adjusting the height and the angle of the reflection assembly and the determining the target test position of the standard laser reflected by the total reflection lens on the indicating lens comprise:
the first motor and the second motor are started simultaneously to drive the first screw rod sliding block, the second screw rod sliding block and the third screw rod sliding block to slide once between the lowest point and the highest point of the corresponding screw rods, and the first motor and the second motor are closed; the power meter records the power value of the sliding block during sliding and determines the maximum power value as a first target value; the first motor and the second motor are started simultaneously, and are closed when the power meter displays the first target value, and the current position of the third screw rod slide block is determined to be the target position of the third screw rod slide block;
the second motor is started to drive the second screw rod sliding block to slide once between the lowest point and the highest point of the second screw rod, and the second motor is closed; the power meter records the power value of the second screw rod sliding block during sliding and determines the maximum power value as a second target value; the second motor is started and is closed when the power meter displays the second target value, and the current position of the second screw rod slide block is determined to be the target position of the second screw rod slide block;
the second motor is started, the eccentric wheel rotates, the driving lever drives the ratchet wheel to be tripped, the rotation direction of the ratchet wheel is changed, and the second motor is turned off; the first motor is started to drive the first screw rod sliding block to slide once between the lowest point and the highest point of the first screw rod, the first motor is closed, the power meter records the power value of the first screw rod sliding block during sliding, and the maximum power value is determined to be a third target value; the first motor is started, and is closed when the power meter displays the third target value, and the current position of the first screw rod sliding block is determined to be the target position of the first screw rod sliding block;
and the position of the standard laser reflected on the indicating lens through the total reflection lens is the target test position.
In a possible implementation manner, the obtaining laser loss data of the beam expander according to the first laser energy data and the second laser energy data includes:
and calculating the difference value of the first laser energy data and the second laser energy data, and taking the difference value as the laser loss data of the beam expander.
The embodiment of the invention provides a laser equipment power testing device and a laser equipment power testing method, wherein a probe support component, a reflection component and a base are vertically installed, so that the laser equipment power testing device is smaller and more flexible, and is convenient to move and place, the laser equipment power testing device can be directly placed between a laser and a beam expanding lens in laser equipment, when the laser power and the loss condition of an optical lens in a light path are detected, only the laser equipment power testing device needs to be moved, the beam expanding lens does not need to be moved, and the laser equipment power testing device is moved without changing the position of an element in the laser equipment, so that the original light path of the laser equipment in actual use can be ensured not to deviate, the light path of the laser equipment is prevented from being debugged and calibrated again after the test is finished, and the laser power is measured quickly, accurately and without influence.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed for the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a power testing apparatus of a laser device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an adjusting assembly of a power testing apparatus for a laser device according to an embodiment of the present invention;
fig. 3 is an exploded view of a power testing apparatus for a laser device according to an embodiment of the present invention;
fig. 4 is a flowchart of an implementation of a method for testing power of a laser device according to an embodiment of the present invention.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system structures, techniques, etc. in order to provide a thorough understanding of the embodiments of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the following description is made by way of specific embodiments with reference to the accompanying drawings.
With the progress of laser technology, miniaturization and integration of laser devices are still the development trend in the future. For small-sized laser equipment, the gap between a laser and a beam expander is small, and a probe of a power meter in the prior art is difficult to directly place, so that the beam expander needs to be moved when the laser power emitted by the laser is measured, but long time is needed for debugging the optical path of the laser equipment after the beam expander is moved for measurement.
Fig. 1 is a schematic structural diagram of a power testing apparatus for a laser device according to an embodiment of the present invention, and for convenience of description, only the parts related to the embodiment of the present invention are shown, and detailed descriptions are as follows:
the power testing device of the laser equipment comprises: the device comprises an adjusting component 1, a base 2, a reflecting component 3, a probe holder component 4, a total reflection lens 5, an indicating lens 6 and a power meter 7;
the adjusting component 1 is arranged below the base 2 and used for supporting the base 2 and adjusting the height and the angle of the base 2;
the reflecting component 3 is fixedly arranged on the base 2 and changes along with the change of the height and the angle of the base 2;
the probe holder assembly 4 is fixedly arranged on the reflection assembly 3 and changes along with the change of the height and the angle of the reflection assembly 3;
the total reflection lens 5 is arranged in the reflection assembly 3, the indication lens 6 is positioned on the probe holder assembly 4, and the power meter 7 is arranged above the indication lens;
when the laser light emitted from the laser device is irradiated onto the all-reflection mirror 5 and reflected onto the indicating mirror 6, the power meter 7 measures the power of the laser light on the indicating mirror.
The embodiment of the invention provides a laser equipment power testing device, which is more compact and flexible and is convenient to move and place by vertically installing an adjusting component, a base, a reflecting component, a probe support component, a total reflection lens, an indicating lens and a power meter. In the laser device, a laser is adjacent to a first lens of a beam expander, the beam expander needs to be moved for measurement in the conventional laser power test method, the laser device power test device provided by the embodiment of the invention can be placed between the laser and the beam expander, when the laser power and the loss condition of an optical lens in a light path are detected, the laser device power test device only needs to be moved without moving the beam expander, the original light path in the laser device is ensured not to deviate after the test is finished, the light path of the laser device is prevented from being debugged and calibrated again after the test is finished, and the laser power is measured quickly, accurately and without influence.
In the prior art, the height and the angle of a base in a laser equipment power testing device are manually adjusted by adopting a leveling ground pin, the manual adjustment is direct and convenient, but the leveling ground pin cannot be accurately adjusted according to a power meter, so that human errors are often generated, elements in the laser equipment are extremely likely to be touched in the manual adjustment process, the position of the elements is deviated, the light path in the laser equipment needs to be calibrated and debugged after the test is finished, and the laser power cannot be quickly, accurately and noninfluently measured.
The adjusting component provided by the invention is controlled by a motor, and is accurately adjusted.
Alternatively, as shown in fig. 2, the adjusting assembly 1 comprises: the driving device comprises a first motor 111, a gear 113, a first coupler 114, a first screw 115, a first screw slider 116, a first connecting rod 117, a second motor 121, a second coupler 124, a second screw 125, a second screw slider 126, a second connecting rod 127, a third rotating shaft 132, a ratchet wheel 133, a third coupler 134, a third screw 135, a third screw slider 136, a third connecting rod 137 and a belt 141.
One end of the first lead screw 115 is connected with the first rotating shaft 112 of the first motor 111 through a first coupling 114, and rotates with the rotation of the first rotating shaft 112 of the first motor 111; the first lead screw slider 116 is disposed on the first lead screw 115, and slides up and down on the first lead screw 115 with the rotation of the first lead screw 115. By turning on the first motor 111 and adjusting the rotation direction of the first motor 111, the first motor 111 can drive the first rotation shaft 112 and the first lead screw 115 connected by the first coupler 114 to rotate, and the first lead screw slider 116 is internally provided with threads engaged with the first lead screw 115, so that the first lead screw slider 116 can slide up and down along with the rotation of the first lead screw 115, and further the height of the first lead screw slider 116 relative to the ground can be adjusted.
One end of the second lead screw 125 is connected to the second rotating shaft 122 of the second motor 121 through a second coupling 124, and rotates with the rotation of the second rotating shaft 122 of the second motor 121; the second lead screw slider 126 is disposed on the second lead screw 125, and slides up and down on the second lead screw 125 with the rotation of the second lead screw 125. By turning on the second motor 121, the rotation direction of the second motor 121 is adjusted, the second motor 121 can drive the second rotating shaft 122 and the second lead screw 125 connected through the second coupling 124 to rotate, and the second lead screw slider 126 is internally provided with threads engaged with the second lead screw 125, so that the second lead screw slider 126 can slide up and down along with the rotation of the second lead screw 125, and further the height of the second lead screw slider 126 relative to the ground can be adjusted.
One end of the third screw 135 is connected to the third rotating shaft 132 through a third coupling 134, and rotates with the rotation of the third rotating shaft 132; the third screw slider 136 is provided on the third screw 135, and slides up and down on the third screw 135 as the third screw 135 rotates. The gear 113 and the ratchet 133 can be driven by the belt 141 to form a driving structure, the rotation direction of the first motor 111 is adjusted by turning on the first motor 111, the first motor 111 drives the third rotating shaft 132 to rotate through the driving structure, the third rotating shaft 132 can drive the third screw rod 135 connected with the third rotating shaft 132 through the third coupling 134 to rotate, and the third screw rod slider 136 is internally provided with threads meshed with the third screw rod 135, so that the third screw rod slider 136 can slide up and down along with the rotation of the third screw rod 135, and further the height of the third screw rod slider 136 relative to the ground can be adjusted.
A gear 113 is provided on the first rotating shaft 112 of the first motor 111; the ratchet wheel 133 is disposed on the third rotating shaft 132, and the gear 113 and the ratchet wheel 133 are driven by the belt 141 to form a driving structure.
Through the matching of the gear 113 and the ratchet wheel 133, the gear 113 rotates along with the first rotating shaft to drive the belt to transmit, the ratchet wheel 133 rotates under the transmission of the belt, the rotation of the ratchet wheel 133 drives the third rotating shaft to rotate, the third screw rod 135 connected with the third rotating shaft 132 through the third coupling 134 rotates along with the rotation of the third rotating shaft, so that the internal thread of the third screw rod slider 136 is meshed with the external surface thread of the third screw rod 135, the vertical sliding of the third screw rod slider 136 is realized, the first motor 111 simultaneously drives the vertical sliding of the first screw rod slider and the third screw rod slider to reduce the number of motors, finally, two motors are used for realizing the control of the three screw rods, the device cost is reduced, and the efficiency of the height adjustment of the first screw rod slider and the third screw rod slider is improved.
The first screw rod sliding block 116, the second screw rod sliding block 126 and the third screw rod sliding block 136 are respectively and correspondingly provided with a first connecting rod 117, a second connecting rod 127 and a third connecting rod 137, and are connected with the base through the corresponding connecting rods. Therefore, as the heights of the first screw slide 116, the second screw slide 126 and the third screw slide 136 relative to the ground respectively change, the heights of the bases connected with the first screw slide, the second screw slide and the third screw slide also change relatively.
The gear and the ratchet can be driven by a belt, by turning on the first motor 111 and adjusting the rotation direction of the first motor 111, the first motor 111 can drive the first rotation shaft 112 and the gear 113 on the first rotation shaft 112 to rotate, so that the gear 113 drives the ratchet 133 to rotate through the connected belt 141, and the ratchet 133 drives the third rotation shaft 132 to rotate.
The second motor 121 can control the second lead screw slide block 126 to slide up and down, the first motor 111 can control the first lead screw slide block 116 to slide up and down, and the ratchet wheel 133 connected with the belt 141 can control the third lead screw slide block 136 to slide up and down; the ratchet wheel is a direction-changeable ratchet wheel, the state of the direction-changeable ratchet wheel comprises reverse tripping and forward tripping, a ratchet wheel pawl is hinged on a rocker, when the rocker swings clockwise, the driving pawl is inserted into the teeth of the ratchet wheel to push the ratchet wheel to rotate in the same direction, when the rocker swings counterclockwise, the pawl slides on the ratchet wheel, and the ratchet wheel stops rotating; when the rocker swings clockwise, the pawl slides on the ratchet wheel and the ratchet wheel stops rotating. Therefore, according to the difference of the ratchet states and the difference of the rotation directions of the first motor 111, the first motor can control the ratchet to rotate forward, reversely or not to rotate, so that the first motor 111 can control the first lead screw slider 116 and the third lead screw slider 136 simultaneously, or only control the first lead screw slider 116, so that the first motor can control the first lead screw slider 116 and the third lead screw slider 136 to be in different positions, and realize independent control, so that the first motor 111 and the second motor 112 can respectively control the positions of the first lead screw slider 116, the second lead screw slider 126 and the third lead screw slider 136, and realize accurate adjustment of the height and the angle of the base.
Optionally, the adjusting assembly 1 further comprises: an eccentric 123 and a shift lever 142;
the eccentric wheel 123 is arranged on the second rotating shaft 122 of the second motor 121, the eccentric wheel 123 and the ratchet wheel 133 are driven by the driving lever 142, so that the second motor 121 can control the ratchet wheel 133 through the driving lever 142, thereby changing the moving direction of the ratchet wheel 133, the rotating direction of the second motor 121 is adjusted by starting the second motor 121, the second motor 121 drives the second rotating shaft 122 and the eccentric wheel 123 on the second rotating shaft 122, the eccentric wheel 123 adjusts the moving direction of the ratchet wheel 133 through the connected driving lever 142, thereby enabling the first motor 111 to control the ratchet wheel 133 to rotate positively, negatively or not to rotate, enabling the third lead screw slider 136 to move up and down on the third lead screw 135, reaching an accurate target position, and realizing accurate and rapid adjustment of the third lead screw slider 136.
Optionally, the first motor 111 and the second motor 121 are both micro stepping motors, and the micro stepping motors are small in size, save space, and are more favorable for being placed in laser equipment without moving elements in the laser equipment; the vibration is small, the noise is low, and the vibration-proof and noise-proof device is placed in laser equipment to avoid influencing elements in the laser equipment.
Optionally, the shift lever 142 is an elastic shift lever, the length of the elastic shift lever is adjustable, and when the direction of the ratchet wheel is adjusted, the problem that the shift lever is too long or too short to adjust can be solved.
Optionally, the connecting rod that sets up between lead screw slider and the base can be spring hanger, and the couple part of spring hanger links to each other with the fixed orifices that sets up on the base, and at the in-process that adjusting part adjusted one of them lead screw slider alone, adopt spring hanger can avoid the connecting rod because length leads to the problem that lead screw slider height can't be adjusted inadequately, makes accommodation process more smooth, and the base moves steadily.
Fig. 3 is an exploded view of the power testing device of the laser device.
Optionally, the base 2 comprises a support tube 21 and a bottom sheet 22;
one end of the supporting tube 21 is fixed on the bottom sheet 22, and the other end of the supporting tube 21 is connected with the reflecting component 3;
a plurality of fixing holes 23 are formed in the bottom sheet 22, and each fixing hole is connected with a corresponding screw rod sliding block through a corresponding connecting rod;
the other ends of the connecting rods of the adjusting assembly 1, which are correspondingly connected with the first screw rod slide block 116, the second screw rod slide block 126 and the third screw rod slide block 136, are correspondingly connected with the fixing holes 23, so that the height or the angle of the negative can be changed along with the up-and-down sliding of the screw rod slide blocks.
Alternatively, the support tube 21 may be located in the center of the backsheet 22.
Alternatively, the shape of the chassis 22 may be circular, square or polygonal, and the shape of the chassis 22 is not limited in this embodiment, but the shape of the chassis 22 is a regular pattern for the sake of chassis stability.
Optionally, the reflection assembly 3 includes a reflection frame 31 and a support rod 32;
one end of the supporting rod 32 is fixed on the lower surface of the reflecting frame 31 and is used for supporting the reflecting frame 31;
the other end of the supporting rod 32 is sleeved in the other end of the supporting tube 21 of the base 2, a jackscrew 33 is arranged, and the length of the other end of the supporting rod sleeved in the other end of the supporting tube 21 of the base 2 can be adjusted through the jackscrew 33; thereby the height of the reflecting frame can be adjusted.
The reflection frame 31 includes a case 311 and an inclined plate 312, the case 311 is composed of three connected side surfaces and a bottom surface, the inclined plate 312 is disposed in the case, the top end of the inclined plate 312 is connected to the rear side surface of the case 311, and the bottom end of the inclined plate 312 is connected to the bottom surface of the case 311, that is, one side surface and the top surface of the case 311 are opened, so that the inclined plate 312 can be exposed.
In one embodiment, the inclined surface of the inclined supporting plate 312 may form an angle of 15 ° to 75 ° with the bottom surface of the box 311. For example, the inclined surface of the inclined plate 312 forms an angle of 30 °, 45 °, 50 °, or the like with the bottom surface of the case 311.
The inclined supporting plate 312 is provided with a groove for fixing the total reflection lens 5, namely, the total reflection lens 5 is arranged in the groove, the total reflection lens 5 is in an inclined state, when laser irradiates the total reflection lens 5, the reflection direction of the laser can be changed, so that the laser irradiates on the indicating lens, and the detection of the laser power is realized.
Optionally, the inclined supporting plate 312 includes thereon: at least one fixing washer, a plurality of fixing screws and a plurality of fixing washers, the fixing washer may be disposed between the all-mirror plate 5 and the groove for supporting, fixing and protecting the all-mirror plate. The fixing screws may be disposed around the grooves of the inclined supporting plate 312 for fixing the full-reflection lens to prevent the full-reflection lens from falling off, thereby ensuring stability and smoothness of the height and angle adjusting process. The fixing gasket can be arranged between the fixing screw and the inclined supporting plate and is used for fixing and protecting the full-reflection lens so as to prevent the fixing screw from damaging the full-reflection lens and cause scratches on the surface of the full-reflection lens or lead to the fragmentation of the full-reflection lens.
Optionally, the inclined supporting plate 312 includes at least three fixing screws and three fixing washers.
Optionally, the supporting rod 32 is located at the center of the lower surface of the reflection frame 31 to stably support the reflection frame, so that the height and angle of the reflection frame can be conveniently and accurately adjusted to avoid deviation.
The diameter of the support rod 32 is smaller than the inner diameter of the support tube 21 of the base 2, so that the support tube 21 is sleeved on the support rod 32.
The supporting rod 32 and the supporting tube 21 can also be fixed through a circular protruding buckle, a circular hole is formed in the supporting rod 32, the circular protruding buckle is fixed at the same time, a plurality of round holes are formed in the supporting tube and located at different heights, the round holes are vertically arranged, the size of each round hole corresponds to that of the circular protruding buckle on the supporting rod 32, and therefore the height of the reflecting frame can be adjusted quickly, accurately and conveniently through the supporting rod and the supporting tube.
Optionally, the probe holder assembly 4 includes: a plurality of struts 42 and a tray 41;
one end of the plurality of struts 42 is connected to the bottom surface of the tray 41 for supporting the tray;
the other ends of the plurality of supporting rods 42 are connected with the reflection frame 31 of the reflection assembly 3, specifically, the other ends of the supporting rods 42 are connected with the upper surface of the side surface of the box body 311 of the reflection frame 31, and holes for fixing are arranged at corresponding positions of the box body 311 of the reflection frame 31, so that the supporting rods 42 are fixed on the reflection frame 31.
Optionally, the connection mode of the supporting rod 42 and the reflection frame 31 at least includes one of the following: rivet connection, bolt connection, key pin connection, welding and bonding. When welding or bonding is adopted, the support rod 42 may be directly connected to the corresponding position of the box body 311 of the reflection frame 31.
Alternatively, a plurality of struts 42 are uniformly distributed below the tray 41 to achieve stable support of the tray 41.
Optionally, the probe holder assembly 4 includes at least three struts.
Alternatively, the shape of the tray 41 may be circular, square, triangular, etc., and the shape of the tray 41 is not limited in this embodiment, but the shape of the tray 41 is a regular figure in order to indicate the placement of the lenses and the stability of the chassis.
Optionally, the bottom of the tray 41 has a hole for allowing the laser to pass through the hole and irradiate the indicating lens 6; the size of the hole is smaller than that of the indicating lens, so that the indicating lens is prevented from falling from the hole; the shape of the hole may be circular, square, triangular, etc., and the shape of the hole is not limited in this embodiment, but the shape of the hole is a regular pattern in order that the laser can be stably and accurately irradiated onto the indication lens 6.
According to the embodiment of the invention, through the power testing device of the laser equipment, a mode that the adjusting component, the base, the reflecting component and the probe supporting component are vertically installed is adopted, and a mode of micro stepping motor control is adopted, so that multi-angle adjustment is conveniently carried out, the artificial influence on elements in the laser equipment is avoided, and the power testing device of the laser equipment is smaller and more flexible and is convenient to move and place. In the laser device, a laser is adjacent to a first lens of a beam expander, the beam expander needs to be moved for measurement in the conventional laser power test method, the laser device power test device provided by the embodiment of the invention can be placed between the laser and the beam expander, when the loss condition of an optical lens in a light path is detected, the laser device power test device only needs to be moved without moving the beam expander, and the laser device power test device is moved without changing the positions of elements in the laser device, so that the original light path of the laser device in actual use can be ensured not to deviate, the light path of the laser device is prevented from being debugged and calibrated again after the test is finished, and the laser power is measured quickly, accurately and without influence.
The following are embodiments of the method for testing the power of a laser device according to the present invention, and for details which are not described in detail therein, reference may be made to the above-described embodiments of the apparatus.
Fig. 4 shows a flowchart of an implementation of a method for testing power of a laser device according to an embodiment of the present invention, and for convenience of description, only a part related to the embodiment of the present invention is shown.
The power testing device for the laser equipment in any one of the embodiments is adopted, and a laser and a beam expanding lens in the laser equipment are also adopted, wherein the laser, the beam expanding lens and the reflecting frame are positioned at the same height. The height of the reflection assembly is adjusted through a jackscrew or a circular convex buckle on the laser equipment power testing device, so that the laser, the beam expander and the reflection frame are basically at the same height, and the laser power can be accurately measured through fine adjustment of the adjustment assembly subsequently. The laser device power test method is detailed as follows:
step 401, arranging a laser device power testing device between a laser and a beam expander, and adjusting the height of a reflection assembly to enable test laser of the laser to be reflected on an indication lens through a total reflection lens; and after the standard laser of the laser is stabilized, adjusting the height and the angle of the reflecting assembly, and determining the target test position of the standard laser reflected on the indicating lens through the total reflection lens.
The movement pattern of the adjustment assembly is as follows:
when the base is adjusted through the adjusting component, the forward rotation or the reverse rotation of the second motor can drive the elastic shifting rod for shifting the eccentric wheel in different directions, and the pawl direction of the ratchet wheel component is controlled through the elastic shifting rod, so that the first motor drives the third screw rod to move or the first motor moves independently. According to the states of the first motor, the second motor and the ratchet wheel, 10 different motion modes can be realized. The details are shown in the following table:
Figure BDA0003693922950000141
Figure BDA0003693922950000151
optionally, the initial positions of the first screw rod sliding block, the second screw rod sliding block and the third screw rod sliding block in the adjusting assembly are set to be at the lowest point or the highest point of the corresponding screw rod, so that one-time complete sliding of the screw rod sliding blocks on the screw rod can be realized in the subsequent fine adjustment process of the reflection assembly.
Adjusting the height and angle of the reflection assembly, and determining the target test position of the standard laser on the indication lens through the reflection of the total reflection lens, wherein the method comprises the following steps:
in the mode 1 or the mode 4, the first motor and the second motor are started simultaneously to drive the first screw rod slide block, the second screw rod slide block and the third screw rod slide block to slide once between the lowest point and the highest point of the corresponding screw rod, and the first motor and the second motor are closed; the power meter records the power value of the sliding block during sliding and determines the maximum power value as a first target value; and the first motor and the second motor are started simultaneously, and are closed when the power meter displays the first target value, and the current position of the third screw rod sliding block is determined to be the target position of the third screw rod sliding block.
Here, the first motor and the second motor are started simultaneously, so that the gear drives the ratchet wheel to rotate, the first screw rod slide block, the second screw rod slide block and the third screw rod slide block can slide on the corresponding screw rods simultaneously, and therefore the target position of the corresponding screw rod slide block can be determined according to the first target value displayed by the power meter. The approximate height and angle of the reflection assembly can be determined according to the positions of the three lead screw sliders, the positions of the corresponding second lead screw slider and the corresponding first lead screw slider are finely adjusted through the starting of the second motor and the first motor respectively, the optimal height and angle of the reflection assembly can be obtained, and the laser power measured by the power meter on the indication lens is the highest.
In a mode 9 or a mode 10, the second motor is started to drive the second screw rod sliding block to slide once between the lowest point and the highest point of the second screw rod, and the second motor is closed; the power meter records the power value of the second screw rod sliding block during sliding and determines the maximum power value as a second target value; and starting the second motor, closing the second motor when the power meter displays a second target value, and determining the current position of the second screw rod slide block as the target position of the second screw rod slide block.
The second motor is started independently, the second screw rod sliding block is adjusted independently, the height and the angle of the reflecting frame are finely adjusted on the original basis, and more laser is reflected on the indicating lens.
In a mode 9 or a mode 10, the second motor is started, the eccentric wheel rotates, the driving lever drives the ratchet wheel to be tripped, the rotation direction of the ratchet wheel is changed, and the second motor is turned off; the second motor is started to change the rotation direction of the ratchet wheel, so that the transmission mode of the gear and the ratchet wheel is disconnected, the first screw rod slide block is prevented from being adjusted, and meanwhile, the third screw rod slide block is driven to move through the transmission of the ratchet wheel, so that the first screw rod slide block is independently adjusted.
In a mode 6 or a mode 8, the first motor is started to drive the first screw rod sliding block to slide once between the lowest point and the highest point of the first screw rod, the first motor is closed, the power meter records the power value of the first screw rod sliding block during sliding, and the maximum power value is determined to be a third target value; and starting the first motor, closing the first motor when the power meter displays a third target value, and determining the current position of the first screw rod slide block as the target position of the first screw rod slide block.
The first motor is started independently, the first screw rod sliding block is adjusted independently, the height and the angle of the reflecting frame are finely adjusted on the original basis, more laser is reflected on the indicating lens, and the power value measured by the power meter is more accurate.
After the positions of the first screw rod sliding block, the second screw rod sliding block and the third screw rod sliding block are respectively determined, the positions of the corresponding total reflection lens and the indicating lens are also determined, and the position of the standard laser reflected on the indicating lens through the total reflection lens is the target test position.
Step 402, a power meter collects the power of standard laser reflected to an indication lens to obtain first laser energy data; and determining the laser power of the laser according to the first laser energy data.
Optionally, the power testing device of the laser device is disposed between the laser and the beam expander, so that the first laser energy data is the laser power of the laser, that is, the power of the laser that has not been processed by the beam expander.
And 403, setting the power testing device of the laser device behind the beam expander, re-executing the step of adjusting the height and the angle of the reflection assembly by the adjusting assembly, and determining second laser energy data by the power meter.
The laser equipment power testing device is arranged behind the beam expander, so that the second laser energy data is the laser power of the laser after passing through the beam expander.
And step 404, obtaining laser loss data of the beam expander according to the first laser energy data and the second laser energy data.
And obtaining laser loss data of the beam expander according to the laser power of the laser before passing through the beam expander and the laser power after passing through the beam expander.
Optionally, obtaining laser loss data of the beam expander according to the first laser energy data and the second laser energy data includes:
and calculating the difference value between the first laser energy data and the second laser energy data, and taking the difference value as the laser loss data of the beam expander, namely, the difference value between the laser power before the laser passes through the beam expander and the laser power after the laser passes through the beam expander, and taking the difference value as the laser loss data of the beam expander.
Alternatively, the above test method may also be used to test laser loss data of other optical lenses in the laser device.
According to the embodiment of the invention, by adopting the power testing method of the laser equipment and the power testing device of the laser equipment provided by the embodiment, the micro stepping motor is used for multi-angle adjustment, so that the artificial influence on elements in the laser equipment is avoided; in the laser equipment, a laser is adjacent to a first lens of a beam expander, in the existing laser power test method, the beam expander needs to be moved for measurement, in the laser equipment power test method, only a laser equipment power test device needs to be moved, the beam expander does not need to be moved, and the position of an element in the laser equipment is not changed due to the fact that the laser equipment power test device is moved.
It should be understood that, the sequence numbers of the steps in the foregoing embodiments do not imply an execution sequence, and the execution sequence of each process should be determined by its function and inherent logic, and should not constitute any limitation to the implementation process of the embodiments of the present invention.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention.

Claims (10)

1. A power testing apparatus for a laser device, comprising: the device comprises a base, an adjusting assembly, a reflecting assembly, a probe holder assembly, a total reflection lens, an indicating lens and a power meter;
the adjusting component is arranged below the base and used for supporting the base and adjusting the height and the angle of the base;
the reflection assembly is fixedly arranged on the base and changes along with the change of the height and the angle of the base;
the probe support assembly is fixedly arranged on the reflection assembly and changes along with the change of the height and the angle of the reflection assembly;
the total reflection lens is arranged in the reflection assembly, the indication lens is positioned on the probe holder assembly, and the power meter is arranged above the indication lens;
when laser emitted by the laser equipment irradiates the total reflection lens, the laser is reflected to the indicating lens, and the power meter measures the power of the laser on the indicating lens.
2. The laser device power test apparatus of claim 1, wherein the adjustment assembly comprises: the device comprises a first motor, a second motor, a first screw rod, a second screw rod, a third screw rod, a first screw rod sliding block, a second screw rod sliding block, a third screw rod sliding block, a first coupler, a second coupler, a third coupler, a gear, a ratchet wheel, a third rotating shaft, a connecting rod and a belt;
one end of the first screw rod is connected with a first rotating shaft of the first motor through the first coupler and rotates along with the rotation of the first rotating shaft of the first motor; the first screw rod sliding block is arranged on the first screw rod and slides up and down on the first screw rod along with the rotation of the first screw rod;
one end of the second screw rod is connected with a second rotating shaft of the second motor through the second coupling and rotates along with the rotation of the second rotating shaft of the second motor; the second screw rod sliding block is arranged on the second screw rod and slides up and down on the second screw rod along with the rotation of the second screw rod;
one end of the third screw rod is connected with the third rotating shaft through the third coupler and rotates along with the rotation of the third rotating shaft; the third screw rod sliding block is arranged on the third screw rod and slides up and down on the third screw rod along with the rotation of the third screw rod;
the gear is arranged on a first rotating shaft of the first motor; the ratchet wheel is arranged on the third rotating shaft, and the gear and the ratchet wheel are driven by the belt;
and the first screw rod sliding block, the second screw rod sliding block and the third screw rod sliding block are respectively provided with a connecting rod and are connected with the base through corresponding connecting rods.
3. The laser device power testing apparatus of claim 2, wherein the adjustment assembly further comprises: an eccentric wheel and a deflector rod;
the eccentric wheel is arranged on a second rotating shaft of the second motor, and the eccentric wheel and the ratchet wheel are driven through the driving lever.
4. The power testing device of claim 3, wherein the first motor and the second motor are both micro stepper motors;
the deflector rod is an elastic deflector rod.
5. The power testing apparatus of any one of claims 2-4, wherein the base comprises a support tube and a bottom plate;
one end of the supporting tube is fixed on the bottom sheet, and the other end of the supporting tube is connected with the reflecting component;
a plurality of fixing holes are formed in the bottom plate, and each fixing hole is connected with the corresponding screw rod sliding block through the corresponding connecting rod.
6. The power testing apparatus of claim 5, wherein the reflection assembly comprises a reflection frame and a support rod;
one end of the supporting rod is fixed on the lower surface of the reflecting frame and used for supporting the reflecting frame; the other end of the supporting rod is sleeved in the other end of the supporting tube of the base, a jackscrew is arranged, and the length of the other end of the supporting rod sleeved in the other end of the supporting tube of the base is adjusted through the jackscrew;
the reflection frame comprises a box body and an inclined supporting plate, the box body consists of three connected side surfaces and a bottom surface, the inclined supporting plate is arranged in the box body, the top end of the inclined supporting plate is connected with the rear side surface of the box body, and the bottom end of the inclined supporting plate is connected with the bottom surface of the box body;
the inclined supporting plate is provided with a groove for fixing the all-lens-reflecting plate.
7. The laser device power test apparatus of claim 6, wherein the probe holder assembly comprises: a plurality of struts and trays;
one end of each support rod is connected with the bottom surface of the tray and used for supporting the tray;
the other ends of the supporting rods are connected with the top surface of the reflecting frame of the reflecting assembly.
8. A method for testing power of a laser device, which is characterized in that the laser device power testing apparatus of any one of claims 1 to 7 is used, and a laser and a beam expander are further used, wherein the laser, the beam expander and a reflection frame are at the same height, and the method for testing power of a laser device comprises:
the adjusting assembly is used for adjusting the height of the reflecting assembly when the laser equipment power testing device is arranged between the laser and the beam expanding lens, so that the testing laser of the laser is reflected on the indicating lens through the total reflection lens; after the standard laser of the laser is stabilized, adjusting the height and the angle of the reflection assembly, and determining the target test position of the standard laser on the indication lens through the reflection of the total reflection lens;
the power meter collects the power of the standard laser reflected to the indicating lens to obtain first laser energy data; determining the laser power of the laser according to the first laser energy data;
the adjusting component is used for re-executing the step of adjusting the height and the angle of the reflecting component by the adjusting component when the laser equipment power testing device is positioned behind the beam expander, and the power meter determines second laser energy data; and obtaining laser loss data of the beam expander according to the first laser energy data and the second laser energy data.
9. The power test method of the laser device according to claim 8, wherein the initial positions of the first lead screw slide block, the second lead screw slide block and the third lead screw slide block are set to be at the lowest point or the highest point of the corresponding lead screw;
the adjusting the height and the angle of the reflection assembly and the determining the target test position of the standard laser reflected on the indicating lens through the total reflection lens comprise:
the first motor and the second motor are started simultaneously to drive the first screw rod sliding block, the second screw rod sliding block and the third screw rod sliding block to slide once between the lowest point and the highest point of the corresponding screw rods, and the first motor and the second motor are closed; the power meter records the power value of the sliding block during sliding and determines the maximum power value as a first target value; the first motor and the second motor are started simultaneously, and are closed when the power meter displays the first target value, and the current position of the third screw rod slide block is determined to be the target position of the third screw rod slide block;
the second motor is started to drive the second screw rod sliding block to slide once between the lowest point and the highest point of the second screw rod, and the second motor is closed; the power meter records the power value of the second screw rod sliding block during sliding and determines the maximum power value as a second target value; the second motor is started and is closed when the power meter displays the second target value, and the current position of the second screw rod slide block is determined to be the target position of the second screw rod slide block;
the second motor is started, the eccentric wheel rotates, the driving lever drives the ratchet wheel to be tripped, the rotation direction of the ratchet wheel is changed, and the second motor is turned off; the first motor is started to drive the first screw rod sliding block to slide once between the lowest point and the highest point of the first screw rod, the first motor is closed, the power meter records the power value of the first screw rod sliding block during sliding, and the maximum power value is determined to be a third target value; the first motor is started and is closed when the power meter displays the third target value, and the current position of the first screw rod slide block is determined to be the target position of the first screw rod slide block;
and the position of the standard laser reflected on the indicating lens through the total reflection lens is the target test position.
10. The method for power testing of a laser device according to claim 9, wherein the obtaining laser loss data of the beam expander according to the first laser energy data and the second laser energy data comprises:
and calculating a difference value of the first laser energy data and the second laser energy data, and taking the difference value as laser loss data of the beam expander.
CN202210673221.XA 2022-06-14 2022-06-14 Laser equipment power testing device and laser equipment power testing method Pending CN115265771A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116499586A (en) * 2023-06-28 2023-07-28 成都量芯集成科技有限公司 Laser power measuring device and measuring method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116499586A (en) * 2023-06-28 2023-07-28 成都量芯集成科技有限公司 Laser power measuring device and measuring method thereof
CN116499586B (en) * 2023-06-28 2023-09-15 成都量芯集成科技有限公司 Laser power measuring device and measuring method thereof

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