CN115258569A

CN115258569A - Double-frame feeding device and die bonder

Info

Publication number: CN115258569A
Application number: CN202210983062.3A
Authority: CN
Inventors: 马骋; 吴兴防
Original assignee: Shandong Yuzheng Automation Technology Co ltd
Current assignee: Shandong Yuzheng Automation Technology Co ltd
Priority date: 2022-08-16
Filing date: 2022-08-16
Publication date: 2022-11-01

Abstract

The invention discloses a double-frame feeding device and a die bonding device, wherein the double-frame feeding device comprises a frame conveying device and a feeding device; the feeding device is used for transferring the two frame units to the frame conveying device in a state that the PAD parts are close to each other. It both can once only send into two frame unit the next device in solid brilliant equipment simultaneously through the charging equipment, in order to improve UPH, can rectify two frame unit's relative position again through the charging equipment, make two frame unit shift to frame conveyor with the gesture that PAD portion is close to each other on, make the distance of two PAD portions reduce, when being convenient for follow-up equipment heats two frame unit, the difficult loss of heat, the controllability is strong, thereby improve the stability and stability that the wafer nation was regularly, under the prerequisite that does not need extra regulation frame unit position, do not influence under the prerequisite of production efficiency promptly, make production stability obtain improving. To sum up, this application possesses the advantage that production efficiency is high and production stability is high.

Description

Double-frame feeding device and die bonder

Technical Field

The invention relates to the technical field of die bonding, in particular to a double-frame feeding device and die bonding equipment.

Background

Die bonding is a process in which a wafer is bonded to a PAD area (PAD area) on a frame by glue or wire bonding to form a thermal or electrical path and provide conditions for subsequent wire bonding. In the die bonding process, a feeding device is generally required to separate and feed multiple layers of stacked frames, and a subsequent frame pushing structure is required to push the frames into a die bonding station, so that the die bonding device bonds wafers with glue or welds wires on a PAD area of the frames, currently, a rotary suction feeding mode (rotary suction of a suction nozzle rod assembly provided with a suction cup) is mainly adopted in the die bonding device to realize feeding, and a horizontal pushing mode is adopted to push the wafers onto a track of the subsequent die bonding station.

For conventional die bonding equipment, a single frame feeding mode is mainly adopted, namely a feeding structure takes out frames from a storage bin one by one and pushes the single frame into a die bonding station through a frame pushing structure, and obviously, the production efficiency of the mode is low; in order to improve the circulation efficiency, a common improvement means is to feed two frames into the die bonder at a time.

Generally, as shown in fig. 1, the PAD portion 011 of the frame unit 010 is not located at the middle of the frame unit 010 but at one end of the frame unit 010. When the two frame units 010 are fed into the die bonding apparatus, the placing posture of the frame units 010 is not changed in a targeted manner to adjust the spacing distance L between the two PAD portions 011, so that when the two frame units 010 are fed into the die bonding apparatus, the two PAD portions 011 are located at the left end of the respective frame units 010 (or at the right end of the respective frame units 010) at the same time, and since a certain spacing space is inevitably provided between the two frame units 010, the spacing distance L between the two PAD portions 011 is inevitably longer than the length of one frame unit 010.

In the subsequent process, the two frame units 010 are synchronously fed into the temperature control device for heating, specifically, the two PAD portions 011 are mainly heated. Generally, the heating area within the temperature control device is continuous, and since the spacing distance L between the two PAD sections 011 is inevitably longer than the length of one frame unit 010, the width of the heating area within the temperature control device must also be longer than the length of one frame unit 010. Obviously, such a heating region is wide, heat is easy to dissipate, controllability is poor, and finally, the temperature stability of the wafer bonding time is poor, which affects the production stability of the die bonding equipment.

Namely, the die bonder in the prior art has the defect that the improvement of production efficiency and the improvement of production stability are incompatible.

Disclosure of Invention

The invention aims to provide a double-frame feeding device and a die bonding device, and solves the problem that the die bonding device in the prior art is incompatible with the improvement of production efficiency and the improvement of production stability.

In order to achieve the purpose, the invention adopts the following technical scheme:

a double-frame feeding device comprises a frame conveying device and feeding equipment;

the feeding device is used for transferring the two frame units to the frame conveying device in a state that the PAD parts are close to each other.

Optionally, the feeding equipment comprises a first feeding device and a second feeding device which are respectively arranged at two sides of the frame conveying device, and the frame conveying device is provided with a first material receiving station and a second material receiving station which are transversely arranged in parallel; frame storage bin devices are respectively arranged on two sides of the frame conveying device;

the first feeding device is used for moving the frame units in the frame material storage bin device on the same side to the second material receiving station, so that the PAD part of the frame unit on the second material receiving station is arranged close to the first material receiving station;

the second feeding device is used for moving the frame units in the frame material storage bin device on the same side to the first material receiving station, so that the PAD part of the frame unit on the first material receiving station is arranged close to the second material receiving station.

Optionally, the first feeding device comprises a first rotating device, and a rotating shaft of the first rotating device is fixedly connected with a first frame carrying device;

the second feeding device comprises a second rotating device, and a rotating shaft of the second rotating device is fixedly connected with a second frame carrying device;

the frame conveying device is provided with a first accommodating groove corresponding to the position of the first frame conveying device, and the frame conveying device is provided with a second accommodating groove corresponding to the position of the second frame conveying device.

Optionally, the first accommodating groove is formed in the bottom side of the second material receiving station, and the second material receiving station is formed in one side of the first material receiving station, which is far away from the first material loading device;

the second accommodating groove is formed in the bottom side of the first material receiving station, and the first material receiving station is arranged on one side, away from the second feeding device, of the second material receiving station.

Optionally, the frame conveying device further comprises a base, and the frame conveying device is mounted on the base; the frame storage bin device is obliquely arranged relative to the frame conveying device, and one end, far away from the frame conveying device, of the frame storage bin device is obliquely arranged towards the direction close to the base.

Optionally, the frame storage bin device comprises a support plate, a first feeding motor, a first synchronous belt assembly and a second synchronous belt assembly are mounted on the support plate, the first feeding motor drives the second synchronous belt assembly to rotate through the first synchronous belt assembly, and the second synchronous belt assembly is obliquely arranged relative to the frame conveying device;

and a frame push plate is installed on the moving end of the second synchronous belt component, and frame width limiting plates are installed on two sides of the frame push plate by the supporting plates.

Optionally, the first frame carrying device and the second frame carrying device both comprise a rotating arm, the rotating arm is fixedly connected with the rotating shaft, the tail end of the rotating arm is connected with a suction nozzle rod, a pipe joint and a vacuum chuck are connected to the suction nozzle rod, and the pipe joint is communicated with the vacuum chuck through the suction nozzle rod.

Optionally, the frame conveying device includes a conveying track and a pushing-away device, and the first accommodating groove and the second accommodating groove are formed on the conveying track; the pushing end of the pushing-off device can move in the first accommodating groove and the second accommodating groove and protrudes out of the conveying track so as to push off the frame unit.

Optionally, the first frame handling device and the second frame handling device each include a rotating arm;

the conveying track comprises a first frame supporting strip, a second frame supporting strip and a third frame supporting strip which are connected in sequence;

one side of the first frame supporting strip is connected with a first right supporting strip, and the other side of the first frame supporting strip is connected with a first left supporting strip; one side of the third frame supporting strip is connected with a second right supporting strip, and the other side of the third frame supporting strip is connected with a second left supporting strip;

first gaps for the rotating arm of the first frame carrying device to enter are respectively reserved between the first right supporting bar and the second right supporting bar and between the first frame supporting bar and the second frame supporting bar;

and second gaps for the rotating arm of the second frame carrying device to enter are reserved between the first left supporting strip and the second left supporting strip and between the second frame supporting strip and the third frame supporting strip.

A die bonding device comprises a die bonding device and the double-frame feeding device, wherein the double-frame feeding device is used for feeding frame units into the die bonding device.

Compared with the prior art, the invention has the following beneficial effects:

when the double-frame feeding device and the die bonding equipment provided by the invention work, the two frame units can be simultaneously fed into the next device in the die bonding equipment through the feeding equipment, and the relative positions of the two frame units can be corrected through the feeding equipment, so that the two frame units are transferred onto the frame conveying device in a posture that the PAD parts are close to each other, the distance between the two PAD parts is reduced, the width of a heating region is narrow, the heat is not easy to escape when the two frame units are heated by subsequent equipment, the controllability is strong, the stability of the wafer side is improved, and the production stability is improved on the premise that the positions of the frame units do not need to be additionally adjusted, namely the production efficiency is not influenced. In conclusion, the double-frame feeding device and the die bonder have the advantages of high production efficiency and high production stability.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.

The structure, proportion, size and the like shown in the drawings are only used for matching with the content disclosed in the specification, so that the person skilled in the art can understand and read the description, and the description is not used for limiting the limit condition of the implementation of the invention, so the method has no technical essence, and any structural modification, proportion relation change or size adjustment still falls within the scope of the technical content disclosed by the invention without affecting the effect and the achievable purpose of the invention.

FIG. 1 is a schematic diagram of the operation principle of a die bonding apparatus in the background art;

fig. 2 is a schematic overall structure diagram of a double-frame loading device according to an embodiment of the present invention;

fig. 3 is a schematic top view of a dual-frame loading device according to an embodiment of the present invention;

fig. 4 is a schematic front view of a frame storage bin device according to an embodiment of the present invention;

FIG. 5 is a schematic top view of a frame storage bin device according to an embodiment of the present invention;

fig. 6 is a schematic front view of a first feeding device according to an embodiment of the present invention;

fig. 7 is a schematic top view of a first loading device according to an embodiment of the present invention;

FIG. 8 is a schematic top view of a conveying track according to an embodiment of the present invention;

fig. 9 is a schematic front view of a push-off device according to an embodiment of the present invention;

fig. 10 is a schematic top view of a push-off device according to an embodiment of the present invention;

FIG. 11 is an enlarged view of a portion of FIG. 3 at A;

fig. 12 is a partial enlarged structural view at B of fig. 3.

Illustration of the drawings: 010. a frame unit; 011. a PAD section;

100. a frame conveyance device; 110. a first material receiving station; 120. a second material receiving station; 200. a frame storage bin device; 201. a support plate; 202. a first feeding motor; 203. a first timing belt assembly; 204. a second timing belt assembly; 205. a frame push plate; 206. a frame width limiting plate; 207. a material storage guide rail; 208. a first photoelectric unit; 210. a zero point detection unit; 211. a second photoelectric switch;

300. a first feeding device; 301. a rotating shaft; 302. a rotating arm; 303. a suction nozzle rod; 304. a pipe joint; 305. a vacuum chuck; 306. a bearing; 307. a feeding frame; 308. a second feeding motor; 309. A feeding synchronous belt; 310. a feeding synchronous wheel; 400. a second feeding device;

500. a conveying track; 501. a first accommodating groove; 502. a second accommodating groove; 511. a first frame support bar; 512. a second frame support bar; 513. a third frame support bar; 514. a first right support bar; 515. A first left support bar; 516. a second right support bar; 517. a second left support bar; 518. a first gap; 519. a second gap; 520. detecting an optical fiber;

600. a push-off device; 601. a lifting cylinder; 602. a push pin adjustment member; 603. a frame push pin; 604. Pushing away the guide rail; 605. a push-off motor; 606. a T-shaped seat; 607. pushing away the synchronous belt; 700. a base.

Detailed Description

In order to make the objects, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the embodiments described below are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. It should be noted that when one component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present.

The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.

Referring to fig. 2 to 12, fig. 2 is a schematic overall structure diagram of a dual-frame loading device according to an embodiment of the present invention, fig. 3 is a schematic top-view structure diagram of the dual-frame loading device according to the embodiment of the present invention, fig. 4 is a schematic front-view structure diagram of a frame storage bin device according to the embodiment of the present invention, fig. 5 is a schematic top-view structure diagram of the frame storage bin device according to the embodiment of the present invention, fig. 6 is a schematic front-view structure diagram of a first loading device according to the embodiment of the present invention, fig. 7 is a schematic top-view structure diagram of the first loading device according to the embodiment of the present invention, fig. 8 is a schematic top-view structure diagram of a conveying track according to the embodiment of the present invention, fig. 9 is a schematic front-view structure diagram of a push-off device according to the embodiment of the present invention, and fig. 10 is a schematic top-view structure diagram of the push-off device according to the embodiment of the present invention; fig. 11 is a partial enlarged structural view at a point a in fig. 3, and fig. 12 is a partial enlarged structural view at B in fig. 3.

Example one

The double-frame feeding device provided by the embodiment of the invention is applied to die bonding equipment and is mainly used for feeding the frame units 010, and the structure of the double-frame feeding device is improved, so that the double-frame feeding device is reasonable in structure and compact in structure, the two frame units 010 can be simultaneously conveyed at one time, the conveying efficiency is greatly improved, the UPH of the equipment is improved, the structure is precise, the operation is stable, and the efficiency is higher.

The double-frame feeding device of the embodiment comprises a frame conveying device 100 and feeding equipment; the feeding apparatus is used to transfer the two frame units 010 onto the frame conveyance device 100 in a posture in which the PAD portions 011 approach each other. Specifically, during operation, the double-frame feeding device can simultaneously feed the two frame units 010 into the next device (for example, a bonding device) in the die bonder through the feeding device, and can correct the relative positions of the two frame units 010 through the feeding device, so that the two frame units 010 are transferred to the frame conveying device 100 in a mutually close posture of the PAD portions 011, the distance between the two PAD portions 011 is reduced, the width of a heating region is narrow, when the two frame units 010 are heated by subsequent equipment, heat is not easy to escape, and the controllability is strong, so that the stability of wafer bonding timing is improved, on the premise that the positions of the frame units 010 are not required to be additionally adjusted, namely, the production efficiency is not influenced, and the production stability is improved. To sum up, this two frame loading attachment possess the high and high advantage of production stability of production efficiency.

Specifically, as shown in fig. 2 to fig. 3, the double-frame loading device of the present embodiment includes a base 700 and a frame conveying device 100 installed on the base 700, wherein the frame conveying device 100 is provided with a first material receiving station 110 and a second material receiving station 120 which are laterally arranged in parallel; frame storage bin devices 200 are respectively arranged on two sides of the frame conveying device 100; the frame conveying device 100 is used for conveying the frame units 010 at the first material receiving station 110 and the second material receiving station 120 to a next device (for example, a bonding device) in the die bonder, a plurality of frame units 010 are stored in the frame storage bin device 200, and it should be noted that, for the frame storage bin device 200, the frame units 010 are arranged on the left side or the right side of the frame conveying device 100, and the positions of the frame units 010 relative to the frame storage bin device 200 are not changed, so that a worker can conveniently and uniformly place the frame units 010 in the frame storage bin device 200, the operation difficulty is reduced, and the material loading efficiency is improved.

The feeding equipment comprises a first feeding device 300 and a second feeding device 400 which are respectively arranged at two sides of the frame conveying device 100, wherein the first feeding device 300 is used for moving the frame unit 010 in the frame storage bin device 200 at the same side to the second material receiving station 120, so that the PAD part 011 of the frame unit 010 at the second material receiving station 120 is arranged close to the first material receiving station 110; the second feeding device 400 is configured to move the frame unit 010 in the frame stock bin device 200 on the same side to the first material receiving station 110, so that the PAD portion 011 of the frame unit 010 on the first material receiving station 110 is disposed close to the second material receiving station 120.

Specifically, during operation, the first feeding device 300 moves the frame unit 010 in the frame storage bin device 200 on the same side to the second receiving station 120, and the second feeding device 400 moves the frame unit 010 in the frame storage bin device 200 on the same side to the first receiving station 110, so that the frame units 010 on the two sides can be simultaneously sucked and moved to the frame conveying device 100, and the frame conveying device has the advantage of high production efficiency. Meanwhile, since the frame stocker devices 200 are respectively disposed at both sides of the frame conveying device 100, the frame units 010 corresponding to both sides are symmetrically disposed with the frame conveying device 100 as a center; therefore, after the frame units 010 are transported by the loading device and moved to the frame conveying device 100, the two frame units 010 are still symmetrically arranged, so that the distance between the two PAD portions 011 is reduced;

for example, as shown in fig. 11, the PAD portions 011 of the left frame unit 010 are disposed from left to right toward the frame conveying device 100, and as shown in fig. 12, the PAD portions 011 of the right frame unit 010 are disposed from right to left toward the frame conveying device 100, that is, the left and right frame units 010 are disposed symmetrically about the center line of the frame conveying device 100; after the action of the feeding device, as shown in the enlarged view of fig. 3, the frame unit 010 originally located on the left side is located at the second material receiving station 120, the PAD portion 011 thereof faces the first material receiving station 110, the frame unit 010 originally located on the right side is located at the first material receiving station 110, the PAD portion 011 thereof faces the second material receiving station 120, at this time, the two frame units 010 are still symmetrically arranged with the center line of the frame conveying device 100, that is, the respective PAD portions 011 are arranged close to each other, so that the distance L between the two PAD portions 011 is far smaller than the width of the frame unit 010; therefore, the width of the heating area is narrow due to the arrangement, when the follow-up equipment heats the two frame units 010, the heat is not easy to dissipate, the controllability is high, the stability and the stability of the wafer nation are improved, on the premise that the position of the frame unit 010 does not need to be additionally adjusted, the rotating structure does not need to be additionally arranged to adjust the rotating angle of one of the frame units 010, namely, on the premise that the production efficiency is not influenced, and the production stability is improved. In conclusion, the double-frame feeding device and the die bonding equipment have the advantages of high production efficiency and high production stability.

In one embodiment, as shown in fig. 2, 3, 6 and 7, the first feeding device 300 includes a first rotating device, a rotating shaft 301 of which is fixedly connected with a first frame conveying device; the second feeding device 400 comprises a second rotating device, and a second frame carrying device is fixedly connected to a rotating shaft 301 of the second rotating device; as shown in fig. 8, the frame conveying device 100 is provided with a first receiving slot 501 corresponding to the position of the first frame conveying device, and the frame conveying device 100 is provided with a second receiving slot 502 corresponding to the position of the second frame conveying device. In this embodiment, the frame unit 010 is turned over from the frame storage bin device 200 to the material receiving station corresponding to the frame conveying device 100 by rotating around the rotation shaft 301, and the frame conveying device can be compactly disposed between the frame storage bin device 200 and the frame conveying device 100 by the rotation device and the accommodation groove, so that the structure of the double-frame feeding device is more compact.

In other alternative embodiments, the first loading device 300 and the second loading device 400 may be linear motor modules disposed on the top of the frame conveying device 100, and moving ends of the linear motor modules are configured with clamping jaws to clamp the frame unit 010 from the frame storage bin device 200 to the frame conveying device 100 from above.

Further, as shown in fig. 8, the first receiving groove 501 is disposed at a bottom side of the second receiving station 120, and the second receiving station 120 is disposed at a side of the first receiving station 110 away from the first loading device 300; the second receiving groove 502 is disposed at a bottom side of the first receiving station 110, and the first receiving station 110 is disposed at a side of the second receiving station 120 away from the second loading device 400. It should be understood that, for the left frame unit 010, after being gripped by the first feeding device 300, it passes through the first receiving station 110 by taking the position of the rotating shaft 301 as the center, and finally falls into the second receiving station 120; similarly, for the frame unit 010 on the right side, after being gripped by the second feeding device 400, the frame unit passes through the second material receiving station 120 by taking the rotation axis 301 as the center, and finally falls into the first material receiving station 110; that is, the two frame units 010 are arranged in a staggered manner in space, so that the structure is more compact; meanwhile, for the left frame unit 010, the corresponding rotating arm 302 is extended, the length of the rotating arm 302 is at least greater than the length from the rotating shaft 301 to the first material receiving station 110, when the first frame carrying device clamps the frame unit 010 from the frame storage bin device 200, the distance from the first frame carrying device corresponding to the first frame carrying device to the tail end (right tail end) of the frame storage bin device 200 is increased, that is, the vacuum chuck 305 can keep a proper distance from the right tail end of the synchronous belt of the second synchronous belt assembly 204, that is, the loading position of the frame unit 010 in the synchronous belt does not need to be too close to the right tail end of the synchronous belt, so that the situation that the frame unit 010 slides from the synchronous belt under the action of inertia is avoided.

Further, as shown in fig. 6, the frame magazine apparatus 200 is disposed to be inclined with respect to the frame transfer apparatus 100, and an end of the frame magazine apparatus 200, which is far from the frame transfer apparatus 100, is disposed to be inclined toward the base 700. Through the arrangement, the floor area of the double-frame feeding device is further reduced.

Further, as shown in fig. 4 and 5, the frame storage bin device 200 includes a supporting plate 201, a first feeding motor 202, a first synchronous belt assembly 203 and a second synchronous belt assembly 204 are mounted on the supporting plate 201, the first feeding motor 202 drives the second synchronous belt assembly 204 to rotate through the first synchronous belt assembly 203, and the second synchronous belt assembly 204 is disposed obliquely with respect to the frame conveying device 100; a frame push plate 205 is mounted on the moving end of the second timing belt assembly 204, and frame width limiting plates 206 are mounted on both sides of the frame push plate 205 of the support plate 201. The synchronous belt assemblies respectively comprise two synchronous wheels and a synchronous belt sleeved on the synchronous wheels, a material storage guide rail 207 is arranged on the supporting plate 201, the frame push plate 205 is connected with the material storage guide rail 207 in a sliding manner, and the right tail end of the material storage guide rail 207 is also provided with a first photoelectric unit 208 for detecting whether a frame unit 010 exists in the frame material storage bin device 200; the end of the frame push plate 205 away from the first photoelectric unit 208 is provided with a zero point detection unit 210 and a second photoelectric switch 211, and the zero point detection unit 210 is used for triggering the second photoelectric switch 211 to correct the position of the frame push plate 205.

Further, as shown in fig. 6 and 7, each of the first frame conveying device and the second frame conveying device includes a rotating arm 302, the rotating arm 302 is fixedly connected to a rotating shaft 301, a nozzle rod 303 is connected to a terminal of the rotating arm 302, a pipe joint 304 and a vacuum chuck 305 are connected to the nozzle rod 303, and the pipe joint 304 is communicated with the vacuum chuck 305 through the nozzle rod 303. Wherein, the rotating shaft 301 is rotatably connected with the feeding frame 307 through a bearing 306; the first rotating device and the second rotating device both comprise a rotating shaft 301, a second feeding motor 308 is mounted on the feeding frame 307, and the second feeding motor 308 drives the rotating shaft 301 to rotate through a feeding synchronizing wheel 310 and a feeding synchronizing belt 309.

Further, as shown in fig. 2, fig. 3, and fig. 8 to fig. 10, the frame conveying device 100 includes a conveying rail 500 and a push-off device 600, wherein the first receiving groove 501 and the second receiving groove 502 are formed on the conveying rail 500; the pushing end of the pushing-away device 600 can move in the first receiving groove 501 and the second receiving groove 502, and protrudes out of the conveying track 500 to push away the frame unit 010, and more specifically, to push the frame unit 010 into a next device in the die bonder.

The conveying rail 500 includes a first frame supporting bar 511, a second frame supporting bar 512 and a third frame supporting bar 513 connected in sequence; one side of the first frame support bar 511 is connected with a first right support bar 514, and the other side of the first frame support bar 511 is connected with a first left support bar 515; one side of the third frame support bar 513 is connected with a second right support bar 516, and the other side of the third frame support bar 513 is connected with a second left support bar 517; first gaps 518 for the rotating arm 302 of the first frame handling device to enter are respectively reserved between the first right supporting bar 514 and the second right supporting bar 516 and between the first frame supporting bar 511 and the second frame supporting bar 512; second gaps 519 for the rotating arm 302 of the second frame handling apparatus to enter are left between the first left supporting bar 515 and the second left supporting bar 517 and between the second frame supporting bar 512 and the third frame supporting bar 513. Meanwhile, one side of the third frame support bar 513 is further provided with an optical fiber detection 520, and the optical fiber detection 520 is used for judging whether the frame unit 010 completely enters the next device.

Further, as shown in fig. 9 to 10, the push-off device 600 includes a timing belt conveying device, a lifting cylinder 601 is mounted on a moving end of the timing belt conveying device, a push-pin adjusting member 602 is mounted on a lifting end of the lifting cylinder 601, a frame push pin 603 is connected to the push-pin adjusting member 602, and the frame push pin 603 can move relative to the push-pin adjusting member 602. It should be added that the push-off device 600 further includes a push-off guide rail 604, the lifting cylinder 601 can be slidably connected to the push-off guide rail 604 through a T-shaped seat 606, and the push-off motor 605 can slide through a push-off synchronous belt 607 and a synchronous wheel electric T-shaped seat 606 to drive the frame push pin 603, and further push the frame unit 010 through the frame push pin 603; the simultaneous push-off device 600 further includes a zero point detecting unit 210 and a second photoelectric switch 211 to correct the position of the frame push pin 603 to improve accuracy.

To sum up, the double-frame feeding device that this embodiment provided is rational in infrastructure, and compact structure can realize the material loading process of two single-row frames, possesses advantages such as precision height, stability, efficient.

Example two

The die bonding apparatus of this embodiment includes a die bonding device and the double-frame feeding device in the first embodiment, where the double-frame feeding device is used to feed the frame unit 010 into the die bonding device, and the die bonding device plays a role in bonding a wafer to the frame unit 010. The first embodiment describes a specific structure and technical effects of a double-frame feeding device, and the die bonder in the first embodiment uses the structure and has the technical effects as well.

In conclusion, the die bonder provided by the embodiment has the advantages of reasonable structure, compact structure, high precision, stability, high efficiency and the like, and can realize the feeding process of double single-row frames.

The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims

1. A double-frame feeding device is characterized by comprising a frame conveying device (100) and a feeding device;

the loading device is used for transferring two frame units (010) to the frame conveying device (100) in a state that a PAD portion (011) approaches each other.

2. The double-frame feeding device according to claim 1, wherein the feeding equipment comprises a first feeding device (300) and a second feeding device (400) which are respectively arranged at two sides of the frame conveying device (100), and a first material receiving station (110) and a second material receiving station (120) which are transversely arranged in parallel are arranged on the frame conveying device (100); frame storage bin devices (200) are respectively arranged on two sides of the frame conveying device (100);

the first feeding device (300) is used for moving a frame unit (010) in the frame storage bin device (200) on the same side to the second material receiving station (120), so that a PAD portion (011) of the frame unit (010) on the second material receiving station (120) is arranged close to the first material receiving station (110);

the second feeding device (400) is used for moving the frame unit (010) in the frame storage bin device (200) on the same side to the first material receiving station (110), so that a PAD portion (011) of the frame unit (010) on the first material receiving station (110) is arranged close to the second material receiving station (120).

3. A double-frame loading device according to claim 2, wherein said first loading device (300) comprises a first rotating device, a rotating shaft (301) of which is fixedly connected with a first frame handling device;

the second feeding device (400) comprises a second rotating device, and a rotating shaft (301) of the second rotating device is fixedly connected with a second frame carrying device;

the frame conveying device (100) is provided with a first accommodating groove (501) corresponding to the position of the first frame conveying device, and the frame conveying device (100) is provided with a second accommodating groove (502) corresponding to the position of the second frame conveying device.

4. A double-frame loading device according to claim 3, wherein the first receiving groove (501) is arranged at the bottom side of the second receiving station (120), and the second receiving station (120) is arranged at the side of the first receiving station (110) far away from the first loading device (300);

the second accommodating groove (502) is arranged at the bottom side of the first material receiving station (110), and the first material receiving station (110) is arranged at one side of the second material receiving station (120) far away from the second material loading device (400).

5. A double frame loading device according to claim 3, further comprising a base (700), said frame conveyor (100) being mounted on said base (700); the frame storage bin device (200) is obliquely arranged relative to the frame conveying device (100), and one end, far away from the frame conveying device (100), of the frame storage bin device (200) is obliquely arranged towards the direction close to the base (700).

6. The double-frame feeding device according to claim 5, wherein the frame storage bin device (200) comprises a support plate (201), a first feeding motor (202), a first synchronous belt assembly (203) and a second synchronous belt assembly (204) are mounted on the support plate (201), the first feeding motor (202) drives the second synchronous belt assembly (204) to rotate through the first synchronous belt assembly (203), and the second synchronous belt assembly (204) is obliquely arranged relative to the frame conveying device (100);

a frame push plate (205) is installed at the moving end of the second synchronous belt component (204), and frame width limiting plates (206) are installed on two sides of the frame push plate (205) of the supporting plate (201).

7. The double-frame loading device according to claim 3, wherein the first frame carrying device and the second frame carrying device each comprise a rotating arm (302), the rotating arm (302) is fixedly connected with the rotating shaft (301), a nozzle rod (303) is connected to the end of the rotating arm (302), a pipe joint (304) and a vacuum chuck (305) are connected to the nozzle rod (303), and the pipe joint (304) is communicated with the vacuum chuck (305) through the nozzle rod (303).

8. The double-frame loading device according to claim 4, wherein the frame conveying device (100) comprises a conveying track (500) and a pushing-off device (600), and the first accommodating groove (501) and the second accommodating groove (502) are formed on the conveying track (500); the pushing end of the pushing-off device (600) can move in the first containing groove (501) and the second containing groove (502) and protrudes out of the conveying track (500) so as to push off the frame unit (010).

9. A double frame loading device according to claim 8, wherein said first frame handling device and said second frame handling device each comprise a rotating arm (302);

the conveying track (500) comprises a first frame supporting strip (511), a second frame supporting strip (512) and a third frame supporting strip (513) which are connected in sequence;

one side of the first frame supporting bar (511) is connected with a first right supporting bar (514), and the other side of the first frame supporting bar (511) is connected with a first left supporting bar (515); one side of the third frame supporting strip (513) is connected with a second right supporting strip (516), and the other side of the third frame supporting strip (513) is connected with a second left supporting strip (517);

first gaps (518) for the rotating arm (302) of the first frame carrying device to enter are respectively reserved between the first right supporting bar (514) and the second right supporting bar (516) and between the first frame supporting bar (511) and the second frame supporting bar (512);

second gaps (519) for the rotating arm (302) of the second frame handling device to enter are reserved between the first left support bar (515) and the second left support bar (517) and between the second frame support bar (512) and the third frame support bar (513).

10. Die bonding equipment, characterized by comprising a die bonding device and a double-frame feeding device according to any one of claims 1 to 9, wherein the double-frame feeding device is used for feeding a frame unit (010) into the die bonding device.