CN115213184A

CN115213184A - Method and equipment for cleaning material conveying box

Info

Publication number: CN115213184A
Application number: CN202110413094.5A
Authority: CN
Inventors: 叶步章; 游立达
Original assignee: ASIA NEO TECH INDUSTRIAL CO LTD
Current assignee: ASIA NEO TECH INDUSTRIAL CO LTD
Priority date: 2021-04-16
Filing date: 2021-04-16
Publication date: 2022-10-21

Abstract

The invention provides a cleaning method and equipment of a material conveying box, which comprises the steps of separating the material conveying box into a front cover and a box body, sequentially carrying out the processes of wet cleaning, liquid removal and vacuum drying on the front cover and the box body respectively, and then combining the front cover and the box body to finish the cleaning process of the material conveying box; particularly, the plurality of air knives are used for removing liquid from the rotating box body in the liquid removing process, and the plurality of heat energy elements are used for vacuum drying after the liquid is removed from the box body in the vacuum drying process, so that the problem that the material conveying box with a relatively complex internal structure is difficult to effectively clean in the wet cleaning process in the automatic cleaning process of the traditional wafer conveying box is solved.

Description

Method and equipment for cleaning material conveying box

Technical Field

The present invention relates to a transport box for loading and transferring materials between different processing stations, and more particularly, to a method and apparatus for cleaning a material transport box.

Background

In the prior art, the material transfer box closest to the present invention is a Front Opening Unified Pod (FOUP), which is used to carry semiconductor wafers.

Semiconductor wafers are subjected to high cleanliness during the manufacturing process, particularly within each processing station, and during the transport of the wafers between processing stations, particularly to avoid the occurrence of dust particles in the environment which can affect the yield of the wafers.

As is known, the above-mentioned wafer transfer cassettes are commonly used for transporting semiconductor wafers, so that the plurality of wafer transfer cassettes can pick up and hold wafers in each processing station through the operation of the automated handling system, and can transfer wafers between the processing stations, and then unload the wafers when the wafers reach the processing station of the destination.

The wafer conveying box is formed by mutually assembling and buckling an openable front cover and a box body, and the double side wall surfaces in the box body are provided with protruding comb-shaped ribs for supporting wafers accommodated in the box body, so that a plurality of wafers can be accommodated in each wafer conveying box.

Due to the high standard requirements for cleanliness, the cassette must be automatically cleaned after a certain period of use. Currently, known advanced technologies for automatically cleaning a wafer transport box are disclosed in patents CN102804332B, TW201400202A (taiwan patent), CN1082222A, and US20140069467A1, which teach that a cleaning station is provided in a wafer production line, an automated handling system is used to transfer a wafer transport box to be cleaned to a load port (load port) of the cleaning station, an automatic arm (robot) in the cleaning station is used to pick up the wafer transport box on the load port, and separate a front cover and a box body of the wafer transport box in advance, and then the front cover and the box body are automatically picked up to purify particles possibly remaining on the inner and outer surfaces of the front cover and the box body through wet cleaning of a cleaning solution, vacuum drying in a negative pressure environment, and the like in sequence, thereby improving cleanliness of dust-free transport.

In addition, the wafer transfer box for transferring wafers without dust is currently applied to the occasion of transferring the high-level circuit carrier without dust, such as the Embedded Multi-Die Interconnect Bridge (EMIB) circuit carrier or the circuit carrier using ABF as the material for increasing the layer, and the area of these high-level circuit carriers is larger than that of the conventional PCB and is represented by the rectangular layout mode, so that the rigidity of the high-level circuit carrier is also softer than that of the conventional PCB. Therefore, when the objects in the conveying box are changed from the wafer to the high-order circuit carrier boards, the internal structure of the conveying box is changed, and then a plurality of high-order circuit carrier boards can be stably accommodated in each conveying box.

Referring to fig. 1 to 3, a material transfer box 10 for accommodating a carrier 16 (hereinafter referred to as carrier 16) of a high-level circuit in the prior art is disclosed, in which a box body 11 and a front cover 12 have the same features of a wafer transfer box, and particularly, the material transfer box includes a comb-shaped rib 13 protruding from a double-side wall 11a of the box body 11. In addition, because the surface area of the carrier plate 16 as the accommodating object is relatively large and soft, a suspension support rod 15 protruding from the bottom 11b to the accommodating cavity 14 must be formed in the box 11, so as to support the two ends 16a of the carrier plate 16 by the two-sided fins 13 and to support the middle section 16b of the carrier plate 16 by the suspension support rod 15, thereby preventing the carrier plate 16 from collapsing or interfering with each other in the material conveying box 10 (as shown in fig. 1, 2 and 3).

It can be seen that the complexity of the internal structure of the material conveying box is affected by the difference of different objects, and particularly, the overall structure of the material conveying box 10 for loading the carrier plate, which has the comb-shaped fins 13 and the suspension-shaped support rods 15 inside the box body 11, is more complicated than the structure of the box body of the wafer conveying box.

For this reason, the above-described disclosed cleaning technique for the transport box is still not ideal when cleaning a box body of a transport box having a relatively complicated internal structure (e.g., a box body such as a carrier transport box). The wet cleaning, vacuum drying technique, as disclosed in CN102804332B patent, is the closest prior art teaching:

1. the wet cleaning device comprises a box body, a plurality of liquid spraying nozzles and air blowing nozzles, wherein the liquid spraying nozzles and the air blowing nozzles are arranged in the same wet cleaning chamber at the same time, and after the box body is sprayed and cleaned by the liquid spraying nozzles, the liquid residues on the inner surface and the outer surface of the box body are blown by the air blowing nozzles arranged in the chamber. However, no matter the liquid spray nozzle and the air blowing nozzle are fixed or rotatable, the projecting suspension support rods in the box body are easy to be caught in the same chamber, so that the wet cleaning efficiency and the liquid removing efficiency in the whole cleaning process are reduced, and even the box body with a complicated internal structure is not easy to take and place in the wet cleaning chamber.

2. Vacuum drying may be performed in the same or a different chamber together with wet cleaning. However, since the arrangement position of the infrared heater used for the vacuum drying is not designed for the case having the hanging support rod or the case having a complicated structure and forming a plurality of grooves and rib dead spaces, there is also a problem that the infrared heater is liable to be caught and the drying efficiency is deteriorated.

3. In the vacuum drying process, only conceptual disclosures are made, and a humidity sensor may be used to monitor the drying process and the end point. However, the humidity sensor does not teach any further details of how to perform humidity monitoring of the washed and dried transport pod in a vacuum drying chamber or other location.

In view of the above, it is difficult to effectively clean the front opening type material transport box with a relatively complicated internal structure, especially the material transport box with a suspension support rod protruding into the containing cavity of the box, and thus there is a need for development and improvement.

Disclosure of Invention

The invention aims to improve the prior technology for automatically cleaning a wafer conveying box, in particular to a technology for improving wet cleaning and vacuum drying efficiency aiming at a material conveying box with a relatively complex box body internal structure.

The invention improves the automatic cleaning process of the traditional wafer transmission box, and the whole cleaning process can be divided into a wet cleaning process, a dewatering process and a vacuum drying process; therefore, a preferred embodiment of the present invention discloses a method for cleaning a material transport box, which can be widely used for performing an automated cleaning operation on a wafer transport box or a transport box of a circuit carrier (hereinafter referred to as a carrier) made of an embb or ABF build-up material. Specifically, the method for cleaning material transport boxes of the present invention is implemented in a clean processing station, and comprises: separating the material conveying box into a front cover and a box body, enabling the box body to be provided with an opening, then sequentially carrying out a wet cleaning process, a liquid removing process and a vacuum drying process on the front cover and the box body respectively, and then combining the front cover and the box body, wherein the wet cleaning process, the liquid removing process and the vacuum drying process of the box body are respectively carried out in a plurality of different chambers which are distributed around the cleaning processing area station, and the method comprises the following steps: at least one box body washing chamber of wet washing usefulness, remove at least one box body of liquid usefulness and remove the liquid chamber and vacuum drying chamber of at least one box body of vacuum drying usefulness, wherein: the box body receives liquid removal in the box body liquid removal cavity in a rotation mode, a plurality of air knives which can provide linear wind power distributed in a surface shape in different axial directions are used in the box body liquid removal cavity, and liquid removal is carried out on the inner surface and the outer surface of the box body in rotation in an adjacent mode; and the box body vacuum drying chamber performs vacuum drying after removing liquid from the inner surface and the outer surface of the box body by using a plurality of heat energy elements (such as electric heating plates or infrared heaters) in a vacuum environment.

In further embodiments, a load port is disposed around the clean station, the load port provides for placement of the material transport pod prior to separation of the front cover from the pod, and the load port provides for movement of the material transport pod, the movement including steering of the material transport pod.

In a further embodiment, the linear wind power provided by the plurality of wind knives is hot wind to preheat the box before vacuum drying.

In a further implementation, at least one suspension support rod protrudes from a bottom of the box body, and the inner surface of the box body comprises the peripheral surface of the suspension support rod.

In a further embodiment, the method further comprises a humidity detection process, which is performed after the front cover and the box body are combined, and the humidity detection process comprises the following steps: the loading port provides clean dry air to enter the material conveying box to generate positive pressure dry air, the loading port provides a multi-channel pipeline for capturing the positive pressure dry air, and the multi-channel pipeline provides a humidity sensor for detecting the humidity of the positive pressure dry air.

In a further embodiment, the multi-channel duct further provides a particle counter for detecting the dust falling amount in the positive pressure drying air.

In a further embodiment, the method further comprises a humidity detection process, wherein the humidity detection process is performed in the vacuum drying process of the cartridge, and the humidity detection process comprises the following steps: after the vacuum drying process is finished in the box body vacuum drying chamber, clean dry air is introduced into the box body vacuum drying chamber to remove vacuum, positive pressure dry air is generated in the box body vacuum drying chamber, the box body vacuum drying chamber is provided with a multi-channel pipeline for capturing the positive pressure dry air, and the multi-channel pipeline is provided with a humidity sensor for detecting the humidity of the positive pressure dry air.

In a further embodiment, the multi-channel further provides a particle counter for detecting the dust falling amount in the positive pressure drying air.

In addition, another preferred embodiment of the present invention discloses a cleaning apparatus for a material transfer box, comprising: a mechanical arm, installed in the clean processing area station, picking up and separating the material conveying box into a front cover and a box body, the box body having an opening, the clean processing area station being installed with around: the mechanical arm picks up the front cover and places the front cover into at least one front cover cleaning cavity to carry out wet cleaning, liquid removal and vacuum drying in sequence; the mechanical arm captures the box body, so that the opening cover is arranged in the box body cleaning chamber, and the plurality of liquid spray nozzles can be adjacently distributed on the periphery of the outer surface and the inner surface of the box body to spray cleaning liquid so as to wet clean the box body; at least one box body liquid removing chamber, a rotary table and a plurality of air knives which can provide linear wind power distributed in a surface shape in different axial directions are arranged in the box body liquid removing chamber; the turntable is made of a hollow latticed frame body and is located at the bottom of the box body liquid removing chamber, the mechanical arm captures at least one box body in the box body cleaning chamber, and the opening is covered on the turntable; the plurality of air knives comprise a bottom air knife and a lateral air knife, the bottom air knife stretches across the bottom of the rotary table, the lateral air knife is vertically arranged on one side of the inner wall of the box body liquid removing chamber, linear air force provided by the bottom air knife can blow the inner surface of the box body through the opening, and linear air force provided by the lateral air knife can blow the outer surface of the box body; the turntable can drive the box body to rotate to receive the blowing of linear wind power which is distributed in a surface shape and is provided by the bottom wind knife and the lateral wind knife in different axial directions respectively so as to remove liquid from the box body; the box body vacuum drying chamber is provided with an exhaust hole and a plurality of heat energy elements, the exhaust hole is used for capturing air in the box body vacuum drying chamber and generating negative pressure, and the mechanical arm captures the box body in at least one box body liquid removing chamber, so that the opening can be covered at the bottom of the box body vacuum drying chamber; a plurality of heat energy component can distribute in the surface of this box body and the internal surface adjacent all around generate the heat radiation, and carry out vacuum drying to this box body.

In a further embodiment, the plurality of thermal elements comprises a plurality of vertical electric heating plates vertically disposed in the vacuum drying chamber and implantable in the receiving cavity of the enclosure, and generating thermal radiation proximate to and heating the interior surface of the enclosure. In addition, it is a plurality of the heat energy component still contains a plurality of wall type electric plates, pastes respectively and locates the wall all around of this box body vacuum drying chamber, and the outer surface of this heating box body of heat radiation heating is generated.

In a further embodiment, a loading port is further installed around the clean processing area, the loading port includes a platform for placing the material transport box, the platform is configured with at least one linear driver for moving the material transport box and a rotator for driving the material transport box to turn, the robot arm picks up and separates the material transport box from the platform into the front cover and the box body, the robot arm picks up at least one box body completing vacuum drying in the box body vacuum drying chamber and at least one front cover completing cleaning in the front cover cleaning chamber, and the box body and the front cover are placed on the platform after being mutually assembled and buckled.

In a further implementation, the platform of the load port further has mounted thereon: can guide a clean malleation drying air to get into an inlet connector of this material conveying box to and from the exhaust connector of this material conveying box exhaust malleation drying air, a multichannel pipeline is connected to this exhaust connector, a humidity transducer is connected to this multichannel pipeline, and humidity in this material conveying box exhaust malleation drying air can be examined and known to this humidity transducer via this multichannel pipeline.

In a further implementation, the multi-channel is further connected with a particle counter, and the particle counter can detect the dust falling amount in the positive pressure dry air discharged by the material conveying box through the multi-channel.

In further implementation, at least one box body vacuum drying chamber still is equipped with an inlet port, and this inlet port can leading-in clean dry air gets into remove the vacuum in the box body vacuum drying chamber and generate malleation dry air, and this exhaust hole connects a multichannel pipeline, and a humidity transducer is connected to this multichannel pipeline, and this humidity transducer can be examined and examined via this multichannel and this exhaust hole humidity among the box body vacuum drying chamber exhaust malleation dry air.

In a further implementation, the multi-channel is further connected with a particle counter, and the particle counter can detect the dust falling amount in the positive pressure drying air exhausted from the box body vacuum drying chamber through the multi-channel.

In a further embodiment, a plurality of the wind knives are connected to a wind pressure supplier, and the wind pressure supplier is provided with an electric heater.

In a further embodiment, at least one hanging support rod protrudes from a bottom of the case, and the inner surface of the case includes the peripheral surface of the hanging support rod.

The technology disclosed by the invention can automatically clean the front-opening material conveying box (such as a carrier plate conveying box) with a complex internal structure of the box body, and is relatively suitable for automatically cleaning the wafer conveying box.

The features and technical effects of the embodiments disclosed herein will be presented in the following description and drawings.

Drawings

Fig. 1 is an exploded perspective view of a material transport box.

Fig. 2 and 3 are sectional views of the material transfer box from different perspectives, respectively.

FIG. 4a is a flow chart of the steps of a first embodiment of the cleaning method of the present invention.

FIG. 4b is a flow chart of the steps of a second embodiment of the cleaning method of the present invention.

Fig. 5 to 10 are schematic diagrams sequentially illustrating the operation of the cleaning method of the present invention.

Fig. 11 is a schematic diagram of the operation of the humidity detection process in fig. 4 a.

Fig. 12 is a schematic operation diagram of the humidity detection process in fig. 4 b.

Fig. 13 is a schematic configuration diagram of the cleaning apparatus of the present invention.

Fig. 14 is a perspective view of the loading port of fig. 13.

FIG. 15 is a schematic perspective view of the cartridge cleaning chamber of FIG. 13.

Fig. 16 is a cross-sectional view of the cartridge vacuum drying chamber of fig. 13.

Description of reference numerals: 10-a material transfer box; 11-a box body; 11 a-wall; 11 b-bottom; 11 c-opening; 11d — first interface; 11e — a second interface; 11 f-inner surface; 11 g-outer surface; 12-a front cover; 13-ribs; 14-a housing chamber; 15-support bars; 16-a carrier plate; 16 a-double ended; 16 b-a middle section; 20-a mechanical arm; 30-a load port; 31-a platform; 32-a linear driver; 33-a spinner; 34-an air inlet connector; 35-exhaust nozzle; 36-a side wall; 40-front cover cleaning chamber; 40 a-a cover plate; 50-a cartridge cleaning chamber; 50 a-cover plate; 51-liquid spray nozzle; 511-wall surface liquid spray nozzle; 512-rotary liquid spray nozzle; 60-a cartridge liquid removal chamber; 60 a-a cover plate; 61-a turntable; 62-air knife; 621-bottom air knife; 622-lateral air knife; 63-a wind pressure supplier; 70-box vacuum drying chamber; 70 a-a cover plate; 71-an exhaust hole; 72-a thermal energy element; 721-vertical electric hot plate; 722-wall type electric heating plates; 73-air intake; 74-an insulating layer; 80-multi-way pipe; 81-a humidity sensor; 82-micro particle counter; 90-cleaning the processing area station; d-a predetermined direction; l-a lid opening position; s1 to S3-description of the procedure of the example.

Detailed Description

In the embodiments described below, the term "cleaning" is different from the term "rinsing", wherein "cleaning" includes the steps of "wet rinsing (or rinsing), liquid removal, and vacuum drying"; in addition, the "cleaning" may further include a "humidity detection" step, which is shown in advance.

Referring to fig. 4a, the method for cleaning a material transport box according to the present invention is implemented in a cleaning station 90 (as shown in fig. 13), wherein the cleaning station 90 is configured to form a polygonal station area surrounded by chambers or equipment frames for performing cleaning (i.e., wet cleaning), liquid removal and vacuum drying of the material transport box 10, and a robot 20 (as shown in fig. 13) for picking up, moving, separating, releasing and assembling the material transport box 10 is further configured inside the cleaning station 90, so as to perform the following cleaning method according to the present invention, wherein the cleaning method comprises the following steps S1 to S3:

step S1: separating the material conveying box:

referring to fig. 5 to 6 sequentially, a material transfer box 10 formed by combining a box body 11 and a front cover 12 is described, and the material transfer box 10 is transferred to a load port 30 through equipment around a clean processing area 90, and the load port 30 can lift, move and carry the material transfer box 10 to turn (for example, 180 degrees), so that the material transfer box 10 of which the front cover 12 is not opened and the opening 11c of the box body 11 of which the cover is to be opened can face a predetermined direction D (as shown in fig. 5). The predetermined direction D is in this embodiment the set-up position (shown in fig. 13) with the opening 11c facing away from the robot 20 in the cleaning station 90. In other words, the predetermined direction D is a direction centering on the robot 20 and directing the opening 11c toward the mounting position of the load port 30. After the mechanical arm 20 is actuated to pick up the material transfer box 10, the front cover 12 can be separated and combined on the box body 11 more conveniently (i.e. the opening and closing actions are conveniently performed), and the opening 11c on the box body 11 after the opening is actuated to be exposed to outside, so that the material transfer box is conveniently placed into a processing chamber (detailed later).

Additionally, the load port 30 may also move the diverted FOUP 10 to a position accessible by the robot 20; the robot 20 then picks up the entire FOUP 10 on the load port 30 by gripping the outer walls of the cassette 11 on both sides, and then the robot 20 moves the entire FOUP 10 to a uncapped position L (FIG. 13) within the clean area station 90 adjacent to the load port 30; in this embodiment, the uncovering position L is located on a side wall 36 of the loading port 30 in the clean processing area 90, the side wall 36 is provided with a holder and an uncovering key (not shown) which are arranged for the front cover 12, the holder can be made of a suction cup or other elements such as a movable hook, and the front cover 12 is originally provided with a key hole (not shown) corresponding to the uncovering key; when the robot 20 picks up and moves the above-mentioned turned material conveying box 10, the predetermined opening 11c position of the box body 11 (i.e. the position where the front cover 12 is installed) can just face the direction of the side wall 36, and the front cover 12 can contact with the holding pieces on the side wall 36, and the holding pieces on the side wall 36 can absorb or embed the front cover 12 on the box body 11, at this time, the opening key on the side wall 36 can be inserted into the keyhole of the front cover 12, the opening key is opened and the rotation is started to release the state of mutual buckling between the front cover 12 and the box body 11 through the tenon, and then the robot 20 holding the box body 11 is made to move in a retraction manner to complete the opening operation, and then the robot 20 moves the box body 11 away from the front cover 12, so that the opening 11c of the box body 11 is exposed to the outside (as shown in fig. 6).

Step S2: cleaning the front cover and the box body:

referring to fig. 13, the process of performing the wet cleaning, the liquid removing and the vacuum drying in sequence for the front cover 12 and the box 11 in the cleaning station 90 in step S2 will be described. Wherein, because the structure of the peripheral surface of the front cover 12 is not complex, the wet cleaning, liquid removing and vacuum drying processes of the front cover 12 can be performed in at least one front cover cleaning chamber 40, including the wet cleaning, liquid removing and vacuum drying processes of the front cover 12 respectively performed by two or more front cover cleaning chambers 40; when the front cover cleaning chamber 40 is two, the wet cleaning and draining processes of the front cover 12 may be performed in the same chamber, and the vacuum drying process of the front cover 12 may be performed in the other chamber. The wet cleaning, the liquid removal, and the vacuum drying processes of the cartridge 11 are performed in a plurality of different chambers, respectively; the front cover cleaning chamber 40 and the plurality of distinct chambers are operatively distributed about the clean processing area station 90; the plurality of distinct chambers may be implemented to include at least one cartridge cleaning chamber 50 for wet cleaning, at least one cartridge deliquoring chamber 60 for deliquoring, and at least one cartridge vacuum drying chamber 70 for vacuum drying. In addition, the box 11 is implemented by placing the box cleaning chamber 50, the box liquid removing chamber 60 and the box vacuum drying chamber 70 with the opening 11c facing downward; since the opening 11c is exposed to the outside by the robot 20 when the carrying case 11 moves, the opening 11c of the case 11 can be placed in the plurality of different chambers in a downward direction (i.e., in the same direction as the direction of gravity) by the robot 20 during the wet cleaning, dehydrating, and vacuum drying processes of the case 11, so that the cleaning liquid remaining on the inner surface 11f of the case 11 can be smoothly separated from the case 11 through the opening 11c in accordance with the gravity and is less likely to remain on the inner surface 11f of the case 11 when the case 11 is subjected to the wet cleaning, dehydrating, and vacuum drying processes.

Referring to fig. 7, a wet cleaning process of the box 11 is performed in the box cleaning chamber 50, and includes a process of spraying a cleaning solution on the inner surface 11f and the outer surface 11g of the box 11 by using a plurality of liquid spray nozzles 51 in the box cleaning chamber 50 to perform the wet cleaning. The plurality of liquid nozzles 51 include a plurality of wall liquid nozzles 511 disposed on the peripheral inner wall of the box cleaning chamber 50, and a plurality of rotary liquid nozzles 512 capable of being implanted into the accommodating chamber 14 of the box 11; the plurality of wall-surface liquid-spraying nozzles 511 can spray cleaning liquid to wash the outer surface 11f around the box body 11, and the plurality of rotary liquid-spraying nozzles 512 can spray cleaning liquid to wash the inner surface 11f around the box body 11 in a 360-degree rotary manner. In addition, the inner surface 11f of the box body 11 also comprises the four peripheral surfaces of the comb-shaped fins 13 and the suspension-shaped support rods 15 arranged in the box body 11 in implementation; therefore, the plurality of rotary liquid nozzles 512 can spray the cleaning liquid in a 360-degree rotary manner on the peripheral surfaces of the comb-shaped ribs 13 and the suspended support rods 15, so that the dirt on the comb-shaped ribs 13 and the suspended support rods 15 can be sufficiently washed away from the inner surface 11f at multiple angles.

Referring to fig. 8, the liquid removing process of the cartridge 11 will be described, which is performed in the cartridge liquid removing chamber 60, and the cartridge 11 is subjected to the liquid removing process in the cartridge liquid removing chamber 60 in a self-rotating manner; the rotation mode is to perform rotation with variable speed including forward rotation and reverse rotation according to the liquid removing effect of the box body 11 desired by the control end. Furthermore, the box body liquid removing chamber 60 is also matched with a plurality of air knives 62 which can provide linear wind power distributed in a surface shape in different axial directions; the invention particularly utilizes the linear wind power provided by each wind knife 62 to be distributed in a surface shape in different axial directions, so that the linear wind power in different axial directions can be utilized to fully blow off the liquid beads of the cleaning liquid attached to the inner surface 11f and the outer surface 11g of the box body 11, and further the liquid removal effect of the box body 11 is improved.

In a further implementation, the linear wind force provided by the wind knife 62 may be generated by driving a gas such as dry air (dry air) by a blower, and the gas may be filtered and heated before the wind knife 62 provides clean linear wind force to the inner surface 11f and the outer surface 11g of the blowing box 11. Accordingly, when the linear wind force provided by the wind knife 62 is hot wind, the heating volatilization speed of the liquid beads of the cleaning liquid remaining on the inner surface 11f and the outer surface 11g of the box body 11 is increased in the whole liquid removing process, and the box body 11 can be preheated, so that the drying efficiency (detailed later) of the box body 11 can be improved in the subsequent vacuum drying process of the box body 11.

Referring to fig. 9, a vacuum drying process of the box 11 is illustrated as being performed in the box vacuum drying chamber 70; in practice, the interior of the box vacuum drying chamber 70 must be a vacuum chamber environment capable of generating vacuum pressure, and a plurality of heat energy elements 72 are used in combination, in a preferred embodiment, the heat energy elements 72 may be planar electric heating plates, so that when the box 11 is placed in the box vacuum drying chamber 70, the planar electric heating plates can be distributed around the inner surface 11f and the outer surface 11g of the box 11, and the vacuum drying process after removing liquid is performed on the inner surface 11f and the outer surface 11g of the box 11. In addition, the plurality of thermal elements 72 can also be infrared heaters, but the effect is less desirable, and therefore, the description thereof is omitted.

It should be noted that, when the box 11 is subjected to the linear wind force of the hot wind supplied by the wind knife 62 during the liquid removing process to remove the liquid, the box 11 itself has a preheating temperature higher than the normal temperature but lower than the boiling point of the water molecules, and the preheating temperature drives the water molecules remained on the inner and

outer surfaces

11f, 11g of the box 11 to be preheated, so that when the box 11 is continuously implanted into the vacuum drying chamber 70 of the box to perform the vacuum drying process, the boiling point of the water molecules remained on the inner and

outer surfaces

11f, 11g of the box 11 is not instantaneously reduced by the vacuum pressure in the chamber environment of the vacuum pressure (i.e. lower than 1 atm), and the freezing phenomenon is generated, thereby the water molecules remained on the inner and

outer surfaces

11f, 11g of the box 11 can be rapidly heated to the boiling point by the heating function of the heat radiation energy emitted by the heat energy element 72 in the chamber environment of the vacuum pressure, and are rapidly evaporated off the inner and

outer surfaces

11f, 11g of the box 11, so as to shorten the vacuum drying process of the box 11.

And step S3: combining the front cover and the box body:

referring to fig. 10, the front cover 12 that has been subjected to the wet cleaning, liquid removing and vacuum drying processes is first placed on the sidewall 36, the sidewall 36 that serves as the open position L may also serve as a closed position, and in detail, after the wet cleaning, liquid removing and vacuum drying processes are completed on the front cover 12 and the box body 11, the front cover 12 and the box body are also assembled and combined into the complete material conveying box 10 at the open position L (i.e. the closed position) by the carrying of the robot arm 20; the load port 30 may be implemented as one or more, and is disposed at or near at least one end of the periphery of the cleanroom station 90 as a window for the transport pod 10 to be cleaned to enter the cleanroom station 90, while the load port 30 also serves as a window for the cleaned transport pod 10 to exit the cleanroom station 90 (as shown in fig. 13).

Referring to fig. 4a and fig. 11, it is illustrated that the cleaning method further includes a humidity detection process.

The humidity detection process is performed after the front cover 12 and the box body 11 are combined in the first embodiment; more specifically, after the front cover 12 and the box body 11 are combined into the material transport box 10 at the open cover position L, the humidity detection process is performed at the loading port 30, a closed space is formed in the material transport box 10, then the material transport box 10 is moved to the loading port 30, clean dry air is provided into the material transport box 10 through the loading port 30, positive pressure dry air is generated in the material transport box 10, that is, the air pressure in the material transport box 10 is greater than the external atmospheric pressure, the loading port 30 is further provided with a multi-channel duct 80, the positive pressure dry air in the material transport box 10 can leave the material transport box 10 through the multi-channel 80, the multi-channel 80 is provided with a humidity sensor 81 for detecting the humidity of the positive pressure dry air and a particle counter 82 for detecting the dust falling amount in the positive pressure dry air, and thus, the humidity and cleanliness in the material transport box 10 are monitored.

Referring to fig. 4b and 12, a second embodiment of the humidity detection process is described, which is performed in the vacuum drying process of the box 11. After the vacuum drying process is completed in the box vacuum drying chamber 70, the box 11 is introduced into the box vacuum drying chamber 70, and then the vacuum state (i.e. vacuum breaking) in the box vacuum drying chamber 70 is released, so that positive pressure drying air is generated in the box vacuum drying chamber 70, that is, the air pressure in the box vacuum drying chamber 70 is greater than the external atmospheric pressure, the box vacuum drying chamber 70 provides a multi-channel 80, so that the positive pressure drying air in the box vacuum drying chamber 70 can leave the box vacuum drying chamber 70 through the multi-channel 80, the multi-channel 80 provides a humidity sensor 81 for detecting the humidity of the positive pressure drying air and a particle counter 82 for detecting the dust falling amount in the drying air, thus, the humidity and cleanliness in the box vacuum drying chamber 70 are monitored, and the humidity and cleanliness of the box 11 itself are known.

On the other hand, referring to fig. 13 again, the present invention further provides a cleaning apparatus for a material transporting box, so that the cleaning method of the material transporting box can be easily implemented.

The cleaning apparatus for the material transfer cassette is built into the clean station 90, the cleaning apparatus comprising the robot 20, at least one of the load ports 30, at least one front cover cleaning chamber 40, at least one cassette cleaning chamber 50, at least one cassette de-watering chamber 60, and at least one cassette vacuum drying chamber 70, wherein:

the robot 20 is installed in the clean room station 90, the loading port 30, the front lid cleaning chamber 40, the box cleaning chamber 50, the box liquid removing chamber 60 and the box vacuum drying chamber 70 are respectively disposed around the robot 20, the robot 20 can move the material transfer box 10 at the loading port 30 to an uncovering position L adjacent to the loading port 30, in this embodiment, the uncovering position L is located at the sidewall 36 of the loading port 30, the material transfer box 10 is separated into the front lid 12 and the box 11 at the uncovering position L, and also can combine the front lid 12 and the box 11 into the material transfer box 10 at the uncovering position L, and then move to the loading port 30, wherein the front lid 12 can move to the uncovering position L and the front lid cleaning chamber 40 via the pick-up of the robot 20, and the box 11 can move to the uncovering position L, the box cleaning chamber 50, the liquid removing chamber 60 and the box vacuum drying chamber 70 via the pick-up of the robot 20.

Referring to fig. 13 and 14, it is illustrated that the loading port 30 includes a platform 31 for placing the material transfer box 10, the platform 31 is configured with at least one linear driver 32 for moving the material transfer box 10, the material transfer box 10 is driven by the linear driver 32 to move on the platform 31, the linear driver 32 is implemented by disposing a plurality of rollers on the platform 31, and each roller can be driven by a driver such as a motor to synchronously rotate, so as to drive the material transfer box 10 to move; the platform 31 is further provided with a rotator 33 for driving the material transfer box 10 to adjust the direction of the opening 11c of the box body 11, the rotator 33 is located below the linear driver 32, when the material transfer box 10 is driven by the linear driver 32 to move to above the rotator 33, the rotator 33 is lifted to lift the material transfer box 10 away from the linear driver 32, then the material transfer box 10 is driven by the rotator 33 to make the opening 11c of the box body 11 face away from the robot arm 20 (i.e. towards the predetermined direction D), then the rotator 33 is lowered to place the diverted material transfer box 10 on the linear driver 32, finally, the robot arm 20 picks up the diverted material transfer box 10 to move the material transfer box 10 to an uncovering position L adjacent to the loading port 30, and the material transfer box 10 is separated into the front cover 12 and the box body 11 at the uncovering position L; alternatively, the robot 20 picks up the box 11 that is vacuum dried in the box vacuum drying chamber 70 and the front cover 12 that is cleaned in the front cover cleaning chamber 40, and places the box 11 and the front cover 12 on the platform 31 after they are combined with each other at the opening position L to form the material transfer box 10.

As compared with the box 11, the concave and convex structures on the peripheral surface of the front cover 12 are less complex, so that it is not necessary to separate the wet cleaning, liquid removing and vacuum drying processes into different chambers, and therefore, please refer to fig. 13, which illustrates that the front cover cleaning chamber 40 can be implemented as an upper and a lower double-layer chamber with a single floor area, and each front cover cleaning chamber 40 is provided with a removable cover plate 40a; among them, the lower chamber is used to complete the required components for wet cleaning the front cover 12 and performing the wind-drying and water-removing processes for the rotating front cover (refer to the structures of the box cleaning chamber 50 and the box liquid-removing chamber 60), and the upper chamber is used to install the components required for vacuum drying the front cover 12 (refer to the structure of the box vacuum drying chamber 70). Accordingly, the cover plate 40a of the front cover cleaning chamber 40 can be opened to communicate the front cover cleaning chamber 40 with the outside, so that the robot 20 can place the front cover 12 into the front cover cleaning chamber 40, perform the wet cleaning of the front cover by performing the wet cleaning, the liquid removing, and the vacuum drying once or successively, and then pick up the front cover 12 from the front cover cleaning chamber 40 after the wet cleaning, the liquid removing, and the vacuum drying are completed; on the contrary, when the cover plate 40a is closed, a closed space is formed in the front cover cleaning chamber 40, so as to facilitate the wet cleaning, liquid removing and vacuum drying steps of the front cover 12 in the front cover cleaning chamber 40.

Referring to fig. 13 again, it is illustrated that the box cleaning chamber 50 is configured with a plurality of liquid nozzles 51 (as shown in fig. 7), including a plurality of wall-surface liquid nozzles 511 disposed on the inner wall of the box cleaning chamber 50, and a plurality of rotary liquid nozzles 512 capable of being implanted into the accommodating chamber 14 of the box 11; when the robot arm 20 picks up the box 11, the box 11 is placed into the box cleaning chamber 50 with the opening 11c facing downward, the cleaning liquid can be sprayed and washed on the outer surface 11f of the periphery of the box 11 by the plurality of wall-surface liquid-spraying nozzles 511, and the cleaning liquid can be sprayed and washed on the inner surface 11f of the periphery of the box 11 by the plurality of rotary liquid-spraying nozzles 512 in a 360-degree rotary manner, so that the wet cleaning process of the box 11 can be smoothly performed in the box cleaning chamber 50; because this box body 11 is carrying out wet cleaning's in-process, the state that the opening 11c of this box body 11 is kept down makes this box body 11 carry out during wet cleaning the cleaning solution can directly leave this box body 11 through the opening 11c of below, and then is difficult for remaining in this box body 11. The box cleaning chamber 50 is provided with a cover 50a, which can be lifted, when the cover 50a is lifted, the box cleaning chamber 50 is communicated with the outside, so that the robot arm 20 can place the box 11 to be wet-cleaned into the box cleaning chamber 50, or pick up the box 11 which is wet-cleaned from the box cleaning chamber 50; on the contrary, when the cover plate 50a is closed, a closed space is formed in the box cleaning chamber 50, so that the wet cleaning process can be performed on the box 11 in the box cleaning chamber 50, and the cleaning liquid can be prevented from splashing outside the box cleaning chamber 50 when the wet cleaning process is performed on the box 11.

Please refer to fig. 13 and fig. 15, which illustrate that a rotating platform 61 and a plurality of wind knives 62 capable of providing linear wind forces in different axial directions in a planar distribution are disposed in the box body liquid removing chamber 60, wherein the rotating platform 61 is made of a hollow grid frame and is located at the near bottom of the box body liquid removing chamber 60, the box body 11 which is wet cleaned in the box body cleaning chamber 50 is captured by the robot arm 20, and the box body 11 is covered on the rotating platform 61 in a state that the opening 11c is downward; the plurality of air knives 62 comprise a bottom air knife 621 and a lateral air knife 622 in practice, the bottom air knife 621 crosses the bottom of the rotating table 61, the lateral air knife 622 is vertically disposed on one side of the inner wall of the box body liquid removing chamber 60, the linear air force provided by the bottom air knife 621 can blow the inner surface 11f of the box body 11 through the opening 11c, the linear air force provided by the lateral air knife 622 can blow the outer surface 11g of the box body 11, and when the box body 11 receives the linear air forces which are respectively provided in different axial directions by the bottom air knife 621 and the lateral air knife 622 and are distributed in a planar manner, the rotating table 61 can drive the box body 11 to rotate, so that the linear air forces provided by the bottom air knife 621 and the lateral air knife 622 can be uniformly blown to the inner surface 11f and the outer surface 11g of the box body 11, thereby improving the liquid removing effect on the box body 11. Further, the wind blade 62 is operatively connected to a wind pressure supplier 63, and the wind pressure supplier 63 is configured with an electric heater (not shown), by which the high-pressure gas provided by the wind pressure supplier 63 is heated. The box body liquid removing chamber 60 is provided with a cover plate 60a which can be lifted, when the cover plate 60a is lifted, the box body liquid removing chamber 60 is communicated with the outside, so that the mechanical arm 20 can put the box body 11 to be subjected to the liquid removal into the box body liquid removing chamber 60, or the box body 11 which is subjected to the liquid removal is picked up from the box body liquid removing chamber 60; on the contrary, when the cover plate 60a is closed, a closed space is formed in the box body except the liquid chamber 60, so that the liquid removing process can be performed on the box body 11 in the box body except the liquid chamber 60, and the cleaning liquid can be prevented from splashing to the box body except the liquid chamber 60 when the liquid removing process is performed on the box body 11.

Referring to fig. 13 and 16, it is illustrated that the box vacuum drying chamber 70 is provided with an exhaust hole 71 and a plurality of planar heat energy elements 72, wherein the exhaust hole 71 is used for capturing air in the box vacuum drying chamber 70 and generating negative pressure. The plurality of thermal energy elements 72 include a plurality of built-in vertical electric heating plates 721 and a plurality of wall-type electric heating plates 722; the vertical electric heating plate 721 is vertically arranged in the box body vacuum drying chamber 70, and after the box body 11 is placed in the box body vacuum drying chamber 70, the vertical electric heating plate 721 can be implanted into the accommodating chamber 14 of the box body 11, so that the vertical electric heating plate 721 can be implanted into the gap between the fins 13 on both sides and the suspended support rod 15 to provide heat radiation energy; the wall-type electric heating plates 722 are respectively attached to the peripheral outer walls of the box vacuum drying chamber 70, and after the wall-type electric heating plates 722 are attached to the peripheral outer walls of the box vacuum drying chamber 70, a layer of heat-insulating layer 74 made of heat-insulating material is further coated on the periphery of the wall-type electric heating plates 722, so that the wall-type electric heating plates 722 can be positioned between the peripheral outer walls of the box vacuum drying chamber 70 and the heat-insulating layer 74. By doing so, the heat radiation generated by the vertical electric heating plate 721 can be directly radiated to the inner surface 11f around the box 11, and the heat radiation generated by the wall-type electric heating plate 722 can be conducted by the wall surface around the vacuum drying chamber 70 of the box to radiate the heat energy to the outer surface 11g around the box 11; in particular, water molecules possibly remaining on the inner surface 11f and the outer surface 11g of the cartridge 11 after the liquid removal (i.e., after the liquid droplets are removed) can be sufficiently evaporated by the heat radiation energy in the vacuum drying process, and a desired drying effect can be obtained.

When the robot 20 picks up the box 11 with the liquid removal process completed in the box liquid removal chamber 60 and covers the box 11 at the bottom of the box vacuum drying chamber 70 with the opening 11c facing downward, the vertical electric heating plate 721 can be suspended to extend into the box 11 through the opening 11c, so as to vacuum dry the inner surface 11f of the box 11 adjacently, and the wall type electric heating plate 722 vacuum dry the outer surface 11g of the box 11 adjacently. The box vacuum drying chamber 70 is provided with a cover plate 70a which can be lifted, when the cover plate 70a is lifted, the box vacuum drying chamber 70 is communicated with the outside, so that the robot arm 20 can place the box 11 to be subjected to the vacuum drying into the box vacuum drying chamber 70, or pick up the box 11 which is subjected to the vacuum drying from the box vacuum drying chamber 70; on the contrary, when the cover plate 70a is closed, a closed space is formed in the box vacuum drying chamber 70, so as to facilitate the vacuum drying process for the box 11 in the box vacuum drying chamber 70.

Referring to fig. 3, 13 and 14, a first embodiment of a related structure for implementing the humidity detection process is disclosed; fig. 3 shows that the bottom of the box body 11 of the material conveying box 10 has a plurality of first ports 11d for filling gas into the material conveying box 10 and a plurality of second ports 11e for discharging gas, and the first ports 11d and the second ports 11e are respectively provided with a check function, so that the gas can be controlled to enter the material conveying box 10 only through the first ports 11d in one direction and be discharged out of the material conveying box 10 through the second ports 11e in one direction; in addition, fig. 13 and 14 show that an air inlet nozzle 34 and an air outlet nozzle 35 are disposed on the platform 31 of the loading port 30, wherein when the material transfer box 10 is placed and positioned on the platform 31, the air inlet nozzle 34 can be inserted into and connected to the first port 11d, and the air outlet nozzle 35 can be inserted into and connected to the second port 11e. With this configuration, the idea of the present invention is to utilize the air inlet connector 34 to guide clean positive pressure dry air to enter the material transport box 10 through the first port 11d, and to enable the positive pressure dry air in the material transport box 10 to be discharged and collected through the second port 11e and the air outlet connector 35. For detecting whether the internal humidity and dust falling amount of the material conveying box 10 after wet cleaning have reached the requirement of cleanness. To this end, the present invention specifically utilizes the air-discharging nozzle 35 to connect the multi-way pipe 80, and enables the multi-way pipe 80 to connect a humidity sensor 81 (as shown in fig. 11) so as to detect the humidity in the positive pressure drying air discharged from the material conveying box 10 via the humidity sensor 81. Furthermore, the present invention can also utilize the multi-channel duct 80 to connect a particle counter 82, so as to detect the dust falling amount in the positive pressure dry air discharged from the material conveying box 10 through the particle counter 82. It should be noted that, when the air inlet connector 34 guides clean dry air into the wet-cleaned material transfer box 10, the air outlet connector 35 is closed so as to drive the dry air in the material transfer box 10 to generate a positive pressure (i.e. greater than 1 atm) air flow for capturing water molecules and possible remaining dust particles that are not evaporated on the inner surface (including the inner surface of the box body and the inner surface of the front cover) of the material transfer box 10; then, the exhaust nozzle 35 is opened to enable the positive pressure dry air in the material conveying box 10 to be discharged for a certain period through the multi-way pipeline 80, and the discharged positive pressure dry air is sampled from the discharge of the positive pressure dry air to detect the humidity and the dust falling particles; in the process of continuously discharging the positive pressure dry air, the air inlet connector 34 is kept in the open state, so that the dry air in the material conveying box 10 can be kept in the positive pressure drainage state, thereby improving the effect of capturing water molecules and dust particles by the dry air. In addition, the present invention can also connect a negative pressure generator to the multi-channel pipe 80, so that the positive pressure dry air in the material conveying box 10 can be rapidly captured and enter the humidity sensor 81 and the particle counter 82 through the multi-channel pipe 80, thereby increasing the speed of detecting humidity and falling particles.

Referring to fig. 13 and 16, a second embodiment of a related structure applied in the humidity detection process is disclosed; fig. 16 shows that the vacuum drying chamber 70 of the box body is provided with an air inlet 73 for introducing clean dry air in, in addition to an air outlet 71 for introducing negative pressure to generate vacuum pressure; wherein the air vent 71 is used to connect to the multi-channel tube 80, and the negative pressure generator (such as a suction pump) can be connected to one of the interfaces of the multi-channel tube 80, so as to capture the air in the box vacuum drying chamber 70 through the air vent 71 to generate the vacuum pressure; in addition, as shown in fig. 12, another interface of the multiple interfaces of the multi-channel 80 may be connected to the humidity sensor 81, and another interface of the multiple interfaces of the multi-channel 80 may be further connected to the particle counter 82. With such a structure, after the vacuum drying process of the box 11 is completed in the box vacuum drying chamber 70 maintained with vacuum pressure, the present invention can utilize the air inlet 73 to guide clean dry air into the box vacuum drying chamber 70 to release vacuum, and generate positive pressure dry air in the box vacuum drying chamber 70, so that the positive pressure dry air can be discharged to the multi-channel pipeline 80 through the air outlet 71, so as to detect the humidity in the positive pressure dry air discharged from the material conveying box 10 through the humidity sensor 81, and detect the dust falling amount in the positive pressure dry air through the particle counter 82. Wherein, it must be noted that the air outlet 71 and the air inlet 73 are respectively provided with automatic valves (e.g. solenoid valves); wherein, the automatic valve of the air outlet 71 can control the timing when the negative pressure flow is discharged out of the box vacuum drying chamber 70 through the air outlet 71, and the automatic valve of the air inlet 73 can control the timing when the drying air enters the box vacuum drying chamber 70 through the air inlet 73 to generate the positive pressure. Further, when the exhaust hole 71 generates vacuum pressure in the vacuum drying chamber 70 of the picking box, the air inlet 73 is closed to facilitate the generation of vacuum pressure; when the air inlet 73 is opened to guide the dry air into the box vacuum drying chamber 70, the air outlet 71 is closed to generate positive pressure for the dry air, and capture the water molecules and the dust particles that may remain on the inner and

outer surfaces

11f and 11g of the box 11; then, the air vent 71 is opened, so that the positive pressure dry air in the box vacuum drying chamber 70 can be discharged for a certain period through the multi-way pipeline 80, and the discharged positive pressure dry air is sampled from the air vent to detect the humidity and the dust falling particles; in the process of continuously discharging the positive pressure drying air, the air inlet 73 is kept open, so that the drying air in the box vacuum drying chamber 70 can be kept in a positive pressure drainage state, thereby improving the effect of capturing water molecules and dust particles by the drying air.

The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations, or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A method of cleaning a material transport cassette for implementation in a clean processing station, the method comprising:

separating the material conveying box into a front cover and a box body, enabling the box body to be provided with an opening, then sequentially carrying out a wet cleaning process, a liquid removing process and a vacuum drying process on the front cover and the box body respectively, and then combining the front cover and the box body, wherein the wet cleaning process, the liquid removing process and the vacuum drying process of the box body are respectively carried out in a plurality of different chambers which are distributed around the cleaning processing area station, and the method comprises the following steps: at least one box body washing chamber of wet washing usefulness, remove at least one box body of liquid usefulness and remove the liquid chamber and vacuum drying chamber of at least one box body of vacuum drying usefulness, wherein:

the box body receives liquid removal in the box body liquid removal cavity in a rotation mode, a plurality of air knives which can provide linear wind power distributed in a surface shape in different axial directions are used in the box body liquid removal cavity, and liquid removal is performed on the inner surface and the outer surface of the box body in rotation in an adjacent mode; and

the box body vacuum drying chamber uses a plurality of heat energy elements to carry out vacuum drying after liquid removal on the inner surface and the outer surface of the box body in a vacuum environment.

2. The method of cleaning a material transport box of claim 1, further comprising: the plurality of heat energy elements are planar electric heating plates.

3. A method of cleaning a material transport box as defined in claim 1, further comprising: the periphery of the clean processing area station is also provided with a loading port, the loading port provides for the placement of the material conveying box before the separation of the front cover and the box body, the loading port also provides a process for moving the material conveying box, and the moving process comprises the turning of the material conveying box.

4. The method of cleaning a material transport box of claim 1, further comprising: the linear wind power provided by the plurality of wind knives is hot wind for preheating the box body before vacuum drying.

5. The method of cleaning a material transport box as defined in any one of claims 1 to 4, wherein: at least one suspension supporting rod is convexly extended at the bottom of the box body, and the inner surface of the box body comprises the peripheral surface of the suspension supporting rod.

6. The method for cleaning a material transport box according to any one of claims 1 to 4, further comprising a humidity detection process which is performed in the vacuum drying process of the box body, comprising:

after the vacuum drying process is finished in the box body vacuum drying chamber, clean dry air is introduced into the box body vacuum drying chamber to remove vacuum, positive pressure dry air is generated in the box body vacuum drying chamber, the box body vacuum drying chamber is provided with a multi-channel pipeline for capturing the positive pressure dry air, and the multi-channel pipeline is provided with a humidity sensor for detecting the humidity of the positive pressure dry air.

7. The method of cleaning a material transport box of claim 6, further comprising: the multi-channel pipeline is also provided with a particle counter for detecting the dust falling amount in the positive pressure dry air.

8. The method of cleaning a material transport box of claim 6, further comprising: at least one suspension supporting rod is convexly extended at the bottom of the box body, and the inner surface of the box body comprises the peripheral surface of the suspension supporting rod.

9. A material transfer cassette cleaning apparatus configured to clean a processing area station, the cleaning apparatus comprising:

a mechanical arm installed in the clean processing area station, picking and separating the material conveying box into a front cover and a box body, wherein the box body is provided with an opening, and the periphery of the clean processing area station is provided with:

the mechanical arm picks up the front cover and places the front cover into the at least one front cover cleaning chamber to carry out wet cleaning, liquid removal and vacuum drying;

the mechanical arm picks up the box body to enable the opening cover to be arranged in the box body cleaning cavity, and the plurality of liquid spraying nozzles can be distributed on the periphery of the outer surface and the inner surface of the box body in a neighboring mode to spray cleaning liquid so as to perform wet cleaning on the box body;

at least one box body liquid removing chamber, a rotary table and a plurality of air knives which can provide linear wind power distributed in a surface shape in different axial directions are arranged in the box body liquid removing chamber; the rotary table is made of a hollow grid frame body and is positioned at the bottom of the box body liquid removing chamber, the mechanical arm captures at least one box body in the box body cleaning chamber, and the opening is covered on the rotary table; the plurality of air knives comprise a bottom air knife and a lateral air knife, the bottom air knife stretches across the bottom of the rotary table, the lateral air knife is vertically arranged on one side of the inner wall of the box body liquid removing chamber, linear air force provided by the bottom air knife can blow the inner surface of the box body through the opening, and linear air force provided by the lateral air knife can blow the outer surface of the box body; the turntable can drive the box body to rotate to receive the blowing of the linear wind power provided by the bottom wind knife and the lateral wind knife in different axial directions respectively so as to remove the liquid from the box body;

the box body vacuum drying chamber is provided with an exhaust hole and a plurality of heat energy elements, the exhaust hole is used for capturing air in the box body vacuum drying chamber and generating negative pressure, and the mechanical arm captures the box body in at least one box body liquid removing chamber, so that the opening can be covered at the bottom of the box body vacuum drying chamber; the plurality of heat energy elements can be distributed on the periphery of the outer surface and the inner surface of the box body in an adjacent mode to generate heat radiation, and the box body is dried in vacuum.

10. The material transport box cleaning apparatus of claim 9, wherein: the plurality of heat energy elements comprise a plurality of vertical electric heating plates which are vertically arranged in the vacuum drying chamber of the box body and then can be implanted into the accommodating cavity of the box body, and generate heat radiation to heat the inner surface of the box body adjacently.