CN215613909U - Box body liquid removing device of material conveying box - Google Patents

Abstract

The utility model provides a box body liquid removing device of a material conveying box, which comprises a rotary table and a plurality of air knives arranged in a liquid removing chamber, wherein the rotary table is arranged at the bottom of the liquid removing chamber and used for carrying the box body and driving the box body to rotate in the liquid removing chamber, the air knives are respectively provided with a linear air outlet narrow nozzle capable of providing linear wind power distributed in a surface shape, the air knives are distributed around the liquid removing chamber, the air outlet narrow nozzles provide the linear wind power distributed in the surface shape to the liquid removing chamber in a different linear axial mode and are used for blowing the inner surface and the outer surface of the box body, so that the problems that the wet cleaning process in the automatic cleaning process of the traditional wafer conveying box is improved, and the liquid of the material conveying box with a relatively complex inner structure is difficult to effectively removed are solved.

Description

Box body liquid removing device of material conveying box

Technical Field

The utility model relates to a conveying box for loading and transferring materials among different processing stations, a box body of the conveying box is subjected to a liquid removing technology required in a wet cleaning process, in particular to a box body liquid removing device of the conveying box for the materials.

Background

In the prior art, the material transfer box closest to the present invention is a Front Opening Unified Pod (FOUP), which is used to carry semiconductor wafers.

Semiconductor wafers are subjected to high cleanliness during the manufacturing process, particularly within each processing station, and during the transport of the wafers between processing stations, particularly to avoid the occurrence of particles in the environment which can affect the yield of the wafers.

As is known, the above-mentioned wafer transfer cassettes are commonly used for transporting semiconductor wafers, so that the plurality of wafer transfer cassettes can pick up and hold wafers in each processing station through the operation of the automated handling system, and can transfer wafers between the processing stations, and then unload the wafers when the wafers reach the processing station of the destination.

The wafer conveying box is formed by mutually assembling and buckling an openable front cover and a box body, and the double side wall surfaces in the box body are provided with protruding comb-shaped ribs for supporting wafers accommodated in the box body, so that a plurality of wafers can be accommodated in each wafer conveying box.

Based on the high standard requirement of cleanliness, the wafer transfer box must be automatically cleaned after being used for a certain period of time. Currently, known advanced technologies for automatically cleaning a wafer transport box are disclosed in patents CN102804332B, TW201400202A (taiwan patent), CN1082222A, and US20140069467a1, which teach to provide a cleaning station in a wafer production line, and to use an automated handling system to transfer a wafer transport box to be cleaned to a load port (load port) of the cleaning station, and use an automatic arm (robot) in the cleaning station to pick up the wafer transport box on the load port, and separate a front cover and a box body of the wafer transport box in advance, and then automatically pick up the front cover and the box body to sequentially pass through wet cleaning, vacuum drying in a negative pressure environment, and other processes to clean particles possibly remaining on the inner and outer surfaces of the front cover and the box body, thereby improving cleanliness of dust-free transport.

As is known, the wafer transfer box for dust-free wafer transfer is currently applied to the occasion of dust-free transfer of high-level circuit carrier boards, such as Embedded Multi-Die Interconnect Bridge (EMIB) circuit carrier boards or circuit carrier boards using ABF as a build-up material, and the surface area of these high-level circuit carrier boards is larger than that of the conventional PCB and is represented by a rectangular layout mode, so that the rigidity of the high-level circuit carrier boards is also softer than that of the conventional PCB. Therefore, when the objects in the conveying box are changed from the wafer to the high-order circuit carrier boards, the internal structure of the conveying box is changed, and then a plurality of high-order circuit carrier boards can be stably accommodated in each conveying box.

Referring to fig. 1 to 3, a material transport box 10 for accommodating the advanced circuit carrier 16 (hereinafter referred to as carrier 16) is disclosed, in which a box body 11 and a front cover 12 have the same features of a wafer transport box, and particularly, the material transport box includes a comb-shaped protruding rib 13 on a double-side wall 11a of the box body 11. In addition, because the surface area of the carrier 16 as the accommodating object is relatively large and soft, a suspension support rod 15 protruding from the bottom 11b to the accommodating cavity 14 must be formed in the box 11, so as to support the two ends 16a of the carrier 16 by the two-sided fins 13 and to support the middle section 16b of the carrier 16 by the suspension support rod 15, thereby preventing the carrier 16 from collapsing or interfering with each other in the transmission box 10 (as shown in fig. 1 and 2 in detail).

It can be seen that the complexity of the internal structure of the box body of the transport box is affected by the difference of different objects to be accommodated, and particularly, the overall structure of the transport box 10 for loading the carrier plate, which has the comb-shaped fins 13 and the suspension-shaped support rods 15 inside the box body 11, is relatively more complicated than the box body structure of the wafer transport box.

For this reason, the above-described disclosed cleaning technique for the transport box is still not ideal when cleaning a box body of the transport box having a relatively complicated internal structure (for example, a box body such as a carrier transport box). In particular, the wet cleaning technique disclosed in CN102804332B teaches to arrange a plurality of liquid nozzles and blowing nozzles in the same cleaning chamber, and after the box body is sprayed and cleaned by the liquid nozzles with circular aperture, the liquid residue on the inner and outer surfaces of the box body is blown off by the blowing nozzles with circular aperture arranged in the chamber. However, no matter whether the liquid spray nozzle and the air blowing nozzle are fixed or rotatable, the protruding suspension-shaped support rods in the box body are easy to be caught in the same chamber, so that the wet spraying efficiency and the liquid removing efficiency in wet cleaning are reduced, and even the box body with a complicated internal structure is not easy to take and place in the wet cleaning chamber, so that the needs for research and improvement are needed.

SUMMERY OF THE UTILITY MODEL

The utility model aims to improve the prior art that when the box body of a wafer conveying box is subjected to wet cleaning, a liquid spraying nozzle and an air blowing nozzle are arranged in the same cavity, and the box body is respectively subjected to spray cleaning of cleaning liquid and liquid removal of sprayed gas.

The utility model particularly improves the wet cleaning process in the automatic cleaning process of the traditional wafer transfer box, so that the wet cleaning and the liquid removing operation of the box body can be respectively carried out in different chambers.

Therefore, the utility model provides the box body liquid removing device of the material conveying box, so that the device can be suitable for a box body with a relatively complex internal structure, and the box body can independently receive the liquid removing operation in the liquid removing device after receiving the spray washing operation of cleaning liquid, so that the liquid removing efficiency of the box body is improved.

The utility model provides a box body liquid removing device, which comprises: a rotary table and a plurality of air knives are arranged in a liquid removing chamber; the liquid removing chamber is formed in a groove body, the top of the groove body is covered with a liftable groove cover, and the groove cover can open and close the liquid removing chamber in the groove body; the turntable is arranged at the bottom of the liquid removing chamber and is used for carrying the box body and driving the box body to rotate in the liquid removing chamber; the air knives are respectively provided with a linear air outlet narrow nozzle capable of providing linear wind power in planar distribution, the air knives are respectively arranged in the groove body and further distributed around the liquid removing chamber, and the air outlet narrow nozzles provide linear wind power in planar distribution to the liquid removing chamber in a different linear axial mode to blow the inner surface and the outer surface of the box body.

In a further embodiment, the turntable is made of a hollow lattice frame, the plurality of air knives includes a bottom air knife horizontally straddling the bottom of the turntable, the box has an opening, and the box is placed on the turntable through the opening; thus, the bottom air knife can provide linear wind force to penetrate through the rotary table, and the inner surface of the box body can be blown by the linear wind force provided by the bottom air knife.

In a further implementation, the plurality of air knives comprise at least one lateral air knife vertically arranged on one side of the inner wall of the tank body, and the outer surface of the box body is blown by linear wind power provided by the lateral air knife.

In a further implementation, the width of the linear wind power provided by the wind knife is relatively larger than the width of the inner surface and the outer surface of the box body in the corresponding axial direction.

In a further embodiment, the wind power generator further comprises a wind pressure supplier connected to the plurality of wind knives, and the wind pressure supplier is provided with an electric heater capable of heating the wind pressure.

In a further implementation, no liquid spray nozzle is provided in the liquid removal chamber.

In a further implementation, at least one suspension support rod protrudes from the box body, and the inner surface of the box body comprises the peripheral surface of the suspension support rod.

The technology disclosed by the utility model is directed to the box body of the material conveying box, and under the condition that a plurality of liquid drops of the cleaning liquid are remained on the inner surface and the outer surface of the box body after the cleaning liquid is sprayed, the box body can be placed into the liquid removing chamber of the box body liquid removing device disclosed by the utility model so as to remove the plurality of liquid drops remained in the cleaning liquid. In application, the technical effects produced by the utility model comprise:

1. the liquid removing process after the box body is subjected to wet cleaning is carried out by utilizing the independent liquid removing chamber, so that the phenomenon that water is accumulated on the air blowing nozzle easily when the traditional wet cleaning and liquid removing processes are carried out by using the same chamber together is avoided, in other words, the air knives have the advantage of being free from being invaded by cleaning liquid.

2. The liquid removing efficiency of residual liquid drops on the inner surface and the outer surface of the box body can be improved by utilizing a plurality of linear wind forces in different linear axial directions.

3. The technical defect that the box body cannot receive liquid removal in the rotating process in the traditional liquid removal process is overcome by the configuration combination of the air knife and the rotary table which are arranged in the liquid removal chamber.

4. The problem that the traditional air nozzle needs to be implanted into the box body and easily causes stumbling to the inner surface of the box body with relatively complex inner structure when the box body rotates is solved by the configuration and combination of the air knife and the rotary table which are provided in the liquid removing chamber; particularly, the box body is placed on the rotary table in a mode of reversing the opening downwards, so that the bottom air knife which is arranged at the bottom of the rotary table in a spanning mode can blow the inner surface of the box body from bottom to top outside the opening without being implanted into the box body; accordingly, for the inner surface of the box body with relatively complex structures, such as the suspension-shaped support rod protruding from the inner part, the bottom air knife provides linear wind power distributed in a planar manner, and liquid drops staying on the inner surface of the box body can be blown off by removing the bottom without dead angles in the rotation process of the box body.

5. The linear wind power provided by the plurality of wind knives in different linear axial directions can be the linear wind power after being heated by the electric heater and filtering pollution particles, so that the liquid removing efficiency of residual liquid drops on the inner surface and the outer surface of the blowing box body is improved.

It should be noted that, according to the above disclosure, the present invention can provide not only the liquid removal from the case body of the material conveying case with a relatively complicated structure, such as the suspension support rod, but also the liquid removal from the case body of the wafer conveying case with a generally uncomplicated structure, and thus, the excellent liquid removal effect can be obtained. Therefore, the detailed description of the present invention will be provided with reference to the accompanying drawings.

Drawings

Fig. 1 is an exploded perspective view of a material transport box.

Fig. 2 is a sectional view of the material transfer box.

Fig. 3 is a perspective view of the liquid removing device of the box body of the material conveying box of the utility model.

FIG. 4 is a cross-sectional view of the cartridge body fluid removal device of the material transfer cartridge of the present invention.

Fig. 5 is a sectional view a-a of fig. 4.

FIG. 6 is a perspective view of the liquid removing device of the material transporting box of the present invention connected to a wind pressure supplier.

FIG. 7 is a perspective view of the material transfer box with the body of the box body positioned within the fluid removal device.

Description of reference numerals: 10-a material transfer box; 11-a box body; 11 a-wall; 11 b-bottom; 11 c-opening; 11 d-inner surface; 11 e-an outer surface; 12-a front cover; 13-ribs; 14-a housing chamber; 15-support rods; 16-a carrier plate; 16 a-double ended; 16 b-a middle section; 20-a liquid removal chamber; 21-a groove body; 22-a slot cover; 23-an exhaust channel; 24-a drainage flow channel; 30-a turntable; 31-a driver; 40-air knife; 40 a-air outlet narrow nozzle; 41-bottom air knife; 42-lateral air knife; 50-wind pressure supplier; 51-an electrical heating element; 52-Filter element.

Detailed Description

First, referring to fig. 3, a preferred embodiment of the present invention is disclosed, which illustrates a box body fluid removing device for a material conveying box provided by the present invention, including: a liquid removing chamber 20, a rotary table 30 and a plurality of air knives, wherein:

the liquid removing chamber 20 is formed in a tank body 21, a liftable tank cover 22 is covered on the top of the tank body 21, when the tank cover 22 is opened, the liquid removing chamber 20 is communicated with the outside, the box body 11 to be subjected to liquid removing operation can be placed in the liquid removing chamber 20, or the box body 11 which is subjected to liquid removing operation is taken out from the liquid removing chamber 20; on the contrary, when the cover is closed, a closed space is formed in the fluid removal chamber, so as to facilitate the fluid removal operation of the box body 11 in the fluid removal chamber 20, and prevent the cleaning fluid from splashing to the fluid removal chamber 20 when the fluid removal operation is performed on the box body 11. The configuration of the liquid removing nozzle is implemented in the liquid removing chamber 20, in other words, the wet cleaning and the liquid removing operation of the box body 11 are respectively performed in different chambers, and the liquid removing efficiency of the box body 11 can be improved by the box body 11 receiving the liquid removing operation in the liquid removing device independently.

Referring to fig. 3, 4 and 5, it is described that the turntable 30 is disposed at the bottom of the liquid removing chamber 20, and the box 11 is placed on the turntable 30 in an inverted manner with the opening 11c facing downward (as shown in fig. 7), and is driven by the turntable 30 to rotate in the liquid removing chamber 20. Further, the turntable 30 is made of a hollow lattice frame, and the turntable 30 can be driven by a driver 31 such as a motor to rotate in the horizontal direction, so as to drive the box 11 to rotate in the liquid removing chamber 20.

The air knives 40 have a linear air outlet slot 40a, so that the air knives 40 can provide linear wind power distributed in a planar manner through the linear air outlet slot 40a, and the air knives 40 are respectively arranged in the tank body 21 and further distributed around the liquid removing chamber 20, so that the air knives 40 can provide linear wind power distributed in a planar manner to the liquid removing chamber 20 from different linear axial directions to blow the inner surface 11d and the outer surface 11e of the box body 11. The inner surface 11d of the case 11 is also embodied to include the circumferential surfaces of the comb-shaped ribs 13 and the hanging-shaped support rods 15 provided in the case 11.

The plurality of air knives 40 include a bottom air knife 41 and a lateral air knife 42, wherein the bottom air knife 41 is horizontally disposed on the bottom of the turntable 30 in a straddling manner, and the lateral air knife 42 is vertically disposed on one side of the inner wall of the trough body 21. In specific implementation, the linear wind power provided by the bottom wind knife 41 can penetrate through the turntable 30 and blow the inner surface 11d of the box body 11 through the opening 11c, the linear wind power provided by the lateral wind knife 42 can blow the outer surface 11e of the box body 11, when the box body 11 receives the blowing of the linear wind power which is distributed in a planar manner in different axial directions by the bottom wind knife 41 and the lateral wind knife 42, respectively, the turntable 30 can drive the box body 11 to rotate, so that the linear wind power provided by the bottom wind knife 41 and the lateral wind knife 42 can be uniformly blown to the inner surface 11d and the outer surface 11e of the box body 11, so as to fully blow off the liquid beads of the cleaning liquid attached to the inner surface 11d and the outer surface 11e of the box body 11, and further improve the liquid removal effect on the box body 11; it should be noted that the rotation manner of the turntable 30 driving the box 11 means that the rotation at variable speeds including the forward rotation and reverse rotation procedures can be implemented according to the liquid removing effect of the box 11 desired by the control end. Furthermore, in an implementation, the width W3 of the linear wind force provided by the bottom wind knife 41 may be relatively larger than the width W1 of the inner surface 11d of the box body 11 in the corresponding axial direction, and the width W4 of the linear wind force provided by the lateral wind knife 42 may be relatively larger than the width W2 of the outer surface 11e of the box body 11 in the corresponding axial direction, so as to increase the coverage of the linear wind force in different axial directions, so as to enhance the liquid removing effect of the linear wind force on the inner and outer surfaces 11d, 11e of the box body 11.

An exhaust channel 23 communicated with the outside is arranged on one side of the inner wall of the tank body 21, and the gas blown out by the air knife 40 in the tank body 21 is guided by the exhaust channel 23 and discharged to the outside of the tank body 21; the bottom of the tank 21 is provided with a liquid drainage channel 24, and the liquid drops blown off from the inner surface 11d and the outer surface 11e of the box 11 are guided by the liquid drainage channel 24 and discharged to the outside of the tank 21.

Referring to fig. 6, the air blade 40 is connected to a wind pressure supplier 50, and the wind pressure supplier 50 includes an electric heating element 51 and a filter element 52 made of HEPA, so that the air generated by the wind pressure supplier 50 is filtered and heated before the inner surface 11d and the outer surface 11e of the linear wind blowing case 11 having cleanliness and a heating temperature are provided by the air blade 40. Accordingly, in the whole liquid removing operation, the heating volatilization speed of the cleaning liquid beads remaining on the inner and outer surfaces 11d, 11e of the box body 11 can be increased (i.e. the drying efficiency is improved), and the pollution particles of the gas in the linear wind force provided by the wind knife 40 can be filtered out, so as to ensure the cleanliness of the inner surface 11d and the outer surface 11e of the box body 11 after receiving the liquid removing. It should be noted that, after the liquid is removed by heating the linear wind by the electric heater 51, the box 11 itself has a preheating temperature higher than the normal temperature but lower than the boiling point of the water molecules, and this preheating temperature can drive the water molecules remained on the inner and outer surfaces 11f, 11g of the box 11 to be preheated, so that when the box 11 is continuously vacuum-dried, the boiling points of the water molecules remained on the inner and outer surfaces 11f, 11g of the box 11 are not instantaneously reduced by the vacuum pressure, so as to generate the freezing phenomenon, thereby contributing to shortening the time period for the subsequent vacuum-drying process of the box 11.

The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the utility model as defined in the appended claims.

Claims (7)

1. The utility model provides a box body liquid trap of material transfer box which characterized in that includes:

the liquid removing cavity is formed in a groove body, the top of the groove body is covered with a liftable groove cover, and the groove cover can open and close the liquid removing cavity in the groove body;

a turntable configured at the bottom of the liquid removing chamber for loading the box body and driving the box body to rotate in the liquid removing chamber; and

the air outlets are respectively provided with a linear air outlet narrow nozzle which can provide linear wind power in planar distribution, the air outlets are respectively arranged in the tank body and further distributed around the liquid removing chamber, and the air outlets provide linear wind power in planar distribution to the liquid removing chamber in a different linear axial mode and are used for blowing the inner surface and the outer surface of the box body.

2. The apparatus for removing liquid from a container body of a material transfer container as defined in claim 1, further comprising: the rotary table is made of a hollow latticed frame body, the plurality of air knives comprise a bottom air knife horizontally arranged at the bottom of the rotary table in a spanning mode, the box body is provided with an opening, the box body is placed on the rotary table through the opening, the bottom air knife can provide linear wind power to penetrate through the rotary table, and the inner surface of the box body can be blown through the linear wind power provided by the bottom air knife.

3. The apparatus for removing liquid from a container body of a material transfer container as set forth in claim 2, wherein: the plurality of air knives also comprise at least one lateral air knife which is vertically arranged on one side of the inner wall of the groove body, and the outer surface of the box body is blown by linear wind power provided by the lateral air knife.

4. The apparatus for removing liquid from a container body of a material transfer container as set forth in claim 2, wherein: the width of the wind knife for providing linear wind power is relatively larger than the width of the inner surface and the outer surface of the box body in the corresponding axial direction.

5. The apparatus for removing liquid from a container body of a material transfer container as defined in claim 1, further comprising: the wind pressure supplier is provided with an electric heater capable of heating the wind pressure.

6. The apparatus for removing liquid from a container body of a material conveying container as set forth in any one of claims 1 to 5, wherein: the liquid removing chamber is not provided with a liquid spraying nozzle.

7. The apparatus for removing liquid from a container body of a material conveying container as set forth in any one of claims 1 to 5, wherein: at least one suspension supporting rod is convexly extended in the box body, and the inner surface of the box body comprises the peripheral surface of the suspension supporting rod.

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