CN115180382A - Translation device and translation method for semiconductor material containing box - Google Patents
Translation device and translation method for semiconductor material containing box Download PDFInfo
- Publication number
- CN115180382A CN115180382A CN202210705921.2A CN202210705921A CN115180382A CN 115180382 A CN115180382 A CN 115180382A CN 202210705921 A CN202210705921 A CN 202210705921A CN 115180382 A CN115180382 A CN 115180382A
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- China
- Prior art keywords
- accommodating
- base
- seat
- box
- semiconductor material
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 36
- 239000000463 material Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 230000007246 mechanism Effects 0.000 abstract description 5
- 230000004308 accommodation Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005571 horizontal transmission Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000005570 vertical transmission Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
Abstract
The application relates to a semiconductor material accommodating box translation device and a method, comprising the following steps: base, slider, middle sliding block, belt transmission band and hold the box and hold the seat. The whole transmission steps are as follows: the driving piece, the sliding block, the middle sliding block and the accommodating box accommodating seat amplify the movement displacement of the sliding block by three times through the mechanism configuration, namely the movement range of the accommodating box accommodating seat is three times of the movement displacement of the sliding block, and under the condition that the sliding block is limited, the movement range of the accommodating box accommodating seat is greatly expanded.
Description
Technical Field
The application belongs to the technical field of semiconductor preparation equipment, and particularly relates to a translation device and a translation method for a semiconductor material accommodating box.
Background
In the cleaning process of the wafer, a semiconductor material accommodating box such as a wafer box is generally needed to be used for carrying out multi-wafer transportation, and the wafer needs to be cleaned in a plurality of grooves, so that the wafer box needs to be frequently moved, and the wafer box needs to be subjected to X/Y/Z three-axis movement.
Chinese patent document CN203377202U discloses a horizontal moving device for conveying electronic components, which is used for transporting a container for containing electronic components. The utility model discloses carry horizontal migration device for electronic component can lateral shifting hold the container of wafer, need not the bulk movement wafer conveyor to save labour, improve production efficiency's transport electronic component. Such a horizontal movement device is suitable for horizontal movement with sufficient space.
However, the driving device is limited in the field installation position, and the driving device does not have enough space for installing the long guide rail, so that the driving device capable of enlarging the moving distance is required.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to solve the defects in the prior art, the semiconductor material accommodating box translation device and the translation method capable of amplifying the movement distance are provided.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a semiconductor material containment cassette translation device comprising:
the base is provided with two opposite surfaces, wherein one surface is provided with a guide rail, and the other surface is provided with a second slide rail and a first rack;
the sliding block is driven by the driving piece to move on the base, and the bottom of the sliding block is provided with a gear;
the middle sliding block is provided with a third sliding rail and a second rack on one surface facing the base, and a fourth sliding rail on the other surface far away from the base;
the belt transmission belt is arranged on the other side of the middle sliding block and consists of a belt and belt pulleys at two ends of the belt;
the accommodating box accommodating seat is used for accommodating the semiconductor material accommodating seat;
the sliding block is positioned between the middle sliding block and the base, two sides of the sliding block are respectively matched with the second sliding rail and the third sliding rail, and the gear is simultaneously matched with the first rack and the second rack;
the containing box containing seat is fixedly connected with the belt and arranged on the fourth sliding rail.
Preferably, the semiconductor material accommodating box translation device of the invention is characterized in that the base is connected with the sliding block through a ball screw transmission pair.
Preferably, the accommodating box translation device for semiconductor materials of the invention is provided with three positioning pins on the accommodating box seat, a bayonet lock is arranged in the center of the three positioning pins, and a rotary driving part is arranged at the bottom of the accommodating box seat and used for driving the bayonet lock to rotate 90 degrees.
Preferably, in the semiconductor material accommodating box translation device, the three positioning pins are arranged in an isosceles triangle.
Preferably, the base is formed by surrounding four substrates, and a ball screw transmission pair is placed in the region surrounded by the middle of the base.
Preferably, the semiconductor material accommodating box translation device of the invention is characterized in that the sliding block passes through and extends from the upper part of the base to the other side of the base from one side of the base through the connecting block.
Preferably, in the semiconductor material accommodating box translation device, the belt conveying belt is replaced by a chain conveying belt.
The invention also provides a translation method of the semiconductor material accommodating box, which uses the translation device of the semiconductor material accommodating box and comprises the following steps:
placing the wafer box on an accommodating box accommodating seat;
adjusting the position of the accommodating box accommodating seat in the X direction on the horizontal plane;
adjusting the position of the accommodating box accommodating seat on the vertical surface in the Z direction;
adjusting the position of the accommodating box accommodating seat in the Y direction on the horizontal plane;
and taking the wafer box from the containing box containing seat by using a manipulator.
The invention has the beneficial effects that:
the application discloses semiconductor material holds box translation device, whole transmission step is: the driving piece, the sliding block, the middle sliding block and the accommodating box accommodating seat amplify the movement displacement of the sliding block by three times through the mechanism configuration, namely the movement range of the accommodating box accommodating seat is three times of the movement displacement of the sliding block, and under the condition that the sliding block is limited, the movement range of the accommodating box accommodating seat is greatly expanded.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
FIG. 1 is a schematic structural view of a translation device of a semiconductor material containing box according to an embodiment of the present application;
FIG. 2 is a schematic structural view of a semiconductor material accommodating case translation device for hiding an intermediate slider according to an embodiment of the present application;
FIG. 3 is a schematic configuration view of a semiconductor material accommodation cassette translation device hiding accommodation cassette accommodation seats according to an embodiment of the present application;
FIG. 4 is a side view of a semiconductor material containment cassette translation device in accordance with an embodiment of the present application;
the reference numbers in the figures are:
41. a base;
42. a slider;
43. a middle slider;
44. a belt conveyor;
45. an accommodating box accommodating seat;
411. a second slide rail;
412. a first rack;
422. a gear;
451. positioning pins;
452. a bayonet lock;
453. the driver is rotated.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the present application and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and thus are not to be construed as limiting the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Example 1
The present embodiment provides a semiconductor material accommodation cassette translation device, as shown in fig. 1, comprising:
a base 41 having two opposite surfaces, wherein one surface is provided with a guide rail, and the other surface is provided with a second slide rail 411 and a first rack 412;
a slider 42 driven by a driving member to move on the base 41, the bottom of which has a gear 422;
a middle sliding block 43, one surface facing the base 41 is provided with a third sliding rail and a second rack, and the other surface far away from the base 41 is provided with a fourth sliding rail;
a belt transmission belt 44, which is arranged on the other side of the middle sliding block 43 and consists of a belt and belt pulleys at two ends of the belt;
a housing box-containing seat 45 for placing a semiconductor material-containing seat;
the sliding block 42 is positioned between the middle sliding block 43 and the base 41, two sides of the sliding block 42 are respectively matched with the second sliding rail 411 and the third sliding rail, and the gear 422 is simultaneously matched with the first rack 412 and the second rack;
the accommodating box accommodating seat 45 is fixedly connected with the belt and arranged on the fourth sliding rail.
The transmission steps of the accommodating box placing component 4 are as follows: the driving piece, the sliding block 42, the middle sliding block 43 and the accommodating box containing seat 45 are configured by the mechanism, so that the moving displacement of the sliding block 42 is amplified by three times, namely the moving range of the accommodating box containing seat 45 is three times of the moving displacement of the sliding block 42, and under the condition that the sliding block 42 is limited, the moving range of the accommodating box containing seat 45 is greatly expanded.
Further, three positioning pins 451 are arranged on the accommodating box containing seat 45, a bayonet 452 is further arranged at the center of the three positioning pins 451, and a rotary driving member 453 is arranged at the bottom of the accommodating box containing seat 45 for driving the bayonet 452 to rotate by 90 °.
Further, three positioning pins 451 are arranged in an isosceles triangle.
Further, the base 41 is formed by surrounding four substrates, and a ball screw transmission pair is placed in a region surrounded by the middle.
Further, the sliding block 42 extends from one side of the base 41 to the other side of the base 41 through a connecting block from above the base 41.
Example 2
The present embodiment provides a semiconductor material accommodation cassette translation method using the semiconductor material accommodation cassette translation apparatus described in embodiment 1, comprising the steps of:
placing the wafer cassette on the cassette accommodating seat 45;
adjusting the position of the accommodating box accommodating seat 45 in the X direction on the horizontal plane, and utilizing a semiconductor material accommodating box translation device;
adjusting the Z-direction position of the accommodating box accommodating seat 45 on the vertical surface, and utilizing other vertical transmission mechanisms;
adjusting the position of the accommodating box containing seat 45 in the Y direction on the horizontal plane, and utilizing other horizontal transmission mechanisms;
the wafer cassette is removed from the cassette receiving seat 45 using a robot.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims. The technical scope of the present application is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (8)
1. A semiconductor material containment cassette translation device, comprising:
a base (41) which is provided with two opposite surfaces, wherein one surface is provided with a guide rail, and the other surface is provided with a second slide rail (411) and a first rack (412);
a slider (42) driven by the driving member to move on the base (41), the bottom of the slider having a gear (422);
the middle sliding block (43) is provided with a third sliding rail and a second rack on one surface facing the base (41), and a fourth sliding rail on the other surface far away from the base (41);
a belt transmission belt (44) which is arranged on the other side of the middle sliding block (43) and consists of a belt and belt pulleys at two ends of the belt;
the containing box containing seat (45) is used for placing the semiconductor material containing seat;
the sliding block (42) is positioned between the middle sliding block (43) and the base (41), two sides of the sliding block (42) are respectively matched with the second sliding rail (411) and the third sliding rail, and the gear (422) is simultaneously matched with the first rack (412) and the second rack;
the accommodating box accommodating seat (45) is fixedly connected with the belt and arranged on the fourth sliding rail.
2. The device for translating a containment box for semiconductor materials according to claim 1, characterized in that said base (41) is connected to the slider (42) by means of a ball screw transmission.
3. The semiconductor material accommodating box translation device according to claim 1, characterized in that three positioning pins (451) are arranged on the accommodating box containing seat (45), a bayonet (452) is further arranged at the center of the three positioning pins (451), and a rotary driving part (453) is arranged at the bottom of the accommodating box containing seat (45) and used for driving the bayonet (452) to rotate for 90 degrees.
4. The device for translating a semiconductor material containing box according to claim 3, wherein the three positioning pins (451) are arranged in an isosceles triangle.
5. The device for translating a semiconductor material containing box according to claim 1, wherein the base (41) is defined by four base plates, and a ball screw transmission pair is arranged in the area defined by the middle.
6. The device for translating a containment box for semiconductor materials according to claim 1, characterized in that said slider (42) extends from one side of said base (41) through a connection block from above said base (41) to the other side of said base (41).
7. The device for translating a semiconductor material containing cassette according to claim 1, characterized in that the belt conveyor (44) is replaced by a chain conveyor.
8. A semiconductor material containment case translation method using the semiconductor material containment case translation device according to any one of claims 1 to 7, characterized by comprising the steps of:
placing the wafer box on an accommodating box accommodating seat (45);
adjusting the position of the accommodating box accommodating seat (45) in the X direction on the horizontal plane;
adjusting the position of the accommodating box accommodating seat (45) in the Z direction on the vertical surface;
adjusting the position of the accommodating box accommodating seat (45) on the horizontal plane in the Y direction;
the wafer cassette is taken out from the cassette housing seat (45) by a robot.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210705921.2A CN115180382A (en) | 2022-06-21 | 2022-06-21 | Translation device and translation method for semiconductor material containing box |
| PCT/CN2022/109014 WO2023245814A1 (en) | 2022-06-21 | 2022-07-29 | Device and method for translating semiconductor material accommodating box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210705921.2A CN115180382A (en) | 2022-06-21 | 2022-06-21 | Translation device and translation method for semiconductor material containing box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115180382A true CN115180382A (en) | 2022-10-14 |
Family
ID=83514792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210705921.2A Pending CN115180382A (en) | 2022-06-21 | 2022-06-21 | Translation device and translation method for semiconductor material containing box |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115180382A (en) |
| WO (1) | WO2023245814A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201825560U (en) * | 2010-09-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | Locking type lifting and translation conveying device |
| CN210853113U (en) * | 2019-09-24 | 2020-06-26 | 临安临峰氟塑有限公司 | Boxing device for raw material belt processing production |
| CN212830874U (en) * | 2020-07-29 | 2021-03-30 | 铜陵市凯瑞特电子有限公司 | Capacitor machining is with fixed frock |
| CN113003135A (en) * | 2020-12-16 | 2021-06-22 | 方刚 | Vertical conveying equipment safety and stability mechanism of heavy object is used in automobile parts processing |
| CN214086207U (en) * | 2020-12-28 | 2021-08-31 | 广州伍粤塑料制品有限公司 | Automatic conveying device for producing skin care product plastic packaging containers |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102001525B (en) * | 2010-09-30 | 2012-07-04 | 东莞宏威数码机械有限公司 | Locked elevating translational transmission equipment |
| US10493618B1 (en) * | 2018-11-20 | 2019-12-03 | Jiangsu Fine Storage Information Technology Co., Ltd. | Multi-axis mechanical gripper with symmetrically fixed pair of racks |
| CN110541571B (en) * | 2019-10-12 | 2021-11-16 | 广东博智林机器人有限公司 | Straight line module and construction robot |
-
2022
- 2022-06-21 CN CN202210705921.2A patent/CN115180382A/en active Pending
- 2022-07-29 WO PCT/CN2022/109014 patent/WO2023245814A1/en unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201825560U (en) * | 2010-09-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | Locking type lifting and translation conveying device |
| CN210853113U (en) * | 2019-09-24 | 2020-06-26 | 临安临峰氟塑有限公司 | Boxing device for raw material belt processing production |
| CN212830874U (en) * | 2020-07-29 | 2021-03-30 | 铜陵市凯瑞特电子有限公司 | Capacitor machining is with fixed frock |
| CN113003135A (en) * | 2020-12-16 | 2021-06-22 | 方刚 | Vertical conveying equipment safety and stability mechanism of heavy object is used in automobile parts processing |
| CN214086207U (en) * | 2020-12-28 | 2021-08-31 | 广州伍粤塑料制品有限公司 | Automatic conveying device for producing skin care product plastic packaging containers |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023245814A1 (en) | 2023-12-28 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 225500 No. 151, Keji Avenue, Sanshui street, Jiangyan District, Taizhou City, Jiangsu Province Applicant after: Jiangsu Yadian Technology Co.,Ltd. Address before: 225500 No. 151, Keji Avenue, Sanshui street, Jiangyan District, Taizhou City, Jiangsu Province Applicant before: Jiangsu Yadian Technology Co.,Ltd. |
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