CN115144978B - Laser shaping device and optical fiber coupling method - Google Patents
Laser shaping device and optical fiber coupling method Download PDFInfo
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- CN115144978B CN115144978B CN202110865573.0A CN202110865573A CN115144978B CN 115144978 B CN115144978 B CN 115144978B CN 202110865573 A CN202110865573 A CN 202110865573A CN 115144978 B CN115144978 B CN 115144978B
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- 238000007493 shaping process Methods 0.000 title claims abstract description 132
- 239000013307 optical fiber Substances 0.000 title claims abstract description 114
- 238000010168 coupling process Methods 0.000 title claims abstract description 85
- 230000008878 coupling Effects 0.000 claims abstract description 74
- 238000005859 coupling reaction Methods 0.000 claims abstract description 74
- 230000005540 biological transmission Effects 0.000 claims abstract description 55
- 230000007704 transition Effects 0.000 claims abstract description 38
- 230000008859 change Effects 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims description 87
- 238000012545 processing Methods 0.000 claims description 53
- 239000000835 fiber Substances 0.000 claims description 48
- 230000003287 optical effect Effects 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 18
- 238000011144 upstream manufacturing Methods 0.000 claims description 15
- 230000006978 adaptation Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 14
- 238000000265 homogenisation Methods 0.000 description 12
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- 241001270131 Agaricus moelleri Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/421—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical component consisting of a short length of fibre, e.g. fibre stub
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Abstract
The application discloses a laser shaping device and an optical fiber coupling method. The laser shaping device comprises a laser generator, a laser shaping module and a collimation head which are sequentially arranged along a laser light path. Wherein the laser generator is used for emitting few-mode or multi-mode laser beams; the laser shaping module is used for shaping the laser beam; the collimating head is used for collimating the shaped laser beam. The laser shaping module comprises a coupling unit, a transition optical fiber, a mode field adapting unit and a shaping transmission optical fiber, wherein the core diameter of the transition optical fiber is larger than that of the shaping transmission optical fiber, and the numerical aperture of the transition optical fiber is smaller than that of the shaping transmission optical fiber. The laser shaping device provided by the embodiment of the application avoids the damage of the optical fiber caused by the directivity change and the beam energy change of laser, maintains the compatibility and stability of a coupling system, and ensures the output of high-quality shaping and homogenizing light spots.
Description
Technical Field
The application relates to the technical field of laser processing, in particular to a laser shaping device and an optical fiber coupling method.
Background
With the development of laser flexible processing, energy optical fibers have been widely used in the field of laser processing due to the flexible transmission and shaping effects.
The conventional high-beam-quality fundamental mode laser beam usually adopts a DOE (DIFFRACTIVE OPTICAL ELEMENT, a diffraction optical element) for beam shaping, but the DOE design for the few-mode or multi-mode laser beam is very difficult, and meanwhile, the uniformity control of the beam index of the few-mode or multi-mode laser beam is difficult, so that the few-mode or multi-mode laser beam usually adopts a homogenizing optical fiber for beam homogenizing and shaping.
The space light beam is coupled into the optical fiber to carry out light beam transmission, so that the directivity of the laser is required to be more stable by adopting a harsher environment temperature control mode, or the directivity allowance is left when the light path is designed, otherwise, the directivity change of the laser can cause the attenuation of the coupling efficiency or the damage of the optical fiber. The high-directivity laser in the prior art is high in price, and the scheme compatibility and stability of the reserved directivity allowance of the light path are poor. In addition, the prior art generally uses the same core diameter optical fiber to carry out optical fiber coupling transmission and shaping, is difficult to flexibly realize the effects of high damage threshold, good homogenization effect, flexible and controllable BPP and the like, and meanwhile, generally lacks active adjusting systems such as directivity feedback adjustment, variable beam expansion coupling, optical fiber mode disturbance homogenization control and the like.
Patent CN108267819a discloses a method for improving the coupling efficiency of high-power pulse laser fiber, which comprises the following steps: the first step: and (5) selecting an optical fiber. And a second step of: and (5) tapering the optical fiber. And a third step of: and (5) optical fiber connection. Fourth step: and (3) lens coupling. The invention adopts the large-core fiber as the receptor of the space laser; after laser passes through the large-core optical fiber, compared with a mode of laser space direct coupling, the laser space energy distribution is homogenized, and when the laser is coupled into the small-core optical fiber, the end face loss can be effectively reduced, and the coupling threshold is high; the large-diameter optical fiber and the small-diameter optical fiber are connected through the optical fiber connector, so that alignment can be conveniently realized. The patent discloses that an optical fiber connector is arranged between a large-core optical fiber and a small-core optical fiber and is used for connecting the large-core optical fiber and the small-core optical fiber, but the optical fiber connector does not have the function of enhancing the compatibility and the stability of an optical fiber coupling system, so that the optical fiber coupling method disclosed by the patent has poor homogenizing and shaping effects on light beams.
Patent CN102081200a discloses a variable beam quality laser beam self-adaptive optical fiber coupling and output collimation device. The laser beam is collimated by the beam expansion and then coupled to the front end face of the optical fiber transmission system by the focusing lens and transmitted in the optical fiber transmission system, and the light beam emitted by the optical fiber transmission system is collimated by the collimating lens. The collimating lens reflects a small amount of light to be received by the detection unit, which converts the received light signal into an electrical signal. The processing unit performs accumulation summation on the electric signals received by the detection unit. The controller controls the one-dimensional micro-motion platform to move in one dimension along the axial direction in a halving searching mode according to the processing result obtained by the processing unit, thereby driving the optical adjusting frame and the focusing lens to move, and solving the problem of coupling focusing light spot drift of the variable beam quality laser in an automatic compensation mode. The patent improves the beam quality by collecting the collimated beam and adjusting the position of the focusing lens, but the technology of the patent has poor effects on shaping, homogenizing and focusing the light spot of the few-mode or multi-mode beam.
Disclosure of Invention
The object of the present application is to solve at least to some extent one of the above-mentioned technical problems.
Therefore, a first object of the present application is to provide a laser shaping device, which avoids the damage of the optical fiber caused by the directivity change of the laser and the energy change of the light beam; the compatibility and stability of the coupling system are maintained, and the high-quality shaping and homogenizing light spot is ensured to be output.
A second object of the present application is to propose a method of optical fiber coupling.
In order to achieve the above object, an embodiment of the first aspect of the present application provides a laser shaping device, which includes a laser generator, a laser shaping module, and a collimator sequentially disposed along a laser light path,
The laser generator is used for emitting few-mode or multi-mode laser beams;
The laser shaping module is used for shaping the laser beam;
The collimating head is used for collimating the shaped laser beam;
The laser shaping module comprises a coupling unit, a transition optical fiber, a mode field adapting unit and a shaping transmission optical fiber, wherein the core diameter of the transition optical fiber is larger than that of the shaping transmission optical fiber, and the numerical aperture of the transition optical fiber is smaller than that of the shaping transmission optical fiber.
Optionally, the large core diameter D of the transition fiber is greater than 1.5 times the laser beam diameter D 0 of the incident transition fiber.
Optionally, the mode field adapting unit is an optical fiber mode field adapter MFA or a variable coupling unit, and is configured to match mode fields of the transition optical fiber and the shaping transmission optical fiber.
Optionally, the variable coupling unit includes a collimating lens, a beam expander and a first coupling lens, where the collimating lens, the beam expander and the first coupling lens are sequentially disposed along a laser light path.
Optionally, the variable coupling unit further comprises a first spectroscope, a first reflecting mirror and a second coupling mirror, the shaped transmission optical fiber comprises a first shaped transmission optical fiber and a second shaped transmission optical fiber, the collimating head comprises a first collimating head and a second collimating head,
The first spectroscope is arranged at the downstream of the light path of the beam expander and at the upstream of the light path of the first coupling mirror;
The first spectroscope is used for carrying out light splitting treatment on the laser beams passing through the beam expander, so that the first path of laser beams after light splitting sequentially pass through the first coupling mirror, the first shaping transmission optical fiber and the first collimating head, and the second path of laser beams after light splitting sequentially pass through the first reflecting mirror, the second coupling mirror, the second shaping transmission optical fiber and the second collimating head.
Optionally, the laser shaping device further comprises a mode scrambler and a light spot detection module,
The mode scrambler is arranged at the downstream of the optical path of the variable coupling unit and at the upstream of the optical path of the shaping transmission optical fiber;
The light spot detection module is arranged at the light path downstream of the collimating head and is used for detecting the light spot quality of the laser beam emitted by the collimating head and feeding back the light spot quality to the mode scrambler;
and adjusting the light spot quality by controlling the mode scrambler.
Optionally, the light spot detection module comprises a second beam splitter, a first focusing mirror and a vision module,
The second beam splitter is used for splitting at least part of the laser beam emitted from the collimating head and irradiating the laser beam to the vision module through the first focusing mirror;
The visual module is connected with the mode scrambler and is used for feeding detected light spot quality back to the mode scrambler.
Optionally, the laser shaping device further comprises a directivity compensation module,
The directivity compensation module is arranged at the downstream of the light path of the laser generator, and at the upstream of the laser shaping module, and is used for detecting the offset of the laser beam and adjusting the laser beam according to the offset.
Optionally, the directivity compensation module comprises a compensation mirror group, a directivity detection component and a controller,
The controller is respectively connected with the directivity detection assembly of the compensation lens group;
the compensating lens group is used for dividing the laser beam emitted by the laser into two paths, namely a processing light path and a detection light path;
The processing light path is shot into the laser shaping module through the compensating mirror group, and the detection light path is shot into the directivity detection assembly through the compensating mirror group;
the directivity detection component is used for detecting the offset of the light beam of the detection light path;
The controller is used for controlling the compensation lens group according to the offset to realize adjustment of the processing light path and the detection light path.
Optionally, the laser shaping device further comprises a shutter,
The optical gate is arranged at the downstream of the compensation lens group, is arranged at the upstream of the laser shaping module and is electrically connected with the controller, and the optical gate is used for controlling the on-off of the processing light path.
Optionally, the compensation lens group includes second speculum and third spectroscope, the third spectroscope with second speculum parallel arrangement, the third spectroscope is located the processing light path low reaches of second speculum, the second speculum multidimensionally is adjustable, the third spectroscope is fixed.
Optionally, a second focusing mirror is arranged on the light path between the compensating mirror group and the directivity detection component.
According to the laser shaping device provided by the embodiment of the application, the compatibility and stability of the optical fiber coupling system are enhanced through the laser shaping module, the influence of laser directivity on the coupling efficiency is reduced, and the risk of burning loss of the end face of the optical fiber caused by directivity deviation is reduced.
To achieve the above object, an embodiment of a second aspect of the present application provides an optical fiber coupling method, which is applied to the laser shaping device described in the embodiment of the above aspect, and the method includes:
Determining an initial position of a detection light spot;
detecting the real-time position of the detection light spot in real time, and calculating the offset of the detection light spot according to the real-time position and the initial position;
And carrying out directivity adjustment on the detection light spots according to the offset.
Optionally, determining the initial position of the detection spot includes:
And adjusting the light path of the laser beam, and recording the initial position of the light spot of the detection light path of the laser beam when the processing light path of the laser beam is stable.
Optionally, the directivity adjustment of the detected light spot according to the offset includes:
when b < D-1.5D 0, no directivity adjustment is required;
when D-1.5D 0＜b＜D-1.2d0 is reached, the directivity compensation module of the laser shaping device is utilized to adjust directivity;
When D-1.2d 0＜b＜D-d0 is carried out, after the optical gate is closed, the directivity compensation module of the laser shaping device is utilized for directivity adjustment;
When b > D-D 0, turning off the laser generator or controlling the power of the laser generator to be reduced to zero, and then using a directivity compensation module of the laser shaping device to adjust directivity.
Optionally, the method further comprises:
the curvature of the optical fiber is adjusted by using a mode scrambler of the laser shaping device to change the energy duty ratio of different modes in the optical fiber, so as to realize the adjustment of the light spot quality of the laser beam.
According to the optical fiber coupling method, the position offset of the detection light spot is detected in real time, and directivity compensation is performed through the angle adjusting lens group, so that laser can be effectively coupled into the transition optical fiber, and the light spot quality is improved.
Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application. In the drawings:
fig. 1 is a schematic diagram of a laser shaping device according to embodiment 1 of the present application;
fig. 2 is a schematic diagram of a laser shaping device according to embodiment 1 of the present application;
fig. 3 is a schematic diagram of a laser shaping device according to embodiment 1 of the present application;
fig. 4 is a schematic diagram of a laser shaping device according to embodiment 1 of the present application;
Fig. 5 is a schematic diagram of a laser shaping device according to embodiment 1 of the present application;
Fig. 6 is a schematic diagram of a laser shaping device according to embodiment 2 of the present application;
fig. 7 is a schematic diagram of a laser shaping device according to embodiment 2 of the present application;
fig. 8 is a schematic diagram of a laser shaping device according to embodiment 2 of the present application;
Fig. 9 is a flow chart of a method of optically coupling an embodiment of the present application.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.
The invention is described in further detail below in connection with specific examples which are not to be construed as limiting the scope of the invention as claimed.
The laser shaping device and the optical fiber coupling method according to the embodiment of the present application are described below with reference to the drawings.
Example 1
As shown in fig. 1, the laser shaping device includes a laser generator 100, a laser shaping module 200, and a collimator 300, which are disposed in this order along a laser light path.
As an example, the laser generator 100 is preferably a laser whose laser mode is few-mode or multi-mode. The laser shaping module 200 is used for shaping the laser beam; the collimator 300 is used for collimating the shaped laser beam. As an example, the collimator head 300 is a focusing lens group, and performs aberration correction compensation for a light beam with a large numerical aperture.
In this embodiment, the beam emitted by the laser generator 100 can obtain a better beam homogenization effect after being processed by the laser shaping module 200 and the collimating head 300, and particularly, when the laser generator 100 emits a less-mode or multi-mode beam with poor quality, the beam homogenization effect is better.
Specifically, the laser shaping module 200 includes a coupling unit 210, a transition fiber 220, a mode field adaptation unit 230, and a shaping transmission fiber 240, and as an example, the coupling unit 210, the transition fiber 220, the mode field adaptation unit 230, and the shaping transmission fiber 240 are sequentially connected.
As a non-limiting embodiment, the coupling unit 210 is a coupling mirror.
The transition fiber 220 is used to reduce the influence of laser directivity on the coupling efficiency, and reduce the risk of burning loss of the fiber end face caused by directivity deviation. By way of example, the transition fiber 220 is a large core small numerical aperture fiber, specifically, wherein the core diameter of the transition fiber 220 is greater than the core diameter of the shaped transmission fiber 240 and the numerical aperture of the transition fiber 220 is less than the numerical aperture of the shaped transmission fiber 240. The large core diameter of the transition fiber 220 is D, the diameter of the laser beam entering the transition fiber 220 is D 0, and the relationship between the two is D & gt 1.5D 0. In this embodiment, the transition fiber 220 is a large mode field fiber, and specifically, it may be one of a tapered fiber, a photonic crystal fiber, or a double-clad fiber.
The mode field adaptation unit 230 is used to enhance the compatibility and stability of the fiber coupling system. In one embodiment of the present application, the mode field adapting unit 230 may be a mode field adapter MFA or a variable coupling unit, and is configured to match the mode field of the transition optical fiber 220 and the shaped transmission optical fiber 240, so as to effectively control the power loss and the mode field loss of the optical beam at the fiber fusion point.
The shaped transmission fiber 240 is used for beam homogenization shaping. The shaped transmission fiber 240 is a multimode fiber having a core that is one of square, rectangular, or circular. By way of example, the input and output ends of the shaped transmission fiber 240 are end cap fusion spliced to effectively reduce the power density of the end face.
In the embodiment, the optical structures of the coupling unit, the transition optical fiber, the mode field adapting unit, the shaping transmission optical fiber and the collimating head are adopted to carry out beam homogenization shaping, so that the homogenization shaping of few-mode and multi-mode beams can be realized; in addition, by adopting the optical fiber transition, shaping and welding structures with large core diameter, small NA, small core diameter and large NA, the influence of the power density and directivity drift of the incident optical fiber end face can be reduced, and good beam homogenization effect can be realized. In the field of solar cell laser processing, flat-top homogenizing light spot processing can be realized, and ideal processing effects can be obtained in the precision processing fields of nondestructive film opening, film layer modification, doping and the like.
Further, as shown in fig. 2, the variable coupling unit 232 includes a collimator mirror 2321, a beam expander 2322, and a first coupling mirror 2323. The collimator 2321, the beam expander 2322 and the first coupling mirror 2323 are sequentially arranged along the laser light path. As an example, the beam expander 2322 may employ a variable magnification beam expander, and change the divergence angle of the output beam by changing the parameters of the beam expander, so as to change the BPP (Beam Parameter Product, the beam parameter product) value and the homogenization effect output by the shaping transmission fiber 240.
In another embodiment of the application, as shown in fig. 3, the variable coupling unit 232 further includes a first beam splitter 2324, a first mirror 2325, and a second coupling mirror 2326. The shaped transmission fiber 240 includes a first shaped transmission fiber 241 and a second shaped transmission fiber 242; the alignment head 300 includes a first alignment head 310 and a second alignment head 320.
The first beam splitter 2324 is disposed downstream of the optical path of the beam expander 2322, and upstream of the optical path of the first coupling mirror 2323; the first beam splitter 2324 is configured to split the laser beam passing through the beam expander 2322, so that the split first path of laser beam sequentially passes through the first coupling mirror 2323, the first shaping transmission optical fiber 241 and the first collimating head 310, and the split second path of laser beam sequentially passes through the first reflecting mirror 2325, the second coupling mirror 2326, the second shaping transmission optical fiber 242 and the second collimating head 320. In this embodiment, the splitting ratio of the first beam splitter 2324 is 50:50.
The laser beams are divided into two paths by arranging the first spectroscope, and then are coupled into different shaping transmission optical fibers by the corresponding coupling mirror, so that the simultaneous processing of multiple optical paths is realized, and the processing efficiency is improved.
In yet another embodiment of the application, as shown in fig. 4, the laser shaping device further comprises a mode scrambler 400 and a spot detection module 500. Wherein the mode scrambler 400 is disposed downstream of the optical path of the variable coupling unit 232 and upstream of the optical path of the shaped transmission fiber 240. The spot detection module 500 is disposed downstream of the optical path of the collimator 300, and is configured to detect the spot quality of the laser beam emitted by the collimator 300, and feed back the spot quality to the mode scrambler 400, so as to adjust the spot quality by controlling and adjusting the mode scrambler 400. As an example, the mode scrambler 400 changes the energy duty ratio of different modes in the optical fiber by changing the bending degree of the optical fiber, thereby changing the energy homogenizing effect of the output beam, transmission loss, and the output BPP value.
Specifically, the spot detection module 500 includes a second beam splitter 510, a first focusing mirror 520, and a vision module 530. The second beam splitter 510 is disposed on the optical path behind the collimator 300 to split the optical path into a processing optical path and a detection optical path. The processing light path is used for processing. The detection light path irradiates the vision module 530 through the first focusing mirror 520. The vision module 530 captures the spot image and analyzes the spot quality. The vision module 530 is connected to the scrambler 400, and is used for feeding back the detected light spot quality to the scrambler 400. In this embodiment, the vision module 530 may include a CCD camera module.
In order to further avoid damage to the optical fiber caused by the directivity change and the beam energy change of the laser, in still another embodiment of the application, as shown in fig. 5, the laser shaping device further includes a directivity compensation module 600. The directivity compensation module 600 is disposed downstream of the optical path of the laser generator 100 and upstream of the laser shaping module 200. The laser emitted by the laser generator 100 is divided into two beams by the directivity compensation module 600, wherein one beam is a processing beam for processing; the other beam is subjected to synchronous laser directivity detection. The directivity compensation module 600 is configured to detect an offset of the laser beam, and adjust the laser beam according to the offset.
Specifically, the directivity compensation module 600 includes a compensation mirror group 610, a directivity detection module 620, and a controller 630.
The compensating lens group 610 divides the laser beam emitted by the laser into a processing light path and a detection light path; the processing light path is injected into the coupling unit 210 through the compensating lens group 610; the detection light path is injected into the directivity detection module 620 through the compensation lens group 610, and the offset of the light beam is detected. As an example, the directivity detection element 620 is a CCD camera module. The controller 630 is respectively connected to the directivity detection components 620 of the compensation lens set 610, and is configured to adjust the angle of the compensation lens set 610 in real time according to the offset, so as to adjust the processing light path and the detection light path.
In addition, the compensation lens group 610 includes a third beam splitter 611 and a second reflecting mirror 612, the third beam splitter 611 and the second reflecting mirror 612 are arranged in parallel, and the second reflecting mirror 612 is located downstream of the processing light path of the third beam splitter 611. The laser light is split into a processing light path and a detection light path by the third beam splitter 611. As an example, the third beam splitter 611 and the second reflecting mirror 612 are multidimensional and adjustable, and driven by a driver, which is one of piezoelectric, magnetostrictive, and electrostrictive.
The beam offset is detected through the directivity compensation module, and the directivity compensation is carried out by adjusting the angle of the compensation lens group, so that laser is effectively coupled into the transition optical fiber, and the light spot quality is improved.
In addition, the laser shaping device includes a shutter 700. The shutter 700 is disposed downstream of the compensation lens group 610 and upstream of the coupling unit 210. The controller 630 is electrically connected to the shutter 700, and is used for controlling the on-off of the processing light path. When the directivity of the laser light does not meet the requirement, the shutter 700 blocks the laser light to avoid damaging the processing optical path or to avoid processing abnormality.
Example 2
The laser shaping device in this embodiment is substantially the same as that in embodiment 1, and the difference between them is that, as shown in fig. 6, the mode field adapting unit 230 in this embodiment is a mode field adapter MFA231, and the coupling unit 210, the transition optical fiber 220, the mode field adapter MFA231, and the shaping transmission optical fiber 240 are sequentially connected, where the mode field adapter MFA231 is used for mode field matching between the transition optical fiber 220 and the shaping transmission optical fiber 240, so as to effectively control the power loss and mode field loss of the light beam at the optical fiber fusion point.
In the embodiment, the optical structures of the coupling unit, the transition optical fiber, the optical fiber mode field adapter MFA, the shaping transmission optical fiber and the collimating head are adopted to carry out beam homogenization shaping, so that the homogenization shaping of few-mode and multi-mode beams can be realized; in addition, the transition optical fiber with large core diameter and small numerical aperture and the shaping transmission optical fiber with small core diameter and large numerical aperture are adopted for carrying out beam mode field coupling, so that the coupling efficiency is improved, and the beam homogenization effect is improved.
In yet another embodiment of the application, as shown in fig. 7, the laser shaping device further comprises a mode scrambler 400 and a spot detection module 500. Wherein the mode scrambler 400 is disposed downstream of the optical path of the fiber mode field adapter MFA231 and upstream of the optical path of the reshaped transmission fiber 240. The spot detection module 500 is disposed downstream of the optical path of the collimator 300, and is configured to detect the spot quality of the laser beam emitted by the collimator 300, and feed back the spot quality to the mode scrambler 400, so as to adjust the spot quality by adjusting the mode scrambler 400. As an example, the mode scrambler 400 changes the energy duty ratio of different modes in the optical fiber by changing the bending degree of the optical fiber, thereby changing the energy homogenizing effect of the output beam, transmission loss, and the output BPP value.
Specifically, the spot detection module 500 includes a second beam splitter 510, a first focusing mirror 520, and a vision module 530. The second beam splitter 510 is disposed on the optical path behind the collimator 300 to split the optical path into a processing optical path and a detection optical path. The processing light path is used for processing. The detection light path irradiates the vision module 530 through the first focusing mirror 520, and the vision module 530 collects the spot image and analyzes the spot quality. The vision module 530 is connected to the scrambler 400, and is used for feeding back the detected light spot quality to the scrambler 400. In this embodiment, the vision module 530 may include a CCD camera module.
In order to further avoid damage to the optical fiber caused by the directivity change and the beam energy change of the laser, in still another embodiment of the application, as shown in fig. 8, the laser shaping device further includes a directivity compensation module 600. The directivity compensation module 600 is disposed downstream of the optical path of the laser generator 100 and upstream of the laser coupling unit 210. The laser emitted by the laser generator 100 is divided into two beams by the directivity compensation module 600, wherein one beam is a processing beam for processing; the other beam is subjected to synchronous laser directivity detection. The directivity compensation module 600 is configured to detect an offset of the laser beam, and adjust the laser beam according to the offset.
Specifically, the directivity compensation module 600 includes a compensation mirror group 610, a directivity detection module 620, and a controller 630.
The compensation lens group 610 is used for dividing the laser beam emitted by the laser into two paths, namely a processing light path and a detection light path. The processing light path is incident to the coupling unit 210 through the compensation lens group 610. The detection light path passes through the compensation lens group 610 and enters the directivity detection component 620 to detect the offset of the light beam of the detection light path. As an example, the directivity detection element 620 is a CCD camera module. The controller 630 is respectively connected to the directivity detection components 620 of the compensation lens set 610, and is configured to adjust the angle of the compensation lens set 610 in real time according to the offset, so as to adjust the processing light path and the detection light path.
In addition, the compensation lens group 610 includes a second reflecting mirror 611 and a third beam splitter 612, the second reflecting mirror 611 and the third beam splitter 612 are disposed in parallel, and the third beam splitter 612 is located downstream of the processing light path of the second reflecting mirror 611. The laser light is reflected by the second reflecting mirror 611 and then irradiated to the third beam splitter 612. The third beam splitter 612 splits the laser light into a processing light path and a detection light path. The second reflecting mirror 611 is multidimensional and adjustable, and is driven by a driver, which is one of piezoelectric, magnetostrictive, and electrostrictive. And a third beam splitter 612 is fixed.
A second focusing mirror 640 is provided on the optical path between the compensation mirror group 610 and the directivity detection module 620.
The beam offset is detected through the directivity compensation module, and the directivity compensation is carried out by adjusting the angle of the compensation lens group, so that laser is effectively coupled into the transition optical fiber, and the light spot quality is improved.
In addition, the laser shaping device includes a shutter 700. The shutter 700 is disposed downstream of the compensation lens group 610 and upstream of the coupling unit 210. The controller 630 is electrically connected to the shutter 700, and is used for controlling the on-off of the processing light path. When the directivity of the laser light does not meet the requirement, the shutter 700 blocks the laser light, thereby avoiding damage to the processing optical path or avoiding processing abnormality.
The beneficial effects of the application are as follows: (1) The compatibility and stability of the coupling system are improved by arranging the mode field adapting unit, and high-quality shaping and homogenizing light spots are output; (2) The influence of laser directivity on coupling efficiency is reduced by arranging the transition optical fiber, and meanwhile, the risk of burning loss of the end face of the optical fiber caused by directivity deviation is reduced; (3) The detection and adjustment of the spot quality of the laser beam emitted by the alignment straight head are realized by arranging the mode scrambler and the spot detection module; (4) The beam offset is detected through the directivity compensation module, and the directivity compensation is carried out by adjusting the angle of the compensation lens group, so that laser is effectively coupled into the transition optical fiber, and the light spot quality is improved.
To achieve the second object, the present application provides an optical fiber coupling method, which is implemented by using the laser shaping device in the embodiment of the above aspect. As shown in fig. 9, the optical fiber coupling method includes:
Step S1, determining the initial position of the detection light spot.
The optical path of the laser beam is adjusted, and when the processing optical path of the laser beam is stable and the light spot detected by the directivity detection component 620 of the laser shaping device is also stable in the detection field of view, the position of the light spot at this time is recorded as the initial position of the detection light spot.
And S2, detecting the real-time position of the detection light spot in real time, and calculating the offset of the detection light spot according to the real-time position and the initial position.
And when laser processing is performed, detecting the position of the detection light spot in real time, and calculating the offset from the initial position in real time.
And S3, performing directivity adjustment on the detection light spots according to the offset.
The position of the second mirror 612 of the laser shaping device is adjusted according to the offset while continuing to detect the position of the detection spot until it returns to the original position or returns to a deviation position that can be received, and then continuing to step s2.
Specifically, the offset between the position of the detected light spot collected by the directivity detection component of the laser shaping device and the initial position is a; f is the focal length of the second focusing mirror 640 of the laser shaping device; f is the focal length of the coupling unit 210 of the laser shaping device; the directivity deviation θ=arctan (a/F) ≡a/F is calculated, corresponding to the position deviation b=f=tan θ≡f.
The adjustment of the second mirror 612 is performed based on the offset position a, and the directivity deviation θ and the numerical value of the motor step amount of the second mirror 612 can be obtained by fitting data in advance, thereby making it possible to perform the adjustment. In addition, the diameter of the large core transition fiber is D, the spot diameter at the input end of the fiber is D 0, in this example D > 1.5D 0.
The directivity compensation control is as follows:
when b is smaller than D-1.5D 0, determining that the risk is low, and not needing directivity adjustment;
When D-1.5D 0＜b＜D-1.2d0 is adopted, the power loss is very small, and the risk of devices is also small, so that the medium and low risks are judged, the directivity compensation module of the laser shaping device can be utilized for performing directivity compensation on line, and the laser or the optical gate does not need to be closed;
And when D-1.2D 0＜b＜D-d0 is detected, determining that the risk is in a medium, closing the optical gate, and then performing directivity adjustment by using a directivity compensation module of the laser shaping device until the state b < D-1.5D 0 is reached.
When b > D-D 0, the coupling efficiency is extremely low, and the risk of burning loss of the optical fiber is high, so that the risk is judged to be high, the laser is directly turned off or the power of the laser is reduced to 0, meanwhile, the optical gate is turned off, and the laser is turned on to perform directivity adjustment until the state of b < D-1.5D 0 is reached.
Because the shutter is closed for a longer period than the laser, closing the laser first can avoid damage to the optical fiber (burning) caused by the relatively slow shutter closing.
In another embodiment of this application, the fiber coupling method further involves homogenizing the collimated beam. Specifically, a second beam splitter 510 is disposed behind the optical fiber homogenizing collimator 300 of the laser shaping device, the second beam splitter 510 reflects a small amount of laser energy into the first focusing mirror 520, then the light spot size, the energy distribution, the coupling efficiency change and the BPP value of the focal plane are detected and calculated by the vision module 530, and the detection result is fed back to the adjusting mode scrambler 400 step by step, and then the energy distribution uniformity and the coupling efficiency of the shaping transmission optical fiber 240 output light beam are controlled by adjusting the mode scrambler 400. As an example, the mode scrambler 400 changes the energy duty ratio of different modes in the optical fiber by changing the bending degree of the optical fiber, thereby changing the energy homogenizing effect of the output beam, transmission loss, and the output BPP value.
The beneficial effects of the application are as follows: (1) In the laser processing process, the position of a detection light spot is detected in real time, the offset of the detection light spot is calculated, directivity compensation is carried out through a compensation mirror group, and the light spot quality is improved; (2) Detecting and adjusting the spot quality of the laser beam emitted by the collimating head through the mode scrambler and the spot detection module; (3) The transition optical fiber is adopted, so that the influence of laser directivity on coupling efficiency is reduced, and meanwhile, the risk of burning loss of the end face of the optical fiber caused by directivity deviation is reduced.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
It should be noted that in the description of the present specification, descriptions of terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Claims (14)
1. A laser shaping device is characterized by comprising a laser generator (100), a laser shaping module (200) and a collimation head (300) which are sequentially arranged along a laser light path,
The laser generator (100) is used for emitting few-mode or multi-mode laser beams;
The laser shaping module (200) is used for shaping the laser beam;
The collimating head (300) is used for collimating the shaped laser beam;
The laser shaping module (200) comprises a coupling unit (210), a transition optical fiber (220), a mode field adapting unit (230) and a shaping transmission optical fiber (240), wherein the core diameter of the transition optical fiber (220) is larger than that of the shaping transmission optical fiber (240), and the numerical aperture of the transition optical fiber (220) is smaller than that of the shaping transmission optical fiber (240);
The laser shaping device further comprises a directivity compensation module (600), wherein the directivity compensation module (600) is arranged at the downstream of the optical path of the laser generator (100), and the upstream of the laser shaping module (200), and the directivity compensation module (600) is used for detecting the offset of the laser beam and adjusting the laser beam according to the offset;
the directivity compensation module (600) comprises a compensation mirror group (610), a directivity detection assembly (620) and a controller (630), wherein the controller (630) is respectively connected with the directivity detection assembly (620) of the compensation mirror group (610);
The compensating lens group (610) is used for dividing the laser beam emitted by the laser generator into two paths, namely a processing light path and a detection light path;
the processing light path is emitted into the laser shaping module (200) through the compensating lens group (610), and the detection light path is emitted into the directivity detection assembly (620) through the compensating lens group (610);
The directivity detection component (620) is used for detecting the offset of the light beam of the detection light path;
the controller (630) is used for controlling the compensation lens group (610) according to the offset to realize adjustment of the processing light path and the detection light path.
2. The laser shaping device as set forth in claim 1, characterized in that the large core diameter D of the transition fiber (220) is greater than 1.5 times the laser beam diameter D 0 of the laser beam incident on the transition fiber (220).
3. The laser shaping device according to claim 1, wherein the mode field adaptation unit (230) is a fiber mode field adapter MFA (231) or a variable coupling unit (232) for matching the mode fields of the transition fiber (220) and the shaping transmission fiber (240).
4. A laser shaping device as claimed in claim 3, characterized in that the variable coupling unit (232) comprises a collimator lens (2321), a beam expander (2322) and a first coupling lens (2323), the collimator lens (2321), the beam expander (2322) and the first coupling lens (2323) being arranged in sequence along the laser light path.
5. The laser shaping device as set forth in claim 4, wherein the variable coupling unit (232) further comprises a first beam splitter (2324), a first reflecting mirror (2325) and a second coupling mirror (2326), the shaping transmission fiber (240) comprises a first shaping transmission fiber (241) and a second shaping transmission fiber (242), the collimating head (300) comprises a first collimating head (310) and a second collimating head (320),
The first spectroscope (2324) is arranged at the downstream of the light path of the beam expander (2322), and the upstream of the light path of the first coupling mirror (2323);
The first spectroscope (2324) is used for carrying out light splitting treatment on the laser beams passing through the beam expander (2322), so that a first path of laser beams after light splitting sequentially passes through the first coupling mirror (2323), the first shaping transmission optical fiber (241) and the first collimating head (310), and a second path of laser beams after light splitting sequentially passes through the first reflecting mirror (2325), the second coupling mirror (2326), the second shaping transmission optical fiber (242) and the second collimating head (320).
6. The laser shaping device as claimed in claim 4, wherein the laser shaping device further comprises a mode scrambler (400) and a spot detection module (500),
The mode scrambler (400) is arranged downstream of the optical path of the variable coupling unit (232) and upstream of the optical path of the shaped transmission fiber (240);
The light spot detection module (500) is arranged at the downstream of the light path of the collimating head (300), and the light spot detection module (500) is used for detecting the light spot quality of the laser beam emitted by the collimating head (300) and feeding back the light spot quality to the mode scrambler (400);
the spot quality is adjusted by controlling the mode scrambler (400).
7. The laser shaping device as set forth in claim 6, wherein the spot detection module (500) comprises a second beam splitter (510), a first focusing mirror (520) and a vision module (530),
The second beam splitter (510) is configured to split at least part of the laser beam emitted from the collimator (300) and irradiate the laser beam to the vision module (530) through the first focusing mirror (520);
The vision module (530) is connected with the scrambler (400) and is used for feeding back the detected light spot quality to the scrambler (400).
8. The laser shaping device as claimed in claim 1, wherein the laser shaping device further comprises a shutter (700),
The optical shutter (700) is arranged at the downstream of the compensation lens group (610), is arranged at the upstream of the laser shaping module (200), and is electrically connected with the controller (630), and the optical shutter (700) is used for controlling the on-off of the processing light path.
9. The laser shaping device according to claim 1, wherein the compensation lens group (610) comprises a second reflecting mirror (611) and a third beam splitter (612), the second reflecting mirror (611) and the third beam splitter (612) are arranged in parallel, the third beam splitter (612) is located downstream of a processing light path of the second reflecting mirror (611), the second reflecting mirror (611) is multidimensional and adjustable, and the third beam splitter (612) is fixed.
10. The laser shaping device according to claim 1, characterized in that a second focusing mirror (640) is arranged in the optical path between the compensation mirror group (610) and the directivity detection assembly (620).
11. A method of optical fiber coupling, characterized in that the method is applied to a laser shaping device as claimed in any one of claims 1-10, the method comprising:
Determining an initial position of a detection light spot;
detecting the real-time position of the detection light spot in real time, and calculating the offset of the detection light spot according to the real-time position and the initial position;
And carrying out directivity adjustment on the detection light spots according to the offset.
12. The method of claim 11, wherein determining the initial position of the detection spot comprises:
And adjusting the light path of the laser beam, and recording the initial position of the light spot of the detection light path of the laser beam when the processing light path of the laser beam is stable.
13. The method of claim 11, wherein the directivity adjustment of the detection spot according to the offset comprises:
when b < D-1.5D 0, no directivity adjustment is required;
when D-1.5D 0＜b＜D-1.2d0 is reached, the directivity compensation module of the laser shaping device is utilized to adjust directivity;
When D-1.2d 0＜b＜D-d0 is carried out, after the optical gate is closed, the directivity compensation module of the laser shaping device is utilized for directivity adjustment;
When b > D-D 0, turning off the laser generator or controlling the power of the laser generator to be reduced to zero, and then using a directivity compensation module of the laser shaping device to adjust directivity.
14. The method as recited in claim 11, further comprising:
the curvature of the optical fiber is adjusted by using a mode scrambler of the laser shaping device to change the energy duty ratio of different modes in the optical fiber, so as to realize the adjustment of the light spot quality of the laser beam.
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| CN115993691B (en) * | 2023-03-23 | 2023-07-04 | 武汉锐科光纤激光技术股份有限公司 | Optical path coupling system and control method thereof |
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