CN112439992A - Coaxial visual lens group of welding laser head and coaxial system of welding laser - Google Patents
Coaxial visual lens group of welding laser head and coaxial system of welding laser Download PDFInfo
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- CN112439992A CN112439992A CN201910838221.9A CN201910838221A CN112439992A CN 112439992 A CN112439992 A CN 112439992A CN 201910838221 A CN201910838221 A CN 201910838221A CN 112439992 A CN112439992 A CN 112439992A
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- imaging
- lens
- laser
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- mirror
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
Abstract
The invention discloses a welding laser head coaxial visual lens group and a welding laser coaxial system, comprising: the imaging objective lens consists of a first positive and negative lens group, the imaging eyepiece consists of a second positive and negative lens group and the iris diaphragm; the imaging objective lens and the imaging eyepiece are symmetrical relative to the iris diaphragm; imaging light rays enter the imaging eyepiece from the imaging objective lens and the iris diaphragm in sequence. The design adopts the lens group with a symmetrical achromatic structure, namely the first positive and negative lens group and the second positive and negative lens group are symmetrical relative to the iris diaphragm, the positive lens in the positive and negative lens group generates negative spherical aberration, the negative lens generates positive spherical aberration, and the spherical aberration can be well corrected by combining the positive and negative lenses.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the field of laser welding, in particular to a welding laser head coaxial visual lens group and a welding laser coaxial system.
[ background of the invention ]
In laser welding, a walking track is usually preset for a laser welding head according to the characteristics of a welding seam, then the welding head finishes welding operation after walking according to the preset walking track, and in the walking process, a welding surface (the surface of a workpiece to be welded) cannot be observed in real time, so that the welding quality cannot be checked and judged in real time.
[ summary of the invention ]
In summary, to solve the above technical problems, the technical solution of the present invention is as follows: the invention provides a welding laser head coaxial visual lens group and a welding laser coaxial system to overcome at least one defect (deficiency) in the prior art.
In order to solve the technical problems, the technical scheme of the invention is as follows: a coaxial visual mirror group of welding laser head includes: the imaging objective lens consists of a first positive and negative lens group, the imaging eyepiece consists of a second positive and negative lens group and the iris diaphragm; the imaging objective lens and the imaging eyepiece are symmetrical relative to the iris diaphragm; imaging light rays enter the imaging eyepiece from the imaging objective lens and the iris diaphragm in sequence.
In some embodiments, the first positive and negative lens groups include an imaging objective biconcave lens and an imaging objective biconvex lens.
In some embodiments, the second positive and negative lens groups include an imaging eyepiece plano-convex lens and an imaging eyepiece meniscus lens.
The design adopts the lens group with a symmetrical achromatic structure, namely the first positive and negative lens group and the second positive and negative lens group are symmetrical relative to the iris diaphragm, the positive lens in the positive and negative lens group generates negative spherical aberration, the negative lens generates positive spherical aberration, and the spherical aberration can be well corrected by combining the positive and negative lenses.
The light rays enter the imaging eyepiece from the imaging objective lens and the iris diaphragm in sequence, the light rays can be subjected to primary spherical aberration correction through the imaging objective lens consisting of the first positive and negative lens groups to reduce aberration, the light beams are adjusted through the iris diaphragm to eliminate the light rays far off the axis so as to avoid further generation of spherical aberration and aberration, the light rays finally subjected to the iris diaphragm adjustment are subjected to secondary spherical aberration correction through the imaging eyepiece lens consisting of the second positive and negative lens groups to reduce aberration, the finally obtained light rays are used for imaging, the imaging aberration can be greatly reduced, and an imaging picture with higher quality is obtained.
In some embodiments, the optical materials of the imaging objective biconcave lens and the imaging objective biconvex lens are a and B, respectively; the optical materials of the imaging eyepiece planoconvex lens and the imaging eyepiece meniscus lens are B and A respectively.
In some embodiments, the optical materials of the imaging objective biconcave lens and the imaging objective biconvex lens are F2 and BK7, respectively;
the optical materials of the imaging eyepiece plano-convex lens and the imaging eyepiece meniscus lens are BK7 and F2, respectively.
When the imaging eyepiece lens is used, light rays sequentially pass through the imaging objective lens biconcave lens, the imaging objective lens biconvex lens, the iris diaphragm, the imaging eyepiece plano-convex lens and the imaging eyepiece meniscus lens, namely the sequence of lens materials passing through the imaging eyepiece lens is as follows: A-B-A; in terms of the whole system, the lenses of the lens group can well have the positive and negative offsetting effect, so that the spherical aberration can be further reduced, and the aberration can be reduced; and finally, the imaging quality is improved. Further, since the BK7 lens material and the F2 lens material have different dispersion coefficients, achromatic design conditions can be constituted.
The invention also provides a welding laser coaxial system based on the lens group, which comprises: a laser light path and an imaging light path of the welding laser head coaxial visual lens group;
the laser light path is used for emitting and focusing laser on the welding surface;
and the imaging optical path is used for collecting the reflected light from the welding workpiece reflected by the laser optical path, and the reflected light is focused on the imaging photosensitive element after being injected into the coaxial visual mirror group of the welding laser head.
The invention relates to a laser light path for welding workpieces, wherein the workpieces are illuminated by laser during welding so that light is reflected from a welding surface.
In some embodiments, the laser light path comprises: the device comprises a light source, a laser collimating lens, an imaging beam combining lens and a laser focusing lens; laser emitted by the light source is collimated into parallel light by the laser collimating lens, and then is focused by the laser focusing lens and irradiates the welding surface; the imaging beam combining mirror is obliquely arranged between the laser collimating mirror and the laser focusing mirror, on one hand, parallel light from the laser collimating mirror enters the laser focusing mirror for focusing through the imaging beam combining mirror, and on the other hand, reflected light reflected by the welding surface enters an imaging light path through the imaging beam combining mirror after passing through the laser focusing mirror.
In some embodiments, the imaging optical path comprises a laser focusing lens, an imaging beam combining lens, a welding laser head coaxial vision lens group and an imaging photosensitive element; the reflected light reflected from the welding surface is reflected to the coaxial visual lens group of the welding laser head by the imaging beam combining mirror after passing through the laser focusing mirror, and finally enters the imaging photosensitive element.
In some embodiments, a mirror is further included that reflects the reflected light from the imaging beam combiner to the welding laser head in-line vision mirror set.
By adopting the technical scheme, compared with the prior art, the invention has the beneficial effects that: compared with the welding method of the traditional technology, the welding method of the invention can effectively increase the fusion width compared with the traditional mode of directly welding in the welding seam, and finally can increase the welding strength while reducing the heat influence; in addition, welding can be achieved only by the work of the first motor and the second motor, the movement of a welding head is not needed, the welding can be achieved only by the deviation of the laser beam, the workpiece and the welding head are static, a plurality of linkage structures can be omitted, and the welding precision and efficiency are improved.
[ description of the drawings ]
FIG. 1 is a schematic view of a coaxial vision lens assembly of a welding laser head according to an embodiment of the present invention;
FIG. 2 is a schematic view of a welding laser coaxial system according to another embodiment of the present invention.
[ detailed description ] embodiments
The following examples are further illustrative and supplementary to the present invention and do not limit the present invention in any way.
As shown in fig. 1, a welding laser head coaxial vision lens group comprises: an imaging objective lens 7 consisting of a first positive and negative lens group, an imaging eyepiece lens 9 consisting of a second positive and negative lens group and an iris diaphragm 8; the imaging objective lens 7 and the imaging eyepiece lens 8 are symmetrical relative to the iris diaphragm 9; imaging light rays enter an imaging ocular 9 from an imaging objective 7 and an iris diaphragm 8 in sequence.
The design adopts the lens group with a symmetrical achromatic structure, namely the first positive and negative lens group and the second positive and negative lens group are symmetrical relative to the iris diaphragm, the positive lens in the positive and negative lens group generates negative spherical aberration, the negative lens generates positive spherical aberration, and the spherical aberration can be well corrected by combining the positive and negative lenses.
The light rays enter the imaging eyepiece from the imaging objective lens and the iris diaphragm in sequence, the light rays can be subjected to primary spherical aberration correction through the imaging objective lens consisting of the first positive and negative lens groups to reduce aberration, the light beams are adjusted through the iris diaphragm to eliminate the light rays far off the axis so as to avoid further generation of spherical aberration and aberration, the light rays finally subjected to the iris diaphragm adjustment are subjected to secondary spherical aberration correction through the imaging eyepiece lens consisting of the second positive and negative lens groups to reduce aberration, the finally obtained light rays are used for imaging, the imaging aberration can be greatly reduced, and an imaging picture with higher quality is obtained.
For the design of the first positive and negative lens group 7, the following may be possible: the first positive and negative lens group 7 includes an imaging objective biconcave lens 71 and an imaging objective biconvex lens 72.
For the design of the second positive and negative lens group 9, the following may be made: the second positive-negative lens group 9 includes an imaging eyepiece plano-convex lens 91 and an imaging eyepiece meniscus lens 92.
Regarding the materials used for the above optical lenses: the optical materials of the imaging objective lens biconcave lens and the imaging objective lens biconvex lens are A and B respectively; the optical materials of the imaging eyepiece planoconvex lens and the imaging eyepiece meniscus lens are B and A respectively.
More specifically, the optical materials of the imaging objective biconcave lens and the imaging objective biconvex lens are F2 and BK7, respectively; the optical materials of the imaging eyepiece plano-convex lens and the imaging eyepiece meniscus lens are BK7 and F2, respectively.
When the imaging eyepiece lens is used, light rays sequentially pass through the imaging objective lens biconcave lens, the imaging objective lens biconvex lens, the iris diaphragm, the imaging eyepiece plano-convex lens and the imaging eyepiece meniscus lens, namely the sequence of lens materials passing through the imaging eyepiece lens is as follows: A-B-A; in terms of the whole system, the lenses of the lens group can well have the positive and negative offsetting effect, so that the spherical aberration can be further reduced, and the aberration can be reduced; and finally, the imaging quality is improved. Further, since the BK7 lens material and the F2 lens material have different dispersion coefficients, achromatic design conditions can be constituted.
As shown in fig. 2, the welding laser coaxial system of the present invention comprises: the laser optical path and the imaging optical path comprise the welding laser head coaxial visual lens group;
the laser light path is used for emitting and focusing laser on the welding surface;
and the imaging optical path is used for collecting the reflected light from the welding workpiece reflected by the laser optical path, and the reflected light is focused on the imaging photosensitive element after being injected into the coaxial visual mirror group of the welding laser head.
More specifically, one embodiment of the laser beam path may be that it includes: the device comprises a light source 1, a laser collimating lens 2 (a lens for collimating light into quasi-parallel light and a double-convex lens can be adopted), an imaging beam combining lens 3 and a laser focusing lens 4 (a lens for focusing and a double-convex lens can be adopted); laser (shown as a in the figure) emitted by a light source 1 (which can adopt optical fiber) is collimated into parallel light by a laser collimating lens 2, and then is focused by a laser focusing lens 4 and irradiates a welding surface; the imaging beam combining mirror 3 is obliquely arranged between the laser collimating mirror 2 and the laser focusing mirror 4, on one hand, parallel light emitted from the laser collimating mirror 2 enters the laser focusing mirror 4 for focusing through the imaging beam combining mirror 3, and on the other hand, reflected light reflected by the welding surface enters an imaging light path after passing through the laser focusing mirror 4 and being reflected by the imaging beam combining mirror 3.
More specifically, the imaging light path comprises a laser focusing mirror 4, an imaging beam combining mirror 3, a welding laser head coaxial visual lens group and an imaging photosensitive element CCD; the reflected light (shown as b in the figure) reflected from the welding surface is reflected to the coaxial visual mirror group of the welding laser head by the imaging beam combining mirror 3 after passing through the laser focusing mirror 4, and finally enters the imaging photosensitive element.
In the above, the imaging beam combiner 3 has a lens capable of transmitting and reflecting laser light, and the inclined arrangement is convenient for reflecting the reflected light of the welding surface so as to collect and image.
The laser welding device further comprises a reflecting mirror 6, and the reflecting mirror 6 reflects the reflected light from the imaging beam combining mirror 3 to the welding laser head coaxial visual mirror group. The reflector 6 is used for changing the light path so as to facilitate the space design of the coaxial visual lens group of the welding laser head.
While the invention has been described with reference to the above embodiments, the scope of the invention is not limited thereto, and the above components may be replaced with similar or equivalent elements known to those skilled in the art without departing from the spirit of the invention.
Claims (9)
1. The utility model provides a coaxial visual mirror group of welding laser head which characterized in that includes: the imaging objective lens consists of a first positive and negative lens group, the imaging eyepiece consists of a second positive and negative lens group and the iris diaphragm; the imaging objective lens and the imaging eyepiece are symmetrical relative to the iris diaphragm; imaging light rays enter the imaging eyepiece from the imaging objective lens and the iris diaphragm in sequence.
2. The welding laser head in-line vision lens set of claim 1, wherein the first positive and negative lens sets comprise an imaging objective biconcave lens and an imaging objective biconvex lens.
3. The welding laser head in-line vision lens set of claim 2, wherein the second positive and negative lens sets comprise an imaging eyepiece plano-convex lens and an imaging eyepiece meniscus lens.
4. The welding laser head coaxial vision lens group of claim 3, characterized in that the optical materials of the imaging objective biconcave lens and the imaging objective biconvex lens are A and B, respectively; the optical materials of the imaging eyepiece planoconvex lens and the imaging eyepiece meniscus lens are B and A respectively.
5. The welding laser head coaxial vision lens group of claim 4, characterized in that the optical materials of the imaging objective biconcave lens and the imaging objective biconvex lens are F2 and BK7, respectively; the optical materials of the imaging eyepiece plano-convex lens and the imaging eyepiece meniscus lens are BK7 and F2, respectively.
6. Welding laser coaxial system, its characterized in that includes: a laser light path and an imaging light path comprising the welding laser head coaxial visual lens group of any claim 1-5; the laser light path is used for emitting and focusing laser on the welding surface; and the imaging optical path is used for collecting the reflected light from the welding workpiece reflected by the laser optical path, and the reflected light is focused on the imaging photosensitive element after being injected into the coaxial visual mirror group of the welding laser head.
7. The welding laser coaxial system of claim 6, wherein the laser light path comprises: the device comprises a light source (1), a laser collimating mirror (2), an imaging beam combining mirror (3) and a laser focusing mirror (4); laser emitted by the light source (1) is collimated into parallel light by the laser collimating lens (2), and then is focused by the laser focusing lens (4) and irradiates a welding surface; the imaging beam combining mirror (3) is obliquely arranged between the laser collimating mirror (2) and the laser focusing mirror (4), on one hand, parallel light coming out of the laser collimating mirror (2) enters the laser focusing mirror (4) for focusing through the imaging beam combining mirror (3), and on the other hand, reflected light reflected by a welding surface enters an imaging light path after passing through the laser focusing mirror (4) and being reflected by the imaging beam combining mirror (3).
8. The welding laser coaxial system according to claim 7, characterized in that the imaging optical path comprises a laser focusing mirror (4), an imaging beam combining mirror (3), a welding laser head coaxial vision lens group and an imaging photosensitive element; the reflected light reflected from the welding surface is reflected to the welding laser head coaxial visual lens group by the imaging beam combining mirror (3) after passing through the laser focusing mirror (4), and finally enters the imaging photosensitive element.
9. The welding laser in-line system according to claim 8, characterized by further comprising a mirror (6), the mirror (6) reflecting the reflected light from the imaging beam combining mirror (3) to the welding laser head in-line vision mirror group.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910838221.9A CN112439992A (en) | 2019-09-05 | 2019-09-05 | Coaxial visual lens group of welding laser head and coaxial system of welding laser |
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| CN201910838221.9A CN112439992A (en) | 2019-09-05 | 2019-09-05 | Coaxial visual lens group of welding laser head and coaxial system of welding laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114217451A (en) * | 2021-12-10 | 2022-03-22 | 中国科学院光电技术研究所 | Lens system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114217451A (en) * | 2021-12-10 | 2022-03-22 | 中国科学院光电技术研究所 | Lens system |
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