CN115097556B - Dispersive thin film, optical fiber core insert, dispersive cavity mirror, resonant cavity device and laser - Google Patents
Dispersive thin film, optical fiber core insert, dispersive cavity mirror, resonant cavity device and laser Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/268—Optical coupling means for modal dispersion control, e.g. concatenation of light guides having different modal dispersion properties
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06725—Fibre characterized by a specific dispersion, e.g. for pulse shaping in soliton lasers or for dispersion compensating [DCF]
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Abstract
The present disclosure provides a dispersion film comprising: a plurality of first film layers, the first film layers having a first refractive index; and a plurality of second film layers having a second refractive index; the first film layer and the second film layer are alternately stacked to form a dispersion film; wherein the first refractive index is greater than the second refractive index; the total thickness of the dispersion film is in the micron order; the total thickness of the first film layer is less than the total thickness of the second film layer. The disclosure also provides an optical fiber ferrule, a dispersive cavity mirror with an all-fiber structure, a laser resonant cavity device and a laser.
Description
Technical Field
The present disclosure relates to the field of optical films and ultrafast laser technologies, and in particular, to a dispersion film, an optical fiber ferrule, a dispersion cavity mirror, a laser resonator device, and a laser.
Background
The ultra-fast laser with GHz repetition frequency has important application in the fields of special material processing, multi-photon fluorescence imaging, high-speed optical communication systems, astronomical optical frequency combs and the like.
In the aspect of special material processing, based on an ablation cooling mechanism, higher processing precision can be obtained by utilizing the light source; in the aspect of two-photon imaging, the imaging resolution can be improved by utilizing the light source so as to obtain a clearer microscopic image; in the astronomical detection field, the light source has high single-tooth power, and can improve measurement accuracy. At present, a high-repetition-frequency laser constructed by a gain medium based on a solid/crystal material has the advantages of high repetition frequency and narrow pulse width. In comparison, the laser with the all-fiber structure has the unique advantages of good heat dissipation, stable mode, stable environment and the like, is more suitable for being applied to some specific environments, but the current high-repetition-frequency fiber laser still faces the bottleneck problem that the pulse width is wider and difficult to compress.
The pulse width of the 5GHz Yb-doped fiber laser reported in 2017 is 2.6ps; the pulse width corresponding to the 3GHz Yb-doped fiber laser reported in 2018 is 3.4ps; the pulse width tested in the 12.5GHz Yb-doped fiber laser reported in 2019 was 1.9ps.
It can be seen that while pulse output at GHz repetition rates is achieved in these all-fiber structured lasers, the corresponding pulse widths are concentrated on the order of ps, which somewhat limits the application of such light sources in the above-mentioned fields. The reason for this "bottleneck" problem is that: according to the mode locking principle, to obtain pulse output with a repetition frequency in the GHz order, the cavity length of the laser resonant cavity is shortened to the cm order, and the short resonant cavity length makes a commonly used chirped mirror pair, chirped grating and the like which perform dispersion management ineffective because of being incapable of being arranged in the cavity due to volume reasons, so that it is difficult to perform dispersion management in the resonant cavity which is so short to realize wide-spectrum and narrow-pulse laser output.
Other attempts have been made to plate dispersion management film systems on lenses to insert into the fiber laser cavities described above and introduce additional devices to achieve spatial optical coupling, which results in loss of the all-fiber structure of the laser, and the system becomes complex and unstable.
Disclosure of Invention
In order to solve at least one of the above technical problems, the present disclosure provides a dispersion film, an optical fiber ferrule, a dispersion cavity mirror, a laser resonator device, and a laser.
According to one aspect of the present disclosure, there is provided a dispersion film comprising:
a plurality of first film layers, the first film layers having a first refractive index;
a plurality of second film layers, the second film layers having a second refractive index;
the first film layers and the second film layers are alternately stacked to form the dispersion film;
wherein the first refractive index is greater than the second refractive index;
the total thickness of the dispersion film is in the micron level;
the total thickness of the first film layer is less than the total thickness of the second film layer.
The first film layer is preferably Ta, according to at least one embodiment of the present disclosure 2 O 5 、Nb 2 O 5 、HfO 2 The second film layer is preferably SiO 2 。
According to the dispersion film of at least one embodiment of the present disclosure, the odd layer is a first film layer, the even layer is a second film layer, and the bottom layer and the top layer of the dispersion film are both the first film layer.
A dispersion film according to at least one embodiment of the present disclosure, the total thickness of the dispersion film being 7.803 μm to 8.292 μm, the first film layer is Ta 2 O 5 The second film layer is SiO 2 ；
The total number of layers of the first film layer and the second film layer is 45;
from bottom to top, the rete thickness that each rete corresponds respectively is:
132-141nm、244-252nm、141-152nm、194-201nm、136-155nm、203-212nm、145-173nm、210-220nm、138-148nm、197-207nm、130-140nm、192-202nm、129-136nm、173-202nm、134-144nm、205-207nm、140-163nm、204-216nm、132-144nm、220-228nm、169-179nm、217-227nm、141-158nm、202-204nm、127-138nm、197-207nm、139-142nm、204-208nm、135-145nm、200-210nm、135-145nm、211-212nm、153-167nm、235-245nm、137-144nm、188-201nm、136-156nm、202-212nm、147-163nm、223-229nm、144-154nm、196-206nm、131-141nm、275-285nm、160-171nm。
a dispersion film according to at least one embodiment of the present disclosure is disposed on an end face of an optical fiber ferrule through the first film layer as a bottom layer.
According to the dispersion film of at least one embodiment of the present disclosure, the shapes of the first film layer and the second film layer are both disc shapes, and the radial dimension of the first film layer is the same as the radial dimension of the second film layer.
According to the dispersion thin film of at least one embodiment of the present disclosure, the plasma sputtering-based method realizes alternating stacking of the plurality of first film layers and the plurality of second film layers.
According to another aspect of the present disclosure, there is provided an optical fiber ferrule comprising:
the optical fiber connector comprises an optical fiber connector body, a first connecting rod and a second connecting rod, wherein the optical fiber connector body is provided with a first end and a second end, the first end forms an end face, and the second end is used for inserting an optical fiber;
the dispersion film of any one of the embodiments of the present disclosure is disposed on the end face of the fiber stub body.
An optical fiber ferrule according to at least one embodiment of the present disclosure, the end face of the optical fiber ferrule body having a matching shape with the dispersion film.
The optical fiber ferrule according to at least one embodiment of the present disclosure, the end face is an end face subjected to grinding and polishing treatment.
According to at least one embodiment of the present disclosure, the optical fiber ferrule body is made of ceramic material.
According to yet another aspect of the present disclosure, there is provided a dispersive cavity mirror having an all-optical fiber structure, including:
the optical fiber ferrule of any of the embodiments of the present disclosure;
and the passive optical fiber is inserted into the optical fiber ferrule body through the second end of the optical fiber ferrule body.
According to yet another aspect of the present disclosure, there is provided a laser resonator device comprising:
a first ferrule having a first end and a second end, the first end of the first ferrule forming an end face;
a second ferrule having a first end and a second end, the first end of the second ferrule interfacing with the first end of the first ferrule;
a third ferrule having a first end and a second end, the first end of the third ferrule forming an end face;
a dispersion film disposed on the end face of the first ferrule;
the two ends of the gain optical fiber are respectively inserted into the second end of the second inserting core and the second end of the third inserting core;
a semiconductor saturable absorber mirror disposed on the end face of the third ferrule;
wherein the dispersion film is any one of the embodiments of the present disclosure.
According to the laser resonant cavity device of at least one embodiment of the present disclosure, the length of the gain optical fiber is less than or equal to 10cm, and rare earth ions are doped in the optical fiber core of the gain optical fiber, so as to achieve the optical gain requirement that the short optical fiber length meets the mode locking threshold.
According to the laser resonator device of at least one embodiment of the present disclosure, when the length of the gain fiber is 3cm or less, the third ferrule is canceled, the second end of the second ferrule forms an end face, and the semiconductor saturable absorber mirror is disposed on the end face of the second ferrule.
According to the laser resonator device of at least one embodiment of the present disclosure, the gain fiber is a single mode fiber, a polarization maintaining single mode fiber, a multimode fiber, or a double-clad fiber.
According to the laser resonator device of at least one embodiment of the present disclosure, the gain fiber is a fiber doped with one kind of rare earth ion or a co-doped fiber doped with two or more kinds of rare earth ions.
A laser resonator device according to at least one embodiment of the present disclosure, wherein the rare earth ion is Yb 3+ 、Er 3+ 、Tm 3+ Or Ho 3+ Etc.
A laser resonator device according to at least one embodiment of the present disclosure, further comprising:
a passive optical fiber inserted into the second end of the first ferrule.
A laser resonator device according to at least one embodiment of the present disclosure, further comprising:
the ceramic sleeve is partially sleeved on the first inserting core and partially sleeved on the second inserting core so as to fix the butt joint of the first inserting core and the second inserting core.
According to yet another aspect of the present disclosure, there is provided a laser comprising a dispersive cavity mirror with an all-fiber structure according to any of the embodiments of the present disclosure.
According to yet another aspect of the present disclosure, there is provided a laser comprising a laser resonator device of any one of the embodiments of the present disclosure.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the disclosure and together with the description serve to explain the principles of the disclosure.
Fig. 1 is a schematic structural view of a dispersion film according to an embodiment of the present disclosure.
Fig. 2 illustrates a fiber ferrule and a dispersive cavity mirror with an all-fiber architecture according to one embodiment of the present disclosure.
Fig. 3 is a schematic diagram of a laser resonator device according to an embodiment of the present disclosure.
Fig. 4 is a graph of transmittance of a dispersive cavity mirror according to an embodiment of the present disclosure.
Fig. 5 is a graph of transmittance of a dispersive cavity mirror with thickness adjustment in accordance with an embodiment of the present disclosure.
Fig. 6 is a chart of a 1GHz femtosecond laser spectrum obtained in the first embodiment of the disclosure.
Fig. 7 is a graph of 1GHz femtosecond laser autocorrelation obtained in embodiment one of the present disclosure.
Fig. 8 is a 2.2GHz femtosecond laser spectrum obtained in embodiment two of the disclosure.
Fig. 9 is a graph of 2.2GHz femtosecond laser autocorrelation obtained in embodiment two of the disclosure.
Fig. 10 is a 3.3GHz femtosecond laser spectrum obtained in embodiment three of the disclosure.
Fig. 11 is a graph of 3.3GHz femtosecond laser autocorrelation obtained in embodiment three of the disclosure.
Fig. 12 is a 3.3GHz femtosecond laser time domain pulse graph obtained in embodiment three of the disclosure.
Detailed Description
The present disclosure is described in further detail below with reference to the drawings and the embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant content and not limiting of the present disclosure. It should be further noted that, for convenience of description, only a portion relevant to the present disclosure is shown in the drawings.
In addition, embodiments of the present disclosure and features of the embodiments may be combined with each other without conflict. The technical aspects of the present disclosure will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Unless otherwise indicated, the exemplary implementations/embodiments shown are to be understood as providing exemplary features of various details of some ways in which the technical concepts of the present disclosure may be practiced. Thus, unless otherwise indicated, features of the various implementations/embodiments may be additionally combined, separated, interchanged, and/or rearranged without departing from the technical concepts of the present disclosure.
The use of cross-hatching and/or shading in the drawings is typically used to clarify the boundaries between adjacent components. As such, the presence or absence of cross-hatching or shading does not convey or represent any preference or requirement for a particular material, material property, dimension, proportion, commonality between illustrated components, and/or any other characteristic, attribute, property, etc. of a component, unless indicated. In addition, in the drawings, the size and relative sizes of elements may be exaggerated for clarity and/or descriptive purposes. While the exemplary embodiments may be variously implemented, the specific process sequences may be performed in a different order than that described. For example, two consecutively described processes may be performed substantially simultaneously or in reverse order from that described. Moreover, like reference numerals designate like parts.
When an element is referred to as being "on" or "over", "connected to" or "coupled to" another element, it can be directly on, connected or coupled to the other element or intervening elements may be present. However, when an element is referred to as being "directly on," "directly connected to," or "directly coupled to" another element, there are no intervening elements present. For this reason, the term "connected" may refer to physical connections, electrical connections, and the like, with or without intermediate components.
For descriptive purposes, the present disclosure may use spatially relative terms such as "under … …," under … …, "" under … …, "" lower, "" above … …, "" upper, "" above … …, "" higher "and" side (e.g., in "sidewall") to describe one component's relationship to another (other) component as illustrated in the figures. In addition to the orientations depicted in the drawings, the spatially relative terms are intended to encompass different orientations of the device in use, operation, and/or manufacture. For example, if the device in the figures is turned over, elements described as "under" or "beneath" other elements or features would then be oriented "over" the other elements or features. Thus, the exemplary term "below" … … can encompass both an orientation of "above" and "below". Furthermore, the device may be otherwise positioned (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. Furthermore, when the terms "comprises" and/or "comprising," and variations thereof, are used in the present specification, the presence of stated features, integers, steps, operations, elements, components, and/or groups thereof is described, but the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof is not precluded. It is also noted that, as used herein, the terms "substantially," "about," and other similar terms are used as approximation terms and not as degree terms, and as such, are used to explain the inherent deviations of measured, calculated, and/or provided values that would be recognized by one of ordinary skill in the art.
Fig. 1 is a schematic structural view of a dispersion film according to an embodiment of the present disclosure.
Referring to fig. 1, a dispersion film of the present disclosure includes:
a plurality of first film layers, the first film layers having a first refractive index;
a plurality of second film layers having a second refractive index;
the first film layer and the second film layer are alternately stacked to form a dispersion film;
wherein the first refractive index is greater than the second refractive index;
the total thickness of the dispersion film is in the micron order;
the total thickness of the first film layer is less than the total thickness of the second film layer.
The dispersion film has the functions of dispersion and dichromatic light splitting through the structural design.
Referring to FIG. 1, the dispersion film of the present disclosure may be disposed on an end face of an optical fiber ferrule, with the end face being the substrate, alternately disposing a first film and a second film, in FIG. 1 with Ta 2 O 5 As the first film, siO 2 As the second film, a dispersion film of a preferred embodiment of the present disclosure is formed.
In some embodiments of the present disclosure, the first film layer may also be Nb 2 O 5 、HfO 2 And the like, and the selection/adjustment of the material of the first film layer and the material of the second film layer all fall within the protection scope of the present disclosure.
In FIG. 1, the white film layer represents the first film layer (high refractive index film layer Ta 2 O 5 ) The black film layer represents a second film layer (low refractive index film layer SiO 2 )。
Referring to fig. 1, preferably, the odd layer of the dispersion film of the present disclosure is a first film layer, the even layer is a second film layer, and both the bottom layer and the top layer of the dispersion film are first film layers.
For the dispersion film of the present disclosure, preferably, the shapes of the first film layer and the second film layer are both disc shapes, and the radial dimension of the first film layer is the same as the radial dimension of the second film layer.
Referring to fig. 1, the dispersion film of the present disclosure can be disposed on the end face of an optical fiber ferrule by a first film layer as a bottom layer.
The dispersion film can realize the alternate stacking of a plurality of first film layers and a plurality of second film layers based on a plasma sputtering method.
The dispersion film can set target value parameters of dispersion quantity, reflectivity and bandwidth based on specific requirements of central wavelength and group velocity delay dispersion of the dispersion film to be obtained, and further set the material, the layer number and the film layer distribution along with thickness of the first film layer and the second film layer.
Referring to FIG. 1, preferably, the total thickness of the dispersion film of the present disclosure is 7.803 μm to 8.292 μm, the first film layer is Ta 2 O 5 The second film layer is SiO 2 ；
The total number of layers of the first film layer and the second film layer is 45;
from bottom to top, the rete thickness that each rete corresponds respectively is:
132-141nm、244-252nm、141-152nm、194-201nm、136-155nm、203-212nm、145-173nm、210-220nm、138-148nm、197-207nm、130-140nm、192-202nm、129-136nm、173-202nm、134-144nm、205-207nm、140-163nm、204-216nm、132-144nm、220-228nm、169-179nm、217-227nm、141-158nm、202-204nm、127-138nm、197-207nm、139-142nm、204-208nm、135-145nm、200-210nm、135-145nm、211-212nm、153-167nm、235-245nm、137-144nm、188-201nm、136-156nm、202-212nm、147-163nm、223-229nm、144-154nm、196-206nm、131-141nm、275-285nm、160-171nm。
wherein the total thickness of the first film layer is 3.211-3.499 μm, and the total thickness of the second film layer is 4.592-4.793 μm.
The dispersion film shown in fig. 1 has the following optical characteristics: the transmittance T of the film to the wavelength 973-980nm of the pumping light>80%, reflectance R for signal light wavelength>60%, group velocity dispersion in the wavelength range of 1010-1080nm<-800fs 2 。
Fig. 4 and 5 are transmittance curves for the trim film thickness over a single film thickness range.
If only the dichroic beam splitting function of the dispersion film of the present disclosure is utilized, it can be used as an incident cavity mirror constituting a laser resonator to construct an all-fiber resonator structure, and if only the dispersion management function is utilized, it can be used as a dispersion regulating element in an optical system.
Fig. 2 shows the structure of a dispersive cavity mirror with an all-fiber structure according to one embodiment of the present disclosure. The fiber stub is also shown in fig. 2.
Referring to fig. 2, the optical fiber ferrule of the present disclosure includes: an optical fiber ferrule body 200 and a dispersion film 100.
The optical fiber ferrule body 200 has a first end and a second end, wherein the first end forms an end face, and the second end is used for inserting an optical fiber 300; the dispersion film 100 is a dispersion film according to any one of the above-described embodiments of the present disclosure, and the dispersion film 100 is disposed on an end face of the optical fiber ferrule body 200.
Preferably, the end face of the fiber ferrule body 200 has a shape matching the dispersion film 100.
Preferably, the end surface of the first end of the optical fiber ferrule body 200 is an end surface subjected to grinding and polishing treatment.
The material of the fiber ferrule body 200 of the fiber ferrule described in this disclosure is preferably a ceramic material.
In some embodiments of the present disclosure, a plating jig for securing an optical fiber ferrule body may be fabricated to be adaptable to both a plating machine operating platform for preparing a dispersion film on an end face of an optical fiber ferrule body and to secure the optical fiber ferrule body described above in the present disclosure.
In the process of preparing the dispersion film 100 on the end face of the optical fiber ferrule body 200 based on the plasma sputtering method, the thickness of each layer of the dispersion film can be controlled by controlling the film coating time, so that the thickness error of each film layer is smaller than 0.5nm.
The thickness error and the non-uniformity in the plasma sputtering coating process can be corrected by controlling the distance between the target material and the end face of the optical fiber core insert body and the sputtering angle and combining a mask plate.
Preferably, the dispersive cavity mirror with all-fiber structure of the present disclosure comprises: the fiber stub of any of the embodiments described above, and the passive fiber 300.
Referring to fig. 2, a passive optical fiber 300 is inserted into the fiber ferrule body 200 through a second end of the fiber ferrule body 200.
Fig. 3 illustrates a laser resonator device of one embodiment of the present disclosure, comprising:
a first ferrule 201, the first ferrule 201 having a first end (right end) and a second end (left end), the first end of the first ferrule 201 forming an end face (right end in fig. 3);
a second ferrule 202, the second ferrule 202 having a first end (left end) and a second end (right end), the first end of the second ferrule 202 interfacing with the first end of the first ferrule 201;
a third ferrule 203, the third ferrule 203 having a first end (right end) and a second end (left end), the first end of the third ferrule 203 forming an end face;
a dispersion film 100, wherein the dispersion film 100 is disposed on the end face of the first ferrule 201;
a gain fiber 400, two ends of the gain fiber 400 are respectively inserted into the second end of the second ferrule 202 and the second end of the third ferrule 203;
a semiconductor saturable absorber mirror 600, the semiconductor saturable absorber mirror 600 being disposed on the end face of the third ferrule 203;
wherein the dispersion film 100 is the dispersion film 100 of any of the embodiments described above in the present disclosure.
Preferably, the length of the gain fiber 400 of the laser resonator device of the present disclosure is less than or equal to 10cm, and rare earth ions are doped in the fiber core of the gain fiber 400, so as to realize the optical gain requirement of short fiber length, i.e. meeting the mode locking threshold.
The gain fiber 400 may be a single mode fiber, a polarization maintaining single mode fiber, a multimode fiber, a double-clad fiber, or the like.
The rare earth ion described above may be Yb 3+ 、Er 3+ 、Tm 3+ 、Ho 3+ One or a co-doped form of (a) in the above.
In some embodiments of the present disclosure, the third ferrule 203 is eliminated and the second end of the second ferrule 202 forms an end face when the length of the gain fiber is 3cm or less, and the semiconductor saturable absorber mirror 600 is disposed on the end face of the second ferrule 202.
The gain fiber of the present disclosure may be a fiber doped with one rare earth ion or a co-doped form fiber doped with two or more rare earth ions. Those skilled in the art, with the benefit of this disclosure, may select/adjust the type of gain fiber 400 and the type of rare earth ion doped, which fall within the scope of this disclosure.
Preferably, referring to fig. 3, the laser resonator device of the present disclosure further includes a passive optical fiber 300, and the passive optical fiber 300 is inserted into the second end of the first ferrule 201.
In some embodiments of the present disclosure, the laser resonator device of the present disclosure, referring to fig. 3, further comprises a ceramic sleeve 500, the ceramic sleeve 500 partially sleeved over the first ferrule 201 and partially sleeved over the second ferrule 202 to secure the interfacing of the first ferrule 201 and the second ferrule 202.
As can be seen from the above description, a high-repetition-frequency femtosecond fiber laser resonator device can be constructed based on the dispersion film 100 of the present disclosure.
The laser generated by the laser resonator device of the present disclosure is output out of the cavity through a wavelength division multiplexer (not shown) fused by the passive optical fiber 300.
A prism pair de-chirping may be implemented outside the cavity to obtain ultra-narrow pulse outputs.
Referring to fig. 3, the dispersion film-based cavity mirrors of the present disclosure may be secured and attached by a peripheral sleeve (i.e., ceramic sleeve 500 described above), compatible with ultra-fast fiber resonators, maintaining the all-fiber structure of the laser resonator.
The laser resonant cavity device disclosed by the invention can realize laser output of the following indexes based on the whole structure of all-fiber in a 1 mu m wave band: pulse laser with pulse repetition frequency of 1GHz, shortest pulse width of 364fs and mode-locked spectrum linewidth of 7.6nm is output; pulse laser with pulse repetition frequency of 2.2GHz, shortest pulse width of 283fs and mode-locked spectrum linewidth of 8.25nm is output; the repetition frequency is 3.3GHz, the shortest pulse width is 266fs, and the mode-locked spectrum linewidth is 9.6 nm.
In addition, the laser resonant cavity device disclosed by the invention not only can realize the high-frequency laser pulse output of more than 1GHz in the centimeter-level ultra-short resonant cavity, but also greatly improves the stability of laser output.
Through the structural design of the unique dispersion film described in the disclosure, the dispersion film shows certain optical characteristics and can be applied to a high-repetition-frequency femtosecond optical fiber laser resonant cavity. The dispersion film disclosed by the invention is firstly applied to the end face of the optical fiber core insert and has the functions of group velocity delay dispersion and dichromatic light splitting.
Compared with a large-size glass substrate in the prior art, the dispersion film is applied to a laser resonant cavity, can maintain the whole all-fiber structure of the resonant cavity, improves the reliability and stability of femtosecond laser operation, and is particularly suitable for application fields with high stability requirements such as laser surgery and the like.
The laser resonant cavity device disclosed by the invention has the size of centimeter magnitude, and is beneficial to improving the integration of the fiber laser.
The present disclosure also provides a laser. In some embodiments of the present disclosure, the laser of the present disclosure includes a dispersive cavity mirror with an all-fiber structure of any of the embodiments of the present disclosure (see fig. 2). In other embodiments of the present disclosure, a laser of the present disclosure includes a laser resonator device of any one of the embodiments of the present disclosure (see fig. 3).
The dispersive thin film, the fiber stub, the dispersive cavity mirror, the laser resonator device, and the laser of the present disclosure are described below in connection with more specific embodiments.
Example 1
Firstly, loading and fixing a passive optical fiber of Hi1060 model of Kanning company in the United states in a nano zirconia ferrule, wherein the cross section of the end face of the ferrule is circular, the inner diameter is 125 mu m, the outer diameter is 2.5mm, and further grinding and polishing the end face of the ferrule.
Taking the end face of the ferrule as a substrate, and sequentially forming a first layer of high-refractive-index film layer Ta from the substrate 2 O 5 A second low refractive index film SiO 2 Third layer high refractive index film layer Ta 2 O 5 Fourth low refractive index film SiO 2 Fifth layer high refractive index film Ta 2 O 5 Sixth low refractive index film SiO 2 Seventh high refractive index film Ta 2 O 5 Eighth low refractive index film SiO 2 Ninth layer of high refractive index film Ta 2 O 5 Tenth low refractive index film SiO 2 Eleventh high refractive index film layer Ta 2 O 5 Twelfth low refractive index film SiO 2 Thirteenth layer of high refractive index film Ta 2 O 5 Fourteenth low refractive index film layer SiO 2 Fifteenth high refractive index film layer Ta 2 O 5 Sixteenth layer of low refractive index film SiO 2 Seventeenth high refractive index film layer Ta 2 O 5 Eighteenth layer of low refractive index film SiO 2 Nineteenth high refractive index film layer Ta 2 O 5 Twentieth low refractive index film layer SiO 2 Twenty-first high refractive index film layer Ta 2 O 5 Twenty-second low refractive index film layer SiO 2 Twenty-third high refractive index film layer Ta 2 O 5 Twenty-fourth low refractive index film layer SiO 2 Twenty-fifth high refractive index film Ta 2 O 5 Twenty-sixth low refractive index film layer SiO 2 Twenty-seventh high refractive index film layer Ta 2 O 5 Twenty eighth low refractive index film layer SiO 2 Twenty-ninth high refractive index film layer Ta 2 O 5 Thirty-first low refractive index film layer SiO 2 Thirty-first high refractive index film layer Ta 2 O 5 Thirty-second low refractive index film layer SiO 2 Thirty-third layer high refractive index film layer Ta 2 O 5 Thirty-fourth low refractive index film layer SiO 2 Thirty-fifth high refractive index film layer Ta 2 O 5 Thirty-sixth low refractive index film layer SiO 2 Thirty-seventh high refractive index film layer Ta 2 O 5 Thirty-eighth layer of low refractive index film layer SiO 2 Thirty-ninth high refractive index film layer Ta 2 O 5 Forty-layer low refractive index film SiO 2 Forty-first high refractive index film Ta 2 O 5 Forty-two layers of low refractive index filmSiO 2 Forty three layers of high refractive index film Ta 2 O 5 Forty-fourth low refractive index film SiO 2 Forty five layers of high refractive index film Ta 2 O 5 The film thickness of each film layer is 132-141nm, 244-252nm, 141-152nm, 194-201nm, 136-155nm, 203-212nm, 145-173nm, 210-220nm, 138-148nm, 197-207nm, 130-140nm, 192-202nm, 129-136nm, 173-202nm, 134-144nm, 205-207nm, 140-163nm, 204-216nm, 132-144nm, 220-228nm, 169-179nm, 217-227nm, 141-158nm, 202-204nm, 127-138nm, 197-207nm, 139-142nm, 204-208nm, 135-145nm, 200-210nm, 135-145nm, 211-212nm, 153-167nm, 235-245nm, 137-144nm, 188-201nm, 136-156nm, 202-212nm, 147-163nm, 223-229nm, 144-154nm, 196-206nm, 131-141nm, 160-171nm, 285 nm.
And manufacturing a film plating clamp for fixing the ferrule, so that the film plating clamp can be matched with an operating platform of a film plating machine and can also fix the ferrule subjected to polishing treatment.
Ta is achieved by plasma sputtering 2 O 5 And SiO 2 And preparing a multilayer film with alternately arranged phases. The thickness of the film is controlled by time, and the thickness error of each film layer of the multilayer film is less than 0.5nm. Thickness errors and non-uniformity in the sputtering coating process are corrected by controlling the distance between the target material and the end face of the optical fiber and the sputtering angle and combining a special mask.
The optical characteristics of the dispersion film of this embodiment are: group delay dispersion at 1040nm of-761 fs 2 . The transmittance for 974nm pump light was 99%, and the reflectance for 1040nm signal light was 89.3%.
The dispersion film of this embodiment can be used to construct a high-repetition-frequency femtosecond fiber laser resonator, referring to fig. 3, the dispersion film 100 is disposed on an end face of the first ferrule 201, the outer diameter of the first ferrule 201 is 2.5mm, and the dispersion film 100 is abutted with an end face of the second ferrule 202 through the ceramic ferrule 500 to ensure low-loss transmission of light.
The present embodiment uses a commercial Yb-doped quartz gain fiber 400 with a first end plugged into the second ferrule 202 and a second end plugged into the third ferrule 203, a first end of the gain fiber 400The end face of the three ferrule 203 interfaces with the semiconductor saturable absorber mirror 600, and the embodiment uses epoxy to bond the semiconductor saturable absorber mirror 600 to the end face of the third ferrule 203. The semiconductor saturable absorber mirror 600 of this embodiment has a modulation depth of 5% and a saturation flux of 40 μJ/cm 2 The recovery time was 1ps. The gain fiber 400 in this embodiment has a length of 9.8cm, and the end faces of all ferrules in this embodiment are mirror polished.
The pumping source is further connected through a wavelength division multiplexer to construct a high-repetition-frequency femtosecond laser with wide spectrum and narrow pulse width, the semiconductor laser pumping source with the wavelength of 974nm is used for exciting the resonant cavity of the embodiment, the pumping light is output through a single-mode fiber, and the highest pumping light power is 680mW. The fiber fusion splicer is used for fusion-splicing the tail fiber of the pump source with the tail fiber of the pump end of the 980nm/1040nm optical fiber type wavelength division multiplexer, and the common end tail fiber of the wavelength division multiplexer is fused with the dispersive cavity mirror tail fiber 300 of the resonant cavity. Under the excitation of the pump, the generated laser is output out of the cavity through the signal end of the wavelength division multiplexer by the dispersive cavity mirror tail fiber 300. Then, the transmission type diffraction grating is used for carrying out the out-cavity chirp removal, and the following technical effects can be obtained:
the mode locking spectrum 3dB linewidth and the pulse width are 7.6nm and 364fs respectively while the basic repetition frequency 1GHz pulse laser output is realized in a 1 μm wave band, the whole laser resonant cavity is of an all-fiber structure, and the self-correlation tracks of the mode locking spectrum and the pulse width are respectively shown in fig. 6 and 7. In addition, compared with the study reported in the prior art, the mode-locked pulse laser output by the resonant cavity of the present embodiment has two typical characteristics: 1) The flatness of the top of the spectrum is better; 2) The stability of the laser operation is higher.
It has been found that the full fiber structure of the femtosecond laser resonator can be maintained with the dispersive thin film of the present disclosure. And the constructed laser is light and small, and is easy for mass production and integration.
Example two
By the above-described method for producing a dispersion film, an optical characteristic of-348 fs around 1033nm was produced 2 The transmittance for 974nm pump light was 99%, forA dispersive cavity mirror with a reflectivity of 89.6% at 1033nm of the signal light.
Based on the dispersion cavity mirror of the embodiment, a femtosecond laser resonant cavity with higher repetition frequency can be constructed. With continued reference to fig. 3, the present embodiment uses a commercial Yb doped silica gain fiber 400 with a first end plugged into the second ferrule 202, a second end plugged into the third ferrule 203, and an end face of the third ferrule 203 is abutted against the semiconductor saturable absorber mirror 600, and the present embodiment uses epoxy to bond the semiconductor saturable absorber mirror 600 to the end face of the third ferrule 203. The semiconductor saturable absorber mirror 600 of this embodiment has a modulation depth of 5% and a saturation flux of 40 μJ/cm 2 The recovery time was 1ps. The gain fiber 400 in this embodiment has a length of 4.4cm, and the end faces of all ferrules in this embodiment are mirror polished.
The pumping source is further connected through a wavelength division multiplexer to construct a high-repetition-frequency femtosecond laser with wide spectrum and narrow pulse width, the semiconductor laser pumping source with the wavelength of 974nm is used for exciting the resonant cavity of the embodiment, the pumping light is output through a single-mode fiber, and the highest pumping light power is 680mW. The pump source pigtail is welded with the pump end of the 980nm/1030nm optical fiber type wavelength division multiplexer by an optical fiber welding machine, and the common end pigtail of the wavelength division multiplexer is welded with the dispersive cavity mirror pigtail 300 of the resonant cavity of the embodiment. Under the excitation of the pump, the generated laser is output out of the cavity through the signal end of the wavelength division multiplexer by the dispersive cavity mirror tail fiber 300. Then, the transmission type diffraction grating is used for carrying out the out-cavity chirp removal, and the following technical effects can be obtained:
the mode locking spectrum 3dB linewidth and the pulse width are respectively 8.3nm and 283fs while the basic repetition frequency 2.2GHz pulse laser output is realized in a 1 μm wave band, the whole laser resonant cavity is of an all-fiber structure, and the self-correlation tracks of the mode locking spectrum and the pulse width are respectively shown in fig. 8 and 9. In addition, compared with the study reported in the prior art, the mode-locked pulse laser output by the resonant cavity of the present embodiment has two typical characteristics: 1) The flatness of the top of the spectrum is better; 2) The stability of the laser operation is higher.
Example III
Using dispersion as described aboveMethod for producing film having optical characteristics of-233 fs around 1030nm 2 A dispersive cavity mirror with a transmittance of 99% for 974nm pump light and a reflectance of 89.2% for 1030nm signal light.
The dispersion film of this embodiment can be used to construct a high-repetition-frequency femtosecond fiber laser resonator, referring to fig. 3, the dispersion film 100 is disposed on an end face of the first ferrule 201, the outer diameter of the first ferrule 201 is 2.5mm, and the dispersion film 100 is abutted with an end face of the second ferrule 202 through the ceramic ferrule 500 to ensure low-loss transmission of light.
In this embodiment, a commercial Yb doped quartz gain fiber 400 is used, a first end of the commercial Yb doped quartz gain fiber 400 is plugged into the second ferrule 202, a second end of the gain fiber 400 is plugged into the third ferrule 203, an end face of the third ferrule 203 is in butt joint with the semiconductor saturable absorber mirror 600, and epoxy resin is adopted to bond the semiconductor saturable absorber mirror 600 to the end face of the third ferrule 203. The semiconductor saturable absorber mirror 600 of this embodiment has a modulation depth of 5% and a saturation flux of 40 μJ/cm 2 The recovery time was 1ps. The gain fiber 400 in this embodiment has a length of 3.0cm, and the end faces of all ferrules in this embodiment are mirror polished.
The pumping source is further connected through a wavelength division multiplexer to construct a high-repetition-frequency femtosecond laser with wide spectrum and narrow pulse width, the semiconductor laser pumping source with the wavelength of 974nm is used for exciting the resonant cavity of the embodiment, the pumping light is output through a single-mode fiber, and the highest pumping light power is 680mW. And the fiber welding machine is used for welding the tail fiber of the pump source with the tail fiber of the pump end of the 980nm/1030nm optical fiber type wavelength division multiplexer, and welding the tail fiber of the public end of the wavelength division multiplexer with the dispersive cavity mirror tail fiber 300 of the resonant cavity. Under the excitation of the pump, the generated laser is output out of the cavity through the signal end of the wavelength division multiplexer by the dispersive cavity mirror tail fiber 300. Then, the transmission type diffraction grating is used for carrying out the out-cavity chirp removal, and the following technical effects can be obtained:
the wide spectrum and narrow pulse output are realized in the pulse laser with the higher repetition frequency of 3.3GHz in the 1 μm wave band, the 3dB linewidth of the spectrum is the widest of 9.6nm, the pulse width is the narrowest of 266fs, and meanwhile, the whole laser realizes an all-fiber structure. Fig. 10 is a graph of the test spectrum of the laser of this example, with a 3dB linewidth of 9.6nm, fig. 11 is an autocorrelation trace, and the pulse width of the test is 266fs. The pulse sequence of the oscilloscope test is shown in fig. 12, which shows that the laser of this embodiment operates in a dc mode locked state with a fundamental repetition rate of the pulses of 3.3GHz.
Example IV
In order to further improve the environmental stability of the laser, a laser resonant cavity with a full polarization maintaining structure is constructed, and in this embodiment, a dispersion film is arranged on the end face of a ceramic ferrule on which a polarization maintaining fiber is loaded and fixed. The U.S. corning incorporated Hi1060 fiber in the above example was replaced with Nufern PM980 fiber. The dispersive film is then prepared using the preparation method described above.
When the polarization maintaining dispersion cavity mirror of the embodiment is utilized to construct a laser resonant cavity, the tail fiber of the semiconductor laser pumping source with the wavelength of 974nm is replaced by PM980 fiber, the wavelength division multiplexer is replaced by a polarization maintaining wavelength division multiplexer with double-axis work, and the tail fibers of the wavelength division multiplexer are all PM980 fiber. The gain fiber uses polarization-maintaining single-mode fiber or double-cladding fiber. The remaining components and structures of the resonant cavity remain unchanged as shown in fig. 3. By utilizing the resonant cavity structure of the embodiment, besides the wide-spectrum and narrow-pulse-width GHz heavy-frequency ultrafast laser can be realized, the whole system is of a polarization-preserving all-fiber structure, the anti-interference capability of the laser is improved, and the use of the laser under extreme conditions is expanded.
Example five
In the above embodiments, the Yb-doped is mainly used 3+ The gain fiber is used as the gain medium, and the embodiment can further change the type of the gain fiber in the resonant cavity, such as Er-doped 3+ 、Tm 3+ 、Ho 3+ And the parameters and types of the semiconductor saturable absorber mirror are correspondingly adjusted, which fall within the protection scope of the present disclosure.
In the description of the present specification, reference to the terms "one embodiment/manner," "some embodiments/manner," "example," "a particular example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment/manner or example is included in at least one embodiment/manner or example of the present disclosure. In this specification, the schematic representations of the above terms are not necessarily for the same embodiment/manner or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments/modes or examples. Furthermore, the various embodiments/modes or examples described in this specification and the features of the various embodiments/modes or examples can be combined and combined by persons skilled in the art without contradiction.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present disclosure, the meaning of "a plurality" is at least two, such as two, three, etc., unless explicitly specified otherwise.
It will be appreciated by those skilled in the art that the above-described embodiments are merely for clarity of illustration of the disclosure, and are not intended to limit the scope of the disclosure. Other variations or modifications will be apparent to persons skilled in the art from the foregoing disclosure, and such variations or modifications are intended to be within the scope of the present disclosure.
Claims (18)
1. A dispersion film, comprising:
a plurality of first film layers, the first film layers having a first refractive index; and
a plurality of second film layers, the second film layers having a second refractive index;
the first film layers and the second film layers are alternately stacked to form the dispersion film;
wherein the first refractive index is greater than the second refractive index;
the total thickness of the dispersion film is in the micron level;
the total thickness of the first film layer is smaller than the total thickness of the second film layer;
wherein the odd layer is a first film layer, the even layer is a second film layer, and the bottom layer and the top layer of the dispersion film are both the first film layer;
the total thickness of the dispersion film is 7.803 μm to 8.292 μm;
the first film layer is Ta 2 O 5 、Nb 2 O 5 、HfO 2 One of the second film layer is SiO 2 ；
The total number of layers of the first film layer and the second film layer is 45;
from bottom to top, the rete thickness that each rete corresponds respectively is:
132-141nm、244-252nm、141-152nm、194-201nm、136-155nm、203-212nm、145-173nm、210-220nm、138-148nm、197-207nm、130-140nm、192-202nm、129-136nm、173-202nm、134-144nm、205-207nm、140-163nm、204-216nm、132-144nm、220-228nm、169-179nm、217-227nm、141-158nm、202-204nm、127-138nm、197-207nm、139-142nm、204-208nm、135-145nm、200-210nm、135-145nm、211-212nm、153-167nm、235-245nm、137-144nm、188-201nm、136-156nm、202-212nm、147-163nm、223-229nm、144-154nm、196-206nm、131-141nm、275-285nm、160-171nm；
the transmittance T of the dispersion film to the wavelength 973-980nm of the pumping light is more than 80%.
2. The dispersion film according to claim 1, wherein the dispersion film is provided on an end face of an optical fiber ferrule through the first film layer as a bottom layer.
3. The dispersion film of claim 1, wherein the first film layer and the second film layer are both wafer-shaped in shape, and the radial dimension of the first film layer is the same as the radial dimension of the second film layer.
4. The dispersive film according to claim 1, wherein the alternating stacking of the plurality of first film layers and the plurality of second film layers is achieved by a plasma-based sputtering method.
5. An optical fiber ferrule, comprising:
the optical fiber connector comprises an optical fiber connector body, a first connecting rod and a second connecting rod, wherein the optical fiber connector body is provided with a first end and a second end, the first end forms an end face, and the second end is used for inserting an optical fiber; and
the dispersive film of any one of claims 1 to 4 disposed on the end face of the fiber stub body.
6. The fiber stub of claim 5, wherein the end face of the fiber stub body has a matching shape with the dispersion film.
7. The optical fiber ferrule of claim 5, wherein the end face is an abraded polished end face.
8. A dispersive endoscope having an all-fiber structure, comprising:
the optical fiber ferrule of any one of claims 5 to 7; and
and the passive optical fiber is inserted into the optical fiber ferrule body through the second end of the optical fiber ferrule body.
9. A laser resonator device comprising:
a first ferrule having a first end and a second end, the first end of the first ferrule forming an end face;
a second ferrule having a first end and a second end, the first end of the second ferrule interfacing with the first end of the first ferrule;
a third ferrule having a first end and a second end, the first end of the third ferrule forming an end face;
a dispersion film disposed on the end face of the first ferrule;
the two ends of the gain optical fiber are respectively inserted into the second end of the second inserting core and the second end of the third inserting core; and
a semiconductor saturable absorber mirror disposed on the end face of the third ferrule;
wherein the dispersion film is the dispersion film according to any one of claims 1 to 4.
10. The laser resonator device according to claim 9, wherein the length of the gain fiber is 10cm or less, and the fiber core of the gain fiber is doped with rare earth ions, so as to realize that the optical gain requirement of the mode locking threshold is met when the length of the short fiber is short.
11. The laser resonator device according to claim 9, characterized in that when the length of the gain fiber is 3cm or less, the third ferrule is eliminated, the second end of the second ferrule forms an end face, and the semiconductor saturable absorber mirror is disposed on the end face of the second ferrule.
12. The laser resonator device according to claim 9, wherein the gain fiber is a single mode fiber, a polarization maintaining single mode fiber, a multimode fiber, or a double clad fiber.
13. The laser resonator device according to claim 12, characterized in that the gain fiber is a fiber doped with one kind of rare earth ion or a co-doped form fiber doped with two or more kinds of rare earth ions.
14. The laser resonator device according to claim 13, wherein the rare earth ion is Yb 3+ 、Er 3+ 、Tm 3+ Or Ho 3+ 。
15. The laser resonator device of claim 9 further comprising:
a passive optical fiber inserted into the second end of the first ferrule.
16. The laser resonator device of claim 9 further comprising:
the ceramic sleeve is partially sleeved on the first inserting core and partially sleeved on the second inserting core so as to fix the butt joint of the first inserting core and the second inserting core.
17. A laser comprising the dispersive cavity mirror with all-fiber architecture of claim 8.
18. A laser comprising a laser resonator device as claimed in any one of claims 9 to 16.
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