CN115097556A - Dispersion film, optical fiber ferrule, dispersion cavity mirror, resonant cavity device and laser - Google Patents
Dispersion film, optical fiber ferrule, dispersion cavity mirror, resonant cavity device and laser Download PDFInfo
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- CN115097556A CN115097556A CN202210707056.5A CN202210707056A CN115097556A CN 115097556 A CN115097556 A CN 115097556A CN 202210707056 A CN202210707056 A CN 202210707056A CN 115097556 A CN115097556 A CN 115097556A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/268—Optical coupling means for modal dispersion control, e.g. concatenation of light guides having different modal dispersion properties
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06725—Fibre characterized by a specific dispersion, e.g. for pulse shaping in soliton lasers or for dispersion compensating [DCF]
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Abstract
The present disclosure provides a dispersive film comprising: a plurality of first film layers having a first refractive index; and a plurality of second film layers having a second index of refraction; alternately stacking a first film layer and a second film layer to form a dispersion film; wherein the first refractive index is greater than the second refractive index; the total thickness of the dispersion film is micron-sized; the total thickness of the first film layer is less than that of the second film layer. The disclosure also provides an optical fiber ferrule, a dispersion cavity mirror with a full-fiber structure, a laser resonant cavity device and a laser.
Description
Technical Field
The present disclosure relates to the field of optical thin film and ultrafast laser technology, and in particular, to a dispersion thin film, an optical fiber ferrule, a dispersion cavity mirror, a laser resonator device and a laser.
Background
The ultra-fast laser with GHz repetition frequency has important application in the fields of special material processing, multiphoton fluorescence imaging, high-speed optical communication systems, astronomical optical frequency combs and the like.
In the aspect of special material processing, based on an ablation cooling mechanism, the light source can obtain higher processing precision; in the aspect of two-photon imaging, the imaging resolution can be improved by using the light source so as to obtain a clearer microscopic image; in the field of astronomical detection, the light source has high single-tooth power, and the measurement accuracy can be improved. At present, a high repetition frequency laser constructed based on a gain medium made of a solid/crystal material has the advantages of high repetition frequency and narrow pulse width. In comparison, the laser with the all-fiber structure has the unique advantages of good heat dissipation, stable mode, stable environment and the like, and is more suitable for being applied to some specific environments, but the existing high-repetition-frequency fiber laser still faces the bottleneck problem that the pulse width is wide and is difficult to compress.
The pulse width of the 5GHz Yb-doped fiber laser reported in 2017 is 2.6 ps; the pulse width corresponding to the 3GHz Yb-doped fiber laser reported in 2018 is 3.4 ps; the pulse width measured in a 12.5GHz Yb-doped fiber laser reported in 2019 was 1.9 ps.
It can be seen that although pulse output at GHz repetition rate is achieved in these all-fiber lasers, the corresponding pulse width is concentrated in the order of ps, which limits the application of such light sources in the above-mentioned fields to some extent. The reasons for this "bottleneck" problem are: according to the mode locking principle, to obtain pulse output with repetition frequency of GHz magnitude, the cavity length of the laser resonator needs to be shortened to centimeter magnitude, and the short resonator length makes common chirped mirror pairs, chirped gratings and the like which implement dispersion management unable to be arranged in the cavity due to volume reasons and fail, so it is difficult to implement dispersion management in such short resonator to implement broad spectrum and narrow pulse laser output.
Other attempts have been made, such as plating a dispersion management film on the lens to insert into the resonant cavity of the fiber laser, and introducing additional devices to achieve spatial light coupling, which results in loss of the all-fiber structure of the laser, and the system becomes complicated and unstable.
Disclosure of Invention
In order to solve at least one of the above technical problems, the present disclosure provides a dispersion film, an optical fiber ferrule, a dispersion cavity mirror, a laser resonator device, and a laser.
According to one aspect of the present disclosure, there is provided a dispersion film comprising:
a plurality of first film layers, the first film layers having a first index of refraction;
a plurality of second film layers having a second index of refraction;
the first film layers are alternately stacked with the second film layers to form the dispersive thin film;
wherein the first refractive index is greater than the second refractive index;
the total thickness of the dispersion film is micron-sized;
the total thickness of the first film layer is less than the total thickness of the second film layer.
In accordance with at least one embodiment of the present disclosure, the first film layer is preferably Ta 2 O 5 、Nb 2 O 5 、HfO 2 Preferably, the second film layer is SiO 2 。
According to the dispersion film of at least one embodiment of the present disclosure, the odd-numbered layers are first film layers, the even-numbered layers are second film layers, and the bottom layer and the top layer of the dispersion film are both the first film layers.
The dispersive film according to at least one embodiment of the present disclosure has a total thickness of 7.803 μm to 8.292 μm, and the first film layer is Ta 2 O 5 The second film layer is SiO 2 ；
The total number of the first film layer and the second film layer is 45;
from the bottom layer to the top layer, the corresponding film thickness of each film is:
132-141nm、244-252nm、141-152nm、194-201nm、136-155nm、203-212nm、145-173nm、210-220nm、138-148nm、197-207nm、130-140nm、192-202nm、129-136nm、173-202nm、134-144nm、205-207nm、140-163nm、204-216nm、132-144nm、220-228nm、169-179nm、217-227nm、141-158nm、202-204nm、127-138nm、197-207nm、139-142nm、204-208nm、135-145nm、200-210nm、135-145nm、211-212nm、153-167nm、235-245nm、137-144nm、188-201nm、136-156nm、202-212nm、147-163nm、223-229nm、144-154nm、196-206nm、131-141nm、275-285nm、160-171nm。
according to the dispersion film of at least one embodiment of the present disclosure, the dispersion film is disposed on the end face of the optical fiber ferrule through the first film layer as a bottom layer.
According to the dispersive film of at least one embodiment of the present disclosure, the shape of the first film layer and the second film layer are both in a wafer shape, and the radial dimension of the first film layer is the same as the radial dimension of the second film layer.
According to the dispersive thin film of at least one embodiment of the present disclosure, the method based on plasma sputtering realizes the alternate stacking of a plurality of the first film layers and a plurality of the second film layers.
According to another aspect of the present disclosure, there is provided a fiber stub, including:
a fiber stub body having a first end forming an end face and a second end for insertion of an optical fiber;
the dispersion membrane of any one of the embodiments of the present disclosure, disposed on the end face of the fiber stub body.
According to the fiber stub of at least one embodiment of the present disclosure, the end face of the fiber stub body and the dispersion membrane have matching shapes.
According to the optical fiber ferrule of at least one embodiment of the present disclosure, the end face is a ground and polished end face.
According to the optical fiber inserting core of at least one embodiment of the disclosure, the optical fiber inserting core body is made of ceramic materials.
According to yet another aspect of the present disclosure, there is provided a dispersive cavity mirror having a full fiberoptic structure, comprising:
the fiber optic ferrule of any of the embodiments of the present disclosure;
a passive optical fiber inserted into the fiber stub body through the second end of the fiber stub body.
According to still another aspect of the present disclosure, there is provided a laser resonator device including:
a first ferrule having a first end and a second end, the first end of the first ferrule forming an end face;
a second ferrule having a first end and a second end, the first end of the second ferrule abutting the first end of the first ferrule;
a third ferrule having a first end and a second end, the first end of the third ferrule forming an end face;
a dispersive membrane disposed on the endface of the first ferrule;
the two ends of the gain optical fiber are respectively inserted into the second end of the second ferrule and the second end of the third ferrule;
a semiconductor saturable absorber mirror disposed on the end face of the third ferrule;
wherein the dispersive film is the dispersive film according to any embodiment of the present disclosure.
According to the laser resonator device of at least one embodiment of the present disclosure, the length of the gain fiber is less than or equal to 10cm, and the fiber core of the gain fiber is doped with rare earth ions, so as to realize a short fiber length, that is, to meet the optical gain requirement of the mode locking threshold.
According to the laser resonator device of at least one embodiment of the present disclosure, when the length of the gain fiber is less than or equal to 3cm, the third ferrule is eliminated, the second end of the second ferrule forms an end face, and the semiconductor saturable absorber mirror is disposed on the end face of the second ferrule.
According to the laser resonator device of at least one embodiment of the present disclosure, the gain fiber is a single mode fiber, a polarization maintaining single mode fiber, a multimode fiber, or a double-clad fiber.
According to the laser resonator device of at least one embodiment of the present disclosure, the gain fiber is a fiber doped with one kind of rare earth ions or a co-doped type fiber doped with two or more kinds of rare earth ions.
According to the laser resonator device of at least one embodiment of the present disclosure, the rare earth ion is Yb 3+ 、Er 3+ 、Tm 3+ Or Ho 3+ And the like.
A laser resonator device according to at least one embodiment of the present disclosure further includes:
a passive fiber inserted into the second end of the first ferrule.
A laser resonator device according to at least one embodiment of the present disclosure further includes:
the ceramic sleeve is partially sleeved on the first ferrule and partially sleeved on the second ferrule so as to fix the butt joint of the first ferrule and the second ferrule.
According to yet another aspect of the present disclosure, there is provided a laser comprising a dispersive cavity mirror with a fully fibered structure according to any of the embodiments of the present disclosure.
According to still another aspect of the present disclosure, there is provided a laser including the laser resonator device of any one of the embodiments of the present disclosure.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the disclosure and together with the description serve to explain the principles of the disclosure.
Fig. 1 is a schematic structural diagram of a dispersive film according to an embodiment of the present disclosure.
Fig. 2 shows a fiber stub and a dispersion cavity mirror with a fully fiberized structure according to one embodiment of the present disclosure.
Fig. 3 is a schematic structural diagram of a laser resonator device according to an embodiment of the present disclosure.
Fig. 4 is a transmittance curve diagram of a dispersive cavity mirror according to a first embodiment of the disclosure.
Fig. 5 is a transmittance curve diagram of the dispersion cavity mirror when the thickness is adjusted and controlled according to the first embodiment of the disclosure.
FIG. 6 is a graph of the spectrum of the 1GHz femtosecond laser obtained in the first embodiment of the disclosure.
Fig. 7 is a graph of the autocorrelation of a 1GHz femtosecond laser obtained in the first embodiment of the present disclosure.
Fig. 8 is a 2.2GHz femtosecond laser spectrum obtained in example two of the present disclosure.
Fig. 9 is a graph of 2.2GHz femtosecond laser autocorrelation obtained in example two of the present disclosure.
Fig. 10 is a 3.3GHz femtosecond laser spectrum obtained in example three of the present disclosure.
Fig. 11 is a graph of the autocorrelation of the 3.3GHz femtosecond laser obtained in example three of the present disclosure.
Fig. 12 is a 3.3GHz femtosecond laser time-domain pulse diagram obtained in the third embodiment of the present disclosure.
Detailed Description
The present disclosure will be described in further detail with reference to the drawings and embodiments. It is to be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limitations of the present disclosure. It should be further noted that, for the convenience of description, only the portions relevant to the present disclosure are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present disclosure may be combined with each other without conflict. Technical solutions of the present disclosure will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Unless otherwise indicated, the illustrated exemplary embodiments/examples are to be understood as providing exemplary features of various details of some ways in which the technical concepts of the present disclosure may be practiced. Accordingly, unless otherwise indicated, features of the various embodiments may be additionally combined, separated, interchanged, and/or rearranged without departing from the technical concept of the present disclosure.
The use of cross-hatching and/or shading in the drawings is generally used to clarify the boundaries between adjacent components. As such, unless otherwise specified, the presence or absence of cross-hatching or shading does not convey or indicate any preference or requirement for a particular material, material property, size, proportion, commonality among the illustrated components and/or any other characteristic, attribute, property, etc., of a component. Further, in the drawings, the size and relative sizes of components may be exaggerated for clarity and/or descriptive purposes. While example embodiments may be practiced differently, the specific process sequence may be performed in a different order than that described. For example, two processes described consecutively may be performed substantially simultaneously or in reverse order to that described. In addition, like reference numerals denote like parts.
When an element is referred to as being "on" or "on," "connected to" or "coupled to" another element, it can be directly on, connected or coupled to the other element or intervening elements may be present. However, when an element is referred to as being "directly on," "directly connected to" or "directly coupled to" another element, there are no intervening elements present. For purposes of this disclosure, the term "connected" may refer to physically, electrically, etc., and may or may not have intermediate components.
For descriptive purposes, the present disclosure may use spatially relative terms such as "below … …," below … …, "" below … …, "" below, "" above … …, "" above, "" … …, "" higher, "and" side (e.g., "in the sidewall") to describe one component's relationship to another (other) component as illustrated in the figures. Spatially relative terms are intended to encompass different orientations of the device in use, operation, and/or manufacture in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below … …" can encompass both an orientation of "above" and "below". Further, the devices may be otherwise positioned (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. Furthermore, when the terms "comprises" and/or "comprising" and variations thereof are used in this specification, the presence of stated features, integers, steps, operations, elements, components and/or groups thereof are stated but does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and/or groups thereof. It is also noted that, as used herein, the terms "substantially," "about," and other similar terms are used as approximate terms and not as degree terms, and as such, are used to interpret inherent deviations in measured values, calculated values, and/or provided values that would be recognized by one of ordinary skill in the art.
Fig. 1 is a schematic diagram of a structure of a dispersive film according to an embodiment of the present disclosure.
Referring to fig. 1, a dispersive film of the present disclosure includes:
a plurality of first film layers, the first film layers having a first index of refraction;
a plurality of second film layers having a second index of refraction;
alternately stacking a first film layer and a second film layer to form a dispersion film;
wherein the first refractive index is greater than the second refractive index;
the total thickness of the dispersion film is micron-sized;
the total thickness of the first film layer is less than that of the second film layer.
The dispersion film disclosed by the invention has the dispersion function and the dichroic beam splitting function through the structural design.
Referring to fig. 1, the dispersion film of the present disclosure may be disposed on an end face of an optical fiber ferrule, with the end face being a substrate, with first and second films alternately disposed, with Ta in fig. 1 2 O 5 As the first film, SiO 2 As the second film, the dispersion film of the preferred embodiment of the present disclosure is formed.
In some embodiments of the present disclosure, the first film layer may also be Nb 2 O 5 、HfO 2 And the selection/adjustment of the material of the first film layer and the material of the second film layer by those skilled in the art in light of the disclosure falls within the scope of the present disclosure.
In FIG. 1, the white film layer represents the first film layer (high refractive index film layer Ta) 2 O 5 ) The black film layer represents the second film layer (low refractive index film layer SiO) 2 )。
Referring to fig. 1, preferably, the odd-numbered layers of the dispersive films of the present disclosure are first film layers, the even-numbered layers are second film layers, and the bottom and top layers of the dispersive film are both first film layers.
For the dispersion film of the present disclosure, preferably, the first film layer and the second film layer are both in a shape of a wafer, and the radial dimension of the first film layer is the same as the radial dimension of the second film layer.
Referring to fig. 1, the dispersion film of the present disclosure can be disposed on the end face of the optical fiber ferrule through the first film layer as a bottom layer.
The dispersive film disclosed by the invention can realize the alternate stacking of a plurality of first film layers and a plurality of second film layers based on a plasma sputtering method.
The dispersion film disclosed by the invention can set target value parameters of dispersion amount, reflectivity and bandwidth based on the specific requirements of the central wavelength and the group velocity delay dispersion of the dispersion film to be obtained, and further set the material, the layer number and the distribution of the film layers along with the thickness of the first film layer and the second film layer.
Referring to fig. 1, preferably, the total thickness of the dispersive film of the present disclosure is 7.803 μm to 8.292 μm, and the first film layer is Ta 2 O 5 The second film layer is SiO 2 ；
The total number of the first film layer and the second film layer is 45;
from the bottom layer to the top layer, the corresponding film thickness of each film is:
132-141nm、244-252nm、141-152nm、194-201nm、136-155nm、203-212nm、145-173nm、210-220nm、138-148nm、197-207nm、130-140nm、192-202nm、129-136nm、173-202nm、134-144nm、205-207nm、140-163nm、204-216nm、132-144nm、220-228nm、169-179nm、217-227nm、141-158nm、202-204nm、127-138nm、197-207nm、139-142nm、204-208nm、135-145nm、200-210nm、135-145nm、211-212nm、153-167nm、235-245nm、137-144nm、188-201nm、136-156nm、202-212nm、147-163nm、223-229nm、144-154nm、196-206nm、131-141nm、275-285nm、160-171nm。
wherein the total thickness of the first film layer is 3.211-3.499 μm, and the total thickness of the second film layer is 4.592-4.793 μm.
The dispersive film shown in fig. 1 has the following optical properties: transmittance T of film to pump light wavelength 973-980nm>80% of reflectance for signal light wavelength R>60% of group velocity dispersion in the wavelength range of 1010-1080nm<-800fs 2 。
Fig. 4 and 5 are transmittance curves corresponding to the thickness of the fine tuning film within a single film thickness range.
If only the dichroic beam splitting function of the dispersion film disclosed by the invention is utilized, the dispersion film can be used as an incident cavity mirror for forming a laser resonant cavity to construct an all-fiber resonant cavity structure, and if only the dispersion management function is utilized, the dispersion film can be used as a dispersion regulation element in an optical system.
Fig. 2 shows the structure of a dispersive cavity mirror with a fully fibered structure according to an embodiment of the present disclosure. Also shown in figure 2 is a fiber stub.
Referring to fig. 2, the optical fiber ferrule of the present disclosure includes: a fiber ferrule body 200 and a dispersive membrane 100.
Wherein the fiber stub body 200 has a first end forming an end face and a second end for inserting the optical fiber 300; the dispersive film 100 is the dispersive film of any of the embodiments described above in this disclosure, and the dispersive film 100 is disposed on the end face of the fiber stub body 200.
Preferably, the end face of the fiber stub body 200 has a matching shape with the dispersion film 100.
Wherein, preferably, the end face of the first end of the optical fiber ferrule body 200 is an end face which is subjected to grinding and polishing treatment.
The material of the fiber ferrule body 200 of the fiber ferrule described in the present disclosure is preferably a ceramic material.
In some embodiments of the present disclosure, a coating fixture for securing a fiber ferrule body can be fabricated that can both be adapted with a coater operating platform to prepare a dispersion film on an end face of the fiber ferrule body and secure the fiber ferrule body described above in this disclosure.
In the process of preparing the dispersion film 100 on the end face of the optical fiber ferrule body 200 based on the plasma sputtering method, the thickness of each layer of the dispersion film can be controlled by controlling the coating time, so that the thickness error of each film layer is less than 0.5 nm.
The thickness error and the nonuniformity in the plasma sputtering coating process can be corrected by controlling the distance between the target and the end face of the optical fiber ferrule body and the sputtering angle and combining with a mask.
Preferably, the dispersion cavity mirror with the all-fiber structure of the present disclosure includes: the fiber stub of any of the embodiments described above, and the passive fiber 300.
Referring to fig. 2, a passive optical fiber 300 is inserted into the fiber stub body 200 through the second end of the fiber stub body 200.
Fig. 3 illustrates a laser resonator device according to an embodiment of the present disclosure, including:
a first ferrule 201, the first ferrule 201 having a first end (right end) and a second end (left end), the first end of the first ferrule 201 forming an end face (right end in fig. 3);
a second ferrule 202, the second ferrule 202 having a first end (left end) and a second end (right end), the first end of the second ferrule 202 interfacing with the first end of the first ferrule 201;
a third ferrule 203, the third ferrule 203 having a first end (right end) and a second end (left end), the first end of the third ferrule 203 forming an end face;
a dispersion film 100, the dispersion film 100 being provided on the above-mentioned end face of the first ferrule 201;
the two ends of the gain fiber 400 are respectively inserted into the second end of the second ferrule 202 and the second end of the third ferrule 203;
a semiconductor saturable absorber mirror 600, the semiconductor saturable absorber mirror 600 being provided on the above-mentioned end face of the third ferrule 203;
wherein the dispersive film 100 is the dispersive film 100 of any of the embodiments described above in this disclosure.
Preferably, the length of the gain fiber 400 of the laser resonator device of the present disclosure is less than or equal to 10cm, and the fiber core of the gain fiber 400 is doped with rare earth ions, so as to realize a short fiber length, i.e., meet the optical gain requirement of the mode locking threshold.
The gain fiber 400 may be a single mode fiber, a polarization maintaining single mode fiber, a multimode fiber, or a double clad fiber.
The rare earth ion described above may be Yb 3+ 、Er 3+ 、Tm 3+ 、Ho 3+ One or a co-doped form thereof.
In some embodiments of the present disclosure, when the length of the gain fiber is 3cm or less, the third ferrule 203 is eliminated, the second end of the second ferrule 202 forms an end face, and the semiconductor saturable absorber mirror 600 is disposed on the end face of the second ferrule 202.
The gain optical fiber of the present disclosure may be an optical fiber doped with one kind of rare earth ions or a co-doped type optical fiber doped with two or more kinds of rare earth ions. Those skilled in the art, with the benefit of the present disclosure, can select/adjust the type of gain fiber 400 and the doped rare earth ion species, all falling within the scope of the present disclosure.
Preferably, referring to fig. 3, the laser cavity apparatus of the present disclosure further includes a passive optical fiber 300, and the passive optical fiber 300 is inserted into the second end of the first ferrule 201.
In some embodiments of the present disclosure, the laser resonator device of the present disclosure, referring to fig. 3, further includes a ceramic sleeve 500, the ceramic sleeve 500 partially covers the first ferrule 201 and partially covers the second ferrule 202 to fix the butt joint of the first ferrule 201 and the second ferrule 202.
As can be seen from the above description, based on the dispersion film 100 of the present disclosure, a high repetition frequency femtosecond fiber laser resonator device can be constructed.
The laser generated by the laser resonator device of the present disclosure is output outside the cavity through a wavelength division multiplexer (not shown) to which the passive optical fiber 300 is fused.
Prism pair dechirping may be implemented outside the cavity to obtain ultra-narrow pulse output.
Referring to fig. 3, the cavity mirror constructed based on the dispersion film of the present disclosure may be fixed and connected by a peripheral sleeve (i.e., the ceramic sleeve 500 described above), compatible with an ultrafast fiber resonator, maintaining the full fiber structure of the laser resonator.
The laser resonant cavity device disclosed by the invention can realize the laser output of the following indexes based on the overall structure of full optical fiber at the wave band of 1 mu m: pulse repetition frequency is 1GHz, the shortest pulse width is 364fs, and the mode-locked spectral line width is 7.6 nm; pulse repetition frequency is 2.2GHz, the shortest pulse width is 283fs, and the mode-locked spectral line width is 8.25 nm; the repetition frequency is 3.3GHz, the shortest pulse width is 266fs, and the mode-locking spectral line width is 9.6 nm.
In addition, the laser resonant cavity device disclosed by the invention can realize the output of the repetition frequency laser pulse above 1GHz in the ultrashort resonant cavity with the centimeter magnitude, and the stability of laser output is greatly improved.
Through the structural design of the unique dispersion film described in the above of the present disclosure, certain optical characteristics are shown, and the dispersion film can be applied to a high repetition frequency femtosecond fiber laser resonant cavity. The dispersion film disclosed by the invention is applied to the end face of the optical fiber ferrule for the first time, and has the functions of group velocity delay dispersion and dichromatic light splitting.
Compared with a large-size glass substrate in the prior art, the dispersion film disclosed by the invention is applied to a laser resonant cavity, can maintain the integral all-fiber structure of the resonant cavity, improves the reliability and stability of femtosecond laser operation, and is particularly suitable for application fields such as laser surgery and the like with high requirements on stability.
The size of the laser resonant cavity device is in the centimeter magnitude, and the integration of the fiber laser is improved.
The present disclosure also provides a laser. In some embodiments of the present disclosure, the laser of the present disclosure includes a dispersive cavity mirror with a full-fiber structure according to any of the embodiments of the present disclosure (refer to fig. 2). In other embodiments of the present disclosure, a laser of the present disclosure includes a laser resonator device of any one of the embodiments of the present disclosure (refer to fig. 3).
The dispersion film, fiber stub, dispersion cavity mirror, laser resonator device and laser of the present disclosure are described below with reference to more specific examples.
Example one
Firstly, loading and fixing a passive optical fiber with the model number Hi1060 of the American Corning company in the nano zirconia ferrule, wherein the cross section of the end face of the ferrule is circular, the inner diameter is 125 mu m, and the outer diameter is 2.5mm, and further grinding and polishing the end face of the ferrule.
The end face of the ferrule is used as a substrate, and a first high-refractive-index film layer Ta is sequentially arranged from the substrate 2 O 5 A second low refractive index film layer SiO 2 And the third high-refractive-index film layer Ta 2 O 5 The fourth layer of low refractive index film layer SiO 2 And a fifth high refractive index film layer Ta 2 O 5 And the sixth low refractive index film layer SiO 2 A seventh high refractive index film layer Ta 2 O 5 And the eighth low refractive index film layer SiO 2 And the ninth high-refractive-index film layer Ta 2 O 5 The tenth film layer with low refractive index SiO 2 And the eleventh high-refractive-index film layer Ta 2 O 5 The twelfth low refractive index film layer SiO 2 And the thirteenth high refractive index film layer Ta 2 O 5 And a fourteenth low-refractive-index film layer SiO 2 And the fifteenth high-refractive-index film layer Ta 2 O 5 Sixteenth low refractive index film layer SiO 2 Seventeenth high refractive index film layer Ta 2 O 5 Eighteenth low refractive index film layer SiO 2 And a nineteenth high refractive index film layer Ta 2 O 5 The twentieth low refractive index film layer SiO 2 Twenty-first high refractive index film layer Ta 2 O 5 Twenty-second low refractive index film layer SiO 2 Twenty third layer high refractive indexFilm layer Ta 2 O 5 Twenty-fourth low refractive index film layer SiO 2 Twenty-fifth high refractive index film layer Ta 2 O 5 Twenty-sixth low refractive index film layer SiO 2 Twenty-seventh high refractive index film layer Ta 2 O 5 Twenty eighth low refractive index film layer SiO 2 Twenty-ninth high refractive index film layer Ta 2 O 5 Thirty-third low refractive index film layer SiO 2 And a thirty-one high-refractive-index film layer Ta 2 O 5 Thirty-second low-refractive-index film layer SiO 2 And thirty-third high-refractive-index film layer Ta 2 O 5 Thirty-fourth low refractive index film layer SiO 2 Thirty-fifth high refractive index film layer Ta 2 O 5 Thirty-sixth low refractive index film layer SiO 2 Thirty-seventh high refractive index film layer Ta 2 O 5 Thirty-eighth low-refractive-index film layer SiO 2 Thirty-ninth high refractive index film layer Ta 2 O 5 And the fourth and fourth low refractive index film layers of SiO 2 A forty-th high refractive index film layer Ta 2 O 5 And a forty-second low-refractive-index film layer SiO 2 And a forty-third high-refractive-index film layer Ta 2 O 5 And a forty-fourth low-refractive-index film layer SiO 2 And a forty-fifth high refractive index film layer Ta 2 O 5 The thickness of each layer is 132-141nm, 244-252nm, 141-152nm, 194-201nm, 136-155nm, 203-212nm, 145-173nm, 210-220nm, 138-148nm, 197-207nm, 130-140nm, 192-202nm, 129-136nm, 173-202nm, 134-144nm, 205-207nm, 140-163nm, 204-216nm, 132-144nm, 220-228nm, 169-179nm, 217-227nm, 141-158nm, 202-204nm, 127-138nm, 197-207nm, 139-142nm, 204-208nm, 135-145nm, 200-210nm, 135-145nm, 211-212nm, 153-153 nm, 167-137-144 nm, 188-201nm, 136-156nm, 202-212nm, 147-163nm, 223-229nm, 144-154nm, 196-206nm, 131-141nm, 275-285nm and 160-171 nm.
And manufacturing a coating clamp for fixing the ferrule, so that the coating clamp can be matched with an operation platform of a coating machine and can also be used for fixing the polished ferrule.
Completion of Ta by plasma sputtering 2 O 5 And SiO 2 Multilayer films were prepared in alternating arrangement. The thickness of the film is controlled by time, and the thickness error of each film layer of the multilayer film is less than 0.5 nm. Thickness errors and unevenness in the sputtering coating process are corrected by controlling the distance between the target and the end face of the optical fiber and the sputtering angle and combining a special mask.
The optical properties of the dispersive film of this example are: group delay dispersion at 1040nm of-761 fs 2 . The transmittance for 974nm pump light was 99%, and the reflectance for signal light 1040nm was 89.3%.
Referring to fig. 3, the dispersion film 100 is disposed on an end surface of the first ferrule 201, an outer diameter of the first ferrule 201 is 2.5mm, and the dispersion film 100 is butted with an end surface of the second ferrule 202 through the ceramic sleeve 500 to ensure low-loss transmission of light.
The embodiment uses a commercial Yb-doped quartz gain fiber 400, the first end of which is plugged with the second ferrule 202, the second end of the gain fiber 400 is plugged with the third ferrule 203, the end face of the third ferrule 203 is butted with the semiconductor saturable absorber mirror 600, and the embodiment uses epoxy resin to adhere the semiconductor saturable absorber mirror 600 to the end face of the third ferrule 203. The semiconductor saturable absorption mirror 600 of the present embodiment has a modulation depth of 5% and a saturation flux of 40 μ J/cm 2 The recovery time was 1 ps. The length of the gain fiber 400 in this embodiment is 9.8cm, and the end faces of all ferrules in this embodiment are mirror-polished.
The laser is further connected with a pumping source through a wavelength division multiplexer to construct a high repetition frequency femtosecond laser with wide spectrum and narrow pulse width, the resonant cavity of the embodiment is excited by a semiconductor laser pumping source with the wavelength of 974nm, pumping light is output through a single-mode fiber, and the highest pumping light power is 680 mW. And (3) welding the tail fiber of the pumping source with the tail fiber of the pumping end of the 980nm/1040nm optical fiber type wavelength division multiplexer by using an optical fiber welding machine, and welding the tail fiber of the common end of the wavelength division multiplexer with the tail fiber 300 of the dispersion cavity mirror of the resonant cavity. Under the pump excitation, the generated laser passes through the dispersion cavity mirror tail fiber 300 and is output out of the cavity through the signal end of the wavelength division multiplexer. Then, the transmission type diffraction grating is used for de-chirping outside the cavity, and the following technical effects can be obtained:
while the fundamental repetition frequency 1GHz pulse laser output is realized in the 1 μm band, the 3dB linewidth and the pulse width of the mode-locked spectrum are respectively 7.6nm and 364fs, the whole laser resonant cavity is of a full-fiber structure, and the autocorrelation tracks of the mode-locked spectrum and the pulse width are respectively shown in fig. 6 and 7. In addition, compared with the research reported in the prior art, the mode-locked pulse laser output by the resonant cavity of the present embodiment has two typical characteristics: 1) the flatness of the top of the spectrum is better; 2) the laser operation stability is higher.
It has been found that the full fiberizing structure of a femtosecond laser resonator can be maintained with the dispersive film of the present disclosure. And the constructed laser is light and small, and is easy for large-scale production and integration.
Example two
Using the above-described method for producing a dispersion film, an optical film having an optical characteristic of-348 fs at about 1033nm was produced 2 The transmissivity of the dispersion cavity mirror to the pump light with the wavelength of 974nm is 99 percent, and the reflectivity of the dispersion cavity mirror to the signal light with the wavelength of 1033nm is 89.6 percent.
Based on the dispersion cavity mirror of the embodiment, a femtosecond laser resonant cavity with higher repetition frequency can be constructed. With continued reference to fig. 3, the present embodiment uses a commercial Yb-doped silica gain fiber 400 with a first end plugged to the second ferrule 202, a second end of the gain fiber 400 plugged to the third ferrule 203, and an end face of the third ferrule 203 butted against the semiconductor saturable absorber mirror 600. the present embodiment employs epoxy to bond the semiconductor saturable absorber mirror 600 to the end face of the third ferrule 203. The semiconductor saturable absorber mirror 600 of the present embodiment has a modulation depth of 5% and a saturation flux of 40 μ J/cm 2 The recovery time was 1 ps. The length of the gain fiber 400 in this embodiment is 4.4cm, and the end faces of all ferrules in this embodiment are mirror-polished.
The laser is further connected with a pumping source through a wavelength division multiplexer to construct a high repetition frequency femtosecond laser with wide spectrum and narrow pulse width, the resonant cavity of the embodiment is excited by a semiconductor laser pumping source with the wavelength of 974nm, pumping light is output through a single-mode fiber, and the highest pumping light power is 680 mW. The pump source pigtail is fused with the pump end of the 980nm/1030nm fiber type wavelength division multiplexer by using an optical fiber fusion splicer, and the common end pigtail of the wavelength division multiplexer is fused with the dispersion cavity mirror pigtail 300 of the resonant cavity of the embodiment. Under the pump excitation, the generated laser passes through the dispersion cavity mirror tail fiber 300 and is output out of the cavity through the signal end of the wavelength division multiplexer. Then, the transmission type diffraction grating is used for de-chirping outside the cavity, and the following technical effects can be obtained:
while the fundamental repetition frequency 2.2GHz pulse laser output is realized in the 1 μm band, the 3dB linewidth and the pulse width of the mode-locked spectrum are respectively 8.3nm and 283fs, the whole laser resonant cavity is of a full-fiber structure, and the autocorrelation tracks of the mode-locked spectrum and the pulse width are respectively shown in fig. 8 and fig. 9. In addition, compared with the research reported in the prior art, the mode-locked pulse laser output by the resonant cavity of the present embodiment has two typical characteristics: 1) the flatness of the top of the spectrum is better; 2) the stability of laser operation is higher.
EXAMPLE III
Using the above-described method for producing a dispersion film, an optical film having an optical characteristic of-233 fs at around 1030nm was produced 2 The transmittance of the dispersion cavity mirror for 974nm pump light is 99%, and the reflectance of the dispersion cavity mirror for signal light 1030nm is 89.2%.
Referring to fig. 3, the dispersion film 100 is disposed on an end surface of the first ferrule 201, an outer diameter of the first ferrule 201 is 2.5mm, and the dispersion film 100 is butted with an end surface of the second ferrule 202 through the ceramic sleeve 500 to ensure low-loss transmission of light.
The embodiment uses a commercial Yb-doped quartz gain fiber 400, the first end of which is plugged with the second ferrule 202, the second end of the gain fiber 400 is plugged with the third ferrule 203, the end face of the third ferrule 203 is butted with the semiconductor saturable absorber mirror 600, and the embodiment uses epoxy resin to adhere the semiconductor saturable absorber mirror 600 to the end face of the third ferrule 203. The semiconductor saturable absorber mirror 600 of the present embodiment has a modulation depth of 5% and a saturation flux of 40 μ J/cm 2 Recovering and recoveringThe complex time is 1 ps. The length of the gain fiber 400 in this embodiment is 3.0cm, and the end faces of all ferrules in this embodiment are mirror-polished.
The laser is further connected with a pumping source through a wavelength division multiplexer to construct a high repetition frequency femtosecond laser with wide spectrum and narrow pulse width, the resonant cavity of the embodiment is excited by a semiconductor laser pumping source with the wavelength of 974nm, pumping light is output through a single-mode fiber, and the highest pumping light power is 680 mW. And (3) welding the tail fiber of the pumping source with the pumping end tail fiber of the 980nm/1030nm optical fiber type wavelength division multiplexer by using an optical fiber welding machine, and welding the common end tail fiber of the wavelength division multiplexer with the dispersion cavity mirror tail fiber 300 of the resonant cavity. Under the pump excitation, the generated laser passes through the dispersion cavity mirror tail fiber 300 and is output out of the cavity through the signal end of the wavelength division multiplexer. Then, the transmission type diffraction grating is used for de-chirping outside the cavity, and the following technical effects can be obtained:
the wide spectrum and narrow pulse output can be realized in the pulse laser with higher repetition frequency of 3.3GHz in the wave band of 1 μm, the maximum width of the 3dB line width of the spectrum is 9.6nm, the minimum width of the pulse is 266fs, and meanwhile, the whole laser realizes a full-fiber structure. Fig. 10 is a spectrum of the laser test of the present embodiment, the 3dB line width of the spectrum is 9.6nm, fig. 11 is an autocorrelation trace diagram, and the pulse width of the test is 266 fs. The pulse sequence of the oscilloscope test is shown in fig. 12, which shows that the laser of this example operates in the dc mode-locked state, and the fundamental repetition frequency of the pulses is 3.3 GHz.
Example four
In order to further improve the environmental stability of the laser and construct the laser resonator with a full polarization-maintaining structure, the dispersion film is disposed on the end face of the ferrule that carries and fixes the polarization-maintaining fiber. The american corning Hi1060 fiber in the above example was replaced with a Nufern PM980 fiber. The dispersion film was then prepared using the preparation method described above.
When the polarization-maintaining dispersion cavity mirror is used for constructing a laser resonant cavity, the tail fiber of a semiconductor laser pumping source with the wavelength of 974nm is replaced by a PM980 optical fiber, the wavelength division multiplexer is replaced by a double-shaft working polarization-maintaining type wavelength division multiplexer, and the tail fibers of the wavelength division multiplexer are all PM980 optical fibers. The gain fiber uses a polarization-maintaining single-mode fiber or a double-clad fiber. The remaining components and structure of the resonator remain unchanged from that shown in figure 3. By utilizing the resonant cavity structure of the embodiment, in addition to GHz repetition frequency ultrafast laser with wide spectrum and narrow pulse width, the whole system is of a polarization-maintaining type all-fiber structure, the anti-interference capability of the laser is improved, and the use of the laser under extreme conditions is expanded.
EXAMPLE five
In the above embodiments, Yb doping is mainly utilized 3+ The gain fiber is used as a gain medium, and the embodiment can further change the type of the gain fiber in the resonant cavity, such as Er doping 3+ 、Tm 3+ 、Ho 3+ Such optical fibers of rare earth ions in one or co-doped forms, with corresponding adjustments to the parameters and types of semiconductor saturable absorber mirrors, fall within the scope of the present disclosure.
In the description herein, reference to the description of the terms "one embodiment/mode," "some embodiments/modes," "example," "specific example" or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment/mode or example is included in at least one embodiment/mode or example of the present disclosure. In this specification, the schematic representations of the terms used above are not necessarily intended to be the same embodiment/mode or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments/modes or examples. Furthermore, the various embodiments/modes or examples and features of the various embodiments/modes or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present disclosure, "plurality" means at least two, e.g., two, three, etc., unless explicitly defined otherwise.
It will be understood by those skilled in the art that the foregoing embodiments are merely for clarity of illustration of the disclosure and are not intended to limit the scope of the disclosure. Other variations or modifications may occur to those skilled in the art, based on the foregoing disclosure, and are still within the scope of the present disclosure.
Claims (10)
1. A dispersive film, comprising:
a plurality of first film layers having a first refractive index; and
a plurality of second film layers having a second index of refraction;
the first film layers are alternately stacked with the second film layers to form the dispersive thin film;
wherein the first refractive index is greater than the second refractive index;
the total thickness of the dispersion film is in a micron order;
the total thickness of the first film layer is less than the total thickness of the second film layer.
2. The dispersive film according to claim 1, wherein the first film layer is preferably Ta 2 O 5 、Nb 2 O 5 、HfO 2 Preferably, the second film layer is SiO 2 。
3. The dispersive film according to claim 1 or 2, wherein the odd layers are first film layers, the even layers are second film layers, and both the bottom layer and the top layer of the dispersive film are first film layers.
4. The dispersive film according to claim 3, wherein the total thickness of the dispersive film is 7.803 μm to 8.292 μm, and the first film layer is Ta 2 O 5 The second film layer is SiO 2 ；
The total number of the first film layer and the second film layer is 45;
from the bottom layer to the top layer, the corresponding film thickness of each film is:
132-141nm、244-252nm、141-152nm、194-201nm、136-155nm、203-212nm、145-173nm、210-220nm、138-148nm、197-207nm、130-140nm、192-202nm、129-136nm、173-202nm、134-144nm、205-207nm、140-163nm、204-216nm、132-144nm、220-228nm、169-179nm、217-227nm、141-158nm、202-204nm、127-138nm、197-207nm、139-142nm、204-208nm、135-145nm、200-210nm、135-145nm、211-212nm、153-167nm、235-245nm、137-144nm、188-201nm、136-156nm、202-212nm、147-163nm、223-229nm、144-154nm、196-206nm、131-141nm、275-285nm、160-171nm。
5. the dispersive film according to claim 3, wherein the dispersive film is disposed on the end face of the optical fiber ferrule through the first film layer as a bottom layer;
preferably, the first film layer and the second film layer are both in a shape of a wafer, and the radial dimension of the first film layer is the same as that of the second film layer;
preferably, the plasma sputtering based method achieves an alternating stacking of a plurality of said first film layers and a plurality of said second film layers.
6. A fiber optic ferrule, comprising:
a fiber stub body having a first end forming an end face and a second end for insertion of an optical fiber; and
the dispersive film of any of claims 1 to 5, disposed on the end face of the fiber stub body;
preferably, the end face of the fiber stub body and the dispersion membrane have matching shapes;
preferably, the end face is an end face subjected to grinding and polishing treatment.
7. A dispersive cavity mirror with a full fiberoptic structure, comprising:
the fiber optic ferrule of claim 6; and
a passive optical fiber inserted into the fiber stub body through the second end of the fiber stub body.
8. A laser resonator device, comprising:
a first ferrule having a first end and a second end, the first end of the first ferrule forming an end face;
a second ferrule having a first end and a second end, the first end of the second ferrule abutting the first end of the first ferrule;
a third ferrule having a first end and a second end, the first end of the third ferrule forming an end face;
a dispersive membrane disposed on the end face of the first ferrule;
the two ends of the gain optical fiber are respectively inserted into the second end of the second ferrule and the second end of the third ferrule; and
a semiconductor saturable absorber mirror disposed on the end face of the third ferrule;
wherein the dispersive film is the dispersive film of any of claims 1 to 5;
preferably, the length of the gain fiber is less than or equal to 10cm, and rare earth ions are doped in the fiber core of the gain fiber so as to realize the short fiber length, namely, meet the optical gain requirement of the mode locking threshold;
preferably, when the length of the gain fiber is less than or equal to 3cm, the third ferrule is cancelled, the second end of the second ferrule forms an end face, and the semiconductor saturable absorber mirror is arranged on the end face of the second ferrule;
preferably, the gain fiber is a single mode fiber, a polarization maintaining single mode fiber, a multimode fiber or a double-clad fiber;
preferably, the gain optical fiber is an optical fiber doped with one rare earth ion or a co-doped optical fiber doped with more than two rare earth ions;
preferably, the rare earth ion is Yb 3+ 、Er 3+ 、Tm 3+ Or Ho 3+ Etc.;
preferably, the method further comprises the following steps:
a passive optical fiber inserted into the second end of the first ferrule;
preferably, the method further comprises the following steps:
the ceramic sleeve is partially sleeved on the first ferrule and partially sleeved on the second ferrule so as to fix the butt joint of the first ferrule and the second ferrule.
9. A laser comprising the dispersion cavity mirror having an all-fiber structure of claim 7.
10. A laser comprising the laser resonator device of claim 8.
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