CN115072369A - Transport module and film forming apparatus - Google Patents
Transport module and film forming apparatus Download PDFInfo
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- CN115072369A CN115072369A CN202210747160.7A CN202210747160A CN115072369A CN 115072369 A CN115072369 A CN 115072369A CN 202210747160 A CN202210747160 A CN 202210747160A CN 115072369 A CN115072369 A CN 115072369A
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- 230000009471 action Effects 0.000 description 3
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
Abstract
The application discloses a carrying assembly and a film forming device. The carrying assembly comprises a supporting member, a connecting member, a picking member and a pressure regulating member, wherein the supporting member is provided with a first side; the connecting piece is arranged on the first side and/or the substrate; the picking piece is provided with a picking end, the picking end is provided with a first stroke moving towards the first side, so that in the first stroke, the picking end drives the substrate to move to the two opposite ends connected with the first side together, and the picking piece is provided with a cavity penetrating through the picking end; the pressure regulating part regulates the air pressure inside and outside the cavity to form a pressure difference, so that the pressure difference drives the substrate to abut against the connecting part. This application realizes first connection and the secondary between base plate and the supporter and strengthens being connected, avoids base plate and supporter phase separation and causes the base plate crooked, product such as drop not good in handling, helps stabilizing the transport stability of base plate and supporter, and helps the complete machine structure to simplify.
Description
Technical Field
The application relates to the technical field of display panels, in particular to a film forming device and a carrying assembly, and relates to the technical field of film forming of display panels.
Background
The flat panel display industry is one of the support industries of the electronic information industry, and is of great importance to the development of technology and economy in one country and region by virtue of the huge economic effect and the industry gathering effect. At present, when an Organic Light-Emitting Diode (OLED) with a large size is deposited, a support, a substrate, and a mask are stacked and combined together, and then the OLED is moved to form a film. In this process, the substrate is generally transported by being stuck to the support by means of glue. However, since the substrate and the support member are easily bonded to each other, the substrate is easily bent or separated, and the product transfer stability is lowered.
Disclosure of Invention
The embodiment of the application provides a carrying assembly and a film forming device, and aims to solve the problem that a substrate is bent or badly falls off due to low connection strength between the substrate and a support.
The embodiment of the application provides a handling subassembly, includes:
a support having a first side;
a connector for being disposed at the first side and/or the substrate;
the picking piece is provided with a picking end, the picking end is provided with a first stroke moving towards the first side, so that in the first stroke, the picking end drives the substrate to move to be connected with the first side to two opposite ends of the connecting piece together, and the picking piece is provided with a cavity penetrating through the picking end; and the number of the first and second groups,
and the pressure regulating part is used for regulating the air pressure inside and outside the cavity to form a pressure difference so that the pressure difference drives the substrate to abut against the connecting piece.
According to an embodiment of the present application, the support further has a second side disposed opposite to the first side, and the support is provided with a through hole penetrating through the first side and the second side;
the picking piece penetrates through the through hole, and the picking end extends out of the through hole to the first side and can move towards the second side to perform the first stroke;
the pressure regulating part is used for regulating negative pressure formed in the cavity.
According to an embodiment of the application, the cavity comprises a first cavity section and a second cavity section which are sequentially communicated, and one side of the first cavity section, which is back to the second cavity section, penetrates through the picking end;
the ventilation sectional area of the first cavity section is arranged in an increasing mode or in a gradually increasing mode in the direction far away from the second cavity section.
According to an embodiment of the present application, when the picking member completes the first stroke, an avoidance gap is formed between the picking end and the substrate; alternatively, the first and second electrodes may be,
the picking piece comprises a first shell forming the first cavity section, and the first shell is elastically deformable.
According to an embodiment of the application, the ventilation cross-sectional area of the second cavity section is reduced or gradually reduced in a direction close to the first cavity section.
According to an embodiment of the application, the support defines a functional area at the first side for a panel portion corresponding to the substrate;
the through hole is arranged at the side of the functional area.
According to an embodiment of the application, when connecting between the substrate and the first side, an orthographic projection of the connecting piece on the first side is arranged adjacent to the through hole.
According to an embodiment of the application, the support extends in the direction of gravity from the first side to the second side.
According to an embodiment of the application, the connecting member is an adhesive member and/or the connecting member is arranged at the support member.
An embodiment of the present application further provides a film forming apparatus, including a carrying assembly, the carrying assembly includes:
a support having a first side;
a connector for being disposed at the first side and/or the substrate;
the picking piece is provided with a picking end, the picking end is provided with a first stroke moving towards the first side, so that in the first stroke, the picking end drives the substrate to move to be connected with the first side to two opposite ends of the connecting piece together, and the picking piece is provided with a cavity penetrating through the picking end; and the number of the first and second groups,
and the pressure regulating part is used for regulating the air pressure inside and outside the cavity to form pressure difference so that the pressure difference drives the substrate to press against the connecting piece.
The beneficial effects of the embodiment of the application are as follows: since at least one of the first side of the support member and the substrate is provided with the connecting member, when the substrate and the support member are brought close to each other by the first stroke of the pick-up end, the substrate and the support member are respectively connected to the opposite ends of the connecting member, which facilitates the initial connection between the substrate and the support member. The pressure regulating part forms pressure difference through the inside and outside atmospheric pressure of adjusting the cavity, and pressure difference drive base plate moves towards connecting piece and the first side of supporting part, forms the pressure of holding to connecting piece and supporting part in proper order, helps realizing the secondary between base plate and the supporting part and strengthens being connected, avoids base plate and supporting part phase separation in handling and causes the base plate product such as crooked, drop bad, just help stabilizing the transport stability of base plate and supporting part. In addition, because the cavity sets up on picking up the piece, accomplish first connection and the secondary between base plate and the supporter in the connection process of strengthening earlier and later, pick up the piece and act on the same position of base plate all the time, need not the translation or increase the power point to the base plate to help reducing connection process and handling and cause the damage to the base plate, and help the complete machine structure to simplify.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
FIG. 1 is a schematic front view of a carrier assembly provided in accordance with an embodiment of the present application on a first side of a support;
FIG. 2 is a schematic front view of the support of FIG. 1 on a first side;
FIG. 3 is a schematic longitudinal cross-sectional view of the handling assembly of FIG. 1, wherein the picking member has made a first stroke;
FIG. 4 is a schematic longitudinal cross-sectional view of the handling assembly of FIG. 1, wherein the picking member has completed a first stroke;
FIG. 5 is a schematic longitudinal cross-sectional view of the transfer assembly of FIG. 1, wherein the pick-up assembly vacuum chucks the substrate;
fig. 6 is a partial longitudinal cross-sectional view of one embodiment of the picking member of fig. 3.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings, which are included to illustrate specific embodiments that can be implemented by the application. Directional phrases referred to in this application, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], etc., refer only to the directions of the attached drawings. Accordingly, the directional terminology is used for purposes of illustration and understanding, and is in no way limiting. In the drawings, elements having similar structures are denoted by the same reference numerals.
The present application is further described with reference to the following drawings and detailed description.
Referring to fig. 1 to 3, a transfer assembly according to an embodiment of the present disclosure is applied to a film forming apparatus. The handling assembly comprises a support member 200, a connecting member 300, a picking member 400 and a pressure regulating member (not shown). The transfer unit is used for transferring the substrate 100 to form a film.
The embodiment is not limited to the specific representation of the substrate 100. The substrate 100 may be used to form a display panel, and in this case, the substrate 100 includes a display region and a non-display region corresponding to the display panel. Alternatively, the substrate 100 may be used to cut a plurality of display panels, in which case the substrate 100 includes a panel portion 110 and a non-panel portion. The plurality of panel portions 110 are spaced apart from each other on the substrate 100, and the plurality of panel portions 110 may be identical in size and shape or may be at least partially different in shape.
The support member 200 may be provided in any suitable shape, size and material depending on the application requirements. For example, the support member 200 may be shaped as a plate, a block, a box device, or the like. It is understood that the supporting member 200 of the present embodiment is used for supporting to stretch the substrate 100, and especially when the plate surface of the substrate 100 is large in size, the supporting member 200 can ensure that the substrate 100 is uniformly stressed as much as possible during the transportation process, so as to avoid the bending deformation caused by local stress concentration.
When supporting the substrate 100, the support 200 has a support surface directly or indirectly connected to the substrate 100, and the substrate 100 has a connection region directly or indirectly connected to the support surface, which is adapted to the shape and size of the connection region. The connection region may correspond to the non-panel region of the substrate 100 as described above, or may correspond to the non-display region of each panel region 110.
The support 200 has a first side 201 and a second side 202 disposed opposite one another. On the support 200, the side forming the support surface is the first side 201 and the side opposite to the support surface is the second side 202. The absolute orientation relationship between the first side 201 and the second side 202 in practical application is not limited in the present application. For example, when the entire carrying device is extended and arranged along a three-dimensional space direction composed of a front-back direction, a left-right direction, and a gravity direction, the first side 201 may be disposed in any direction of a vertically upward direction of the left, right, front, back, and gravity direction, or a vertically downward direction of the gravity direction. However, for the sake of easy understanding, in the following embodiments, the first side 201 faces in the vertical upward direction, and the second side 202 faces in the vertical downward direction.
The connection 300 is arranged at the first side 201 and/or the substrate 100. In view of the above, when it is defined that the support member 200 has a support surface at the first side 201 and the substrate 100 has a connection region, the connection member 300 may be disposed on the support surface, on the connection region, or on both the support surface and the connection region.
In the present application, the specific representation of the connecting member 300 is not limited, and may be any connecting structure that can achieve different connecting strengths when subjected to different forces. In an embodiment, the connecting element 300 may also be configured as a suction element or a snap element. Wherein, the adsorption piece is a structure such as a sucker; the buckling piece comprises a buckling part and a buckling hole part, one of the buckling part and the buckling hole part is arranged on the supporting surface, the other one of the buckling part and the buckling hole part is arranged on the connecting area, and at least two buckling depths are formed between the buckling part and the buckling hole part so as to realize buckling fixation in different degrees.
Alternatively, in one embodiment, the connector 300 may be provided as an adhesive. It is understood that the adhesive means refers to a component having adhesive property, and may be any suitable material, size, shape and state. In the present application, the bonding member may be a separate adhesive, or may be an adhesive that is separately disposed on the supporting surface and the connecting area and is used in cooperation with each other; the adhesive member may be a disposable adhesive or a reusable adhesive within a set life span.
Because the adhesive has the characteristics of simple structure, easy disassembly, assembly, replacement and other operations, and generally has flexibility or elastic performance, the adhesive can flexibly abut against the substrate 100 while connecting the substrate 100 and the support member 200, thereby being beneficial to reducing stress concentration on the substrate 100, and when having the elastic performance, the adhesive can play a certain role in damping and buffering in the conveying process of the substrate 100. Therefore, in the following embodiments, the connector 300 is described as an example of an adhesive.
Next, the picking member 400 is provided with a picking end 401, and the picking end 401 has a first stroke moving towards the first side 201, so that in the first stroke, the picking end 401 drives the substrate 100 to move to be connected to two opposite ends of the connecting member 300 together with the first side 201.
The pick-up end 401 is an end of the pick-up member 400 for picking up the substrate 100, and for convenience of description, the pick-up member 400 may further include a mounting end disposed opposite to the pick-up end 401. The picking member 400 may be configured such that only the picking end 401 is movable relative to the supporting member 200, for example, the mounting end is fixed relative to the supporting member 200, and a portion between the picking end 401 and the mounting end is elastically stretchable or flexibly deformable. Of course, the picking member 400 may be arranged so that it is movable as a whole relative to the support member 200, the picking member 400 being able to perform the first stroke as a whole.
The manner in which the pick-up end 401 picks up the substrate 100 is not limited. Referring to fig. 3, in the embodiment provided by the present application, when the initial position of the substrate 100 is vertically above the picking end 401, the picking end 401 upwardly receives the substrate 100, and even if no other picking-related force is provided, the substrate 100 can be stably supported on the picking end 401 due to its own weight and picked by the picking member 400 onto the first side 201 of the supporting member 200. In other embodiments, when the initial position of the substrate 100 is located at an orientation other than vertically above the pick-up end 401, in order to avoid the substrate 100 falling off due to gravity, the pick-up end 401 may pick up the substrate 100 to the first side 201 of the support 200 by magnetic or vacuum absorption, grabbing, pushing, pulling, etc., for the first stroke.
Then, no matter the connecting member 300 is disposed on the supporting member 200, the pick-up end 401 drives the substrate 100 to move to the substrate 100 to support and connect to the connecting member 300; still, the connecting member 300 is disposed on the substrate 100, and the picking end 401 drives the substrate 100 and the connecting member 300 to move synchronously to the position where the connecting member 300 supports and connects to the supporting member 200, as shown in fig. 4, when the picking end 401 completes the first stroke, the substrate 100 and the supporting member 200 are connected to opposite sides of the connecting member 300. At this time, the primary connection is performed between the substrate 100 and the connector 300, and between the connector 300 and the support member 200. The first connection may be an abutment having no interaction force or a connection having a certain interaction force and achieving a certain connection strength.
The picking member 400 is provided with a cavity 410 extending through the picking end 401 to form an opening 402 at the picking end 401. The cavity 410 may be a channel through either side surface of the picking member 400, such as a channel through the picking end 401 and the mounting end described above, or a channel through the picking end 401 and either side wall of the picking member 400. Alternatively, the cavity 410 may form an internal cavity within the picking member 400 that communicates with the external environment only through the opening 402.
The pressure adjusting member is used for adjusting the internal and external air pressure of the cavity 410 to form a pressure difference, so that the pressure difference drives the substrate 100 to press against the connecting member 300. The pressure regulating member may regulate the air pressure inside the cavity 410, and may also regulate the air pressure in any area outside the cavity 410. Since the picking member 400 can pick up different parts of the substrate 100, positive pressure or negative pressure can be formed in the cavity 410 during the pressure adjustment process of the pressure adjustment member. Wherein the positive pressure, i.e., the air pressure inside the cavity 410, is greater than the air pressure outside the cavity 410; the negative pressure is that the air pressure inside the cavity 410 is smaller than the air pressure outside the cavity 410.
Referring to fig. 4 to 5, in an embodiment provided by the present application, when the pick-up end 401 is located on a side of the substrate 100 facing the support 200 after the first stroke is completed, the pressure regulating member may regulate a negative pressure formed inside the cavity 410, so as to apply an adsorption force to the substrate 100 in a direction facing the support 200, where the adsorption force pulls the substrate 100 to approach in a direction facing the connection 300 and the support 200, so that the substrate 100 may sequentially apply an abutting force to the connection 300 and the support 200, where the abutting force realizes secondary reinforced connection between the substrate 100 and the connection 300 and between the connection 300 and the support 200.
Or, in other embodiments, when the picking end 401 is located on the side of the substrate 100 opposite to the supporting member 200 after the first stroke is completed, the pressure regulating member may regulate the positive pressure inside the cavity 410, so as to apply a pushing force to the substrate 100 in the direction of the supporting member 200, where the pushing force pushes the substrate 100 to approach in the direction of the connecting member 300 and the supporting member 200, so that the substrate 100 may sequentially apply an abutting force to the connecting member 300 and the supporting member 200, where the abutting force realizes secondary reinforced connection between the substrate 100 and the connecting member 300 and between the connecting member 300 and the supporting member 200.
In addition, the pressure adjusting member can adjust the air pressure inside and outside the cavity 410 in different manners, and the structure of the picking member 400 can be adjusted correspondingly according to the needs. In an embodiment, when a negative pressure needs to be formed in the cavity 410, the pressure regulating member may be an air extracting device, and the air extracting device is used for extracting the air in the cavity 410 to the outside of the cavity 410, so as to achieve the purpose of negative pressure; correspondingly, when positive pressure needs to be formed in the cavity 410, the pressure regulating member may be an air blowing device, and the air blowing device is used for blowing air outside the cavity 410 into the cavity 410, so as to achieve the purpose of positive pressure.
In another embodiment, the portion of the housing structure forming the cavity 410 in which the picking member 400 is disposed is deformable such that the volume of the cavity 410 can increase when pulled. Based on this, when negative pressure needs to be formed in the cavity 410, the pressure regulating member may be a pulling mechanism for pulling the shell structure of the picking member 400, so as to expand the volume in the cavity 410, thereby driving the gas at the picking end 401 to flow into the cavity 410, and achieving the purpose of negative pressure. Conversely, the portion of the housing structure that forms the cavity 410 in which the picking member 400 is disposed is deformable such that the volume of the cavity 410 may be reduced when squeezed. Based on this, when positive pressure needs to be formed in the cavity 410, the pressure adjusting component may be a pressing mechanism for pressing the shell structure of the picking member 400, and the pressing mechanism is used to reduce the volume in the cavity 410, so as to drive the air at the picking end 401 to flow out of the cavity 410, thereby achieving the purpose of positive pressure. Are not described in detail.
Based on the above, the embodiment of the application has the following beneficial effects: since at least one of the first side 201 of the support member 200 and the substrate 100 is provided with the connection member 300, when the pick-up end 401 makes a first stroke to bring the substrate 100 and the support member 200 close to each other, the substrate 100 and the support member 200 are respectively connected to opposite ends of the connection member 300, which facilitates the initial connection between the substrate 100 and the support member 200. The pressure adjusting member forms a pressure difference by adjusting the internal and external air pressures of the cavity 410, and the pressure difference drives the substrate 100 to move towards the first side 201 of the connecting member 300 and the supporting member 200, so as to sequentially form a pressure resisting force on the connecting member 300 and the supporting member 200, thereby facilitating the realization of secondary reinforced connection between the substrate 100 and the supporting member 200, avoiding the poor product such as bending and falling of the substrate 100 caused by the separation of the substrate 100 and the supporting member 200 in the transportation process, and facilitating the stabilization of the transportation stability of the substrate 100 and the supporting member 200. In addition, since the cavity 410 is provided on the picking member 400, in the process of previously completing the primary connection and the secondary reinforcing connection between the substrate 100 and the supporting member 200, the picking member 400 always acts on the same portion of the substrate 100 without translating or increasing the point of action of force on the substrate 100, thereby contributing to reduction of damage to the substrate 100 caused by the connection process and the carrying process and to simplification of the entire structure.
In the above, the picking member 400 can pick up the substrate 100 from any orientation of the support member 200. Specifically, in one embodiment, the support 200 is provided with a through hole 210 passing through the first side 201 and the second side 202; the picking member 400 is inserted into the through hole 210, wherein the mounting end of the picking member 400 can be located in the through hole 210 or extend out of the through hole 210 to the second side 202, and the picking end 401 extends out of the through hole 210 to the first side 201 and can move toward the second side 202 to perform the first stroke; the pressure regulating member is used for regulating the negative pressure formed in the cavity 410.
It will be appreciated that, in order to enhance the smooth picking of the substrate 100, the picking member 400 or the picking end 401 of the picking member 400 may be provided in plurality to be able to act at various locations on the substrate 100. In this case, the picking ends 401 of the plurality of picking members 400 may be independently movable or may be movable in conjunction with each other. When the picking ends 401 of the picking members 400 are linked, the carrying assembly may further include a linkage member, such as a connecting rod, connected to the picking ends 401 of the picking members 400. Furthermore, the movement of a single picking end 401 or a plurality of picking ends 401 may be achieved by manual operation or by driving by a driving mechanism. Therefore, the embodiment of the present application, by disposing the picking end 401 to protrude to the first side 201 through the through hole 210, can make the part of the picking member 400: for example, the mounting end and the portion near the mounting end of the pick-up 400, and the linkage and the driving mechanism are disposed in the support member 200 or the second side 202, so as to avoid interference of the first stroke action on the pick-up end 401 due to excessive members disposed on the first side 201 of the support member 200, and to facilitate the subsequent film-forming operation on the substrate 100.
In addition, referring to fig. 6, in an embodiment, the picking member 400 includes a housing structure enclosing to form the cavity 410, the housing structure includes a first housing 421 and a second housing 422 connected in sequence, wherein an end of the first housing 421 deviating from or facing away from the second housing 422 forms the picking end 401, and the opening 402 is disposed on the first housing 421. The cavity 410 includes a first cavity section 411 and a second cavity section 412 which are sequentially communicated, and correspondingly, the first shell 421 forms the first cavity section 411, and the second shell 422 forms the second cavity section 412.
Further, in an embodiment, the ventilation cross-sectional area of the first chamber section 411 is increased or gradually increased in a direction away from the second chamber section 412. It will be appreciated that the enlarged or gradually enlarged arrangement provides a larger cross-sectional area of the air passage at the chamber section near the opening 402 via the first chamber section 411, so that the air flow passing therethrough has a slow flow rate but a high pressure, which helps to enhance the negative pressure suction effect of the pickup end 401 on the substrate 100. Wherein the enlarged arrangement forms an inclined guide surface to assist the flow of gas uniformly along the guide surface.
Further, in an embodiment, the ventilation cross-sectional area of the second chamber section 412 is decreased or gradually decreased in a direction approaching the first chamber section 411. It can be understood that the reduction or tapering is performed to make the cross-sectional area of the gas flowing through the second chamber section 412 near the first chamber section 411 smaller, so that the gas flowing from the first chamber section 411 into the second chamber section 412 has the characteristics of small pressure but fast flow speed, which helps the gas in the first chamber section 411 to rapidly flow into the second chamber section 412, and accelerates the pickup end 401 to form negative pressure adsorption on the substrate 100.
It should be noted that, when the picking member 400 completes the first stroke, if at least a part of the first casing 421 is elastically deformable, the picking end 401 may be kept in contact with the substrate 100. Thus, when a negative pressure is formed inside the pressure adjusting cavity 410, the first housing 421 can retract to the second side 202 for a certain distance through elastic deformation, so as to form an escape space for the substrate 100 to move and press against the connecting member 300.
Alternatively, referring to fig. 4, when the picking member 400 completes the first stroke, the picking member 400 may move toward the second side 202 to make a distance between the picking end 401 and the substrate 100, so as to form an avoidance gap a therebetween. Thus, when negative pressure is formed inside the pressure regulating member regulating cavity 410, the negative pressure airflow circulates at the avoiding gap a and acts on the substrate 100, thereby applying a negative pressure adsorption force to the substrate 100; meanwhile, the clearance a may be set to a sufficient distance for the substrate 100 to move and press against the connecting member 300. It can be understood that the size of the avoiding gap a needs to be set within a proper range, and the avoiding gap a can be specifically adjusted according to the conditions of the negative pressure intensity formed in the cavity 410, the quality of the substrate 100 and the like by the pressure regulating member, so that the avoiding gap a does not exceed the negative pressure adsorption range, and a sufficient space can be reserved for the substrate 100.
In addition, as shown in fig. 1 to 3, in an embodiment, a plurality of the connection members 300 may be distributed on the first side 201 and/or the substrate 100; a plurality of picking members 400 may be distributed on the support member 200; a plurality of through holes 210 may be distributed on the support member 200. It should be noted that the number and the positions of the plurality of connecting members 300, the plurality of picking members 400 and the plurality of through holes 210 may be arranged in a one-to-one correspondence manner, or at least partially arranged in a differentiation manner.
It will be appreciated that when the plurality of picking members 400 correspond to the number and location of the plurality of through holes 210, one for one, the picking members 400 are advantageously accurately positioned to facilitate quick installation of the plurality of picking members 400 in place; when the picking members 400 and the through holes 210 are at least partially arranged differently, for example, the number and positions of the through holes 210 are greater than those of the picking members 400, the through holes 210 are equivalent to preset holes which can be flexibly distributed, so that when the picking members 400 correspondingly pick substrates 100 with different sizes, the picking members 400 can be arranged in different numbers and different positions, and the through holes 210 on the support member 200 can be adapted, so that the picking members 400 with different numbers and different positions can find the corresponding through holes 210 on the support member 200 for one-to-one assembly.
In the embodiment provided by the present application, when the substrate 100 is connected to the first side 201, the orthogonal projection of the connecting member 300 on the first side 201 is disposed adjacent to the through hole 210. Since the position of the pick-up end 401 corresponds to the position of the through hole 210, when the pick-up end 401 performs negative pressure suction on the substrate 100, the suction force at the position corresponding to the pick-up end 401 is relatively large, and correspondingly, the abutting force exerted by the substrate 100 on the connecting member 300 is also relatively large; the suction force gradually decreases away from the corresponding portion of the pickup end 401. Therefore, by disposing the through hole 210 adjacent to the orthographic projection area of the connecting member 300 on the first side 201, the connecting member 300 can be brought relatively close to the picking member 400, thereby obtaining a large abutting force applied by the substrate 100.
Furthermore, in an embodiment, when described above, the support member 200 defines a functional area 220 for a panel portion 110 corresponding to the substrate 100 and/or defines a functional area 220 for a display area corresponding to the substrate 100 on the first side 201. The through hole 210 is disposed beside the functional region 220, so that the pickup end 401 acts on a non-panel portion and/or a non-display region of the substrate 100, thereby preventing damage to the display panel or a display region on the display panel. Of course, the orthographic projection of the connecting member 300 on the first side 201 can also be correspondingly arranged beside the functional region 220, which also helps to protect the structure of the display panel.
Based on the above embodiment, when the support 200 extends from the first side 201 to the second side 202 along the direction of gravity as described above, that is, the first side 201 faces vertically upward, and the second side 202 faces vertically downward, in combination with the structure scheme that the picking member 400 is inserted into the through hole 210: first, as shown in fig. 3, the picking member 400 holds the substrate 100 and drives the substrate 100 to move in a vertical downward direction, and the substrate 100 can be kept stable relative to the picking member 400 under the action of gravity; then, as shown in fig. 4, when the picking member 400 completes the first stroke, the substrate 100 is pressed against the connecting member 300 by gravity, so that the substrate 100, the connecting member 300 and the supporting member 200 complete the primary connection; next, as shown in fig. 5, the opening 402 at the pick-up end 401 applies a vertically downward suction force to the substrate 100, so as to drive the substrate 100 to continuously move vertically downward and press against the connecting member 300, so that the substrate 100, the connecting member 300, and the supporting member 200 are secondarily reinforced and connected to achieve the final purpose.
In addition, the embodiment of the application also provides a film forming device, and the film forming device comprises the conveying assembly. It should be noted that, the detailed structure of the conveying assembly in the film forming apparatus can refer to the above-mentioned embodiment of the conveying assembly, and is not described herein again; since the film deposition apparatus of the present application uses the above conveying assembly, embodiments of the film deposition apparatus of the present application include all technical solutions of all embodiments of the above conveying assembly, and the achieved technical effects are also completely the same, and are not described herein again.
Of course, the film forming apparatus may further include other necessary components for forming a film on the substrate 100, and reference is made to the prior art, which is not described herein again.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
The carrying assembly provided by the embodiment of the present application is described in detail above, and a specific example is applied to illustrate the principle and the implementation manner of the present application, and the description of the embodiment is only used to help understanding the technical solution and the core idea of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (10)
1. A carrier assembly, comprising:
a support having a first side;
a connector for being disposed at the first side and/or the substrate;
the picking piece is provided with a picking end, the picking end is provided with a first stroke moving towards the first side, so that in the first stroke, the picking end drives the substrate to move to be connected with the first side to two opposite ends of the connecting piece together, and the picking piece is provided with a cavity penetrating through the picking end; and the number of the first and second groups,
and the pressure regulating part is used for regulating the air pressure inside and outside the cavity to form a pressure difference so that the pressure difference drives the substrate to abut against the connecting piece.
2. The carrier assembly of claim 1 wherein said support member further has a second side disposed opposite said first side, said support member being provided with a through hole extending through said first side and said second side;
the picking piece penetrates through the through hole, and the picking end extends out of the through hole to the first side and can move towards the second side to perform the first stroke;
the pressure regulating part is used for regulating negative pressure formed in the cavity.
3. The carrier assembly of claim 2 wherein said cavity comprises a first cavity section and a second cavity section in serial communication, a side of said first cavity section opposite said second cavity section disposed through said pick end;
the ventilation sectional area of the first cavity section is arranged in an increasing mode or in a gradually increasing mode in the direction far away from the second cavity section.
4. The handling assembly of claim 3, wherein upon completion of the first stroke of the picking member, an escape gap is formed between the picking end and the substrate; alternatively, the first and second electrodes may be,
the picking piece comprises a first shell forming the first cavity section, and the first shell is elastically deformable.
5. A carrier assembly according to claim 3 wherein the cross-sectional ventilation area of the second chamber section decreases or tapers in a direction approaching the first chamber section.
6. The carrier assembly of claim 2 wherein said support defines a functional area on said first side for a panel portion corresponding to said substrate;
the through hole is arranged at the side of the functional area.
7. The carrier assembly of claim 2 wherein an orthographic projection of the connector on the first side is disposed adjacent the through hole when connected between the base plate and the first side.
8. A carrier assembly according to any of claims 2-7, wherein the support extends in the direction of gravity from the first side to the second side.
9. A carrier assembly according to claim 1, wherein the attachment member is an adhesive member and/or the attachment member is provided on the support member.
10. A film forming apparatus comprising the carrier module according to any one of claims 1 to 9.
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| CN202210747160.7A CN115072369A (en) | 2022-06-28 | 2022-06-28 | Transport module and film forming apparatus |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210747160.7A CN115072369A (en) | 2022-06-28 | 2022-06-28 | Transport module and film forming apparatus |
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| CN115072369A true CN115072369A (en) | 2022-09-20 |
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| CN202210747160.7A Pending CN115072369A (en) | 2022-06-28 | 2022-06-28 | Transport module and film forming apparatus |
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