CN209777664U - Electrostatic adsorption carrying manipulator - Google Patents
Electrostatic adsorption carrying manipulator Download PDFInfo
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- CN209777664U CN209777664U CN201920122632.3U CN201920122632U CN209777664U CN 209777664 U CN209777664 U CN 209777664U CN 201920122632 U CN201920122632 U CN 201920122632U CN 209777664 U CN209777664 U CN 209777664U
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Abstract
The utility model relates to an electrostatic adsorption carrying manipulator, in particular to an electrostatic adsorption carrying manipulator, which comprises a manipulator platform, an electrostatic adsorption film and an electrostatic generator; the electrostatic adsorption film is arranged on the manipulator platform and is of a multilayer sheet structure, and the electrostatic adsorption film comprises a PVC (polyvinyl chloride) plate and a flexible FPC (flexible printed circuit) layer fixedly arranged on the PVC plate; the copper foil electrode is arranged on the PI base film and is electrically connected with the electrostatic generator, so that the manipulator can realize high-efficiency and stable transportation of easily-damaged and easily-deformed non-conductive materials in a vacuum environment, the structure is simple, the manufacture is easy, and electrostatic adsorption films in various shapes can be installed on different manipulators. The device is applicable to both atmospheric environment and vacuum environment, can change the output voltage of the electrostatic generator according to the carried materials to adjust the adsorption force, and can be widely applied to various industries.
Description
Technical Field
The utility model relates to an electrostatic absorption equipment is an electrostatic absorption transport manipulator particularly.
Background
among the current manipulator transport technique, the haulage equipment adopts friction suction or vacuum suction, can't get to quick-wear, yielding material clamp, can not carry the high efficiency of quick-wear, yielding material through the manipulator under vacuum environment simultaneously. In the carrying technology for carrying easily damaged and easily deformed materials in vacuum, the adopted carrying equipment is used for manufacturing the complex and expensive electrostatic chuck and magnetic pole type adsorption disk, and cannot be widely applied to more industries.
Therefore, a sucker which can be used in a vacuum environment and can carry easily damaged and deformed with high efficiency is urgently needed in the carrying process, and the electrostatic adsorption carrying manipulator is provided according to the requirement.
SUMMERY OF THE UTILITY MODEL
For overcoming the deficiencies existing in the prior art, the utility model provides a manipulator which can be used in a vacuum environment and can also carry easily damaged and easily deformed objects with high efficiency.
The utility model relates to an electrostatic adsorption carrying manipulator, which comprises an electrostatic adsorption carrying manipulator, a manipulator platform, an electrostatic adsorption film and an electrostatic generator; the electrostatic adsorption film is electrically connected with the electrostatic generator and is arranged on the manipulator platform; the electrostatic adsorption film is of a multilayer sheet structure and comprises a PVC (polyvinyl chloride) plate and a flexible FPC (flexible printed circuit) layer fixedly arranged on the PVC plate; the flexible FPC layer is provided with a PI covering film, a PI base film and a copper foil electrode positioned between the PI covering film and the PI base film, and the copper foil electrode is arranged on the PI base film and is electrically connected with the electrostatic generator.
the technical scheme can be further optimized through the following technical measures:
As a further optimization, a plurality of mechanical fingers are arranged in the manipulator platform, and the distance between the mechanical fingers is equal.
As a further optimization, a plurality of electrostatic adsorption films are arranged on the mechanical finger, and the mechanical finger and the electrostatic adsorption films are fixedly connected through an adhesive.
Preferably, the electrostatic adsorption film has a copper foil electrode.
As a further optimization, the copper foil electrode comprises a positive electrode and a negative electrode, and the positive electrode and the negative electrode are arranged in a continuous 'mountain' shape with opposite directions and mutually staggered.
As a further optimization, the electrical gaps between the adjacent positive and negative electrode protrusions in the shape of the Chinese character 'shan' are the same.
Owing to adopted above technical scheme, the utility model discloses following technological effect has been produced:
The utility model discloses an electrostatic adsorption manipulator can let the manipulator realize under vacuum environment realizing the transport stable to the high efficiency that easily decreases, yielding non-conductive material, and the constitution is simple, and the preparation is easy, to the electrostatic adsorption membrane of the various shapes of different manipulator mountable. The device is applicable to both atmospheric environment and vacuum environment, can change the output voltage of the electrostatic generator according to the carried materials to adjust the adsorption force, and can be widely applied to various industries.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings which are needed to be used in the embodiments or the technical solutions in the prior art are briefly described as follows:
fig. 1 is a schematic structural view of a vacuum transfer robot according to a first embodiment.
Fig. 2 is a schematic structural diagram of an electrostatic adsorption film in the first embodiment.
3 fig. 3 3 3 is 3 a 3 schematic 3 view 3 of 3 the 3 structure 3 in 3 the 3 direction 3 " 3 a 3- 3 a 3" 3 in 3 fig. 3 2 3. 3
Description of reference numerals:
1. an electrostatic generator; 3. a manipulator platform; 4. an electrostatic adsorption film; 401, PI cover film; 402. a positive electrode; PVC board 403; PI-based membrane 404; 405. and a negative electrode.
Detailed Description
in order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Features in the embodiments described below may be combined with each other without conflict.
The first embodiment is as follows:
As shown in fig. 1 to 3, the electrostatic adsorption carrying manipulator of the present invention includes a manipulator platform 3, an electrostatic adsorption film 4 and an electrostatic generator 1; the electrostatic adsorption film 4 is electrically connected with the electrostatic generator 1, and the electrostatic adsorption film 4 is arranged on the manipulator platform 3; the electrostatic adsorption film 4 is of a multilayer sheet structure and comprises a PVC plate 403 and a flexible FPC layer sandwiched between the PVC plate 403 and the flexible FPC layer; the flexible FPC layer is provided with the PI film coating layer 401, a PI base film 404 and the copper foil electrode clamped between the PI film coating layer and the PI base film 404, and the copper foil electrode is arranged on the PI base film 404 and is electrically connected with the electrostatic generator 1;
Three mechanical fingers are arranged in the manipulator platform, and the three mechanical fingers are equal in distance; four electrostatic adsorption films are arranged on the mechanical finger and fixedly connected with the mechanical finger through an adhesive;
The electrostatic adsorption film is provided with a copper foil electrode, the copper foil electrode comprises a positive electrode 402 and a negative electrode 405, the positive electrode and the negative electrode are arranged in a continuous 'mountain' -shaped manner, the directions of the positive electrode and the negative electrode are opposite, the positive electrode and the negative electrode are mutually staggered, and the electric gaps between the adjacent 'mountain' -shaped bulges of the positive electrode and the negative electrode are the same;
The electrostatic generator can be adjusted according to the required adsorption force of the electrostatic adsorption film.
as shown in fig. 1, a lead connected to the electrostatic generator 1 enters the manipulator platform 3 and is connected to the electrostatic adsorption film 4, so that the electrostatic adsorption film 4 on the manipulator platform 3 is in a parallel connection state, and all the electrostatic adsorption films 4 are in an energized state after the electrostatic generator 1 is turned on.
as shown in fig. 2 or 3, after the electrostatic generator is turned on, the copper foil electrode disposed in the electrostatic adsorption film generates a large amount of polarized charges at the front end of the PI cover film 401, thereby adsorbing the non-conductor material.
in addition, it should be noted that the PVC plate may be fixed to the robot platform 3 by using an insulating or non-insulating adhesive according to actual conditions, and the static electricity generated in the electrostatic adsorption film 4 after the electrostatic generator 1 is turned on may not affect the operation of the robot platform through the PVC plate.
It should be further noted that, through the PVC plate 403, the PI base film 404, the positive electrode 402, the negative electrode 403, and the PI cover film 401, this composition is the key to the whole device to be able to carry and adsorb fragile and easily deformable materials under a vacuum environment.
Note that the total thickness of the electrostatic adsorption film 4 is about one millimeter.
The utility model discloses an operating principle be with the wire that electrostatic generator 1 is connected electrostatic adsorption membrane 4, when the manipulator snatchs the non-conductor material, give a signal transmission and give electrostatic generator 1, this moment electrostatic generator 1 supplies with 4 direct current high voltage of electrostatic adsorption membrane, under direct current high voltage effect in the electrostatic adsorption membrane 4 produce the electric field between positive electrode 402 and the negative electrode 405 will PI covers the membrane 401 polarization, PI covers and produces a large amount of polarization charges on the membrane 401, and the surface non-pressure contact of fragile article, yielding material PI covers the membrane 401 and produces even electrostatic adsorption between producing induction charge and the cloth copper foil bipolar electrode, can not make the material produce scars and wrinkles, and the adsorption affinity can stably realize high efficiency transport. The strength of the adsorption force can be changed by adjusting the output voltage of the electrostatic generator 1. When the manipulator grabs the conductor material, the lorentz force is used for realizing the gripping.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.
Although more 1. electrostatic generators are used herein; 3. a manipulator platform; 4. an electrostatic adsorption film; 401, PI cover film; a positive electrode 402; PVC board 403; PI-based membrane 404; 405. and a negative electrode. Etc., but does not exclude the possibility of using other terms. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed in a manner that is inconsistent with the spirit of the invention.
Claims (6)
1. An electrostatic adsorption carrying manipulator comprises a manipulator platform, an electrostatic adsorption film and an electrostatic generator; the electrostatic adsorption film is electrically connected with the electrostatic generator and is arranged on the manipulator platform; the method is characterized in that:
The electrostatic adsorption film is of a multilayer sheet structure and comprises a PVC (polyvinyl chloride) plate and a flexible FPC (flexible printed circuit) layer fixedly arranged on the PVC plate;
the flexible FPC layer is provided with a PI covering film, a PI base film and a copper foil electrode positioned between the PI covering film and the PI base film, and the copper foil electrode is arranged on the PI base film and is electrically connected with the electrostatic generator.
2. The electrostatic adsorption handling robot of claim 1, wherein the robot platform comprises a plurality of fingers spaced at equal intervals.
3. The electrostatic adsorption handling robot of claim 2, wherein the robot finger is provided with a plurality of electrostatic adsorption films, and the electrostatic adsorption films are fixedly connected with each other by an adhesive.
4. The electrostatic chuck handling robot of claim 1, 2 or 3, wherein the electrostatic chuck film has a copper foil electrode.
5. The electrostatic adsorption handling manipulator of claim 4, wherein the copper foil electrode comprises a positive electrode and a negative electrode, and the positive electrode and the negative electrode are arranged in a continuous zigzag manner with opposite directions and staggered with each other.
6. The electrostatic adsorption handling manipulator of claim 5, wherein the electrical gaps between adjacent positive and negative electrode protrusions are the same.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920122632.3U CN209777664U (en) | 2019-01-24 | 2019-01-24 | Electrostatic adsorption carrying manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920122632.3U CN209777664U (en) | 2019-01-24 | 2019-01-24 | Electrostatic adsorption carrying manipulator |
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| Publication Number | Publication Date |
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| CN209777664U true CN209777664U (en) | 2019-12-13 |
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| CN201920122632.3U Active CN209777664U (en) | 2019-01-24 | 2019-01-24 | Electrostatic adsorption carrying manipulator |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112960371A (en) * | 2021-04-06 | 2021-06-15 | Tcl华星光电技术有限公司 | Vacuum conveying device and conveying method |
| CN114407065A (en) * | 2021-06-11 | 2022-04-29 | 西藏自治区布达拉宫管理处 | Suction device and suction method |
| CN115072369A (en) * | 2022-06-28 | 2022-09-20 | 深圳市华星光电半导体显示技术有限公司 | Transport module and film forming apparatus |
-
2019
- 2019-01-24 CN CN201920122632.3U patent/CN209777664U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112960371A (en) * | 2021-04-06 | 2021-06-15 | Tcl华星光电技术有限公司 | Vacuum conveying device and conveying method |
| CN112960371B (en) * | 2021-04-06 | 2023-02-28 | Tcl华星光电技术有限公司 | Vacuum conveying device and conveying method |
| CN114407065A (en) * | 2021-06-11 | 2022-04-29 | 西藏自治区布达拉宫管理处 | Suction device and suction method |
| CN115072369A (en) * | 2022-06-28 | 2022-09-20 | 深圳市华星光电半导体显示技术有限公司 | Transport module and film forming apparatus |
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