CN115052407A - Composite field modulation microwave cold plasma jet device - Google Patents
Composite field modulation microwave cold plasma jet device Download PDFInfo
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- CN115052407A CN115052407A CN202210842221.8A CN202210842221A CN115052407A CN 115052407 A CN115052407 A CN 115052407A CN 202210842221 A CN202210842221 A CN 202210842221A CN 115052407 A CN115052407 A CN 115052407A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid
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Abstract
The invention provides a composite field modulation microwave cold plasma jet device, which comprises a cavity part, a microwave coupling part, a tuning part and an electric field modulation part, wherein the cavity part is provided with a cavity body; the cavity part is a coaxial resonant cavity structure with one open end, and the microwave transmission mode is a TEM mode; the microwave coupling part can couple microwave energy to the cavity part in a conductive coupling, capacitive coupling, magnetic field coupling and other modes; the electric field modulation is achieved in part by internal electrodes that apply nanosecond pulses (or DC voltages). The invention provides a cold plasma jet modulated by a composite field based on the characteristics of small ozone generation amount, higher plasma concentration, richer excited particles and easier formation of long direct cold plasma by nanosecond pulse (or DC), namely, an auxiliary electric field is applied to the microwave cold plasma, charged particles are pulled to move in an accelerated manner by the aid of the auxiliary electric field, and the length of the jet is prolonged.
Description
Technical Field
The invention belongs to the fields of material treatment, material detection, plasma biomedicine, clinical medicine and the like, and particularly relates to a composite field modulation microwave cold plasma jet device which can obtain stable normal-pressure long-straight microwave plasma jet.
Background
The plasma is composed of electrons, ions, neutral particles, etc., and is called cold plasma when the heavy particle temperature is much lower than the electron temperature. At present, the atmospheric pressure cold plasma is widely applied to the fields of waste gas treatment, auxiliary combustion, surface modification, medical sterilization, clinical medicine and the like. The atmospheric pressure cold plasma jet is generated in an open space, the separation of a discharge area and a working area is realized while active substances and charged particles are conveyed, and the safety is higher, so that the atmospheric pressure cold plasma jet has a better application prospect in the fields of biology, clinical medicine and the like. In practical applications, the jet length is the key parameter of primary consideration, which greatly influences and restricts the application of the atmospheric cold plasma jet. Meanwhile, the plasma composition is also a key factor to be considered, which limits the application scenarios of the plasma jet.
The cold plasma can be generated by driving a corresponding device through high pressure, microwave, radio frequency and the like, and the driving mode and the device structure have important influence on the jet length and the components. The microwave cold plasma jet has the advantages of high electron density, high ionization degree, strong controllability, low ozone generation amount and the like, and can be efficiently applied to various scenes such as germ inactivation, wound treatment, human body operation and the like.
The cold plasma jet is generated in an open space, the length of the jet is short due to the influx of air, and in order to solve the problem, the length of the jet is prolonged by three ways at present.
One is that large-flow inert gas (helium, argon, neon, etc.) is used as working gas, so that the jet flow nozzle is in an inert gas environment with relatively low breakdown field intensity threshold value, which is favorable for plasma formation, and meanwhile, high-flow gas can pull the plasma to be sprayed outwards;
the plasma jet length is obviously increased under extremely high and fast energy input through high-voltage nanosecond pulse driving;
the plasma jet shape is regulated and controlled by a combined coaxial double-line structure in a mode of matching a double resonant cavity with double airflow constraints. (corresponding to patent No. CN 201910658894.6).
1) When the inert gas is used as the working gas, a large gas cylinder is required to be arranged, the carrying is inconvenient, the plasma jet is not suitable for working environments such as outdoor and ground material taking, and the plasma jet is not suitable for being applied to special environments (such as lung treatment);
2) in common working gas, air has wider application prospect due to the advantages of no need of a gas cylinder, portability, easy operation and the like, but also has the problems that the breakdown field intensity threshold is far greater than that of inert gas, a large amount of ozone is generated when discharge is excited by using high-voltage driving dielectric barrier discharge and other modes, and the like, and is not beneficial to the health of a treated object when applied to clinical medicine;
3) when the plasma jet is drawn by the airflow to be sprayed out, medical objects such as treated pathogens and the like can be separated from the positions under the disturbance of the airflow, and the potential problem of biochemical pollution is caused;
4) when the microwave cold plasma jet is generated in a combined type coaxial double-line and double-airflow mode, the open end of the microwave cold plasma jet is of a straight pipe structure, the electric field intensity is not further enhanced, the excitation field intensity of the air microwave cold plasma is difficult to achieve, and the application of the microwave cold plasma jet in the case that air is working gas is restricted.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a composite field modulation microwave cold plasma jet device, which uses a microwave source to drive a double-resonant cavity structure to generate normal-pressure cold plasma jet, introduces an auxiliary electric field formed by high voltage on the basis of the normal-pressure cold plasma jet, and pulls charged particles with extremely high density in microwave plasma to move outwards from a nozzle so as to prolong the jet length.
The invention can be realized by the following technical scheme:
a composite field modulation microwave cold plasma jet device comprises a cavity part, a microwave coupling part, a tuning part and an electric field modulation part;
the cavity part is an outer tube with one open end, a middle tube with two open ends and an inner electrode coaxial resonant cavity structure, the outer tube is provided with a microwave feed-in port, a tangential flow shielding gas inlet and a gas inlet, and the outer tube is grounded;
the microwave coupling portion includes a coupling loop to couple microwave energy to the cavity portion;
the tuning part is a structure that the tuning end adjusts the length of the resonant cavity so as to adjust the field intensity of the opening end, and the upper end of the tuning end is a reflecting end surface; the depth of the cavity part adjusted by the tuning end is M lambda/4, wherein lambda is the wavelength under the microwave frequency, and M is a positive odd number;
the electric field modulation part is connected with the inner electrode through nanosecond pulse/DC voltage.
Furthermore, the outer tube, the middle tube and the inner electrode are all made of metal materials, a coaxial resonant cavity with one open end is formed by the outer tube, the middle tube and the reflecting end, the middle tube and the inner electrode are of a coaxial line structure, microwaves are transmitted in a TEM mode, a TEM standing wave field is formed inside the middle tube and the inner electrode, and a traveling wave field is formed inside the middle tube and the inner electrode.
Further, the axial length of the outer tube is N lambda/4, wherein lambda is the wavelength at the microwave frequency, and N is a positive odd number.
Furthermore, the upper ports of the outer tube and the middle tube are gradually changed in closing-up structure, the closing-up of the outer tube is 0-60 degrees, and the closing-up of the middle tube is 0-30 degrees.
Furthermore, a porous coaxial gasket made of insulating materials is arranged between the middle pipe and the inner electrode.
Furthermore, the upper end opening of the middle pipe is not higher than the outer pipe, and the upper end of the inner electrode is not lower than the middle pipe.
Further, the outer tube and the middle tube introduce gas through a shielding gas inlet or a gas inlet.
Further, the shielding gas is introduced at the shielding gas inlet in a tangential flow manner; the gas flow rates of the shielding gas inlet and the gas inlet are controlled to be 0-20L/min.
Furthermore, the distance between the coupling ring and the upper port of the outer pipe is adjustable; the microwave plasma jet device is suitable for the electromagnetic wave frequency range of several MHz to several GHz.
Further, the output pulse width of the nanosecond pulse power supply is 10-900 ns, the rising edge is 1-200 ns, the amplitude is 3-220 kV, the frequency is 1-20 kHz, and the duty ratio is 1-99%; the output voltage of the DC power supply is 0-60 kV or 0-60 kV.
Advantageous effects
The invention uses the electric field to lead the charged particles to move, thereby effectively avoiding the biochemical pollution possibly caused by the disturbance of the airflow. Meanwhile, the high voltage can drive to generate cold plasma, and ignition can be assisted at the end opening of the torch tube, thereby being beneficial to the formation of microwave plasma jet and improving the stability of the microwave plasma jet. Because the difference between the nanosecond pulse/DC high voltage and the working frequency of the microwave is large, field decoupling can be realized between a direct current electric field and a microwave field in the plasma resonator. In addition, the microwave cold plasma generating device is based on the deformation of a Microwave Plasma Torch (MPT), and a gradually-changing closing-in structure is added at the upper ends of the outer tube and the middle tube and used for regulating and controlling an electric field at the opening end.
By the structure, stable microwave cold plasma jet with the length of 5-40 mm can be generated, the microwave power conversion efficiency is higher than 80%, and the microwave cold plasma jet system integrates microwave generation, an auxiliary electric field, auxiliary ignition and the like, greatly reduces the whole volume, is light in weight, portable and low in ozone generation amount, and is suitable for special environments such as outdoor, local materials, closed spaces and the like.
Drawings
FIG. 1 is a schematic structural diagram of the present invention
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification.
Detailed description of the preferred embodiment 1
Specific embodiment 1 provides a composite field modulation microwave cold plasma jet device of the invention, and a schematic diagram of a typical structure is provided in combination with fig. 1.
The composite field modulation microwave cold plasma jet device consists of a cavity part, a microwave coupling part, a tuning part and an electric field modulation part;
referring to fig. 1, the composite field modulated microwave cold plasma jet device of the present invention includes a microwave feed port 1, an outer tube 2, a tuning end 3, a middle tube 4, an inner electrode 5, a coupling ring 6, an insulating medium porous coaxial gasket 7, a tangential flow shielding gas inlet 8, a nanosecond pulse/DC high voltage input end 9, and a gas inlet 10;
the cavity part is of a coaxial resonant cavity structure with an outer tube 2, a middle tube 4 and an inner electrode 5;
the outer tube, the middle tube and the inner electrode are made of metal materials, a coaxial resonant cavity with one open end is formed by the outer tube, the middle tube and the reflecting end, the middle tube and the inner electrode are of a coaxial line structure, microwaves are transmitted in a TEM mode, a TEM standing wave field is formed inside the middle tube and a traveling wave field is formed inside the middle tube and the inner electrode;
the inner electrode is connected with an auxiliary power supply (DC or nanosecond pulse modulation source);
the axial length of the outer tube is Nlambda/4 (lambda is the wavelength under the microwave frequency, and N is a positive odd number);
the upper ports of the outer pipe and the middle pipe are of gradually-changed closing-in structures, the closing-in of the outer pipe is 0-60 degrees, the closing-in of the middle pipe is 0-30 degrees, and the design is used for adjusting the electric field at the ports;
a porous coaxial gasket made of insulating materials is arranged between the middle pipe and the inner electrode;
the upper end of the middle pipe is not higher than the upper end of the outer pipe, the upper end of the inner electrode is not lower than the middle pipe, preferably, the upper end of the middle pipe is 0-2 mm lower than the upper end of the outer pipe, and the upper end of the inner electrode is 0-5 mm higher than the upper end of the middle pipe; in FIG. 1, the upper end of the inner electrode is flush with the upper port of the outer tube;
the outer pipe and the middle pipe can be introduced with shielding gas, and preferably, the shielding gas is introduced at a gas inlet 8 in a tangential flow mode; the gas flow rate of the gas inlet 8 and the gas flow rate of the gas inlet 10 are controlled to be 0-20L/min;
the microwave coupling part can optionally couple microwave energy to the cavity part in a conductive coupling, capacitive coupling and other modes; FIG. 1 is a schematic diagram of a structure for introducing microwave energy into a resonant cavity by conductive coupling; the distance between the coupling ring 6 and the upper port of the outer pipe is adjustable; the microwave plasma jet device is suitable for electromagnetic wave frequency range of several MHz-several GHz, preferably, stable normal pressure microwave cold plasma jet with the length of 5-40 mm is generated under the frequency of 2.45GHz, and the microwave power conversion efficiency is more than 80%.
The tuning part is a structure that the tuning end 3 adjusts the length of the resonant cavity so as to adjust the field intensity of the opening end, and the upper end of the tuning end is a reflecting end surface which is made of metal; the depth of the cavity part adjusted by the tuning end is M lambda/4 (lambda is the wavelength under the microwave frequency, and M is a positive odd number);
the electric field modulation part is an auxiliary power supply (nanosecond pulse or DC high voltage) connected with the inner electrode 5, and the ground wire is connected with the outer tube; the nanosecond pulse power supply has the output pulse width of 10-900 ns, the rising edge of 1-200 ns, the amplitude of 3-220 kV, the frequency of 1-20 kHz and the duty ratio of 1-99%; the output voltage of the DC power supply is 0-60 kV or 0-60 kV;
the microwave plasma jet device can work by the following 14 methods:
1) the microwave is coupled into the resonant cavity through the microwave coupling part, a TEM standing wave is formed in the resonant cavity, the nanosecond pulse power supply is connected to the inner electrode, and the plasma is formed at the axial position of the upper port of the resonant cavity and is driven by a pulse electric field to be sprayed outwards;
2) the microwave is coupled into the resonant cavity through the microwave coupling part to form a TEM standing wave in the resonant cavity, the high-voltage (positive/negative) power supply is connected to the inner electrode, and the plasma is formed at the axial position of the upper port of the resonant cavity and is ejected outwards under the drive of a high-voltage electric field;
3) the microwave is coupled into the resonant cavity through the microwave coupling part, a TEM standing wave is formed in the resonant cavity, and plasma is formed at the axial position of the upper port of the resonant cavity and is sprayed out;
4) the nanosecond pulse power supply is connected to the inner electrode, and plasma is formed at the tip position of the inner electrode and is sprayed out;
5) a DC high-voltage (positive/negative) power supply is connected to the inner electrode, and plasma is formed at the tip position of the inner electrode and is sprayed out;
6) based on the method 1), the outer pipe is not connected with the ground wire, and the infinite end is taken as the ground wire;
7) based on the method 2), the outer pipe is not connected with the ground wire, and the infinite end is taken as the ground wire;
8) based on the method 4), the outer pipe is not connected with the ground wire, and the infinite end is taken as the ground wire;
9) based on the method 5), the outer pipe is not connected with the ground wire, and the infinite end is taken as the ground wire;
10) based on the method 1), gas (single/mixed) is input from an inlet 8 and an inlet 10, and drives microwave plasma jet to be sprayed out in cooperation with a pulse electric field, and plasma components are adjusted;
11) based on the method 2), gas (single/mixed) is input from an inlet 8 and an inlet 10, and drives microwave plasma jet to be sprayed out in cooperation with a high-voltage electric field, and plasma components are adjusted;
12) based on method 3), gas (single/mixed) is input from an inlet 8 and an inlet 10, microwave plasma jet is pulled to be sprayed out, and plasma components are adjusted;
13) based on the method 4), gas (single/mixed) is input from an inlet 8 and an inlet 10, the cold plasma jet driven by nanosecond pulses is pulled to be sprayed out, and the plasma components are adjusted;
14) based on method 5), gas (single/mixed) is input from the inlet 8 and the inlet 10, the cold plasma jet driven by DC high voltage is pulled to be sprayed out, and the plasma component is adjusted.
The invention prolongs the length of the microwave cold plasma jet, can intelligently generate specific cold plasma by matching with different driving parameters and gas parameters, and improves the operability and practicability of the microwave cold plasma jet in the fields of clinical hospitals and the like.
The foregoing description has described specific embodiments of the present invention. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various combinations of modifications and changes in the specific embodiments described above can be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the invention.
Claims (10)
1. A composite field modulation microwave cold plasma jet device is characterized by comprising a cavity part, a microwave coupling part, a tuning part and an electric field modulation part;
the cavity part is an outer tube with one open end, a middle tube with two open ends and an inner electrode coaxial resonant cavity structure, the outer tube is provided with a microwave feed-in port, a tangential flow shielding gas inlet and a gas inlet, and the outer tube is grounded;
the microwave coupling portion includes a coupling loop to couple microwave energy to the cavity portion;
the tuning part is a structure that the tuning end adjusts the length of the resonant cavity so as to adjust the field intensity of the opening end, and the upper end of the tuning end is a reflecting end surface; the depth of the cavity part adjusted by the tuning end is M lambda/4, wherein lambda is the wavelength under the microwave frequency, and M is a positive odd number;
the electric field modulation part is connected with the inner electrode through nanosecond pulse/DC voltage.
2. The composite field modulated microwave cold plasma jet device according to claim 1, wherein the outer tube, the middle tube and the inner electrode are made of metal, the outer tube, the middle tube and the reflecting end form a coaxial resonant cavity with one open end, the middle tube and the inner electrode are of a coaxial line structure, microwaves are transmitted in a TEM mode, a TEM standing wave field is formed inside the outer tube, and a traveling wave field is formed inside the middle tube and the inner electrode.
3. A composite field modulated microwave cold plasma jet device as claimed in claim 1, wherein the axial length of the outer tube is N λ/4, where λ is the wavelength at the microwave frequency and N is a positive odd number.
4. The composite field modulated microwave cold plasma jet device according to claim 1, wherein the upper ports of the outer tube and the middle tube are of gradually-changing necking structures, the necking of the outer tube is 0-60 degrees, and the necking of the middle tube is 0-30 degrees.
5. A composite field modulated microwave cold plasma jet device according to claim 1, characterized in that a porous coaxial gasket of insulating material is provided between the middle tube and the inner electrode.
6. The composite field modulated microwave cold plasma jet device according to claim 1, wherein an upper port of the middle tube is not higher than the outer tube, and an upper end of the inner electrode is not lower than the middle tube.
7. A composite field modulated microwave cold plasma jet device according to claim 1, wherein the outer tube, the middle tube introduces gas through the shield gas inlet or the gas inlet.
8. A composite field modulated microwave cold plasma jet device according to claim 7, characterized in that the shielding gas is introduced at the inlet in a tangential flow; the gas flow rates of the shielding gas inlet and the gas inlet are controlled to be 0-20L/min.
9. The composite field modulated microwave cold plasma jet device according to claim 1, wherein the distance between the coupling ring and the upper port of the outer tube is adjustable; the microwave plasma jet device is suitable for the electromagnetic wave frequency range of several MHz to several GHz.
10. The composite field modulation microwave cold plasma jet device according to claim 1, wherein the output pulse width of the nanosecond pulse power supply is 10-900 ns, the rising edge is 1-200 ns, the amplitude is 3-220 kV, the frequency is 1-20 kHz, and the duty ratio is 1-99%; the output voltage of the DC power supply is 0-60 kV or 0-60 kV.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210842221.8A CN115052407A (en) | 2022-07-18 | 2022-07-18 | Composite field modulation microwave cold plasma jet device |
| ZA2023/04082A ZA202304082B (en) | 2022-07-18 | 2023-04-03 | Composite field modulated microwave cold plasma jet device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210842221.8A CN115052407A (en) | 2022-07-18 | 2022-07-18 | Composite field modulation microwave cold plasma jet device |
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| Publication Number | Publication Date |
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| CN115052407A true CN115052407A (en) | 2022-09-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210842221.8A Pending CN115052407A (en) | 2022-07-18 | 2022-07-18 | Composite field modulation microwave cold plasma jet device |
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| Country | Link |
|---|---|
| CN (1) | CN115052407A (en) |
| ZA (1) | ZA202304082B (en) |
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2022
- 2022-07-18 CN CN202210842221.8A patent/CN115052407A/en active Pending
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2023
- 2023-04-03 ZA ZA2023/04082A patent/ZA202304082B/en unknown
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| ZA202304082B (en) | 2023-05-31 |
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Inventor after: Yu Bingwen Inventor after: Bai Yiwen Inventor after: Jin Wei Inventor after: Wei Haoze Inventor after: Yu Dengjie Inventor before: Yu Bingwen Inventor before: Bai Yiwen Inventor before: Jin Wei |
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