CN115279002A - Atmospheric pressure plasma jet flow regulation and control device based on dynamic multiple composite magnetic field - Google Patents
Atmospheric pressure plasma jet flow regulation and control device based on dynamic multiple composite magnetic field Download PDFInfo
- Publication number
- CN115279002A CN115279002A CN202210843782.XA CN202210843782A CN115279002A CN 115279002 A CN115279002 A CN 115279002A CN 202210843782 A CN202210843782 A CN 202210843782A CN 115279002 A CN115279002 A CN 115279002A
- Authority
- CN
- China
- Prior art keywords
- magnetic field
- plasma
- pulse
- permanent magnet
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 18
- 230000033228 biological regulation Effects 0.000 title claims description 5
- 230000001105 regulatory effect Effects 0.000 claims abstract description 16
- 230000001276 controlling effect Effects 0.000 claims abstract description 9
- 230000005415 magnetization Effects 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 abstract description 8
- 230000001052 transient effect Effects 0.000 abstract description 8
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 230000009471 action Effects 0.000 abstract description 4
- 230000005684 electric field Effects 0.000 abstract description 4
- 239000002245 particle Substances 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 abstract description 2
- 210000002381 plasma Anatomy 0.000 description 47
- 239000007789 gas Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000003068 static effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/10—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied magnetic fields only, e.g. Q-machines, Yin-Yang, base-ball
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The invention discloses a device for regulating and controlling atmospheric pressure plasma jet based on a dynamic multiple composite magnetic field, which adopts a mode of pulse and constant composite magnetic field to increase magnetic potential, reduce heating and loss, effectively control the characteristics of plasma flow and further meet the requirements of the atmospheric pressure plasma jet in practical application. The device comprises an excitation electric field consisting of a high-voltage electrode and a grounding electrode, and is used for ionizing working gas to obtain plasma. The device comprises a transient strong magnetic field generated by a pulse electromagnetic coil, a gradient magnetic field coil and a constant magnetic field generated by a permanent magnet array. The three components form a composite magnetic field to increase the magnetic potential type. The transient high-intensity magnetic field can generate stronger constraint action and wider modulation action on charged particles, can reduce heating and loss, and effectively modulates and controls the characteristics of plasma. When the constant magnetic field is used for initial magnetization of the plasma, the magnetization effect is ensured, and the utilization rate is high.
Description
Technical Field
The invention relates to the technical field of low-temperature plasma jet generation and application, in particular to a device for regulating and controlling atmospheric pressure plasma jet based on a dynamic multiple composite magnetic field.
Background
The atmospheric pressure plasma jet is a low-temperature plasma source with great application value, has the advantages of high electron temperature, low gas temperature, rich active particles and the like, is simple to operate, does not need a vacuum cavity, and is widely applied to the fields of material treatment, biomedicine, environmental protection and the like.
It is well known that plasma is a typical functional fluid in a magnetic field, so it is feasible to use lorentz forces to control its physical properties and parameters. Therefore, the introduction of the magnetic field to enhance the plasma flow is expected to expand the application range of the plasma to a wider technical field. The externally applied magnetic field in a typical plasma magnetic confinement device is basically a weak static magnetic field (< 0.1T based on magnetic field coils) and a low pressure environment (< kPa), and the influence of such a weak magnetic field on the atmospheric pressure plasma behavior is very limited. For plasma in an atmospheric pressure environment, a stronger magnetic field needs to be introduced, if a magnetic field coil is adopted, a large driving current is needed, the coil heats seriously after long-time working, performance degradation and danger are caused, for example, a superconducting coil needs to be used when a T-magnitude static magnetic field is generated, and the cost is huge. Therefore, there is a need for a control device that can solve the problems of insufficient magnetic field coil strength, single magnetic potential and serious heat generation, and control the characteristics of plasma flow.
Disclosure of Invention
In view of this, the invention provides a device for regulating and controlling the atmospheric pressure plasma jet based on a dynamic multiple composite magnetic field, which adopts a pulse and constant composite magnetic field mode to increase magnetic potential, reduce heating and loss, effectively control the characteristics of the plasma and further meet the requirements of the atmospheric pressure plasma jet in practical application.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the device for regulating and controlling the atmospheric pressure plasma jet based on the dynamic multiple composite magnetic field comprises a medium pipe, a pulse electromagnetic coil, a permanent magnet array, a gradient magnetic field coil, a high-voltage electrode and a grounding electrode.
Working gas is input into the medium tube, and plasma gas is generated after ionization; the permanent magnet array is closely surrounded on the side wall of the medium pipe.
The high-voltage electrode and the grounding electrode are both of annular structures and are wound on the side wall of the medium tube, and the medium tube between the high-voltage electrode and the grounding electrode is a discharge area; the pulse electromagnetic coil surrounds the outer side of the permanent magnet array, and the two pulse electromagnetic coils are respectively arranged at two sides of the discharge area; the gradient magnetic field coil surrounds the outer side of the permanent magnet array and is located between the two pulse electromagnetic coils.
The permanent magnet array and the gradient magnetic field coil provide a constant magnetic field with 0.01T magnitude, and the pulse electromagnetic coil provides a pulse magnetic field with T magnitude; the constant magnetic field and the pulse magnetic field form a composite magnetic field.
Furthermore, the width of the high-voltage electrode and the width of the grounding electrode are between 1 mm and 5mm, and the distance between the two electrodes is 5mm to 10mm; the diameter of the medium pipe is 1-10mm.
Furthermore, the pulse electromagnetic coil is externally connected with a pulse current source, and the number of turns of the coil is more than 2; the number of turns of the gradient magnetic field coil is more than 100.
Further, the permanent magnet array is an annular or tile-shaped permanent magnet.
Further, the distance between the grounding electrode and the pipe orifice of the medium pipe is not less than 3mm.
Further, when the plasma is preliminarily magnetized, the pulse magnetic field is not started, and the constant magnetic field is started; when the preliminary magnetization is finished and the plasma is regulated and controlled, the pulse magnetic field is started.
Has the advantages that:
1. the invention provides a device for regulating and controlling atmospheric pressure plasma jet flow based on a dynamic multiple composite magnetic field, which adopts a mode of a pulse and constant composite magnetic field, increases magnetic potential type, reduces heating and loss, effectively controls the characteristics of plasma flow, and further meets the requirements of the atmospheric pressure plasma jet flow in practical application. The device comprises an excitation electric field consisting of a high-voltage electrode and a grounding electrode, and is used for ionizing working gas to obtain plasma gas. The device comprises a transient strong magnetic field generated by a pulse electromagnetic coil, a gradient magnetic field coil and a constant magnetic field generated by a permanent magnet array. The three components form a composite magnetic field to increase the magnetic potential type. The transient high-intensity magnetic field can generate stronger constraint action and wider modulation action on charged particles, can reduce heating and loss, and effectively modulates and controls the characteristics of plasma. When the constant magnetic field is used for initial magnetization of the plasma, the magnetization effect is ensured, and the utilization rate is high.
2. In the device, the magnetic field generated by the permanent magnet array is most uneven, the magnetic field generated by the gradient magnetic field coil is the second most even, and the magnetic field generated by the pulse electromagnetic coil is the most even. Therefore, the non-uniform magnetic field exists in the composite magnetic field, and the non-uniform magnetic field can change the space-time transport characteristics of plasmas with different energy densities and gradually increase the volume of the plasmas.
3. The width of the high-voltage electrode and the grounding electrode in the device is 1-5mm, the distance between the two electrodes is 5-10mm, the electric energy is prevented from being exposed, the effect of exciting the plasma is better, and the discharge efficiency is improved.
4. The inner diameter of the medium pipe in the device is 1-10mm, which is beneficial to the flow of working gas and improves the size and the propelling speed of plasma.
5. The device has simple structure, low cost and good stability, and can indirectly regulate and control the plasma by regulating the transient strong magnetic field and the frequency generated by the pulse electromagnetic coil according to actual requirements.
6. When the device initially magnetizes the plasma, the pulse magnetic field is not started, and the constant magnetic field is started; and finishing preliminary magnetization, and turning on the pulse magnetic field when regulating and controlling the plasma. The pulse magnetic field has the characteristics of high energy and transient state, is not started when the plasma is primarily magnetized, is sufficiently magnetized by adopting a constant magnetic field, and is started again in a regulation and control stage, so that the energy utilization efficiency can be improved, and the energy waste is reduced.
Drawings
FIG. 1 is a cross-sectional view of the structure of the present invention.
Fig. 2 is a schematic diagram of magnetic induction of the coil.
The device comprises a medium tube 1, a pulse electromagnetic coil 2, a permanent magnet array 3, a gradient magnetic field coil 4, a high-voltage electrode 5, a grounding electrode 6 and a discharge area 7.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
As shown in fig. 1, the present invention provides a device for regulating and controlling an atmospheric pressure plasma jet based on a dynamic multiple complex magnetic field, which can provide a complex magnetic field to effectively regulate and control the volume, density, temperature, active particle distribution and concentration distribution of a plasma. The regulating device comprises a medium pipe 1, a pulse electromagnetic coil 2, a permanent magnet array 3, a gradient magnetic field coil 4, a high-voltage electrode 5 and a grounding electrode 6. The specific working process is as follows:
the medium tube 1 is made of dielectric insulating material (glass, quartz, ceramic and polytetrafluoroethylene), has an inner diameter of 1-10mm, and is used for generating plasma after being ionized by inputting working gas (helium, argon, and mixed gas of the helium, the argon, nitrogen and oxygen). The high-voltage electrode 5 and the grounding electrode 6 are wound on the side wall of the medium pipe 1 and located at the upstream of the working gas, and plasma is generated between the high-voltage electrode 5 and the grounding electrode 6 in a dielectric barrier discharge mode and is transmitted to the outside of the medium pipe 1. The side wall of the medium tube 1 is tightly attached to and surrounds the permanent magnet array 3, and the gradient magnetic field coil 4 surrounds the outer side of the permanent magnet array 3 and can axially move near the discharge area 7. The high-voltage electrode 5 and the grounding electrode 6 are both of annular structures and are wound on the side wall of the medium tube 1, and the medium tube 1 between the high-voltage electrode and the grounding electrode is a discharge area 7; two pulse electromagnetic coils 2 surround the outside of the permanent magnet array 3 and are respectively positioned at two sides of the discharge area 7.
The high-voltage electrode 5 and the grounding electrode 6 are annular electrodes with the width of 1-5mm and are completely wound around the medium pipe 1 for one circle. The distance between the two electrodes is set at 5-10mm, and conductive materials such as aluminum, copper and the like are adopted. The high-voltage electrode 5 is externally connected with a sinusoidal alternating current source or a pulse source of a power supply, the voltage range of the power supply is 3-20kV, and the frequency range is from Hertz to 100 kilohertz. The ground electrode 6 is grounded. The distance between the grounding electrode 6 and the pipe orifice of the medium pipe 1 is not less than 3mm, the discharge efficiency is high, the electric energy is less exposed, and the effect of exciting the plasma is better.
The pulse electromagnetic coil 2 is externally connected with a pulse current source (the current peak value is more than 1000A, the pulse width is between 1us and 1s, the peak magnetic field at the axis is more than 1T), and the number of turns of the coil is more than 2. The two pulse electromagnetic coils 2 can be driven by the same pulse current source after being connected in series or in parallel, and can also be driven by different pulse current sources respectively. The pulse electromagnetic coil 2 has the functions of reducing the problem of magnetic field heating, generating high-strength pulse magnetic field to restrain plasma, and effectively regulating and controlling the characteristics of the plasma.
The gradient magnetic field coil 4 has a turn number larger than 100, is driven by a direct current power supply, and has the main functions of adjusting the magnetic field potential at the plasma outlet and improving the magnetic surface distribution. The gradient magnetic field coil 6 is located between the two pulse electromagnetic coils 2 and can move between the two pulse electromagnetic coils 2. The permanent magnet array 3 is an annular or tile-shaped permanent magnet, provides a radial gradient magnetic field inwards along the side wall of the medium pipe 1, and enhances the reaction rate and activity of plasma near the pipe wall. The repetition frequency of the magnetic field and the electric field are matched, so that the generation of the magnetic field and the electric field are synchronous.
As shown in fig. 2, the permanent magnet array 3 and the gradient magnetic field coil 4 respectively provide a constant magnetic field (a static weak magnetic field, 0.01T magnitude) of the magnetic field strengths B2 and B3, so as to ensure the preliminary magnetization effect of the plasma and improve the magnetic energy utilization rate. As shown in fig. 2, the pulsed electromagnetic coil 2 provides a pulsed magnetic field (strong transient magnetic field, T magnitude) with a magnetic field strength B1, which can generate a stronger confinement effect and a wider modulation effect on the plasma. The pulse magnetic field has the characteristics of high energy and transient state, is not started when the plasma is primarily magnetized, but is sufficiently magnetized by adopting a constant magnetic field, and is started again in a regulation stage, so that the energy utilization efficiency can be improved. The constant magnetic field and the pulse magnetic field are not influenced mutually to form a composite magnetic field. Among these, the magnetic field of the permanent magnet array 3 is most uneven, followed by the magnetic field of the gradient magnetic field coil 4, and most even by the magnetic field generated by the pulsed electromagnetic coil 2. Therefore, the non-uniform magnetic field exists in the composite magnetic field, the space-time transport characteristics of plasmas with different energy densities can be changed, and the volume of the plasmas is gradually increased.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The device for regulating and controlling the atmospheric pressure plasma jet based on the dynamic multiple composite magnetic field is characterized by comprising a medium tube (1), a pulse electromagnetic coil (2), a permanent magnet array (3), a gradient magnetic field coil (4), a high-voltage electrode (5) and a grounding electrode (6);
working gas is input into the medium tube (1), and plasma gas is generated after ionization; the permanent magnet array (3) is tightly attached to and surrounds the side wall of the medium pipe (1);
the high-voltage electrode (5) and the grounding electrode (6) are both of annular structures and are wound on the side wall of the medium tube (1), and the medium tube (1) between the high-voltage electrode and the grounding electrode is a discharge area (7); the pulse electromagnetic coils (2) surround the outer side of the permanent magnet array (3), and the two pulse electromagnetic coils (2) are respectively arranged on two sides of the discharge area (7); the gradient magnetic field coil (4) surrounds the outer side of the permanent magnet array (3) and is positioned between the two pulse electromagnetic coils (2);
the permanent magnet array (3) and the gradient magnetic field coil (4) provide a constant magnetic field with 0.01T magnitude, and the pulse electromagnetic coil (2) provides a pulse magnetic field with T magnitude; the constant magnetic field and the pulse magnetic field form a composite magnetic field.
2. The control device according to claim 1, characterized in that the width of the high voltage electrode (5) and the ground electrode (6) is between 1 and 5mm, and the distance between the two electrodes is between 5 and 10mm; the diameter of the medium pipe (1) is 1-10mm.
3. The regulating device according to claim 1, characterized in that the pulsed electromagnetic coil (2) is externally connected with a pulsed current source, the number of coil turns is more than 2; the number of turns of the gradient magnetic field coil (4) is more than 100.
4. The regulating device according to claim 1, characterized in that the permanent magnet array (3) is a ring-shaped or tile-shaped permanent magnet.
5. The regulating device according to any one of claims 1-2, characterized in that the distance between the earth electrode (6) and the mouth of the medium pipe (1) is not less than 3mm.
6. The regulation device of claim 1 wherein the pulsed magnetic field is not turned on and the constant magnetic field is turned on when the plasma is initially magnetized; and when the preliminary magnetization is finished and the plasma is regulated, the pulse magnetic field is started.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210843782.XA CN115279002A (en) | 2022-07-18 | 2022-07-18 | Atmospheric pressure plasma jet flow regulation and control device based on dynamic multiple composite magnetic field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210843782.XA CN115279002A (en) | 2022-07-18 | 2022-07-18 | Atmospheric pressure plasma jet flow regulation and control device based on dynamic multiple composite magnetic field |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115279002A true CN115279002A (en) | 2022-11-01 |
Family
ID=83767952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210843782.XA Pending CN115279002A (en) | 2022-07-18 | 2022-07-18 | Atmospheric pressure plasma jet flow regulation and control device based on dynamic multiple composite magnetic field |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115279002A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012199017A (en) * | 2011-03-18 | 2012-10-18 | Stanley Electric Co Ltd | Pressure gradient plasma generating device and deposition device using the same |
| CN103533733A (en) * | 2013-10-17 | 2014-01-22 | 中国科学院西安光学精密机械研究所 | Atmospheric magnetic field enhanced low-temperature plasma electric brush generation device |
-
2022
- 2022-07-18 CN CN202210843782.XA patent/CN115279002A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012199017A (en) * | 2011-03-18 | 2012-10-18 | Stanley Electric Co Ltd | Pressure gradient plasma generating device and deposition device using the same |
| CN103533733A (en) * | 2013-10-17 | 2014-01-22 | 中国科学院西安光学精密机械研究所 | Atmospheric magnetic field enhanced low-temperature plasma electric brush generation device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107801286B (en) | Microwave plasma excitation system based on dielectric barrier discharge pre-ionization | |
| KR101595686B1 (en) | Toroidal plasma chamber for high gas flow rate process | |
| CN103533733B (en) | The magnetic-field-enhanced low-temperature plasma brush generator of normal atmosphere | |
| CN101835334B (en) | Method for controlling crossed field discharge resonant coupling | |
| CN110513260A (en) | A kind of radio frequency plasma propeller | |
| US3038099A (en) | Cusp-pinch device | |
| US3230418A (en) | Device having high-gradient magnetic cusp geometry | |
| CN109302791B (en) | Microwave antenna regulation and control magnetic enhancement linear plasma source generation system | |
| CN107295740A (en) | It is a kind of to produce the device and method that homogeneous atmosphere depresses glow discharge | |
| Root et al. | Experimental performance of a microwave cavity plasma disk ion source | |
| CN115279002A (en) | Atmospheric pressure plasma jet flow regulation and control device based on dynamic multiple composite magnetic field | |
| CN115315055A (en) | Microwave cold plasma jet device | |
| CN112004304B (en) | Corona composite dielectric barrier discharge plasma jet generating device | |
| JP6244141B2 (en) | Plasma generator and use thereof | |
| Muramatsu et al. | Concept design of new compact electron cyclotron resonance ion source with permanent magnets for multi-ion radiotherapy | |
| Dang et al. | A Ku-band compact disk-beam relativistic klystron oscillator operating at low guiding magnetic field | |
| Chen | Radiofrequency plasma sources for semiconductor processing | |
| CN113133174A (en) | Helicon-ion cyclotron resonance coupling discharge system | |
| Mironer et al. | Radio frequency heating of a dense, moving plasma | |
| JP2009272127A (en) | Plasma generating device, and plasma treatment device | |
| CN216391496U (en) | Plasma generating device and ion source | |
| CN216852480U (en) | Composite plasma source | |
| CN113851368B (en) | Method for enhancing discharge in radio frequency magnetization capacitive coupling discharge device | |
| CN114900938A (en) | High-density plasma source with controllable ion velocity vector | |
| Chang et al. | Coupling between multiple antennas through a plasma cylinder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |