CN103025042B - Radio frequency discharge device and hollow-core fiber radio frequency discharge system - Google Patents

Radio frequency discharge device and hollow-core fiber radio frequency discharge system Download PDF

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CN103025042B
CN103025042B CN 201210524027 CN201210524027A CN103025042B CN 103025042 B CN103025042 B CN 103025042B CN 201210524027 CN201210524027 CN 201210524027 CN 201210524027 A CN201210524027 A CN 201210524027A CN 103025042 B CN103025042 B CN 103025042B
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radio
frequency
discharge
system
fiber
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CN 201210524027
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CN103025042A (en )
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段练
王新兵
左都罗
陆培祥
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华中科技大学
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Abstract

本发明提供了一种空芯光纤射频放电系统,包括射频放电装置和气配装置;射频放电装置包括射频电源、匹配网络、电极和空芯光纤,电极包括内电极和外电极,内电极与外电极均为空芯圆柱体金属电极,内电极的外径小于外电极的内径;内电极位于外电极的内部,空芯光纤缠绕于内电极的外表面,空芯光纤的两端分别与气配装置连接;工作时,射频电源在内电极和外电极之间产生交变电场,交变电场驱动空芯光纤中的气体所含的电子往复运动,电子在运动过程中与其它粒子碰撞产生放电等离子体。 The present invention provides a hollow core optical fiber RF discharge system comprising a gas discharge device with a radio frequency device; a radio frequency discharge device comprises a radio frequency power supply, a matching network, and the hollow core optical fiber electrodes, electrodes comprising an inner and outer electrodes, the inner electrode and the outer electrode metal electrodes are empty core cylinder, an outer diameter smaller than the inner diameter of the inner electrode of the electrode; inner electrode positioned inside the outer electrode, air-core optical fiber is wound on the outer surface of the inner electrode, both ends of the hollow core fiber and the gas distribution means are connection; in operation, the RF power source including an alternating electric field is generated, the alternating electric field drives electrons reciprocate hollow core fiber contained in the gas, electron collisions with other particles in motion during the plasma discharge between the electrode and the outer electrode . 本发明提供的空芯光纤射频放电系统可以在微米量级的空芯光纤绕成的类螺线管状的结构中通过射频放电的方式产生等离子体;具有方法简单、噪音低、能量损耗小、装置结构紧凑、效率高等优点。 Generating a radio frequency discharge system of hollow-core fiber of the present invention provides a wound may be in the order of microns solenoid type air-core fiber-like structure by way of radio frequency plasma discharge; having a simple, low-noise, energy loss is small, means compact, high efficiency.

Description

—种射频放电装置及空芯光纤射频放电系统 - a radio frequency discharge device, and kind of hollow-core fiber optic RF discharge system

技术领域 FIELD

[0001] 本发明属于气体放电技术领域,更具体地,涉及一种射频放电装置及空芯光纤射频放电系统。 [0001] The present invention belongs to the technical field of gas discharge, and more particularly, to a radio frequency discharge device and discharge system radio frequency air-core fiber.

背景技术 Background technique

[0002] 空芯光纤凭借其独特的导光机制,在远距离传输和曲径传输等方面有着优异的表现。 [0002] With its unique air-core optical fiber light guide mechanism with excellent performance in long-distance transmission and transmission, etc. labyrinth. 天生的结构优势和损耗表现使空芯光纤成为各项研究的热点。 Natural structural advantage and loss performance of the hollow-core optical fiber become the focus of the research. 针对空芯光纤的气体放电技术研究,在气相沉积和气体激光等领域有着极大的应用前景。 Research for discharging a gas of the hollow core fiber, has a great potential applications in the field of vapor deposition, and a gas laser or the like.

[0003] 气体放电主要原理是将电场施加于气体,使气体中的电子在外加电场的作用下获得较大的速度,并在运动过程中与其他中性粒子或带电粒子发生碰撞,从而进行能量传递和分化。 [0003] The main principle of gas discharge an electric field is applied to the gas, the gas electrons obtain a large rate under applied electric field, and collide with other neutral or charged particles during the movement, so that energy transfer and differentiation. 从施加电场的方式,可将气体放电分为直流放电或者交流放电。 Applying an electric field from the embodiment, the discharge gas may be divided into DC discharge or AC discharge.

[0004] 直流放电采用高压直流电源驱动。 [0004] The use of high voltage DC power DC discharge driving. 二次电子激发是直流击穿和维持放电的重要机制,其中最为主要的是正离子激发电子的过程,即电子碰撞产生的正离子,在电场力驱使下轰击阴极,致使冷阴极发射电子的过程。 Secondary electron excitation is an important mechanism for the sustain discharge and dc breakdown, the most important is the process of excited electrons positive ions, i.e., positive ions produced by electron impact, an electric field strength at the cathode bombardment driven, so that the cold cathode electron emission process. 不同于高效的热激发,二次电子激发产生的电子仅能维持较小的电流密度,因此直流放电的击穿和维持电压均较高,且阴极的溅射效果较明显,对电极有一定程度的损害。 Unlike efficient thermal excitation, secondary electrons generated by electrons excited only to maintain a small current density, and breakdown current discharge sustain voltage are high, and the cathode sputtering effect is more obvious, the electrodes have a certain degree of damage.

[0005] 交流放电,尤其是高频放电,采用高频交变电源驱动。 [0005] AC discharge, especially a high-frequency discharge, high frequency alternating power source drive. 电子在交变的电场作用下来回振荡,其与气体粒子碰撞的次数和电离能力较直流放电时有明显增强。 Electronic back and oscillation of the alternating electric field, there is significantly enhanced when it colliding with the gas particles and the number of discharge capacity than the ionization current. 碰撞过程产生的新电子完全足以维持放电,与电极直接相关的二次电子激发过程不再起关键作用,所以在高频放电中,电极可以移至放点区域之外,甚至是无电极,结构形式多样。 The new electron impact generated during sustain discharge is sufficient to completely, directly related to the process of secondary electron excitation and the electrode is no longer play a key role, so the high-frequency discharge, the discharge electrode can be moved outside the spot area, or even no electrode structure diversity. 气体击穿和维持放电所需要的电压幅度也因电子的高频振荡而相较直流放电时小。 Gas breakdown discharge and voltage required to sustain the rates are due to the high frequency oscillation of electron current discharge compared hours. 上述的优势使高频放电激励成为气体放电的重要激励技术之一。 The advantage of the above-described high-frequency discharge excitation become an important gas discharge excitation technique.

[0006] 当前,在气相沉积领域,对空芯光纤的内层覆膜技术已经成功拓展到了50微米的尺度。 [0006] Currently, in the field of vapor deposition, on the inner hollow core optical fiber coating technology has been successfully extended to 50 microns scale. 其中,放电方式为高频放电,微电极等间距地缠绕于空芯光纤外部以产生交变的纵向电场。 Wherein the discharge mode of high-frequency discharge, microelectrodes equidistantly wound around the outer longitudinal hollow core optical fiber to produce an alternating electric field. 电源输出的频率为5千赫兹,电压为5千伏。 The power supply output frequency is 5 KHz, voltage of 5 kV. 可见,放电维持的电压仍有进一步降低的空间,且因空芯光纤与电极的设置方式,实际覆膜的距离与装置的尺寸直接相关,难以兼顾覆膜距离和装置小型化。 Be seen, the discharge sustaining voltage is still further reduced space, and because the air-core optical fiber arrangement with an electrode, and the size of the actual coating device is directly related to the distance, the distance is difficult to achieve coating and downsizing the device.

[0007] 在空芯光纤的气体激光领域,对空芯光纤中气体的光激励技术,在中红外波段已获得实质性进展:因乙炔对1.5微米波段的吸收效应,通过脉宽为5纳秒,波长为1.5微米的光脉冲对充入空芯光纤中的气压为数托的乙炔气体进行泵浦,研究人员成功获得了3.12微米和3.16微米的激光。 [0007] In the gas laser art hollow core fiber, the hollow core optical fiber for excitation of gas technology, substantial progress has been in the mid-infrared: absorption effect due to the 1.5 micron band acetylene, by a pulse width of 5 ns light pulse having a wavelength of 1.5 microns acetylene gas into the hollow core optical fiber pressure of several Torr pumped, researchers have successfully laser of 3.12 microns and 3.16 microns. 吸收谱与乙炔相似的氰化氢也可以通过该泵浦方式获得中红外激光。 Absorption spectra similar to acetylene in hydrogen cyanide may be obtained by the infrared laser pumping scheme. 而对于短波长的电激励,如氦氖气体,因放电在微小尺度下难以形成和维持,以及损耗的限制,放电管的管径仍较大。 For the short wavelength excitation power, such as a helium-neon gas by the discharge in the minute scale is difficult to form and maintain, as well as loss limit, discharge tube diameter is still large. 且传统的气体激光射频激励装置中,其电极的典型形状为板条状,为了使放电距离较长,电极的实际尺寸也需要相应增加,不利于小型化。 And conventional radio frequency excitation gas laser device, which is typically the shape of a plate electrode strip, in order to make a long distance discharge, the actual size of the electrodes also needs a corresponding increase is not conducive to miniaturization. 因此,充当放电腔体的空芯光纤的芯径仍有进一步收缩的空间,放电特征距离也有待进一步增加。 Thus, the core hollow waveguides serves as the discharge diameter of the cavity is still room for further contraction, the discharge characteristic distance to be further increased.

发明内容 SUMMARY

[0008] 针对现有技术的缺陷,本发明的目的在于提供一种空芯光纤射频放电系统,旨在解决现有技术中放电装置紧凑性不足、激励效率偏低的问题。 [0008] for the disadvantages of the prior art, an object of the present invention is to provide an air-core optical fiber RF discharge system, to solve the problems of the prior art lack the compactness and discharge device, the excitation efficiency is low.

[0009] 本发明提供了一种射频放电装置,包括:射频电源,用于输出射频功率;匹配网络,输入端与所述射频电源连接,用于实现射频功率的无相移传输;电极,包括内电极和外电极,所述内电极与所述外电极均为空芯圆柱体金属电极,所述内电极的外径小于所述外电极的内径;所述内电极位于所述外电极的内部,所述内电极与所述匹配网络的输出端正极连接,所述外电极与所述匹配网络的输出端地极连接后接地;以及空芯光纤,缠绕于所述内电极的外表面,所述空芯光纤的两端分别与所述气配装置连接;工作时,射频电源在内电极和外电极之间产生交变电场,交变电场驱动空芯光纤中的气体所含的电子往复运动,电子在运动过程中与其它粒子碰撞产生放电等离子体。 [0009] The present invention provides a radio frequency discharge device, comprising: a radio frequency power supply for outputting RF power; matching network, an input terminal connected to said RF power source, the RF power to achieve no phase shift transmission; electrode, comprising inner and outer electrodes, the inner electrode and the outer electrode metal electrodes are empty core cylinder, the outer diameter of the inner electrode is less than the inner diameter of the outer electrode; said inner electrode positioned inside the outer electrode , the inner electrode and the output matching network connected correct, the outer electrode and the output terminal of the matching network connected to the ground after the ground electrode; and a hollow-core fiber is wound on the outer surface of the inner electrode, the both ends of said hollow core optical fibers respectively connected to the gas distribution means; operation, the RF power source to generate an alternating electric field between the inner and outer electrodes, an alternating electric field driving electronics reciprocation gas contained in the hollow core optical fiber , during movement of electrons in the collision of discharge plasma and other particles.

[0010] 更进一步地,所述射频放电装置还包括与所述匹配网络的输出端地极连接的金属屏蔽罩,罩住匹配网络、内电极、外电极以及空芯光纤,用于屏蔽射频辐射。 [0010] Furthermore, the radio frequency discharge means further comprises a metal shield and an output terminal of the matching network is connected to ground, a matching network covering the inner electrode, outer electrode, and a hollow core optical fiber, for shielding RF radiation .

[0011] 更进一步地,根据空芯光纤的外径调整所述内电极与所述外电极的直径。 [0011] Still further, according to the diameter of the electrode outer diameter of hollow core optical fiber to adjust the inner and the outer electrode.

[0012] 更进一步地,所述电极还包括位于所述内电极两端的出水口和入水口。 [0012] Still further, the electrode further comprises an internal electrode positioned at both ends of the inlet and outlet.

[0013] 更进一步地,匹配网络与射频电源之间通过同轴线缆连接;匹配网络与电极之间通过铜带连接。 [0013] Furthermore, the matching between the network and the RF power source is connected through a coaxial cable; matching network connected between the electrodes through copper strip.

[0014] 更进一步地,所述匹配网络包括:电感、第一可调电容和第二可调电容;电感的一端与所述射频电源连接,另一端与内电极连接;第一可调电容的一端与所述电感的一端连接,第一可调电容的另一端接地;第二可调电容的一端与所述电感的另一端连接,第二可调电容的另一端接地。 [0014] Furthermore, the matching network comprises: an inductor, first and second adjustable capacitance variable capacitor; end of the inductor is connected to the RF source and the other end connected to the internal electrodes; a first tunable capacitor One end of the inductor is connected to one end, the other end of the first tunable capacitor; a second end of the adjustable capacitor to the other end of the inductor is connected to the other end of the second variable capacitor.

[0015] 本发明还提供了一种空芯光纤射频放电系统,包括射频放电装置和气配装置;所述射频放电装置为上述的射频放电装置。 [0015] The present invention further provides a hollow core optical fiber RF discharge system comprising a gas discharge device with a radio frequency device; above the radio frequency discharge means is a radio frequency discharge device.

[0016] 更进一步地,所述气配装置包括:第一气室、第二气室、第一气压计、第二气压计、第一真空阀门、第三气压计、气配室、第二真空阀门、供气源、第三真空阀门、第四真空阀门、第五真空阀门、涡轮分子泵和机械泵;机械泵作为所述气配装置的前级泵,涡轮分子泵作为所述气配装置的后级泵,空芯光纤的两端分别与第一气室和第二气室相连,第一气室由与之相连的第一气压计监测,第一气室还依次通过第一真空阀门和第四真空阀门与气配室相连;第二气室的气压由与之相连的第二气压计监测,气配室与通过第二真空阀门与多个供气源相连,第二气室还依次通过第三真空阀门和第四真空阀门与气配室相连;气配室的气压由与之相连的第三气压计监测,气配室还依次通过第四真空阀门和第五真空阀门与涡轮分子泵相连。 [0016] Furthermore, the gas distribution means comprises: a first plenum, the second plenum, the first barometer and second barometer, a first vacuum valve, a third pressure gauge, gas distribution chamber, the second vacuum valves, gas supply, a third vacuum valve, vacuum valves fourth, fifth vacuum valve, a turbo molecular pump and a mechanical pump; mechanical pump before the pump as the gas distribution means, as a turbomolecular pump with said gas after stage pump apparatus, the hollow core optical fiber ends are respectively connected to a first plenum and a second plenum, the first plenum by the pressure gauge connected thereto a first monitor, a first air passes through the first vacuum chamber further and a fourth valve and vacuum valve connected to the air distribution chamber; a second gas pressure chamber connected thereto by a second pressure gauge monitoring the gas distribution chamber is connected via a second vacuum valve with a plurality of gas supply, a second plenum further sequentially connected through the third and fourth vacuum valve and the vacuum valve with the air chamber; a third pressure gauge monitoring the pressure of the gas distribution chamber connected thereto, further passes through the gas distribution chamber of the fourth and fifth vacuum valve and vacuum valve turbo-molecular pump is connected.

[0017] 本发明克服了微小尺度下电子因放电空间狭小而无法击穿和维持的困难。 [0017] The present invention overcomes the difficulties due to electronic breakdown discharge space is small and can not be maintained at a microscopic scale. 使用射频电源进行放电,放电稳定,可靠性高,放电电压低。 Using a radio frequency power supply for discharge, stable discharge, high reliability, low discharge voltage. 有别于传统垂直激励的方式能够更有效的激发工作物质中的粒子。 Unlike the traditional vertical excitation of excited species can be more effective in the working substance. 而更高的射频频率在气压较大的情况下也将带来更高的激发效率。 The higher RF frequencies in the case of larger pressure will result in higher excitation efficiency. 此外,还能消除受激粒子和粒子团的径向迁移以及放电等离子体的震荡。 Further, also by eliminating radial shock excited particles and particle groups migration and discharge plasma. 以新颖的光纤缠绕方式及电极设置方式,增加了放电的距离和激励的效率。 In a novel manner, and the optical fiber is wound electrode arrangement, increasing the distance and the excitation efficiency of the discharge.

附图说明 BRIEF DESCRIPTION

[0018] 图1是本发明实施例提供的空芯光纤射频放电系统中射频放电装置的结构示意图; [0018] FIG. 1 is a schematic structural diagram of the air-core optical fiber provided in a radio frequency discharge system in the rf discharge apparatus of the embodiment of the present invention;

[0019] 图2是本发明实施例提供的空芯光纤射频放电系统中空芯光纤缠绕电极的轴测图; [0019] FIG. 2 is a perspective view of a hollow core optical fiber is wound air-core RF electrode discharge system according to an embodiment of the present invention;

[0020] 图3是本发明实施例提供的空芯光纤射频放电系统中空芯光纤缠绕电极的剖视图; [0020] FIG. 3 is a hollow core optical fiber RF discharge system provided in the hollow core of a cross-sectional view of an electrode of the embodiment of the present invention is wound;

[0021] 图4是本发明实施例提供的空芯光纤射频放电系统中匹配网络的具体电路图; [0021] FIG 4 is a detailed circuit diagram of the air-core optical fiber provided in a radio frequency discharge system in the embodiment of the present invention, the matching network;

[0022] 图5是是本发明实施例提供的空芯光纤射频放电系统中气配装置的结构示意图。 [0022] FIG. 5 is a schematic diagram of hollow waveguides provide radio frequency discharge system in the embodiment of the air distribution apparatus embodiment of the present invention.

具体实施方式 detailed description

[0023] 为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。 [0023] To make the objectives, technical solutions and advantages of the present invention will become more apparent hereinafter in conjunction with the accompanying drawings and embodiments of the present invention will be further described in detail. 应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。 It should be understood that the specific embodiments described herein are only intended to illustrate the present invention and are not intended to limit the present invention.

[0024] 本发明提供的空芯光纤射频放电系统由射频电源产生射频输出,再通过匹配网络与电极耦合到空芯光纤中。 [0024] The hollow-core fiber of the present invention provides a radio frequency discharge system produces RF output from the RF power source, and then coupled to the hollow core fiber and the electrode through a matching network. 电极间的距离,即内外电极的直径差,可根据空芯光纤的外径进行设计调整。 The distance between the electrodes, i.e. the difference between the diameter of the inner and outer electrodes may be adjusted according to the design of the outer diameter of the hollow core optical fiber. 空芯光纤中因耦合得到的射频电场使气体电离,空芯光纤由不导电状态转变为导电状态。 Air-core fiber obtained by coupling radio frequency electric field ionizes the gas, the hollow core optical fiber changed from a non-conductive state to a conductive state.

[0025] 图1示出了本发明实施例提供的空芯光纤射频放电系统中射频放电装置的结构,为了便于说明,仅示出了与本发明实施例相关的部分,详述如下: [0025] FIG. 1 shows a structure of the present invention the hollow core optical fiber provided in a radio frequency discharge system in the rf discharge apparatus embodiment, for convenience of explanation, only a part related to the embodiment of the present invention, described in detail below:

[0026] 空芯光纤射频放电系统包括射频放电装置和气配装置;射频放电装置包括射频电源101、匹配网络103、电极和空芯光纤106,射频电源101用于输出射频信号;匹配网络103的输入端与射频电源101连接,用于实现射频功率的无相移传输;电极包括内电极104和外电极105,内电极104与外电极105均为空芯圆柱体金属电极,内电极104的外径小于外电极105的内径;内电极104位于外电极105的内部,内电极104与匹配网络103的输出端正极连接,外电极105与匹配网络103的输出端地极连接后接地,空芯光纤106缠绕于内电极104的外表面,空芯光纤106的两端分别与气配装置连接;工作时,射频电源101在内电极104和外电极105之间产生交变电场,交变电场驱动空芯光纤106中的气体所含的电子往复运动,电子在运动过程中与其它粒子碰撞产生放电等离子体。 [0026] The hollow-core fiber radio system comprising a radio frequency discharge means discharging gas distribution means; a radio frequency discharge device comprises a radio frequency power source 101, a matching network 103, electrode 106 and the hollow core optical fiber, a radio frequency power supply 101 for outputting a radio frequency signal; an input matching network 103 RF power source 101 is connected to the end for enabling the RF power transfer without phase shift; electrode includes an inner electrode 104 and outer electrode 105, the inner electrode 104 and outer electrode 105 metal electrodes are empty core cylinder, the outer diameter of the inner electrode 104 smaller than the outer electrode 105 inside diameter; an inner electrode 104 is located inside the outer electrode 105, the output of the inner electrode 104 and the matching network 103 is upright connected, the output terminal of the outer electrode 105 and the matching network 103 is connected to ground, hollow-core fiber 106 104 wound around the outer surface of the electrode, both ends of the hollow core optical fiber 106 are respectively connected to the gas distribution means; operation, an alternating electric field is generated between the RF power source 101 inner electrode 104 and outer electrode 105, an alternating electric field driving the air core electronic reciprocation of the optical fiber 106 contained in the gas, the electron motion in the discharge plasma is generated during the collision with other particles.

[0027] 本发明实施例提供的空芯光纤射频放电系统可以在微米量级的空芯光纤绕成的类螺线管状的结构中通过射频放电的方式产生等离子体。 Generating a plasma by means of RF discharge type air-core optical fiber RF discharge system provided in an embodiment [0027] The present invention can be wound into the hollow core optical fiber microns solenoid-like structure. 具有方法简单、噪音低、能量损耗小、装置结构紧凑、效率高等优点。 Has a simple, low-noise, energy loss is small, compact apparatus structure and high efficiency.

[0028] 在本发明实施例中,射频放电装置还包括与匹配网络103的输出端地极连接的金属屏蔽罩102,用于罩住匹配网络103、内电极104、外电极105以及空芯光纤106,金属屏蔽罩102可以屏蔽射频辐射。 [0028] In an embodiment of the present invention, a radio frequency discharge device further comprises a metal ground and the output terminal is connected to the matching network 103 of the shield case 102 for covering the matching network 103, inner electrodes 104 and outer electrodes 105 and the hollow core optical fiber 106, metal shield 102 may be shielded from radio frequency radiation.

[0029] 在本发明实施例中,如图2和图3所示,内电极104和外电极105均为空芯圆柱体金属电极,长度相同,两端均开口。 [0029] In the embodiment of the present invention, shown in FIGS. 2 and 3, the inner electrode 104 and outer electrode 105 are cylindrical hollow core metal electrode, the same length, open at both ends. 内电极104的外径小于外电极105空芯内径。 Diameter of the inner electrode 104 is smaller than the inner diameter of the outer electrode 105 hollow core. 内电极104置于外电极105内部。 The inner electrode 104 is placed inside the outer electrode 105. 空芯光纤106被缠绕在内电极104外表面,外电极105与内电极104间的空隙尺寸为微米量级。 Hollow core optical fiber 106 is wound around the outer surface of the inner electrode 104, the size of the gap between the inner electrode and the outer electrode 105 to 104 micrometers. 内电极104中水槽301用于通入水流进行散热。 The inner electrode 104 into tank 301 for water cooling. 内电极104两端具有与水槽301直接相连的入水口302和出水口303,入水口302和出水口303通过高密封性水管与外部冷却水系统相连,外部冷却水系统可为典型的循环水散热系统,以节约资源。 Both ends of the inner electrode 104 having the water tank 301 is directly connected to the water inlet 302 and water outlet 303, inlet 302 and outlet pipe 303 are connected by a high sealability with external cooling water system, an external cooling water system is a cooling water circulating typical system to conserve resources. 内电极104为驱动电极,外电极105为地电极。 The electrode 104 is a driving electrode, the outer electrode 105 to the ground electrode. 外电极105接地以辅助内电极104完成放电,并与金属屏蔽罩102共同屏蔽射频辐射。 The outer electrode 105 to ground to complete the auxiliary discharge electrodes 104 and 102 together with the metal shield shielded from radio frequency radiation. 为避免普通导线的趋肤效应,射频放电系统中各部件应以同轴线缆或铜带连接。 To avoid common wire skin effect, RF discharge system of each member to be connected to a coaxial cable or copper. 匹配网络与射频电源之间通过同轴线缆或铜带连接;匹配网络与电极之间通过同轴线缆或铜带连接。 Match between the network and the RF power source is connected through a coaxial cable or copper; or copper coaxial cable connection between the electrode and the matching network.

[0030] 在本发明实施例中,空芯光纤106充当放电腔体,根据空芯光纤106的外径可以调整内电极104与外电极105的直径。 [0030] In an embodiment of the present invention, the hollow core optical fiber 106 acting as the discharge chamber can be adjusted outer diameter of the inner electrode 104 and the electrode 105 according to the outer diameter of the hollow core of the optical fiber 106. 射频电源101产生的频率为兆赫兹量级,功率可调。 Frequency of the RF power source 101 generated by the order of megahertz, power adjustable. 为了实现功率源的无相移最大功率传输与注入,需要在电极与射频电源间加入匹配网络103。 In order to achieve the power source without a phase shift maximum power transfer with the injection, the need for a matching network 103 and the RF power between the electrodes. 匹配网络103、电极与空芯光纤106安置于金属屏蔽罩内。 Matching network 103, the electrode 106 and the hollow core optical fiber disposed within a metal shield. 空芯光纤缠绕于内电极外表面。 Air-core optical fiber is wound on the outer surface of the inner electrode. 内电极有出入水口以进行水冷。 The outlet for cooled electrodes discrepancy.

[0031] 在本发明实施例中,为去除容性与感性器件或是电路寄生参数造成的功率反射,应合理设计匹配网络103以保证射频放电装置的阻抗匹配。 [0031] In an embodiment of the present invention, and to remove power reflection capacitive or inductive device circuit parasitics caused shall be designed to match the RF impedance matching network 103 to ensure that the discharge device. 典型的匹配网络103多为电容电感以串联混合并联方式构成。 A typical configuration of the matching network over 103 series inductance capacitance parallel hybrid mode. 匹配网络103可以为典型的π型匹配网络,还可以为L型匹配网络等。 Matching network 103 may be a typical π-type matching network, the matching network may also be L-shaped and the like. 如图4所示,型匹配网络具体包括:电感L、第一可调电容Cl和第二可调电容C2 ;电感L的一端与所述射频电源连接,另一端与内电极连接;第一可调电容Cl的一端与所述电感L的一端连接,第一可调电容Cl的另一端接地;第二可调电容C2的一端与所述电感L的另一端连接,第二可调电容C2的另一端接地。 As shown, the 4-type matching network comprises: an inductor L, a first capacitor Cl and second adjustable tunable capacitor C2; L is the inductance of the RF power source at one end and the other end connected to the inner electrode; first One end of the capacitor Cl and the tone of one end of the inductor L is connected to the other end of the first tunable capacitive Cl; end of the second variable capacitor C2 is connected to the other end of the inductor L, a second tunable capacitor C2 other end.

[0032] 在本发明实施例中,气配装置为空芯光纤放电的气体混合、填充和抽空模块,如图5所不,气配装置包括:第一气室501、第二气室502、第一气压计503、第二气压计504、第一真空阀门505、第三气压计506、气配室507、第二真空阀门508、供气源509、第三真空阀门510、第四真空阀门511、第五真空阀门512、涡轮分子泵513和机械泵514 ;机械泵514作为气配装置的前级泵,涡轮分子泵513作为所述气配装置的后级泵,机械泵514与涡轮分子泵513组合提供气配系统和放电腔体的高度真空环境。 [0032] In an embodiment of the present invention, the gas distribution means is a gas discharge hollow waveguides mixing, filling and evacuation module, not shown in Figure 5, the gas distribution means comprises: a first air chamber 501, second air chamber 502, The first barometer 503, the second barometer 504, a first vacuum valve 505, the third pressure gauge 506, the gas distribution chamber 507, a second vacuum valve 508, gas source 509, vacuum valves 510 of the third, fourth vacuum valve 511, fifth vacuum valve 512, a turbo molecular pump 513 and a mechanical pump 514; rear stage pump before the pump 514 as a mechanical pump gas distribution means, a turbo molecular pump 513 as the air distribution apparatus, the mechanical pump 514 and a turbomolecular high vacuum pump 513 provides a combination of ambient air and discharge system with the cavity. 空芯光纤106的两端分别与第一气室501和第二气室502相连,便于充气和抽气。 Both ends of the hollow core optical fiber 106 are respectively connected to the first air chamber 501 and the second plenum 502 to facilitate inflation and evacuation. 第一气室501由与之相连的第一气压计503监测,第一气室501还依次通过第一真空阀门505和第四真空阀门511与气配室507相连;第二气室502的气压由与之相连的第二气压计504监测,气配室507与通过第二真空阀门508与多个供气源509相连,第二气室502还依次通过第三真空阀门510和第四真空阀门511与气配室507相连;气配室507的气压由与之相连的第三气压计506监测,气配室507还依次通过第四真空阀门511和第五真空阀门512与涡轮分子泵513相连。 A first air chamber 501 from the first barometer 503 monitor associated therewith, the first air passes through the first chamber 501 is also connected to the valve 505 and vacuum valve 511 and the fourth vacuum chamber 507 with gas; pressure second plenum 502 monitored by the second barometer 504 connected thereto, with the air chamber 507 through the second vacuum valve 508 is connected with a plurality of gas supply 509, second air chamber 502 further passes through vacuum valve 510 and the third fourth vacuum valve 511 and 507 connected to the gas distribution chamber; third pneumatic pressure by the gas distribution chamber 507 of the meter 506 to monitor associated therewith, with the air chamber 507 further passes through vacuum valve 511 and fourth valve 512 is connected to the fifth vacuum turbomolecular pump 513 . 气配室与多个供气源相连,用以不同配比的气体混合或提供单一的气体。 A plurality of gas distribution chamber and the gas supply is connected to or different ratio of gas mixture to provide a single gas. 气配室配以气压计,用于监测腔内气压。 Together with the gas distribution chamber pressure gauge for monitoring the pressure inside the chamber. 为确保气配系统的气密性,各部件间应以高气密性气管连接,不同接口间应以密封垫圈和接口紧固装置对接。 To ensure the air tightness of the gas distribution system, between components should be hermetic pipe connection, between different interfaces should gasket and docking interfaces fastening means. 机械泵514和涡轮分子泵513负责对整套气配装置进行抽空。 Mechanical pump 514 and a turbomolecular pump 513 is responsible for the complete evacuation gas distribution apparatus. 因空芯光纤106内径和外径非常小,所以对空芯光纤106的固定、充气和抽气操作需要通过第一气室501和第二气室502完成。 Air-core optical fiber 106 by inner and outer diameters are very small, fixed, and a pneumatic suction operation of the air-core optical fiber 106 need to first chamber 501 and a second gas plenum 502 is completed. 气配室507用于按需混合不同比例不同压强的气体。 Gas distribution chamber 507 for different pressures demand different ratios of the mixed gas. 所有真空阀门用于配合充气和抽气的不同过程进行气流控制,控制各气路连接关系,以满足抽气和充气状态下的气路连通性的不同需要,同时有效地减少工作气体的浪费。 All the different processes with vacuum valves for the pneumatic control air flow and suction is performed, the control air passage connection relationship, to meet the different needs of the communication path in the exhaust gas and inflated state, while effectively reducing waste working gas.

[0033] 本发明克服了微小尺度下电子因放电空间狭小而无法击穿和维持的困难。 [0033] The present invention overcomes the difficulties due to electronic breakdown discharge space is small and can not be maintained at a microscopic scale. 使用射频电源进行放电,放电稳定,可靠性高,放电电压低。 Using a radio frequency power supply for discharge, stable discharge, high reliability, low discharge voltage. 有别于传统垂直激励的方式能够更有效的激发工作物质中的粒子。 Unlike the traditional vertical excitation of excited species can be more effective in the working substance. 而更高的射频频率在气压较大的情况下也将带来更高的激发效率。 The higher RF frequencies in the case of larger pressure will result in higher excitation efficiency. 此外,还能消除受激粒子和粒子团的径向迁移以及放电等离子体的震荡。 Further, also by eliminating radial shock excited particles and particle groups migration and discharge plasma. 以新颖的光纤缠绕方式及电极设置方式,增加了放电的距离和激励的效率。 In a novel manner, and the optical fiber is wound electrode arrangement, increasing the distance and the excitation efficiency of the discharge.

[0034] 为了更进一步的说明本发明实施例提供的空芯光纤射频放电系统,现在结合具体实例详述如下: [0034] In order to further illustrate hollow waveguides RF discharge system provided in an embodiment of the present invention is now described in detail with reference to specific examples as follows:

[0035] 将芯径为100微米的空芯光纤106连接进放电装置。 [0035] The core diameter of 100 microns into the hollow core optical fiber 106 connected to the discharge device. 关闭供气源509与气配室507间的第二真空阀门508,打开其余所有阀门。 Off the air supply source 509 and the air chamber 507 with a second vacuum valve 508, the valve is opened all the rest. 由机械泵514将系统抽至0.5帕,再联合涡轮分子泵513将系统抽至0.001帕。 By the mechanical pump 514 pumping system to 0.5 Pa, turbomolecular pump 513 and then combined system evacuated to 0.001 Pa. 关闭气配室507与涡轮分子泵513间的第四真空阀门511,打开供气源509与气配室507间的第二真空阀门508。 Close gas distribution chamber 511 of the fourth vacuum valve 507 and turbo-molecular pump 513, 509 to open the gas supply and the second gas distribution chamber between the vacuum valves 508,507. 打开氦气源509,为气配室507先充入10托氦气。 Open the helium gas source 509, gas distribution chamber 507 is inflated with helium gas 10 Torr. 再打开氖气源509,为气配室507充入2托氖气,得到氦氖配比为5:1的混合工作气体。 Then open neon source 509, 507 is an air chamber charged with 2 torr neon, helium-neon resulting ratio of 5: 1 mixture of the working gas. 关闭供气源509与气配室507间第二真空阀门508,关闭涡轮分子泵前的第五真空阀门512,关闭涡轮分子泵513和机械泵514。 Off the air supply source 509 and the second gas distribution chamber 507 of vacuum valve 508, the fifth closing valve before the vacuum turbo molecular pump 512, turbomolecular pump 513 and close the mechanical pump 514. 打开气配室507的第四真空阀门511和两个气室前的第一真空阀门505、第三真空阀门510,为空芯光纤106充入10托混合气体后,关闭气配室507的第四真空阀门511和两个气室前的第一真空阀门505、第三真空阀门510。 After opening the gas valve with a fourth vacuum chamber 511,507 and the first vacuum valve 505 before the two air chambers, said third vacuum valve 510, an air-core optical fibers 106 to 10 Torr mixed gas into the closed air chamber 507 with the the first vacuum valve 505 before the four vacuum valves and two air chambers 511, third vacuum valve 510. 开启射频电源101,调节功率输出为100瓦,放电等离子体产生。 RF power source 101 is turned on, adjust the power output of 100 watts, generating discharge plasma.

[0036] 本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。 [0036] Those skilled in the art will readily appreciate, the above-described preferred embodiment of the present invention only but are not intended to limit the present invention, any modifications within the spirit and principle of the present invention, equivalent substitutions, and improvements, etc., should be included within the scope of the present invention.

Claims (8)

  1. 1.一种射频放电装置,其特征在于,包括: 射频电源,用于输出射频功率; 匹配网络,输入端与所述射频电源连接,用于实现射频功率的无相移传输; 电极,包括内电极和外电极,所述内电极与所述外电极均为空芯圆柱体金属电极,所述内电极的外径小于所述外电极的内径;所述内电极位于所述外电极的内部,所述内电极与所述匹配网络的输出端正极连接,所述外电极与所述匹配网络的输出端地极连接后接地;以及空芯光纤,缠绕于所述内电极的外表面,所述空芯光纤的两端分别与气配装置连接; 工作时,射频电源在内电极和外电极之间产生交变电场,交变电场驱动空芯光纤中的气体所含的电子往复运动,电子在运动过程中与其它粒子碰撞产生放电等离子体。 1. A radio frequency discharge device, characterized by comprising: a radio frequency power supply for outputting RF power; matching network, an input terminal connected to said RF power source, the RF power for achieving no phase shift transmission; electrode, comprising the and outer electrodes, the inner electrode and the outer electrode of metal electrodes are empty core cylinder, an outer diameter smaller than the inner diameter of the inner electrode to the outer electrode; said inner electrode positioned inside the outer electrode, the correct internal electrode connected to the output of the matching network, the outer electrode to the output terminal of the matching network is connected to the ground; and the hollow core optical fiber, wound on the outer surface of the inner electrode, the both ends of the hollow core optical fiber are connected to gas distribution means; operation, the RF power source to generate an alternating electric field between the inner and outer electrodes, an alternating electric field driving electronics reciprocation core fiber contained in the gas space, electrons movement collision with other particles to produce discharge plasma.
  2. 2.如权利要求1所述的射频放电装置,其特征在于,所述射频放电装置还包括与所述匹配网络的输出端地极连接的金属屏蔽罩,罩住匹配网络、内电极、外电极以及空芯光纤,用于屏蔽射频辐射。 2. The radio frequency discharge device according to claim 1, characterized in that the radio frequency discharge means further comprises a metal shield and an output terminal of the matching network is connected to ground, a matching network covering the inner electrode, the outer electrode and a hollow core optical fiber, for shielding RF radiation.
  3. 3.如权利要求1所述的射频放电装置,其特征在于,根据空芯光纤的外径调整所述内电极与所述外电极的直径。 A radio frequency discharge device according to claim 1, characterized in that the diameter of the electrode according to the outer diameter of the hollow core optical fiber to adjust the inner and the outer electrode.
  4. 4.如权利要求1所述的射频放电装置,其特征在于,所述电极还包括位于所述内电极两端的出水口和入水口。 4. The radio frequency discharge device according to claim 1, wherein said electrode further comprising an electrode located within the ends of the inlet and the outlet.
  5. 5.如权利要求1所述的射频放电装置,其特征在于,匹配网络与射频电源之间通过同轴线缆连接;匹配网络与电极之间通过铜带连接。 5. The radio frequency discharge device according to claim 1, wherein the matching network is connected through a coaxial cable between the radio frequency power supply; copper strip connection between the electrode and the matching network.
  6. 6.如权利要求1所述的射频放电装置,其特征在于,所述匹配网络包括电感、第一可调电容和第二可调电容; 电感的一端与所述射频电源连接,另一端与内电极连接; 第一可调电容的一端与所述电感的一端连接,第一可调电容的另一端接地; 第二可调电容的一端与所述电感的另一端连接,第二可调电容的另一端接地。 6. The radio frequency discharge device according to claim 1, wherein said matching network includes an inductor, first and second adjustable capacitance variable capacitor; end of the inductor and the RF power source and the other end of the inner electrode; a first variable capacitor having one end connected to one end of the inductor, the other end of the first tunable capacitive ground; a second variable capacitor having one end connected to the other end of the inductor, a second adjustable capacitor other end.
  7. 7.—种空芯光纤射频放电系统,包括射频放电装置和气配装置;其特征在于,所述射频放电装置为权利要求1-6任一项所述的射频放电装置。 7.- kinds of hollow waveguides RF discharge system comprising a gas discharge device with a radio frequency device; characterized in that the radio frequency discharge means is a radio frequency discharge device as claimed in claim any one of claims 1-6.
  8. 8.如权利要求7所述的空芯光纤射频放电系统,其特征在于,所述气配装置包括:第一气室、第二气室、第一气压计、第二气压计、第一真空阀门、第三气压计、气配室、第二真空阀门、供气源、第三真空阀门、第四真空阀门、第五真空阀门、涡轮分子泵和机械泵; 机械泵作为所述气配装置的前级泵,涡轮分子泵作为所述气配装置的后级泵,空芯光纤的两端分别与第一气室和第二气室相连,第一气室由与之相连的第一气压计监测,第一气室还依次通过第一真空阀门和第四真空阀门与气配室相连;第二气室的气压由与之相连的第二气压计监测,气配室与通过第二真空阀门与多个供气源相连,第二气室还依次通过第三真空阀门和第四真空阀门与气配室相连;气配室的气压由与之相连的第三气压计监测,气配室还依次通过第四真空阀门和第五真空阀门与涡 The hollow-core fiber 8. The radio frequency discharge system according to claim 7, wherein said gas distribution means comprises: a first plenum, the second plenum, the first barometer and second barometer, a first vacuum valve, a third pressure gauge, gas distribution chamber, the second vacuum valve, gas supply, a third vacuum valve, vacuum valves fourth, fifth vacuum valve, a turbo molecular pump and a mechanical pump; mechanical pump as said gas distribution means before the pump, a turbomolecular pump equipped with the gas-stage pump apparatus, the hollow core optical fiber ends are respectively connected to a first plenum and a second plenum, the first plenum connected thereto by a first pneumatic meter monitoring, further sequentially connected to a first plenum through the first vacuum valve and the vacuum valve and the fourth gas distribution chamber; a second pressure gauge monitoring the pressure of the second gas chamber connected thereto, through a second gas distribution chamber and the vacuum and a plurality of gas supply valve connected to the second air chamber further sequentially connected through the third and fourth vacuum valve and the vacuum valve with the air chamber; a third pressure gauge monitoring the pressure of the gas distribution chamber connected thereto, the gas distribution chamber further passes through vacuum valve and a fourth valve and a fifth scroll vacuum 分子泵相连。 Molecular pump is connected.
CN 201210524027 2012-12-07 2012-12-07 Radio frequency discharge device and hollow-core fiber radio frequency discharge system CN103025042B (en)

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