CN1159085A - HF-assisted LF medium blocking-discharge method and equipment - Google Patents
HF-assisted LF medium blocking-discharge method and equipment Download PDFInfo
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- CN1159085A CN1159085A CN 96117213 CN96117213A CN1159085A CN 1159085 A CN1159085 A CN 1159085A CN 96117213 CN96117213 CN 96117213 CN 96117213 A CN96117213 A CN 96117213A CN 1159085 A CN1159085 A CN 1159085A
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Abstract
The present invention aims at raising discharge efficiency, and features combiend discharge of main discharge and auxiliary discharge. The main discharge is large-power, LF medium blocking discharge, and the auxiliary discharge is small-power, HF medium blocking discharge, and the auxiliary discharge electrodes are between or near the main discharge electrodes. Having high electric energy utilization and performance-to-cost ratio, the discharge equipment is used widely in ozone synthesis, air and water purification, UV light soruce, gas laser, film deposition and other fields.
Description
The present invention is a kind of method and device that is used to improve electrical efficiency, belongs to the technical field of gas discharge device.
Before the present invention, the application apparatus that adopts medium blocking-discharge method to realize has miscellaneous.In more powerful discharge was used, electric discharge device generally adopted simple discharge tube system connection in series-parallel form, and its power supply can be the various waveforms of high frequency, low frequency.During the power supply of the fast rising edge power supply of high frequency, the energy injection efficiency of discharge is higher, but the efficient of high-power high-frequency power supply own is low, complex structure, cost height; During the power supply of low-frequency high-power power supply, though the efficient of power supply own is higher, require to have very high operating voltage, and the energy injection efficiency of discharge is very low.Therefore, the complete machine utilization of power efficient of application apparatus is low, cost is high.Become a big technical barrier.
The purpose of this invention is to provide a kind of auxiliary LF medium blocking-discharge method and device of high frequency that can effectively improve the electric discharge device utilization rate of electrical and improve the ratio of performance to price.
The auxiliary LF medium blocking-discharge method of high frequency of the present invention is to adopt main and auxiliary discharge combining form to discharge, and wherein main discharge is the high power low-frequency dielectric barrier discharge, and auxilliary discharge is small-power high-frequency dielectric barrier discharge or high-frequency discharge.Major-minor discharge can be transverse discharge (containing radially discharge), axially discharges or parts transversely the combination of section axial discharge.Its principle is to utilize auxilliary discharge to realize preionization, guaranteed before each discharge pulse of main discharge arrives, has certain density charged particle in the main discharge district, thereby reduce the requirement of main discharge to power supply, improve the discharge energy injection efficiency of main discharge, finally reach the complete machine utilization of power efficient of the main and auxiliary discharge application apparatus of raising and the purpose of the ratio of performance to price.
The device of realizing above method is combined by main discharge electrode and auxilliary sparking electrode, auxilliary sparking electrode place between the main discharge electrode or near, when region of discharge gas is flowing gas, auxilliary sparking electrode is placed the updrift side place of main discharge district along airflow direction.Structurally, main discharge electrode is dielectric barrier discharge (silent discharge) electrode structure, auxilliary sparking electrode is dielectric barrier discharge or high-frequency discharge structure, and main and auxiliary electrode metal partly can be pin, net, the thread and combining form between them, and the medium part surface can sanding.
The output waveform of main and auxiliary discharge power supply all can be sine wave, square wave, impulse wave etc., if with P
Main, P
AuxilliaryThe power output of representing main and auxiliary discharge power supply respectively, f
Main, f
AuxilliaryRepresent the frequency (annotating:, refer to fundamental frequency) of main and auxiliary discharge power supply respectively, generally have: P for non-sinusoidal waveform
Main＞＞P
Auxilliary
f
Main＜f
Auxilliary(0＜f
Main≤ 1MHZ).
In addition, f
Main=f
AuxilliarySituation is a special case.
The invention has the advantages that and adopted the combining form of main and auxiliary discharge to discharge, thereby improved the injection efficiency of discharge electric energy effectively, and simple in structure, especially requiring to have special superiority under the situation of high-power dielectric barrier discharge.This electric discharge device can be applicable to each application of existing dielectric barrier discharge (silent discharge), the purified treatment that, air synthetic as ozone and water pollute, makes aspects such as ultraviolet source, exciting gas laser device, deposition film.
Fig. 1 is that auxilliary sparking electrode is in the other a kind of structural representation of main discharge electrode in the structure of the present invention.Comprising auxilliary sparking electrode metal 1, auxilliary sparking electrode medium 1-1, main discharge electrode medium 2, main discharge electrode metal 3, cooling water 4, main discharge district 5, the direction of arrow indication is the direction of air-flow.
Fig. 2 is that auxilliary sparking electrode is that the plane is netted among the present invention, main discharge electrode be about the structural representation of plane symmetry structure.Auxilliary sparking electrode metal 1, main discharge electrode medium 2, main discharge electrode metal 3, main discharge district 5, auxilliary region of discharge 6 are wherein arranged.
Fig. 3 is among the present invention, a kind of structure of the shared external electrode of main and auxiliary discharge wherein has electrode metal 9 in external electrode metal 7, external electrode medium 7-1, main discharge district 5, auxilliary region of discharge 6, interior electrode medium 8, the main discharge, the interior electrode metal 10 of auxilliary discharge, air intake 11, gas outlet 12.
Fig. 4 is that main discharge electrode of the present invention is vertical mutually with auxilliary sparking electrode, and the structure of a shared rectangle discharge cavity, comprising main discharge electrode metal 3, auxilliary sparking electrode 1, medium 15, region of discharge 16.
Fig. 5 is the electric discharge device schematic diagram that adopts three power supplys, five electrodes among the present invention, and auxilliary sparking electrode 1, dielectric barrier discharge electrode 17, plate main discharge electrode 18 are wherein arranged.
Fig. 6 is that common media is a cylindrical configuration among the present invention, and comprising common media 19, arc is assisted sparking electrode 20, arc main discharge electrode 21.
Embodiment of the present invention are as follows:
Example 1 is that auxilliary sparking electrode is positioned at the other structure of main discharge electrode, and main discharge electrode medium 2 is wherein arranged; Main discharge electrode metal 3; Cooling water 4; Main discharge district 5 (gap).It is other that auxilliary sparking electrode metal 1 is positioned at main discharge electrode metal 3, and auxilliary sparking electrode metal 1 is long metal bar, and the surface is covered by auxilliary sparking electrode medium 1-1, and main discharge electrode is approximately plate symmetrical structure up and down, is provided with main discharge electrode medium 2 at its outer surface.
Auxilliary discharge is carried out between auxilliary sparking electrode and main discharge electrode.Main and auxiliary discharge is transverse discharge substantially; Air-flow is crossing current.
Example 2.Auxilliary sparking electrode is the plane network structure, and main discharge electrode metal 3 is wherein arranged, main discharge electrode medium 2; Main discharge district 5; Auxilliary sparking electrode 1 auxilliary region of discharge 6.Main discharge electrode is upper and lower plane symmetry structure, and side is provided with main discharge electrode medium 2 within it, and wherein auxilliary sparking electrode is that the plane is netted, between main discharge electrode.
Can pass through change and assist the output waveform of discharge power supply, amplitude, frequency etc., change from auxilliary region of discharge and pass density and the energy that mesh shines the electronics in main discharge district, the purpose of main discharge is controlled in realization.
Example 3: the structure of the shared external electrode of main and auxiliary discharge wherein has main discharge district 5, auxilliary region of discharge 6, external electrode metal 7, external electrode medium 7-1, electrode 9 in the interior electrode medium 8, main discharge, electrode 10 in the auxilliary discharge, air intake 11, gas outlet 12, main discharge power supply 13. auxilliary discharge power supplies 14.Inside and outside electrode is cylindrical, the shared external electrode of main and auxiliary discharge, and the inside and outside circle cylindrical electrode is coaxial, electrode medium 8 on the excircle of interior electrode, being provided with, air intake 11 and gas outlet 12 are between interior electrode and external electrode.
If adopt the same power supplies power supply, then discharge tube becomes a kind of cascaded structure distortion of conventional media barrier discharge pipe to main discharge power supply 13 with auxilliary discharge power supply 14.
Example 4. is the orthogonal and shared rectangle discharge cavity structure of main discharge electrode and auxilliary sparking electrode, as shown in Figure 4, main discharge electrode metal 3 is arranged wherein; Medium 15; Discharge cavity 16; Auxilliary sparking electrode 1.Discharge cavity is a rectangle.If feed gas, then be axial flow.Each is a pair of for main and auxiliary sparking electrode, and four electrodes all place outside the discharge cavity, and medium is positioned at the inboard of electrode.Certainly, auxilliary sparking electrode also can place (square shortens) in the chamber, also can have only an auxilliary sparking electrode, the surface coverage medium, thus reduce assisting the requirement of discharge power supply.Auxilliary discharge power supply can float ground, is particularly suitable for making the discharge tube array of series parallel structure.
Example 5 these devices are the version of three power supplys, five electrodes, and auxilliary sparking electrode is the metal bar that medium covers, and main discharge electrode is plate main discharge electrode 18, also is provided with dielectric barrier discharge electrode 17 between auxilliary sparking electrode and plate main discharge electrode.Wherein auxilliary sparking electrode is powered by the small-power high frequency electric source, dielectric barrier discharge electrode 17 is powered by middle power intermediate frequency power supply, plate main discharge electrode is powered by the high power low-frequency power supply, its course of work is by the auxiliary middle power intermediate frequency discharge of small-power high frequency, thus further auxiliary high power low-frequency main discharge.
Example 6 common media 19 are cylindrical, and main and auxiliary sparking electrode is upper and lower structure, and promptly the auxilliary sparking electrode 20 of arc is positioned at arc main discharge electrode 21 sides.
If input gas is oxygen or air, can be used as ozone generating apparatus, the device of coupling gas-vapor mix again is ozone equipment for treating water.Also can be used for the purification of contaminated air.
If input gas is laser gas, as CO
2-CO-N
2-He mist, and be equipped with the laser window system at two ends, main discharge district, speculums etc. then constitute high-power gas laser apparatus.
If gas is A
rF, Xecl, K
rF etc. can be used for making ultraviolet source.Or the like.
Just can finish the present invention according to the above.
Claims (10)
1. the LF medium blocking-discharge method that high frequency is auxiliary is characterized in that adopting the form of main and auxiliary discharge combination to discharge, and wherein main discharge is the high power low-frequency dielectric barrier discharge, and auxilliary discharge is small-power high-frequency dielectric barrier discharge or high-frequency discharge.
2. the device of the auxiliary LF medium blocking-discharge of a high frequency of realizing the described method of claim 1, it is characterized in that this device is combined by main discharge electrode and auxilliary sparking electrode, main discharge electrode is the dielectric barrier discharge electrode structure, auxilliary sparking electrode is dielectric barrier discharge or high-frequency discharge structure, auxilliary sparking electrode place between the main discharge electrode or near.
3. the device of the LF medium blocking-discharge that high frequency according to claim 2 is auxiliary is characterized in that when region of discharge gas is flowing gas, can place the updrift side place of main discharge district along air-flow with assisting sparking electrode.
4. the device of the LF medium blocking-discharge that high frequency according to claim 2 is auxiliary is characterized in that main and auxiliary electrode metal partly can be pin, net, the thread and combining form between them, and dielectric surface can sanding.
5. the device of the LF medium blocking-discharge that high frequency according to claim 3 is auxiliary, it is other to it is characterized in that auxilliary sparking electrode metal (1) is positioned at main discharge electrode metal (3), auxilliary sparking electrode metal (1) is long metal bar, the surface is covered by auxilliary sparking electrode medium (1-1), main discharge electrode metal (3) is approximately plate upper and lower symmetrical structure, is provided with main discharge electrode medium (2) at its outer surface.
6. the device of the LF medium blocking-discharge that high frequency according to claim 2 is auxiliary, it is characterized in that auxilliary sparking electrode metal (1) is netted for the plane, main discharge electrode metal (3) is for going up the plane symmetry structure down, side is provided with main discharge electrode medium (2) within it, and auxilliary sparking electrode (1) is between main discharge electrode.
7. the device of the LF medium blocking-discharge that high frequency according to claim 2 is auxiliary, it is characterized in that in the shared external electrode structure of main and auxiliary discharge, inside and outside electrode is cylindrical, the shared external electrode of main and auxiliary discharge, the inside and outside circle cylindrical electrode is coaxial, electrode medium (8) in being provided with on the excircle of interior electrode, air intake (11) and gas outlet (12) are between interior electrode and external electrode.
8. the device of the LF medium blocking-discharge that high frequency according to claim 2 is auxiliary, it is characterized in that the orthogonal and shared rectangle discharge cavity of main discharge electrode and auxilliary sparking electrode, each is a pair of for main and auxiliary sparking electrode, all place outside the discharge cavity (16), medium (15) is positioned at the inboard of electrode.
9. the device of the LF medium blocking-discharge that high frequency according to claim 2 is auxiliary, it is characterized in that this device is the version of three power supplys, five electrodes, auxilliary sparking electrode is the metal bar that medium covers, main discharge electrode is plate main discharge electrode (18), also is provided with dielectric barrier discharge electrode (17) between auxilliary sparking electrode and plate main discharge electrode.
10. the device of the LF medium blocking-discharge that high frequency according to claim 2 is auxiliary, it is characterized in that common media (19) is for cylindrical, main and auxiliary sparking electrode is upper and lower structure, and promptly the auxilliary sparking electrode (20) of arc is positioned at arc main discharge electrode (21) side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96117213 CN1075676C (en) | 1996-12-16 | 1996-12-16 | HF-assisted LF medium blocking-discharge method and equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96117213 CN1075676C (en) | 1996-12-16 | 1996-12-16 | HF-assisted LF medium blocking-discharge method and equipment |
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| Publication Number | Publication Date |
|---|---|
| CN1159085A true CN1159085A (en) | 1997-09-10 |
| CN1075676C CN1075676C (en) | 2001-11-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96117213 Expired - Fee Related CN1075676C (en) | 1996-12-16 | 1996-12-16 | HF-assisted LF medium blocking-discharge method and equipment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103037611A (en) * | 2013-01-05 | 2013-04-10 | 安徽理工大学 | Device for generating air plasma brush at atmospheric pressure |
| CN101953235B (en) * | 2008-01-31 | 2014-05-14 | 波音公司 | Dielectric barrier discharge pump apparatus and method |
| CN103841741A (en) * | 2014-03-12 | 2014-06-04 | 中国科学院电工研究所 | Barometric pressure plasma generator based on dielectric barrier discharge |
| CN106179749A (en) * | 2016-07-05 | 2016-12-07 | 北京航天爱锐科技有限责任公司 | Sparking electrode and preparation method thereof, plasma generator and air cleaning facility |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100358198C (en) * | 2005-03-02 | 2007-12-26 | 华北电力大学（北京） | Method for uniform glow discharge in atmosphere air |
-
1996
- 1996-12-16 CN CN 96117213 patent/CN1075676C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101953235B (en) * | 2008-01-31 | 2014-05-14 | 波音公司 | Dielectric barrier discharge pump apparatus and method |
| CN103037611A (en) * | 2013-01-05 | 2013-04-10 | 安徽理工大学 | Device for generating air plasma brush at atmospheric pressure |
| CN103037611B (en) * | 2013-01-05 | 2015-09-30 | 安徽理工大学 | Atmosphere air plasma brushes hair generating apparatus |
| CN103841741A (en) * | 2014-03-12 | 2014-06-04 | 中国科学院电工研究所 | Barometric pressure plasma generator based on dielectric barrier discharge |
| CN106179749A (en) * | 2016-07-05 | 2016-12-07 | 北京航天爱锐科技有限责任公司 | Sparking electrode and preparation method thereof, plasma generator and air cleaning facility |
| CN106179749B (en) * | 2016-07-05 | 2019-07-02 | 北京航天爱锐科技有限责任公司 | Discharge electrode and preparation method thereof, plasma generator and air cleaning facility |
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| Publication number | Publication date |
|---|---|
| CN1075676C (en) | 2001-11-28 |
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