CN2319112Y - Low temp. plasma industrial waste gas treatment appts. - Google Patents

Low temp. plasma industrial waste gas treatment appts. Download PDF

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Publication number
CN2319112Y
CN2319112Y CN 97242752 CN97242752U CN2319112Y CN 2319112 Y CN2319112 Y CN 2319112Y CN 97242752 CN97242752 CN 97242752 CN 97242752 U CN97242752 U CN 97242752U CN 2319112 Y CN2319112 Y CN 2319112Y
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China
Prior art keywords
pipe
plasma
low temperature
waste gas
power supply
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Expired - Fee Related
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CN 97242752
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Chinese (zh)
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侯惠奇
刘先年
张振满
潘循晳
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Fudan University
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Fudan University
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Publication of CN2319112Y publication Critical patent/CN2319112Y/en
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Abstract

The utility model belongs to the field of environment protection technology, which relates to a device that utilizes low temperature plasma to treat industrial exhaust gas. The utility model is composed of a plurality of parallel low temperature plasma discharge tubes, a power supply, a casing, etc., wherein the low temperature plasma discharge tubes adopt the structure form of an inner tube and an outer tube; an outer electrode is wound outside the outer tube in the shape of twist; an inner electrode is arranged in the inner tube. The power supply outputs continuous square waves, and the frequency is in the range of 5 kc-80 kc, and the voltage is in the range of 3 kv-30 kv and can be adjusted continuously. The utility model can work in the state of normal pressure and normal temperature and as high as 15 meters per second flow rate of the exhaust gas. The utility model can treat the exhaust gas efficiently and largely, and the range of treating exhaust gas is wide enough to reach the requirements of practicality in industries.

Description

Equipment for treating industrial waste gas of plasma in low temperature
The utility model belongs to environmental protection technical field, is a kind of device that utilizes lower-temperature plasma industrial waste gas treatment.
Along with improving constantly of social industrialization degree, also serious day by day by the problem of environmental pollution that industrial waste gas causes.Seek a kind of practical economical and practical again method degrade organic dirt and H 2S, CS 2, SO 2, hydrocarbon, fluorine Lyons, to breathe out material such as dragon be a job highly significant.In existent method, it is not too suitable to handle this class material with burning method, because materials such as fluorine Lyons, Kazakhstan dragon, polycyclic aromatic hydrocarbon have very high heat-resistant stability.Use burning method the temperature of whole system must be heated to and very highly could destroy them, cause the waste of the energy like this, can produce more serious secondary pollution again, and etching problem is arranged.Production by Catalytic Combustion Process to fluorine Lyons, to breathe out dragon be inappropriate, though effective to organic contamination, but to the improvement of big flow, high flow rate waste gas, still there are problems such as vapour lock is big, efficient is low, and sulphur, phosphorus, halogen etc. easily make catalyst poisoning, reduce thereby make catalyst life shorten performance.Also there are problems such as adsorption capacity, vapour lock, universality in the absorption-desorption method.
Show that after deliberation have a large amount of active particles in the plasma, these particles can destroy the hard-degraded substance in the environment.How utilizing plasma to come the poisonous and hard-degraded substance in the processing environment is the focus of Recent study, and the someone does a lot.For example, human corona discharge pulse such as Clements J.S produces atmospheric plasma to degraded NO, SO 2Study that (Clements J.S.et.al.IEEE Trans.Ind.Appl.1989,25 (1): 62), they are having 2.6%H 2Under the condition that O exists, initial concentration is the SO of 1000ppm 290% is removed behind discharge 5.2S.Human media such as Li Jing deaden discharge (promptly being called for short DBD) technology generation nonequilibrium plasma treatment of simulated stack gases, and (IEEE Trans.Plasma Sci.1995,23 (4): 672), they draw and remove every kgSO 2Need power consumption 75KWh.The method of human DBD such as Chang M.B discharge degraded volatile organic compounds such as formaldehyde (Environ.Sci.Technol., 1995,29:181), the initial concentration that they draw HCHO is that 100ppmv can obtain 97% dissociation yield under the voltage of 19KV.Human is also arranged with quadrat method degraded HCHO and phenol.China also has and carried out many researchs in this respect.But these present research work all do not reach the industrial practicability stage, and its subject matter is as follows:
1. most of research work will under low pressure be carried out, and can not carry out in atmosphere (normal temperature and pressure);
2. can not produce high power large volume plasma area, no practical value;
3. can not dynamically carry out in high velocity stream, also just can not be used for actual system;
4. do not have power conversion system efficiently, capacity usage ratio is low, lacks economic worth.
The purpose of this utility model be to provide a kind of can be under normal pressure (atmosphere) handle the high power low-temperature plasma device of flow regime waste gas.
The low temperature plasma emission-control equipment of the utility model design is made up of discharge of plasma in low temperature pipe, power supply and corresponding shell center, last interface and lower interface and gas-distributing pipe etc., and structure as depicted in figs. 1 and 2.Wherein plasma discharge tube 4 quantity are 1~100, are arranged in parallel in the shell center 1.From the principle, can parallel connection multi-discharge tube more.Last interface 2 and lower interface 3 are horn-like, go up (greatly) mouth and fixedly connected with center 1 both sides respectively, and (little) mouth is connected with blast pipe with air inlet pipe respectively down, and gas-distributing pipe 5 is arranged at the preceding both sides of center.Gas-distributing pipe is communicated with the interior pipe of discharge tube, so that give water flowing or ventilation.The center side has observation window 6.Its discharge tube 4 is arranged from cross section, can square arrangement, as shown in Figure 3.Also can become garden shape to arrange, as shown in Figure 4.Also can become the arrangement of other shapes.
Discharge of plasma in low temperature pipe of the present utility model is made of coaxial outer tube and interior pipe, and ventilation space is arranged between the inner and outer pipe.Its single structure as shown in Figure 6.External electrode 20 is wound in outer tube 18 outsides with the helical form form, pipe 19 the insides in interior electrode 21 places, inner and outer pipe generally adopts insulating materials such as quartz or pottery to be made, its length is generally 100~500mm, wall thickness 2-3mm, the internal diameter of outer tube is generally 20mm~100mm, and interior external diameter of pipe is generally 10~30mm.Inside and outside electrode material can adopt metal materials such as stainless steel or nickel.Interior pipe 19 can be fixed by the form of upper and lower support.Upper and lower support flat shape can be trident shape, as shown in Figure 7, does not influence waste gas and feeds in the outer tube.Interior pipe is communicated with gas-distributing pipe 5, can ventilate or water, and promptly internally electrode carries out water-cooled or air cooling.The discharge tube two ends are fixed on the center ledge by screw.
Power supply of the present utility model is made of symmetrical square wave generator and high pressure generator two parts, as shown in Figure 5.Wherein symmetrical square wave generator 7 is connected and composed through circuit by oscillator 9, bistable state frequency divider 10, buffer 11 and pulse transformer 12, in order to produce the highly square wave of symmetry.Resistance R xWith the molten C of electricity xBe used for conversion frequency.High-pressure generating circuit 8 is connected and composed through circuit by adjustable transformer 13, rectification circuit 14, filter circuit 15, high-voltage driving circuit 16 and high-tension transformer 17.High-voltage driving circuit 16 wherein is by two groups of power driver module A 1And A 2And corresponding driving device composition, each power driver module is formed in parallel by one group of NPN type high power valve, perhaps is formed in parallel by VMOS pipe (FET), also can be made up of the IGPT element.The output of the pulse transformer 12 of square-wave generator 7 is connected with the driver of two power driver modules respectively, and the output of the high-tension transformer 17 of high pressure generator 8 is connected with external electrode with the interior electrode of discharge tube 4 respectively.A plurality of discharge tubes can use a power supply after parallel connection aspect the gas circuit.At this moment requirements for power supply power is quite big.Also can be equipped with a power supply by a discharge tube, promptly a plurality of tele-release pipes can be provided with corresponding a plurality of power supply.At this moment, concerning single power supply, can power smaller.The NPN high power valve of parallel connection or the quantity of VMOS pipe in the power driver module are determined according to the size of power demand.Power for single power supply can reach more than 500 watts.
What apply at the inside and outside electrode of plasma discharge tube in the utility model is the ac high voltage source of the continuous square wave of symmetry highly, rather than common pulsed high voltage generator.And this square wave frequency is adjustable continuously in 5KC~80KC scope according to required plasma situation, and the voltage of square wave is adjustable continuously in 3KV~30KV scope.
The square wave of above-mentioned power supply also can be used sine wave instead.
In order to reduce the high temperature that the device busy state produces, can set up the ventilating fan device in center 1 both sides.
The operation principle of this device is as follows: what this device adopted is a kind of anticyclonic non-equilibrium discharge, and this discharge generation is between two electrodes, and wherein at least one covers one deck dielectric above the electrode.After connecting with the mains, the square wave high voltage that produces is added on the inside and outside electroplax, and the gas between the electrode discharges under the high voltage action of alternative electric field and produces low temperature plasma, in plasma area, there be the electronics of a large amount of average energies about 5ev, electron bombard H 2S, CS 2Deng, make H 2S or CS 2Be transformed into various active particles, as H -, S, HS +Or the like.And H -With O in the air 2Be combined into H 2O, HS +With O 2Also can produce H 2O and S or SO 2Or the like, reached removal H 2S, CS 2Effect.And for example, electron bombard CF 2Behind the clBr, produce CF 2, Cl, Br, CF 2ClBr +, CF 2Cl +The isoreactivity particle, O in these particles and the air 2Effect produces COF 2, Br 2, Cl 2Deng gas, reach and remove CF 2The effect of ClBr.
The plasma emission-control equipment of the utility model design has the following characteristics: can handle waste gas at normal temperatures and pressures; Can under reaching the state of 15 meter per seconds, the waste gas flow velocity work; Owing to obtain large volume plasma zone, can handle waste gas in a large number at a high speed, per hour can handle 2000m 3More than; The energy utilization rate height is 7W/m 3About h; The processing range of flue gas is wide, not only is applicable to H 2S, CS 2Etc. treatment of waste gas, also can be used for hydro carbons, SO 2, arene, polycyclic aromatic hydrocarbons (PAH), fluorine Lyons, breathe out treatment of wastes produced such as dragon.In addition, also can be collaborative with catalyst, other organic pollutions of degrading.Therefore, this device has reached the industrial practicability requirement of plasma treatment waste gas, is with a wide range of applications.
Description of drawings:
The emission-control equipment front elevation that Fig. 1 designs for the utility model.
The emission-control equipment side view that Fig. 2 designs for the utility model.
Fig. 3 is a discharge tube arrange icons (square) in the emission-control equipment center.
Fig. 4 is a discharge tube arrange icons (garden shape) in the emission-control equipment center.
Fig. 5 is emission-control equipment power principle figure.
Fig. 6 is a discharge of plasma in low temperature duct ligation composition in the emission-control equipment.
Fig. 7 is a discharge of plasma in low temperature pipe holder diagram in the emission-control equipment.
Wherein 1 is the center of device, and 2 is the tubaeform interface of going up that is connected with center, and 3 is lower interface, 4 is the cold plasma discharge pipe, and 5 is gas-distributing pipe, and 6 is the observation window on the center, 7 is the square-wave generator of power supply, and 8 is the high pressure generator of power supply, and 9 is the oscillator of square-wave generator, 10 is frequency divider, 11 is buffer, and 12 is pulse transformer, and 13 is adjustable transformer, 14 is rectifier, 15 is wave filter, and 16 is high-voltage driving circuit, and 17 is high-tension transformer, 18 is the discharge tube outer tube, 19 is interior pipe, and 20 is external electrode, and 21 is interior electrode, 22 is the upper bracket of discharge tube, and 23 is the discharge tube lower carriage.
Embodiment.As shown in drawings, center 1 vertical (discharge tube is axial) length 410mm of this device, width 690mm, height 400mm.The side has observation window 6, and upper and lower interface height (axially) is respectively 530mm, and (big mouthful) suitable for reading is connected with screw with the center two-port respectively.Plasma discharge tube length 300mm, outer tube 18, interior pipe 19 adopting quartz glass materials, outer tube is interior through 40mm, interior external diameter of pipe 10mm, external electrode 20 adopts stainless steel materials, is wound on the outer tube lateral surface with helical form.Interior electrode 21 is a tubulose, passes interior pipe.Interior pipe by upper and lower support 22 and 23 and outer coaxial tube fix.Totally 10 of discharge tubes, row are fixed in the center 1 side by side.The air cooling mode is promptly adopted in interior pipe ventilation.Oscillator 9 in the power supply, bistable state frequency divider 10, buffer 11, pulse transformer 12, adjustable transformer 13, rectifier 14, wave filter 15 etc. adopt common electronic circuit, 2 power driver module A 1And A 2Adopt the IGPT high power module, each module is with 1 pipe, and every pipe power is 200 watts, parallel connection.The continuous square wave frequency that produces is that 5KC~80KC is adjustable continuously, and voltage is adjustable continuously in 3KV~30KV scope, shared 10 power supplys, and promptly each discharge tube uses a power supply.
The low-temperature plasma emission-control equipment of above-mentioned design can per hour can be handled waste gas 400m in atmospheric condition work 3, and can all be suitable for, for example H multiple waste gas 2S, CS 2Deng.To H 2The S degradation rate is that 50%~85% (at flow velocity is under 9.5m/ condition second, H 2The initial concentration of S is 70mg/m 3~550mg/m 3).

Claims (4)

1. equipment for treating industrial waste gas of plasma in low temperature, form by discharge of plasma in low temperature pipe, power supply and corresponding shell center, last interface and lower interface, gas-distributing pipe, it is characterized in that the cold plasma discharge pipe has in 1~100 parallel arranged shell center, upper and lower interface flare, fixedly connected with the both sides of center respectively for its big mouthful, its osculum is connected with blast pipe with air inlet pipe respectively, and gas-distributing pipe is arranged at the center both sides, and is communicated with the interior pipe of discharge tube.
2. equipment for treating industrial waste gas of plasma in low temperature according to claim 1, it is characterized in that above-mentioned discharge tube is made of coaxial mounted outer tube and interior pipe, external electrode is wound in the shell lateral surface with the helical form form, pipe the inside in interior electrode places, outer length of tube is 100~500mm, internal diameter is 20~100mm, and interior external diameter of pipe is 10~30mm.
3. equipment for treating industrial waste gas of plasma in low temperature according to claim 1 and 2, it is characterized in that power supply is made of symmetrical square wave generator and high pressure generator, wherein the symmetrical square wave generator is by oscillator, the bistable state frequency divider, buffer, pulse transformer connects and composes through circuit, high pressure generator is by adjustable transformer, rectification circuit, filter circuit, high-voltage driving circuit and high-tension transformer connect and compose through circuit, its high-voltage driving circuit is made up of two groups of power driver modules and corresponding driving device, the output of pulse transformer is connected with the driver of two power driver modules respectively, the output of high-tension transformer respectively with plasma discharge tube in, external electrode connects.
4. equipment for treating industrial waste gas of plasma in low temperature according to claim 3 is characterized in that the frequency of the continuous square wave that power supply is exported is adjustable continuously in 5KC~80KC scope, and voltage is adjustable continuously in the 3KV-30KV scope.
CN 97242752 1997-11-28 1997-11-28 Low temp. plasma industrial waste gas treatment appts. Expired - Fee Related CN2319112Y (en)

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Application Number Priority Date Filing Date Title
CN 97242752 CN2319112Y (en) 1997-11-28 1997-11-28 Low temp. plasma industrial waste gas treatment appts.

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Application Number Priority Date Filing Date Title
CN 97242752 CN2319112Y (en) 1997-11-28 1997-11-28 Low temp. plasma industrial waste gas treatment appts.

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CN2319112Y true CN2319112Y (en) 1999-05-19

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101934190A (en) * 2010-09-14 2011-01-05 山东派力迪环保工程有限公司 Matrix type dielectric barrier discharge plasma peculiar smell gas treatment device
CN104941400A (en) * 2015-05-28 2015-09-30 哈尔滨工业大学 Discharge plasma vehicle tail gas treatment apparatus with spiral electrode rotating, and discharge plasma vehicle tail gas treatment method with spiral electrode rotating

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101934190A (en) * 2010-09-14 2011-01-05 山东派力迪环保工程有限公司 Matrix type dielectric barrier discharge plasma peculiar smell gas treatment device
CN101934190B (en) * 2010-09-14 2012-10-17 山东派力迪环保工程有限公司 Matrix type dielectric barrier discharge plasma peculiar smell gas treatment device
CN104941400A (en) * 2015-05-28 2015-09-30 哈尔滨工业大学 Discharge plasma vehicle tail gas treatment apparatus with spiral electrode rotating, and discharge plasma vehicle tail gas treatment method with spiral electrode rotating
CN104941400B (en) * 2015-05-28 2017-03-01 哈尔滨工业大学 There is discharge plasma automobile exhaust gas processing apparatus and its processing method of rotating screw type electrode

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