CN115015182A - Integrated SPR sensor based on planar optical waveguide - Google Patents
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- CN115015182A CN115015182A CN202210803239.7A CN202210803239A CN115015182A CN 115015182 A CN115015182 A CN 115015182A CN 202210803239 A CN202210803239 A CN 202210803239A CN 115015182 A CN115015182 A CN 115015182A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 72
- 229910052751 metal Inorganic materials 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- AEEAZFQPYUMBPY-UHFFFAOYSA-N [I].[W] Chemical compound [I].[W] AEEAZFQPYUMBPY-UHFFFAOYSA-N 0.000 claims description 3
- 239000004568 cement Substances 0.000 claims description 3
- 239000005350 fused silica glass Substances 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract description 2
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 26
- 238000001514 detection method Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000001883 metal evaporation Methods 0.000 description 4
- 239000003124 biologic agent Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000005102 attenuated total reflection Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 238000011898 label-free detection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
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Abstract
The invention relates to an integrated SPR sensor based on a planar optical waveguide, which comprises: the planar optical waveguide is provided with a wedge-shaped incident end face, a reflection end, a focusing cylindrical end and an exit end, the reflection end of the planar optical waveguide is bonded with a reflection grating, the focusing mirror end of the planar optical waveguide is plated with a reflection film, the exit end of the planar optical waveguide is provided with a linear array detector, and a nano metal sheet is arranged between light paths of the wedge-shaped incident end face and the reflection end on the front face of the planar optical waveguide; light beams emitted by the light source module enter the planar optical waveguide from the wedge-shaped incident end face, and the light beams are received by the linear array detector after passing through the nano metal sheet, the reflection grating and the reflection film. The beneficial effects are that: the SPR sensing and the spectrum sensing are combined, so that the system compactness is effectively improved, the size of the sensor is obviously reduced, the integration of the SPR sensor is really realized, and a new idea is provided for the miniaturization direction of the SPR sensor by the design scheme.
Description
Technical Field
The invention relates to the technical field of biosensors, in particular to an integrated SPR (surface plasmon resonance) sensor based on a planar optical waveguide.
Background
The Surface Plasmon Resonance (SPR) technology is a photoelectric Resonance phenomenon in physical optics, when incident light is totally reflected on a medium-metal Surface, free electrons on the metal Surface are orderly and collectively oscillated under coulomb force to form Surface Plasmon Waves (SPW), and when the incident light and the Surface Plasmon waves meet a certain condition, a Resonance phenomenon is generated, and at the same time, incident light energy is absorbed, and a 'descending peak' appears on a spectrum. By using the principle, the change of the refractive index of the detected sample can be judged according to the difference of the appearance positions of the descending peaks, so that the detection of different samples is realized.
The SPR technique is an important branch of the field of biosensors, has advantages of label-free detection, real-time monitoring, nondestructive detection, high sensitivity, low cost, etc. due to its own optical characteristics, and has been officially incorporated in the united states and japanese pharmacopoeias in 2016. At present, the SPR technology is widely applied to a plurality of fields of drug and biological agent development, life science and medical research, biological agent quality control, food safety evaluation and the like.
Currently, in the field of SPR biosensor research, in order to satisfy the resonance condition of SPR phenomenon, the wave vector of incident light needs to be compensated by using attenuated total reflection or diffraction principle, and the main compensation coupling structures can be divided into four types, which are prism coupling structure, waveguide coupling structure, optical fiber coupling structure and grating coupling structure. The waveguide coupling type SPR sensor is easy to combine with an MEMS technology to form a micro-nano level highly integrated detection device.
The traditional SPR sensor is mature in development, good in stability and high in detection precision, but the system is complex in structure and large in size, and cannot meet the detection requirement of current development. In recent years, in order to achieve sensor miniaturization, researchers at home and abroad have mostly focused on optimizing the sensor coupling structure for SPR sensors, neglecting that a signal detection device can be combined with a sensing module, and thus, there is a large development space for the miniaturization of SPR sensors.
Disclosure of Invention
The invention aims to overcome the problems in the prior art and provide an integrated SPR sensor based on a planar optical waveguide.
In order to achieve the technical purpose and achieve the technical effect, the invention is realized by the following technical scheme:
an integrated SPR sensor based on a planar lightwave circuit comprising:
the light source module is used for forming polarized light required by surface plasma resonance;
the planar optical waveguide is provided with a wedge-shaped incident end face, a reflection end, a focusing cylindrical end and an exit end, a reflection grating is bonded at the reflection end of the planar optical waveguide, a reflection film is plated at the focusing mirror end of the planar optical waveguide, a linear array detector is mounted at the exit end of the planar optical waveguide, and a nano metal sheet is arranged between the wedge-shaped incident end face and the reflection end on the front face of the planar optical waveguide;
and the light beam emitted by the light source module enters the planar optical waveguide from the wedge-shaped incident end face, and is received by the linear array detector after passing through the nano metal sheet, the reflection grating and the reflection film.
The wedge-shaped incident end face inclines towards the reflecting end from bottom to top.
The light source module comprises a light source, a collimating mirror and a polaroid, wherein the collimating mirror is arranged between the light source and the polaroid, and the light source is a halogen tungsten lamp, a iodine tungsten lamp or an incandescent lamp.
The invention has the beneficial effects that: the invention creatively utilizes the transmission characteristic of light beams in the planar optical waveguide, arranges the nano metal sheet in the direction of the sagittal of the planar optical waveguide and combines SPR sensing and spectrum sensing, thereby effectively improving the system compactness, obviously reducing the size of the sensor and really realizing the integration of the SPR sensor.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic diagram of the connection structure of an integrated SPR sensor according to one embodiment of the present invention;
FIG. 2 is a meridional optical path diagram of a planar optical waveguide in accordance with one embodiment of the present invention;
FIG. 3 is a sagittal optical path view of a planar optical waveguide according to one embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a planar optical waveguide according to a second embodiment of the present invention;
FIG. 5 is a meridional optical path diagram of a planar optical waveguide according to a second embodiment of the present invention;
FIG. 6 is a detection spectrum of the integrated SPR sensor of the present invention when detecting pure water;
the numbering in the figures illustrates: the device comprises a light source 1, a collimating mirror 2, a polarizing film 3, a planar optical waveguide 4, a wedge-shaped incident end face 5, a reflection grating 6, a reflection film 7, a linear array detector 8, a nano metal sheet 9 and a computer 10.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1 to 3, in a first embodiment, an integrated SPR sensor based on a planar optical waveguide includes a light source module and a planar optical waveguide 4.
The light source module comprises a light source 1, a collimating mirror 2 and a polaroid 3, wherein the central axis of the light emitting end of the light source, the central axis of the collimating mirror and the central axis of the polaroid are positioned on the same straight line, and the collimating mirror is arranged between the light source and the polaroid. The collimating mirror collects light emitted by the light source and modulates the light into a collimated polarized light beam, and the polarizing plate modulates the collimated polarized light beam into polarized light required by surface plasmon resonance. The light source is a halogen tungsten lamp.
The planar optical waveguide 4 is a fused silica plate, and the orthographic projection shape of the planar optical waveguide 4 is an 'N' shape.
The planar optical waveguide 4 is provided with a wedge-shaped incident end face 5, a reflection end, a focusing cylindrical end and an exit end, the wedge-shaped incident end face 5 inclines towards the reflection end from bottom to top, and the included angle between the wedge-shaped incident end face 5 and the bottom face of the planar optical waveguide 4 is 60 degrees; the reflection end of the planar optical waveguide 4 is bonded with a reflection grating 6 by ultraviolet curing optical cement; the focusing mirror end of the planar optical waveguide 4 is plated with a reflecting film 7, and the reflecting film 7 is formed by depositing silver on the end of the gathering cylindrical surface by adopting a metal evaporation technology; a linear array detector 8 is arranged at the emergent end of the planar optical waveguide 4, and a nano metal sheet 9 is arranged between the wedge-shaped incident end face and the light path of the reflection end on the front face of the planar optical waveguide 4; the nano metal sheet 9 is formed by depositing gold on the planar optical waveguide 4 by adopting a metal evaporation technology, the nano metal sheet 9 is square, the side length of the nano metal sheet 9 is 15 mm, and the thickness of the nano metal sheet 9 is 50 nm.
Light beams emitted by the light source module enter the planar optical waveguide 4 from the wedge-shaped incident end face 5, the light beams are received by the linear array detector 8 after passing through the nano metal sheet 9, the reflection grating 6 and the reflection film 7, the linear array detector 8 is connected with the computer 10 through a data line, and the received data are processed by the computer.
The minimum distance between the nano metal sheet and the bottom edge of the wedge-shaped incident end face is L min The calculation formula is as follows:
θ 0 ＝90°-α
L min ＝D tanθ
in the above formula: theta 0 The incident angle of polarized light on the wedge-shaped incident end face, n0, n1, alpha, theta and the angle between the wedge-shaped incident end face and the bottom face of the planar optical waveguideAnd D is the thickness of the planar optical waveguide.
The detection principle is as follows: when the detection is carried out, a sample to be detected is dripped on the surface of the nano metal sheet, the sample to be detected is distributed on the nano metal sheet in a hemispherical shape, light beams of polarized light emitted by the light source module enter the planar optical waveguide, the light beams are transmitted forwards in a total reflection mode in the meridian direction, when the light beams reach the position of the nano metal sheet, the planar optical waveguide, the nano metal sheet and the sample to be detected form a three-layer SPR excitation structure in the sagittal direction, the light beams generate SPR phenomenon at the position, then the light beams are continuously transmitted to the reflection grating in the total reflection mode, the light beams are subjected to light splitting through the reflection grating and then reflected through the reflection film at the focusing cylindrical surface end, so that the light beams are converged onto the linear array detector, and are received by the linear array detector and transmitted to the computer for data processing.
In the second embodiment shown in fig. 4 and 5, an integrated SPR sensor based on a planar optical waveguide includes a light source module and a planar optical waveguide.
The light source module comprises a light source, a collimating mirror and a polaroid, wherein a light outlet end central shaft of the light source, a central shaft of the collimating mirror and a central shaft of the polaroid are positioned on the same straight line, and the collimating mirror is arranged between the light source and the polaroid. The collimating mirror collects light emitted by the light source and modulates the light into a collimated polarized light beam, and the polarizing plate modulates the collimated polarized light beam into polarized light required by surface plasmon resonance. The light source is a iodine tungsten lamp.
The planar optical waveguide is a fused quartz plate, and the orthographic projection shape of the planar optical waveguide is in a shape of a '4'.
The planar optical waveguide is provided with a wedge-shaped incident end face, a reflection end, a focusing cylindrical end and an exit end, the wedge-shaped incident end face inclines towards the reflection end from bottom to top, and an included angle between the wedge-shaped incident end face and the bottom face of the planar optical waveguide is 45 degrees; the reflection end of the planar optical waveguide is bonded with a reflection grating by ultraviolet curing optical cement; the focusing mirror end of the planar optical waveguide is plated with a reflecting film, and the reflecting film is formed by depositing silver on the end of the focusing cylindrical surface by adopting a metal evaporation technology; the emergent end of the planar optical waveguide is provided with a linear array detector, and the front surface of the planar optical waveguide is provided with a nano metal sheet between the wedge-shaped incident end surface and the light path of the reflecting end; the nano metal sheet is formed by depositing gold on the planar optical waveguide by adopting a metal evaporation technology, the nano metal sheet is square, the side length of the nano metal sheet is 12 mm, and the thickness of the nano metal sheet is 50 nm.
The thickness of the planar optical waveguide is 2.5 mm.
In addition to the description of the first and second embodiments, the light source may be an incandescent lamp. The side length of the nano-metal sheet can also be 10 mm, 16 mm, 18 mm or 20 mm.
The included angle between the wedge-shaped incident end face and the bottom face of the planar optical waveguide is 30 degrees at minimum, and the included angle between the wedge-shaped incident end face and the bottom face of the planar optical waveguide is 89 degrees at maximum.
The linear array detector can be replaced by other photodetectors, and the working principle is the same.
Pure water was detected by using the integrated SPR sensor, and a detection spectrum shown in fig. 6 was obtained.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (10)
1. An integrated SPR sensor based on a planar optical waveguide comprising:
the light source module is used for forming polarized light required by surface plasma resonance;
the planar optical waveguide is provided with a wedge-shaped incident end face, a reflection end, a focusing cylindrical end and an exit end, a reflection grating is bonded at the reflection end of the planar optical waveguide, a reflection film is plated at the focusing mirror end of the planar optical waveguide, a linear array detector is mounted at the exit end of the planar optical waveguide, and a nano metal sheet is arranged between the wedge-shaped incident end face and the reflection end on the front face of the planar optical waveguide;
and the light beam emitted by the light source module enters the planar optical waveguide from the wedge-shaped incident end face, and is received by the linear array detector after passing through the nano metal sheet, the reflection grating and the reflection film.
2. The integrated-type SPR sensor of claim 1, wherein: the orthographic projection shape of the planar optical waveguide is an N shape or a 4 shape.
3. The integrated-type SPR sensor of claim 1, wherein: the planar optical waveguide is a fused quartz plate.
4. The integrated-type SPR sensor of claim 1, wherein: the thickness of the nano metal sheet is 50 nanometers.
5. The integrated-type SPR sensor of claim 1, wherein: the nanometer metal sheet is square, and the side length of the nanometer metal sheet is 10-20 mm.
6. The integrated-type SPR sensor of claim 1, wherein: the wedge-shaped incident end face inclines towards the reflecting end from bottom to top.
7. The integrated-mode SPR sensor of claim 6 wherein: the included angle between the wedge-shaped incident end face and the bottom face of the planar optical waveguide is 60 degrees.
8. The integrated-type SPR sensor of claim 1, wherein: the reflection grating is adhered to the reflection end of the planar optical waveguide by ultraviolet curing optical cement.
9. The integrated-type SPR sensor of claim 1, wherein: the light source module comprises a light source, a collimating mirror and a polaroid, wherein the collimating mirror is arranged between the light source and the polaroid.
10. The integrated-mode SPR sensor of claim 9, wherein: the light source is a halogen tungsten lamp, a iodine tungsten lamp or an incandescent lamp.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210803239.7A CN115015182B (en) | 2022-07-07 | 2022-07-07 | Integrated SPR sensor based on planar optical waveguide |
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| CN202210803239.7A CN115015182B (en) | 2022-07-07 | 2022-07-07 | Integrated SPR sensor based on planar optical waveguide |
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| CN115015182B CN115015182B (en) | 2024-05-14 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162345A (en) * | 2000-11-22 | 2002-06-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide spr phenomenon measuring chip with spectroscopic function and spr phenomenon measuring device |
| US20060109471A1 (en) * | 2004-11-22 | 2006-05-25 | Chii-Wann Lin | Miniature surface plasmon resonance waveguide device with sinusoidal curvature compensation |
| CN106841121A (en) * | 2017-04-12 | 2017-06-13 | 清华大学深圳研究生院 | A kind of SPR biochemical sensors based on ridge optical waveguide |
| CN113324954A (en) * | 2021-05-29 | 2021-08-31 | 东北师范大学 | Prism coupling surface plasmon resonance test system based on spectral imaging |
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2022
- 2022-07-07 CN CN202210803239.7A patent/CN115015182B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162345A (en) * | 2000-11-22 | 2002-06-07 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide spr phenomenon measuring chip with spectroscopic function and spr phenomenon measuring device |
| US20060109471A1 (en) * | 2004-11-22 | 2006-05-25 | Chii-Wann Lin | Miniature surface plasmon resonance waveguide device with sinusoidal curvature compensation |
| CN106841121A (en) * | 2017-04-12 | 2017-06-13 | 清华大学深圳研究生院 | A kind of SPR biochemical sensors based on ridge optical waveguide |
| WO2018188137A1 (en) * | 2017-04-12 | 2018-10-18 | 清华大学深圳研究生院 | Ridge waveguide-based spr biochemical sensor |
| CN113324954A (en) * | 2021-05-29 | 2021-08-31 | 东北师范大学 | Prism coupling surface plasmon resonance test system based on spectral imaging |
Non-Patent Citations (3)
| Title |
|---|
| CUN LONG LI: "An inline waveguide-to-microstrip transition for wideband millimeter-wave applications", MICROWAVE & OPTICAL TECHNOLOGY LETTERS, 5 December 2021 (2021-12-05) * |
| 佘硕铖: "基于SPR的纳米光学传感器的设计及传输特性分析", CNKI硕士学位论文, 15 January 2023 (2023-01-15) * |
| 周翠霞: "基于微型光谱仪的表面等离子体共振传感技术研究", CNKI硕士学位论文电子期刊, 15 January 2020 (2020-01-15) * |
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