CN113324954A - Prism coupling surface plasmon resonance test system based on spectral imaging - Google Patents

Prism coupling surface plasmon resonance test system based on spectral imaging Download PDF

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Publication number
CN113324954A
CN113324954A CN202110595742.3A CN202110595742A CN113324954A CN 113324954 A CN113324954 A CN 113324954A CN 202110595742 A CN202110595742 A CN 202110595742A CN 113324954 A CN113324954 A CN 113324954A
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light
prism
image detector
metal film
concave mirror
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CN202110595742.3A
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Chinese (zh)
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王春亮
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Northeastern University China
Northeast Normal University
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Northeast Normal University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • G01N21/553Attenuated total reflection and using surface plasmons
    • G01N21/554Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

Abstract

The invention discloses a prism coupling surface plasmon resonance test system based on spectral imaging, which comprises a light source and further comprises: the device comprises a light-proof sheet with a small hole in the center, a polarizing plate, a first concave mirror, a second concave mirror, a grating, a prism/metal film, a reflecting device and an image detector. The invention adopts the continuous spectrum as incident light, uses the two-dimensional image detector to detect the reflected light intensity, and can obtain the complete information of the SPP excited by different light wavelengths and different incidence angles through single data acquisition of the two-dimensional image detector, thereby analyzing the relationship between the light wavelength and the incidence angle of the excited SPP; the invention has high testing speed, and can greatly reduce the influence of the property change of the sample on the result in the detection process; the system does not comprise a mechanical rotating part, and interference caused by mechanical movement does not exist in the data acquisition process.

Description

Prism coupling surface plasmon resonance test system based on spectral imaging
Technical Field
The invention relates to the technical field of optical detection, in particular to a prism coupling surface plasmon resonance testing system based on spectral imaging.
Background
Surface Plasmon Resonance (SPR) is a common test method in the fields of physics, chemistry, life science, etc., and is mainly used for detecting the change of the refractive index of a solution, and further detecting the concentration of a liquid and the conditions of life and chemical reactions. The SPR technology does not need to mark a detection sample, can realize real-time and rapid detection and has high sensitivity. Meanwhile, SPR also has important application value in the fields of nano optics, photonics and the like, for example, Exciton-Polariton (Exciton-Polariton) eigenmodes are generally analyzed by variable-angle SPR spectrum.
The principle of SPR detection is shown in fig. 1, and the basic principle is that under a certain condition, evanescent waves generated by total reflection of incident light at a prism/metal interface can excite Surface plasmons (SPP for short) on the upper Surface of a metal nano-film, and energy is transferred from the incident light to the SPP, thereby reducing the intensity of reflected light. An SPP is a surface wave propagating along a metal/dielectric interface that is generated by the collective oscillatory coupling of electromagnetic waves with free electrons. There is a definite relationship between the propagation constant of the SPP and frequency, which is determined by the refractive indices of the metal and the dielectric. Only when the wave-vector component of the incident light in the direction along the interface (depending on the incident angle) is equal to the propagation constant of the SPP, and the frequency of the incident light is also equal to the frequency of the SPP, the energy of the incident light can be transferred to the SPP, causing a decrease in the intensity of the reflected light. That is, there is also a definite relationship between the frequency (wavelength) of the incident light that excites the SPP and the angle of incidence. When a certain substance to be measured is attached to the surface of the noble metal, the refractive index of the dielectric above the metal film changes, so that the relationship between the SPP propagation constant and the frequency is changed, and therefore, the relationship between the incident light frequency and the incident angle of the excited SPP is also changed. The basic idea of SPR is to reverse the refractive index of a dielectric by measuring the wavelength of incident light as the intensity of reflected light decreases, as a function of angle of incidence.
Currently, there are three main types of SPR sensing schemes:
1. the reflected light is received by a spectrometer, as shown in fig. 2(a), using white light detection from a continuum light source. Such schemes can be divided into two cases:
1) the incident angle is fixed, the spectrum of the reflected light is detected by a spectrometer, and a wavelength-reflectivity curve is drawn. The advantage of such a scheme is the ability to detect the presence of SPPs excited at each wavelength within a continuous band; the disadvantage is that only a single angle of incidence information is available.
2) And changing the incidence angle, and sequentially detecting the spectrum of the reflected light at different incidence angles by using a spectrometer to finally obtain the condition of the optically excited SPP with different wavelengths. The scheme can adopt a coaxial double-layer rotary table, two rotary arms are respectively fixed on the double-layer rotary table, and then a light source and a spectrometer are respectively fixed on the two rotary arms. During the test, the angle of incidence was varied, while the angle and position of the spectrometer were varied. At each angle of incidence, information can be obtained for a different wavelength of light-excited SPP. The advantage of this approach is that a complete correspondence of the excitation SPP wavelength to the angle of incidence can be obtained. The disadvantages are that the position and angle of the incident light and the spectrometer need to be changed synchronously in small steps during the test, long test time is needed, and if the properties of the sample are changed during the test, the test result is wrong. Meanwhile, in order to obtain an accurate measurement result, the test system has very high requirements on the stability of a mechanical rotating system and also has very strict requirements on a working environment.
2. The intensity of the reflected light is detected by an intensity detector using a single wavelength laser as the incident light, as shown in fig. 2 (b). The proposal can adopt a coaxial double-layer turntable, two spiral arms are respectively fixed on the double-layer turntable, and then a light source and an intensity detector are respectively fixed on the two spiral arms. During the test, the angle of incidence was varied while the angle and position of the detector was varied. At each incident angle, the intensity of a reflected light can be obtained, and finally, a curve of the incident angle-the reflected light intensity is drawn. The data obtained with such schemes typically contains only information for a single wavelength of incident light.
3. The intensity of the reflected light is detected by an image detector such as a line CCD using a single wavelength laser as the incident light, as shown in fig. 2 (c). Such schemes may focus the expanded laser light with a lens such that the light incident on the prism/metal interface comprises a continuous distribution of angles of incidence over a range. In the reflected light, light at different angles reaches different positions of the image detector, and an angle-reflectivity curve is drawn. The scheme has the advantages that the reflectivity of the continuously distributed incident angles can be obtained through one-time collection of image detectors such as a CCD (charge coupled device) and the like, and the change of the refractive index of a sample to be detected can be detected in real time. However, such schemes can only obtain information for a single wavelength of incident light at one acquisition.
In summary, none of the above schemes can achieve simultaneous obtaining of reflectivity information corresponding to different angles and different wavelengths of light by a single data acquisition.
Disclosure of Invention
The invention aims to provide a prism coupling surface plasmon resonance testing system based on spectral imaging.
In order to achieve the purpose, the invention is implemented according to the following technical scheme:
a prism-coupled surface plasmon resonance testing system based on spectral imaging, comprising a light source, the testing system further comprising: the device comprises a light-tight sheet with a small hole in the center, a polarizing plate, a first concave mirror, a second concave mirror, a grating, a prism/metal film, a reflecting device and an image detector;
the sample to be detected is fixed on a metal film of a prism/metal film, the prism/metal film is fixed on a reflection light path of a second concave mirror, the second concave mirror converges parallel light, and a focal plane of the second concave mirror is positioned on a prism/metal film interface; the reflecting device is fixed on a reflecting light path below the prism/metal film, and the image detector is arranged on the reflecting light path of the reflecting device.
As a further preferable aspect of the present invention, the reflecting mirror is one of a cylindrical reflecting mirror, a cylindrical lens, and a plano-convex cylindrical mirror having a semicircular cross section.
As a further preferable aspect of the present invention, the light source is a white light source.
As a further preferable aspect of the present invention, the image detector is an area-array CCD camera.
The principle of the invention is as follows: the invention uses grating to decompose white light into monochromatic light with continuous wavelength distribution, and the light with different wavelengths is incident to different positions of the glass/metal interface under the coordination of the concave reflector. For each wavelength of incident light, a continuous distribution of angles of incidence over a range is included. The reflected light intensities corresponding to different incident angles and different wavelengths are detected by a two-dimensional image detector (such as an area array CCD camera) under the cooperation of a cylindrical reflector (or a lens). The method can simultaneously obtain the information of the excitation SPP with different incident angles and different wavelengths through single acquisition of the two-dimensional image detector, and further can detect the angle-wavelength information of the excitation SPP in real time.
Compared with the prior art, the invention has the following beneficial effects:
the invention adopts the continuous spectrum as incident light, uses the two-dimensional image detector to detect the reflected light intensity, and can obtain the complete information of the SPP excited by different light wavelengths and different incidence angles through single data acquisition of the two-dimensional image detector, thereby analyzing the relationship between the light wavelength and the incidence angle of the excited SPP;
the invention has high testing speed, and can greatly reduce the influence of the property change of the sample on the result in the detection process;
if the image detector is set to be in a continuous acquisition mode, the optical wavelength-angle relation of the excited SPP can be monitored in real time;
the system does not comprise a mechanical rotating part, and interference caused by mechanical movement does not exist in the data acquisition process.
Drawings
Fig. 1 is a schematic diagram of the principle of surface plasmon resonance detection in the prior art.
Fig. 2 is a schematic diagram of a typical structure of an image detector for receiving different incident light sources in the prior art: (a) receiving the continuous spectrum incidence by a spectrometer; (b) the single-wavelength laser is incident and received by an intensity detector; (c) the single-wavelength laser is focused and then enters the laser, and is received by an image detector (CCD).
FIG. 3 is a schematic structural diagram of a test system according to the present invention.
FIG. 4 shows the result of numerical simulation of SPP of a 50nm thick silver film.
Fig. 5 is a numerical simulation result of single-time acquisition of 50nm thick silver film SPP by a turntable single-time scanning or a one-dimensional image detector (linear array CCD) in the prior art: (a) a single angle of incidence; (b) a single wavelength of light.
Fig. 6 is a graph of exciton-polariton phenomenon formed by strong coupling of SPP obtainable by a single data acquisition with a semiconductor exciton using the present invention, which is a numerical simulation result.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. The specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
As shown in fig. 3, the present embodiment provides a prism-coupled surface plasmon resonance test system based on spectral imaging, which includes a light source 1, and the test system further includes: the device comprises a light-tight sheet 2 with a small hole in the center, a polarizing sheet 3, a first concave mirror 4, a second concave mirror 6, a grating 5, a prism/metal film, a cylindrical reflector 9 and an image detector 10;
the light-tight sheet 2 with the small hole in the center, the polaroid 3 and the first concave mirror 4 are sequentially fixed on an emergent light path of the light source 1, the light-tight sheet 2 with the small hole in the center, the polaroid 3 and the first concave mirror 4 are arranged perpendicular to the emergent light path of the light source 1, the focus of the first concave mirror 4 is positioned at the small hole of the light-tight sheet 2 with the small hole in the center, the center of the grating 5 and the emergent light path of the light source 1 are at the same height, the first concave mirror 4 reflects light to form parallel light to enter the grating 5, the second concave mirror 6 is fixed on the reflected light path of the grating 5, the prism/metal film consists of a prism 8 and a metal film 7, the metal film 7 is positioned on one surface of the prism 8, the sample to be detected is fixed on the metal film 7 of the prism/metal film, and the prism/metal film is fixed on the reflected light path of the second concave mirror 6, the second concave mirror 6 converges the parallel light and the focal plane of the second concave mirror 6 is located at the prism/metal film interface; the cylindrical surface reflector 9 is fixed on the reflection light path of the prism/metal film, and the image detector 10 is arranged on the reflection light path of the cylindrical surface reflector 9, as shown in fig. 3, all the parts are distributed on two layers with different heights: the reflecting device (cylindrical surface reflecting mirror 9) and the image detector 10 are positioned at the lower layer; all other elements are located on the upper layer.
In this embodiment, as shown in fig. 3, after white light (continuum) is emitted from the light source, the white light first passes through a small hole at the center of the opaque sheet 2 to form a point light source, and the transmission direction of the polarizer 3 is set to be the x direction, so that the light is in a TM (transverse magnetic) mode when entering the sample; the first concave mirror M1 with the focus at the small hole changes the light into parallel light and enters the grating; the grating decomposes the light with different wavelengths into different emergent directions, the second concave mirror M2 converges the parallel light, the focal plane is positioned at the prism/metal film interface, and the light with each wavelength is converged into a light spot at the prism/metal film interface to form a color line along the y direction; the spot for each wavelength contains a continuous distribution of angles of incidence (primarily in the x-z plane) over a range. The light emitted from the prism is reflected by a cylindrical reflector to a two-dimensional image detector such as an area array CCD. According to the size of the image detector, reasonably designing the distance from the prism/metal film interface to the prism and the distance from the prism to the image detector to ensure that light emitted from the light spot corresponding to each wavelength at the prism/metal film interface is converged into a line along the x direction on the image detector, and different positions on the line correspond to different reflection (incidence) angles of the light at the prism/metal interface; then reflected to an image detector through a cylindrical reflector, and different positions in the y direction correspond to different wavelengths; different positions in the x-direction correspond to different angles of incidence (at the prism/metal interface).
Of course, in the actual use process, the cylindrical mirror of the present embodiment may be replaced by a cylindrical lens or a plano-convex cylindrical mirror with a semicircular cross section.
The prism coupling surface plasmon resonance testing system based on spectral imaging can realize detection of a sample to be detected on a prism/metal film interface, and the specific detection principle is as follows: the white light is decomposed into monochromatic light with continuously distributed wavelengths by a grating, the light with different wavelengths is incident to different positions of a glass/metal interface under the matching of a concave reflector, the incident light with each wavelength comprises continuously distributed incident angles within a certain range, and the reflected light intensity corresponding to different incident angles and different wavelengths is detected by a two-dimensional image detector (such as an area array CCD camera) under the matching of a cylindrical reflector (or a lens). The method can simultaneously obtain the information of the excitation SPP with different incident angles and different wavelengths through single acquisition of the two-dimensional image detector, and further can detect the angle-wavelength information of the excitation SPP in real time.
Based on the working principle of the present invention, the data form obtained by a single acquisition of the image detector is shown in fig. 4. The abscissa and ordinate correspond to different incident angles and wavelengths, respectively. The magnitude of the intensity (or reflectivity) of the reflected light is represented by different gray scales: lighter means stronger reflection; deeper indicates weaker reflection. The dark areas in fig. 4 reflect that the incident light excites the SPP and energy is transferred from the incident light to the SPP, and thus the reflected intensity is reduced. The trend in the dark areas reflects the relationship between the wavelength and the angle of incidence required for the incident light to excite the SPP.
The result of a single data acquisition by the image detector (as shown in fig. 4) of the present invention is significantly different from the prior art (as shown in fig. 2). In the existing technical solution (as shown in fig. 2), the data form acquired by a single scan of the turntable or a single acquisition of the one-dimensional image detector (linear array CCD) is shown in fig. 5, which is a curve of the reflectivity varying with the wavelength [ fig. 5(a) ] or the incident angle [ fig. 5(b) ]. The data of the two-dimensional image detector only contains information of a single incident angle [ fig. 5(a) ] or a single light wavelength [ fig. 5(b) ], and the scheme provided by the invention can simultaneously obtain all information of a certain incident angle range and a certain light wavelength range through single data acquisition of the two-dimensional image detector (area array CCD).
Compared with the existing scheme (as shown in fig. 2), the technical scheme of the invention can obtain richer information of the incident light excited SPP, and has good practical value in the scientific and technical research of the front edge. For example, in the research of forming exciton-polarized excimer by mixing SPP and semiconductor exciton, the data shown in fig. 6 can be obtained by single acquisition of a two-dimensional image detector (area array CCD) by using the technical solution of the present invention. The two dark regions that do not intersect in the figure are important features of exciton-polaritons. Such results are obtained with prior art solutions by repeated, multiple scans and data acquisition procedures.
The technical solution of the present invention is not limited to the limitations of the above specific embodiments, and all technical modifications made according to the technical solution of the present invention fall within the protection scope of the present invention.

Claims (4)

1. A prism coupling surface plasmon resonance test system based on spectral imaging comprises a light source, and is characterized in that the test system further comprises: the device comprises a light-tight sheet with a small hole in the center, a polarizing plate, a first concave mirror, a second concave mirror, a grating, a prism/metal film, a reflecting device and an image detector;
the sample to be detected is fixed on a metal film of a prism/metal film, the prism/metal film is fixed on a reflection light path of a second concave mirror, the second concave mirror converges parallel light, and a focal plane of the second concave mirror is positioned on a prism/metal film interface; the reflecting device is fixed on a reflecting light path below the prism/metal film, and the image detector is arranged on the reflecting light path of the reflecting device.
2. The spectral imaging based prism coupled surface plasmon resonance testing system of claim 1, wherein: the reflector is one of a cylindrical reflector, a cylindrical lens and a plano-convex cylindrical mirror with a semicircular section.
3. The spectral imaging based prism coupled surface plasmon resonance testing system of claim 1, wherein: the light source is a white light source.
4. The spectral imaging based prism coupled surface plasmon resonance testing system of claim 1, wherein: the image detector is an area array CCD camera.
CN202110595742.3A 2021-05-29 2021-05-29 Prism coupling surface plasmon resonance test system based on spectral imaging Pending CN113324954A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114895722A (en) * 2022-05-17 2022-08-12 南京理工大学 Humidity regulation control and detection device and humidity detection method
CN115015182A (en) * 2022-07-07 2022-09-06 合肥工业大学 Integrated SPR sensor based on planar optical waveguide
CN115015182B (en) * 2022-07-07 2024-05-14 合肥工业大学 Integrated SPR sensor based on planar optical waveguide

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000155093A (en) * 1998-02-05 2000-06-06 Fuji Photo Film Co Ltd Surface plasmon sensor
JP2002357544A (en) * 2001-03-27 2002-12-13 Fuji Photo Film Co Ltd Measuring apparatus
US20040061860A1 (en) * 2002-09-27 2004-04-01 Fuji Photo Film Co., Ltd. Measuring method and apparatus using attenuated total reflection
JP2006084361A (en) * 2004-09-16 2006-03-30 Canon Inc Apparatus and method for acquiring target substance data
US20070109541A1 (en) * 2003-04-23 2007-05-17 Japan Science And Technology Agency Differential surface plasmon resonance measuring device and its measuring method
JP2008203187A (en) * 2007-02-22 2008-09-04 Fujifilm Corp Surface plasmon sensor, and sensing device using the same
CN101451952A (en) * 2008-12-01 2009-06-10 华东师范大学 Method implementing wideband optical spectrum surface plasma resonance
CN104535545A (en) * 2014-12-31 2015-04-22 中国科学技术大学 Imagination measurement device and method based on metal film SPR color dispersion
CN107764776A (en) * 2017-04-18 2018-03-06 南京大学 Multi-wavelength adjustable meter surface plasma resonance imaging device and its application

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000155093A (en) * 1998-02-05 2000-06-06 Fuji Photo Film Co Ltd Surface plasmon sensor
JP2002357544A (en) * 2001-03-27 2002-12-13 Fuji Photo Film Co Ltd Measuring apparatus
US20040061860A1 (en) * 2002-09-27 2004-04-01 Fuji Photo Film Co., Ltd. Measuring method and apparatus using attenuated total reflection
US20070109541A1 (en) * 2003-04-23 2007-05-17 Japan Science And Technology Agency Differential surface plasmon resonance measuring device and its measuring method
JP2006084361A (en) * 2004-09-16 2006-03-30 Canon Inc Apparatus and method for acquiring target substance data
JP2008203187A (en) * 2007-02-22 2008-09-04 Fujifilm Corp Surface plasmon sensor, and sensing device using the same
CN101451952A (en) * 2008-12-01 2009-06-10 华东师范大学 Method implementing wideband optical spectrum surface plasma resonance
CN104535545A (en) * 2014-12-31 2015-04-22 中国科学技术大学 Imagination measurement device and method based on metal film SPR color dispersion
CN107764776A (en) * 2017-04-18 2018-03-06 南京大学 Multi-wavelength adjustable meter surface plasma resonance imaging device and its application

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114895722A (en) * 2022-05-17 2022-08-12 南京理工大学 Humidity regulation control and detection device and humidity detection method
CN114895722B (en) * 2022-05-17 2024-05-03 南京理工大学 Humidity adjustment control and detection device and humidity detection method
CN115015182A (en) * 2022-07-07 2022-09-06 合肥工业大学 Integrated SPR sensor based on planar optical waveguide
CN115015182B (en) * 2022-07-07 2024-05-14 合肥工业大学 Integrated SPR sensor based on planar optical waveguide

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Application publication date: 20210831