CN114965311A - High-temperature visible-infrared spectrum measuring device and measuring method - Google Patents
High-temperature visible-infrared spectrum measuring device and measuring method Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000002329 infrared spectrum Methods 0.000 title abstract description 5
- 238000001228 spectrum Methods 0.000 claims abstract description 63
- 238000005259 measurement Methods 0.000 claims abstract description 62
- 230000005540 biological transmission Effects 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims abstract description 7
- 238000012360 testing method Methods 0.000 claims description 42
- 230000003287 optical effect Effects 0.000 claims description 19
- 230000003595 spectral effect Effects 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 13
- 230000004044 response Effects 0.000 claims description 8
- 238000004566 IR spectroscopy Methods 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000001055 reflectance spectroscopy Methods 0.000 claims description 4
- 238000002310 reflectometry Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 238000002235 transmission spectroscopy Methods 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 abstract description 34
- 239000000463 material Substances 0.000 abstract description 14
- 238000002834 transmittance Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000000411 transmission spectrum Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010226 confocal imaging Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005328 electron beam physical vapour deposition Methods 0.000 description 1
- 239000003337 fertilizer Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000009532 heart rate measurement Methods 0.000 description 1
- 238000002188 infrared transmission spectroscopy Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The invention discloses a high-temperature visible-infrared spectrum measuring device and a measuring method. In the measuring process, the spatial shielding of the sample self-radiation signal at high temperature and the time sequence control of the transmission/reflection spectrum signal acquisition are adopted, so that the light source signal intensity and the signal to noise ratio of the sample self-radiation signal are improved, the accuracy and the reliability of the spectrum measurement are improved, and the performance of the thermal radiation protection material is directly evaluated. The temperature control assembly can adjust the measurement temperature, the measurement distance and the like of a sample, and realizes the transmission/reflection spectrum measurement in a complex environment.
Description
Technical Field
The invention relates to the field of spectral measurement, in particular to a high-temperature visible-infrared spectral measurement device and a measurement method.
Background
In the field of aircraft engines, the thermal radiation protection performance of a thermal protection material is directly related to the protection effect of the thermal protection material on an engine matrix, and therefore the thermal protection performance of the thermal protection material needs to be evaluated. The heat radiation resistance of the thermal protection material is determined by the transmittance and the reflectivity of the thermal protection material, and the transmittance/the reflectivity of the thermal protection material can be measured, so that the protection characteristic can be directly evaluated.
Meanwhile, the transmission/reflection rate of the thermal protection material is influenced by temperature, particularly the temperature of the thermal protection material can reach 1700 ℃ when an aeroengine working chamber is burnt, the generated radiation heat flow is about 2.3 multiplied by 105W/m2, 95% of radiation energy is distributed in an infrared band of 0.5-9.5 mu m, and the thermal protection material has a strong thermal radiation effect. Thermal radiation can directly alter the optical properties of the material, affecting its transmittance/reflectance and thus its protective properties. Therefore, the measurement of the transmission/reflection rate of the material at different wavelengths at high temperature is an indispensable parameter for evaluating the thermal radiation protection performance of the material and accurately predicting the surface temperature of the substrate.
Currently common spectral measurement devices include spectrophotometers and fourier transform spectrometers. In the former, light beams including light rays with different wavelengths are spatially separated by a light splitting element such as a diffraction grating, and then the transmittance/reflectance of a sample is measured and the spectrum obtained is recorded. The interference intensity of the two beams of light is changed in a sine mode along with the uniform motion of the mirror, the frequency of the interference intensity is in positive correlation with the wave number of the incident light, and the recorded intensity change is subjected to Fourier transform to obtain a measurement spectrum. The existing spectrum measuring device has the following limitations for measuring the transmission/reflection spectrum of a sample under a high-temperature condition:
(1) most of light sources applied to visible-infrared band spectrum tests are thermal light sources, such as heated halogen tungsten lamps or silicon carbide rods. The radiant energy of the thermal light source is uniformly distributed in space, the power of the light source in the directions of the sample and the detector is limited, the penetration capacity is weak, and the energy density of the light source along the testing direction is difficult to improve in an optical focusing mode. When the sample to be measured is heated to a higher temperature, for example above 1300K, it itself acts as a source of thermal radiation, and the radiation energy is mostly in the test band. Therefore, for both the spectroscopic spectrometer and the fourier transform spectrometer, the radiation signal of the sample itself can cause a great disturbance to the measurement of the spectrum.
(2) In the measurement process of the existing spectrum measurement device, a photoelectric detector responds to light source radiation and a radiation signal of a sample at all times, and the strong radiation energy of the sample can cause signal saturation of the detector at high temperature.
(3) The sample has high radiation power at high temperature, and the safety and stability of the detector can be influenced by the high-temperature radiation heating effect.
(4) The laser light source selected by part of the spectrum measuring device has the advantages of good collimation, high power and the like, but most of lasers have single wavelength or need complicated structures such as optical parametric oscillation, amplification and the like, so that the measurement of absorption spectrums such as transmission, reflection and the like is difficult to realize.
In order to improve the ratio of the light source signal to the radiation signal of the sample and obtain reliable measurement results, the current method for improving the signal-to-noise ratio includes (1) performing amplitude modulation on the light source signal and (2) adding an optical filter on a receiving optical path. The former needs to be equipped with a demodulation system with complex modulation and an amplitude modulator, and is only suitable for measuring equipment with a single wavelength light source. When the sample is heated to 1000-1500 ℃, the radiation energy of the sample is mostly in a visible-infrared measurement waveband. Therefore, when the transmission wavelength of the light source is close to the radiation wavelength of the sample, the latter cannot extract the light source signal through the filter.
Patent No. CN108088812A proposes the use of a high power light source to enhance the transmission intensity of the light source. Patent No. CN1091255C proposes a confocal imaging filtering method for filtering out infrared radiation from other objects in the measurement system. However, the influence of the self-radiation signal of the sample on the signal-to-noise ratio of the test result under the high-temperature condition is not considered.
In order to solve the safety problem of the optical measurement system in a high temperature environment, patent No. [ CN103969226A ] proposes a spectral measurement system using a shutter system to isolate the high temperature and the dust environment. But the shutter response speed has higher requirements, most of the shutter response time is in millisecond magnitude and far longer than the period of pulse laser, the shutter needs to be kept open in the transmission spectrum test process, and the protection effect on an optical test system is very limited.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a high-temperature visible-infrared spectrum measuring device which is used for improving the signal-to-noise ratio of a light source transmission/reflection signal and a sample self radiation signal, obtaining an accurate and reliable transmission/reflection spectrum and effectively protecting an optical measuring component. The specific technical scheme of the invention is as follows:
a high temperature visible-infrared transmission/reflection spectroscopy apparatus comprising: light source subassembly, light path subassembly, accuse temperature subassembly, spectral measurement subassembly and control assembly, wherein:
the light source component selects a short pulse laser to provide pulse laser in a measured wavelength range, and comprises one or more pulse lasers.
The light path components comprise a fiber collimator, a dichroic mirror, an off-axis parabolic reflector, a beam lifter, precise pinholes with different apertures, a polarizer and the like. The fiber collimator is used to further improve the collimation of the laser beam. The off-axis parabolic reflector is used to further focus the laser beam and adjust the beam angle. The beam raiser is used to change the propagation direction of the transmitted beam into the spectral measurement assembly. The aperture of the precise pinhole is selected according to the size of the focused light beam, so that the radiation area of the sample is reduced on the premise that the laser beam passes through the precise pinhole completely. The direction of the polarizer is consistent with the direction of the laser light source, only the radiation light of the sample in a specific direction is allowed to pass through, and the interference of the radiation signal of the sample per se is further reduced.
The temperature control assembly comprises a temperature control member, a motion member and a shutter shielding member. The temperature control member is fixed on the moving member and used for heating the sample to a specified temperature and maintaining the constant temperature. The moving member includes a three-dimensional moving platform for adjusting the measurement position of the sample. The shutter shielding component is used for physically isolating the high-temperature sample from the optical path component and the spectral measurement component, and the influence of sample radiation on the optical path component, the spectral measurement component and the like in the temperature rise process is avoided. In the testing process, the shutter shielding component is closed when the temperature is higher than a set value, so that the damage to other components caused by radiation heating of a high-temperature sample is avoided.
The spectrometer component in the spectrum measurement assembly is used for measuring spectrum signals, and the time sequence acquisition component is used for controlling the response time of the spectrometer component and obtaining the intensity of the sample transmitted light beam and the intensity of the sample reflected light beam at different moments. The light source assembly, the shutter control component and the spectrum measurement component are connected into the control component, and the control component reads time sequence and energy information of the light source assembly and extracts and analyzes transmission/reflection spectrum data collected by the spectrum measurement component.
The effective focal length of the off-axis parabolic reflector is greater than the working distance of the temperature control member; the polarization wavelength of the polarizer comprises and is larger than the wavelength range of the laser; the precision pinhole adopts a diaphragm with an adjustable light through hole; the motion component adopts a multi-axis multi-degree-of-freedom platform; the spectrometer component adopts a grating spectrometer or an array spectrometer, and the response range of the spectrometer comprises and is larger than the wavelength range of the laser.
The invention provides a measuring method of a high-temperature visible-infrared transmission/reflection spectrum measuring device, which comprises the following specific steps:
s1: focusing and adjusting an optical path;
s1-1: placing and connecting the components according to the figure 1, placing and fixing the test sample on the temperature control component;
s1-2: the control assembly is opened and the light source assembly and the shutter shielding member are turned on by the control assembly. The dichroic mirror is positioned and angled to transmit the incident laser beam and reflect the beam reflected by the test specimen. The angle of the polarizer is adjusted so that all the laser light passes through. Adjusting the position of the off-axis parabolic reflector, adjusting the motion component to adjust the position of the temperature control component, wherein the light spot is positioned on the surface of the test sample and is focused to the minimum;
s1-3: taking down a test sample, opening the spectrum measurement assembly, selecting a precision pinhole with a proper size, adjusting the positions of a shutter shielding component, the precision pinhole and an off-axis parabolic reflector, and adjusting the angle of a polarizer to ensure that all laser beams can enter the spectrum measurement assembly;
s1-4: closing the light source assembly, shutter shield member and spectral measurement assembly;
s2: heating and insulating a test sample;
s2-1: placing and fixing a test sample on a temperature control member;
s2-2: starting a temperature control component, heating a test sample to a specified temperature, and preserving heat until the temperature is stable;
s3: transmission/reflection spectroscopy;
s3-1: opening the light source component, the shutter shielding component and the spectrum measuring component, and collecting information such as pulse time sequence, pulse energy and the like of the light source component in real time by the control component;
s3-2: after further collimation of the laser beam by the optical fiber collimator, focusing the laser beam by the off-axis parabolic reflector and changing the direction of the laser beam so that the focused laser beam passes through the polarizer, the precision pinhole and the shutter shielding member and then reaches the surface of the test sample;
s3-3: the transmitted laser beam and the spectrum radiated by the test sample sequentially pass through a shutter shielding component, a precision pinhole and a polarizer below the temperature control component, and enter the spectrum measurement component after the propagation direction of the laser beam and the spectrum is changed by the beam lifter;
s3-4: the laser beam reflected by the surface of the test sample and the spectrum radiated by the laser beam sequentially pass through a shutter shielding component, a precise pinhole and a polarizer above the temperature control assembly, and then are reflected by the off-axis parabolic reflector and the dichroic mirror to enter the spectrum measurement assembly;
s3-5: the control component collects signals received by the spectrometer and controls the time sequence control component to only respond to the signals within the time range of the laser pulse width;
s4: processing a measurement result;
s4-1: integrating the spectrum signal through a time sequence control component, and obtaining a transmission/reflection spectrum by taking a ratio of the integrated spectrum signal to the collected energy in the step S3-1;
s4-2: closing the light source assembly, shutter shield member and spectral measurement assembly;
s4-3: and closing the temperature control member, cooling the sample to be tested to room temperature, and taking down the sample.
The invention has the following beneficial effects:
1. after the laser beam is focused by using the off-axis parabolic reflector and the precision pinhole, the precision pinhole allows the laser beam to completely pass through, but the radiation area of the sample is reduced to be consistent with that of the diaphragm through hole, and the radiation power of the sample at high temperature can be reduced by 75% on the premise of not losing the energy of the incident beam.
2. By utilizing the time sequence acquisition component, only signals within the time range of the laser pulse width are acquired in each laser pulse period, the self radiation signal interference of the sample in the fertilizer pulse period can be effectively reduced, the signal-to-noise ratio is effectively improved, and the accuracy of the sample transmission/reflection spectrum measurement at high temperature is improved.
3. The polarizer is selected by matching with a laser light source, so that the transmitted/reflected light beams can completely pass through, and simultaneously, only the sample self-radiated light in a specific direction is allowed to pass through, the intensity of the sample self-radiated signal is further reduced, and the signal-to-noise ratio is improved.
4. When the signal to noise ratio is improved by utilizing space shielding and time sequence collection, the precise pinhole and the shutter shielding component physically isolate the sample radiation energy in space, the shutter shielding component is automatically closed when the temperature is higher than the set temperature, the spectral measurement assembly and other optical components are effectively protected under the combined action, and the running stability of the measuring device and the safety of the measuring device are ensured.
5. The device can freely adjust the sample measurement temperature, the measurement distance and the like, and realize the measurement of the transmission/reflection spectrum of the sample in a complex environment.
6. Each component of the device is relatively independent, can be flexibly selected according to actual measurement requirements, can be freely combined, and reduces the cost of the device.
Drawings
FIG. 1 is a schematic view of a high temperature visible-infrared spectroscopy apparatus of the present invention;
FIG. 2 is a schematic diagram of a partial structure of the optical path module and the temperature control module;
FIG. 3 is a schematic diagram of a signal timing acquisition process provided by the present invention;
FIG. 4 is a schematic view of a measurement sample;
FIG. 5 is a schematic diagram illustrating a timing distribution of a transmission pulse signal and a laser pulse collected by the control module in the embodiment, and FIG. 5(b) is a partially enlarged view of FIG. 5 (a);
FIG. 6 is a schematic representation of the transmission spectrum of the sample measured at 1200 ℃.
FIG. 7 is a graph showing the comparison of the intensity of the sample's own radiation with the intensity of the light source's transmission during a single pulse measurement time.
1-a light source assembly; 2-a fiber collimator; a 3-dichroic mirror; 4-off-axis parabolic mirror; 5-temperature control member; 6-off-axis parabolic mirror; 7-a beam lifter; 8-a spectral measurement assembly; a 9-polarizer; 10-precision pinhole; 11-a shutter shielding member; 12-a shutter shielding member; 13-precision pinholes; 14-polarizer.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.
Detailed description of the preferred embodiment 1
As shown in fig. 1-2, the present embodiment provides a high temperature visible-infrared spectroscopy apparatus, which includes a light source assembly, a light path assembly, a temperature control assembly, a spectrum measurement assembly, and a control assembly.
In this embodiment, except for the control module, other modules are disposed on the optical anti-vibration platform and can be fixed on the optical platform by screws.
The light source assembly of the present embodiment is a continuous spectrum pulse laser, and the laser parameters are as follows: the wavelength range is 0.4-4.8 μm, the pulse frequency of the light source is 250KHz, and the pulse width is 100 ps.
The optical path component of the present embodiment is composed of an optical fiber collimator 2, a dichroic mirror 3, an off-axis parabolic mirror 4, an off-axis parabolic mirror 6, a beam lifter 7, a polarizer 9, a precision pinhole 10, a precision pinhole 13, and a polarizer 14. The reflection focal length of the off-axis parabolic reflector is 50.8mm, and the reflectivity within the range of 0.4-4.8 mu m is larger than 96%. The diameter of the precision pinhole was 50 μm.
The temperature control assembly of this embodiment is composed of a shutter shielding member 11, a temperature control member 5, a moving member and a shutter shielding member 12, and the temperature control member 5 is fixed on the moving member.
The shutter shielding assembly 11 and the shutter shielding assembly 12 of the present embodiment are connected to the control assembly, the light aperture of the shutter is 1/4 inches, the response time is 5ms, the shutter overheat protection device is opened when the temperature is higher than 50 ℃, and the shutter is closed.
The spectrum measurement assembly of the embodiment comprises two grating spectrometers and a time sequence control component, the measurement ranges of the grating spectrometers are 0.2-1.0 μm and 0.8-16 μm respectively, and the response time is 10 ns. The sampling frequency of the timing acquisition means of the present embodiment is 300 MHz.
The light source assembly and the spectral measurement assembly in this embodiment are both connected with the control assembly.
The measurement sample of the embodiment is the YSZ coating material which is most widely applied to the surface of the blade of the aircraft engine. The measurement sample was prepared by electron beam physical vapor deposition and the coating sample was deposited on a graphite substrate. After heat treatment at 1000 ℃ for 5 hours under atmospheric conditions, the graphite substrate was removed, and a coating sample having a thickness of 100 μm was obtained as shown in FIG. 4.
Based on the same inventive concept, the invention also provides a high-temperature visible-infrared spectrum measuring method, which comprises the following steps in specific implementation:
s1: focusing and adjusting an optical path;
s1-1: placing and connecting the components as shown in FIG. 1, placing and fixing the test sample on the temperature control member 5;
s1-2: opening the control component, starting the light source component and the shutter shielding component 11 by the control component, and adjusting the position and the angle of the dichroic mirror 3 to ensure that the dichroic mirror transmits the incident laser beam and reflects the beam reflected by the test sample; adjusting the angle of the polarizer 9 to allow all laser to pass through; adjusting the positions of the off-axis parabolic reflector 4 and the temperature control member 5 to enable the light spot to be positioned on the surface of the test sample and focus to the minimum, wherein the maximum diameter of the laser light spot is about 38 mu m;
s1-3: taking down a test sample, opening the spectrum measuring assembly, selecting a precision pinhole with the diameter of 80 mu m, adjusting the positions of the shutter shielding component 12, the precision pinhole 13 and the off-axis parabolic reflector 6, and adjusting the angle of the polarizer 14 to ensure that all laser beams can enter the spectrum measuring assembly;
s1-4: closing the light source assembly, shutter shielding members 11, 12 and spectral measuring assembly;
s2: heating and insulating a test sample;
s2-1: placing and fixing a test sample on the temperature control member 5;
s2-2: starting the temperature control member 5, heating the test sample to 1200 ℃, and keeping the temperature for 10min until the temperature is stable, wherein the heating speed is 30 ℃/min;
s3: transmission/reflection spectroscopy;
s3-1: opening the light source assembly, the shutter shielding members 11 and 12 and the spectrum measuring assembly, and collecting pulse time sequence and pulse energy information of the light source assembly in real time by the control assembly;
s3-2: after being further collimated by the optical fiber collimator 2, the laser beam is focused by the off-axis parabolic reflector 4 and the direction of the beam is changed, and the beam is changed from the horizontal direction to the vertical direction. The focused light beam passes through a polarizer 9, a precision pinhole 10 and a shutter shielding member 11 and then reaches the surface of a test sample;
s3-3: the transmitted laser beam and the spectrum radiated by the test sample sequentially pass through a shutter shielding component 12, a precision pinhole 13 and a polarizer 14 below the temperature control component, the propagation direction of the laser beam and the spectrum is changed by a beam lifter 7 and then the laser beam enters the spectrum measurement component, and only the radiation light of the sample with the same direction as that of the polaroid can pass through the spectrum measurement component;
s3-4: the laser beam reflected by the surface of the test sample and the spectrum radiated by the laser beam sequentially pass through a shutter shielding component 11, a precision pinhole 10 and a polarizer 9 above the temperature control component, and are reflected by an off-axis parabolic reflector 4 and a dichroic mirror 3 to enter a spectrum measuring component;
s3-5: the control component collects signals received by the spectrometer and controls the time sequence control component to only respond to the signals within the time range of the laser pulse width;
s4: processing a measurement result;
s4-1: integrating the spectrum signal through a time sequence control component, and obtaining a transmission/reflection spectrum by taking a ratio of the integrated spectrum signal to the collected energy in the step S3-1;
s4-2: closing the light source assembly, shutter shielding members 11, 12 and spectral measuring assembly; the radiation intensity of the sample is measured, and the measuring time period of the spectrometer is consistent with that when the laser is not turned off. The ratio of the radiation intensity of the sample itself to the transmission spectrum intensity measured by the spectrometer in a single pulse time is shown in fig. 7 when the wavelength is 2 μm, and the radiation intensity of the sample itself is negligible.
S4-3: and closing the temperature control member, cooling the sample to be tested to room temperature, and taking down the sample.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the previous descriptions, numerous specific details were set forth to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and the scope of the present invention is not limited by the specific embodiments disclosed.
Claims (5)
1. The utility model provides a high temperature visible-infrared spectroscopy measuring device which characterized in that, includes light source subassembly, light path subassembly, accuse temperature subassembly, spectral measurement subassembly and control assembly, wherein:
(1) the light source components are one or more ultrafast pulse lasers, the laser wavelength range covers a wave band of 0.4-4.8 mu m, the laser pulse width is less than 2ns, the repetition frequency is 0.1-2 MHz, and the single pulse energy is more than or equal to 0.5 nJ/nm;
(2) the light path component is used for improving the collimation of a laser beam, further focusing to reduce the area of a light spot and adjusting the direction of the light beam, and comprises an optical fiber collimator, a dichroic mirror, an off-axis parabolic reflector, a light beam lifter, precise pinholes with different apertures and a polarizer, wherein the effective focal length of the off-axis parabolic reflector is more than or equal to 20mm, the surface of the off-axis parabolic reflector is plated with a protective film, the average reflectivity is more than 96% in the range of 0.4-4.8 mu m, the precise pinholes adopt diaphragms with adjustable light through holes, the aperture range of the diaphragms is 10-100 mu m, and the polarization wavelength of the polarizer is 0.4-4.8 mu m;
(3) the temperature control assembly comprises a temperature control member, a motion member and a shutter shielding member, the temperature control member is used for heating a test sample and maintaining the test sample at a specified temperature, the heating temperature range is 1000-1500 ℃, the working distance is larger than 15mm, the temperature control precision is smaller than +/-2 ℃, the motion member can move along the three-dimensional direction, the moving distance is larger than or equal to 10mm and is used for adjusting the measuring distance of the test sample, the shutter shielding member is used for physically isolating the test sample at a high temperature from the light path assembly and the spectrum measuring assembly and protecting the stability of the light path assembly and the safety of the spectrum measuring assembly, the diameter of a light through hole of the shutter shielding member is 0.1-10 mm, the response time of a shutter is smaller than or equal to 10ms, and the working temperature of the shutter is smaller than or equal to 50 ℃;
(4) the spectrum measurement assembly comprises a grating component and a spectrometer and is used for measuring the spectrum reflected by a light source and transmitted through a test sample, and the spectrum measurement assembly is characterized in that the response time is less than or equal to 25ns, and the measurement range covers and is greater than the wave band of 0.4-4.8 mu m;
(5) the control assembly comprises a time sequence control component and is used for collecting information of the light source assembly, controlling the opening of the shutter shielding component and controlling the measurement process of the spectrum measurement assembly.
2. The apparatus according to claim 1, wherein the dichroic mirror and the off-axis parabolic mirror of the optical path assembly are spaced from the temperature control member of the temperature control assembly by a distance of at least 15 mm.
3. A high temperature visible-infrared spectroscopy apparatus as claimed in claim 1 wherein one or more spectrometers are used, the spectrometers being either grating spectrometers or array spectrometers.
4. A high temperature visible-infrared spectroscopy apparatus as claimed in claim 1, wherein the timing control means is a high speed data acquisition card or a high speed lock-in amplifier, and the data acquisition frequency of the timing control means is 1000 to 5000 times the pulse frequency of the light source module.
5. A measuring method of a high temperature visible-infrared spectroscopy apparatus according to any one of claims 1 to 4, comprising the steps of:
s1: focusing and adjusting an optical path;
s1-1: placing and connecting the components according to the figure 1, placing and fixing the test sample on the temperature control component;
s1-2: opening the control component, starting the light source component and the shutter shielding component by the control component, and adjusting the position and the angle of the dichroic mirror to enable the dichroic mirror to transmit the incident laser beam and reflect the beam reflected by the test sample; adjusting the angle of the polarizer to enable all laser to pass through; adjusting the positions of the off-axis parabolic reflector and the temperature control member to enable the light spots to be positioned on the surface of the test sample and focus the light spots to the minimum;
s1-3: taking down a test sample, opening the spectrum measurement assembly, selecting a precision pinhole with a proper size, adjusting the positions of a shutter shielding component, the precision pinhole and an off-axis parabolic reflector, and adjusting the angle of a polarizer to ensure that all laser beams can enter the spectrum measurement assembly;
s1-4: closing the light source assembly, shutter shield member and spectral measurement assembly;
s2: heating and insulating a test sample;
s2-1: placing and fixing a test sample on a temperature control member;
s2-2: starting a temperature control component, heating a test sample to a specified temperature, and preserving heat until the temperature is stable;
s3: transmission/reflection spectroscopy;
s3-1: opening the light source component, the shutter shielding component and the spectrum measuring component, and collecting pulse time sequence and pulse energy information of the light source component in real time by the control component;
s3-2: after further collimation of the laser beam by the optical fiber collimator, focusing the laser beam by the off-axis parabolic reflector and changing the direction of the laser beam so that the focused laser beam passes through the polarizer, the precision pinhole and the shutter shielding member and then reaches the surface of the test sample;
s3-3: the transmitted laser beam and the spectrum radiated by the test sample sequentially pass through a shutter shielding component, a precision pinhole and a polarizer below the temperature control component, and enter the spectrum measurement component after the propagation direction of the laser beam and the spectrum is changed by the beam lifter;
s3-4: the laser beam reflected by the surface of the test sample and the spectrum radiated by the laser beam sequentially pass through a shutter shielding component, a precision pinhole and a polarizer above the temperature control assembly, and then are reflected by an off-axis parabolic reflector and a dichroic mirror to enter a spectrum measuring assembly;
s3-5: the control component collects signals received by the spectrometer and controls the time sequence control component to only respond to the signals within the time range of the laser pulse width;
s4: processing a measurement result;
s4-1: integrating the spectrum signal through a time sequence control component, and calculating a transmission/reflection spectrum by taking a ratio of the integrated spectrum signal to the collected energy in the step S3-1;
s4-2: closing the light source assembly, shutter shield member and spectral measurement assembly;
s4-3: and closing the temperature control member, cooling the sample to be tested to room temperature, and taking down the sample.
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