CN114965311B - High-temperature visible-infrared spectrum measuring device and measuring method - Google Patents
High-temperature visible-infrared spectrum measuring device and measuring method Download PDFInfo
- Publication number
- CN114965311B CN114965311B CN202210501283.2A CN202210501283A CN114965311B CN 114965311 B CN114965311 B CN 114965311B CN 202210501283 A CN202210501283 A CN 202210501283A CN 114965311 B CN114965311 B CN 114965311B
- Authority
- CN
- China
- Prior art keywords
- assembly
- spectrum
- temperature
- component
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002329 infrared spectrum Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000001228 spectrum Methods 0.000 claims abstract description 72
- 238000005259 measurement Methods 0.000 claims abstract description 41
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 claims abstract description 5
- 238000012360 testing method Methods 0.000 claims description 44
- 230000003287 optical effect Effects 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000013307 optical fiber Substances 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 8
- 238000002310 reflectometry Methods 0.000 claims description 6
- 238000001055 reflectance spectroscopy Methods 0.000 claims description 4
- 238000000691 measurement method Methods 0.000 claims description 3
- 238000002235 transmission spectroscopy Methods 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 2
- 230000010287 polarization Effects 0.000 claims 1
- 230000005855 radiation Effects 0.000 abstract description 26
- 239000000463 material Substances 0.000 abstract description 13
- 238000010586 diagram Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000000411 transmission spectrum Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010226 confocal imaging Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005328 electron beam physical vapour deposition Methods 0.000 description 1
- 239000003337 fertilizer Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000009532 heart rate measurement Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention discloses a high-temperature visible-infrared spectrum measuring device and a measuring method. In the measuring process, through the space shielding of the self-radiation signal of the sample at high temperature and the time sequence control of the transmission/reflection spectrum signal acquisition, the signal intensity of the light source and the signal to noise ratio of the self-radiation signal of the sample are improved, so that the accuracy and the credibility of spectrum measurement are improved, and the performance of the thermal radiation protection material is further directly evaluated. The temperature control component can be used for adjusting the measurement temperature, the measurement distance and the like of a sample, and realizing transmission/reflection spectrum measurement in a complex environment.
Description
Technical Field
The invention relates to the field of spectrum measurement, in particular to a high-temperature visible-infrared spectrum measurement device and a measurement method.
Background
In the field of aeroengines, the heat radiation protection performance of heat protection materials is directly related to the protection effect of the heat protection materials on an engine matrix, so that the heat protection performance of the heat protection materials needs to be evaluated. The heat radiation resistance of the heat protection material is determined by the transmissivity and reflectivity, and the transmissivity/reflectivity of the heat protection material is measured, so that the protection characteristic of the heat protection material can be directly evaluated.
Meanwhile, the transmittance/reflectivity of the heat protection material is affected by temperature, particularly the temperature can reach 1700 ℃ when the working chamber of the aeroengine burns, the generated radiant heat flow is about 2.3 multiplied by 105W/m < 2 >, and 95% of radiant energy is distributed in an infrared band of 0.5-9.5 mu m, so that the heat protection material has a strong heat radiation effect. Thermal radiation can directly change the optical properties of the material, affecting its transmissivity/reflectivity and thus the protective properties. Therefore, measuring the transmittance/reflectance of the material at different wavelengths at high temperature is an indispensable parameter for evaluating the thermal radiation protection performance of the material and accurately predicting the surface temperature of the substrate.
Currently common spectroscopic measurement devices include spectroscopic spectrometers and fourier transform spectrometers. The former uses a diffraction grating and other light-splitting elements to spatially separate light beams containing light rays with different wavelengths, and then tests the transmittance/reflectance of a sample and records the obtained spectrum. The latter divides the incident light into two beams through a beam splitter, the interference intensity of the two beams of light follows the uniform motion of the mirror and presents sinusoidal variation, the frequency is positively correlated with the wave number of the incident light, and the recorded intensity variation is subjected to Fourier transformation to obtain a measurement spectrum. The existing spectrum measuring device has the following limitations on measuring the transmission/reflection spectrum of a sample under the high-temperature condition:
(1) The light source used for visible-infrared band spectrum test is mostly a thermal light source, such as a heated halogen tungsten lamp or a silicon carbide rod. The radiant energy of the thermal light source is uniformly distributed in space, the light source power in the directions of the sample and the detector is limited, the penetrating capacity is weak, and the energy density of the light source along the test direction is difficult to improve in an optical focusing mode. When the sample to be measured is heated to a higher temperature, such as above 1300K, it itself corresponds to a source of thermal radiation and the radiation energy is mostly in the test band. Thus, for both spectrospectrometers and fourier transform spectrometers, the radiation signal of the sample itself can cause significant interference with the testing of the spectrum.
(2) In the current spectrum measuring device, a photoelectric detector responds to the radiation signals of a light source and a sample at all moments, and the stronger radiation energy of the sample can cause the saturation of the detector signals at high temperature.
(3) The sample itself has very high radiation power at high temperature, and the high temperature radiation heating effect can affect the safety and stability of the detector.
(4) The laser light source selected by the partial spectrum measuring device has the advantages of good collimation, high power and the like, but most of lasers are single wavelength, or complicated optical parametric oscillation, amplification and other structures are needed, and the measurement of absorption spectrums such as transmission, reflection and the like is difficult to realize.
In order to increase the ratio of the light source signal to the self-radiated signal of the sample and obtain a reliable measurement result, the current method for increasing the signal-to-noise ratio comprises (1) performing light amplitude modulation on the light source signal and (2) adding an optical filter on a receiving light path. The former needs to be provided with a demodulation system and an optical amplitude modulator which are complicated in modulation, and is only suitable for measuring equipment with a single wavelength light source. When the sample is heated to 1000-1500 ℃, its own radiant energy is mostly in the visible-infrared measurement band. Therefore, when the transmission wavelength of the light source is close to the self-radiation wavelength of the sample, the latter cannot extract the light source signal through the filter.
The patent number CN108088812a proposes the use of a high power light source to enhance the transmitted intensity of the light source. The patent number CN1091255C proposes a confocal imaging filtering method to filter out infrared radiation from other objects in the measurement system. However, the influence of the self-radiation signal of the sample on the signal to noise ratio of the test result under the high temperature condition is not considered.
Aiming at the safety problem of an optical measurement system in a high-temperature environment, the patent with the patent number of [ CN103969226A ] proposes a spectrum measurement system which uses a shutter system to isolate high-temperature and dust environments. However, the response speed of the shutter is high, most of shutter response time is in the millisecond order and is far longer than the period of the pulse laser, the shutter needs to be kept open in the transmission spectrum test process, and the protection effect on the optical test system is very limited.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a high-temperature visible-infrared spectrum measuring device which is used for improving the signal to noise ratio of a light source transmission/reflection signal and a sample self-radiation signal, obtaining an accurate and reliable transmission/reflection spectrum and effectively protecting an optical measuring component. The specific technical scheme of the invention is as follows:
A high temperature visible-infrared transmission/reflection spectrometry apparatus comprising: light source subassembly, light path subassembly, accuse temperature subassembly, spectral measurement subassembly and control assembly, wherein:
the light source component adopts a short pulse laser to provide pulse laser with measured wavelength range, and comprises one or more pulse lasers.
The light path component comprises an optical fiber collimator, a dichroic mirror, an off-axis parabolic reflector, a light beam lifter, precise pinholes with different apertures, a polarizer and the like. The optical fiber collimator is used for further improving the collimation of the laser beam. The off-axis parabolic mirror is used to further focus the laser beam and adjust the beam angle. The beam booster is used for changing the propagation direction of the transmitted beam so that the transmitted beam enters the spectrum measuring assembly. The aperture of the precise pinhole is selected according to the size of the focused light beam, so that the radiation area of the sample is reduced on the premise that the laser beam completely passes through the aperture. The direction of the polarizer is consistent with the direction of the laser light source, and only radiation light of the sample in a specific direction is allowed to pass through, so that the interference of radiation signals of the sample is further reduced.
The temperature control assembly includes a temperature control member, a moving member, and a shutter shielding member. The temperature control member is fixed on the moving member for heating the sample to a specified temperature and maintaining a constant temperature. The moving member includes a three-dimensional moving platform for adjusting a measurement position of the sample. The shutter shielding component is used for physically isolating the high-temperature sample from the light path component and the spectrum measuring component, so that the influence of sample radiation on the light path component, the spectrum measuring component and the like in the heating process is avoided. The shutter shielding component is closed when the temperature is higher than a set value in the test process, so that the damage to other components caused by radiation heating of a high-temperature sample is avoided.
The spectrometer component in the spectrum measuring assembly is used for measuring spectrum signals, the time sequence collecting component controls the response time of the spectrometer component, and the intensity of the sample transmission light beam and the intensity of the sample reflection light beam at different moments are obtained. The light source assembly, the shutter control member and the spectrum measuring assembly are connected to the control assembly, and the control assembly reads time sequence and energy information of the light source assembly and extracts and analyzes transmission/reflection spectrum data collected by the spectrum measuring assembly.
The effective focal length of the off-axis parabolic reflector is greater than the working distance of the temperature control component; the polarized wavelength of the polarizer comprises and is larger than the wavelength range of the laser; the precise pinhole adopts a diaphragm with an adjustable light passing hole; the motion component adopts a multi-axis multi-freedom platform; the spectrometer component adopts a grating spectrometer or an array spectrometer, and the response range of the spectrometer comprises and is larger than the wavelength range of the laser.
The invention provides a measurement method of a high-temperature visible-infrared transmission/reflection spectrum measurement device, which comprises the following specific steps:
s1: focusing and adjusting an optical path;
s1-1: placing and connecting the components as shown in fig. 1, and placing and fixing the test sample on the temperature control component;
s1-2: the control assembly is turned on, and the light source assembly and the shutter shielding member are turned on therefrom. The position and angle of the dichroic mirror is adjusted so that it is transmissive to the incident laser beam and reflective to the beam reflected by the test sample. The angle of the polarizer was adjusted to allow the laser light to pass through. Adjusting the position of the off-axis parabolic reflector, adjusting the moving component to adjust the position of the temperature control component, wherein the light spot is positioned on the surface of the test sample and focused to the minimum;
S1-3: taking down the test sample, opening the spectrum measuring assembly, selecting a precise pinhole with proper size, adjusting the positions of the shutter shielding member, the precise pinhole and the off-axis parabolic reflector, and adjusting the angle of the polarizer to ensure that laser beams can completely enter the spectrum measuring assembly;
s1-4: closing the light source assembly, the shutter shielding member and the spectrum measuring assembly;
S2: heating and preserving heat of a test sample;
S2-1: placing and fixing a test sample on a temperature control member;
S2-2: starting a temperature control component, heating a test sample to a specified temperature, and preserving heat until the temperature of the test sample is stable;
s3: transmission/reflection spectroscopy;
s3-1: opening a light source assembly, a shutter shielding component and a spectrum measuring assembly, and collecting information such as pulse time sequence, pulse energy and the like of the light source assembly in real time by a control assembly;
s3-2: after being further collimated by the optical fiber collimator, the laser beam is focused by the off-axis parabolic reflector and the direction of the laser beam is changed, so that the focused laser beam reaches the surface of the test sample after passing through the polarizer, the precise pinhole and the shutter shielding component;
S3-3: the transmitted laser beam and the spectrum radiated by the test sample sequentially pass through a shutter shielding component, a precise pinhole and a polarizer below the temperature control component, and enter the spectrum measurement component after the propagation direction of the laser beam is changed by the beam lifter;
s3-4: the laser beam reflected by the surface of the test sample and the spectrum radiated by the laser beam sequentially pass through a shutter shielding component, a precise pinhole and a polarizer above the temperature control component, and then are reflected by an off-axis parabolic reflector and a dichroic mirror to enter the spectrum measuring component;
S3-5: the control component collects signals received by the spectrometer and controls the time sequence control component to only respond to the signals within the laser pulse width time range;
s4: processing a measurement result;
S4-1: integrating the spectrum signal through a time sequence control component, and calculating a transmission/reflection spectrum by comparing the spectrum signal with the collected energy in the step S3-1;
S4-2: closing the light source assembly, the shutter shielding member and the spectrum measuring assembly;
S4-3: and closing the temperature control component, and taking down the sample to be tested after the sample is cooled to room temperature.
The invention has the following beneficial effects:
1. After focusing the laser beam, the precise pinhole allows the laser beam to pass through, but the radiation area of the sample is reduced to be consistent with the area of the diaphragm through hole, and the radiation power of the sample can be reduced by 75% under the high temperature without losing the energy of the incident beam.
2. By using the time sequence acquisition component, only signals in the laser pulse width time range are acquired in the period of each laser pulse, the self radiation signal interference of the sample in the fertilizer pulse period can be effectively reduced, the signal-to-noise ratio is effectively improved, and the accuracy of the transmission/reflection spectrum measurement of the sample at high temperature is improved.
3. The polarizer is selected in cooperation with the laser light source, so that the transmitted/reflected light beams can completely pass through, and meanwhile, only the self-radiated light of the sample in a specific direction is allowed to pass through, so that the intensity of the self-radiated signal of the sample is further reduced, and the signal-to-noise ratio is improved.
4. The space shielding and time sequence acquisition are utilized to improve the signal to noise ratio, meanwhile, the precise pinhole and the shutter shielding component physically isolate the radiation energy of the sample in space, the shutter shielding component is automatically closed when the temperature is higher than the set temperature, the combined action effectively protects the optical measurement assembly and other optical components, and the running stability of the measurement device is ensured and the safety of the measurement device is ensured.
5. The device can freely adjust the sample measurement temperature, the measurement distance and the like, and can realize the measurement of the transmission/reflection spectrum of the sample in a complex environment.
6. The components of the device are relatively independent, can be flexibly selected according to actual measurement requirements, are freely combined, and reduce the cost of the device.
Drawings
FIG. 1 is a schematic diagram of a high temperature visible-infrared spectrum measuring device according to the present invention;
FIG. 2 is a schematic view of a portion of the structure of the light path assembly and the temperature control assembly;
FIG. 3 is a schematic diagram of a signal timing acquisition process according to the present invention;
FIG. 4 is a schematic diagram of a measurement sample;
FIG. 5 is a schematic diagram showing the timing distribution of the transmission pulse signals and the laser pulses collected by the control component according to the embodiment, and FIG. 5 (b) is a partial enlarged view of FIG. 5 (a);
FIG. 6 is a schematic diagram of the transmission spectrum of a sample measured at 1200 ℃.
FIG. 7 is a graph showing the contrast between the radiation intensity of the sample itself and the transmission intensity of the light source during a single pulse measurement time.
1-A light source assembly; 2-optical fiber collimator; a 3-dichroic mirror; 4-off-axis parabolic mirrors; 5-a temperature control member; 6-off-axis parabolic mirrors; 7-beam lifter; 8-a spectral measurement assembly; 9-polarizers; 10-precise pinholes; 11-shutter shielding members; a 12-shutter shielding member; 13-precise pinholes; 14-polarizer.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description. It should be noted that, without conflict, the embodiments of the present invention and features in the embodiments may be combined with each other.
Example 1
As shown in fig. 1-2, the present embodiment provides a high-temperature visible-infrared spectrum measuring device, which includes a light source assembly, a light path assembly, a temperature control assembly, a spectrum measuring assembly and a control assembly.
In this embodiment, except for the control component, other components are all disposed on the optical vibration-proof platform and can be fixed on the optical platform by screws.
The light source component of the embodiment is a continuous spectrum pulse laser, and the parameters of the laser are as follows: the wavelength range is 0.4-4.8 mu m, the pulse frequency of the light source is 250KHz, and the pulse width is 100ps.
The optical path component of this embodiment is composed of an optical fiber collimator 2, a dichroic mirror 3, an off-axis parabolic mirror 4, an off-axis parabolic mirror 6, a beam lifter 7, a polarizer 9, a precision pinhole 10, a precision pinhole 13, and a polarizer 14. The reflection focal length of the off-axis parabolic reflector is 50.8mm, and the reflectivity in the range of 0.4-4.8 mu m is more than 96%. The diameter of the precision pinhole was 50 μm.
The temperature control assembly of the present embodiment is composed of a shutter shielding member 11, a temperature control member 5, a moving member, and a shutter shielding member 12, the temperature control member 5 being fixed to the moving member.
The shutter shielding assembly 11 and the shutter shielding assembly 12 of the present embodiment are connected with a control assembly, the clear aperture of the shutter is 1/4 inch, the response time is 5ms, and the shutter overheat protection device is opened and the shutter is closed when the temperature is greater than 50 ℃.
The spectrum measuring assembly of the embodiment comprises two grating spectrometers and a time sequence control component, wherein the measuring ranges of the grating spectrometers are respectively 0.2-1.0 mu m and 0.8-16 mu m, and the response time is 10ns. The sampling frequency of the timing acquisition member of this embodiment is 300MHz.
The light source component and the spectrum measuring component in the embodiment are both connected with the control component.
The measurement sample of this example was the YSZ coating material most widely used on the surface of aircraft engine blades. The measurement sample is prepared by electron beam physical vapor deposition, and the coating sample is deposited on the graphite substrate. After the graphite substrate was removed by heat treatment at 1000℃for 5 hours under atmospheric conditions, a coating sample having a thickness of 100 μm was obtained as shown in FIG. 4.
Based on the same inventive concept, the invention also provides a high-temperature visible-infrared spectrum measuring method, which comprises the following steps when being implemented:
s1: focusing and adjusting an optical path;
s1-1: placing and connecting the components as shown in fig. 1, and placing and fixing the test sample on the temperature control component 5;
S1-2: opening the control assembly, and opening the light source assembly and the shutter shielding member 11 by the control assembly, adjusting the position and angle of the dichroic mirror 3 to transmit the incident laser beam and reflect the beam reflected by the test sample; the angle of the polarizer 9 is adjusted to enable the laser to pass through completely; the positions of the off-axis parabolic reflector 4 and the temperature control member 5 are adjusted to enable the light spot to be positioned on the surface of the test sample and the light spot to be focused to the minimum, and the maximum diameter of the laser light spot is about 38 mu m at the moment;
s1-3: taking down the test sample, opening the spectrum measuring assembly, selecting a precise pinhole with the diameter of 80 mu m, adjusting the positions of the shutter shielding member 12, the precise pinhole 13 and the off-axis parabolic reflector 6, and adjusting the angle of the polarizer 14 to ensure that laser beams can completely enter the spectrum measuring assembly;
S1-4: closing the light source assembly, shutter shielding members 11, 12 and the spectrum measuring assembly;
S2: heating and preserving heat of a test sample;
S2-1: placing and fixing a test sample on the temperature control member 5;
s2-2: starting a temperature control component 5, heating a test sample to 1200 ℃, and preserving the temperature for 10 minutes until the temperature is stable, wherein the heating speed is 30 ℃/min;
s3: transmission/reflection spectroscopy;
S3-1: the light source assembly, the shutter shielding members 11 and 12 and the spectrum measuring assembly are turned on, and the control assembly collects pulse time sequence and pulse energy information of the light source assembly in real time;
S3-2: after being further collimated by the optical fiber collimator 2, the laser beam is focused by the off-axis parabolic reflector 4 and changed in direction, and the beam is changed from the horizontal direction to the vertical direction. Passing the focused light beam through a polarizer 9, a precision pinhole 10, and a shutter shielding member 11 to reach the surface of the test sample;
S3-3: the transmitted laser beam and the spectrum radiated by the test sample sequentially pass through a shutter shielding component 12, a precise pinhole 13 and a polarizer 14 below the temperature control component, the propagation direction of the transmitted laser beam is changed by a beam lifter 7, and then the transmitted laser beam enters the spectrum measurement component, and at the moment, only the radiation light of the sample with the same direction as the polarizer can pass through;
S3-4: the laser beam reflected by the surface of the test sample and the spectrum radiated by the laser beam sequentially pass through a shutter shielding component 11, a precise pinhole 10 and a polarizer rear 9 above the temperature control component, and are reflected by the off-axis parabolic reflector 4 and the dichroic mirror 3 to enter the spectrum measuring component;
S3-5: the control component collects signals received by the spectrometer and controls the time sequence control component to only respond to the signals within the laser pulse width time range;
s4: processing a measurement result;
S4-1: integrating the spectrum signal through a time sequence control component, and calculating a transmission/reflection spectrum by comparing the spectrum signal with the collected energy in the step S3-1;
S4-2: closing the light source assembly, shutter shielding members 11, 12 and the spectrum measuring assembly; the intensity of the sample itself was measured, and the measurement period of the spectrometer was consistent with when the laser was not turned off. At a wavelength of 2 μm, the radiation intensity of the sample itself and the transmission spectrum intensity measured by the spectrometer in a single pulse time are compared with each other, for example, as shown in fig. 7, and the radiation intensity of the sample itself is negligible.
S4-3: and closing the temperature control component, and taking down the sample to be tested after the sample is cooled to room temperature.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally formed, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description above, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than as described herein, and therefore the scope of the invention is not limited to the specific embodiments disclosed.
Claims (5)
1. The utility model provides a high temperature visible-infrared spectrum measuring device which characterized in that, includes light source subassembly, light path subassembly, accuse temperature subassembly, spectrum measurement subassembly and control assembly, wherein:
(1) The light source component is one or more ultrafast pulse lasers, the laser wavelength range covers a wave band of 0.4-4.8 mu m, the laser pulse width is less than 2ns, the repetition frequency is 0.1-2 MHz, and the single pulse energy is more than or equal to 0.5nJ/nm;
(2) The optical path component is used for improving the collimation of a laser beam, further focusing and reducing the area of a light spot and adjusting the direction of the light beam, and comprises an optical fiber collimator, a dichroic mirror, an off-axis parabolic reflector, a beam lifter, precise pinholes with different apertures and a polarizer, wherein the effective focal length of the off-axis parabolic reflector is more than or equal to 20mm, the surface of the off-axis parabolic reflector is plated with a protective film and has an average reflectivity of more than 96% in the range of 0.4-4.8 mu m, the precise pinholes adopt diaphragms with adjustable light passing holes, the aperture range of the diaphragms is 10-100 mu m, and the polarization wavelength of the polarizer is 0.4-4.8 mu m;
(3) The temperature control assembly comprises a temperature control member, a moving member and a shutter shielding member, wherein the temperature control member is used for heating and maintaining a test sample at a specified temperature, the heating temperature range is 1000-1500 ℃, the working distance is more than 15mm, the temperature control precision is less than +/-2 ℃, the moving member can move in the three-dimensional direction, the moving distance is more than or equal to 10mm and is used for adjusting the measuring distance of the test sample, the shutter shielding member is used for physically isolating the measuring sample at high temperature from the light path assembly and the spectrum measuring assembly, the stability of the light path assembly and the safety of the spectrum measuring assembly are protected, the diameter of a light passing hole of the shutter shielding assembly is 0.1-10 mm, the response time of the shutter is less than or equal to 10ms, and the working temperature of the shutter is less than or equal to 50 ℃;
(4) The spectrum measuring assembly comprises a grating component and a spectrometer, and is used for measuring the spectrum reflected by a light source and transmitted through a test sample, and is characterized in that the response time is less than or equal to 25ns, and the measuring range covers and is larger than a wave band of 0.4-4.8 mu m;
(5) The control assembly comprises a time sequence control component which is used for collecting information of the light source assembly, controlling the opening of the shutter shielding component and controlling the measurement process of the spectrum measurement assembly, and is characterized in that the time sequence control component is connected with the light source assembly, the shutter shielding component and the spectrum measurement assembly.
2. A high temperature visible-infrared spectrum measuring device as defined in claim 1, wherein the dichroic mirror and off-axis parabolic mirror in the light path assembly are spaced from the temperature control member in the temperature control assembly by a distance of 15mm or more.
3. A high temperature visible-infrared spectrometer as claimed in claim 1, wherein one or more spectrometers are used, either grating spectrometers or array spectrometers.
4. A high temperature visible-infrared spectrum measuring device as defined in claim 1, wherein the timing control means can use a high speed data acquisition card or a high speed lock-in amplifier, and the data acquisition frequency of the timing control means is 1000-5000 times the pulse frequency of the light source assembly.
5. A measurement method of the high-temperature visible-infrared spectrum measurement apparatus according to any one of claims 1 to 4, comprising the steps of:
s1: focusing and adjusting an optical path;
s1-1: placing and connecting the components as shown in fig. 1, and placing and fixing the test sample on the temperature control component;
S1-2: opening the control assembly, starting the light source assembly and the shutter shielding member by the control assembly, and adjusting the position and the angle of the dichroic mirror to enable the dichroic mirror to transmit an incident laser beam and reflect a beam reflected by a test sample; adjusting the angle of the polarizer to enable the laser to pass through completely; adjusting the positions of the off-axis parabolic reflector and the temperature control component to enable the light spot to be positioned on the surface of the test sample and the light spot to be focused to the minimum;
S1-3: taking down the test sample, opening the spectrum measuring assembly, selecting a precise pinhole with proper size, adjusting the positions of the shutter shielding member, the precise pinhole and the off-axis parabolic reflector, and adjusting the angle of the polarizer to ensure that laser beams can completely enter the spectrum measuring assembly;
s1-4: closing the light source assembly, the shutter shielding member and the spectrum measuring assembly;
S2: heating and preserving heat of a test sample;
S2-1: placing and fixing a test sample on a temperature control member;
S2-2: starting a temperature control component, heating a test sample to a specified temperature, and preserving heat until the temperature of the test sample is stable;
s3: transmission/reflection spectroscopy;
s3-1: opening a light source assembly, a shutter shielding member and a spectrum measuring assembly, and collecting pulse time sequence and pulse energy information of the light source assembly in real time by a control assembly;
s3-2: after being further collimated by the optical fiber collimator, the laser beam is focused by the off-axis parabolic reflector and the direction of the laser beam is changed, so that the focused laser beam reaches the surface of the test sample after passing through the polarizer, the precise pinhole and the shutter shielding component;
S3-3: the transmitted laser beam and the spectrum radiated by the test sample sequentially pass through a shutter shielding component, a precise pinhole and a polarizer below the temperature control component, and enter the spectrum measurement component after the propagation direction of the laser beam is changed by the beam lifter;
s3-4: the laser beam reflected by the surface of the test sample and the spectrum radiated by the laser beam sequentially pass through a shutter shielding component, a precise pinhole and a polarizer above the temperature control component, and then are reflected by an off-axis parabolic reflector and a dichroic mirror to enter the spectrum measuring component;
S3-5: the control component collects signals received by the spectrometer and controls the time sequence control component to only respond to the signals within the laser pulse width time range;
s4: processing a measurement result;
S4-1: integrating the spectrum signal through a time sequence control component, and calculating a transmission/reflection spectrum by comparing the spectrum signal with the collected energy in the step S3-1;
S4-2: closing the light source assembly, the shutter shielding member and the spectrum measuring assembly;
S4-3: and closing the temperature control component, and taking down the sample to be tested after the sample is cooled to room temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210501283.2A CN114965311B (en) | 2022-05-09 | 2022-05-09 | High-temperature visible-infrared spectrum measuring device and measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210501283.2A CN114965311B (en) | 2022-05-09 | 2022-05-09 | High-temperature visible-infrared spectrum measuring device and measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114965311A CN114965311A (en) | 2022-08-30 |
| CN114965311B true CN114965311B (en) | 2024-04-26 |
Family
ID=82980558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210501283.2A Active CN114965311B (en) | 2022-05-09 | 2022-05-09 | High-temperature visible-infrared spectrum measuring device and measuring method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114965311B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117871425A (en) * | 2024-03-11 | 2024-04-12 | 长春理工大学 | Target short wave infrared full polarization characteristic measuring device and method for thermal radiation effect |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013091404A1 (en) * | 2011-12-19 | 2013-06-27 | 北京智朗芯光科技有限公司 | Polarizing broadband spectrometer with normal incidence containing reference light beam and optical measuring system |
| CN103969226A (en) * | 2014-05-14 | 2014-08-06 | 中国科学技术大学 | Laser-induced breakdown spectroscopy measurement system used in dusty and high-temperature environments and application |
| CN104034703A (en) * | 2014-06-12 | 2014-09-10 | 中国科学院上海技术物理研究所 | Improved system and method for detecting composition of material by LIBS (Laser Induced Breakdown Spectroscopy) with high signal and noise ratio and low detection limit |
| CN110308119A (en) * | 2018-03-20 | 2019-10-08 | 中国科学院沈阳自动化研究所 | A kind of current-carrying formula laser induced breakdown spectroscopy online chemical analysis instrument |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6960769B2 (en) * | 2002-10-03 | 2005-11-01 | Abb Inc. | Infrared measuring apparatus and method for on-line application in manufacturing processes |
-
2022
- 2022-05-09 CN CN202210501283.2A patent/CN114965311B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013091404A1 (en) * | 2011-12-19 | 2013-06-27 | 北京智朗芯光科技有限公司 | Polarizing broadband spectrometer with normal incidence containing reference light beam and optical measuring system |
| CN103969226A (en) * | 2014-05-14 | 2014-08-06 | 中国科学技术大学 | Laser-induced breakdown spectroscopy measurement system used in dusty and high-temperature environments and application |
| CN104034703A (en) * | 2014-06-12 | 2014-09-10 | 中国科学院上海技术物理研究所 | Improved system and method for detecting composition of material by LIBS (Laser Induced Breakdown Spectroscopy) with high signal and noise ratio and low detection limit |
| CN110308119A (en) * | 2018-03-20 | 2019-10-08 | 中国科学院沈阳自动化研究所 | A kind of current-carrying formula laser induced breakdown spectroscopy online chemical analysis instrument |
Non-Patent Citations (2)
| Title |
|---|
| 材料红外光谱辐射特性测试方法;张冰;孟鑫;刘磊;李志增;;科技与创新;20200205(第03期);全文 * |
| 高能激光远场辐照度分布测量技术及其进展;陈超;黎高平;张彪;吴磊;于东钰;阴万宏;;应用光学;20200715(04);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114965311A (en) | 2022-08-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9804028B2 (en) | External cavity laser source | |
| CN114965311B (en) | High-temperature visible-infrared spectrum measuring device and measuring method | |
| CN109374571A (en) | A kind of optical detection integrated system | |
| CN104483104A (en) | Spectral response analysis system for photoelectric detector | |
| JP2015148523A (en) | terahertz wave phase difference measurement system | |
| CN109406453A (en) | A kind of improved Z scanning survey method | |
| Kopp et al. | The TSI radiometer facility: absolute calibrations for total solar irradiance instruments | |
| Zarini et al. | Multioctave high-dynamic range optical spectrometer for single-pulse, longitudinal characterization of ultrashort electron bunches | |
| CN112798556B (en) | Non-collinear time-resolved pumping-detecting device and method for infrared and frequency spectrum | |
| Imhof et al. | Thermal emission decay Fourier transform infrared spectroscopy | |
| CN107702816B (en) | Method for measuring surface temperature of wall material in situ online real-time non-contact manner | |
| CN208224086U (en) | A kind of micro- resonance laser induced breakdown spectroscopy detection system | |
| Lo et al. | Pulsed terahertz bi-directional reflection distribution function (BRDF) measurements of materials and obscurants | |
| CN211527779U (en) | Testing device of solid gap FP etalon | |
| CN106404695A (en) | Spectrophotometer | |
| Chunnilall et al. | Infrared hemispherical reflectance measurements in the 2.5 µm to 50 µm wavelength region using a Fourier transform spectrometer | |
| Zeng et al. | An infrared laser-based reflectometer for low reflectance measurements of samples and cavity structures | |
| Hartwig et al. | A highly sensitive IR-optical sensor for ethylene-monitoring | |
| Loktionov et al. | Experimental diagnostic module for ultrafast combined interferometry of the processes of interaction of ultrashort laser pulses with condensed media in vacuum | |
| CN109668906A (en) | It is a kind of for measuring the measurement method and device of optical film layer laser damage threshold | |
| Kropotov et al. | Application of Spectral Devices in the Optical Engineering and Scientific Research | |
| CN114018850B (en) | Fourier infrared polarized spectrum measuring system and measuring method | |
| Lawrence et al. | Stability considerations for a solar spectral intensity monitor (SIM) | |
| Hirai et al. | Heterodyne Fourier transform spectroscopy using moving diffraction grating | |
| CN117664525A (en) | Device and method for measuring wavelength and linewidth of dual-wavelength laser |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |