CN114959906A - Solar cell diffusion furnace - Google Patents
Solar cell diffusion furnace Download PDFInfo
- Publication number
- CN114959906A CN114959906A CN202210576978.7A CN202210576978A CN114959906A CN 114959906 A CN114959906 A CN 114959906A CN 202210576978 A CN202210576978 A CN 202210576978A CN 114959906 A CN114959906 A CN 114959906A
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- China
- Prior art keywords
- hole
- furnace
- solar cell
- cell diffusion
- furnace body
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 21
- 230000001105 regulatory effect Effects 0.000 claims abstract description 15
- 230000000903 blocking effect Effects 0.000 claims abstract description 3
- 230000003750 conditioning effect Effects 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 abstract description 18
- 238000000034 method Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a solar cell diffusion furnace, which comprises a furnace body, wherein a regulating chamber is arranged in one wall of the furnace body, a first through hole and a second through hole are arranged on the wall of the regulating chamber, the first through hole is communicated with the regulating chamber and an inner cavity of the furnace body, and the second through hole is communicated with the regulating chamber and the outside of the furnace body; and a valve assembly capable of communicating and blocking the first through hole and the second through hole is arranged in the adjusting chamber. The solar cell diffusion furnace provided by the invention can automatically adjust the size of the heat dissipation air port according to the temperature in the furnace, so that the working temperature in the furnace is kept relatively constant, and the working efficiency is improved.
Description
Technical Field
The invention relates to the technical field of diffusion furnaces, in particular to a solar cell diffusion furnace.
Background
The existing solar cell diffusion furnace is mainly used for producing and processing semiconductors, and in the production process of solar cells, a diffusion process is a more critical process, and the purpose is to form a PN junction on the silicon wafer, the silicon wafer is placed into a quartz tube through a quartz boat carrier in the forming process, then a vacuum pump is used for pumping out air in the silicon wafer, so that the interior of the silicon wafer is in a relatively vacuum state, the silicon wafer is heated to a corresponding process temperature, then nitrogen is bubbled through a liquid phosphorus source (POCL3) to carry the phosphorus source into the high-temperature quartz tube, the phosphorus source decomposes phosphorus atoms on the surface of the silicon wafer and diffuses into the silicon wafer at high temperature, an N type is formed on one surface with the diffused phosphorus elements, an original P type is formed on the other surface, and the PN junction is formed in the silicon wafer.
Though the diffusion furnace can play a role in semiconductor production and processing by heating inside, the temperature in the hearth is high during working, heat dissipation treatment is needed, and the damage of high temperature to electrical elements of equipment is avoided, so that the heat in the furnace is favorably kept, and unnecessary energy waste is reduced. Generally, in the process of radiating the diffusion furnace, the size of a radiating air port of a furnace body is fixed, and the radiating speed cannot be automatically adjusted according to the temperature in the furnace, so that the process result is influenced.
Disclosure of Invention
Aiming at the technical defects, the invention aims to provide the solar cell diffusion furnace, which can automatically adjust the size of a heat dissipation air port according to the temperature in the furnace, so that the working temperature in the furnace is kept relatively constant, and the working efficiency is improved.
In order to solve the technical problems, the invention adopts the following technical scheme.
The invention provides a solar cell diffusion furnace, which comprises a furnace body, wherein a regulating chamber is arranged in one wall of the furnace body, a first through hole and a second through hole are arranged on the wall of the regulating chamber, the first through hole is communicated with the regulating chamber and an inner cavity of the furnace body, and the second through hole is communicated with the regulating chamber and the outside of the furnace body; and a valve assembly capable of communicating and blocking the first through hole and the second through hole is arranged in the regulating chamber.
Preferably, the valve assembly comprises a slide rail arranged on the inner wall of the regulating chamber, a slide block is arranged in the slide rail in a sliding manner, and in the process that the slide block slides along the slide rail, two side walls of the slide block not only can slowly open the first through hole and the second through hole at the same time, but also can slowly close the first through hole and the second through hole at the same time;
the air bag adjusting device is characterized by further comprising an air bag fixed on the wall of the adjusting chamber, one end, close to the sliding block, of the air bag is connected with a telescopic pipe, a telescopic rod is arranged in the telescopic pipe in a sliding mode, and one end, far away from the air bag, of the telescopic rod is connected with the sliding block.
Preferably, a plug is fixed at one end of the telescopic rod, which is located inside the telescopic pipe, and the diameter of the plug is equal to the inner diameter of the telescopic pipe.
Preferably, the air bag is fixed on a wall in the adjusting chamber, which is connected with the inner cavity of the oven body.
Preferably, the telescopic rod is hinged with the sliding block.
Preferably, the telescopic rod is fixedly connected with the sliding block.
Preferably, a filter layer playing an environmental protection role is arranged on the first through hole.
The solar cell diffusion furnace has the following beneficial effects:
the valve assembly is arranged in the adjusting chamber, when the temperature in the furnace rises, gas in the air bag expands, the sliding block slides in the direction far away from the air bag, the effective heat dissipation areas of the first through hole and the second through hole are enlarged, and the heat dissipation speed is accelerated; when the temperature in the furnace is reduced, the gas in the air bag contracts, the sliding block slides towards the direction close to the air bag, the effective heat dissipation areas of the first through hole and the second through hole are reduced, and the heat dissipation speed is reduced; the temperature in the furnace is in a dynamic balance state, namely, the working temperature in the furnace is kept relatively constant by automatically adjusting the size of the heat dissipation air port, and the working efficiency is greatly improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1;
FIG. 3 is a schematic view of an initial state of a valve assembly according to an embodiment of the present invention;
fig. 4 is a schematic view of the connection between the telescopic tube and the telescopic rod in the embodiment of the present invention.
Description of reference numerals:
1. furnace body, 2, regulating chamber, 3, first through-hole, 4, second through-hole, 5, valve components, 6, slide rail, 7, slider, 8, gasbag, 9, flexible pipe, 10, telescopic link, 11, end cap, 12, filter layer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b):
as shown in fig. 1 to 4, the invention provides a solar cell diffusion furnace, which comprises a furnace body 1, wherein an adjusting chamber 2 for adjusting the size of a heat dissipation air port is arranged in the upper wall of the furnace body 1, a first through hole 3 is formed in the lower wall of the adjusting chamber 2, and a second through hole 4 is formed in the upper wall of the adjusting chamber 2;
the first through hole 3 is communicated with the adjusting chamber 2 and the inner cavity of the furnace body 1, and the second through hole 4 is communicated with the adjusting chamber 2 and the outside of the furnace body 1; a valve assembly 5 is arranged in the adjusting chamber 2, and the valve assembly 5 not only can communicate the first through hole 3 with the second through hole 4, but also can close the first through hole 3 and the second through hole 4;
specifically, the method comprises the following steps:
the valve component 5 comprises a slide rail 6 arranged on the inner wall of the adjusting chamber 2, a slide block 7 is arranged in the slide rail 6 in a sliding manner, in the process that the slide block 7 slides along the slide rail 6, the lower wall of the slide block 7 can slowly open the first through hole 3 and close the first through hole 3, and the upper wall of the slide block 7 can slowly open the second through hole 4 and close the second through hole 4; when the first through hole 3 and the second through hole 4 are fully opened, the heat dissipation speed of the furnace body 1 is fastest, and the heat dissipation effect is best; when the first through hole 3 and the second through hole 4 are completely shielded, the heat dissipation speed of the furnace body 1 is the slowest, and the heat dissipation effect is the worst.
In order to enable the sliding block 7 to automatically adjust the position on the sliding rail 6 according to the temperature in the furnace, the valve assembly 5 further comprises an air bag 8, the air bag 8 is fixed on the wall connected with the inner cavity of the furnace body 1 in the adjusting chamber 2, one end, close to the sliding block 7, of the air bag 8 is connected with a telescopic pipe 9, a telescopic rod 10 is arranged in the telescopic pipe 9 in a sliding mode, and one end, far away from the air bag 8, of the telescopic rod 10 is hinged to the sliding block 7; when the temperature in the furnace rises, the gas in the air bag 8 expands under the influence of the temperature in the furnace, and the telescopic rod 10 slides towards the outside of the telescopic pipe 9, so that the telescopic rod 10 drives the sliding block 7 to slide towards the direction far away from the air bag 8, the effective heat dissipation areas of the first through hole 3 and the second through hole 4 are increased, and the heat dissipation speed is accelerated; when the temperature in the furnace drops, the gas in the air bag 8 shrinks under the influence of the temperature in the furnace, and the telescopic rod 10 slides towards the inside of the telescopic pipe 9, so that the telescopic rod 10 drives the sliding block 7 to slide towards the direction close to the air bag 8, the effective heat dissipation areas of the first through hole 3 and the second through hole 4 become smaller, and the heat dissipation speed is reduced; the adjusting process is periodically and repeatedly carried out, so that the temperature in the furnace is in a dynamic balance state, namely, the working temperature in the furnace is kept relatively constant by automatically adjusting the size of the heat dissipation air port.
In order to ensure the air tightness of the connection between the telescopic tube 9 and the telescopic rod 10, a plug 11 is fixed at one end of the telescopic rod 10 positioned inside the telescopic tube 9, and the diameter of the plug 11 is equal to the inner diameter of the telescopic tube 9.
In order to filter the gas emitted from the first through hole for the first time, a filter layer 12 is arranged on the first through hole, and an activated carbon layer is arranged in the filter layer 12.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (7)
1. A solar cell diffusion furnace comprises a furnace body (1), and is characterized in that a regulating chamber (2) is formed in one wall of the furnace body (1), a first through hole (3) and a second through hole (4) are formed in the wall of the regulating chamber (2), the first through hole (3) is communicated with the regulating chamber (2) and an inner cavity of the furnace body (1), and the second through hole (4) is communicated with the regulating chamber (2) and the outside of the furnace body (1); and a valve assembly (5) capable of communicating and blocking the first through hole (3) and the second through hole (4) is arranged in the adjusting chamber (2).
2. The solar cell diffusion furnace as claimed in claim 1, wherein the valve assembly (5) comprises a slide rail (6) disposed on the inner wall of the regulation chamber (2), a slide block (7) is slidably disposed in the slide rail (6), and during the sliding of the slide block (7) along the slide rail (6), two side walls of the slide block (7) not only can slowly open the first through hole (3) and the second through hole (4) at the same time, but also can slowly close the first through hole (3) and the second through hole (4) at the same time;
still including fixing gasbag (8) on surge chamber (2) wall, gasbag (8) are close to the one end of slider (7) is connected with flexible pipe (9), it is provided with telescopic link (10) to slide in flexible pipe (9), the one end that gasbag (8) were kept away from in telescopic link (10) with slider (7) are connected.
3. The solar cell diffusion furnace as claimed in claim 2, wherein a plug (11) is fixed to one end of the telescopic rod (10) located inside the telescopic tube (9), and the diameter of the plug (11) is equal to the inner diameter of the telescopic tube (9).
4. A solar cell diffusion furnace according to claim 2, wherein said gas bag (8) is fixed to the wall of the conditioning chamber (2) connected to the inner cavity of said furnace body (1).
5. The solar cell diffusion furnace as claimed in claim 2, wherein the telescopic rod (10) is hinged to the slide (7).
6. The solar cell diffusion furnace as claimed in claim 2, wherein the telescopic rod (10) is fixedly connected to the slide (7).
7. The solar cell diffusion furnace as claimed in claim 1, wherein the first through-hole (3) is provided with an environmentally friendly filter layer (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210576978.7A CN114959906B (en) | 2022-05-25 | 2022-05-25 | Solar cell diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210576978.7A CN114959906B (en) | 2022-05-25 | 2022-05-25 | Solar cell diffusion furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114959906A true CN114959906A (en) | 2022-08-30 |
| CN114959906B CN114959906B (en) | 2024-03-01 |
Family
ID=82955857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210576978.7A Active CN114959906B (en) | 2022-05-25 | 2022-05-25 | Solar cell diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114959906B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001146463A (en) * | 1999-11-16 | 2001-05-29 | Murata Mfg Co Ltd | Jig for firing ceramic |
| CN103092230A (en) * | 2013-01-07 | 2013-05-08 | 济南大学 | Diffusion furnace smart temperature control system |
| CN209606738U (en) * | 2019-04-24 | 2019-11-08 | 厦门晶视光电科技有限公司 | A kind of good LCD mould group of heat dissipation performance |
| CN113660828A (en) * | 2021-08-05 | 2021-11-16 | 深圳市创裕达电子有限公司 | Liquid crystal display screen with temperature control function mechanism |
-
2022
- 2022-05-25 CN CN202210576978.7A patent/CN114959906B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001146463A (en) * | 1999-11-16 | 2001-05-29 | Murata Mfg Co Ltd | Jig for firing ceramic |
| CN103092230A (en) * | 2013-01-07 | 2013-05-08 | 济南大学 | Diffusion furnace smart temperature control system |
| CN209606738U (en) * | 2019-04-24 | 2019-11-08 | 厦门晶视光电科技有限公司 | A kind of good LCD mould group of heat dissipation performance |
| CN113660828A (en) * | 2021-08-05 | 2021-11-16 | 深圳市创裕达电子有限公司 | Liquid crystal display screen with temperature control function mechanism |
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| Publication number | Publication date |
|---|---|
| CN114959906B (en) | 2024-03-01 |
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