CN114959906B - Solar cell diffusion furnace - Google Patents
Solar cell diffusion furnace Download PDFInfo
- Publication number
- CN114959906B CN114959906B CN202210576978.7A CN202210576978A CN114959906B CN 114959906 B CN114959906 B CN 114959906B CN 202210576978 A CN202210576978 A CN 202210576978A CN 114959906 B CN114959906 B CN 114959906B
- Authority
- CN
- China
- Prior art keywords
- hole
- furnace
- adjusting chamber
- furnace body
- solar cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 18
- 230000001105 regulatory effect Effects 0.000 claims abstract description 9
- 230000000903 blocking effect Effects 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 4
- 230000007613 environmental effect Effects 0.000 claims description 2
- 230000003750 conditioning effect Effects 0.000 claims 1
- 230000005855 radiation Effects 0.000 abstract description 2
- 230000017525 heat dissipation Effects 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229920005549 butyl rubber Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a solar cell diffusion furnace, which comprises a furnace body, wherein an adjusting chamber is arranged in one wall of the furnace body, a first through hole and a second through hole are arranged on the wall of the adjusting chamber, the first through hole is communicated with the adjusting chamber and the inner cavity of the furnace body, and the second through hole is communicated with the adjusting chamber and the outside of the furnace body; and a valve component capable of communicating and blocking the second through hole of the first through hole is arranged in the regulating chamber. The solar cell diffusion furnace provided by the invention can automatically adjust the size of the heat radiation air port according to the temperature in the furnace, so that the working temperature in the furnace is maintained relatively constant, and the working efficiency is improved.
Description
Technical Field
The invention relates to the technical field of diffusion furnaces, in particular to a solar cell diffusion furnace.
Background
The existing solar cell diffusion furnace is mainly used for semiconductor production and processing, in the production process of solar cells, a diffusion process is a key process compared with the prior art, PN junctions are formed on silicon wafers, the silicon wafers are placed into quartz tubes through quartz boat carriers in the formation process, then air in the silicon wafers is pumped by using a vacuum pump to enable the interior to be in a relative vacuum state, the silicon wafers are heated to corresponding process temperatures, nitrogen is bubbled through liquid phosphorus sources (POCL 3) to carry the sources into the high-temperature quartz tubes, phosphorus atoms are decomposed from the surfaces of the silicon wafers, the phosphorus atoms are diffused into the silicon wafers at high temperature, N types are formed on the surfaces with phosphorus elements diffused, the other surfaces are of original P types, and PN junctions are formed inside the silicon wafers.
The diffusion furnace can perform the function of semiconductor production and processing by heating, but the temperature in the furnace chamber is high during operation, heat dissipation treatment is needed, and the damage of high temperature to equipment electrical elements is avoided, so that the heat in the furnace is kept, and unnecessary energy waste is reduced. In the process of radiating the diffusion furnace, the size of a radiating air port of the furnace body is fixed, and the radiating speed cannot be automatically adjusted according to the temperature in the furnace, so that the technological result is affected.
Disclosure of Invention
Aiming at the technical defects, the invention aims to provide the solar cell diffusion furnace, which can automatically adjust the size of the heat radiation air port according to the temperature in the furnace, so that the working temperature in the furnace is maintained to be relatively constant, and the working efficiency is improved.
In order to solve the technical problems, the invention adopts the following technical scheme.
The invention provides a solar cell diffusion furnace, which comprises a furnace body, wherein an adjusting chamber is arranged in one wall of the furnace body, a first through hole and a second through hole are arranged on the wall of the adjusting chamber, the first through hole is communicated with the adjusting chamber and the inner cavity of the furnace body, and the second through hole is communicated with the adjusting chamber and the outer part of the furnace body; the regulating chamber is internally provided with a valve component which can be communicated with and block the first through hole and the second through hole.
Preferably, the valve assembly comprises a sliding rail arranged on the inner wall of the adjusting chamber, a sliding block is arranged in the sliding rail in a sliding manner, and in the sliding process of the sliding block along the sliding rail, two side walls of the sliding block can slowly open the first through hole and the second through hole at the same time and can slowly close the first through hole and the second through hole at the same time;
the air bag is fixed on the wall of the adjusting chamber, one end, close to the sliding block, of the air bag is connected with an extension pipe, a telescopic rod is arranged in the extension pipe in a sliding mode, and one end, far away from the air bag, of the telescopic rod is connected with the sliding block.
Preferably, a plug is fixed at one end of the telescopic rod, which is positioned in the telescopic pipe, and the diameter of the plug is equal to the inner diameter of the telescopic pipe.
Preferably, the air bag is fixed on a wall connected with the inner cavity of the furnace body in the regulating chamber.
Preferably, the telescopic rod is hinged with the sliding block.
Preferably, the telescopic rod is fixedly connected with the sliding block.
Preferably, a filter layer with an environmental protection effect is arranged on the first through hole.
The solar cell diffusion furnace has the following beneficial effects:
according to the invention, the valve component is arranged in the regulating chamber, when the temperature in the furnace is increased, the gas in the air bag expands, the sliding block slides in the direction away from the air bag, the effective heat dissipation area of the first through hole and the second through hole is increased, and the heat dissipation speed is increased; when the temperature in the furnace is reduced, the gas in the air bag is contracted, the sliding block slides towards the direction close to the air bag, the effective heat dissipation area of the first through hole and the second through hole is reduced, and the heat dissipation speed is reduced; the temperature in the furnace is in a dynamic balance state, namely, the working temperature in the furnace is maintained relatively constant by automatically adjusting the size of the heat dissipation air port, so that the working efficiency is greatly improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention;
fig. 2 is an enlarged view of a portion a in fig. 1;
FIG. 3 is a schematic illustration of an initial state of a valve assembly according to an embodiment of the present invention;
fig. 4 is a schematic diagram of connection between a telescopic tube and a telescopic rod in an embodiment of the present invention.
Reference numerals illustrate:
1. furnace body, 2, regulating chamber, 3, first through-hole, 4, second through-hole, 5, valve subassembly, 6, slide rail, 7, slider, 8, gasbag, 9, flexible pipe, 10, telescopic link, 11, end cap, 12, filter layer.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples:
as shown in fig. 1 to 4, the invention provides a solar cell diffusion furnace, which comprises a furnace body 1, wherein an adjusting chamber 2 for adjusting the size of a heat dissipation air port is arranged in the upper wall of the furnace body 1, a first through hole 3 is formed in the lower wall of the adjusting chamber 2, and a second through hole 4 is formed in the upper wall of the adjusting chamber 2;
wherein, the first through hole 3 is communicated with the adjusting chamber 2 and the inner cavity of the furnace body 1, and the second through hole 4 is communicated with the adjusting chamber 2 and the outside of the furnace body 1; a valve component 5 is arranged in the regulating chamber 2, and the valve component 5 can be used for communicating the first through hole 3 with the second through hole 4 and closing the first through hole 3 with the second through hole 4;
specific:
the valve assembly 5 comprises a sliding rail 6 arranged on the inner wall of the regulating chamber 2, a sliding block 7 is arranged in the sliding rail 6 in a sliding manner, the lower wall of the sliding block 7 can slowly open the first through hole 3 and close the first through hole 3 in the sliding process of the sliding block 7 along the sliding rail 6, and the upper wall of the sliding block 7 can slowly open the second through hole 4 and close the second through hole 4; when the first through hole 3 and the second through hole 4 are fully opened, the heat dissipation speed of the furnace body 1 is the fastest, and the heat dissipation effect is the best; when the first through hole 3 and the second through hole 4 are completely shielded, the heat dissipation speed of the furnace body 1 is the slowest and the heat dissipation effect is the worst.
In order to enable the sliding block 7 to automatically adjust the position on the sliding rail 6 according to the temperature in the furnace, the valve assembly 5 further comprises an air bag 8, the air bag 8 is fixed on the wall connected with the inner cavity of the furnace body 1 in the adjusting chamber 2, one end, close to the sliding block 7, of the air bag 8 is connected with a telescopic pipe 9, a telescopic rod 10 is slidably arranged in the telescopic pipe 9, and one end, far away from the air bag 8, of the telescopic rod 10 is hinged with the sliding block 7; when the temperature in the furnace is increased, the gas in the air bag 8 is influenced by the temperature in the furnace to expand, and the telescopic rod 10 slides towards the outside of the telescopic pipe 9, so that the telescopic rod 10 drives the sliding block 7 to slide towards a direction away from the air bag 8, the effective heat dissipation area of the first through hole 3 and the second through hole 4 is increased, and the heat dissipation speed is accelerated; when the temperature in the furnace is reduced, the gas in the air bag 8 is influenced by the temperature in the furnace to shrink, and the telescopic rod 10 slides towards the inside of the telescopic pipe 9, so that the telescopic rod 10 drives the sliding block 7 to slide towards the direction close to the air bag 8, the effective heat dissipation area of the first through hole 3 and the second through hole 4 is reduced, and the heat dissipation speed is reduced; the above-mentioned regulation process is periodically repeatedly implemented, so that the temperature in the furnace is in dynamic equilibrium state, i.e. the working temperature in the furnace can be maintained relatively constant by automatically regulating the size of heat-radiating tuyere.
In order to ensure the air tightness of the connection between the telescopic pipe 9 and the telescopic rod 10, a plug 11 is fixed at one end of the telescopic rod 10 positioned inside the telescopic pipe 9, and the diameter of the plug 11 is equal to the inner diameter of the telescopic pipe 9, in this embodiment, the plug 11 is made of butyl rubber, and the butyl rubber has good air tightness and has the performances of heat resistance, ozone resistance, aging resistance and the like.
In order to filter the gas emitted from the first through holes once, a filter layer 12 is arranged on the first through holes, and an activated carbon layer is arranged in the filter layer 12.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (4)
1. The solar cell diffusion furnace comprises a furnace body (1), and is characterized in that an adjusting chamber (2) is formed in one wall of the furnace body (1), a first through hole (3) and a second through hole (4) are formed in the wall of the adjusting chamber (2), the first through hole (3) is communicated with the adjusting chamber (2) and the inner cavity of the furnace body (1), and the second through hole (4) is communicated with the adjusting chamber (2) and the outside of the furnace body (1); a valve component (5) capable of communicating and blocking the first through hole (3) and the second through hole (4) is arranged in the regulating chamber (2); the valve assembly (5) comprises a sliding rail (6) arranged on the inner wall of the adjusting chamber (2), a sliding block (7) is arranged in the sliding rail (6), and in the sliding process of the sliding block (7) along the sliding rail (6), two side walls of the sliding block (7) can slowly open the first through hole (3) and the second through hole (4) at the same time and can slowly close the first through hole (3) and the second through hole (4) at the same time; the air bag (8) is fixed on the wall of the adjusting chamber (2), one end of the air bag (8) close to the sliding block (7) is connected with a telescopic pipe (9), a telescopic rod (10) is arranged in the telescopic pipe (9) in a sliding mode, and one end of the telescopic rod (10) away from the air bag (8) is connected with the sliding block (7); a plug (11) is fixed at one end of the telescopic rod (10) positioned in the telescopic pipe (9), and the diameter of the plug (11) is equal to the inner diameter of the telescopic pipe (9); the first through hole (3) is provided with a filter layer (12) with an environmental protection effect.
2. A solar cell diffusion furnace according to claim 1, characterized in that the air-bag (8) is fixed in the conditioning chamber (2) on the wall connecting the inner cavity of the furnace body (1).
3. A solar cell diffusion furnace according to claim 1, characterized in that the telescopic rod (10) is hinged to the slider (7).
4. A solar cell diffusion furnace according to claim 1, characterized in that the telescopic rod (10) is fixedly connected with the slider (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210576978.7A CN114959906B (en) | 2022-05-25 | 2022-05-25 | Solar cell diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210576978.7A CN114959906B (en) | 2022-05-25 | 2022-05-25 | Solar cell diffusion furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114959906A CN114959906A (en) | 2022-08-30 |
| CN114959906B true CN114959906B (en) | 2024-03-01 |
Family
ID=82955857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210576978.7A Active CN114959906B (en) | 2022-05-25 | 2022-05-25 | Solar cell diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114959906B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001146463A (en) * | 1999-11-16 | 2001-05-29 | Murata Mfg Co Ltd | Jig for firing ceramic |
| CN103092230A (en) * | 2013-01-07 | 2013-05-08 | 济南大学 | Diffusion furnace smart temperature control system |
| CN209606738U (en) * | 2019-04-24 | 2019-11-08 | 厦门晶视光电科技有限公司 | A kind of good LCD mould group of heat dissipation performance |
| CN113660828A (en) * | 2021-08-05 | 2021-11-16 | 深圳市创裕达电子有限公司 | Liquid crystal display screen with temperature control function mechanism |
-
2022
- 2022-05-25 CN CN202210576978.7A patent/CN114959906B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001146463A (en) * | 1999-11-16 | 2001-05-29 | Murata Mfg Co Ltd | Jig for firing ceramic |
| CN103092230A (en) * | 2013-01-07 | 2013-05-08 | 济南大学 | Diffusion furnace smart temperature control system |
| CN209606738U (en) * | 2019-04-24 | 2019-11-08 | 厦门晶视光电科技有限公司 | A kind of good LCD mould group of heat dissipation performance |
| CN113660828A (en) * | 2021-08-05 | 2021-11-16 | 深圳市创裕达电子有限公司 | Liquid crystal display screen with temperature control function mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114959906A (en) | 2022-08-30 |
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