CN211084638U - Hot air circulation oven with slot cover - Google Patents
Hot air circulation oven with slot cover Download PDFInfo
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- CN211084638U CN211084638U CN201922407462.6U CN201922407462U CN211084638U CN 211084638 U CN211084638 U CN 211084638U CN 201922407462 U CN201922407462 U CN 201922407462U CN 211084638 U CN211084638 U CN 211084638U
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- air
- silicon wafer
- oven
- hot air
- drying cavity
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Abstract
The utility model is suitable for a silicon chip processing technology field for the photovoltaic, provides a trough cover heated air circulation oven, including the oven shell, be equipped with the baffle in it, will the oven shell separates into stoving chamber and wind channel, is equipped with on the oven shell with the trough cover of wind channel intercommunication, install heating device in the wind channel, be equipped with a plurality of air outlets on the trough cover, the air outlet with the stoving chamber position is relative; the silicon wafer positioning device is arranged in the drying cavity of the oven shell and used for clamping and positioning the silicon wafer; and the wind circulating device is used for making hot wind circulate between the drying cavity and the air channel, the beneficial effects of the utility model are that: the hot air uniformly enters the drying cavity from the air outlet formed in the slot cover, the air outlet direction of the hot air is parallel to the plane where the silicon wafer is located, the angle of the silicon wafer can be adjusted according to the air flow angle, and the situation that the silicon wafer is blown to be broken is not easy to cause.
Description
Technical Field
The utility model relates to a silicon chip processing technology field for the photovoltaic especially relates to a capping heated air circulation oven.
Background
Monocrystalline silicon is a relatively active non-metallic element, is an important component of crystal materials, and is in the front of the development of new materials. The solar photovoltaic power generation and heat supply semiconductor material is mainly used as a semiconductor material and utilizes solar photovoltaic power generation, heat supply and the like. Since solar energy has the advantages of cleanness, environmental protection, convenience and the like, in recent thirty years, solar energy utilization technology has been developed greatly in the aspects of research and development, commercial production and market development, and becomes one of the emerging industries of rapid and stable development in the world.
In the drying operation of the silicon wafer, because the silicon wafer is crisp and thin, air is not uniformly blown out from all places in the original hot air circulation oven, so that the air blown to the silicon wafer is not uniform, the wind power of some places is larger, the wind power of some places is smaller, some silicon wafers are not dried, and some silicon wafers are blown to be broken by the circulating wind.
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of the utility model is to provide a capping heated air circulation oven aims at solving the technical problem who proposes in the background art.
The embodiment of the utility model provides a realize like this, a capping heated air circulation oven, include:
the oven comprises an oven shell, a heating device and a plurality of air outlets, wherein a partition plate is arranged in the oven shell and divides the oven shell into a drying cavity and an air channel;
the silicon wafer positioning device is arranged in the drying cavity of the oven shell and used for clamping and positioning the silicon wafer; and
and the air circulating device is used for circulating the hot air between the drying cavity and the air duct.
As a further aspect of the present invention: the silicon wafer positioning device is provided with a universal clamping piece, the universal clamping piece is used for inserting the silicon wafer, and the silicon wafer is adjusted, so that the plane where the silicon wafer is located is parallel to the hot air outlet direction.
As a further aspect of the present invention: the universal clamping piece comprises a base, a universal ball seat and a universal ball, the universal ball seat is installed on the silicon wafer positioning device through the base, the universal ball is movably matched with the universal ball seat, and a positioning groove is formed in the universal ball.
As a further aspect of the present invention: the silicon wafer positioning device is fixed on the placing plate, a plurality of holes are formed in the placing plate, and the placing plate is matched with the oven shell in a drawing mode.
As a further aspect of the present invention: the air outlet end of the placing plate is connected with an air return filter screen, and the air return filter screen stabilizes an air field and enables wind power entering the air circulating device to be kept stable.
As a further aspect of the present invention: the wind circulating device comprises fan blades and a motor, the fan blades are located at the joint of the air channel and the drying cavity, and the fan blades are driven by the motor to rotate.
As a further aspect of the present invention: the baffle is in being close to the position of capping has still seted up a plurality of vice air outlets, the air output of vice air outlet is less than the air output of air outlet.
As a further aspect of the present invention: the device also comprises a control device, wherein the control device is connected with the heating device and the wind circulating device and is used for controlling the connection of the heating device and the wind circulating device.
Compared with the prior art, the beneficial effects of the utility model are that: the air enters into the capping after heating of heating device, hot-blast even the entering into of air outlet from the capping that sets up dries the intracavity, and hot-blast air-out direction keeps parallel with the place plane of silicon chip, and can adjust the angle of silicon chip according to the air current angle, is difficult for causing the silicon chip to be blown garrulous condition, hot-blast moisture after drying with the silicon chip, enter into the wind channel again through wind circulating device and heated by heating device, silicon chip drying efficiency is high, the piece rate is low.
Drawings
Fig. 1 is a schematic structural diagram of a slot cover hot air circulation oven.
Fig. 2 is a schematic structural diagram of a universal clamping piece in a slot cover hot air circulation oven.
In the drawings: 1-oven shell, 2-drying cavity, 3-slot cover, 4-partition board, 5-fan blade, 6-motor, 7-air channel, 8-heating device, 9-placing board, 10-silicon chip positioning device (flower basket), 11-universal clamping piece, 111-base, 112-universal ball seat, 113-universal ball, 114-positioning slot, 12-silicon chip, 13-air outlet and 14-return air filter screen.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The following detailed description is provided for the specific embodiments of the present invention.
As shown in fig. 1, for the structure diagram of the slot cover hot air circulation oven provided by an embodiment of the present invention, the structure diagram includes an oven shell 1, a silicon wafer positioning device 10 and an air circulation device, a partition plate 4 is arranged in the oven shell 1 to separate the oven shell 1 into a drying cavity 2 and an air duct 7, a slot cover 3 communicated with the air duct 7 is arranged on the oven shell 1, a heating device 8 is arranged in the air duct 7, a plurality of air outlets 13 are arranged on the slot cover 3, the air outlets 13 are opposite to the drying cavity 2, that is, the air outlet direction is parallel to the plane of the silicon wafer 12; the silicon wafer positioning device 10 is arranged in the drying cavity 2 of the oven shell 1 and is used for clamping and positioning a silicon wafer 12; the wind circulating device is used for circulating hot wind between the drying cavity 2 and the air duct 7.
In practical application, air enters the slot cover 3 after being heated by the heating device 8, here, the heating device 8 can be a heating pipe, an electric heating wire and the like, no specific limitation is performed here, hot air uniformly enters the drying cavity 2 from an air outlet 13 arranged on the slot cover 3, the air outlet direction of the hot air is parallel to the plane where the silicon wafer 12 is located, the silicon wafer 12 is not prone to being blown to be broken, and the hot air dries moisture on the silicon wafer 12 and then enters the air duct 7 through the air circulating device to be heated by the heating device 8.
As shown in fig. 1-2, as a preferred embodiment of the present invention, a universal clamping member 11 is disposed on the silicon wafer positioning device 10, the universal clamping member 11 is used for inserting the silicon wafer 12, and adjusts the silicon wafer 12, so that the plane of the silicon wafer 12 is parallel to the hot air outlet direction.
Because in normal conditions, the hot-blast air current is the condition of disorder easily appears, leads to easily to have relative angle between silicon chip 12 and the air current, and through the universal clamping part 11 that sets up, it can be according to the air current angle to the angle of silicon chip 12 adjust, avoids silicon chip 12 to appear being blown garrulous problem.
As shown in fig. 1-2, as another preferred embodiment of the present invention, the universal clip 11 includes a base 111, a universal ball seat 112 and a universal ball 113, the universal ball seat 112 is mounted on the silicon wafer positioning device 10 through the base 111, the universal ball 113 is movably fitted with the universal ball seat 112, and a positioning groove 114 is formed on the universal ball 113.
Generally, a plurality of gimbal clamps 11 are disposed on both sides of a silicon wafer 12, and since the contact portions between the silicon wafer 12 and the gimbal balls 113 are easily broken when the silicon wafer 12 moves, the gimbal balls 113 are preferably made of a relatively soft and elastic plastic.
As shown in fig. 1, as another preferred embodiment of the present invention, the silicon wafer positioning device 10 is fixed on the placing plate 9, a plurality of openings are formed on the placing plate 9, and the placing plate 9 is matched with the oven housing 1 in a pulling manner.
The placing plate 9 and the oven shell 1 are in a pull-pull fit manner, so that the placing plate 9 and the silicon wafer positioning device 10 can be conveniently pulled out of the oven shell 1, and a new silicon wafer 12 is convenient to replace, and certainly, an opening or a door is arranged at the corresponding position of the oven shell 1; the opening of the placement plate 9 is for facilitating the smooth re-entry of hot air into the air duct 7.
As shown in fig. 1, as another preferred embodiment of the present invention, a return air filter 14 is connected to the air outlet end of the placing plate 9, and the return air filter 14 stabilizes the wind field, so that the wind entering the wind circulating device is kept stable.
The return air filter screen 14 is formed by welding mesh plates, and can effectively avoid the disorder of an air field of return air of the air circulating device, so that the air blown to the silicon wafer 12 is more uniform, and meanwhile, the air can be filtered.
As shown in fig. 1, as another preferred embodiment of the present invention, the wind circulating device includes a fan blade 5 and a motor 6, the fan blade 5 is located at the connection position of the wind channel 7 and the drying chamber 2, and the fan blade 5 is driven by the motor to rotate.
The fan blades 5 mainly function to blow hot air (return air) in the drying cavity 2 into the air duct 7 for reheating so as to realize the circulation flow of air.
As shown in fig. 1, as another preferred embodiment of the present invention, the partition board 4 is close to the position of the slot cover 3, and a plurality of auxiliary air outlets are further opened, and the air output of the auxiliary air outlets is less than the air output of the air outlet 13. Namely: when hot air enters the drying cavity 2, the air outlet 13 is used as a main air outlet, and the auxiliary air outlet is used as an auxiliary air outlet.
As shown in fig. 1, as another preferred embodiment of the present invention, the present invention further comprises a control device, wherein the control device is connected with the heating device 8 and the wind circulation device, and is used for controlling the connection between the heating device 8 and the wind circulation device.
The control device can control the start and stop of the heating device 8 and the wind circulating device, and can also control the heating temperature of the heating device 8 and the rotating speed of a motor in the wind circulating device.
The above embodiment of the utility model provides a capping heated air circulation oven, the air enters into capping 3 after heating of heating device 8 in, hot-blast air outlet 13 that sets up from capping 3 is even enters into stoving chamber 2, and hot-blast air-out direction keeps parallel with the place plane of silicon chip 12, and can adjust the angle of silicon chip 12 according to the air current angle, be difficult for causing silicon chip 12 to be blown garrulous condition, hot-blast moisture with on silicon chip 12 is dried after, it is heated by heating device 8 in wind channel 7 to enter into through wind circulating device again, silicon chip drying efficiency is high, the piece rate is low.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. A slot lid heated air circulation oven, characterized by, includes:
the oven comprises an oven shell, a heating device and a plurality of air outlets, wherein a partition plate is arranged in the oven shell and divides the oven shell into a drying cavity and an air channel;
the silicon wafer positioning device is arranged in the drying cavity of the oven shell and used for clamping and positioning the silicon wafer; and
and the air circulating device is used for circulating the hot air between the drying cavity and the air duct.
2. The slot cover hot air circulation oven according to claim 1, wherein the silicon wafer positioning device is provided with a universal clamping piece, the universal clamping piece is used for inserting the silicon wafer, and the silicon wafer is adjusted so that the plane of the silicon wafer is parallel to the direction of hot air outlet.
3. The slot cover hot air circulation oven according to claim 2, wherein the universal clamping piece comprises a base, a universal ball seat and a universal ball, the universal ball seat is mounted on the silicon wafer positioning device through the base, the universal ball is movably matched with the universal ball seat, and a positioning slot is formed in the universal ball.
4. The slot cover hot air circulation oven according to claim 1, 2 or 3, wherein the silicon wafer positioning device is fixed on a placing plate, the placing plate is provided with a plurality of openings, and the placing plate is matched with the oven shell in a drawing manner.
5. The slot-cover hot-air circulation oven as claimed in claim 4, wherein a return air filter screen is connected to the air outlet end of the placing plate, and the return air filter screen stabilizes an air field, so that the wind force entering the wind circulation device is kept stable.
6. The slot cover hot air circulating oven of claim 1, wherein the air circulating device comprises a fan blade and a motor, the fan blade is located at the joint of the air channel and the drying cavity, and the fan blade is driven by the motor to rotate.
7. The slot cover hot air circulation oven according to claim 1, wherein the partition plate is further provided with a plurality of auxiliary air outlets at positions close to the slot cover, and the air output of the auxiliary air outlets is smaller than that of the air outlets.
8. The slot lid hot air circulating oven of claim 1, further comprising a control device connected to the heating device and the air circulating device for controlling the connection of the heating device and the air circulating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922407462.6U CN211084638U (en) | 2019-12-27 | 2019-12-27 | Hot air circulation oven with slot cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922407462.6U CN211084638U (en) | 2019-12-27 | 2019-12-27 | Hot air circulation oven with slot cover |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211084638U true CN211084638U (en) | 2020-07-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922407462.6U Expired - Fee Related CN211084638U (en) | 2019-12-27 | 2019-12-27 | Hot air circulation oven with slot cover |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211084638U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111306902A (en) * | 2019-12-27 | 2020-06-19 | 上海釜川自动化设备有限公司 | Hot air circulation oven with slot cover |
-
2019
- 2019-12-27 CN CN201922407462.6U patent/CN211084638U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111306902A (en) * | 2019-12-27 | 2020-06-19 | 上海釜川自动化设备有限公司 | Hot air circulation oven with slot cover |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200724 Termination date: 20201227 |
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| CF01 | Termination of patent right due to non-payment of annual fee |