CN114951134A - Full-automatic cleaning equipment for quartz products and using method thereof - Google Patents
Full-automatic cleaning equipment for quartz products and using method thereof Download PDFInfo
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- CN114951134A CN114951134A CN202210553221.6A CN202210553221A CN114951134A CN 114951134 A CN114951134 A CN 114951134A CN 202210553221 A CN202210553221 A CN 202210553221A CN 114951134 A CN114951134 A CN 114951134A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/06—Cleaning involving contact with liquid using perforated drums in which the article or material is placed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses full-automatic cleaning equipment for quartz products, which comprises an equipment shell, wherein a feeding hole is formed in one side of the equipment shell, a discharging hole is formed in the other side of the equipment shell, a feeding platform is arranged close to the feeding hole, a discharging platform is arranged close to the discharging hole, a moving assembly is arranged on the inner surface of the equipment shell, a manipulator is arranged on the moving assembly, an ultrasonic cleaning tank, a pickling tank, a soaking and flushing tank and a draining platform are sequentially arranged in the equipment shell from the feeding hole to the discharging hole, a hot air drying structure is arranged above the draining platform and in the equipment shell, and a top lighting system is further arranged on the inner surface of the equipment shell. The invention has the advantages that: the equipment is centrally controlled by a PLC system or an industrial personal computer, so that the labor cost is reduced, and the production efficiency is accelerated; the purpose of the cleaning is to remove metal ions, dust, fingerprints, and the like on the surface of the product.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to full-automatic cleaning equipment for quartz products and a using method thereof.
Background
At present, in the processing of semiconductor products, it is necessary to remove metal ions from the products.
The pickling solution used by the equipment is prepared from hydrochloric acid: hydrogen peroxide: pure water, hydrochloric acid: hydrogen peroxide: the pure water is 1:1:3-6, and hydrochloric acid and hydrogen peroxide can react at normal temperature to generate products such as HCLO, CL2, HCLO3 and the like.
At present, the pickling tank is manually carried and placed by operators, equipment is opened during the pickling tank, corrosive gas is sucked, harm is caused to human bodies, and indoor environment is polluted. The air gun also can produce a large amount of noises when drying, which affects the health of people, and the air gun is always wet in a clean room, which affects the comfort level of operators. The product is frequently taken and placed manually during blowing, so that some uncertainty is generated, and the product is easy to collide.
Disclosure of Invention
In order to solve the various problems, the invention provides full-automatic cleaning equipment for quartz products and a using method thereof, wherein the equipment is centrally controlled by a PLC system or an industrial personal computer, so that the labor cost is reduced, and the production efficiency is accelerated; the purpose of the cleaning is to remove metal ions, dust, fingerprints, and the like on the surface of the product.
In order to solve the technical problems, the technical scheme provided by the invention is as follows: a full-automatic cleaning device for quartz products comprises a device shell, wherein a feeding hole is formed in one side of the device shell, a discharging hole is formed in the other side of the device shell, a feeding platform is arranged close to the feeding hole, a discharging platform is arranged close to the discharging hole, a moving assembly is arranged on the inner portion of the device shell, a manipulator is arranged on the moving assembly, an ultrasonic cleaning tank, a pickling tank, a soaking and showering tank and a draining platform are sequentially arranged in the device shell from the feeding hole to the discharging hole, a hot air drying structure is arranged above the draining platform and in the device shell, and a top illuminating system is further arranged on the inner portion of the device shell;
the device comprises a shell, a feeding port, a discharging port, a first pneumatic lifting door, a second pneumatic lifting door, a negative pressure vacuumizing pipe and an external vacuumizing pump, wherein the feeding port is provided with the first pneumatic lifting door, the discharging port is provided with the second pneumatic lifting door, the upper surface of the shell of the device is communicated with the negative pressure vacuumizing pipe, and the other end of the negative pressure vacuumizing pipe is communicated with the external vacuumizing pump.
Preferably, the intercommunication has first inlet tube above the ultrasonic cleaning tank, the intercommunication has the second inlet tube above the descaling bath, the intercommunication has the third inlet tube above soaking and drenching the groove, all install the solenoid valve on first inlet tube and the third inlet tube, install first measuring pump on the second inlet tube, the common intercommunication of first inlet tube other end, the second inlet tube other end and the third inlet tube other end has the connecting pipe, the connecting pipe other end and external water supply equipment intercommunication.
Preferably, ultrasonic cleaning tank and soaking are washed and are drenched a side upper end department and all opened first high-order overflow mouth, open the side upper end department of descaling bath and have the high-order overflow mouth of second, the external waste liquid case of the high-order overflow mouth of second, the intercommunication has the drainage solenoid valve below the ultrasonic cleaning tank, first high-order overflow mouth and the drainage solenoid valve other end are all external sewage treatment station.
Preferably, inside upper end department of descaling bath installs PH sensor and temperature sensor, install corrosion resistant heater on the inside bottom surface of descaling bath, there is the floater level gauge in the descaling bath, the intercommunication has first evacuation pump below the descaling bath, the external waste liquid case of the first evacuation pump other end, the high-order overflow mouth intercommunication of second on the descaling bath has connecting pipe two, the external waste liquid case of connecting pipe two other ends, install the confession sour subassembly with the descaling bath intercommunication in the equipment shell, temperature sensor and corrosion resistant heater coordinated control keep the acidizing fluid temperature ℃, floater level gauge low level and the linkage of first evacuation pump.
Preferably, the acid supply assembly comprises an acid distributor fixedly installed in the equipment shell, a second metering pump is communicated with the lower surface of the acid distributor, the other end of the second metering pump is communicated with the pickling tank, and the pH sensor is in linkage control with the acid distributor; the upper surface of the pickling tank is hinged with a split cover plate, and the split cover plate is driven by a driving motor or a rotating cylinder to rotate to open and close.
The invention also comprises a using method of the full-automatic quartz product cleaning equipment, which comprises the following specific steps:
the method comprises the following steps: placing a quartz product to be cleaned in a material basket, placing the quartz product on a feeding table, or conveying the quartz product to the side of equipment by an AGV trolley, moving a manipulator to a feeding station along a track on a moving assembly, grabbing the material basket, moving the material basket to an ultrasonic cleaning station, placing the material basket in an ultrasonic cleaning tank, and performing ultrasonic cleaning for 10-20 minutes;
step two: the manipulator transfers the material basket to a pickling tank to be soaked for 10-20 minutes, and the pickling tank is in a closed state during working;
step three: the manipulator transfers the material basket into a soaking and spraying tank for soaking, an emptying pump is started after a period of time, water in the tank is quickly emptied, and meanwhile, a spray head is opened to start spraying;
step four: the manipulator transfers the product to a draining table and dries the product for 5 to 10 minutes by hot air; the blown gas is nitrogen, so that the gas is pure gas when the product is blown;
step five: and transferring the dried product to a blanking table or an AGV by a manipulator.
Compared with the prior art, the invention has the advantages that: the equipment is controlled by a PLC or an industrial personal computer, and a material basket is placed on a material loading platform or is transported to an equipment designated area by an AGV trolley to wait for material loading. The sealed box body with the negative pressure system is internally provided with: the device comprises a travelling crane mechanical arm, an ultrasonic cleaning tank, a pickling tank, a soaking and showering tank, a draining platform and the like. Is provided with an acid-base adjusting system, an automatic temperature control blowing and drying system and an emergency acid-base neutralizing system. The cleaning and the drying are fully automatic, and different parameters can be set according to different products. The equipment reduces the number of operators, reduces the labor intensity of the operators and improves the production efficiency.
Drawings
Fig. 1 is a schematic front view of the present invention.
Fig. 2 is a schematic top view of the present invention.
Fig. 3 is a schematic structural view of the opening and closing state of the split cover plate.
As shown in the figure: 1. an equipment housing; 2. a feeding table; 3. a blanking table; 4. a moving assembly; 5. a manipulator; 6. an ultrasonic cleaning tank; 7. a pickling tank; 8. soaking the showering tank; 9. a draining table; 10. a hot air drying structure; 11. a first lift pneumatic door; 12. a second lift pneumatic door; 13. a negative pressure vacuum pumping pipe; 14. a first water inlet pipe; 15. a second water inlet pipe; 16. a third water inlet pipe; 17. an electromagnetic valve; 18. a first metering pump; 19. connecting pipes; 20. a first high-level overflow port; 21. a leakage-proof electromagnetic valve; 22. a pH sensor; 23. a temperature sensor; 24. a corrosion resistant heater; 25. a floating ball liquid level meter; 26. a first evacuation pump; 27. a second connecting pipe; 28. an acid supply assembly; 2801. preparing an acid machine; 2802. a second metering pump; 29. a top lighting system; 30. the cover plate is split; 31. a shower head; 32. a second evacuation pump; 33. a second high-level overflow port; 34. and the second floating ball liquid level meter.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
With reference to the attached drawings 1 to 3, the full-automatic quartz product cleaning equipment comprises an equipment shell 1, a lifting pneumatic door, a PLC (programmable logic controller) or an industrial personal computer, a pickling tank 7, a soaking and rinsing tank 8 and a draining table 9 which are sequentially arranged from left to right and provided with an ultrasonic cleaning tank 6, the pickling tank, the soaking and rinsing tank and the draining table, wherein the equipment shell 1 is made of pvc or other corrosion-resistant materials; the inside of the device is provided with a manipulator 5 which is arranged on a track of the moving component 4; the rail has three mounting modes: first, it can be installed on the ground; secondly, the side-mounted type air conditioner can be laterally arranged on a box body of the equipment; and thirdly, the device is hoisted at the top of the device.
The working process is as follows: the products are manually placed on the loading platform 2 or are delivered to the side of the equipment by an AGV trolley. The AGV trolley is provided with a positioning function and a wireless communication system, and can be communicated with a control system in real time. When the AGV dolly arrives at the other appointed area of equipment, signals are sent to the control system, the control system opens the pneumatic lifting door, the manipulator installed in the equipment snatchs the material basket on the AGV dolly and moves to the equipment, and the pneumatic lifting door is closed.
The ultrasonic cleaning tank 6 is provided with an ultrasonic generator and a pure water inlet.
The pickling tank 7 is provided with a split cover plate 30, an acid distributor 2801, a second metering pump 2802, a pH sensor 22, a floating ball level gauge 25 and a pH sensor 22, and pH signals are collected by the pH sensor 22 in real time and fed back to a control system, and then the second metering pump 2802 is controlled to add acid liquor through operation to adjust the pH value of the pickling tank 7.
A second emptying pump 32 is arranged below the soaking and leaching tank 8, so that water can be emptied quickly. A spray head 31 is arranged on the water-saving device and is controlled by an electromagnetic valve 17, and the spray head 31 is started after the water is quickly emptied by an emptying valve.
The draining platform 9 is provided with a hot air drying structure 10, an air inlet and an air outlet are respectively arranged at two sides of the draining platform 9, the air inlet is connected with the hot air drying structure 10, and a temperature controller is arranged; the blown gas is nitrogen, so that the gas is pure gas when the product is blown.
The water in the ultrasonic cleaning tank 6 and the water in the soaking and showering tank 8 are pure water, the pure water needs to be replaced every day, the water needs to keep an overflow state, and the overflow state is kept because the flowing water takes away residues left by cleaning, so that the water is kept in a relatively clean state.
The pickling tank 7 is provided with a split cover plate 30, and the manipulator 5 can be opened when taking and placing the material basket.
The top of the device is provided with a top lighting system 29; the lower end of the manipulator 5 is suspended with a material basket, and the upper part is externally connected with a vacuum pump to collect and filter volatilized gas.
The induction door is controlled by program or manually, and when the induction door is opened, the cover of the pickling tank 7 is closed. And the corrosive gas is ensured not to be leaked.
The PLC controller or the industrial personal computer controls the working states of all the devices and the electronic components. Can be connected with the signals of the temperature sensor 23, the inductive switch and the infrared sensor and control the working states of the driving device, the metering pump, the PH sensor 22, the ultrasonic generator, the water supply device, the hot blast device and the electric control valve.
The side surfaces of the ultrasonic cleaning tank 6 and the soaking and showering tank 8 are provided with a first high-level overflow port 20, and the side surface of the pickling tank 7 is provided with a second high-level overflow port 33;
each tank is provided with a pure water inlet at a high level and is controlled by a corresponding pure water solenoid valve 17.
The ultrasonic generator in the ultrasonic cleaning tank 6 is started along with the equipment.
When the temperature sensor 23 in the pickling tank 7 detects that the temperature is lower than the set temperature of 40 ℃, the corrosion-resistant heater 24 starts to be started. When the temperature sensor 23 senses that the temperature reaches the set temperature, the corrosion-resistant heater 24 starts to stop. Ensuring that the pickling part is in a proper temperature environment.
When the pH sensor 22 in the pickling tank 7 detects that the pH value of the acid liquor exceeds the standard, the PLC starts the second metering pump 2802 to add the acid liquor or opens the pure water valve to add pure water, and the pH value of the pickling tank 7 is automatically adjusted.
The floating ball liquid level meter 25 in the pickling tank 7 can provide liquid level data to the PLC, and when the acid liquid is lower than a certain liquid level, the acid dispenser is started to replenish the acid liquid.
The hot air drying structure 10 on the draining platform 9 is controlled by a separate temperature controller. The temperature of the hot air can be controlled, a stable temperature interval is kept, and the hot air is automatically closed at high temperature.
The pneumatic lifting door is driven by a cylinder, and the upper part and the lower part are both provided with induction switches. When the door reaches a specified position, a signal is sent out, and the cylinder is stopped.
And one or more induction switches are arranged at each station and the upper and lower material ports and are used for controlling the stop position of the manipulator 5. Two inductive switches are additionally arranged at two ends of the track for limiting.
The invention also comprises a using method of the full-automatic quartz product cleaning equipment, which comprises the following specific steps:
the method comprises the following steps: the main processing flow is that a quartz product to be cleaned is placed in a material basket and placed on a loading platform or is conveyed to the side of equipment by an AGV trolley, a manipulator moves to a loading station along a rail, the material basket is grabbed and moves to an ultrasonic cleaning station, the material basket is placed in an ultrasonic cleaning tank, and ultrasonic cleaning is carried out for 10-20 minutes.
Step two: and the manipulator transfers the material basket to the pickling tank to be soaked for 10-20 minutes, and the pickling tank is in a closed state during working.
Step three: and the manipulator transfers the material basket to a soaking and spraying tank for soaking, starts an emptying pump after a period of time, quickly empties the water in the tank, and simultaneously opens a spray head to start spraying.
Step four: and transferring the product to a draining rack by the manipulator, and drying for 5-10 minutes by hot air. The blown gas is nitrogen, so that the gas is pure gas when the product is blown.
Step five: and transferring the dried product to a blanking table or an AGV by a manipulator.
The present invention and its embodiments have been described above, and the description is not intended to be limiting, and the drawings are only one embodiment of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should appreciate that they can readily use the disclosed conception and specific embodiments as a basis for designing or modifying other structures for carrying out the same purposes of the present invention without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (9)
1. The full-automatic cleaning equipment for the quartz products comprises an equipment shell (1) and is characterized in that a feeding hole is formed in one side of the equipment shell (1), a discharging hole is formed in the other side of the equipment shell, a feeding platform (2) is placed close to the feeding hole, a discharging platform (3) is placed close to the discharging hole, a moving assembly (4) is installed on the inner portion of the equipment shell (1), a manipulator (5) is installed on the moving assembly (4), an ultrasonic cleaning tank (6), a pickling tank (7), a soaking and flushing tank (8) and a draining platform (9) are sequentially installed in the equipment shell (1) from the feeding hole to the discharging hole, a hot air drying structure (10) is installed above the draining platform (9) and located in the equipment shell (1), and a top illuminating system (29) is further installed on the inner portion of the equipment shell (1);
the device is characterized in that a first pneumatic lifting door (11) is installed at the feeding port, a second pneumatic lifting door (12) is installed at the discharging port, a negative-pressure vacuum-pumping pipe (13) is communicated with the upper surface of the device shell (1), and the other end of the negative-pressure vacuum-pumping pipe (13) is communicated with an external vacuum-pumping pump.
2. The full-automatic cleaning equipment for the quartz products according to claim 1, characterized in that: the intercommunication has first inlet tube (14) above ultrasonic cleaning tank (6), the intercommunication has second inlet tube (15) above descaling bath (7), the intercommunication has third inlet tube (16) above soaking and drenching groove (8), all install solenoid valve (17) on first inlet tube (14) and third inlet tube (16), install first measuring pump (18) on second inlet tube (15), first inlet tube (14) other end, second inlet tube (15) other end and third inlet tube (16) other end common intercommunication have company's pipe (19), company's pipe (19) other end and external water supply equipment intercommunication.
3. The full-automatic cleaning equipment for the quartz products according to claim 1, characterized in that: ultrasonic cleaning tank (6) and soak and dash and drench a side upper end department of groove (8) and all open first high-order overflow mouth (20), the side upper end department of descaling bath (7) opens and has second high-order overflow mouth (33), the external waste liquid case of second high-order overflow mouth (33), the intercommunication has drainage solenoid valve (21) below ultrasonic cleaning tank (6), first high-order overflow mouth (20) and the equal external sewage treatment station of drainage solenoid valve (21) other end.
4. The full-automatic cleaning equipment for the quartz products according to claim 3, characterized in that: PH sensor (22) and temperature sensor (23) are installed to inside upper end department of descaling bath (7), install corrosion-resistant heater (24) on the inside bottom surface of descaling bath (7), there is floater level gauge (25) in descaling bath (7), the intercommunication has first evacuation pump (26) below descaling bath (7), the external waste liquid case of first evacuation pump (26) other end, second high-order overflow mouth (33) intercommunication on descaling bath (7) has connecting pipe two (27), the external waste liquid case of connecting pipe two (27) other end, install in equipment shell (1) and supply sour subassembly (28) with descaling bath (7) intercommunication, temperature sensor (23) and corrosion-resistant heater (24) coordinated control keep acidizing fluid temperature 40 ℃, floater level gauge (25) low level and the linkage of first evacuation pump (26).
5. The full-automatic cleaning equipment for the quartz products according to claim 4, characterized in that: supply sour subassembly (28) including acid blending machine (2801) of fixed mounting in equipment shell (1), the intercommunication has second measuring pump (2802) below acid blending machine (2801), the second measuring pump (2802) other end and descaling bath (7) intercommunication, PH sensor (22) with acid blending machine (2801) coordinated control.
6. The full-automatic cleaning equipment for the quartz products according to claim 4, characterized in that: the pickling tank (7) is hinged to a split cover plate (30), and the split cover plate (30) is driven by a driving motor or a rotating cylinder to rotate to open and close.
7. The full-automatic cleaning equipment for the quartz products according to claim 2, characterized in that: soak and dash and drench groove (8) inner wall upper end department and install shower head (31), below the intercommunication have second evacuation pump (32), the external sewage treatment station of second evacuation pump (32) other end, it floats in drenching groove (8) and installs second floater level gauge (34) to soak, second floater level gauge (34) high-order with soak solenoid valve (17) linkage on drenching groove (8), second floater level gauge (34) low level and second evacuation pump (32) linkage.
8. The full-automatic cleaning equipment for the quartz products according to claim 1, characterized in that: the moving assembly (4) consists of a ball screw structure and a driving motor, and the ball screw structure can be replaced by a gear rack structure or a belt transmission mechanism.
9. The use method of the full-automatic quartz product cleaning equipment is characterized by comprising the following steps of: the method comprises the following specific steps:
the method comprises the following steps: placing a quartz product to be cleaned in a material basket, placing the quartz product on a feeding table, or conveying the quartz product to the side of equipment by an AGV trolley, moving a manipulator to a feeding station along a track on a moving assembly, grabbing the material basket, moving the material basket to an ultrasonic cleaning station, placing the material basket in an ultrasonic cleaning tank, and performing ultrasonic cleaning for 10-20 minutes;
step two: the manipulator transfers the material basket to a pickling tank to be soaked for 10-20 minutes, and the pickling tank is in a closed state during working;
step three: the manipulator transfers the material basket into a soaking and spraying tank for soaking, after a period of time, an emptying pump is started to quickly empty the water in the tank, and meanwhile, a spray head is opened to start spraying;
step four: the manipulator transfers the product to a draining table and dries the product for 5 to 10 minutes by hot air; the blown gas is nitrogen, so that the gas is pure gas when the product is blown;
step five: and transferring the dried product to a blanking table or an AGV by a manipulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210553221.6A CN114951134A (en) | 2022-05-19 | 2022-05-19 | Full-automatic cleaning equipment for quartz products and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202210553221.6A CN114951134A (en) | 2022-05-19 | 2022-05-19 | Full-automatic cleaning equipment for quartz products and using method thereof |
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| CN114951134A true CN114951134A (en) | 2022-08-30 |
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| CN202210553221.6A Pending CN114951134A (en) | 2022-05-19 | 2022-05-19 | Full-automatic cleaning equipment for quartz products and using method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7324544B1 (en) | 2022-12-19 | 2023-08-10 | ジャパン・フィールド株式会社 | Ultrasonic cleaning equipment equipped with degassing mechanism for cleaning solution |
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| CN108480277A (en) * | 2018-04-10 | 2018-09-04 | 绍兴文理学院 | A kind of Wafer Cleaning drying unit |
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