CN110721958A - Method for improving crystal surface processing precision for crystal cleaning - Google Patents
Method for improving crystal surface processing precision for crystal cleaning Download PDFInfo
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- CN110721958A CN110721958A CN201911158617.5A CN201911158617A CN110721958A CN 110721958 A CN110721958 A CN 110721958A CN 201911158617 A CN201911158617 A CN 201911158617A CN 110721958 A CN110721958 A CN 110721958A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/87—Investigating jewels
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- General Chemical & Material Sciences (AREA)
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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Abstract
The invention discloses a method for improving the processing precision of a crystal surface for crystal cleaning, which comprises the following steps: a. pre-cleaning: putting the crystal wafer into pure water to carry out ultrasonic or megasonic heating pre-cleaning; b. acid washing: placing the pre-cleaned quartz plate in a hydrochloric acid solution for acid cleaning; c. acid removal: cleaning the washed crystal plate in a crystal cleaning machine to remove surface acid solution and dirt; d. drying: drying the quartz plate after acid removal in a dryer; e. and (4) checking: and (4) putting the dried crystal wafer into a crystal inspection device for inspection, and screening out the crystal wafer with surface defects. The invention has the advantages of good cleaning effect, high inspection efficiency and high inspection accuracy.
Description
Technical Field
The invention relates to the technical field of crystal cleaning, in particular to a method for improving the processing precision of a crystal surface for crystal cleaning.
Background
Crystal (rock crystal) is a rare mineral, a kind of gem, a quartz crystal, and belongs to the quartz family in mineralogy. The main chemical component is silicon dioxide with the chemical formula of SiO 2.
When pure, colorless and transparent crystals are formed. When containing trace elements such as Al and Fe, the color is pink, purple, yellow, brown, etc. Different types of color centers are formed by irradiating the trace elements to generate different colors, such as purple, yellow, brown, pink and the like. The inclusion crystal contains associated inclusion minerals such as hair crystal, green ghost, red rabbit hair, etc., and the inclusion is rutile, tourmaline, actinolite, mica, chlorite, etc.
The crystal is processed into the crystal wafer and then needs to be cleaned to remove impurities on the surface, the existing cleaning method has poor cleaning effect on the crystal, the dirt remained on the surface of the cleaned crystal wafer influences the inspection of the crystal wafer, the existing inspection methods are all manual inspection, the inspection efficiency is low, the eyes are easy to fatigue after the crystal wafer works for a long time manually, the false inspection rate is high, and the production cost of enterprises is greatly increased.
Disclosure of Invention
The present invention is directed to solving the above problems of the prior art and providing a method for improving the surface processing accuracy of a crystal for use in cleaning the crystal.
The purpose of the invention can be realized by the following technical scheme: a method for improving the processing precision of the crystal surface for crystal cleaning comprises the following steps:
a. pre-cleaning: putting the crystal wafer into pure water to carry out ultrasonic or megasonic heating pre-cleaning;
b. acid washing: placing the pre-cleaned quartz plate in a hydrochloric acid solution for acid cleaning;
c. acid removal: cleaning the washed crystal plate in a crystal cleaning machine to remove surface acid solution and dirt;
d. drying: drying the quartz plate after acid removal in a dryer;
e. and (4) checking: putting the dried crystal plate into a crystal inspection device for inspection, and screening out the crystal plate with surface defects;
wherein, the crystal inspection device in step e comprises a frame, an electric slide rail is arranged on the frame, a fixing frame, an optical inspection part and a discharging part are sequentially arranged on the electric slide rail from right to left, the fixing frame can be detachably arranged on the electric slide rail, a plurality of vertically arranged crystal plate slots are arranged on the fixing frame along the sliding direction of the fixing frame, the crystal plate slots are arranged into a plurality of groups along the length direction of the fixing frame, the optical inspection part comprises a light shield and a plurality of groups of optical inspection parts, the optical inspection part comprises a light source plate and a shooting plate, a light source is arranged on the light source plate, a plurality of cameras are uniformly arranged on the shooting plate, pictures shot by the cameras only have black and white colors, the light source and the cameras are oppositely arranged, a crystal plate outlet is arranged on the frame between the light source plate and the shooting plate, and light source plate slots and shooting plate slots are respectively arranged on the two sides of the fixing frame, which are, the two sides of the crystal wafer slot are communicated with the light source board clamping groove and the shooting board clamping groove respectively, the crystal wafer slot penetrates through the upper end and the lower end of the fixing frame, a limiting component is arranged at the lower end of the crystal wafer slot, a control component used for controlling the limiting component to remove limiting of the crystal wafer is arranged on the light source board, and a server which is in communication connection with the camera and the control component respectively is arranged on the rack.
The working principle of the crystal inspection device provided by the invention is as follows: the crystal plate is inserted into the crystal plate slot in sequence, then the fixing frame is arranged at the right end of the electric slide rail, the electric slide rail is started to drive the fixing frame to slide to the optical detection part, the light source plate is just embedded into the light source plate clamping slot, the shooting plate is just embedded into the shooting plate clamping slot, then the luminous source is started to emit strong light to irradiate the crystal, the camera is started to shoot a picture when the strong light irradiates the crystal, the shot picture is uploaded to the server, because the server receives the photos and analyzes whether the photos have the shadow or not, if the photos have the shadow, and finally, the electric slide rail continuously drives the fixing frame to slide to the discharging part, and all the crystal plates on the fixing frame are dismounted through the part.
According to the invention, impurities and particles existing on the surface of the crystal silicon in a physical adsorption form can be removed through ultrasonic or megasonic heating pre-cleaning, then the crystal silicon is corroded by adopting a mixed acid solution, the impurities and particles existing in a chemical adsorption form on the surface of the crystal can be removed as a result of corrosion, the cleaning effect is good, the cleaning cost is low, the harm to people, equipment and the environment in the cleaning process is small, meanwhile, the surface smoothness of the crystal is improved, and the quality of the crystal after cleaning is ensured; through the matching of the luminous source and the camera, the photos shot after the crystal plate with the defect on the surface is transparent can have black shadows, compared with the traditional manual inspection, the inspection effect is good, and the crystal plate with the defect can be screened out in time; through the arrangement of the multiple crystal plate slots on the fixing frame, multiple crystal plates can be simultaneously inspected, the inspection efficiency is greatly improved, manual work only needs to carry out secondary inspection on the screened defective products, the eye fatigue of workers is relieved, the false inspection rate is low after the secondary inspection, and errors are not easy to occur; the vertical structure is arranged on the crystal plate slot, so that the crystal plate is vertically fixed after being inserted, and light rays emitted by the light emitting source are vertically arranged when penetrating through the crystal plate, so that refraction is not easy to generate, shadow generated by light ray refraction in a shot picture is avoided, the judgment precision of the server on the picture is improved, and the accuracy of crystal plate screening is improved; through the arrangement of the light source board clamping grooves and the shooting board clamping grooves, when the light source and the camera shoot the photos of the crystal wafer, the position of the fixing frame is limited by the light source boards and the shooting boards, the light source and the camera are kept at close positions, the shot photos are clear, and the inspection accuracy is improved; through the arrangement of the limiting assembly, the height of the crystal plate placed in the crystal slot is fixed, the light emitted by the light emitting source can penetrate through the whole crystal plate, and the whole crystal plate can be shot into the picture by the camera; through the setting of control assembly, can in time select the crystal plate that is the flaw article of inspection, make it distinguish with other intact crystal plates of outward appearance, and need not artifical manual operation, labour saving and time saving, easily operation.
The temperature of the pure water used in the step a is 60-70 ℃, and in the temperature range of the crystal, impurities and particles existing on the surface of the crystal in a physical adsorption mode can be rapidly desorbed and further separated from the surface of the crystal.
The concentration of the hydrochloric acid used in the step b is 5% ~ 20% which is beneficial to controlling the reaction speed of acid washing.
And c, pickling the crystal in the step b for 20-60 s, wherein the crystal surface has good cleanliness after being corroded under the pickling time.
The spacing subassembly includes locating part and spacing groove, the spacing groove is including seting up first spacing groove and the second spacing groove in crystal plate slot both sides respectively, the locating part includes ejector pad and two supporting parts, crystal plate slot both ends are located respectively to two supporting parts, first spacing groove is equipped with the baffle with crystal plate slot junction, the ejector pad slides and sets up in first spacing groove and be connected through a plurality of elastic components with the baffle, the supporting part slides and sets up in the spacing inslot of second, the supporting part passes through connecting portion with the ejector pad and is connected, the elastic component outwards ejecting so that the supporting part supports the crystal plate in second spacing groove slides to the crystal plate slot from the ejector pad.
The light source plate is provided with a plurality of movable cavities at the top, a positioning block capable of sliding up and down is arranged in each movable cavity, a positioning inclined plane is arranged on the right side of the top of each positioning block, a positioning support plate is horizontally arranged in the middle of each movable cavity, the positioning blocks are connected with the positioning support plates through positioning elastic pieces, each control assembly comprises a top plate, a control driving piece and a control gear, the top plate can move up and down and is arranged below the corresponding positioning support plate, the bottom of each positioning block extends to the lower portion of the corresponding positioning support plate, a pressing portion matched with the top plate in an abutting mode is arranged below the corresponding positioning support plate, the lower end of the top plate is connected with the bottom wall of each movable cavity through the corresponding control elastic piece, the top plate is connected with the corresponding control elastic piece in a sliding mode through a sliding block, the left side, and a top plate outlet is formed in one side, close to the shooting plate, of the bottom of the movable cavity, and the server is in communication connection with the control driving piece.
The bottom of the movable cavity is provided with an embedded groove for embedding the sliding block part, and the sliding block is embedded into the embedded groove to limit the horizontal displacement of the sliding block.
The gliding spout of confession sliding block is seted up to the roof lower extreme, the sliding block both ends are connected with spout inner wall both ends through the elastic component that resets respectively.
The movable cavity bottom is equipped with touches and presses the switch, touch and press switch and control driving piece electric connection, the roof is contradicted and is touched and press the switch so that control driving piece circular telegram, works as when the roof breaks away from and touches and presses the switch, the control driving piece outage.
The utility model discloses a light source plate, including the frame, ejection of compact part, mount, light source plate, support frame, ejector pad, ejection of compact part, two sill bars and ejection of compact driving piece in the frame are inlayed including sliding, the sill bar spout has been seted up in the frame, be connected through ejection of compact elastic component between sill bar and the sill bar spout inner wall, connect through a plurality of support frames between two sill bars, the mount slides when locating ejection of compact part, the support frame inserts respectively to the light source plate draw-in groove in, the support frame is close to crystal piece slot one side and evenly is equipped with a plurality of portions that push away with ejector pad same high department, the sill bar is kept away from ejection.
Compared with the prior art, the invention has the advantages of good cleaning effect, high inspection efficiency and high inspection accuracy.
Drawings
FIG. 1 is a graph showing the results of the present invention.
Fig. 2 is a top view of the present invention.
Fig. 3 is a partial schematic view of fig. 2 at a.
Fig. 4 is a schematic view of the internal structure of the automatic charging means of the present invention.
Fig. 5 is a partial schematic view of fig. 4 at B.
Fig. 6 is a schematic view of the installation of the spacing assembly of the present invention.
FIG. 7 is a schematic view of the structure of the light detecting unit of the present invention.
Fig. 8 is a schematic view of the internal structure of the light source board of the present invention.
Fig. 9 is a partial schematic view at C in fig. 8.
FIG. 10 is a schematic view showing the structure of the cleaning tank of the present invention.
FIG. 11 is a schematic view showing the internal structure of the cleaning tank of the present invention.
Fig. 12 is a partial schematic view at D in fig. 10.
FIG. 13 is a schematic view of the connection of the top plate and slider in the present invention.
In the figure, 01, server; 1. a frame; 2. an electric slide rail; 3. a fixed mount; 4. a light detection part; 5. a discharge member; 6. a crystal plate slot; 61. fixing grooves; 7. a light shield; 8. a light detection unit; 9. a light source plate; 91. a light emitting source; 10. shooting and manufacturing a board; 101. a camera; 11. a crystal wafer outlet; 12. a light source board clamping groove; 13. a shooting plate clamping groove; 14. a limiting member; 141. a push block; 142. a support portion; 15. a limiting groove; 151. a first limit groove; 152. a second limit groove; 16. a baffle plate; 161. an elastic member; 17. a movable cavity; 171. a gear groove; 172. a roof outlet; 173. caulking grooves; 18. positioning blocks; 181. positioning the inclined plane; 19. positioning the supporting plate; 191. a pressing part; 20. positioning the elastic member; 21. a top plate; 211. a rack; 212. a chute; 22. controlling the driving member; 23. a control gear; 24. a control elastic member; 25. a slider; 26. a restoring elastic member; 27. a touch switch; 28. a bottom bar; 29. a discharge driving member; 30. a bottom bar chute; 31. a discharging elastic part; 32. a support frame; 321. a pushing part; 33. a drive plate; 34. a material storage box; 35. a material storage cavity; 351. a discharge channel; 3511. a discharge port; 3512. a butting groove; 36. a vibrator; 37. a discharge stop lever; 38. a support frame; 381. fixing grooves; 39. a slide rail; 382. a support rod; 3821. a rubber member; 40. a fixing plate; 41. a spring; 42. a cleaning tank; 43. a guide plate; 44. a blanking port; 45. screening a screen; 46. an air inlet pipe; 47. an air inlet turntable; 48. a foam tube; 49. an air outlet pipe; 50. a limiting convex edge; 51. a seal ring; 52. a limiting column; 53. a material receiving box; 54. a material taking port; 55. discharging parts; 56. pushing the material piece; 57. a connecting plate; 58. a plate groove; 59. a handrail; 60. a water pump; 61. receiving a filter screen; 461. an air pump.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.
Example one
1-13, a method for improving the surface finish accuracy of a crystal for crystal cleaning, comprising the steps of:
a. pre-cleaning: putting the crystal wafer into pure water to carry out ultrasonic or megasonic heating pre-cleaning;
b. acid washing: placing the pre-cleaned quartz plate in a hydrochloric acid solution for acid cleaning;
c. acid removal: cleaning the washed crystal plate in a crystal cleaning machine to remove surface acid solution and dirt;
d. drying: drying the quartz plate after acid removal in a dryer;
e. and (4) checking: putting the dried crystal plate into a crystal inspection device for inspection, and screening out the crystal plate with surface defects;
the temperature of pure water used in step a was 60 ℃.
The concentration of hydrochloric acid used in step b was 5%.
And c, the pickling time of the crystal water in the step b is 20 s.
In further detail, the crystal inspection device in step e comprises a frame 1, an electric slide rail 2 is arranged on the frame 1, a fixing frame 3, a photo-inspection part 4 and a discharging part 5 are sequentially arranged on the electric slide rail 2 from right to left, the fixing frame 3 is detachably arranged on the electric slide rail 2, a plurality of vertically arranged crystal wafer slots 6 are arranged on the fixing frame 3 along the sliding direction, the crystal wafer slots 6 are arranged into a plurality of groups along the length direction of the fixing frame 3, the photo-inspection part 4 comprises a light shield 7 and a plurality of groups of photo-inspection parts 8, each photo-inspection part 8 comprises a light source plate 9 and a shooting plate 10, a light source 91 is arranged on the light source plate 9, a plurality of cameras 101 are uniformly arranged on the shooting plate 10, the light source 91 and the cameras 101 are oppositely arranged, pictures shot by the cameras 101 have only two colors, a crystal wafer outlet 11 is arranged on the frame 1 between the light source plate 9 and the shooting plate 10, light source plate slots 12 and a camera card slot 13 are respectively arranged on two, the two sides of the crystal plate slot 6 are respectively communicated with the light source board clamping groove 12 and the shooting board clamping groove 13, the crystal plate slot 6 penetrates through the upper end and the lower end of the fixing frame 3, the lower end of the crystal plate slot 6 is provided with a limiting assembly, the light source board 9 is provided with a control assembly used for controlling the limiting assembly to remove the limiting control assembly of the crystal plate, the rack 1 is provided with a server 01 which is respectively communicated with the camera 101 and the control assembly, the light shield 7 is arranged, the influence of external light on the inspection result is prevented, and the accuracy of the inspection result is guaranteed.
A server is one of computers that runs faster, is more heavily loaded, and is more expensive than a regular computer. The server has high-speed CPU computing capability, long-time reliable operation, strong I/O external data throughput capability and better expansibility. Generally, a server has the capability of responding to a service request, supporting a service, and guaranteeing the service according to the service provided by the server. The server is used as an electronic device, and the internal structure of the server is very complex, but the difference with the internal structure of a common computer is not great, such as: cpu, hard disk, memory, system bus, etc.
In a detailed manner, the two ends of the crystal piece slot 6 are provided with fixing grooves 61 for embedding the edges of the crystal pieces, so that the firmness of the crystal pieces placed in the crystal piece slot 6 is improved, and the crystal pieces are not easy to shake during the moving process to influence the inspection result.
In more detail, the position-limiting assembly includes a position-limiting member 14 and a position-limiting groove 15, the position-limiting groove 15 includes a first position-limiting groove 151 and a second position-limiting groove 152 respectively opened at two sides of the crystal wafer slot 6, the position-limiting member 14 includes a push block 141 and two support portions 142, the two support portions 142 are respectively disposed at two ends of the crystal wafer slot 6, a baffle 16 is disposed at a connection portion between the first position-limiting groove 151 and the crystal wafer slot 6, the push block 141 is slidably disposed in the first position-limiting groove 151 and connected with the baffle 16 through a plurality of elastic members 161, the elastic members 161 are springs, the support portions 142 are slidably disposed in the second position-limiting groove 152, the support portions 142 are connected with the push block 141 through the connection portion 143, the elastic members 161 push the push block 141 outward to enable the support portions 142 to slide from the second position-limiting groove 152 to the crystal wafer in the crystal wafer slot 6, the push block 141 moves outward until its outer wall is kept with the outer wall of the fixing frame 3, the collision between the push block 141 and the light source plate 9 when the fixing frame 3 moves to the optical detection part 4 is avoided; when the pushing block 141 is not subjected to external force, the supporting part 142 is positioned in the crystal piece slot 6, the bottom of the crystal piece is abutted against the supporting part 142 when the crystal piece is inserted into the crystal piece slot 6 so as to be fixed in the crystal piece slot 6, when the crystal piece in the crystal piece slot 6 needs to be taken out, the pushing block 141 is extruded to move towards the first limiting groove 151, the pushing block 141 drives the supporting part 142 to move towards the second limiting groove 152, the fixing of the crystal piece is released, the crystal piece which loses the support can slide out from the lower end under the action of gravity, and after the external force action on the pushing block 141 is released, the pushing block 141 can move outwards under the action of external force to realize resetting; the fixed height of the crystal plate in the crystal plate slot 6 is kept stable through the two supporting parts 142, so that the optical detection part 8 with uniform height design can conveniently perform optical detection action on the crystal plate, the influence of dislocation on the result is avoided, and the accuracy of the detection result is improved; the supporting part 142 can be controlled to support and release the supporting of the crystal plate by controlling the push block 141, and two supporting parts 142 in the same crystal plate slot 6 are controlled by the same push block 141 during control, so that the structure is simple, the control effect is accurate, and the fault is not easy to occur.
In more detail, the top of the light source plate 9 is provided with a plurality of movable cavities 17, the movable cavities 17 are internally provided with positioning blocks 18 capable of sliding up and down, the right sides of the tops of the positioning blocks 18 are provided with positioning inclined planes 181, the middle parts of the movable cavities 17 are horizontally provided with positioning support plates 19, the positioning blocks 18 are connected with the positioning support plates 19 through positioning elastic pieces 20, the positioning elastic pieces 20 are springs, the control component comprises a top plate 21, a control driving piece 22 and a control gear 23, the control driving piece 22 is a motor, the top plate 21 can move up and down and is arranged below the positioning support plates 19, the bottom of the positioning blocks 18 extends to be arranged below the positioning support plates 19 and is provided with pressing parts 191 in interference fit with the top plate 21, the lower end of the top plate 21 is connected with the bottom walls of the movable cavities 17 through control elastic pieces 24, the control elastic pieces 24 are springs, the control gear 23 is arranged in the gear groove 171, part of the control gear extends into the movable cavity 17, a rack 211 which is in meshing transmission with the control gear 23 is arranged at the contact end of the top plate 21 and the control gear 23, a top plate outlet 172 is formed in one side, close to the shooting plate 10, of the bottom of the movable cavity 17, and the server 01 is in communication connection with the control driving part 22; when the fixed mount 3 slides to the optical inspection component 4, the light source plate 9 enters the light source plate slot 12, the inner wall of the light source plate slot 12 presses the positioning block 18 to move gradually towards the movable cavity 17 through the positioning inclined plane 181 until the positioning block 18 completely enters the movable cavity 17, the top plate 21 is driven to move downwards in the downward movement process of the movable cavity 17, when the positioning block 18 completely enters the movable cavity 17, the lower end face of the top plate 21 just abuts against the bottom of the movable cavity 17, at this time, the rack 211 and the control gear 23 are in a meshed state, when the server 01 judges that the crystal plate at the position has defects, the control driving member 22 corresponding to the position is started to drive the control gear 23 to rotate, the control gear 23 rotates to drive the top plate 21 to extend out from the top plate outlet 172 so as to press the push block 141, so that the crystal plate at the position falls out of the machine frame 1 from the crystal plate outlet at the lower part for manual secondary inspection; when the optical detection of the fixing frame 3 is finished and the fixing frame 3 is separated from the optical detection part 4, the positioning block 18 is jacked up upwards and protrudes out of the light source plate 9 under the action of the positioning elastic part 20 when the extrusion force is lost, and at the moment, the top plate 21 is jacked up upwards under the action of the control elastic part 24 to separate the control gear 23 from the rack 211, so that the top plate 21 cannot be influenced even if the control gear 23 rotates, and the top plate 21 is prevented from extending out of the movable cavity 17 under the action of the control gear 23 and colliding with the fixing frame 3 to damage parts when the fixing frame 3 moves to the optical detection part 4, thereby being beneficial to prolonging the service life of the device; the pressing part 191 is arranged to realize the abutting action of the positioning block 18 on the top plate 21 and limit the upward distance of the movable cavity 17, when the pressing part 191 abuts against the positioning support plate 19, the positioning block 18 is located at the limit distance extending upwards, so that the surface of the positioning block 18 exposed outside is the positioning inclined plane 181, the straight surface of the positioning block cannot extend out of the movable cavity 17, if the straight surface of the positioning block 18 extends out of the movable cavity 17, the positioning block 18 cannot be forced to enter the movable cavity 17 when the fixing frame 3 abuts against the straight surface, and the fixing frame 3 is ensured to abut against the positioning block 18 and only drive the positioning block 18 to extend and retract into the movable cavity 17.
In more detail, the bottom of the movable cavity 17 is provided with a recessed groove 173 for partially embedding the sliding block 25, the sliding block 25 is embedded into the recessed groove 173 to limit the horizontal displacement of the sliding block 25, when the top plate 21 is pressed downwards, the lower end of the sliding block 25 can enter the recessed groove 173 preferentially when the top plate 21 contacts the bottom of the movable cavity 17, when the sliding block 25 is embedded into the recessed groove 173, the recessed groove 173 limits the horizontal movement of the sliding block 25, at this time, when the control gear 23 rotates to drive the top plate 21 to move outwards, the sliding block 25 keeps static relative to the light source plate 9, thereby effectively preventing the bending deformation of the control elastic element 24 and prolonging the service life of the control elastic element 24.
In more detail, the lower end of the top plate 21 is provided with a sliding groove 212 for the sliding block 25 to slide, two ends of the sliding block 25 are respectively connected with two ends of the inner wall of the sliding groove 212 through a reset elastic part 26, the reset elastic part 26 is a spring, after the control gear 23 loses the driving force to the top plate 21, the top plate 21 can return under the elastic force action of the reset elastic parts 26 at the two ends, the control gear 23 is not needed to drive the top plate 21 to reset, if the control gear 23 is used to drive the top plate 21 to reset, higher precision is needed, the reset distance of the top plate 21 is too short, the top plate 21 is partially exposed outside the top plate outlet 172 and collides with the fixed frame 3, the reset distance of the top plate 21 is too long, the top plate 21 collides with the inner wall of the movable cavity 17 to cause damage to the top plate.
To be more specific, the bottom of the movable cavity 17 is provided with a touch switch 27, the touch switch 27 is electrically connected to the control driving member 22, the top plate 21 abuts against the touch switch 27 to energize the control driving member 22, the touch switch 27 is a prior art, and therefore, it is not described in detail, when the top plate 21 is disengaged from the touch switch 27, the driving member 22 is controlled to be de-energized, the touch switch 27 is disposed at the center of the bottom of the movable chamber 17, when the top plate 21 extends outward to a certain distance, the tail part of the top plate 21 is separated from the touch switch 27, at this time, the control driving part 22 is powered off, the top plate 21 returns to the movable cavity 17 under the elastic force of the reset elastic part 26 after losing the meshing force of the control gear 23, so as to prevent the top plate 21 from extending outward to an overlong distance, the outward extending distance of the top plate 21 is accurate, and the outward extending distance of the top plate 21 is not influenced by the rotation speed difference of the control driving member 22.
In more detail, the discharging component 5 comprises two bottom rods 28 and a discharging driving component 29 which are slidably embedded in the frame 1, the discharging driving component 29 is a cylinder, the frame 1 is provided with a bottom rod chute 30, the bottom rods 28 are connected with the inner wall of the bottom rod chute 30 through a discharging elastic component 31, the discharging elastic component 31 is a spring, the two bottom rods 28 are connected through a plurality of supporting frames 32, when the fixing frame 3 slides to the discharging component 5, the supporting frames 32 are respectively inserted into the light source plate clamping grooves 12, the supporting frames 32 are close to one side of the crystal plate slot 6 and are uniformly provided with a plurality of pushing parts 321 at the same height with the pushing blocks 141, one end of the bottom rod 28, far away from the discharging elastic component 31, extends out of the electric slide rail 2 and is connected through a driving plate 33, the discharging driving component 29 is used for driving the driving plate 33 to move back and forth, the discharging driving component 29 is a motor, the frame 1 is provided with a plurality of openings for discharging, the pushing part 321 can be abutted and pressed to the pushing block 141 at the corresponding position, so that the crystal plates in the fixing frame 3 can fall down simultaneously, the manual work is not required to be taken out from the fixing frame 3, the qualified crystal plates can be conveniently collected, the time and the labor are saved, and the operation is convenient.
In more detail, the rack 1 is further provided with an automatic loading component, the automatic loading component is used for inserting the crystal wafers into the crystal wafer slots 6 of the fixing frame 3, the automatic loading component comprises a storage box 34, the storage box 34 is divided into 4 equal-volume storage cavities 35 by 3 partition plates, a discharge channel 351 is correspondingly arranged below each storage cavity 35, the discharge channel 351 is divided into 4 discharge ports 3511 by 3 partition plates, the size of each discharge port 3511 is matched with the size of the crystal wafer, the inner wall of each discharge channel 351 is in an arc surface arrangement, the crystal wafers are changed from a horizontal state to a vertical state when passing through the discharge channels 351, the number of the discharge ports 3511 and the distance between the discharge ports 3511 are consistent with the distribution mode of the crystal wafer slots 6 on the fixing frame 3, the side wall of the storage box 34 is provided with a vibrator 36, and a loading control component for controlling the opening and closing of the discharge ports 3511 is, when the crystal wafers are required to be placed into the crystal wafer slots 6, firstly, the crystal wafers are respectively put into the 4 storage cavities 35, then the vibrator 36 is started to enable the storage tanks 34 to vibrate, the crystal wafers in the storage cavities 35 gradually slide downwards along the inner wall of the discharge channel 351 to the discharge port 3511 after being vibrated, at the moment, the discharge port 3511 is closed by the charging control assembly, then the fixing frame 3 is placed below the storage tanks 34, the crystal wafer slots 6 correspond to the discharge ports 3511 one by one, the discharge port 3511 is opened by controlling the charging control assembly, and the crystal wafers in the discharge port 3511 slide into the crystal wafer slots 6 under the action of gravity; be the cambered surface setting through vibrator 36 and discharging channel 351 inner wall for the crystal plate in the storage cavity 35 receives to change gradually to vertical state along discharging channel 351 inner wall after the vibration, makes the crystal plate corresponding with crystal plate slot 6's shape, guarantees that the crystal plate can be accurate when following discharge gate 3511 department roll-off and inserts to crystal plate slot 6 and realize fixedly.
Preferably, the charging control assembly comprises a discharging stop rod 37 arranged below the discharging port 3511 and a support frame 38 arranged on the frame 1, the frame 1 is provided with a slide rail 39, the support frame 38 can slide back and forth on the slide rail 39, the support frame 38 is provided with a fixing groove 381 for embedding the fixing frame 3, one side of the discharging channel 351 is provided with a resisting groove 3512, the support frame 38 is provided with a resisting rod 382 inserted and matched with the resisting groove 3512, the end part of the resisting rod 382 is provided with a rubber part 3821, the frame 1 is provided with a fixing plate 40, one side of the support frame 38 far away from the opening of the resisting groove 3512 is elastically connected with the fixing plate 40 through two springs 41, the fixing frame 3 is embedded into the fixing groove 381 and pushes the fixing frame 3 inwards, the support frame 38 slides along the slide rail 39 under the action of the fixing frame 3, the springs 41 are compressed, the discharging stop rod 37 slides along with the support frame 38 to, meanwhile, the resisting rod 382 moves towards the resisting groove 3512 along with the movement of the support frame 38 to resist the next crystal plate at the outlet, so that a plurality of crystal plates continuously drop from the outlet 3511, and only one crystal plate is inserted into one crystal plate slot 6; after the loading is finished, the pressing force on the fixed frame 3 is reduced, the spring 41 rebounds to drive the supporting frame 38 to reset, the discharging blocking rod 37 resets below the discharging port 3511 and closes the discharging port 3511 while the supporting frame 38 resets, the resisting rod 382 also breaks away from the resisting groove 3512 to remove the limitation on the crystal plates, so that the crystal plates fall off, and the loading action on the fixed frame 3 is realized by repeated circulation; the rubber part 3821 increases the friction when the pressing rod 382 presses the crystal plate, so that the fixing effect on the crystal plate is good, the pressing effect is mild, and the crystal plate is not easy to be pressed.
In further detail, the cleaning box 42 is arranged below the crystal wafer outlet 11, the crystal wafer detected as a defective product falls from the crystal wafer outlet 11 and then enters the cleaning box 42 to be cleaned for the second time, stubborn stains on the surface of the crystal wafer are removed, the phenomenon that the black shadow on the surface of the crystal wafer is caused by the stubborn stains is avoided, the crystal wafer after being cleaned is manually inspected, and the false inspection rate of the crystal wafer is reduced.
In further detail, wash case 42 top symmetry and be equipped with two baffle 43 that the slope set up, interval formation blanking mouth 44 between two baffle 43, the crystal plate that drops from crystal plate export 11 falls onto baffle 43 earlier, and slide to blanking mouth 44 along with the inclined plane of baffle 43 and fall into in washing case 42, prevent that the crystal plate from directly dropping to the water splash that splashes in washing case 42 from polluting the qualified crystal plate of inspection to crystal plate export 11, it is used for carrying out ultrasonic cleaning's supersonic generator to wash the crystal plate in the case 42 to inlay on the washing case 42 lateral wall.
In more detail, a screen 45 is arranged in the cleaning box 42, the lower end of the screen 45 is elastically connected with the bottom of the cleaning box 42 through four springs, a foaming component is arranged below the screen 45, the foaming component comprises an air inlet pipe 46 vertically arranged at the bottom of the cleaning box 42 and an air pump 461 used for filling air into the air inlet pipe 46, an air inlet rotary table 47 is connected above the air inlet pipe 46, the air inlet pipe 46 is communicated with the air inlet rotary table 47, a plurality of foaming pipes 48 are uniformly arranged on the side wall of the air inlet rotary table 47 along the circumferential direction, a plurality of inclined upward air outlet pipes 49 are sequentially arranged on the foaming pipes 48 along the length direction, the air outlet pipes 49 are used for generating bubbles, when the air outlet pipes 49 spray bubbles, the foaming pipes 48 are driven to rotate, the plurality of foaming pipes 48 generate upward water flow to promote the screen 45 and the crystal wafers on the screen 45 to float up and down, when the screen 45 moves up, the fine bubbles have better effect of improving the ultrasonic cleaning, the lower surface of the crystal plate is not easy to generate 'cavitation' corrosion in long-time ultrasonic cleaning, and the cleaning effect of stubborn stains on the surface of the crystal plate is stronger.
In more detail, the air inlet turntable 47 is inserted in the upper end of the air inlet pipe 46 in a sealing manner, two limiting convex edges 50 are arranged at the upper end of the air inlet pipe 46 at intervals to limit the distance of the up-and-down movement of the air inlet turntable 47, a circle of sealing ring 51 is arranged at the top of the air inlet pipe 46, and the sealing ring 51 is in sealing fit with the top of the inner wall of the air inlet turntable 47 when abutting against; when the air pump 461 fills air into the air inlet pipe 46, the air pressure in the air inlet pipe 46 is increased to drive the air inlet turntable 47 to lift upwards, and the air is sprayed out from the air outlet pipe 49; after air pump 461 stops to carry gas, the atmospheric pressure in the intake pipe 46 just can reduce along with gas outgoing gradually, the carousel 47 that admits air moves down under the effect of gravity until offseting with sealing washer 51 and sealing up, prevent effectively that the cleaner from getting into in the intake pipe 46, and should set up and help guaranteeing down that the gaseous atmospheric pressure of follow outlet duct 49 exhaust is stronger, and then guarantee the rotational speed of the carousel 47 that admits air in order to guarantee the impact force of the rivers that upwards produce, guarantee the up-and-down action frequency of crystal piece and screen cloth 45.
In more detail, the outer side of the spring connecting the screen 45 and the cleaning box 42 is also sleeved with a limiting column 52, the lower end of the limiting column 52 is welded on the inner wall of the cleaning box 42, the upper end of the limiting column 52 is level with the height of the air outlet pipe 49 when the air inlet turntable 47 rises to the highest height, so that the screen 45 is effectively prevented from being too large in descending amplitude to collide with the air outlet pipe 49 when moving downwards, the normal action of the equipment is ensured, the top of each limiting column 52 is provided with a touch switch, when the touch switches on the tops of all the limiting columns 52 are subjected to touch signals and the continuous touch time exceeds 10s, the air pump 461 is stopped to work, the number of crystal plates in the cleaning box 42 is prevented from being too large, the cleaning effect of the crystal plates is ensured, and the screen 42 can keep moving upwards and.
Preferably, wash the case 42 outside and install an alarm, alarm and a plurality of touch switch electric connection, when all spacing post 52 tops touch the switch and all receive touch signal and touch the time in succession and exceed 10s and just start the alarm in order to remind operating personnel in time to take away the crystal plate in wasing the case 42.
In more detail, in order to take out the cleaned crystal water from the cleaning tank 42, the cleaning tank 42 is further provided with a discharging unit.
Preferably, the discharging assembly comprises a discharging piece 55 arranged in the middle of the cleaning box 42 and a material receiving box 53 attached to the side wall of the cleaning box 42, a material taking port 54 is formed in one side, close to the material receiving box 53, of the cleaning box 42, the lower edge of the material taking port 54 is flush with the upper end face of the screen 45 when abutting against the limiting column 52, the discharging piece 55 is inserted in the material taking port 54 in a sealing manner, a material pushing piece 56 identical to the discharging piece 55 is embedded in the inner wall of one side, far away from the material taking port 54, of the cleaning box 42, two ends of the discharging piece 55 and the material pushing piece 56 are respectively and fixedly connected through two connecting plates 57, plate grooves 58 for the connecting plates 57 to slide are formed in the inner walls of two sides of the cleaning box 42, handrails 59 are arranged on the outer side wall of the discharging piece 55, the material receiving box 53 is arranged at the same height as the lower edge of the material taking port 54, when the discharging piece 55 is pulled outwards, the lower end of the connecting plate 57 is in sealed sliding fit with the upper ends of the two side walls of the material receiving box 53, when the crystal pieces in the cleaning box 42 need to be taken out, the discharging piece 55 is pulled outwards to open the material taking port 54, the cleaning agent at the lower edge part of the cleaning box 42 higher than the material taking port 54 flows out from the material taking port 54 and falls into the material receiving box 53, the crystal pieces carried out by water flow are filtered by the material receiving filter screen 61, then the discharging piece 55 is pulled outwards continuously to drive the material pushing piece 56 to slide along the upper surface of the screen 45 so as to push the crystal pieces on the screen 45 out into the material receiving box 53, so that the crystal pieces are taken out, compared with the traditional filtering basket, the material is more convenient to take out, and the crystal pieces after being taken out can be placed on the material receiving; after taking out the crystal plate from the cleaning box 42, pushing the discharging piece 55 back to the cleaning box 42 to seal the material taking port 54, starting the water pump 60 to pump the cleaning agent in the material receiving box 53 back to the cleaning box 42, and then continuously cleaning the subsequently dropped crystal plate; get the problem that the cleaner splashes when effectively preventing to get the material through transversely getting the material, but cleaner reuse has reduced use cost, can dry after quartzy taking out for the manual work is difficult for being stained with the cleaner when examining quartzy, has reduced environmental pollution.
Example two
A method for improving the processing precision of the crystal surface for crystal cleaning comprises the following steps:
a. pre-cleaning: putting the crystal wafer into pure water to carry out ultrasonic or megasonic heating pre-cleaning;
b. acid washing: placing the pre-cleaned quartz plate in a hydrochloric acid solution for acid cleaning;
c. acid removal: cleaning the washed crystal plate in a crystal cleaning machine to remove surface acid solution and dirt;
d. drying: drying the quartz plate after acid removal in a dryer;
e. and (4) checking: putting the dried crystal plate into a crystal inspection device for inspection, and screening out the crystal plate with surface defects;
the temperature of pure water used in step a was 70 ℃.
The concentration of hydrochloric acid used in step b was 20%.
The pickling time of the crystal water in the step b is 60 s.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.
Although terms are used more often herein, the possibility of using other terms is not excluded. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.
Claims (10)
1. A method for improving the processing precision of crystal surface for crystal cleaning is characterized in that: the method comprises the following steps:
a. pre-cleaning: putting the crystal wafer into pure water to carry out ultrasonic or megasonic heating pre-cleaning;
b. acid washing: placing the pre-cleaned quartz plate in a hydrochloric acid solution for acid cleaning;
c. acid removal: cleaning the washed crystal plate in a crystal cleaning machine to remove surface acid solution and dirt;
d. drying: drying the quartz plate after acid removal in a dryer;
e. and (4) checking: putting the dried crystal plate into a crystal inspection device for inspection, and screening out the crystal plate with surface defects;
wherein, the crystal inspection device in step e is characterized in that: comprises a frame (1), an electric slide rail (2) is arranged on the frame (1), a fixing frame (3), a light inspection component (4) and a discharge component (5) are sequentially arranged on the electric slide rail (2) from the right to the left, the fixing frame (3) is detachably arranged on the electric slide rail (2), a plurality of vertically arranged crystal wafer slots (6) are arranged on the fixing frame (3) along the sliding direction thereof, the crystal wafer slots (6) are arranged into a plurality of groups along the length direction of the fixing frame (3), the light inspection component (4) comprises a light shield (7) and a plurality of groups of light inspection parts (8), each light inspection part (8) comprises a light source plate (9) and a light source shooting plate (10), a light source (91) is arranged on the light source plate (9), a plurality of cameras (101) are uniformly arranged on the light source shooting plate (10), and the light source (91) and the cameras (101) are oppositely arranged, the photo that camera (101) was shot only has two kinds of colours of black and white, light source board (9) and photograph and seted up crystal plate export (11) on frame (1) between board (10), mount (3) are located crystal plate slot (6) both sides and have seted up light source board draw-in groove (12) respectively and photograph system integrated circuit board groove (13), crystal plate slot (6) both sides communicate with light source board draw-in groove (12) and photograph system integrated circuit board groove (13) respectively, both ends about mount (3) are run through in crystal plate slot (6), crystal plate slot (6) lower extreme is equipped with spacing subassembly, be equipped with on frame (9) and be used for controlling spacing subassembly and relieve the spacing control assembly to the crystal plate, be equipped with respectively on frame (1) with camera (101) and control assembly communication connection's server (01).
2. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 1, wherein: the temperature of the pure water used in the step a is 60-70 ℃.
3. The method for improving the surface finish accuracy of crystal according to claim 1, wherein the concentration of hydrochloric acid used in step b is 5% ~ 20%.
4. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 1, wherein: and the pickling time of the crystal water in the step b is 20-60 s.
5. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 1, wherein: the limiting component comprises a limiting piece (14) and a limiting groove (15), the limiting groove (15) comprises a first limiting groove (151) and a second limiting groove (152) which are respectively arranged at two sides of the crystal plate slot (6), the limiting piece (14) comprises a push block (141) and two supporting parts (142), the two supporting parts (142) are respectively arranged at two ends of the crystal plate slot (6), a baffle plate (16) is arranged at the joint of the first limit groove (151) and the crystal plate slot (6), the push block (141) is arranged in the first limit groove (151) in a sliding manner and is connected with the baffle (16) through a plurality of elastic pieces (161), the supporting part (142) is arranged in the second limiting groove (152) in a sliding manner, the supporting part (142) is connected with the push block (141) through a connecting part (143), the elastic piece (161) pushes the push block (141) outwards so that the supporting part (142) slides from the second limiting groove (152) to the crystal plate slot (6) to support the crystal plate.
6. A method for improving the surface finish accuracy of crystal according to claim 5, wherein: the light source module is characterized in that a plurality of movable cavities (17) are formed in the top of the light source plate (9), positioning blocks (18) capable of sliding up and down are arranged in the movable cavities (17), a positioning inclined plane (181) is arranged on the right side of the top of each positioning block (18), a positioning support plate (19) is horizontally arranged in the middle of each movable cavity (17), each positioning block (18) is connected with the corresponding positioning support plate (19) through a positioning elastic piece (20), each control assembly comprises a top plate (21), a control driving piece (22) and a control gear (23), the top plate (21) can move up and down and is arranged below the corresponding positioning support plate (19), pressing portions (191) matched with the top plate (21) in an abutting mode are arranged below the bottom of each positioning block (18) and extend to the corresponding positioning support plate (19), the lower ends of the top plates (21) are connected with the bottom walls of the movable cavities (17) through control elastic pieces (24, activity chamber (17) bottom left side intercommunication has gear groove (171), control gear (23) are installed in gear groove (171) and the part stretches into in activity chamber (17), roof (21) are equipped with rather than meshing driven rack (211) with control gear (23) contact jaw, roof export (172) have been seted up near shooting plate (10) one side in activity chamber (17) bottom, server (01) and control driving piece (22) communication connection.
7. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 6, wherein: the bottom of the movable cavity (17) is provided with an embedded groove (173) for the sliding block (25) to be partially embedded, and the sliding block (25) is embedded into the embedded groove (173) to limit the horizontal displacement of the sliding block (25).
8. A method for improving the surface finish accuracy of crystal according to claim 7, wherein: the gliding spout (212) of confession sliding block (25) are seted up to roof (21) lower extreme, sliding block (25) both ends are connected with spout (212) inner wall both ends through elastic component (26) that reset respectively.
9. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 8, wherein: activity chamber (17) bottom is equipped with touches and presses switch (27), touch and press switch (27) and control driving piece (22) electric connection, roof (21) are contradicted and are touched and press switch (27) so that control driving piece (22) circular telegram, work as roof (21) break away from when touching and press switch (27), control driving piece (22) outage.
10. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 9, wherein: the discharging part (5) comprises two bottom rods (28) and a discharging driving piece (29) which are embedded in the rack (1) in a sliding way, a bottom rod sliding groove (30) is arranged on the frame (1), the bottom rod (28) is connected with the inner wall of the bottom rod sliding groove (30) through a discharging elastic piece (31), the two bottom rods (28) are connected through a plurality of supporting frames (32), when the fixed frame (3) slides to the discharging part (5), the supporting frames (32) are respectively inserted into the light source board clamping grooves (12), a plurality of pushing parts (321) are uniformly arranged at the positions, close to one side of the crystal plate inserting grooves (6) and at the same height with the pushing blocks (141), of the supporting frames (32), one end of the bottom rod (28) far away from the discharging elastic piece (31) extends out of the electric slide rail (2) and is connected with the electric slide rail through a driving plate (33), the discharging driving piece (29) is used for driving the driving plate (33) to move back and forth.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010779631.3A CN111906082B (en) | 2019-11-22 | 2019-11-22 | Method for cleaning crystal with high inspection efficiency |
| CN201911158617.5A CN110721958B (en) | 2019-11-22 | 2019-11-22 | Method for improving crystal surface processing precision for crystal cleaning |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911158617.5A CN110721958B (en) | 2019-11-22 | 2019-11-22 | Method for improving crystal surface processing precision for crystal cleaning |
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| CN202010779631.3A Division CN111906082B (en) | 2019-11-22 | 2019-11-22 | Method for cleaning crystal with high inspection efficiency |
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| CN110721958B CN110721958B (en) | 2020-10-09 |
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| CN202010779631.3A Active CN111906082B (en) | 2019-11-22 | 2019-11-22 | Method for cleaning crystal with high inspection efficiency |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114951134A (en) * | 2022-05-19 | 2022-08-30 | 江苏富乐德石英科技有限公司 | Full-automatic cleaning equipment for quartz products and using method thereof |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN110721958B (en) | 2020-10-09 |
| CN111906082B (en) | 2021-07-06 |
| CN111906082A (en) | 2020-11-10 |
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