CN110721958A - A method for improving crystal surface processing accuracy for crystal cleaning - Google Patents

Abstract

The invention discloses a method for improving crystal surface processing precision for crystal cleaning, comprising the following steps: a. pre-cleaning: placing a crystal sheet in pure water for ultrasonic or megasonic heating pre-cleaning; b. pickling: Place the pre-cleaned crystal chips in a hydrochloric acid solution for pickling; c. Acid removal: place the pickled crystal chips in a crystal cleaning machine for cleaning to remove the acid solution and dirt on the surface; d. Dry: Place the deacidified crystal chips in a dryer for drying; e. Inspection: put the dried crystal chips into a crystal inspection device for inspection, and screen out the crystal chips with surface defects. The invention has the advantages of good cleaning effect, high inspection efficiency and high inspection accuracy.

Description

A method for improving crystal surface processing accuracy for crystal cleaning

technical field

The invention relates to the technical field of crystal cleaning, in particular to a method for improving crystal surface processing precision for crystal cleaning.

Background technique

Crystal (rock crystal) is a rare mineral, a kind of gemstone, quartz crystal, which belongs to the quartz family in mineralogy. The main chemical composition is silicon dioxide, the chemical formula is SiO2.

When pure, it forms colorless and transparent crystals. When it contains trace elements Al, Fe, etc., it is pink, purple, yellow, brown, etc. The irradiated trace elements form different types of color centers, resulting in different colors, such as purple, yellow, brown, pink and so on. The crystals containing associated inclusion minerals are called inclusion crystals, such as hair crystal, green ghost, red rabbit hair, etc. The inclusions are rutile, tourmaline, actinite, mica, chlorite, etc.

After the crystal is processed into a crystal piece, it needs to be cleaned to remove the impurities on the surface. The existing cleaning methods have poor cleaning effect on the crystal, and the residual dirt on the surface of the cleaned crystal piece affects the inspection of the crystal piece, and the existing inspection methods are all It is manual inspection, the inspection efficiency is low, the eyes are prone to fatigue after working for a long time, and the false detection rate is high, which greatly increases the production cost of the enterprise.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a method for improving crystal surface processing precision for crystal cleaning, aiming at the above problems existing in the prior art.

The object of the present invention can be realized by the following technical solutions: a method for improving crystal surface processing accuracy for crystal cleaning, comprising the following steps:

a. Pre-cleaning: place the crystal wafer in pure water for ultrasonic or megasonic heating pre-cleaning;

b. Pickling: place the pre-cleaned wafers in a hydrochloric acid solution for pickling;

c. Acid removal: place the pickled crystal in a crystal cleaning machine for cleaning to remove the acid solution and dirt on the surface;

d. Drying: place the crystal sheet after deacidification in a dryer for drying;

e. Inspection: put the dried crystal chips into the crystal inspection device for inspection, and screen out the crystal chips with surface defects;

Wherein, the crystal inspection device in step e includes a rack, on which an electric sliding rail is provided, and the electric sliding rail is sequentially provided with a fixing frame, an optical inspection component and a discharging material from right to left. The fixing frame is detachably arranged on the electric sliding rail, and the fixing frame is provided with a number of vertically arranged crystal chip slots along the sliding direction, and the crystal chip slots are arranged in multiples along the length direction of the fixing frame. The photodetection component includes a hood and multiple groups of photodetection sections, the photodetection sections include a light source board and a camera board, the light source board is provided with a light source, and the camera board is evenly provided with a plurality of cameras , the photos taken by the camera only have two colors of black and white, the light source and the camera are arranged opposite to each other, the frame between the light source board and the camera board is provided with a crystal chip outlet, and the fixing frame is located in the crystal chip socket. The two sides of the slot are respectively provided with a light source board card slot and a camera board card slot, the two sides of the crystal chip slot are respectively connected with the light source board card slot and the camera board card slot, and the crystal chip slot runs through the upper and lower ends of the fixing frame. , the lower end of the crystal chip slot is provided with a limit component, the light source board is provided with a control component for controlling the limit component to release the limit on the crystal chip, and the frame is provided with a communication connection with the camera and the control component respectively server.

The working principle of the crystal inspection device in the present invention is as follows: insert the crystal pieces into the crystal piece slot in sequence, then install the fixing frame on the right end of the electric slide rail, start the electric slide rail, and make it drive the fixing frame to slide to the optical detection part At this time, the light source board is just embedded in the light source board card slot, the camera board is just embedded in the camera board card slot, and then the light source is activated to emit strong light on the crystal plate. The photo is uploaded to the server. Since the server receives the photo and analyzes whether there is a black shadow in the photo, if there is a group photo in the photo, it is judged that the crystal corresponding to the photo is a defective product, and the control component controls the corresponding position. The limit component is activated to drop the crystal pieces from the crystal piece outlet, and finally the electric slide rail continues to drive the fixing frame to slide to the discharging part, and remove all the crystal pieces on the fixing frame through the parts.

The present invention can remove impurities and particles existing in the form of physical adsorption on the surface of crystalline silicon through ultrasonic or megasonic heating pre-cleaning, and then use a mixed acid solution to corrode the crystalline silicon, and as a result of the corrosion, the surface of the crystal can be removed in the form of chemical adsorption. Impurities and particles have good cleaning effect, and the cleaning cost is low. The cleaning process is less harmful to people, equipment and the environment. At the same time, it helps to improve the surface finish of the crystal and ensure the quality of the crystal after cleaning. The photos taken after the crystal chip with defective surface transmits light will appear black. Compared with the traditional manual inspection, the inspection effect is better, and the defective crystal chips can be screened out in time; through the multiple crystal chip slots on the fixing frame It can check multiple crystal pieces at the same time, which greatly improves the efficiency of the inspection. The manual only needs to carry out the second inspection on the screened defective products, which reduces the eye fatigue of the workers, and the second inspection The rear false detection rate is low, and it is not easy to make mistakes; by setting the crystal chip slot as a vertical structure, the crystal chip is vertically fixed after being inserted, and the light emitted by the light source is set vertically when it passes through the crystal chip, which is not easy to produce refraction, avoid Shadows are generated in the captured photos due to light refraction, which improves the server's judgment accuracy on photos and improves the accuracy of crystal screening; through the settings of the light source board slot and the camera board slot, the light source and camera When the photo is taken, the position of the fixing frame is limited by multiple light source boards and filming boards, the light source and the camera are kept in a relatively close position, and the photos taken are clearer, which improves the accuracy of inspection; through the setting of the limit components , so that the height of the crystal piece placed in the crystal slot is fixed, to ensure that the light emitted by the light source can pass through the entire crystal piece, and the camera can also take the entire crystal piece into the photo; by controlling the settings of the components, the inspection can be timely as Defective crystal pieces are screened out to distinguish them from other crystal pieces with good appearance, and no manual operation is required, which saves time and effort and is easy to operate.

The temperature of the pure water used in the step a is 60°C to 70°C. Within this temperature range, the impurities and particles existing in the form of physical adsorption on the surface of the crystal will be rapidly desorbed and then separated from the crystal surface.

The concentration of the hydrochloric acid used in the step b is a concentration of 5% to 20%, which is beneficial to control the reaction speed of the pickling.

In the step b, the crystal pickling time is 20s-60s, and the cleanliness of the crystal surface after corrosion is better under this time condition.

The limit assembly includes a limit piece and a limit slot, the limit slot includes a first limit slot and a second limit slot respectively opened on both sides of the crystal plate slot, and the limit piece includes a push block and two support parts, the two support parts are respectively set at the two ends of the crystal plate slot, the connection between the first limit groove and the crystal plate slot is provided with a baffle plate, and the push block is slidably arranged on the first The limit slot is connected with the baffle plate through a plurality of elastic pieces, the support portion is slidably arranged in the second limit slot, the support portion is connected with the push block through the connection portion, and the elastic piece pushes the push block outward out so that the support portion slides from the second limiting groove to the crystal piece slot to support the crystal piece.

The top of the light source board is provided with a plurality of movable cavities, the movable cavity is provided with a positioning block that can slide up and down, the right side of the top of the positioning block is provided with a positioning slope, and the middle of the movable cavity is horizontally provided with a positioning support plate, The positioning block and the positioning support plate are connected by a positioning elastic member. The control assembly includes a top plate, a control drive member and a control gear. The top plate can be moved up and down under the positioning support plate, and the bottom of the positioning block extends to The bottom of the positioning support plate is provided with a pressing part that interferes with the top plate, the lower end of the top plate and the bottom wall of the movable cavity are connected by a control elastic member, the top plate and the control elastic member are slidably connected through a sliding block, and the left side of the bottom of the movable cavity is connected There is a gear slot, the control gear is installed in the gear slot and partially extends into the movable cavity, the contact end of the top plate and the control gear is provided with a rack that meshes with it, and the bottom of the movable cavity is opened on the side of the camera plate There is a top plate outlet, and the server is communicatively connected to the control driver.

The bottom of the movable cavity is provided with an embedding groove for the sliding block to be partially embedded, and the sliding block is embedded in the embedding groove to limit its horizontal displacement.

The lower end of the top plate is provided with a chute for the sliding block to slide, and the two ends of the sliding block are respectively connected with both ends of the inner wall of the chute through a reset elastic member.

The bottom of the movable cavity is provided with a touch switch, the touch switch is electrically connected with the control driver, the top plate abuts the touch switch to make the control driver energized, when the top plate is separated from the touch switch, the The control drive is de-energized.

The discharging component includes two bottom rods and a discharging drive member that are slidably embedded in the frame, and a bottom rod chute is provided on the frame, and the bottom rod and the inner wall of the bottom rod chute pass through the discharge material. The two bottom rods are connected by a plurality of supporting frames. When the fixing frame slides to the discharge part, the supporting frames are respectively inserted into the light source board card slots, and the supporting frames are close to the crystal plate. A plurality of push parts are evenly arranged on one side of the slot and at the same height as the push block. One end of the bottom rod away from the discharge elastic member extends to the outside of the electric slide rail and is connected by a drive plate. The discharge drive member is used to drive the The driver board moves back and forth.

Compared with the prior art, the invention has the advantages of good cleaning effect, high inspection efficiency and high inspection accuracy.

Description of drawings

Figure 1 is a schematic diagram of the results of the present invention.

Figure 2 is a plan view of the present invention.

FIG. 3 is a partial schematic diagram of part A in FIG. 2 .

Fig. 4 is a schematic diagram of the internal structure of the automatic loading part in the present invention.

FIG. 5 is a partial schematic diagram at B in FIG. 4 .

FIG. 6 is a schematic view of the installation of the limiting assembly in the present invention.

FIG. 7 is a schematic diagram of the structure of the photodetector in the present invention.

FIG. 8 is a schematic diagram of the internal structure of the light source panel in the present invention.

FIG. 9 is a partial schematic view at C in FIG. 8 .

Fig. 10 is a schematic view of the structure of the cleaning box in the present invention.

Figure 11 is a schematic diagram of the internal structure of the cleaning box in the present invention.

FIG. 12 is a partial schematic view at D in FIG. 10 .

Figure 13 is a schematic diagram of the connection between the top plate and the sliding block in the present invention.

In the figure, 01, server; 1, rack; 2, electric slide rail; 3, fixed frame; 4, optical detection part; 5, discharge part; 6, crystal chip slot; 61, fixed slot; Cover; 8. Optical detection part; 9. Light source board; 91. Light source; 10. Filming board; 101. Camera; 11. Crystal chip outlet; 12. Light source board slot; 13. Filming board slot; 14. Limit 141, push block; 142, support part; 15, limit slot; 151, first limit slot; 152, second limit slot; 16, baffle plate; 161, elastic piece; 17, movable cavity; 171, gear slot; 172, top plate outlet; 173, insert groove; 18, positioning block; 181, positioning slope; 19, positioning support plate; 191, pressing part; 20, positioning elastic part; 21, top plate; 211, rack ; 212, chute; 22, control drive part; 23, control gear; 24, control elastic part; 25, sliding block; 26, reset elastic part; 27, touch switch; 28, bottom rod; 29, discharge drive parts; 30, bottom rod chute; 31, discharge elastic parts; 32, support frame; 321, push part; 33, drive plate; 34, storage box; 35, storage cavity; 351, discharge channel; 3511 , discharge port; 3512, abutment groove; 36, vibrator; 37, discharge stop rod; 38, support frame; 381, fixed groove; 39, slide rail; 382, abutment rod; 3821, rubber piece; 40, fixed plate; 41, spring; 42, cleaning box; 43, guide plate; 44, blanking port; 45, screen; 46, air inlet pipe; 47, air inlet turntable; 48, foaming pipe; 49, air outlet pipe; 50, Limiting flange; 51. Sealing ring; 52. Limiting column; 53. Feeding box; 54. Material reclaiming port; 55. Material discharging part; 56. Material pushing piece; 57. Connecting plate; 58. Plate groove; 59, handrail; 60, water pump; 61, receiving filter; 461, air pump.

Detailed ways

The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.

Example 1

As shown in Figure 1-13, a method for improving crystal surface processing accuracy for crystal cleaning includes the following steps:

a. Pre-cleaning: place the crystal wafer in pure water for ultrasonic or megasonic heating pre-cleaning;

b. Pickling: place the pre-cleaned wafers in a hydrochloric acid solution for pickling;

c. Acid removal: place the pickled crystal in a crystal cleaning machine for cleaning to remove the acid solution and dirt on the surface;

d. Drying: place the crystal sheet after deacidification in a dryer for drying;

e. Inspection: put the dried crystal chips into the crystal inspection device for inspection, and screen out the crystal chips with surface defects;

The temperature of the pure water used in step a was 60°C.

The concentration of hydrochloric acid used in step b is 5%.

In step b, the crystal pickling time is 20s.

In further detail, the crystal inspection device in step e includes a rack 1, the rack 1 is provided with an electric sliding rail 2, and the electric sliding rail 2 is sequentially provided with a fixing frame 3, an optical inspection component 4 and an outlet from right to left. The material component 5, the fixing frame 3 is detachably arranged on the electric sliding rail 2, and the fixing frame 3 is provided with a number of vertically arranged crystal chip slots 6 along its sliding direction, and the crystal chip slots 6 are arranged along the length direction of the fixing frame 3. For multiple groups, the light detection component 4 includes a light shield 7 and multiple groups of light detection parts 8. The light detection part 8 includes a light source plate 9 and a camera plate 10. The light source plate 9 is provided with a light source 91, and the camera plate 10 is evenly provided with A plurality of cameras 101, the light source 91 and the camera 101 are oppositely arranged, and the pictures taken by the camera 101 are only in black and white. A light source board card slot 12 and a camera board card slot 13 are respectively opened on both sides of the crystal chip slot 6. The two sides of the crystal chip slot 6 are respectively communicated with the light source board card slot 12 and the camera board card slot 13. The crystal chip slot 6 It runs through the upper and lower ends of the fixing frame 3, the lower end of the crystal chip slot 6 is provided with a limit component, the light source board 9 is provided with a control component for controlling the limit component to release the limit on the crystal chip, and the frame 1 is provided with a camera, respectively. 101 The server 01 which is communicatively connected to the control component, and the setting of the hood 7 prevents the influence of external light on the inspection result and ensures the accuracy of the inspection result.

A server is a type of computer that runs faster, has a higher load, and is more expensive than a normal computer. The server has high-speed CPU computing power, long-term reliable operation, powerful I/O external data throughput and better scalability. According to the services provided by the server, generally speaking, the server has the ability to respond to service requests, undertake services, and guarantee services. As an electronic device, the internal structure of the server is very complex, but it is not much different from the internal structure of an ordinary computer, such as: cpu, hard disk, memory, system, system bus, etc.

More specifically, the two ends of the wafer slot 6 are provided with fixing grooves 61 embedded at the edge of the wafer, so that the firmness of the wafer in the wafer slot 6 is improved, and it is not easy to generate shaking during movement to affect the inspection result.

In further detail, the limiting component includes a limiting member 14 and a limiting slot 15 , and the limiting slot 15 includes a first limiting slot 151 and a second limiting slot 152 respectively opened on both sides of the crystal wafer slot 6 . The component 14 includes a push block 141 and two support parts 142. The two support parts 142 are respectively arranged at both ends of the crystal plate slot 6. A baffle plate 16 is provided at the connection between the first limiting groove 151 and the crystal plate slot 6, and the push plate The block 141 is slidably arranged in the first limiting groove 151 and is connected to the baffle 16 through a plurality of elastic members 161. The elastic members 161 are springs. The supporting portion 142 is slidably arranged in the second limiting groove 152. 141 is connected by the connecting portion 143, the elastic member 161 pushes the push block 141 outwards so that the support portion 142 slides from the second limiting groove 152 to the crystal sheet slot 6 to support the crystal sheet, and the push block 141 moves outward to its When the outer wall and the outer wall of the fixing frame 3 are at the same level, the support portion 142 and the baffle 16 are in a state of conflict to restrict the push block 141 from continuing to move outwards, so as to prevent the push block 141 from colliding with the light source board 9 when the fixing frame 3 moves to the light detection component 4; When the push block 141 is not subjected to external force, the support portion 142 is located in the crystal piece slot 6 , and when the crystal piece is inserted into the crystal piece slot 6 , the bottom of the support portion 142 abuts against the support portion 142 to be fixed in the crystal piece slot 6 When the crystal piece in the crystal piece slot 6 needs to be taken out, the push block 141 is squeezed to move into the first limit groove 151, and the push block 141 drives the support part 142 to move into the second limit groove 152. Release the fixing of the crystal piece, and the unsupported crystal piece will slide out from the lower end under the action of gravity. After the external force on the push block 141 is released, the push block 141 will move outward under the action of the external force to achieve reset; The two supporting parts 142 keep the fixed height of the crystal piece in the crystal piece slot 6 stable, which is convenient for the photodetection part 8 with a uniform height design to perform light detection on the crystal piece, avoids the effect of dislocation and affects the result, and improves the accuracy of the test result. By controlling the push block 141, the supporting part 142 can be controlled to support and unsupport the crystal plate, and the two support parts 142 in the same crystal plate slot 6 are controlled by the same push block 141 during control, and the structure is simple and controllable. The effect is accurate, and it is not easy to fail.

In further detail, a plurality of movable cavities 17 are provided on the top of the light source board 9 , and a positioning block 18 that can slide up and down is arranged in the movable cavity 17 , a positioning slope 181 is provided on the right side of the top of the positioning block 18 , and a positioning block 18 is arranged horizontally in the middle of the movable cavity 17 . The support plate 19, the positioning block 18 and the positioning support plate 19 are connected by a positioning elastic member 20, the positioning elastic member 20 is a spring, the control assembly includes a top plate 21, a control driving member 22 and a control gear 23, and the control driving member 22 is a motor, The top plate 21 can move up and down under the positioning support plate 19. The bottom of the positioning block 18 extends to the bottom of the positioning support plate 19 and is provided with a pressing portion 191 that interferes with the top plate 21. The lower end of the top plate 21 and the bottom wall of the movable cavity 17 pass through the control elastic member 24. Connection, the control elastic member 24 is a spring, the top plate 21 and the control elastic member 24 are slidably connected through the sliding block 25, a gear groove 171 is connected to the left side of the bottom of the movable cavity 17, and the control gear 23 is installed in the gear groove 171 and partially extends into the movable cavity 171. In the cavity 17, the contact end of the top plate 21 and the control gear 23 is provided with a rack 211 that meshes with it. The bottom of the movable cavity 17 is provided with a top plate outlet 172 on the side close to the camera plate 10. The server 01 is connected to the control driver 22 in communication; When the frame 3 slides to the optical detection part 4, the light source board 9 will enter into the light source board card slot 12. At this time, the inner wall of the light source board card slot 12 presses the positioning block 18 through the positioning slope 181 and gradually moves into the movable cavity 17 until the positioning block 18 is completely Entering the movable cavity 17, the movable cavity 17 will drive the top plate 21 to move downward during the downward movement. When the positioning block 18 completely enters the movable cavity 17, the lower end surface of the top plate 21 just touches the bottom of the movable cavity 17. The strip 211 and the control gear 23 are in meshing state. When the server 01 judges that the crystal plate at this position is defective, it starts the control driver 22 corresponding to the position to drive the control gear 23 to rotate, and the control gear 23 rotates to drive the top plate 21 protrudes from the top plate outlet 172 to press the push block 141, so that the crystal piece at this position falls out of the frame 1 from the lower crystal piece outlet for manual secondary inspection; the optical inspection of the fixing frame 3 in the present invention ends When it is separated from the light detection part 4 , when the positioning block 18 loses its pressing force, it will be pushed up and protruded out of the light source board 9 under the action of the positioning elastic member 20 . At this time, the top plate 21 will also be pushed upward by the control elastic member 24 . The jacking makes the control gear 23 and the rack 211 disengage. At this time, even if the control gear 23 rotates, the top plate 21 will not be affected, so as to prevent the top plate 21 from protruding under the action of the control gear 23 when the fixing frame 3 moves to the optical detection part 4 The collision between the movable cavity 17 and the fixed frame 3 causes damage to the parts, which helps to prolong the service life of the device; the setting of the pressing portion 191 can not only realize the interference action of the positioning block 18 against the top plate 21, but also realize the action of the movable cavity 17. The upward distance is limited. When the pressing portion 191 is in contact with the positioning support plate 19, the positioning block 18 is at the limit distance that extends upward, so as to ensure that the surface of the positioning block 18 exposed to the outside is the positioning inclined surface 181, and its straight surface will not protrude. out and activities Outside the cavity 17, once the straight surface of the positioning block 18 protrudes out of the movable cavity 17, the fixed frame 3 will not force the positioning block 18 into the movable cavity 17 when it abuts against the straight surface, so as to ensure that the fixed frame 3 abuts against the positioning block 18 only. The positioning block 18 is driven to extend and retract into the movable cavity 17 .

In further detail, the bottom of the movable cavity 17 is provided with an embedded groove 173 for the sliding block 25 to be partially embedded, and the sliding block 25 is embedded in the embedded groove 173 to limit the horizontal displacement of the sliding block 25. When the top plate 21 is pressed down, the sliding block The lower end of 25 will preferentially enter the insert groove 173 when the top plate 21 contacts the bottom of the movable cavity 17. When the sliding block 25 is embedded in the insert groove 173, the insert groove 173 restricts the horizontal movement of the sliding block 25. At this time, when the control gear 23 rotates When the top plate 21 is driven to move outward, the sliding block 25 remains stationary relative to the light source board 9 , which effectively prevents the bending deformation of the control elastic member 24 and prolongs the service life of the control elastic member 24 .

In further detail, the lower end of the top plate 21 is provided with a chute 212 for the sliding block 25 to slide, and the two ends of the sliding block 25 are respectively connected with both ends of the inner wall of the chute 212 through a reset elastic member 26. The reset elastic member 26 is a spring, and when the control gear 23 After losing the driving force to the top plate 21, the top plate 21 will return under the elastic force of the reset elastic members 26 at both ends. There is no need to control the gear 23 to drive the top plate 21 to reset. If the control gear 23 is used to drive the top plate 21 to reset, a higher If the reset distance of the top plate 21 is too short, then the top plate 21 will partially be exposed outside the top plate outlet 172 and collide with the fixing frame 3. If the reset distance of the top plate 21 is too long, the top plate 21 will collide with the inner wall of the movable cavity 17 to cause damage and control of the top plate 21. The overload of the driving member 22 effectively protects the top plate 21 and the control driving member 22 .

In further detail, the bottom of the movable cavity 17 is provided with a touch switch 27, the touch switch 27 is electrically connected with the control driver 22, and the top plate 21 abuts against the touch switch 27 to energize the control driver 22. The touch switch 27 is an existing technology, so it will not be repeated. When the top plate 21 is separated from the touch switch 27, the control driver 22 is powered off, and the touch switch 27 is arranged at the center of the bottom of the movable cavity 17. When the top plate 21 extends out to a certain distance, The tail of the top plate 21 is disengaged from the touch switch 27. At this time, the control driver 22 is powered off. After the top plate 21 loses the engaging force of the control gear 23, it will return to the movable cavity 17 under the elastic force of the reset elastic member 26, thereby preventing the The outward projecting distance of the top plate 21 is too long, and the outward projecting distance of the top plate 21 is relatively accurate, and the outward projecting distance of the top plate 21 will not be affected by the difference in the rotational speed of the control driver 22 .

In further detail, the discharging part 5 includes two bottom rods 28 and a discharging driving member 29 slidably embedded in the frame 1. The discharging driving member 29 is a cylinder, and the frame 1 is provided with a bottom rod chute 30. The rod 28 and the inner wall of the bottom rod chute 30 are connected by a discharge elastic member 31, and the discharge elastic member 31 is a spring. The two bottom rods 28 are connected by a plurality of support frames 32, and the fixed frame 3 slides to the discharge member 5. The support frame 32 is inserted into the light source board slot 12 respectively, the support frame 32 is close to the crystal chip slot 6 side and has a plurality of push parts 321 evenly at the same height as the push block 141, and the bottom rod 28 is far away from the discharge material One end of the elastic member 31 extends to the outside of the electric sliding rail 2 and is connected by the drive plate 33. The discharge drive member 29 is used to drive the drive plate 33 to move back and forth. The discharge drive member 29 is a motor. The frame 1 is provided with a plurality of crystal supply When the discharge drive member 29 drives the drive plate 33 to move to the left, the push portion 321 will interfere with and press the push block 141 at the corresponding position, so that the crystal pieces in the fixing frame 3 can all fall down at the same time. , it does not need to be manually taken out from the fixing frame 3, which facilitates the collection of qualified crystal pieces, saves time and effort, and is easy to operate.

In further detail, the rack 1 is also provided with an automatic loading part, the automatic loading part is used to insert the crystal piece into the crystal piece slot 6 of the fixing frame 3, and the automatic loading part includes a storage box 34, and the storage The box 34 is divided into four equal-volume storage cavities 35 by three partitions, and a discharge channel 351 is correspondingly provided below each storage cavity 35, and the discharge channel 351 is divided into four discharges by three partitions. Port 3511, the size of the discharge port 3511 is adapted to the size of the crystal plate, the inner wall of the discharge channel 351 is arranged in an arc surface, the crystal plate changes from a horizontal state to a vertical state when passing through the discharge channel 351, the number of discharge ports 3511 The distance between it and the discharge port 3511 is consistent with the distribution mode of the crystal chip slot 6 on the fixing frame 3. The vibrator 36 is installed on the side wall of the storage box 34, and the bottom of the storage box 34 is provided with an outlet for controlling the discharge. 3511 open and close loading control assembly, when it is necessary to put crystal chips into the crystal chip slot 6, first put the crystal chips into the four storage chambers 35, and then start the vibrator 36 to make the storage box 34 vibrate, After being vibrated, the crystal sheet in the storage chamber 35 will gradually slide down along the inner wall of the discharge channel 351 to the discharge port 3511. At this time, the discharge port 3511 is closed by the charging control component, and then the fixing frame 3 is placed in the Below the storage box 34, the crystal chip slot 6 is in a one-to-one correspondence with the discharge port 3511. By controlling the charging control component to open the discharge port 3511, the crystal chip in the discharge port 3511 will slide into the crystal chip under the action of gravity. In the slot 6; the vibrator 36 and the inner wall of the discharge channel 351 are arranged in an arc surface, so that the crystal plate in the storage chamber 35 is vibrated and gradually transformed to a vertical state along the inner wall of the discharge channel 351, so that the crystal plate and the The shape of the crystal piece slot 6 is corresponding to ensure that the crystal piece can be accurately inserted into the crystal piece slot 6 to be fixed when it slides out from the discharge port 3511 .

Preferably, the loading control assembly includes a discharge blocking rod 37 disposed below the discharge port 3511 and a support frame 38 disposed on the frame 1. The frame 1 is provided with a slide rail 39, and the support frame 38 can be mounted on the slide rail. 39 slides back and forth, the support frame 38 is provided with a fixing groove 381 for the fixing frame 3 to be embedded in, the discharge channel 351 is provided with an abutting groove 3512 on one side, and the supporting frame 38 is provided with an abutting rod 382 which is inserted and matched with the abutting groove 3512 , the end of the abutting rod 382 is provided with a rubber piece 3821, the frame 1 is provided with a fixing plate 40, the side of the support frame 38 away from the opening of the abutting groove 3512 is elastically connected with the fixing plate 40 by two springs 41, and the fixing frame 3 is embedded in the The fixing slot 381 pushes the fixing frame 3 inwardly, the support frame 38 slides along the slide rail 39 under the action of the fixing frame 3, the spring 41 is compressed, and the discharge stopper 37 slides with the support frame 38 to open the discharge Port 3511, after the discharge port 3511 is completely started, the crystal piece can slide out from the discharge port 3511, and the abutting rod 382 will also move into the abutting groove 3512 with the movement of the support frame 38 to resist the next crystal piece at the exit, Prevent the discharge port 3511 from falling out of multiple crystals continuously, and ensure that only one crystal piece is inserted into one crystal piece slot 6; after the loading is completed, reduce the pressing force on the fixing frame 3, and the spring 41 will rebound to drive The support frame 38 is reset. When the support frame 38 is reset, the discharge stop rod 37 will be reset to the bottom of the discharge port 3511 and closed, and the abutting rod 382 will also be separated from the abutting groove 3512 to release the restriction on the crystal piece and cause it to fall. , the loading action of the fixed frame 3 has been achieved through repeated cycles in this way; the setting of the rubber piece 3821 increases the frictional force when the abutting rod 382 presses the crystal piece, the fixing effect on the crystal piece is good, and the pressing effect is relatively gentle, and it is not easy to Crushed crystals.

In further detail, a cleaning box 42 is arranged below the crystal plate outlet 11. After the crystal plate detected as a defective product falls from the crystal plate outlet 11, it will enter the cleaning box 42 for secondary cleaning, and the stubborn surface of the crystal plate will be cleaned. Remove the stains to avoid the dark shadow on the surface of the crystal sheet caused by stubborn stains, and manually inspect the cleaned crystal sheet to reduce the false detection rate of the crystal sheet.

In further detail, the top of the cleaning box 42 is symmetrically provided with two inclined guide plates 43, and a blanking port 44 is formed between the two guide plates 43. The crystal plate dropped from the crystal plate outlet 11 first falls on the guide plate 43 and As the inclined surface of the guide plate 43 slides toward the blanking port 44 and falls into the cleaning box 42, the water splashed in the cleaning box 42 is prevented from being directly dropped into the cleaning box 42. Two ultrasonic generators for ultrasonically cleaning the crystal pieces in the cleaning box 42 are embedded on the side wall.

In further detail, the cleaning box 42 is provided with a screen 45, the lower end of the screen 45 is elastically connected to the bottom of the cleaning box 42 through four springs, and a foam part is provided below the screen 45. The air intake pipe 46 at the bottom of 42 and the air pump 461 for filling gas into the air intake pipe 46 are connected with an air intake turntable 47 above the air intake pipe 46, and the air intake pipe 46 is communicated with the air intake turntable 47. A plurality of foaming pipes 48 are evenly arranged along its circumferential direction. The foaming pipes 48 are sequentially provided with a plurality of upwardly inclined air outlet pipes 49 along its length direction. The air outlet pipes 49 are used to generate air bubbles. When the air bubbles, the foaming tube 48 will be driven to rotate, and the plurality of foaming tubes 48 will generate upward water flow to promote the screen 45 and the crystal pieces on the screen 45 to float up and down. It is cut into multiple fine bubbles. The fine bubbles are better for improving the effect of ultrasonic cleaning. The surface of the crystal plate is not easy to produce "cavitation" corrosion under the long-term ultrasonic cleaning, and the cleaning effect of the stubborn stains on the surface of the crystal plate is stronger. .

In further detail, the air intake turntable 47 is sealed and plugged into the upper end of the air intake pipe 46, and the upper end of the air intake pipe 46 is provided with two limiting flanges 50 at intervals to limit the distance between the up and down movements of the air intake turntable 47, and the top of the air intake pipe 46 is provided with a ring of seals. When the air pump 461 fills the air inlet pipe 46 with gas, the increase in air pressure in the air inlet pipe 46 will drive the air inlet turntable 47 to lift up, and the gas It is ejected from the air outlet pipe 49; when the air pump 461 stops delivering gas, the air pressure in the air inlet pipe 46 will gradually decrease as the gas is discharged, and the air intake turntable 47 will move downward under the action of gravity until it is in contact with the sealing ring 51. In order to achieve sealing, effectively prevent the cleaning agent from entering the air inlet pipe 46, and this setting helps to ensure that the gas pressure discharged from the air outlet pipe 49 is strong, thereby ensuring the rotational speed of the air inlet turntable 47 to ensure the impact force of the upwardly generated water flow. , to ensure the frequency of up and down movements of the crystal plate and the screen 45 .

In further detail, the outer side of the spring connecting the screen 45 and the cleaning box 42 is also sleeved with a limit post 52, the lower end of the limit post 52 is welded on the inner wall of the cleaning box 42, and the upper end and the air intake turntable 47 rise to the highest height when the air outlet pipe. The height of 49 is the same, so as to effectively prevent the screen 45 from falling too much and colliding with the air outlet pipe 49 when it moves downward, so as to ensure the normal operation of the equipment. The touch switches on the top of the limit post 52 are all subjected to touch signals and the air pump 461 is stopped when the continuous touch time exceeds 10s, thereby preventing too many crystal chips in the cleaning box 42, ensuring the cleaning effect of the crystal chips and ensuring the screen mesh. 42 can keep up and down action to cut air bubbles while working.

Preferably, an alarm is installed on the outside of the cleaning box 42, and the alarm is electrically connected to a plurality of touch switches. When all the touch switches at the top of the limit posts 52 receive touch signals and the continuous touch time exceeds 10s, the The alarm is activated to remind the operator to remove the crystal sheet in the cleaning box 42 in time.

In further detail, in order to facilitate taking out the cleaned wafers from the cleaning box 42 , the cleaning box 42 is further provided with a discharging component.

Preferably, the discharge assembly includes a discharge member 55 disposed in the middle of the cleaning box 42 and a receiving box 53 attached to the side wall of the cleaning box 42. The cleaning box 42 is provided with a material taking port 54 on the side close to the receiving box 53. , the lower edge of the reclaiming port 54 is flat with the upper end surface of the screen 45 when it collides with the limit post 52, the material discharge piece 55 is sealed and inserted into the reclaiming port 54, and the cleaning box 42 is embedded in the inner wall of the side away from the reclaiming port 54. There is a pusher 56 that is the same as the discharge member 55. The two ends of the discharge member 55 and the pusher 56 are fixedly connected by two connecting plates 57. The inner walls of the cleaning box 42 are provided with slides for the connecting plates 57 to slide. The plate groove 58, the outer side wall of the discharging piece 55 is provided with a handrail 59, the material receiving box 53 and the lower edge of the material taking port 54 are arranged at the same height, the material receiving box 53 has a water receiving cavity, and the material receiving box 53 and the cleaning box 42 pass through The suction pump 60 is connected to each other, and a material receiving filter screen 61 is arranged in the middle of the receiving box 53. When the discharging member 55 is pulled outward, the lower end of the connecting plate 57 is sealed and slidingly matched with the upper ends of the two side walls of the receiving box 53. When the crystal sheet in 42 is taken out, pull the discharge member 55 outward to open the reclaiming port 54, and the cleaning agent in the cleaning box 42 higher than the lower edge of the reclaiming port 54 will flow out from the reclaiming port 54 and fall to the receiving box. Inside 53 , the crystal pieces brought out by the water flow will be filtered by the receiving filter 61 , and then continue to pull the discharge member 55 to drive the ejecting member 56 to slide along the upper surface of the screen 45 to remove the screen 45 . The crystal piece is pushed out into the receiving box 53, so as to realize the reclaiming of the crystal piece, which is more convenient than the traditional use of the filter basket to take the material, and the crystal piece can be placed on the receiving filter screen 61 after being taken out. ; After taking the crystal sheet out of the cleaning box 42, push the discharge piece 55 back into the cleaning box 42 to seal the reclaiming port 54 and start the pump 60 to pump the cleaning agent in the receiving box 53 back to the cleaning box The crystals that fall later can be cleaned within 42 hours; the problem of cleaning agent splashing during reclaiming can be effectively prevented by horizontal reclaiming, the cleaning agent can be reused, reducing the cost of use, and the crystals can be dried after being taken out, so that the When the crystal is inspected manually, it is not easy to be stained with cleaning agents, which reduces environmental pollution.

Embodiment 2

A method for improving crystal surface processing precision for crystal cleaning, comprising the following steps:

a. Pre-cleaning: place the crystal wafer in pure water for ultrasonic or megasonic heating pre-cleaning;

b. Pickling: place the pre-cleaned wafers in a hydrochloric acid solution for pickling;

c. Acid removal: place the pickled crystal in a crystal cleaning machine for cleaning to remove the acid solution and dirt on the surface;

d. Drying: place the crystal sheet after deacidification in a dryer for drying;

e. Inspection: put the dried crystal chips into the crystal inspection device for inspection, and screen out the crystal chips with surface defects;

The temperature of the pure water used in step a was 70°C.

The concentration of hydrochloric acid used in step b is 20%.

In step b, the crystal pickling time is 60s.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which the present invention pertains can make various modifications or additions to the described specific embodiments or substitute in similar manners, but will not deviate from the spirit of the present invention or go beyond the definitions of the appended claims range.

Although the term is used extensively in this paper, the possibility of using other terms is not excluded. These terms are used only to more conveniently describe and explain the essence of the present invention; it is contrary to the spirit of the present invention to interpret them as any kind of additional limitation.

Claims (10)

1. A method for improving the processing precision of crystal surface for crystal cleaning is characterized in that: the method comprises the following steps:

a. pre-cleaning: putting the crystal wafer into pure water to carry out ultrasonic or megasonic heating pre-cleaning;

b. acid washing: placing the pre-cleaned quartz plate in a hydrochloric acid solution for acid cleaning;

c. acid removal: cleaning the washed crystal plate in a crystal cleaning machine to remove surface acid solution and dirt;

d. drying: drying the quartz plate after acid removal in a dryer;

e. and (4) checking: putting the dried crystal plate into a crystal inspection device for inspection, and screening out the crystal plate with surface defects;

wherein, the crystal inspection device in step e is characterized in that: comprises a frame (1), an electric slide rail (2) is arranged on the frame (1), a fixing frame (3), a light inspection component (4) and a discharge component (5) are sequentially arranged on the electric slide rail (2) from the right to the left, the fixing frame (3) is detachably arranged on the electric slide rail (2), a plurality of vertically arranged crystal wafer slots (6) are arranged on the fixing frame (3) along the sliding direction thereof, the crystal wafer slots (6) are arranged into a plurality of groups along the length direction of the fixing frame (3), the light inspection component (4) comprises a light shield (7) and a plurality of groups of light inspection parts (8), each light inspection part (8) comprises a light source plate (9) and a light source shooting plate (10), a light source (91) is arranged on the light source plate (9), a plurality of cameras (101) are uniformly arranged on the light source shooting plate (10), and the light source (91) and the cameras (101) are oppositely arranged, the photo that camera (101) was shot only has two kinds of colours of black and white, light source board (9) and photograph and seted up crystal plate export (11) on frame (1) between board (10), mount (3) are located crystal plate slot (6) both sides and have seted up light source board draw-in groove (12) respectively and photograph system integrated circuit board groove (13), crystal plate slot (6) both sides communicate with light source board draw-in groove (12) and photograph system integrated circuit board groove (13) respectively, both ends about mount (3) are run through in crystal plate slot (6), crystal plate slot (6) lower extreme is equipped with spacing subassembly, be equipped with on frame (9) and be used for controlling spacing subassembly and relieve the spacing control assembly to the crystal plate, be equipped with respectively on frame (1) with camera (101) and control assembly communication connection's server (01).

2. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 1, wherein: the temperature of the pure water used in the step a is 60-70 ℃.

3. The method for improving the surface finish accuracy of crystal according to claim 1, wherein the concentration of hydrochloric acid used in step b is 5% ~ 20%.

4. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 1, wherein: and the pickling time of the crystal water in the step b is 20-60 s.

5. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 1, wherein: the limiting component comprises a limiting piece (14) and a limiting groove (15), the limiting groove (15) comprises a first limiting groove (151) and a second limiting groove (152) which are respectively arranged at two sides of the crystal plate slot (6), the limiting piece (14) comprises a push block (141) and two supporting parts (142), the two supporting parts (142) are respectively arranged at two ends of the crystal plate slot (6), a baffle plate (16) is arranged at the joint of the first limit groove (151) and the crystal plate slot (6), the push block (141) is arranged in the first limit groove (151) in a sliding manner and is connected with the baffle (16) through a plurality of elastic pieces (161), the supporting part (142) is arranged in the second limiting groove (152) in a sliding manner, the supporting part (142) is connected with the push block (141) through a connecting part (143), the elastic piece (161) pushes the push block (141) outwards so that the supporting part (142) slides from the second limiting groove (152) to the crystal plate slot (6) to support the crystal plate.

6. A method for improving the surface finish accuracy of crystal according to claim 5, wherein: the light source module is characterized in that a plurality of movable cavities (17) are formed in the top of the light source plate (9), positioning blocks (18) capable of sliding up and down are arranged in the movable cavities (17), a positioning inclined plane (181) is arranged on the right side of the top of each positioning block (18), a positioning support plate (19) is horizontally arranged in the middle of each movable cavity (17), each positioning block (18) is connected with the corresponding positioning support plate (19) through a positioning elastic piece (20), each control assembly comprises a top plate (21), a control driving piece (22) and a control gear (23), the top plate (21) can move up and down and is arranged below the corresponding positioning support plate (19), pressing portions (191) matched with the top plate (21) in an abutting mode are arranged below the bottom of each positioning block (18) and extend to the corresponding positioning support plate (19), the lower ends of the top plates (21) are connected with the bottom walls of the movable cavities (17) through control elastic pieces (24, activity chamber (17) bottom left side intercommunication has gear groove (171), control gear (23) are installed in gear groove (171) and the part stretches into in activity chamber (17), roof (21) are equipped with rather than meshing driven rack (211) with control gear (23) contact jaw, roof export (172) have been seted up near shooting plate (10) one side in activity chamber (17) bottom, server (01) and control driving piece (22) communication connection.

7. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 6, wherein: the bottom of the movable cavity (17) is provided with an embedded groove (173) for the sliding block (25) to be partially embedded, and the sliding block (25) is embedded into the embedded groove (173) to limit the horizontal displacement of the sliding block (25).

8. A method for improving the surface finish accuracy of crystal according to claim 7, wherein: the gliding spout (212) of confession sliding block (25) are seted up to roof (21) lower extreme, sliding block (25) both ends are connected with spout (212) inner wall both ends through elastic component (26) that reset respectively.

9. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 8, wherein: activity chamber (17) bottom is equipped with touches and presses switch (27), touch and press switch (27) and control driving piece (22) electric connection, roof (21) are contradicted and are touched and press switch (27) so that control driving piece (22) circular telegram, work as roof (21) break away from when touching and press switch (27), control driving piece (22) outage.

10. A method for improving the surface finish accuracy of a crystal for crystal cleaning according to claim 9, wherein: the discharging part (5) comprises two bottom rods (28) and a discharging driving piece (29) which are embedded in the rack (1) in a sliding way, a bottom rod sliding groove (30) is arranged on the frame (1), the bottom rod (28) is connected with the inner wall of the bottom rod sliding groove (30) through a discharging elastic piece (31), the two bottom rods (28) are connected through a plurality of supporting frames (32), when the fixed frame (3) slides to the discharging part (5), the supporting frames (32) are respectively inserted into the light source board clamping grooves (12), a plurality of pushing parts (321) are uniformly arranged at the positions, close to one side of the crystal plate inserting grooves (6) and at the same height with the pushing blocks (141), of the supporting frames (32), one end of the bottom rod (28) far away from the discharging elastic piece (31) extends out of the electric slide rail (2) and is connected with the electric slide rail through a driving plate (33), the discharging driving piece (29) is used for driving the driving plate (33) to move back and forth.

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